CN113630036B - Motion resolution improving device and method for standing wave type piezoelectric ultrasonic motor - Google Patents
Motion resolution improving device and method for standing wave type piezoelectric ultrasonic motor Download PDFInfo
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- CN113630036B CN113630036B CN202110929222.1A CN202110929222A CN113630036B CN 113630036 B CN113630036 B CN 113630036B CN 202110929222 A CN202110929222 A CN 202110929222A CN 113630036 B CN113630036 B CN 113630036B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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Abstract
The utility model discloses a standing wave type piezoelectric ultrasonic motor motion resolution improving device and a method, comprising a mode switching device; the mode switching device comprises a clamp holder, a base, a sliding seat and a guide pin; the base is fixedly arranged on the stabilizing structure, the guide pin is fixedly connected in the base, and the sliding seat is arranged in the base and can freely move along the axial direction of the guide pin; the piezoelectric ultrasonic motor is arranged on the sliding seat; the clamp holder is used for realizing the fixation and release of the sliding seat, so that the motion state of the piezoelectric ultrasonic motor is switched, and the motion resolution of the piezoelectric ultrasonic motor is improved. According to the utility model, the resolution switching device is introduced to realize coarse positioning and fine positioning movement mode conversion of the standing wave type piezoelectric ultrasonic motor, so that the movement resolution of the system is effectively improved.
Description
Technical Field
The utility model belongs to the technical field of precise actuation, and particularly relates to a motion resolution improving device and method for a standing wave type piezoelectric ultrasonic motor.
Background
The standing wave type piezoelectric ultrasonic motor has the advantages of simple structure, low vibration, no electromagnetic noise, high positioning precision, quick dynamic response, easy miniaturization and the like, and is widely applied to the fields of precision and ultra-precision manufacturing and detection such as angle measurement, positioning platforms, photoetching and the like. The standing wave type piezoelectric ultrasonic motor structure is shown in figure 1, the motor stator simultaneously generates longitudinal vibration and bending vibration by applying orthogonal sine waves to the electrode plates, elliptical motion is synthesized at the position of the driving foot, the driving foot is contacted with a rotor made of piezoelectric ceramic materials during motion, and the vibration of the electrode plates is converted into a linear or circular motion track through friction force.
At present, the motion resolution of a standing wave type piezoelectric ultrasonic motor produced by israel nanomotor company can reach 10nm, and the nominal motion resolution of the same type of products of domestic Heidestar company is 50nm. In the aspect of product application, the nano standing wave type piezoelectric ultrasonic motor is utilized by the Harbin industrial university to develop a wafer processing prealignment system, and the motion resolution can reach 0.4'. The ultra-high precision angle measurement turntable angle measurement repeatability developed by the Nanomotion HR series standing wave type piezoelectric ultrasonic motor by the institute of mechanical manufacturing process of China engineering physical institute can reach 0.03'. An adjustable structure is invented by an inertial piezoelectric ultrasonic motor (CN 201711476769.0), so that the pre-pressure between a rotor and a stator of the ultrasonic motor can be manually adjusted. A laminated piezoelectric ceramic linear ultrasonic motor (CN 211127622U) integrates double-layer piezoelectric ceramics into the motor by adding a vertical plate, a U-shaped supporting plate, a baffle plate and other structures, so that the movement efficiency of a piezoelectric ceramic rotor of the motor is improved.
Motion resolution is a direct influencing factor and prerequisite for system positioning accuracy, repeated positioning accuracy. The above-mentioned precise and ultra-precise instruments and equipment all use the imported standing wave type piezoelectric ultrasonic motor with high motion resolution, and said utility model and its utility model utilize the motion resolution of piezoelectric motor itself. At present, the domestic standing wave type piezoelectric ultrasonic motor can reach 50nm motion resolution at maximum, and the use of the motor in precise and ultra-precise occasions is limited.
Disclosure of Invention
The utility model provides a motion resolution improving device of a standing wave type piezoelectric ultrasonic motor, which aims to solve the technical problem that the application of the existing domestic standing wave type piezoelectric ultrasonic motor is limited. According to the utility model, the resolution switching device is introduced to realize coarse positioning and fine positioning movement mode conversion of the standing wave type piezoelectric ultrasonic motor, so that the movement resolution of the system is effectively improved.
The utility model is realized by the following technical scheme:
a standing wave type piezoelectric ultrasonic motor motion resolution improving device comprises a mode switching device;
the mode switching device comprises a clamp holder, a base, a sliding seat and a guide pin;
the base is fixedly arranged on the stabilizing structure, the guide pin is fixedly connected in the base, and the sliding seat is arranged in the base and can freely move along the axial direction of the guide pin;
the piezoelectric ultrasonic motor is arranged on the sliding seat;
the clamp holder is used for realizing the fixation and release of the sliding seat, so that the motion state of the piezoelectric ultrasonic motor is switched, and the motion resolution of the piezoelectric ultrasonic motor is improved.
Preferably, the mode switching device of the present utility model further includes an elastic element;
the two side walls of the base along the axial direction of the guide pin are respectively provided with 2 openings, each opening is internally provided with one elastic element, one end of each elastic element is in contact with the end face of the sliding seat, and the other end of each elastic element is plugged by a jackscrew.
Preferably, the elastic element of the present utility model employs a spring.
Preferably, the clamp holder adopts a pneumatic device, and two telescopic air cylinders are arranged in the clamp holder;
after the gas circuit is communicated, the air cylinder stretches out to prop against the sliding seat, and the friction force generated by the air cylinder is larger than the friction driving force of the piezoelectric ultrasonic motor, so that when the piezoelectric ultrasonic motor moves, the sliding seat cannot move along the guide pin, and the sliding seat and the base cannot move relatively;
after the gas circuit is disconnected, the cylinder is retracted, the sliding seat is separated from the clamp holder, and the sliding seat can slide along the axial direction of the guide pin, so that the sliding seat and the base form relative movement.
Preferably, the holder of the present utility model employs electromagnetic means;
the clamp holder is internally provided with an electromagnet, and the sliding seat is made of ferromagnetic materials;
after the electromagnet is electrified, the clamp holder attracts the sliding seat, and the attraction force of the electromagnet to the sliding seat is larger than the friction driving force of the piezoelectric ultrasonic motor, so that the sliding seat and the base do not move relatively when the piezoelectric ultrasonic motor moves;
after the electromagnet is powered off, the clamp holder is separated from the sliding seat, the sliding seat can slide along the axial direction of the guide pin, and then the sliding seat and the base form relative movement.
Preferably, the utility model further comprises a control device;
the control device is used for controlling the clamp holder to realize movement state switching.
On the other hand, the utility model also provides a method for realizing the motion resolution improvement based on the lifting device, which comprises the following steps:
acquiring the motion condition of a piezoelectric ceramic rotor of a piezoelectric ultrasonic motor;
judging whether the distance between the current motion position of the piezoelectric ceramic rotor and the target position is larger than a preset value or not;
if yes, controlling the clamp to execute a coarse positioning movement mode: the clamp holder is controlled to fix the sliding seat, so that the sliding seat and the base do not move relatively when the piezoelectric ultrasonic motor moves, and the resolution of the piezoelectric ultrasonic motor is 50nm when the piezoelectric ultrasonic motor moves in a rough positioning mode;
otherwise, the clamp holder is controlled to execute a fine positioning movement mode, so that when the piezoelectric ultrasonic motor moves, the sliding seat and the base relatively move and simultaneously squeeze the elastic element, and the displacement variation of the sliding seat is as follows
The actual motion resolution of the piezoelectric ceramic rotor is calculated as follows:
σ＝50nm-σ 1 。
preferably, the utility model realizes the adjustment of the displacement variation of the sliding seat by replacing elastic elements with different rigidities, thereby realizing the improvement of the movement resolution.
The utility model has the following advantages and beneficial effects:
according to the utility model, the resolution switching device is adopted to realize the installation and adjustment of the standing wave type piezoelectric ultrasonic motor, so that the motion resolution of the standing wave type piezoelectric ultrasonic motor is improved.
The utility model can be used for adjusting the standing wave type ultrasonic motor, and can be expanded to the field of other traveling wave type or surface wave type piezoelectric ultrasonic motors needing to improve the east resolution.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the utility model and are incorporated in and constitute a part of this application, illustrate embodiments of the utility model. In the drawings:
fig. 1 is a schematic structural diagram of a conventional standing wave piezoelectric ultrasonic motor.
Fig. 2 is a schematic structural diagram of a switching device according to the present utility model.
Fig. 3 is a schematic structural diagram of a motion resolution improving device of a standing wave type piezoelectric ultrasonic motor.
FIG. 4 is a schematic diagram of the pneumatic control flow scheme of the present utility model.
Fig. 5 is a schematic diagram of an electric control flow according to the present utility model.
In the drawings, the reference numerals and corresponding part names:
1-clamp holder, 2-base, 3-slide, 4-elastic element, 5-jackscrew, 6-guide pin, 7-piezoelectricity ultrasonic motor, 8-drive foot, 9-grounding screw, 10-piezoceramics rotor.
Detailed Description
Hereinafter, the terms "comprises" or "comprising" as may be used in various embodiments of the present utility model indicate the presence of inventive functions, operations or elements, and are not limiting of the addition of one or more functions, operations or elements. Furthermore, as used in various embodiments of the utility model, the terms "comprises," "comprising," and their cognate terms are intended to refer to a particular feature, number, step, operation, element, component, or combination of the foregoing, and should not be interpreted as first excluding the existence of or increasing likelihood of one or more other features, numbers, steps, operations, elements, components, or combinations of the foregoing.
In various embodiments of the utility model, the expression "or" at least one of a or/and B "includes any or all combinations of the words listed simultaneously. For example, the expression "a or B" or "at least one of a or/and B" may include a, may include B or may include both a and B.
Expressions (such as "first", "second", etc.) used in the various embodiments of the utility model may modify various constituent elements in the various embodiments, but the respective constituent elements may not be limited. For example, the above-described tables do not limit the order and/or importance of the elements. The above description is only intended to distinguish one element from another element. For example, the first user device and the second user device indicate different user devices, although both are user devices. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of various embodiments of the present utility model.
It should be noted that: if it is described to "connect" one component element to another component element, a first component element may be directly connected to a second component element, and a third component element may be "connected" between the first and second component elements. Conversely, when one constituent element is "directly connected" to another constituent element, it is understood that there is no third constituent element between the first constituent element and the second constituent element.
The terminology used in the various embodiments of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the various embodiments of the utility model. As used herein, the singular is intended to include the plural unless the context clearly indicates otherwise. Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which various embodiments of the utility model belong. The terms (such as those defined in commonly used dictionaries) will be interpreted as having a meaning that is identical to the meaning of the context in the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein in connection with the various embodiments of the utility model.
For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the present utility model will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present utility model and the descriptions thereof are only for explaining the present utility model and are not limiting the present utility model.
Example 1
The embodiment provides a standing wave type piezoelectric ultrasonic motor motion resolution improving device,
as shown in fig. 2-3, the lifting device of the present embodiment includes a mode switching device.
The mode switching device mainly comprises a clamp 1, a base 2, a sliding seat 3 and a guide pin 6.
The base 2 is fixedly arranged on a motion system stabilizing structure, the guide pin 6 is fixedly connected in the base 2, and the sliding seat 3 can freely move in the base 2 along the axial direction of the guide pin 6; the standing wave type piezoelectric ultrasonic motor 7 is arranged on the sliding seat 3; the clamp holder 1 is used for realizing the fixation and release of the slide seat 3, thereby realizing the switching of the motion state and realizing the motion resolution of the standing wave type piezoelectric ultrasonic motor.
The mode switching device of the present embodiment further includes an elastic member 4; two side walls of the inside of the base 2 along the axial direction of the guide pin 6 are respectively provided with 2 open holes; in each opening is arranged an elastic element 4, one end of which elastic element 4 is in contact with the end face of the slide 3 (i.e. two free end faces of the slide 3 in the axial direction of the guide pin 6 are in contact with 2 elastic elements 4 respectively), the other end of which elastic element 4 is blocked by a jackscrew 5.
In this embodiment, 4 openings may be symmetrically disposed on two sidewalls of the base 2.
In this embodiment, the elastic element 4 may be a spring, or other elastic elements may be used.
The lifting device of the present embodiment further includes a control device, which may employ a controller, a computer device, or the like for realizing automatic control of the overall device, for example, acquiring the movement state information of the motor 7, and issuing a control command to control the gripper 1 to realize movement state switching, or the like.
In this embodiment, the standing wave type piezoelectric ultrasonic motor 7 needs to ground the grounding screw 9 when connected.
The working principle of the embodiment is as follows:
by introducing a sliding pair structure (formed by a base seat 2, a sliding seat 3 and a guide pin 6) on the basis of the fixed installation mode of the traditional standing wave type piezoelectric ultrasonic motor, the sliding pair is in a locking state during coarse positioning, and the motor moves in an inherent movement step length; when the sliding pair locking device moves to a set target position error range, the sliding pair locking device automatically loosens, when the driving foot is in contact with the piezoelectric ceramic rotor, friction driving force is transmitted to the motor sliding seat and is converted into pressure to the elastic element, the elastic element is caused to deform, the sliding pair is driven to generate a small displacement, the motor is driven to move the piezoelectric ceramic rotor and simultaneously the foot is driven to move in the opposite direction of the rotor, so that the actual movement step length of the piezoelectric ceramic rotor is reduced, and the movement resolution of the system is improved.
The distal end of the spring is provided with a jackscrew for adjusting the compression amount of the spring according toVariation sigma of slide displacement 0 The device is directly proportional to the acting force and inversely proportional to the spring stiffness coefficient, so that on the premise of constant friction driving force, the displacement of the motor sliding seat can be changed by changing springs with different stiffness coefficients, flexible adjustment of motion resolution is realized, a transverse guide pin is arranged in the middle of the clamp holder, and the motor and the sliding seat are limited to move reversely only along the motion direction of the rotor.
Example 2
In this embodiment, the holder 1 of the above embodiment 1 is further optimally designed:
the gripper 1 of the embodiment adopts a pneumatic device, two telescopic cylinders are arranged in the gripper 1, the cylinder stretches out to prop against the sliding seat 3 after ventilation, the friction force generated by the cylinder is larger than the friction driving force of the piezoelectric ultrasonic motor 7, when the driving foot 8 and the rotor 10 of the piezoelectric ultrasonic motor 7 move, the sliding seat 3 cannot move along the guide pin 6, and the sliding seat 3 and the base 2 cannot move relatively; when the air path is disconnected, the air cylinder is retracted, the sliding seat 3 is separated from the holder 1, the sliding seat 3 can slide along the axial direction of the guide pin 6, and the sliding seat 3 and the base 2 form relative movement.
As shown in fig. 4, the device of this embodiment operates as follows:
the power-on starts to execute a motion instruction, and automatically acquires a signal and judges the motion condition of the piezoelectric ceramic rotor 10 through feedback devices (sensing devices) such as gratings;
when the distance between the current movement position and the target position of the piezoelectric ceramic rotor 10 is greater than a preset value (set value), the clamp holder 1 is controlled to execute a coarse positioning movement mode, a gas path is communicated, the clamp holder 1 fixes the slide seat 3, and when the driving friction force is transmitted to the slide seat 3, the displacement variation of the slide seat 3 is 0, so that the self resolution of a motor is always kept at 50nm during coarse positioning movement;
when the distance between the current movement position and the target position of the piezoelectric ceramic rotor 10 is smaller than or equal to a preset value, the clamp holder 1 is controlled to execute a fine positioning movement mode, the air path is disconnected, the clamp holder 1 is separated from the slide seat 3, the slide seat 3 can move along the direction of the guide pin 6, the friction driving force is transmitted to the slide seat 3 during system movement, the slide seat 3 generates displacement change and simultaneously presses the spring, and the displacement change amount of the slide seat 3The spring rate k=175 N.mu.m is selected -1 The displacement of the slide 3 variesThe actual motion step length of the piezoelectric ceramic rotor 10 is the difference between the motion step length of the standing wave type piezoelectric ultrasonic motor 7 and the displacement variation of the sliding seat 3, and sigma=50 nm-sigma 1 ＝10n。
In the embodiment, the movement amount of the sliding seat 3 in each period can be changed by changing the springs 4 with different rigidities, so that the movement resolution adjustment is realized, and the actual movement step length can be observed through the upper computer after each adjustment. Through adjustment, the motion step length is shortened from 50nm to 10nm, and the motion resolution is obviously improved in the fine positioning mode.
Example 3
The present embodiment further optimizes the design of the gripper 1 and the slide 3 of the above embodiment 1:
the clamper 1 of the embodiment adopts an electromagnetic device, an electromagnet is arranged in the clamper 1, the sliding seat 3 is made of ferromagnetic materials, when the electromagnet is electrified, the sliding seat 3 is attracted, the attraction force of the electromagnet on the sliding seat 3 is larger than the friction driving force of a motor, and the sliding seat 3 and the base 2 cannot move relatively when the motor moves. After the electromagnet is powered off, the clamp holder 1 is separated from the sliding seat 3, the sliding seat 3 can slide along the axial direction of the guide pin 6, and then the sliding seat 3 and the base 2 form relative movement.
As shown in fig. 5, the device of this embodiment operates as follows:
the power-on starts to execute a motion instruction, and automatically acquires a signal and judges the motion condition of the piezoelectric ceramic rotor 10 through feedback devices (sensing devices) such as gratings;
when the distance between the current movement position of the piezoelectric ceramic rotor 10 and the target position is greater than a preset value (set value), the clamp holder 1 is controlled to execute a coarse positioning movement mode, the electromagnet is automatically electrified to attract the sliding seat 3, the attraction of the electromagnet to the sliding seat 3 is greater than the friction driving force of the motor, the sliding seat 3 cannot move relative to the base 2 when the system moves, and the resolution of the motor is always kept to be 50nm when the coarse positioning movement is performed;
when the distance between the current movement position and the target position of the piezoelectric ceramic rotor 10 is smaller than or equal to a preset value, the clamp holder 1 is controlled to execute a fine positioning movement mode, the electromagnet is de-energized, the clamp holder 1 is separated from the slide seat 3, the slide seat 3 can move along the direction of the guide pin 6, the friction driving force is transmitted to the slide seat 3 during system movement, the slide seat 3 generates displacement change and simultaneously presses the spring, and the displacement change amount of the slide seat 3The friction driving force of the ultrasonic motor is 7N, and the spring stiffness k=280 N.mu.m -1 The displacement of the slide 3 is varied>The actual motion step length of the piezoelectric ceramic rotor 10 is the difference between the motion step length of the standing wave type piezoelectric ultrasonic motor 7 and the displacement variation of the sliding seat 3, and sigma=50 nm-sigma 1 ＝25nm。
According to the embodiment, the displacement of the sliding seat 3 can be adjusted by replacing springs with different rigidities through precalculation, so that the movement resolution is improved.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the utility model, and is not meant to limit the scope of the utility model, but to limit the utility model to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the utility model are intended to be included within the scope of the utility model.
Claims (7)
1. The motion resolution improving device of the standing wave type piezoelectric ultrasonic motor is characterized by comprising a mode switching device;
the mode switching device comprises a clamp holder (1), a base (2), a sliding seat (3) and a guide pin (6);
the base (2) is fixedly arranged on the stable structure, the guide pin (6) is fixedly connected in the base (2), and the sliding seat (3) is arranged in the base (2) and can freely move along the axial direction of the guide pin (6);
the piezoelectric ultrasonic motor (7) is arranged on the sliding seat (3);
the clamp holder (1) is used for realizing the fixation and release of the sliding seat (3), so as to realize the motion state switching of the piezoelectric ultrasonic motor (7) and improve the motion resolution of the piezoelectric ultrasonic motor (7);
the working process of the motion resolution improving device is as follows:
acquiring the motion condition of a piezoelectric ceramic rotor (10) of a piezoelectric ultrasonic motor (7);
judging whether the distance between the current motion position and the target position of the piezoelectric ceramic rotor (10) is larger than a preset value or not;
if yes, controlling the gripper (1) to execute a coarse positioning movement mode: the clamp holder (1) is controlled to fix the sliding seat (3), so that when the piezoelectric ultrasonic motor (7) moves, the sliding seat (3) and the base (2) do not move relatively, and when coarse positioning moves, the self resolution of the piezoelectric ultrasonic motor (7) is 50nm;
otherwise, the clamp holder (1) is controlled to execute a fine positioning movement mode, so that when the piezoelectric ultrasonic motor (7) moves, the sliding seat (3) moves relatively to the base (2) and simultaneously presses the elastic element (4), and the displacement variation of the sliding seat (3) is as follows
The actual motion resolution of the piezoelectric ceramic rotor (10) is calculated as follows:
σ＝50nm-σ 1 。
2. a standing wave piezoelectric ultrasonic motor motion resolution enhancement device according to claim 1, characterized in that said mode switching means further comprises an elastic element (4);
2 open holes are respectively formed in the base (2) along the two side walls of the guide pin (6) in the axial direction, one elastic element (4) is arranged in each open hole, one end of the elastic element (4) is in contact with the end face of the sliding seat (3), and the other end of the elastic element (4) is plugged through a jackscrew (5).
3. A standing wave piezoelectric ultrasonic motor motion resolution improving device according to claim 2, characterized in that the elastic element (4) adopts a spring.
4. The standing wave type piezoelectric ultrasonic motor motion resolution improving device according to claim 1 is characterized in that a pneumatic device is adopted by the clamp holder (1), and two telescopic cylinders are arranged in the clamp holder (1);
after the gas circuit is communicated, the air cylinder stretches out to prop against the sliding seat (3), and the friction force generated by the air cylinder is larger than the friction driving force of the piezoelectric ultrasonic motor (7), so that when the piezoelectric ultrasonic motor (7) moves, the sliding seat (3) cannot move along the guide pin (6), and the sliding seat (3) and the base (2) cannot move relatively;
after the gas circuit is disconnected, the cylinder is retracted, the sliding seat (3) is separated from the clamp holder (1), the sliding seat (3) can slide along the axial direction of the guide pin (6), and then the sliding seat (3) and the base (2) form relative movement.
5. A standing wave type piezoelectric ultrasonic motor motion resolution improving device according to claim 1, wherein the clamper (1) adopts an electromagnetic device;
an electromagnet is arranged in the clamp holder (1), and the sliding seat (3) is made of ferromagnetic materials;
after the electromagnet is electrified, the clamp holder (1) attracts the sliding seat (3), and the attraction force of the electromagnet to the sliding seat (3) is larger than the friction driving force of the piezoelectric ultrasonic motor (7), so that the sliding seat (3) and the base (2) do not move relatively when the piezoelectric ultrasonic motor (7) moves;
after the electromagnet is powered off, the clamp holder (1) is separated from the sliding seat (3), the sliding seat (3) can slide along the axial direction of the guide pin (6), and then the sliding seat (3) and the base (2) form relative movement.
6. The standing wave type piezoelectric ultrasonic motor motion resolution improving device according to claim 1, further comprising a control device;
the control device is used for controlling the clamp holder (1) to realize movement state switching.
7. The standing wave type piezoelectric ultrasonic motor motion resolution improving device according to claim 1 is characterized in that the adjustment of the displacement variation of the sliding seat (3) is realized by replacing elastic elements (4) with different rigidities, so that the motion resolution is improved.
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| CN102931870A (en) * | 2012-11-02 | 2013-02-13 | 南京航空航天大学 | Standing wave linear ultrasonic motor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102931870A (en) * | 2012-11-02 | 2013-02-13 | 南京航空航天大学 | Standing wave linear ultrasonic motor |
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