CN205600747U - Receive end effector automatic exchange device of robot a little - Google Patents
Receive end effector automatic exchange device of robot a little Download PDFInfo
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- CN205600747U CN205600747U CN201620105754.8U CN201620105754U CN205600747U CN 205600747 U CN205600747 U CN 205600747U CN 201620105754 U CN201620105754 U CN 201620105754U CN 205600747 U CN205600747 U CN 205600747U
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- end effector
- micro
- nano
- automatic change
- robot
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Abstract
The utility model provides a receive end effector automatic exchange device of robot a little, its includes three -dimensional moving's electronic holder device and rotary positioning device can carry out, the last end effector that is equipped with of rotary positioning device, electronic holder device is equipped with the holder for centre gripping end effector. The utility model discloses the automatic change that receive the end effector of robot a little of ability through the rational utilization to the scanning electron microscope inner space, has designed the high accuracy rotary positioning device who places end effector, can stably work in the finite space of electronic speculum and under the high vacuum environment, both can be used for placing the end effector of different functions, also can be used for retrieving old and useless end effector.
Description
Technical field
This utility model relates to micro-electromechanical system field, is specifically related to micro-nano machine in a kind of SEM
Robot end executor's apparatus for automatic change.
Background technology
Nanotechnology be promote that 21 century human society is energy-saving and cost-reducing, environmental protection, intelligence convenient and healthy
The important science and technology that life direction is developed.Nano-manipulator technology is in the sign of nano material, by nanometer material
Material assemble build nano-device operation, process, assemble and test in play pivotal role, at present
Have become as the key technology in nanotechnology.Scanning electron microscope (SEM) is for microstructure
One of form and the chemical composition the most general instrument characterizing detection and analysis.Precision is received in real time because it has
Real-time monitored, high-cleanness, the advantage such as condition of high vacuum degree, and sufficient vacuum chamber space can be provided, can collect
Becoming multiple detection device and positioner, therefore micro-nano operating system based on SEM realizes nanometer object
Three-dimensional manipulating and assembling are the preferable developing direction that nano-manipulation field is following.
For three-dimensional manipulating and the assembling of nano-device, currently mainly based on scanning electron microscope (SEM)
The high accuracy nano-manipulation robot of real time imaging completes.The size of nano material is between 1 nanometer～100
Between nanometer range, nano material to be characterized and operate, require the end of nano-manipulation robot
Executor is the probe such as AFM probe etc. of superprecision.But limited by microscopic space, nanometer machine
The precision of device people's system is not enough with flexibility ratio, and visual feedback is limited by operating condition with force feedback, resistance
Hinder controlling in real time and being accurately positioned of nanometer robot, handled nanometer robot and nanometer object is carried out multiple
Usually can cause the damage of end effector during miscellaneous operation thus need end effector is replaced.
Automatic micro-nano end effector of robot more changing device, institute is not built at present inside SEM
More changing jobs of having can only be by being accomplished manually.And inner sample room is vacuum environment during SEM work, right
The end effector of nano-manipulation robot is replaced, and needs to open the sample bin of SEM, holds end
Row device just can proceed related experiment and behaviour after also needing to sample room is carried out evacuation after changing
Make.The mode of this artificial replacing end effector can consume operator's substantial amounts of time, and due to end
End executor's forward tip size minimum, human eye differentiate more difficult, the most careless slightly or
The improper needle point that may result in end effector of operated by personnel is damaged in Renewal process and makes
It is scrapped.End effector is generally more accurate probe, and corresponding price is the highest.At Renewal process
Middle damage probe will also result in the loss of fund and resource.It addition, switch door also results in and sweeps frequently
Retouching the indoor vacuum of electron microscopic sample to reduce, observation and operation to nano material impact.
Therefore, for above-mentioned technical problem, it is necessary to provide the micro-nano machine can automatically changed in a kind of SEM
Device robot end executor more changing device, to overcome drawbacks described above.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of micro-nano end effector of robot automatic
More changing device, this device can solve the problem that the mode efficiency of artificial replacing end effector is low and operation easier is big
Etc. problem.
For achieving the above object, the following technical scheme of this utility model offer:
A kind of micro-nano end effector of robot apparatus for automatic change, it electricity including carrying out three-dimensional motion
Dynamic clamper device and rotary positioning apparatus, described rotary positioning apparatus is provided with end effector, institute
State electronic clamper device and be provided with the clamper in order to clamping ends executor.
Preferably, in above-mentioned micro-nano end effector of robot apparatus for automatic change, described electronic clamping
Device device includes X-axis micromotion platform, Z axis micromotion platform and Y-axis micromotion platform, described X, Y, Z
Axle three-dimensional micromotion platform is all connected with clamper, and described X, Y, Z axis three-dimensional micromotion platform can realize clamping
Device linear motion on X, tri-directions of Y, Z.
Preferably, in above-mentioned micro-nano end effector of robot apparatus for automatic change, described clamper bag
Include two in order to the clamping limb from sandwich end effector.
Preferably, in above-mentioned micro-nano end effector of robot apparatus for automatic change, described rotation positions
Device includes disc turntable and controls the miniature electric motor that disc turntable rotates.
Preferably, in above-mentioned micro-nano end effector of robot apparatus for automatic change, turn at described disk
Platform is provided with several first draw-in grooves that can place different model end effector.
Preferably, in above-mentioned micro-nano end effector of robot apparatus for automatic change, some described first
Draw-in groove is uniformly distributed in the disc turntable outward flange away from the center of circle.
Preferably, in above-mentioned micro-nano end effector of robot apparatus for automatic change, described end performs
Device is embedded in the first draw-in groove.
Preferably, in above-mentioned micro-nano end effector of robot apparatus for automatic change, described end performs
First draw-in groove is separated to form two after loading the first draw-in groove and lays respectively at the second of end effector both sides by device
Draw-in groove.
Preferably, in above-mentioned micro-nano end effector of robot apparatus for automatic change, described disc turntable
Diameter range between 40mm-80mm.
From technique scheme it can be seen that this utility model embodiment is by scanning electron microscope inner space
Appropriate application, devise place end effector high-precision rotary positioner, can having in Electronic Speculum
Limit space in and high vacuum environment under steady operation, both may be used for placement difference in functionality end effector,
Can be used for reclaiming waste and old end effector.
Compared with prior art, the beneficial effects of the utility model are:
(1) scanning electron microscope vacuum can carry out the replacing of micro-nano end effector of robot automatically；
(2) for placing and reclaim the design of the rotary positioning apparatus of end effector；
(3) for changing the design of the miniature electric clamper of micro-nano end effector of robot, this is miniature
Electrical clip holder, it is adaptable to difference in functionality, the end effector of different model, can be real by controlling end
In scanning electron microscope, automatically change now micro-nano end effector of robot or carry out waste and old end effector
Recovery operation.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will
The accompanying drawing used required in embodiment or description of the prior art is briefly described, it should be apparent that,
Accompanying drawing relevant of the present utility model in describing below is only embodiments more of the present utility model, for
From the point of view of those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to according to these
Accompanying drawing obtains other accompanying drawing.
Fig. 1 is the schematic perspective view of this utility model micro-nano end effector of robot apparatus for automatic change.
Fig. 2 is the top view of Fig. 1.
Fig. 3 is the side view of Fig. 1.
Fig. 4 is rotary positioning apparatus in this utility model micro-nano end effector of robot apparatus for automatic change
Schematic diagram.
Fig. 5 is end effector in this utility model micro-nano end effector of robot apparatus for automatic change
Schematic diagram.
Fig. 6 is the enlarged drawing of aminoacyl site in Fig. 5.
Fig. 7 is electrical clip holder dress in this utility model micro-nano end effector of robot apparatus for automatic change
The schematic diagram put.
Wherein: 1, electronic clamper device；11, X-axis micromotion platform；12, Z axis micromotion platform；13、
Y-axis micromotion platform；14, clamper；15, clamping limb；2, sample stage；3, rotary positioning apparatus；
31, disc turntable；32, end effector；33, miniature electric motor；34, the first draw-in groove；35、
Second draw-in groove.
Detailed description of the invention
The utility model discloses a kind of micro-nano end effector of robot apparatus for automatic change, this device energy
Enough solutions are artificial changes the problems such as the mode efficiency of end effector is low and operation easier is big.
Below in conjunction with the accompanying drawing in this utility model embodiment, to the technology in this utility model embodiment
Scheme is described in detail, it is clear that described embodiment is only that this utility model part is implemented
Example rather than whole embodiments.Based on the embodiment in this utility model, ordinary skill people
The every other embodiment that member is obtained on the premise of not making creative work, broadly falls into this practicality
Novel protected scope.
Owing to inner space, SEM sample room is less, again because the image-forming principle of Electronic Speculum makes imaging space more
Add limited, while therefore realizing sample observation in limited space, can reality based on scanning electron microscope
Time image feedback, under the high vacuum environment of Electronic Speculum, complete more changing jobs of end effector, this is to device
The design of overall dimensions and the kinematic accuracy of mechanism have strict requirements.
As shown in Figure 1 to Figure 3, the micro-nano robot end in SEM of the one designed by this utility model
The apparatus for automatic change of executor, it includes electronic clamper device 1, sample stage 2 and rotates location dress
Put 3.The actual size of whole device is about 150mm × 100mm × 80mm.
As depicted in figures 3 and 7, described electronic clamper device 1 includes X-axis micromotion platform, Z axis fine motion
Platform and Y-axis micromotion platform and clamper 14, described clamper 14 is in order to clamping ends executor
32.Described X, Y, Z axis three-dimensional micromotion platform is all connected with clamper 14, described X, Y, Z axis three
Dimension micromotion platform can realize clamper linear motion on X, tri-directions of Y, Z.Described clamper 14
Including two clamping limbs 15, these two clamping limbs 15 can get up from both sides by end effector 32 clamping.
As shown in Figure 4, described Miniature rotation positioning device 3 includes disc turntable 31, is located at disc turntable
End effector 32 on 31 and the miniature electric motor 33 of control disc turntable 31.Described disk turns
The diameter range of platform 31 is between 40mm-80mm.
As shown in Figure 4, the disc turntable 31 of rotary positioning apparatus 3 is provided with several draw-in groove 34 energy
Place the end effector 32 of different model.Some described first draw-in groove 34 uniform intervals are distributed in disk and turn
Platform 31 is away from the outward flange in the center of circle.Described end effector 32 is positioned over behind the first draw-in groove 34 position
One draw-in groove 34 is separated to form two the second draw-in grooves 35 laying respectively at end effector both sides, these two second
Draw-in groove 35 can facilitate clamper 14 clamping ends executor 32.
From accompanying drawing 4 it can be seen that described end effector 32 is embedded in the first draw-in groove 34, certainly exist
In other embodiments of this utility model, end effector 32 can be not embedded in the first draw-in groove 34,
I.e. end effector 32 can only be placed on the upper surface of the first draw-in groove 34, then by the first draw-in groove 34 points
Being divided into two the second draw-in grooves 35, these two the second draw-in grooves 35 still can facilitate clamper 14 from clamping end
End executor 32, so whether end effector 32 embeds the first draw-in groove 34 and can select according to practical situation
Select.Two described clamping limbs 15 can stretch into the second draw-in groove 35 from both sides and be clamped by end effector 32
Get up.
As shown in Figures 5 and 6, Fig. 5 is a certain model end effector 32, and its size is
3.7mm×1.34mm×0.51mm.Fig. 6 is the front end enlarged drawing picture of end effector 32, and is labelled with corresponding
Size.Owing to the size of nano material is minimum, therefore use end effector 32 forward tip at scanning electricity
Under mirror, nano material is carried out three-dimensional manipulating.
The workflow of the apparatus for automatic change of this utility model micro-nano end effector of robot is:
The disc turntable of miniature electric turntable is provided with several draw-in grooves to place the end of different model and hold
Row device, each end effector will encode in a certain order；End when micro-nano operation robot
When executor needs to change, can be according to program requirement, under the driving of miniature electric motor, rotate location
Respective model end effector is rotated the underface to minisize clamper by device.The essence of miniature electric motor
Spend high, disc turntable can be made to be accurately positioned.X, Y, Z axis three-dimensional micromotion platform can realize micro clip
Holder linear motion on X, tri-directions of Y, Z, micromotion platform can be issued at high vacuum state
Nano level kinematic accuracy, therefore, in scanning electron microscope, miniature electric clamper can realize grasping micro-nano
Stable three-dimensional manipulating is carried out as end effector of robot.End effector is completed at rotary positioning apparatus
Location work after, the most waste and old end effector can be taken off by clamper automatically, is placed
In the corresponding draw-in groove of disc turntable, and pick up new end effector, be installed in micro-nano machine
Robot end.After installing, clamper can automatically fall back on initial position, so far completes whole end and holds
The replacement operation of row device.
This utility model embodiment, by the Appropriate application to scanning electron microscope inner space, devises placement end
The high-precision rotary positioner of end executor, can be steady in the confined space of Electronic Speculum and under high vacuum environment
Fixed work, both may be used for placing the end effector of difference in functionality, it is also possible to be used for reclaiming waste and old end
Executor.
Compared with prior art, the beneficial effects of the utility model are:
(1) scanning electron microscope vacuum can carry out the replacing of micro-nano end effector of robot automatically；
(2) for placing and reclaim the design of the rotary positioning apparatus of end effector；
(3) for changing the design of the miniature electric clamper of micro-nano end effector of robot, this is miniature
Electrical clip holder, it is adaptable to difference in functionality, the end effector of different model, can be real by controlling end
In scanning electron microscope, automatically change now micro-nano end effector of robot or carry out waste and old end effector
Recovery operation.
It is obvious to a person skilled in the art that this utility model is not limited to the thin of above-mentioned one exemplary embodiment
Joint, and in the case of without departing substantially from spirit or essential attributes of the present utility model, it is possible to other tool
Bodily form formula realizes this utility model.
Moreover, it will be appreciated that although this specification is been described by according to embodiment, but the most each reality
Mode of executing only comprises an independent technical scheme, and this narrating mode of description is only for understand
Seeing, those skilled in the art should be using description as an entirety, and the technical scheme in each embodiment is also
Other embodiments that it will be appreciated by those skilled in the art that can be formed through appropriately combined.
Claims (9)
1. a micro-nano end effector of robot apparatus for automatic change, it is characterized in that: it electronic clamper device and rotary positioning apparatus of including carrying out three-dimensional motion, described rotary positioning apparatus is provided with end effector, and described electronic clamper device is provided with the clamper in order to clamping ends executor.
Micro-nano end effector of robot apparatus for automatic change the most according to claim 1, it is characterized in that: described electronic clamper device includes X-axis micromotion platform, Z axis micromotion platform and Y-axis micromotion platform, described X, Y, Z axis three-dimensional micromotion platform is all connected with clamper, described X, Y, Z axis three-dimensional micromotion platform can realize clamper at X, linear motion on tri-directions of Y, Z.
Micro-nano end effector of robot apparatus for automatic change the most according to claim 1, it is characterised in that: described clamper includes two in order to the clamping limb from sandwich end effector.
Micro-nano end effector of robot apparatus for automatic change the most according to claim 1, it is characterised in that: described rotary positioning apparatus includes disc turntable and controls the miniature electric motor that disc turntable rotates.
Micro-nano end effector of robot apparatus for automatic change the most according to claim 4, it is characterised in that: on described disc turntable, it is provided with several first draw-in grooves that can place different model end effector.
Micro-nano end effector of robot apparatus for automatic change the most according to claim 5, it is characterised in that: some described first draw-in grooves are uniformly distributed in the disc turntable outward flange away from the center of circle.
Micro-nano end effector of robot apparatus for automatic change the most according to claim 4, it is characterised in that: described end effector is embedded in the first draw-in groove.
Micro-nano end effector of robot apparatus for automatic change the most according to claim 7, it is characterised in that: the first draw-in groove is separated to form two the second draw-in grooves laying respectively at end effector both sides by described end effector after loading the first draw-in groove.
Micro-nano end effector of robot apparatus for automatic change the most according to claim 4, it is characterised in that: the diameter range of described disc turntable is between 40mm-80mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620105754.8U CN205600747U (en) | 2016-02-03 | 2016-02-03 | Receive end effector automatic exchange device of robot a little |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620105754.8U CN205600747U (en) | 2016-02-03 | 2016-02-03 | Receive end effector automatic exchange device of robot a little |
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| Publication Number | Publication Date |
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| CN205600747U true CN205600747U (en) | 2016-09-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620105754.8U Expired - Fee Related CN205600747U (en) | 2016-02-03 | 2016-02-03 | Receive end effector automatic exchange device of robot a little |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105500389A (en) * | 2016-02-03 | 2016-04-20 | 苏州大学 | Automatic replacement device of end effector of micro-nano robot |
| CN110058406A (en) * | 2019-04-19 | 2019-07-26 | 同济大学 | A kind of rotating mirror system of automatic replacement prism |
| CN110058403A (en) * | 2019-04-19 | 2019-07-26 | 同济大学 | It is a kind of can automatic combined prism rotating mirror system |
-
2016
- 2016-02-03 CN CN201620105754.8U patent/CN205600747U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105500389A (en) * | 2016-02-03 | 2016-04-20 | 苏州大学 | Automatic replacement device of end effector of micro-nano robot |
| CN110058406A (en) * | 2019-04-19 | 2019-07-26 | 同济大学 | A kind of rotating mirror system of automatic replacement prism |
| CN110058403A (en) * | 2019-04-19 | 2019-07-26 | 同济大学 | It is a kind of can automatic combined prism rotating mirror system |
| CN110058406B (en) * | 2019-04-19 | 2020-11-27 | 同济大学 | Rotating mirror system capable of automatically replacing prism |
| CN110058403B (en) * | 2019-04-19 | 2020-11-27 | 同济大学 | Rotating mirror system capable of automatically combining prisms |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160928 Termination date: 20200203 |
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| CF01 | Termination of patent right due to non-payment of annual fee |