CN206960509U - Probe needle changing device is scanned under a kind of high vacuum environment - Google Patents
Probe needle changing device is scanned under a kind of high vacuum environment Download PDFInfo
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- CN206960509U CN206960509U CN201720846452.0U CN201720846452U CN206960509U CN 206960509 U CN206960509 U CN 206960509U CN 201720846452 U CN201720846452 U CN 201720846452U CN 206960509 U CN206960509 U CN 206960509U
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- probe
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- changing device
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Abstract
The utility model discloses probe needle changing device is scanned under a kind of high vacuum environment, including flying-spot tube probe gland, probe carriage and probe carriage carrying frame, wherein flying-spot tube probe gland includes magnet, electrode contact plate, probe carriage includes ferromagnetic plate, needle point fixing pipe and electrode contact ring, and probe carriage carrying frame includes through hole and stopping means, crawl handle.Main purpose of the present utility model is aimed to solve the problem that under high vacuum environment, in the case where not destroying vacuum condition, the problem of scan probe microscopic probe is changed by fast sample room, avoid breaking during needle exchange and change system vacuum environment, a kind of and probe the problems such as falling, misplacing, there is provided device that can improve scanning probe microscopy needle exchange efficiency.
Description
Technical field
It the utility model is related to testing of materials instrument field, and in particular to probe needle exchange dress is scanned under a kind of high vacuum environment
Put.
Background technology
PSTM (scanning tunneling microscope, hereinafter referred to as STM) is to utilize pin
Point and tunnel current caused by the quantum tunneling effect of sample room nanometer intervals and the exponential relationship at interval, realize that material surface is micro-
The microscope equipment of the atomic resolution of plot structure.STM can be applied in various complex environments：Ultrahigh vacuum and high compression ring
Border, low temperature (mK scopes) or high temperature (103K scopes) environment, in even various liquid environments.STM use field simultaneously
Widely, it is related to film growth, self-assembled monolayer, electrochemistry and catalyst field.
Different test materials needs to use the probe of different model, so STM exchanges different shaped during test
Number probe when, it is necessary to the probe of desired exchange is taken out, then the probe of replacement is put into probe carriage.But in the mistake of needle exchange
It is more than hour to vacuumize needs 3 with the high vacuum environment for destroying system script again by Cheng Zhonghui, while will also result in probe
The problems such as coming off, misplacing, influence the fluency of test.Therefore, in order to solve the above technical problems, special propose a kind of raising ultravacuum
The device of probe needle exchange efficiency is scanned under environment.
The content of the invention
Main purpose of the present utility model is aimed to solve the problem that under high vacuum environment, in the case where not destroying vacuum condition, by quick
Sample Room changes the problem of scan probe microscopic probe, avoids breaking during needle exchange and changes system vacuum environment, and probe falls
A kind of the problems such as falling, misplacing, there is provided device that can improve scanning probe microscopy needle exchange efficiency.
To reach above-mentioned technique effect, the utility model provides scanning probe needle changing device under a kind of high vacuum environment,
Including flying-spot tube probe gland, probe carriage and probe carriage carrying frame, wherein flying-spot tube probe gland includes magnet, electrode
Contact chip, probe carriage include ferromagnetic plate, needle point fixing pipe, electrode contact ring, probe carriage carrying frame include through hole and stopping means,
Capture handle.The surface of the scanning probe gland, probe carriage and probe carriage carrying frame is coated with one layer of conductive metal layer, the plating
Layer is one kind of gold, silver, platinum, iridium or other anti-oxidant conductive layers.The magnet for scanning probe gland can be with the electrode of probe carriage
Ring absorption linking is contacted, motor contact chip can be connected with stepper motor, realize up and down.Ferromagnetic plate can be placed in spy in probe carriage
On two step surfaces of punch block carrying frame position limit device, through hole can place magnet in probe carriage carrying frame, for adsorbing probe
The ferromagnetic plate of frame.Needle point fixing pipe in probe carriage is hollow cylinder, for placing needle point, is connect successively with ferromagnetic plate, electrode
Tactile ring is connected, and whole needle changing device realizes needle exchange by the control of manipulator and stepper motor.
Brief description of the drawings
Fig. 1 needle changing device schematic diagrames
Fig. 2 flying-spot tube probe gland schematic diagrames
Fig. 3 probe carriage schematic diagrames
Fig. 4 probe carriage carrying frame schematic diagrames.
Specific embodiment
Referring to Figure of description, scanning probe needle changing device under a kind of high vacuum environment, including flying-spot tube probe gland,
Probe carriage and probe carriage carrying frame, wherein flying-spot tube probe gland include magnet 1, electrode contact plate 2, and probe carriage includes ferromagnetic
Plate 3, needle point fixing pipe 4, electrode contact ring 5, probe carriage carrying frame include through hole 6 and stopping means 7, crawl handle 8.It is described to sweep
The surface for retouching probe gland, probe carriage and probe carriage carrying frame is coated with one layer of anti-oxidant conductive layer, the coating be gold, silver, platinum,
One kind of iridium etc., gold plate is selected in the present embodiment.The magnet 1 of scanning probe gland can contact ring 5 with the electrode of probe carriage
Absorption linking, motor contact chip 2 can be connected with stepper motor, realize up and down.Ferromagnetic plate 3 can be placed in spacing dress in probe carriage
Put on 7 two step surfaces, through hole 6 places magnet in probe carriage carrying frame, for adsorbing the ferromagnetic plate 3 of probe carriage.Probe carriage
In needle point fixing pipe 4 be hollow cylinder, for placing probe tip support, contacted successively with ferromagnetic plate 3, electrode ring 5 be connected,
Whole needle exchange process is realized by the control of manipulator and stepper motor.
When filling pin, the needle point support equipped with scanning probe is entered into needle point fixing pipe 4, the ferromagnetic plate 3 of probe carriage is placed in spy
On two step surfaces of the stopping means 7 of punch block carrying frame, the stepper motor of flying-spot tube probe gland is connected with by rising,
So that magnet 2 withstands electrode contact ring 5, crawl handle 8 is then clamped by manipulator and takes probe carriage carrying frame away, realizes dress pin
Process.
When taking pin, the stepper motor for being connected with flying-spot tube probe gland is moved down, the ferromagnetic plate 3 of probe carriage passes through probe
Magnet adsorption in frame carrying frame through hole 6, crawl handle 8 is then clamped by manipulator and takes probe carriage away, realization takes pin process.
Whole dress pin takes the process of pin to be realized by the regulation of manipulator and stepper motor, without the broken height for changing previous system
The environment such as vacuum, while accurate positioning, realize efficient needle exchange.
Claims (8)
1. probe needle changing device is scanned under a kind of high vacuum environment, it is characterised in that including flying-spot tube probe gland, probe carriage
With probe carriage carrying frame.
2. scan probe needle changing device under a kind of high vacuum environment as claimed in claim 1, it is characterised in that the flying-spot tube
Probe gland includes magnet, electrode contact plate.
3. scan probe needle changing device under a kind of high vacuum environment as claimed in claim 1, it is characterised in that the probe carriage
Including ferromagnetic plate, needle point fixing pipe, electrode contact ring.
4. scan probe needle changing device under a kind of high vacuum environment as claimed in claim 1, it is characterised in that the probe carriage
Carrying frame includes through hole, stopping means and crawl handle.
5. scan probe needle changing device under a kind of high vacuum environment as claimed in claim 1, it is characterised in that the scanning is visited
The surface of pin gland, probe carriage and probe carriage carrying frame is coated with one layer of anti-oxidant conductive layer, and the coating is in gold, silver, platinum, iridium
One kind.
6. scan probe needle changing device under a kind of high vacuum environment as claimed in claim 3, it is characterised in that the probe carriage
In needle point fixing pipe be hollow cylinder, for placing needle point support.
7. scan probe needle changing device under a kind of high vacuum environment as claimed in claim 4, it is characterised in that the spacing dress
Being set to two step surfaces, the ferromagnetic plate of probe carriage up and down can be stuck on two step surfaces of stopping means.
8. scan probe needle changing device under a kind of high vacuum environment as claimed in claim 4, it is characterised in that the through hole is used
To place adsorption piece, adsorption piece is magnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720846452.0U CN206960509U (en) | 2017-07-13 | 2017-07-13 | Probe needle changing device is scanned under a kind of high vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720846452.0U CN206960509U (en) | 2017-07-13 | 2017-07-13 | Probe needle changing device is scanned under a kind of high vacuum environment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206960509U true CN206960509U (en) | 2018-02-02 |
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ID=61384423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720846452.0U Active CN206960509U (en) | 2017-07-13 | 2017-07-13 | Probe needle changing device is scanned under a kind of high vacuum environment |
Country Status (1)
| Country | Link |
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| CN (1) | CN206960509U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111505341A (en) * | 2020-04-27 | 2020-08-07 | 南京信息工程大学 | Multi-sample quick-replacement type scanning probe microscope |
-
2017
- 2017-07-13 CN CN201720846452.0U patent/CN206960509U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111505341A (en) * | 2020-04-27 | 2020-08-07 | 南京信息工程大学 | Multi-sample quick-replacement type scanning probe microscope |
| CN111505341B (en) * | 2020-04-27 | 2022-03-08 | 南京信息工程大学 | Multi-sample quick-replacement type scanning probe microscope |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 6, Xiangyun Road, Changzhou, Jiangsu, Jiangsu Patentee after: Guocheng instrument (Changzhou) Co., Ltd Address before: No. 6, Xiangyun Road, Changzhou, Jiangsu, Jiangsu Patentee before: CHANGZHOU GUOCHENG NEW MATERIAL TECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |