CN109434804A - A kind of micro-nano operation robotic arm of automatic replacement end effector - Google Patents
A kind of micro-nano operation robotic arm of automatic replacement end effector Download PDFInfo
- Publication number
- CN109434804A CN109434804A CN201811631367.8A CN201811631367A CN109434804A CN 109434804 A CN109434804 A CN 109434804A CN 201811631367 A CN201811631367 A CN 201811631367A CN 109434804 A CN109434804 A CN 109434804A
- Authority
- CN
- China
- Prior art keywords
- end effector
- micro
- nano
- robotic arm
- clamping device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
A kind of micro-nano operation robotic arm of automatic replacement end effector.Due to the limitation of operating space, legacy operating system can not achieve electronic clamping device pose and be adjusted flexibly, and end effector cannot be replaced automatically, the operating efficiency of system is impacted, existing micro-nano operation robotic arm replaces end effector, after needing mobile clamping target end effector, microoperation is carried out, the accuracy of operation is affected.It is proposed that a kind of micro-nano of automatic replacement end effector operates robotic arm based on this, end effector is put into electronic clamping device by the design, therefore does not have to carry out clamping operation, so that it may directly progress micro-nano operation.In the present invention, disc turntable (1), sample stage (2), rotary positioning apparatus (3) includes disc turntable and miniature electric motor, light source (4), the end effector of card slot (5) placement different function；Electronic clamping device (6) can be rotated according to multiple degrees of freedom, accurately to complete micro-nano operation, CCD camera and electron microscope (7).The present invention operates control field for micro-nano.
Description
Technical field
The present invention relates to microoperation control system technical fields, and in particular to a kind of micro-nano of automatic replacement end effector
Operate robotic arm.
Background technique
Nanometer scale science and technology, which obtains, in recent years widely payes attention to and is rapidly developed.Various nano materials, nanometer
Device is constantly demonstrated, and nano measurement, nanometer Ultra-precision Turning, nanoelectronics have new development.As nanotechnology
One of the key technology in field, nano-manipulation, which can be used for being situated between, sees the Science Explorations of phenomenon, constructs prototype nano-equipment, is that test is received
Rice material, structure, the basic fundamental of device nature and characteristic.The target of micro-nano operation is that manufacture has novel physics, chemistry and life
The nano functional device and micro-nano system of object characteristic, thus for fields such as electronics, information, material, advanced manufacture and biomedicines
Technology development new opportunity and technological approaches are provided, development has huge Social benefit and economic benefit.In addition, nanometer is grasped
Make the processing that can be used for nanoscale microstructures and nano-equipment unit prepares and the indispensable technology of nano-equipment assembly.With
Development in science and technology, the object operated is increasingly sophisticated, so needing to consider a variety of situations in an operating system, how free designs
It spends electronic clamping device to be operated, and can realize that electronic clamping device pose flexibly changes, improve operating efficiency.Based on this
Design a kind of micro-nano operation robotic arm of automatic replacement end effector.It is directed to above-mentioned technical problem, is in operation to overcome
The deficiency of end effector method is replaced in system.
Summary of the invention
The purpose of the invention is to overcome in complicated operating process, electronic clamping device can not accurately carry out end
The replacement for holding actuator provides a kind of automatic micro-nano operation robotic arm of replacement end effector, can be improved operation precision,
Efficiency, and the problems such as overcome operation difficulty big.
The design include multiple degrees of freedom rotation electronic clamper, rotation positioning platform and rotation angle moving disk,
The present invention can be realized end effector replace automatically and electronic clamper pose adjustment.The electrical clip rotated using multiple degrees of freedom
Holder is operated, and placed high-precision rotary positioning apparatus, can be stablized under the useful space of electron microscope
Work, the end effector that card slot places different function are executed when needing using end effector by motor control end
Device pedestal makes end effector beyond electronic clamping apparatus surface, when stopping using end effector, passes through motor control end
End actuator pedestal is retracted into end effector inside electronic clamping device.In the present invention, disc turntable (1) places sample
Sample platform (2)；Sample stage, for placing by operation object；Rotary positioning apparatus (3), including disc turntable and miniature electric motor,
Miniature electric motor controls the rotation of disc turntable；Light source (4), provides light source for operating process；Card slot (5), places different function
The end effector of energy, whether end effector use can be controlled by the pedestal of motor control end effector；It is electronic
Clamping device (6) can carry out multivariant rotation, to be precisely accomplished last operation；Ccd camera and electron microscope
(7), to taking image to carry out feedback op amendment and provide accurate posture information to by the amplification of operation object；Electronic clamper dress
Multivariant rotation can be carried out by setting, i.e. x-y-z spherical rotation (8), and x-z-plane rotates (9), and x-y plane rotates (10).
Beneficial effects of the present invention:
The present invention can carry out the automatic replacement of end effector, be different from other micro-nano robotic arms and replace end effector: needing
Electronic clamper is wanted to clamp end effector on station, the present invention, which replaces end effector, to be held by motor control end
Row device pedestal is operated, the unstable factor generated when to reducing clamping end effector.
The design and electronic clamper can be adapted for the end effector of different function, different model, and entirety can be improved
The application range of device.
Machinery arm configuration of the invention, it is ensured that electronic clamper device carries out the rotation of multiple freedom degrees, improves behaviour
The feasibility and accuracy of work.
Detailed description of the invention
Fig. 1 is the total schematic diagram of apparatus for automatic change of end effector of the invention.
Fig. 2 is the schematic diagram of mechanical arm of the invention.
Fig. 3 is XYZ coordinate direction schematic diagram of the present invention.
Specific embodiment
The purpose of the invention is to overcome in complicated operating process, electronic clamping device can not accurately carry out end
The replacement for holding actuator provides a kind of automatic micro-nano operation robotic arm of replacement end effector, can be improved operation precision,
Efficiency, and the problems such as overcome operation difficulty big.
Below in conjunction with the attached drawing in the present invention, technical solution of the present invention is described in detail:
It involves great expense since micro-nano operates one whole operating system, to improve system application efficiency, this is transformed, real-time
Image Acquisition replaces end effector, has strict requirements to overall dimensions and mechanism kinematic precision.One kind of the invention is certainly
The micro-nano of dynamic replacement end effector operates robotic arm, the position regulator including rotary positioning apparatus, electronic clamping device
With end effector apparatus for automatic change.
The rotary positioning apparatus includes disc turntable (1), sample stage (2), rotational positioning (3), light source (4), card slot
(5), electronic clamping device (6), CCD camera and electron microscope (7).
The position regulator of the electronic clamping device includes x-y-z spherical rotation (8), and x-z-plane rotates (9),
X-y plane rotates (10).
The end effector apparatus for automatic change includes the lifting of motor control end effector pedestal.
Specific workflow of the invention are as follows:
1, sample stage is placed on big rotating platform, and object to be operated is placed in sample stage；
2, when treating operation object offer different direction operation, angle can be rotated to big rotating platform and controlled, realized complicated
Operation；
3, different end effectors and layout in a certain order are placed in the card slot of electronic clamping device, when end is held
When row device is replaced, it can be required according to program；
4, it is accurately positioned under the driving of micro motor；
5, electronic clamping device can successively replace end effector according to a certain order, move after the completion of replacement by program requirement
To corresponding position, then operated to by operation object；
6, after the completion of operating, mechanical arm returns to initial position.
Claims (5)
1. a kind of micro-nano of automatic replacement end effector operates robotic arm, it is characterised in that: hold the end of electronic clamping device
Row device is controlled by motor, and when using end effector, motor drives end effector pedestal to rise, and actuator is beyond electricity
The surface of pole clamping device, when stopping using end effector, motor drives the decline of end effector pedestal, backs up into end and holds
Inside row device.
2. a kind of automatic micro-nano of replacement end effector operates robotic arm, it is characterised in that: electronic clamper device can be into
The multivariant rotation of row, i.e. x-y-z spherical rotation (8), x-z-plane rotate (9), and x-y plane rotates (10).
3. a kind of micro-nano of automatic replacement end effector operates robotic arm, it is characterised in that electronic clamping device can carry out position
Appearance is adjusted flexibly, and is operated with different angle.
4. a kind of micro-nano of automatic replacement end effector according to claim 3 operates robotic arm, it is characterised in that
Electronic clamping device can be rotated around ball center, and electronic clamper is made to reach different positions.
5. a kind of micro-nano of automatic replacement end effector according to claim 1 operates robotic arm, it is characterised in that
Different types of end effector is placed in card slot, can be chosen according to different requirements.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811631367.8A CN109434804A (en) | 2018-12-29 | 2018-12-29 | A kind of micro-nano operation robotic arm of automatic replacement end effector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811631367.8A CN109434804A (en) | 2018-12-29 | 2018-12-29 | A kind of micro-nano operation robotic arm of automatic replacement end effector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109434804A true CN109434804A (en) | 2019-03-08 |
Family
ID=65538734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811631367.8A Pending CN109434804A (en) | 2018-12-29 | 2018-12-29 | A kind of micro-nano operation robotic arm of automatic replacement end effector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109434804A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012162798A1 (en) * | 2011-06-03 | 2012-12-06 | The Governing Council Of The University Of Toronto | Micro-nano tools with changeable tips for micro-nano manipulation |
| CN204712041U (en) * | 2015-06-25 | 2015-10-21 | 中国工程物理研究院激光聚变研究中心 | Two jaw type micro clamping device |
| CN105500389A (en) * | 2016-02-03 | 2016-04-20 | 苏州大学 | Automatic replacement device of end effector of micro-nano robot |
| CN205996985U (en) * | 2016-08-24 | 2017-03-08 | 大冶市石开工艺青铜铸造股份有限公司 | A kind of engraving mechanical arm of achieving automatic head replacement |
| CN107877487A (en) * | 2017-12-17 | 2018-04-06 | 北京工业大学 | A kind of SU 8 submissive electrothermal drive micro clamping devices of the parallel opening and closing in port |
-
2018
- 2018-12-29 CN CN201811631367.8A patent/CN109434804A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012162798A1 (en) * | 2011-06-03 | 2012-12-06 | The Governing Council Of The University Of Toronto | Micro-nano tools with changeable tips for micro-nano manipulation |
| CN204712041U (en) * | 2015-06-25 | 2015-10-21 | 中国工程物理研究院激光聚变研究中心 | Two jaw type micro clamping device |
| CN105500389A (en) * | 2016-02-03 | 2016-04-20 | 苏州大学 | Automatic replacement device of end effector of micro-nano robot |
| CN205996985U (en) * | 2016-08-24 | 2017-03-08 | 大冶市石开工艺青铜铸造股份有限公司 | A kind of engraving mechanical arm of achieving automatic head replacement |
| CN107877487A (en) * | 2017-12-17 | 2018-04-06 | 北京工业大学 | A kind of SU 8 submissive electrothermal drive micro clamping devices of the parallel opening and closing in port |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Carrozza et al. | Manipulating biological and mechanical micro-objects using LIGA-microfabricated end-effectors | |
| EP2350750B1 (en) | A method and an apparatus for calibration of an industrial robot system | |
| Sato et al. | Novel manipulator for micro object handling as interface between micro and human worlds | |
| Zhou et al. | A closed-loop controlled nanomanipulation system for probing nanostructures inside scanning electron microscopes | |
| Mazerolle et al. | Nanomanipulation in a scanning electron microscope | |
| Koyano et al. | Micro object handling system with concentrated visual fields and new handling skills | |
| CN105619400A (en) | Six-degree-of-freedom manipulator | |
| Zhakypov et al. | Modular and reconfigurable desktop microfactory for high precision manufacturing | |
| CN104122415B (en) | A kind of multiprobe scanning is micro- and transports measurement apparatus | |
| CN105500389A (en) | Automatic replacement device of end effector of micro-nano robot | |
| CN205600747U (en) | Receive end effector automatic exchange device of robot a little | |
| CN109434804A (en) | A kind of micro-nano operation robotic arm of automatic replacement end effector | |
| CN107385504A (en) | Array electrode and its processing method based on Constraints etching | |
| US20190193325A1 (en) | Compact instrument with exchangeable modules for multiple microfabrication and/or nanofabrication methods | |
| Tiemerding et al. | Robotic dual probe setup for reliable pick and place processing on the nanoscale using haptic devices | |
| CN109521649A (en) | A kind of integral system pinpointing transfer and alignment photoetching for two-dimensional material | |
| CN112279215A (en) | Micro-nano manufacturing device | |
| TWI712803B (en) | Method and apparatus for measuring electrostatic charge of a substrate | |
| CN104959971B (en) | A kind of assembly system towards micron order flexible pipe Yu microsphere assembly | |
| CN206960509U (en) | Probe needle changing device is scanned under a kind of high vacuum environment | |
| CN206278904U (en) | A kind of single micro nano structure transfer device | |
| CN106971762A (en) | The micro-nano operating system conceptual design of many locating platforms | |
| Claverley et al. | Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation | |
| CN205575625U (en) | Nano -device assembly quality | |
| CN105171730A (en) | Micro/nano operating device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190308 |
|
| WD01 | Invention patent application deemed withdrawn after publication |