CN101417427A - Large-range multi-dimension integrated micro-power detection and wireless feedback twin-lamella micro clamping device - Google Patents
Large-range multi-dimension integrated micro-power detection and wireless feedback twin-lamella micro clamping device Download PDFInfo
- Publication number
- CN101417427A CN101417427A CNA2008101178114A CN200810117811A CN101417427A CN 101417427 A CN101417427 A CN 101417427A CN A2008101178114 A CNA2008101178114 A CN A2008101178114A CN 200810117811 A CN200810117811 A CN 200810117811A CN 101417427 A CN101417427 A CN 101417427A
- Authority
- CN
- China
- Prior art keywords
- clamping
- module
- micro
- piezoelectric ceramics
- lamella
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims abstract description 58
- 241000446313 Lamella Species 0.000 claims description 64
- 230000003014 reinforcing effect Effects 0.000 claims description 31
- 238000004891 communication Methods 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims description 5
- UPLPHRJJTCUQAY-WIRWPRASSA-N 2,3-thioepoxy madol Chemical compound C([C@@H]1CC2)[C@@H]3S[C@@H]3C[C@]1(C)[C@@H]1[C@@H]2[C@@H]2CC[C@](C)(O)[C@@]2(C)CC1 UPLPHRJJTCUQAY-WIRWPRASSA-N 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 4
- 238000013461 design Methods 0.000 abstract description 2
- 238000005728 strengthening Methods 0.000 abstract 3
- 239000004065 semiconductor Substances 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000012636 effector Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Manipulator (AREA)
Abstract
The invention relates to a double-wafer micro gripper with large-range multi-scale integral micro-force detection and wireless feedback, in particular to a double-wafer micro gripper and belongs to the field of microoperation and micro-electro mechanical technology. The double-wafer micro gripper consists of a macro retractable module, a micro-motion clamping module, a clamping strengthening module, a micro-force sensing module, a data collecting module, a wireless communicating interface module and an upper computer module; wherein, a double-wafer with piezoelectric ceramics and a fixed clamping jaw are used as two clamping jaws of the micro gripper, the clamping jaw is integrated with a semi-conductor double-wafer to be used in micro-force detection and a wireless communicating module is used for information transfer of the data collecting module and the upper computer. The gripper designs a special clamping strengthening device with piezoelectric ceramics to cause the micro gripper to clamp large-range multi-scale parts, thus strengthening the universal property of the micro gripper.
Description
Technical field
The present invention relates to a kind of end effector of micro OS, particularly a kind of twin-lamella micro clamping device belongs to microoperation and field of micro electromechanical technology.
Background technology
Micro clamping device is the instrument of terminal execution of micro-manipulating robot and operation, is one of critical component.Its performance quality is to the effect of performance robot, and improving robot efficient has crucial effects.
Both at home and abroad in the achievement in research in micro clamping device field, on the mode of clamping miniature parts, micro clamping device can be divided into two classes substantially according at present.One class is the absorption type micro clamping device, and the absorption affinity that this class micro clamping device utilizes vacuum, liquid, static etc. to be produced grasps miniature parts.The absorption type micro clamping device of being researched and developed at present mainly comprises vacuum adsorption type, electrostatic adsorption type, liquid adsorption formula etc.Another kind of is the mechanical type micro clamping device, and this class micro clamping device generally has two or more fingers, and the motion by the jaw finger produces holding action and chucking power, can provide bigger flexibility to the operation of miniature object.According to the principle of generation driving force, the mechanical type micro clamping device can be divided into marmem (SEM) micro clamping device again, electrostatic force drives micro clamping device, Piezoelectric Ceramic micro clamping device, electromagnetic force driving micro clamping device etc.
The twin lamella micro-clamp of Central China University of Science and Technology's development is made up of two piezoelectric ceramics twin lamellas, fixture, driving power, deformation detecting unit, host computer, full-bridge circuit and bridge circuit power supply.Energy clamping micro parts also has the crooked deformation measuring ability of clamp.The Combined Micro-gripper of Harbin Institute of Technology development adopts the structure of grand little combination, finishes holding action by the combination of linear electric motors and piezoelectric ceramics twin lamella.
Generally speaking, in the research of micro clamping device, obtained bigger progress both at home and abroad in recent years, but these achievements design at MEMS device or some simple, special parts nearly all, the part of millimeter level size medium scale is not had relate to.And many realizations of having considered the holding function of micro clamping device, and do not consider the requirement of micro OS to the positioning accuracy of micro clamping device.Majority does not possess the chucking power measuring ability, even have relatedly, getting in touch also between its detecting unit and the host computer may produce with other parts interferes, and is subjected to the restriction on the space.
Summary of the invention
A kind of integrated micro-power that the object of the present invention is to provide detects the micro clamping device with wireless feedback, but the multiple dimensioned part that this clamper clamping 0.1mm is above, can satisfy the requirement of micro OS to the positioning accuracy of micro clamping device, can detect small chucking power, and detection signal is transferred to host computer with wireless communication interface, by host computer output feedback control signal, regulate the displacement of piezoelectric ceramics twin lamella, guarantee safe clamping part.
The present invention is achieved through the following technical solutions:
Large-range multi-dimension integrated micro-power of the present invention detects and the twin-lamella micro clamping device of wireless feedback can be divided into grand moving folding module, fine motion clamping module, clamping reinforcing module, little power sensing module, data acquisition module, wireless communication interface module and seven functional modules of upper computer module on function.
The rigidity that module can be strengthened the piezoelectric ceramics twin lamella is reinforced in clamping, makes it can guarantee the clamping power output of fixing, and clamps big part.Clamping is reinforced module by reinforcing jaw, turning cylinder, spring, electromagnet fixed block, electromagnet moved end, electromagnet fixed end, reinforcing device bearing composition.Their annexation is: reinforce jaw and be fixed on the reinforcing device bearing by turning cylinder, reinforcing has spring to connect between the jaw, the electromagnet fixed block is fixedlyed connected by screw with the reinforcing jaw, and electromagnet fixed end and electromagnet moved end are separately fixed on two electromagnet fixed blocks.The folding of the reinforcing jaw of reinforcing device is to realize by two lever-type structures of Electromagnetic Drive and symmetry.Under the off working state, the electromagnet energising, electromagnet moved end, the adhesive of electromagnet fixed end, the bare terminal end of reinforcing jaw unclamps.Under the duty, be that the piezoelectric ceramics twin lamella has bent to proper states, when part being clamped, the electromagnet outage, electromagnet moved end, electromagnet fixed end are decontroled, and rely on compressing of spring that the bare terminal end of reinforcing jaw is clamped, thereby clamp the piezoelectric ceramics twin lamella from side direction, guarantee fixing clamping power output, avoid in the process of clamping and transportation part, causing part to come off.
The concrete function and the implementation of other module are as follows:
Grand moving folding module can realize the part of direct clamping characteristic size more than 2mm, when the clamping precision component, and the coarse positioning in the time of also can realizing accurate clamping, it is by linear electric motors, and support and piezoelectric ceramics twin lamella are formed.Support is fixed on the linear electric motors, and the piezoelectric ceramics twin lamella is fixed on the support.Drive the support move left and right by linear electric motors, supporting band dynamic pressure electroceramics twin lamella move left and right cooperates with stationary jaw, realizes the part of direct clamping characteristic size more than 2mm.When the clamping precision component, realize the coarse positioning between piezoelectric ceramics twin lamella and the stationary jaw.
Fine motion clamping module can realize the accurate clamping to the part of characteristic size below 2mm.It is made up of adjustable dc source, piezoelectric ceramics twin lamella and stationary jaw.When part is carried out accurate clamping, after grand moving folding module is finished coarse positioning, add DC voltage for the piezoelectric ceramics twin lamella by adjustable dc source, twin lamella can produce bending in various degree under the voltage of different sizes, thereby in the 2mm scope, change the distance between twin lamella and the stationary jaw, and then clamp micro part.In clamping process, as benchmark, realize accurately location with stationary jaw, influence positioning accuracy because of the twin lamella insufficient rigidity when having avoided two jaws all to use twin lamella like this.
Little power sensing module, data acquisition module and wireless communication interface module and host computer are finished little power measuring ability jointly.Little power sensing module can be realized changing the amount of bow of piezoelectric ceramics twin lamella into the signal of telecommunication, and the detected signal of telecommunication is sent to data acquisition module.
Data acquisition module can be gathered the signal of telecommunication of little power sensing module output, and the signal of telecommunication of output is handled, and this signal of telecommunication can be transmitted by the wireless communication interface module.
The wireless communication interface module can be transferred to upper computer module with the signal of telecommunication that receives.Upper computer module is handled this signal, and is converted into chucking power, compares with default chucking power, and output feedback signal is controlled the voltage that adjustable dc source is exported again, thereby regulates the amount of bow of piezoelectric ceramics twin lamella, guarantees safe clamping part.
Large-range multi-dimension integrated micro-power of the present invention detects and the twin-lamella micro clamping device of wireless feedback can be divided into grand moving folding module, fine motion clamping module, clamping reinforcing module, little power sensing module, data acquisition module, wireless communication interface module and seven functional modules of upper computer module on function.Grand moving folding module can directly clamping characteristic size be the above grand part of 2mm, and is used for coarse positioning when the clamping characteristic size is the following miniature scale precision component of 2mm.It is the clamping of the following miniature scale part of 2mm that fine motion clamping module is exclusively used in characteristic size.Clamping is reinforced module when being used for characteristic size and being the above grand part clamping of 2mm, strengthens the rigidity of piezoelectric ceramics twin lamella, guarantees grand part clamping stability.Little power sensing module and data acquisition module are used to obtain clamping action power.The wireless communication interface module sends the signal of telecommunication of the clamping action power correspondence of collection to host computer.Upper computer module is used for the processing again and the judgement of feedback data, and the adjusting of adjustable dc source.The clamper course of work is as follows: when the clamping characteristic size is large scale part more than the 2mm, adopt the direct clamping part of grand moving folding module, and adopt clamping reinforcing module to act on piezoelectric ceramics twin lamella side, to strengthen its rigidity, guarantee the constant chucking power of piezoelectric ceramics twin lamella output, avoid causing part to come off in the process of clamping and transportation part, the clamping of large scale part is finished; When the clamping characteristic size is miniature scale precision component below the 2mm, at first adopt the position of grand moving folding module coarse positioning piezoelectric ceramics twin lamella, make folding amount between piezoelectric ceramics twin lamella and the stationary jaw smaller or equal to 2mm, after coarse positioning is finished, start fine motion clamping module, regulate the voltage output of adjustable dc source, make the bending of piezoelectric ceramics twin lamella, simultaneously little power sensing module detects the amount of bow of piezoelectric ceramics twin lamella, and change the signal of telecommunication into, by data collecting module collected and carry out signal and handle, be sent to upper computer module by wireless communication interface, feedback data is judged, and changed the voltage output of adjustable dc source, the amount of bow of regulating the piezoelectric ceramics twin lamella according to judged result, thereby change the folding amount between piezoelectric ceramics twin lamella and the stationary jaw, until guaranteeing reliable clamping, not because clamping action power is crossed the havoc workpiece, the clamping of miniature scale part is finished again.
Beneficial effect:
1, micro clamping device of the present invention can can't harm effective clamping to the part of characteristic size more than 0.1mm;
2, micro clamping device of the present invention is reinforced module by clamping and can be realized clamping to the part of big quality large scale;
3, micro clamping device of the present invention can satisfy the requirement of micro OS to the positioning accuracy of micro clamping device;
4, micro clamping device of the present invention can detect small chucking power, and carries out FEEDBACK CONTROL, and each functional module spatially is difficult for interfering, and is more flexible in actual use.
Description of drawings
Fig. 1 is micro clamping device and feedback fraction information flow diagram;
Fig. 2 is micro clamping device two-dimensional structure figure;
The two-dimensional structure figure of the piezoelectric ceramics clamping reinforcing device part of Fig. 3 micro clamping device.
Among the figure: 1-linear electric motors, 2-support, 3-clamping reinforcing device, 4-piezoelectric ceramics twin lamella, 5-stationary jaw, 6-base, 7-reinforce jaw, 8-turning cylinder, 9-spring, 10-electromagnet fixed block, 11-electromagnet moved end, 12-electromagnet fixed end, 13-reinforcing device bearing.
The specific embodiment
The present invention is further detailed explanation below in conjunction with accompanying drawing:
Fig. 1 is micro clamping device and feedback fraction information flow diagram, as shown in Figure 1, the twin-lamella micro clamping device of large-range multi-dimension integrated micro-power detection of the present invention and wireless feedback can be divided into grand moving folding module, fine motion clamping module, clamping reinforcing module, little power sensing module, data acquisition module, wireless communication interface module and seven functional modules of upper computer module on function.Grand moving folding module can directly clamping characteristic size be the grand part of 2-15mm, and is used for coarse positioning when the clamping characteristic size is 0.1-2mm miniature scale precision component.Fine motion clamping module is exclusively used in the clamping of miniature scale part.Clamping is reinforced module when being used for characteristic size and being the grand part clamping of 2-15mm, strengthens the rigidity of piezoelectric ceramics twin lamella, guarantees grand part clamping stability.Little power sensing module and data acquisition module are used to obtain clamping action power.The wireless communication interface module sends the signal of telecommunication of the clamping action power correspondence of collection to host computer.Upper computer module is used for the processing again and the judgement of feedback data, and the adjusting of adjustable dc source.The clamper course of work is as follows: when the clamping characteristic size is the large scale part of 2-15mm, adopt the direct clamping part of grand moving folding module, and adopt clamping reinforcing module to act on piezoelectric ceramics twin lamella side, to strengthen its rigidity, guarantee the constant chucking power of piezoelectric ceramics twin lamella output, avoid causing part to come off in the process of clamping and transportation part, the clamping of large scale part is finished; When the clamping characteristic size is the miniature scale precision component of 0.1-2mm, at first adopt the position of grand moving folding module coarse positioning piezoelectric ceramics twin lamella, make folding amount between piezoelectric ceramics twin lamella and the stationary jaw smaller or equal to 2mm, after coarse positioning is finished, start fine motion clamping module, regulate the voltage output of adjustable dc source, make the bending of piezoelectric ceramics twin lamella, simultaneously little power sensing module detects the amount of bow of piezoelectric ceramics twin lamella, and change the signal of telecommunication into, by data collecting module collected and carry out signal and handle, be sent to upper computer module by wireless communication interface, feedback data is judged, and changed the voltage output of adjustable dc source, the amount of bow of regulating the piezoelectric ceramics twin lamella according to judged result, thereby change the folding amount between piezoelectric ceramics twin lamella and the stationary jaw, until guaranteeing reliable clamping, not because clamping action power is crossed the havoc workpiece, the clamping of miniature scale part is finished again.
As depicted in figs. 1 and 2, the concrete function and the implementation of each module of twin-lamella micro clamping device of large-range multi-dimension integrated micro-power detection of the present invention and wireless feedback are as follows:
Grand moving folding module can realize the part of direct clamping characteristic size at 2-15mm, when the clamping precision component, and the coarse positioning in the time of also can realizing accurate clamping, it is by linear electric motors 1, and support 2 is formed with piezoelectric ceramics twin lamella 4.Support 2 is fixed on the linear electric motors 1, and piezoelectric ceramics twin lamella 4 is fixed on the support 2.Drive support 2 move left and right by linear electric motors, support 2 drives piezoelectric ceramics twin lamella 4 move left and right, realizes the part of direct clamping characteristic size at 2-15mm.When the clamping precision component, realize the coarse positioning of distance about 2mm between piezoelectric ceramics twin lamella and the stationary jaw 5.
Fine motion clamping module can realize the accurate clamping of characteristic size at the part of 0.1-2mm.It is made up of adjustable dc source, piezoelectric ceramics twin lamella 4 and stationary jaw 5.When part is carried out accurate clamping, after grand moving folding module is finished coarse positioning, add DC voltage for the piezoelectric ceramics twin lamella by adjustable dc source, twin lamella can produce bending in various degree under the voltage of different sizes, thereby in the 2mm scope, change the distance between twin lamella and the stationary jaw, and then clamp micro part.In clamping process, as benchmark, realize accurately location with stationary jaw, influence positioning accuracy inadequately because of twin lamella rigidity when having avoided two jaws all to use twin lamella like this.
As shown in Figure 3, the rigidity that module can be strengthened the piezoelectric ceramics twin lamella is reinforced in clamping, makes it can guarantee the clamping power output of fixing, and clamps big part.Clamping is reinforced module by reinforcing jaw, turning cylinder, spring, electromagnet fixed block, electromagnet moved end, electromagnet fixed end, reinforcing device bearing composition.Their annexation is: reinforce jaw 7 and be fixed on the reinforcing device bearing 13 by turning cylinder 8, reinforcing has spring 9 to connect between the jaw 7, electromagnet fixed block 10 with reinforce jaw 7 and fixedly connected by screw, electromagnet fixed end 12 and electromagnet moved end 11 are separately fixed on two electromagnet fixed blocks 10.The folding of the reinforcing jaw 7 of reinforcing device is to realize by two lever-type structures of Electromagnetic Drive and symmetry.Under the off working state, the electromagnet energising, electromagnet moved end 11,12 adhesives of electromagnet fixed end, the bare terminal end of reinforcing jaw 7 unclamps.Under the duty, be that piezoelectric ceramics twin lamella 4 has bent to proper states, when part being clamped, the electromagnet outage, electromagnet moved end 11, electromagnet fixed end 12 are decontroled, and rely on compressing of spring 9 that the bare terminal end of reinforcing jaw 7 is clamped, thereby clamp piezoelectric ceramics twin lamella 4 from side direction, guarantee fixing clamping power output, avoid in the process of clamping and transportation part, causing part to come off.
Little power sensing module, data acquisition module and wireless communication interface module and upper computer module are finished little power measuring ability jointly.Little power sensing module can be realized changing the amount of bow of piezoelectric ceramics twin lamella 4 into the signal of telecommunication, and the detected signal of telecommunication is sent to data acquisition module.
Data acquisition module can be gathered the signal of telecommunication of little power sensing module output, and the signal of telecommunication of output is handled, and this signal of telecommunication can be transmitted by the wireless communication interface module.
The wireless communication interface module can be transferred to upper computer module with the signal of telecommunication that receives.Upper computer module is handled this signal, and be converted into chucking power, compare with default chucking power, output feedback signal is controlled the voltage that adjustable dc source is exported again, thereby regulates the amount of bow of piezoelectric ceramics twin lamella, thereby change the folding amount between piezoelectric ceramics twin lamella and the stationary jaw, until guaranteeing reliable clamping, not because clamping action power is crossed the havoc workpiece, the clamping of smile yardstick part is finished again.
Claims (4)
1, the twin-lamella micro clamping device of large-range multi-dimension integrated micro-power detection and wireless feedback, be divided into grand moving folding module, fine motion clamping module, clamping reinforcing module, little power sensing module, data acquisition module, wireless communication interface module and seven functional modules of upper computer module, it is characterized in that: grand moving folding module can directly clamping characteristic size 2mm above grand part, and when the following miniature scale precision component of clamping characteristic size 2mm, be used for coarse positioning; Fine motion clamping module is exclusively used in the clamping of the following miniature scale part of characteristic size 2mm; Clamping is reinforced module when being used for the above grand part clamping of characteristic size 2mm, strengthens the rigidity of piezoelectric ceramics twin lamella, guarantees grand part clamping stability; Little power sensing module and data acquisition module are used to obtain clamping action power; The wireless communication interface module sends the signal of telecommunication of the clamping action power correspondence of collection to upper computer module; Upper computer module is used for the processing again and the judgement of feedback data, and the adjusting of adjustable dc source;
When the large scale part more than the clamping characteristic size 2mm, adopt the direct clamping part of grand moving folding module, and adopt clamping reinforcing module to act on piezoelectric ceramics twin lamella side, to strengthen its rigidity, guarantee the constant chucking power of piezoelectric ceramics twin lamella output, avoid causing part to come off in the process of clamping and transportation part, the clamping of large scale part is finished; When the miniature scale precision component below the clamping characteristic size 2mm, at first adopt the position of grand moving folding module coarse positioning piezoelectric ceramics twin lamella, make folding amount between piezoelectric ceramics twin lamella and the stationary jaw smaller or equal to 2mm, after coarse positioning is finished, start fine motion clamping module, regulate the voltage output of adjustable dc source, make the bending of piezoelectric ceramics twin lamella, simultaneously little power sensing module detects the amount of bow of piezoelectric ceramics twin lamella, and change the signal of telecommunication into, by data collecting module collected and carry out signal and handle, be sent to upper computer module by wireless communication interface, feedback data is judged, and changed the voltage output of adjustable dc source, the amount of bow of regulating the piezoelectric ceramics twin lamella according to judged result, thereby change the folding amount between piezoelectric ceramics twin lamella and the stationary jaw, until guaranteeing reliable clamping, not because clamping action power is crossed the havoc workpiece, the clamping of miniature scale part is finished again.
2, large-range multi-dimension integrated micro-power according to claim 1 detects the twin-lamella micro clamping device with wireless feedback, it is characterized in that: its clamping is reinforced module by reinforcing jaw (7), turning cylinder (8), spring (9), electromagnet fixed block (10), electromagnet moved end (11), electromagnet fixed end (12), reinforcing device bearing (13) is formed, their annexation is: reinforce jaw (7) and be fixed on the reinforcing device bearing (13) by turning cylinder (8), reinforcing has spring (9) to connect between the jaw (7), electromagnet fixed block (10) is fixedlyed connected by screw with reinforcing jaw (7), and electromagnet fixed end (12) and electromagnet moved end (11) are separately fixed on two electromagnet fixed blocks (10).
3, the twin-lamella micro clamping device of large-range multi-dimension integrated micro-power detection according to claim 1 and wireless feedback is characterized in that: two jaws that serve as micro clamping device with a slice piezoelectric ceramics twin lamella (4) and a slice stationary jaw (5) respectively.
4, the twin-lamella micro clamping device of large-range multi-dimension integrated micro-power detection according to claim 1 and wireless feedback, it is characterized in that: integrated wireless communication module on micro clamping device will pass to host computer with wireless communication mode from the data that micro clamping device collects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101178114A CN101417427B (en) | 2008-08-04 | 2008-08-04 | Large-range multi-dimension integrated micro-power detection and wireless feedback twin-lamella micro clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101178114A CN101417427B (en) | 2008-08-04 | 2008-08-04 | Large-range multi-dimension integrated micro-power detection and wireless feedback twin-lamella micro clamping device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101417427A true CN101417427A (en) | 2009-04-29 |
| CN101417427B CN101417427B (en) | 2010-12-08 |
Family
ID=40628525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101178114A Expired - Fee Related CN101417427B (en) | 2008-08-04 | 2008-08-04 | Large-range multi-dimension integrated micro-power detection and wireless feedback twin-lamella micro clamping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101417427B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519646A (en) * | 2011-12-15 | 2012-06-27 | 大连理工大学 | Micro-power loading test method of nonlinear piezoelectric micro-energy collector |
| CN103203737A (en) * | 2013-03-15 | 2013-07-17 | 北京工业大学 | Electromagnetic drive type micro-clamping device |
| CN103737586A (en) * | 2014-01-12 | 2014-04-23 | 北京工业大学 | Pneumatic type micro clamp for clamping lead of micro motor |
| CN106637141A (en) * | 2017-01-20 | 2017-05-10 | 广东爱康太阳能科技有限公司 | Solar cell coated graphite boat flake and graphite boat |
| CN107340755A (en) * | 2016-05-03 | 2017-11-10 | Ykk株式会社 | The control method that the part grip device and its part of pull head grip |
| CN110788876A (en) * | 2019-11-14 | 2020-02-14 | 徐州普瑞赛思物联网科技有限公司 | Intelligent robot is with overware antiskid tongs |
| CN110936352A (en) * | 2019-12-02 | 2020-03-31 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Piezoelectric micro-clamp with twisting function |
| CN111710100A (en) * | 2020-07-17 | 2020-09-25 | 平湖市华晟精密机械有限公司 | Automatic vending machine and using method thereof |
-
2008
- 2008-08-04 CN CN2008101178114A patent/CN101417427B/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519646A (en) * | 2011-12-15 | 2012-06-27 | 大连理工大学 | Micro-power loading test method of nonlinear piezoelectric micro-energy collector |
| CN103203737A (en) * | 2013-03-15 | 2013-07-17 | 北京工业大学 | Electromagnetic drive type micro-clamping device |
| CN103737586A (en) * | 2014-01-12 | 2014-04-23 | 北京工业大学 | Pneumatic type micro clamp for clamping lead of micro motor |
| CN107340755A (en) * | 2016-05-03 | 2017-11-10 | Ykk株式会社 | The control method that the part grip device and its part of pull head grip |
| CN106637141A (en) * | 2017-01-20 | 2017-05-10 | 广东爱康太阳能科技有限公司 | Solar cell coated graphite boat flake and graphite boat |
| CN106637141B (en) * | 2017-01-20 | 2019-08-27 | 广东爱康太阳能科技有限公司 | A kind of solar battery coated graphite boat piece and graphite boat |
| CN110788876A (en) * | 2019-11-14 | 2020-02-14 | 徐州普瑞赛思物联网科技有限公司 | Intelligent robot is with overware antiskid tongs |
| CN110936352A (en) * | 2019-12-02 | 2020-03-31 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Piezoelectric micro-clamp with twisting function |
| CN110936352B (en) * | 2019-12-02 | 2024-05-03 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Piezoelectric micro-clamp with rubbing function |
| CN111710100A (en) * | 2020-07-17 | 2020-09-25 | 平湖市华晟精密机械有限公司 | Automatic vending machine and using method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101417427B (en) | 2010-12-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101417427B (en) | Large-range multi-dimension integrated micro-power detection and wireless feedback twin-lamella micro clamping device | |
| CN103295651B (en) | Based on the Piezoelectric Driving Inchworm type positioning table of flexible amplification principle | |
| CN104467526B (en) | Inertia stick-slip cross-scale motion platform capable of achieving unidirectional movement | |
| CN100484728C (en) | Three-translation orthogonal decoupling parallel micromotion platform | |
| CN110138266A (en) | A kind of Inchworm type piezoelectric actuator | |
| CN101407060B (en) | Microgripper based on MEMS technology and control system | |
| CN206241884U (en) | A kind of constant force clamp | |
| CN102689300B (en) | The method of the micro-gripper clamp of the Piezoelectric Driving for Fine Boring and holding parts | |
| CN104362890B (en) | Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement | |
| CN106965133B (en) | A kind of Three Degree Of Freedom locating platform of stiffness variable | |
| CN113319881B (en) | High-efficiency high-precision three-degree-of-freedom micro-gripper and control method thereof | |
| CN109889086A (en) | A kind of Three Degree Of Freedom Piezoelectric Driving Micro and nano manipulation mechanical arm and its motivational techniques | |
| CN201109120Y (en) | Microposition platform for 2dof parallel structure | |
| CN202696501U (en) | Micro/nano-scale bionic rotation driving device | |
| CN102751899B (en) | Micro nano bionic multi-degree of freedom driving device | |
| CN205166404U (en) | Three -dimensional oval little feed movement platform of piezoelectricity drive | |
| CN110978041A (en) | Electromagnet-driven flexible micro-clamping device | |
| CN103950027A (en) | Linear supersonic motor-based two-finger parallel connection micro operation hand and operation method | |
| CN110154074A (en) | A kind of robot end's clamping device | |
| CN109951101A (en) | The ultraprecise four-degree-of-freedom positioning pose_adjuster and its motivational techniques of Piezoelectric Driving | |
| CN202639966U (en) | High-frequency ultraprecise processing lathe tool rest driving platform based on bridge-type flexible hinge | |
| CN210022870U (en) | Cleaning head assembly for automatic sorting machine of LED (light-emitting diode) wafers | |
| CN209242062U (en) | A kind of horizontal ruler ruler body material arranging apparatus | |
| CN113630036B (en) | Motion resolution improving device and method for standing wave type piezoelectric ultrasonic motor | |
| CN208714022U (en) | Novel clamping jaw device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent of invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Ye Xin Inventor after: Zhang Zhijing Inventor after: Sun Yuan Inventor after: Zhang Weimin Inventor after: Jin Xin Inventor before: Zhang Zhijing Inventor before: Ye Xin Inventor before: Sun Yuan Inventor before: Zhang Weimin Inventor before: Jin Xin |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: ZHANG ZHIJING YE XIN SUN YUAN ZHANG WEIMIN JIN XIN TO: YE XIN ZHANG ZHIJING SUN YUAN ZHANG WEIMIN JIN XIN |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101208 |