CN107877487B - SU-8 compliant electrothermal drive micro-gripper with parallel opening and closing ports - Google Patents
SU-8 compliant electrothermal drive micro-gripper with parallel opening and closing ports Download PDFInfo
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- CN107877487B CN107877487B CN201711358697.XA CN201711358697A CN107877487B CN 107877487 B CN107877487 B CN 107877487B CN 201711358697 A CN201711358697 A CN 201711358697A CN 107877487 B CN107877487 B CN 107877487B
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- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
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Abstract
The invention discloses an SU-8 compliant electrothermal driving micro-gripper with parallel opening and closing ports, which consists of a driving part and a gripping part. Wherein the driving part consists of a driver beam (1), a driver shuttle (2) and an anchor area, and the anchor area consists of a symmetrical anchor area a (4) and an anchor area b (4'); the clamping part consists of a Z-shaped beam structure connecting rod (3) and a clamping device mechanism with completely symmetrical left and right sides; the gripping part is fixedly connected to the drive part via a drive shuttle (2). The port of the micro-gripper can realize parallel opening and closing movement, and can more easily operate tiny objects and cells; the driver and the clamping mechanism part are of an integral structure, and SU-8 integral processing is adopted, so that the displacement of a clamping port is improved; the micro-gripper has simple and compact structure, is easy to be micro-machined, and improves the operation precision and reliability.
Description
Technical Field
The invention belongs to a micro actuator in the technical field of micro electro mechanical systems, which can operate operation objects such as tiny objects, cells and the like.
Background
The micro-operation technology is an important component in the field of micro-electro-mechanical systems, and the micro-clamper is an interface between a micro-operation system and an operated object (such as a micro device, a cell and the like), and plays a key role in micro-operation and micro-assembly. The research and development of micro-gripper suitable for micro-object operation is the key to realize the application of micro-operation technology from experiment step to experiment step.
Currently, the structure of the micro-gripper is divided into a compliant structure and a rigid structure. The rigid gripper is a structure formed by assembling each rod piece of the gripper through a rigid hinge, has high requirements on assembly precision, is difficult to miniaturize, and causes difficulty on high-precision operation. The flexible structure is characterized in that rigid hinge connection is converted into a flexible hinge, movement and force transmission are generated through deformation of materials of the flexible hinge, integrated processing is achieved, assembly is not needed, and miniaturization is easy to achieve. And because the assembly of a rigid hinge is omitted, the device has the advantages of no friction, no need of lubrication and high movement precision.
The driving method of the micro-gripper comprises electrostatic, electromagnetic, piezoelectric, shape memory alloy and electrothermal. Compared with other driving modes, the electrothermal driving has the advantages of simple and compact form, easiness in integration and processing, simplicity in control, larger driving displacement and force and the like.
The micro-actuator and clamping structure can be made of various materials such as monocrystalline silicon, polycrystalline silicon, nickel, SU-8 photoresist, etc. according to the micro-electro-mechanical manufacturing process. The SU-8 has the characteristic of high thermal expansion coefficient and low Young modulus, and can increase the driving displacement and reduce the rigidity of the flexible clamping mechanism, so that the final clamping displacement is increased. The paper "A novel SU-8electrothermal microorganic micropropagated on the type synthesis of the kinetic method and the chemical mechanical method" published by Jinkui Chu, Ran Zhang, and Zhaopeng Chen in 2011, at page 21, 054030 of the International Journal of commerce, Journal of Micromechanics and Microengineering, uses SU-8 gel bulk process electrothermal driven micro-gripper and sputter a copper layer on the driving portion to achieve the drive, well applicable to micromanipulation.
From the practical operation process, if the ports of the gripper can realize parallel opening and closing movement, the tiny objects can be gripped more easily and effectively. Currently, most grippers rotate during the gripping process. MohdNahrul MohdZubir, Bijan Shirinzadeh and Yanling Tian in International academic journal, Mechanism and machine theory, 2009, 44, pp 2248-2264, published a paper of A new design of piezoelectric composition-based micro controller for micro-manipulation. Compared with the prior art, the clamp holder is formed by linear cutting by adopting the piezoelectric driver, so that the whole size is larger, and the operation of smaller and more tiny objects (such as cells) cannot be realized. The invention relates to a flexible electric heating micro clamp with parallel opening and closing jaws, which can realize parallel operation of the ports of a clamp holder and is also an electric heating driving and flexible structure, and adopts a micro electro mechanical processing technology, so that the whole size can be smaller, but the clamp holder structure relates to a plurality of complicated connecting rod transmission structures, if the whole size is processed by SU-8 materials, the structure complexity and the extremely small space between rod pieces can not further reduce the structure, and high-precision processing equipment is expensive, so the processing cost is multiplied. In addition, due to the complexity of the structure, the processing failure rate is multiplied; the flexible hinge is excessively used, resulting in a decrease in reliability in the micro-operation. In the invention, the flexible clamping mechanism ensures the parallel opening and closing of the clamping ports by using a rectangular structure, and the simple Z-shaped beam is used for connecting the driver and the clamping arm, thereby realizing the conversion from the driving linear displacement to the operation clamping action. And the integrated processing of SU-8 photoresist is easier, so that the clamping displacement is further improved. In addition, the invention has simple structure, is easy to process the micro gripper with smaller size, thereby realizing the operation of objects with smaller size, and the gripper has simple and compact structure and improves the operation reliability because the number of the flexible hinges is less.
Disclosure of Invention
The invention aims to solve the technical problem of the prior art and provides an SU-8electrothermal driving flexible clamper which has a simple and novel structure and can realize parallel opening and closing of ports.
In order to achieve the purpose, the invention adopts the technical scheme that the SU-8 compliant electrothermal driving micro-gripper with parallel opening and closing ports consists of a driving part and a gripping part. Wherein the driving part consists of a driver beam (1), a driver shuttle (2) and an anchor area, and the anchor area consists of a symmetrical anchor area a (4) and an anchor area b (4'); the clamping part consists of a Z-shaped beam structure connecting rod (3) and a clamping device mechanism with completely symmetrical left and right sides; the gripping part is fixedly connected to the drive part via a drive shuttle (2).
The driver shuttle (2) is divided into an upper half part and a lower half part, and the lower half part of the driver shuttle (2) is fixedly connected with the anchor area through a driver beam (1) to form a driving part of the micro gripper. The upper half part of the driver shuttle (2) is fixedly connected with a gripper mechanism through a Z-shaped beam structure connecting rod (3), and the gripper mechanism is fixedly connected on an anchor area to form a clamping part of the micro gripper.
The driver beams (1) are in the form of an array arrangement, the driver beams (1) of the array arrangement, together with the driver shuttle (2) and the anchor area, constitute the driving part of the micro gripper; after the integral structure is made of SU-8, copper layers are sputtered on the upper surface and the lower surface of the driving part. The drive beams (1) arranged in an array are fixed at both ends between the drive shuttle (2) and the anchor area a (4) and between the drive shuttle (2) and the anchor area b (4').
The structure of the clamp holder is a bilaterally symmetrical compliant mechanism, and the left arm and the right arm of the clamp holder are respectively connected with a rectangular compliant mechanism from the anchor areas (4, 4'). The rectangular compliant mechanism consists of a clamp holder rectangular structure connecting rod, a movable platform and four compliant hinges.
The anchor area a (4) is fixedly connected with the first compliant hinge a (5) and the first compliant hinge b (6). The first flexible hinge a (5) is fixedly connected with the first clamp holder rectangular structure connecting rod a (7), and the other end of the first clamp holder rectangular structure connecting rod a (7) is fixedly connected with the first flexible hinge c (9). The first flexible hinge b (6) is fixedly connected with the first clamp holder rectangular structure connecting rod b (8), and the other end of the first clamp holder rectangular structure connecting rod b (8) is fixedly connected with the first flexible hinge d (10). The first flexible hinge c (9) and the first flexible hinge d (10) are fixedly connected with the first clamp holder rectangular structure movable platform (11).
The anchor region b (4 ') is fixedly connected with the second compliant hinge a (5 ') and the second compliant hinge b (6 '). The second flexible hinge a (5 ') is fixedly connected with a second clamp holder rectangular structure connecting rod a (7'), and the other end of the second clamp holder rectangular structure connecting rod a (7 ') is fixedly connected with a second flexible hinge c (9'). The second flexible hinge b (6 ') is fixedly connected with the second clamp holder rectangular structure connecting rod b (8'), and the other end of the second clamp holder rectangular structure connecting rod b (8 ') is fixedly connected with the second flexible hinge d (10'). The second flexible hinge c (9 ') and the second flexible hinge d (10 ') are fixedly connected with the movable platform (11 ') of the second clamp holder rectangular structure.
The Z-shaped beam structure connecting rod (3) is symmetrically connected with the first clamp rectangular structure movable platform (11) and the second clamp rectangular structure movable platform (11') along the driver shuttle (2). The first clamp holder rectangular structure moving platform (11) is fixedly connected with the front end (12) of a first clamping arm, and the other end of the front end (12) of the first clamping arm is fixedly connected with a jaw (13) at the tail end of the first clamp holder. The second clamp holder rectangular structure movable platform (11 ') is fixedly connected with the front end (12') of a second clamp holding arm, and the other end of the front end (12 ') of the second clamp holding arm is fixedly connected with a jaw (13') at the tail end of the second clamp holder.
The driver beam (1) pushes the driver shuttle (2), the driver shuttle (2) pushes the Z-shaped beam structure connecting rod (3), and the Z-shaped beam structure connecting rod (3) pushes the first clamp rectangular structure movable platform (11) and the second clamp rectangular structure movable platform (11 ') so as to transmit the motion of the driver to the motion of the left arm and the right arm of the clamp and form the clamping action of the first clamp terminal jaw (13) and the second clamp terminal jaw (13').
After applying a voltage across anchor region a (4) and anchor region b (4 '), current flows through the actuator beam (1) due to the sputtered copper layers on the upper and lower sides of the anchor region a (4), anchor region b (4'), actuator beam (1) and the lower half of actuator shuttle (2). Joule heat is generated by the actuator beam (1), causing the actuator beam (1) to thermally expand, thereby generating a displacement and a force that pushes the actuator shuttle (2). The motion of the driver shuttle (2) is transmitted to a first gripper rectangular structure movable platform (11) and a second gripper rectangular structure movable platform (11 ') by a Z-shaped beam structure connecting rod, and the first gripper rectangular structure movable platform (11) and the second gripper rectangular structure movable platform (11 ') transmit the motion to a first gripper end jaw (13) and a second gripper end jaw (13 ') to generate the gripping action. The micro gripper is arranged at the end of the macro mechanical arm and is used for generating gripping action to operate the micro object, the micro object is just positioned between a first gripper end jaw (13) and a second gripper end jaw (13 ') by means of the extensive movement of the macro mechanical arm, and the first gripper end jaw (13) and the second gripper end jaw (13') generate relative movement to grip the micro object or perform opposite movement to release the micro object.
In an SU-8 compliant electrothermal drive micro-gripper with parallel opening and closing ports, a compliant hinge is rectangular in shape.
The driver beam (1) is a V-shaped beam or a Z-shaped beam.
In an SU-8 compliant electrothermal drive micro-gripper with parallel ports, a driver part is a V-shaped beam or a Z-shaped beam array. The number of driver beams (1) in the array arrangement is greater than 1.
Compared with the prior art, the invention has the following beneficial effects:
1. the port of the micro-gripper can realize parallel opening and closing movement, and can more easily operate tiny objects and cells;
2. the driver and the clamping mechanism part are of an integral structure, and SU-8 integral processing is adopted, so that the displacement of a clamping port is improved;
3. the micro-gripper has simple and compact structure, is easy to be micro-machined, and improves the operation precision and reliability.
Drawings
FIG. 1 is a schematic diagram of a compliant electro-thermally driven micro-gripper for a V-beam according to the present invention.
FIG. 2 is a schematic diagram of a compliant electro-thermally driven micro-gripper configuration for a Z-beam of the present invention.
In the figure, 1 — the actuator beam; 2- -actuator shuttle; 3-Z beam structure linkage; 4- -anchor region a; 5- -first compliant hinge a; 6- -first compliant hinge b; 7- -first gripper rectangular configuration link a; 8- -first gripper rectangular configuration link b; 9- -first compliant hinge c; 10- -first compliant hinge d; 11- -first holder rectangular structure moving platform; 12- -first gripper arm front end; 13- -first gripper end jaw; 4' -anchor region b; 5' - -a second compliant hinge a; 6' - -a second compliant hinge b; 7' - -a second gripper rectangular configuration link a; 8' - -a second gripper rectangular configuration link b; 9' - -a second compliant hinge c; 10' - -a second compliant hinge d; 11' -a second gripper moving platform with a rectangular structure; 12' -the front end of the second gripper arm; 13' -second gripper end jaw.
Detailed Description
An SU-8 compliant electrothermal drive micro-gripper with parallel opening and closing ports comprises a drive part and a gripping part. Wherein the driving part consists of a driver beam (1), a driver shuttle (2) and an anchor area, and the anchor area consists of a symmetrical anchor area a (4) and an anchor area b (4'); the clamping part consists of a Z-shaped beam structure connecting rod (3) and a clamping device mechanism with completely symmetrical left and right sides; the gripping part is fixedly connected to the drive part via a drive shuttle (2).
The driver shuttle (2) is divided into an upper half part and a lower half part, and the lower half part of the driver shuttle (2) is fixedly connected with the anchor area through a driver beam (1) to form a driving part of the micro gripper. The upper half part of the driver shuttle (2) is fixedly connected with a gripper mechanism through a Z-shaped beam structure connecting rod (3), and the gripper mechanism is fixedly connected on an anchor area to form a clamping part of the micro gripper.
The driver beams (1) are in the form of an array arrangement, the driver beams (1) of the array arrangement, together with the driver shuttle (2) and the anchor area, constitute the driving part of the micro gripper; after the integral structure is made of SU-8, copper layers are sputtered on the upper surface and the lower surface of the driving part. The drive beams (1) arranged in an array are fixed at both ends between the drive shuttle (2) and the anchor area a (4) and between the drive shuttle (2) and the anchor area b (4').
The structure of the clamp holder is a bilaterally symmetrical compliant mechanism, and the left arm and the right arm of the clamp holder are respectively connected with a rectangular compliant mechanism from the anchor areas (4, 4'). The rectangular compliant mechanism consists of a clamp holder rectangular structure connecting rod, a movable platform and four compliant hinges.
The anchor area a (4) is fixedly connected with the first compliant hinge a (5) and the first compliant hinge b (6). The first flexible hinge a (5) is fixedly connected with the first clamp holder rectangular structure connecting rod a (7), and the other end of the first clamp holder rectangular structure connecting rod a (7) is fixedly connected with the first flexible hinge c (9). The first flexible hinge b (6) is fixedly connected with the first clamp holder rectangular structure connecting rod b (8), and the other end of the first clamp holder rectangular structure connecting rod b (8) is fixedly connected with the first flexible hinge d (10). The first flexible hinge c (9) and the first flexible hinge d (10) are fixedly connected with the first clamp holder rectangular structure movable platform (11).
The anchor region b (4 ') is fixedly connected with the second compliant hinge a (5 ') and the second compliant hinge b (6 '). The second flexible hinge a (5 ') is fixedly connected with a second clamp holder rectangular structure connecting rod a (7'), and the other end of the second clamp holder rectangular structure connecting rod a (7 ') is fixedly connected with a second flexible hinge c (9'). The second flexible hinge b (6 ') is fixedly connected with the second clamp holder rectangular structure connecting rod b (8'), and the other end of the second clamp holder rectangular structure connecting rod b (8 ') is fixedly connected with the second flexible hinge d (10'). The second flexible hinge c (9 ') and the second flexible hinge d (10 ') are fixedly connected with the movable platform (11 ') of the second clamp holder rectangular structure.
The Z-shaped beam structure connecting rod (3) is symmetrically connected with the first clamp rectangular structure movable platform (11) and the second clamp rectangular structure movable platform (11') along the driver shuttle (2). The first clamp holder rectangular structure moving platform (11) is fixedly connected with the front end (12) of a first clamping arm, and the other end of the front end (12) of the first clamping arm is fixedly connected with a jaw (13) at the tail end of the first clamp holder. The second clamp holder rectangular structure movable platform (11 ') is fixedly connected with the front end (12') of a second clamp holding arm, and the other end of the front end (12 ') of the second clamp holding arm is fixedly connected with a jaw (13') at the tail end of the second clamp holder.
The driver beam (1) pushes the driver shuttle (2), the driver shuttle (2) pushes the Z-shaped beam structure connecting rod (3), and the Z-shaped beam structure connecting rod (3) pushes the first clamp rectangular structure movable platform (11) and the second clamp rectangular structure movable platform (11 ') so as to transmit the motion of the driver to the motion of the left arm and the right arm of the clamp and form the clamping action of the first clamp terminal jaw (13) and the second clamp terminal jaw (13').
After applying a voltage across anchor region a (4) and anchor region b (4 '), current flows through the actuator beam (1) due to the sputtered copper layers on the upper and lower sides of the anchor region a (4), anchor region b (4'), actuator beam (1) and the lower half of actuator shuttle (2). Joule heat is generated by the actuator beam (1), causing the actuator beam (1) to thermally expand, thereby generating a displacement and a force that pushes the actuator shuttle (2). The motion of the driver shuttle (2) is transmitted to a first gripper rectangular structure movable platform (11) and a second gripper rectangular structure movable platform (11 ') by a Z-shaped beam structure connecting rod, and the first gripper rectangular structure movable platform (11) and the second gripper rectangular structure movable platform (11 ') transmit the motion to a first gripper end jaw (13) and a second gripper end jaw (13 ') to generate the gripping action. The micro gripper is arranged at the end of the macro mechanical arm and is used for generating gripping action to operate the micro object, the micro object is just positioned between a first gripper end jaw (13) and a second gripper end jaw (13 ') by means of the extensive movement of the macro mechanical arm, and the first gripper end jaw (13) and the second gripper end jaw (13') generate relative movement to grip the micro object or perform opposite movement to release the micro object.
In an SU-8 compliant electrothermal drive micro-gripper with parallel opening and closing ports, a compliant hinge is rectangular in shape.
The driver beam (1) is a V-shaped beam or a Z-shaped beam.
In an SU-8 compliant electrothermal drive micro-gripper with parallel ports, a driver part is a V-shaped beam or a Z-shaped beam array. The number of driver beams (1) in the array arrangement is greater than 1.
The following detailed description of the embodiments of the invention refers to the accompanying drawings and claims. As shown in fig. 1 or fig. 2, after voltage is applied to the left and right of the anchor region (4, 4'), current flows through the actuator beam array (fig. 1 is a V-shaped beam; fig. 2 is a Z-shaped beam) due to the copper layer sputtered on the anchor region, joule heat is generated, and the V-shaped or Z-shaped actuator beam (1) is heated to elongate, push the actuator shuttle (2) to generate force and displacement. The force and the displacement are transmitted to the left and right clamp holder rectangular structure movable platforms (11, 11 ') through Z-shaped beam structure connecting rods (3, 3 '), and the clamp holder rectangular structure movable platforms (11, 11 ') are pushed to translate. Due to the adoption of the rectangular structure, the first clamp rectangular structure connecting rod a (7) and the first clamp rectangular structure connecting rod b (8) are parallel. The second clamp rectangular structure connecting rod a (7 ') and the second clamp rectangular structure connecting rod b (8') are parallel. The movable platforms (11, 11') of the holder rectangular structure can only translate and cannot rotate; the motion of the movable platforms (11, 11 ') with the rectangular structure of the gripper is transmitted to the jaws (13, 13 ') at the tail end of the gripper through the front ends (12, 12 ') of the gripper arms which are fixedly connected in sequence, so that the parallel opening and closing motion of the ports of the gripper is formed. The rectangular structure connecting rods (7, 7 ') and (8, 8') are connected with the movable platforms (11, 11 ') and the anchors (4, 4') through four compliant hinges (5, 5 '), (6, 6'), (9, 9 ') and (10, 10'), so that a rectangular compliant transmission structure is formed. The compliant hinge transmits forces and displacements through its own deformation. Because the integral driving part and the clamping mechanism part adopt a bilateral symmetry structure, the movement of the jaws (13, 13') at the tail ends of the clamp holder is bilateral symmetry, and the parallel opening and closing movement of the ports of the clamp holder is formed, so as to effectively clamp and release microscopic objects.
Claims (5)
1. An SU-8 compliant electrothermal drive micro-gripper with parallel opening and closing ports is characterized in that: the micro-gripper consists of a driving part and a gripping part; wherein the driving part consists of a driver beam (1), a driver shuttle (2) and an anchor area, and the anchor area consists of a symmetrical anchor area a (4) and an anchor area b (4'); the clamping part consists of a Z-shaped beam structure connecting rod (3) and a clamping device mechanism with completely symmetrical left and right sides; the clamping part is fixedly connected with the driving part through a driver shuttle (2);
the driver shuttle (2) is divided into an upper half part and a lower half part, and the lower half part of the driver shuttle (2) is fixedly connected with the anchor area through a driver beam (1) to form a driving part of the micro gripper; the upper half part of the driver shuttle (2) is fixedly connected with a gripper mechanism through a Z-shaped beam structure connecting rod (3), and the gripper mechanism is fixedly connected on an anchor area to form a clamping part of the micro gripper;
the driver beams (1) are in the form of an array arrangement, the driver beams (1) of the array arrangement, together with the driver shuttle (2) and the anchor area, constitute the driving part of the micro gripper; after the integral structure is made of SU-8, copper layers are sputtered on the upper surface and the lower surface of the driving part; the two ends of the driver beam (1) arranged in an array are fixed between the driver shuttle (2) and the anchor area a (4) and between the driver shuttle (2) and the anchor area b (4');
the structure of the clamp holder is a bilaterally symmetrical compliant mechanism, and the left arm and the right arm of the clamp holder are respectively connected with a rectangular compliant mechanism from the anchor areas (4, 4'); the rectangular compliant mechanism consists of a clamp holder rectangular structure connecting rod, a movable platform and four compliant hinges;
the anchor area a (4) is fixedly connected with the first compliant hinge a (5) and the first compliant hinge b (6); the first flexible hinge a (5) is fixedly connected with a first clamp holder rectangular structure connecting rod a (7), and the other end of the first clamp holder rectangular structure connecting rod a (7) is fixedly connected with a first flexible hinge c (9); the first flexible hinge b (6) is fixedly connected with the first clamp holder rectangular structure connecting rod b (8), and the other end of the first clamp holder rectangular structure connecting rod b (8) is fixedly connected with the first flexible hinge d (10); the first flexible hinge c (9) and the first flexible hinge d (10) are fixedly connected with the first clamp holder rectangular structure movable platform (11);
the anchor area b (4 ') is fixedly connected with the second compliant hinge a (5 ') and the second compliant hinge b (6 '); the second flexible hinge a (5 ') is fixedly connected with a second clamp holder rectangular structure connecting rod a (7'), and the other end of the second clamp holder rectangular structure connecting rod a (7 ') is fixedly connected with a second flexible hinge c (9'); the second flexible hinge b (6 ') is fixedly connected with a second clamp holder rectangular structure connecting rod b (8'), and the other end of the second clamp holder rectangular structure connecting rod b (8 ') is fixedly connected with a second flexible hinge d (10'); the second flexible hinge c (9 ') and the second flexible hinge d (10 ') are fixedly connected with the movable platform (11 ') of the second clamp holder rectangular structure;
the Z-shaped beam structure connecting rod (3) is symmetrically connected with a first clamp rectangular structure moving platform (11) and a second clamp rectangular structure moving platform (11') along the driver shuttle (2); the first clamp holder rectangular structure movable platform (11) is fixedly connected with the front end (12) of a first clamping arm, and the other end of the front end (12) of the first clamping arm is fixedly connected with a jaw (13) at the tail end of the first clamp holder; the second clamp holder rectangular structure movable platform (11 ') is fixedly connected with the front end (12') of a second clamp holding arm, and the other end of the front end (12 ') of the second clamp holding arm is fixedly connected with a jaw (13') at the tail end of the second clamp holder.
2. An SU-8 compliant electro-thermally driven micro-gripper with parallel ports open and close according to claim 1, characterized in that: the driver beam (1) pushes the driver shuttle (2), the driver shuttle (2) pushes the Z-shaped beam structure connecting rod (3), and the Z-shaped beam structure connecting rod (3) pushes the first clamp rectangular structure movable platform (11) and the second clamp rectangular structure movable platform (11 ') so as to transmit the motion of the driver to the motion of the left arm and the right arm of the clamp and form the clamping action of the first clamp terminal jaw (13) and the second clamp terminal jaw (13');
after voltage is applied to two ends of the anchor area a (4) and the anchor area b (4 '), current flows through the driver beam (1) because copper layers are sputtered on the upper surface and the lower surface of the anchor area a (4), the anchor area b (4'), the driver beam (1) and the lower half part of the driver shuttle (2); joule heat is generated by the driver beam (1), so that the driver beam (1) is thermally expanded, and displacement and force are generated to push the driver shuttle (2); the motion of the driver shuttle (2) is transmitted to a first clamp rectangular structure movable platform (11) and a second clamp rectangular structure movable platform (11 ') by a Z-shaped beam structure connecting rod, and the first clamp rectangular structure movable platform (11) and the second clamp rectangular structure movable platform (11 ') transmit the motion to a first clamp end jaw (13) and a second clamp end jaw (13 ') to generate clamping action; the micro gripper is arranged at the end of the macro mechanical arm and is used for generating gripping action to operate the micro object, the micro object is just positioned between a first gripper end jaw (13) and a second gripper end jaw (13 ') by means of the extensive movement of the macro mechanical arm, and the first gripper end jaw (13) and the second gripper end jaw (13') generate relative movement to grip the micro object or perform opposite movement to release the micro object.
3. An SU-8 compliant electro-thermally driven micro-gripper with parallel ports open and close according to claim 1, characterized in that: the compliant hinge is rectangular in shape.
4. An SU-8 compliant electro-thermally driven micro-gripper with parallel ports open and close according to claim 1, characterized in that: the driver beam (1) is a V-shaped beam or a Z-shaped beam.
5. An SU-8 compliant electro-thermally driven micro-gripper with parallel ports open and close according to claim 1, characterized in that: the number of driver beams (1) in the array arrangement is greater than 1.
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| CN1931529A (en) * | 2006-09-28 | 2007-03-21 | 上海交通大学 | Heat driven SU-8 base micro pliers with embedded nickel wire in double diamond structure |
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| CN101857187A (en) * | 2010-05-12 | 2010-10-13 | 大连理工大学 | Flexible electric heating micro gripper with parallel opening-closing jaw |
| CN102079498A (en) * | 2010-11-18 | 2011-06-01 | 大连理工大学 | Flexible electrothermal drive micro-gripper and manufacturing process method |
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