CN1319847C - Electrothermal-driven flexile micro-gripper - Google Patents
Electrothermal-driven flexile micro-gripper Download PDFInfo
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- CN1319847C CN1319847C CNB2004100206759A CN200410020675A CN1319847C CN 1319847 C CN1319847 C CN 1319847C CN B2004100206759 A CNB2004100206759 A CN B2004100206759A CN 200410020675 A CN200410020675 A CN 200410020675A CN 1319847 C CN1319847 C CN 1319847C
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- 235000008499 Canella winterana Nutrition 0.000 claims description 2
- 244000080208 Canella winterana Species 0.000 claims description 2
- 241000276425 Xiphophorus maculatus Species 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 229940017545 cinnamon bark Drugs 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 238000005485 electric heating Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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Abstract
The present invention relates to an electrothermal driving flexile micro gripper which belongs to the class of micro executors in the field of micro electromechanical systems. The electrothermal driving flexile micro gripper comprises a driving part and a gripper body, wherein the driving part is a V-shaped beam array, the gripper body of the micro gripper is an integrated flexible structure which is composed of a gripper body fixing part, an electrode, flexible hinges, a connecting rod, gripper arms, a holding end, the V-shaped beam array and different geometric shapes at the upper parts and the lower parts of the middle of the gripper body without any assembly. The upper parts of the middle of the gripper body are connected by two semi-circular rings through three structures in the shape of a rib plate and connected with the lower parts of the middle of the rod-shaped gripper body, and the upper parts and the lower parts of the middle of the gripper body can be changed into various shapes. The micro gripper has the advantages of compact structure, simple control and large output shift, and can be used for micro operation and micro assembly.
Description
The flexible micro-gripper of a kind of electrothermal drive of technical field the present invention belongs to the microactrator class in the MEMS field.
The background technology micro-gripper is a Primary Component in the MEMS field.In the microoperation and little assembling of some small machine components, electronic component, biological cell etc., used device is the Shi micro-gripper all.At present the caliper structure of micro-gripper mainly contains two big classes: i.e. rigid structure and flexible structure, adopt traditional rigid structure as caliper, general volume is bigger, make trouble, assembling is difficulty relatively, and flexible structure just in time can overcome the deficiency of rigid structure, and can realize little manufacturing of caliper by means of little technology, can produce and realize the integrated manufacturing of driver element in batches, and be focusing more on some functional materials of employing at the design aspect of flexible structure, as piezoelectric, marmem, magnetostriction materials etc.; The driving of micro-gripper has various ways, comprising: static driving, Piezoelectric Driving, Electromagnetic Drive, air pressure driving, electrothermal drive etc., it is the most succinct that electrothermal drive mode and alternate manner are compared, and big power output can be provided, and is easy to integrated.
Existing flexible micro-gripper structure is more to concentrate on the function of use material, but often is subjected to the restriction of material preparation.The flexible micro-gripper of electrothermal drive has complicated geometry mostly, and the nuance of structure will produce different effects.Relevant Dian Re drives the research of micro-gripper aspect, does not find pertinent literature in Chinese patent.In the foreign patent, Japan Patent static drives formula micro-gripper (patent No. JP7052072), though input is a voltage, its driving force is the electrostatic force between the electrode, and driving force of the present invention is that caliper is subjected to a joule thermogenetic thermal strain.The micro-gripper structure that people such as Young Seek Oh have delivered topology optimization design and made amendment in the paper of international academic conference (2003 ASME International Mechanical Engineering Congress), and add electrothermal drive, driver is the V-beam array, be easy to generate distortion during the micro-gripper clamping object mentioned in the document, when driving voltage is 5v, the jaw displacement only is that displacement is little about 10um.People such as E.V.Bordatchev are at international academic conference (Proceedings of the International Conference onMEMS, NANOand Smart Systems, 2003) delivered based on electrothermal principle in the paper and designed, and the nickel material De micro-gripper of processing, the temperature height that its heat drives, driving voltage is big, and physical dimension is bigger.
Summary of the invention the objective of the invention is to overcome the deficiencies in the prior art, provides a kind of delicate structure trickle, and control is simple, is easy to integrated; The delivery efficiency height, the flexible micro-gripper of the electrothermal drive that the jaw displacement is big.
The technical solution used in the present invention is the flexible micro-gripper of a kind of electrothermal drive, partly is made up of driving and caliper, and drive part is a V-beam array 9.The micro-clamp structure is an overall flexibility structure, and it is by caliper standing part 1a, 1b, electrode 2a, 2b, three couples of flexible hinge 3a, 3b; 4a, 4b; 6a, 6b; Connecting rod 5a, 5b, tong arm 7a, 7b, bare terminal end 8a, 8b, V-beam array 9, caliper middle upper portion 11, bottom 12 different geometrical bodies constitute, and need not any assembling.V-beam array 9 is the electrothermal drive part, and its stiff end 1a, 1b also is the stiff end of caliper.Tong arm 7a, 7b are streamlined, and its front end is bare terminal end 8a, 8b, and the rear end is linked to each other with caliper standing part 1a, 1b by flexible link 3a, 3b, link to each other with the end of connecting rod 5a, 5b by flexible hinge 4a, 4b simultaneously; The other end of connecting rod 5a, 5b links to each other with caliper middle upper portion 11 by flexible hinge 6a, 6b.The caliper middle upper portion links to each other with caliper middle lower portion 12, and the caliper middle lower portion links to each other with drive part 9; Electrode 2a, 2b are positioned on the surface of caliper standing part 1a, 1b.Three couples of flexible hinge 3a, 3b; 4a, 4b; The geometry of 6a, 6b is the elongated rod-shaped structure, and caliper middle upper portion 11 is linked to each other by the tibet cinnamon bark platy structure by two semi-annular shapes and links to each other with shaft-like caliper middle lower portion 12.
The caliper middle upper portion 11 of flexible micro-clamp is a semicircular structure 15, or triangular structure 17, or the circulus 14 of two or more triangle formation, or rectangular configuration, or the structure with certain rigidity of the multiple shape of shape of winding up; The caliper middle lower portion is a rectangle 16, or convex polygon 12, or the rigid structure that can transmit motion that combines of several convex polygon.
The number of the V-beam array of flexible micro-gripper from one to a plurality of variations, the direction of V-beam array also changes, when for " V " shape 13 just, what bare terminal end was realized is closed action, when the direction of V-beam array when falling " V " shape 9, what bare terminal end was realized is open action, and the distance L of bare terminal end should be decided on clamping object size, but must L 〉=0.
Effect of the present invention is to use electrothermal method to drive micro-gripper, control is simple, easily row, and the caliper of micro-clamp part and drive part are one flexible whole, need not assembling, make simply, can be applied to MEMS field, micro robotics field etc. and carry out microoperation, little assembling etc.
Description of drawings Fig. 1 is the structure chart of micro-gripper.Wherein: 1a, 1b-caliper stiff end, 2a, 2b-electrode, 3a, 3b-flexible link, the flexible hinge of 4a, 4b-, 5a, 5b-connecting rod, the flexible hinge of 6a, 6b-, 7a, 7b-tong arm, 8a, 8b-bare terminal end; 9-V shape electrothermal drive part, the output of 10-drive part, 11-caliper mid portion one, 12-caliper mid portion two.
The equivalent mechanism sketch of Fig. 2 Shi micro-gripper caliper structure.Wherein: A and A '-hinge, B and B '-hinge, D and D '-hinge, ABC and A ' B ' C '-member, BD and B ' D '-member, DED '-member, FG-member, H-moving sets.
Fig. 3 is the graph of relation of the clamping direction displacement of input voltage and bare terminal end (one-sided).
Fig. 4 is the displacement of bare terminal end (one-sided) and the graph of relation of chucking power.
Fig. 5 is that input voltage is Yu the graph of relation of micro-gripper maximum surface temperature.
Fig. 6 is the structure chart of just " V " ellbeam array of micro-clamp, and wherein: 13-is " V " ellbeam array just.
Fig. 7 is that micro-clamp caliper middle upper portion is the structure chart of triangular ring, wherein: 14-triangular ring caliper middle upper portion.
Fig. 8 is that the caliper middle upper portion of micro-clamp is the structure chart of rectangle for semicircle, middle lower portion, wherein: the semicircle caliper middle upper portion of 15-; 16-rectangle caliper middle lower portion.
Fig. 9 is that the caliper middle upper portion of micro-clamp is that triangle, middle lower portion are the polygonal structure chart of combination, wherein: 15-triangle caliper middle upper portion; 16-combination polygon caliper middle lower portion.
The specific embodiment specifies embodiment below in conjunction with accompanying drawing.In the accompanying drawing 1 after adding suitable voltage between electrode 2a, the 2b, V-arrangement electrothermal drive part 9 has electric current to pass through, because of high resistant is given birth to heat, make the beam expansion elongation of inclination, output 10 at the V-arrangement drive part produces certain output displacement and driving force, this or as the input displacement and the input power of caliper part, mid portion 12,11 and flexible hinge 6a, 6b and connecting rod 5a, 5b by caliper, make flexible hinge 4a, 4b produce distortion, the small deformation at flexible hinge 4a, 4b place or make bare terminal end 8a, the 8b of tong arm 7a, 7b produce bigger displacement; Simultaneously, between two electrodes after the making alive, also constitute the loop in the caliper part, the mid portion 11,12 of caliper can be heated and produce dilatancy, cause that by flexible hinge 6a, 6b flexible hinge 4a, 4b produce distortion, thereby make bare terminal end 8a, the 8b of tong arm produce displacement that the output displacement of this clamp structure is to be formed by two parts displacement series connection superposition thus, less input voltage just can be realized bigger output displacement, has realized the action of opening of bare terminal end.
Micro-gripper caliper structural equivalents is in plane six-bar linkage, and accompanying drawing 2 is schematic diagram of mechanisms of plane six-bar linkage, and in conjunction with the accompanying drawings 1 and the corresponding relation of accompanying drawing 2 explanation between them. Tong arm 7a, 7b are equivalent to member ABC and A ' B ' C ', flexible link 3a, 3b are equivalent to hinge A and A ', flexible hinge 4a, 4b are equivalent to hinge B and B ', bar 5a, 5b are equivalent to member BD and B ' D ', and flexible hinge 6a, 6b are equivalent to hinge D and D ', and member DED ' is equivalent to caliper middle upper portion 11, caliper middle lower portion 12 is equivalent to FG, caliper middle lower portion 12 links to each other with drive part 9, and its annexation is equivalent to moving sets H, and it is frame that the standing part of caliper is equivalent to fixed beam.
Accompanying drawing 3, accompanying drawing 4 and accompanying drawing 5 have illustrated the performance characteristic that Gai micro-gripper possessed from measuring.When institute's making alive is from 0 volt to 5 volts between accompanying drawing 3 expression electrodes, the change in displacement situation of one-sided bare terminal end, when institute's making alive was 5 volts, the maximum displacement of one-sided bare terminal end reached 110um; The chucking power of accompanying drawing 4 expression bare terminal ends is with the situation of change of displacement, and when the displacement of one-sided bare terminal end was 100um, the chucking power that is produced can reach 3.5mN; The maximum temperature on accompanying drawing 5 expression caliper surfaces is with the situation of change of voltage, and when institute's making alive was 5 volts, hot face temperature was 1217 ℃.
Several micro-clamp structures after accompanying drawing 6, accompanying drawing 7, accompanying drawing 8 and accompanying drawing 9 expression caliper mid portions change, these micro-clamps all can be used in microoperation and the little assembling.
Claims (3)
1, the flexible micro-clamp of a kind of electrothermal drive, partly form by driving and caliper, drive part is V-beam array [9], it is characterized in that: the micro-clamp structure is an overall flexibility structure, and it is by caliper standing part [1a, 1b], electrode [2a, 2b], three couples of flexible hinge [3a, 3b; 4a, 4b; 6a, 6b], connecting rod [5a, 5b], flexible hinge [6a, 6b], tong arm [7a, 7b], bare terminal end [8a, 8b], V-beam array [9], caliper middle upper portion [11], bottom [12] different geometrical body constitute, and need not any assembling; V-beam array [9] is the electrothermal drive part, and its stiff end [1a, 1b] also is the stiff end of caliper; Tong arm [7a, 7b] is streamlined, its front end is bare terminal end [8a, 8b], the rear end is linked to each other with caliper standing part [1a, 1b] by flexible link [3a, 3b], link to each other with an end of connecting rod [5a, 5b] by flexible hinge [4a, 4b] simultaneously, the other end of connecting rod [5a, 5b] links to each other with caliper middle upper portion [11] by flexible hinge [6a, 6b], the caliper middle upper portion links to each other with caliper middle lower portion [12], and the caliper middle lower portion links to each other with drive part [9]; Electrode [2a, 2b] is positioned at caliper standing part [1a ,] b] the surface on, three couples of flexible hinge [3a, 3b; 4a, 4b; 6a, 6b] geometry be the elongated rod-shaped structure, caliper middle upper portion [11] is linked to each other by the tibet cinnamon bark platy structure by two semi-annular shapes and links to each other with shaft-like caliper middle lower portion [12].
2, the flexible micro-clamp of a kind of electrothermal drive described in claim 1, caliper middle upper portion [11] is semicircular structure [15], or triangular structure [17], or the circulus [14] of two or more triangles formation, or rectangular configuration, or the structure with certain rigidity of the multiple shape of shape of winding up; The caliper middle lower portion is rectangle [16], or convex polygon [12], or the rigid structure that can transmit motion that combines of several convex polygon.
3, a kind of electric heating drive micro-clamp described in claim 1 or 2, the number of V-beam array from one to a plurality of variations, the direction of V-beam array also changes, when for " V " shape [13] just, what bare terminal end was realized is closed action, when the direction of V-beam array when falling " V " shape [9], what bare terminal end was realized is open action, the distance L of bare terminal end should be decided on clamping object size, but must L 〉=0.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100206759A CN1319847C (en) | 2004-06-04 | 2004-06-04 | Electrothermal-driven flexile micro-gripper |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004100206759A CN1319847C (en) | 2004-06-04 | 2004-06-04 | Electrothermal-driven flexile micro-gripper |
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| CN1704329A CN1704329A (en) | 2005-12-07 |
| CN1319847C true CN1319847C (en) | 2007-06-06 |
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| CNB2004100206759A Expired - Fee Related CN1319847C (en) | 2004-06-04 | 2004-06-04 | Electrothermal-driven flexile micro-gripper |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100443266C (en) * | 2006-09-28 | 2008-12-17 | 上海交通大学 | Heat driven SU-8 base micro pliers with embedded nickel wire in double diamond structure |
| CN101837945A (en) * | 2010-03-22 | 2010-09-22 | 大连理工大学 | Encapsulating device of electrothermal microclamp |
| CN101857187B (en) * | 2010-05-12 | 2015-02-18 | 大连理工大学 | Flexible electric heating micro gripper with parallel opening-closing jaw |
| CN103288035B (en) * | 2013-06-05 | 2017-02-08 | 河南工业大学 | Silicon micro plane flexible connecting rod mechanism manufactured on semiconductor chip |
| CN103909478B (en) * | 2014-04-09 | 2016-01-20 | 西安电子科技大学 | A kind of flexibility for narrow operating spaces cuts off clamp and using method |
| CN112264943B (en) * | 2020-09-09 | 2021-06-08 | 北京理工大学 | Bionic micro clamp based on vascularization spiral artificial muscle drive |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0752072A (en) * | 1993-08-20 | 1995-02-28 | Fuji Electric Corp Res & Dev Ltd | Electrostatic drive type microgripper |
| JPH0890478A (en) * | 1994-09-29 | 1996-04-09 | Shimadzu Corp | Microgrip |
| US5538305A (en) * | 1991-11-27 | 1996-07-23 | Microscience Group, Inc. | Microgripper |
| CN1376631A (en) * | 2001-12-07 | 2002-10-30 | 清华大学 | Miniature manipulate with piezoelectric-type flexible drive and adjustable range |
-
2004
- 2004-06-04 CN CNB2004100206759A patent/CN1319847C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5538305A (en) * | 1991-11-27 | 1996-07-23 | Microscience Group, Inc. | Microgripper |
| JPH0752072A (en) * | 1993-08-20 | 1995-02-28 | Fuji Electric Corp Res & Dev Ltd | Electrostatic drive type microgripper |
| JPH0890478A (en) * | 1994-09-29 | 1996-04-09 | Shimadzu Corp | Microgrip |
| CN1376631A (en) * | 2001-12-07 | 2002-10-30 | 清华大学 | Miniature manipulate with piezoelectric-type flexible drive and adjustable range |
Non-Patent Citations (3)
| Title |
|---|
| V型电致热微驱动器的力学特性分析 张永宁等，微纳电子技术，第40卷第5期 2003 * |
| V型电致热微驱动器的力学特性分析 张永宁等，微纳电子技术，第40卷第5期 2003;微夹钳研究的进展与展望 张培玉等，光学精密工程，第8卷第3期 2000 * |
| 微夹钳研究的进展与展望 张培玉等，光学精密工程，第8卷第3期 2000 * |
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