CN102689300B - The method of the micro-gripper clamp of the Piezoelectric Driving for Fine Boring and holding parts - Google Patents

The method of the micro-gripper clamp of the Piezoelectric Driving for Fine Boring and holding parts Download PDF

Info

Publication number
CN102689300B
CN102689300B CN201210181310.9A CN201210181310A CN102689300B CN 102689300 B CN102689300 B CN 102689300B CN 201210181310 A CN201210181310 A CN 201210181310A CN 102689300 B CN102689300 B CN 102689300B
Authority
CN
China
Prior art keywords
micro
gripper clamp
piezoelectric ceramic
ceramic actuator
clamping head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210181310.9A
Other languages
Chinese (zh)
Other versions
CN102689300A (en
Inventor
张大朋
张正涛
高群
徐德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Automation of Chinese Academy of Science
Original Assignee
Institute of Automation of Chinese Academy of Science
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Automation of Chinese Academy of Science filed Critical Institute of Automation of Chinese Academy of Science
Priority to CN201210181310.9A priority Critical patent/CN102689300B/en
Publication of CN102689300A publication Critical patent/CN102689300A/en
Application granted granted Critical
Publication of CN102689300B publication Critical patent/CN102689300B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Manipulator (AREA)

Abstract

The invention discloses a kind of micro-gripper clamp of the Piezoelectric Driving possessing chucking power perceptional function for Fine Boring and use the method for described micro-gripper clamp holding parts.The present invention realizes the control of micro-gripper clamp precise motion by controlling Piezoelectric Ceramic voltage, realizes the harmless clamping across yardstick (0.1 μm ~ 6mm) special-shaped part.In clamping process, micro-vision camera is arranged on above micro-gripper clamp, according to by the suitable clamping head of holding parts size Selection, when gripper clamp does not contact with part according to the nearly part of micro-vision image control gripper clamp head rest; When passing through Micro-force sensor perception chucking power after gripper clamp and feature contacts, control the motion of micro-gripper clamp according to feedback force signal.The present invention can improve accuracy and the reliability of micro-gripper clamp, can realize the harmless clamping of part, to meet the demand of Fine Boring.

Description

The method of the micro-gripper clamp of the Piezoelectric Driving for Fine Boring and holding parts
Technical field
The present invention relates to Fine Boring and field of micro electromechanical technology, be specifically related to the method for the micro-gripper clamp of a kind of Piezoelectric Driving for Fine Boring and holding parts.
Background technology
Along with the development of Micrometer-Nanometer Processing Technology, microelectric technique, MEMS etc., in the urgent need to multiple minute yardstick Assembly of the parts is become complication system.Micro-gripper clamp, as the end effector with clamping object contact direct in microassembly system, plays decisive role to completing of micro assemby task.There are following three shortcomings in conventional clamper: the positioning precision that 1) cannot reach micron level; 2) can not realize across the parallel clamping of yardstick part; 3) perception of chucking power is not possessed.Therefore, traditional clamper cannot be applied in Fine Boring.
The micro-gripper clamp of Piezoelectric Driving possesses the advantages such as response is fast, resolution ratio is high, control accuracy is high, chucking power is large, is therefore widely used in various fields.The micro-gripper clamp of Piezoelectric Driving that research has chucking power induction is a study hotspot in Fine Boring.
Summary of the invention
The object of the present invention is to provide a kind of common piezoelectric with micro-force sensing function for Fine Boring to drive the method for micro-gripper clamp and holding parts, overcome the deficiency of traditional gripper clamp, realize the harmless clamping to special-shaped minute yardstick part.
For achieving the above object, according to an aspect of the present invention, propose the micro-gripper clamp of a kind of Piezoelectric Driving for Fine Boring, it is characterized in that, this micro-gripper clamp comprises: dismantled and assembled clamping head 1, dismantled and assembled clamping head 18, piezoelectric strain sheet 2, piezoelectric strain sheet 17, flexible clamping mechanism 3, upper fixed cap 6, piezoelectric ceramic actuator 8, pretension block 10, top 14 and micro-gripper clamp base 12;
Dismantled and assembled clamping head 1, dismantled and assembled clamping head 18 are sleeved on the retaining part of flexible clamping mechanism 3; Flexible clamping mechanism 3 is connected with micro-gripper clamp base 12 by screw 4, screw 5, screw 15 and screw 16; Micro-gripper clamp base 12 is fixed on electronic or manual platform, to make micro-gripper clamp automation or semi-automatic motion; Piezoelectric strain sheet 2, piezoelectric strain sheet 17 are pasted onto the maximum flexible hinge place of flexible clamping mechanism 3 deflection;
Described piezoelectric ceramic actuator 8 profile is cylinder, and the circular hole on micro-gripper clamp base 12 is inserted in one end, and the other end and top 14 contact; Upper fixed cap 6 is pressed on piezoelectric ceramic actuator 8, and is connected with micro-gripper clamp base 12 with screw 13 by screw 7; Upper fixed cap 6 and piezoelectric ceramic actuator 8 contact site are designed to arc-shaped, make piezoelectric ceramic actuator 8 in axial direction promote top 14 only and move; Top 14 is placed in the semi-circular groove on micro-gripper clamp base 12, and one end and flexible clamping mechanism 3 contact, and the other end contacts with piezoelectric ceramic actuator 8;
Pretension block 10 is connected with micro-gripper clamp base 12 with screw 11 by screw 9, for piezoelectric ceramic actuator 8 provides pretightning force.
According to a further aspect in the invention, also propose a kind of method using described micro-gripper clamp holding parts, it is characterized in that, the method comprises the following steps:
Step 1, is placed on part to be held on electric controlled sliding moving platform, and selects suitable clamping head according to the physical dimension of part to be assembled;
Step 2, installs micro-vision camera above micro-gripper clamp, camera is aimed at the clamping head of micro-gripper clamp, to gather the position coordinates at assembly space and the attitude angle of part to be assembled;
Step 3, the position of the part to be held arrived according to described camera collection and attitude, the electric controlled sliding moving platform controlling to be connected with micro-gripper clamp base moves, and makes part to be held enter the working range of clamping head;
Step 4, after part to be held enters clamping head working range, first passes through the distance between the micro-vision image determination clamping head of collection and part to be held; Then connect the control power supply of piezoelectric ceramic actuator, piezoelectric ceramic actuator exports moving displacement, and this output displacement is passed to flexible clamping mechanism, and the axial-movement of piezoelectric ceramic actuator is converted into the holding action of clamping head by flexible clamping mechanism; Clamping head is made to contact part to be held finally by the output displacement controlling piezoelectric ceramic actuator;
Step 5, when after clamping head and feature contacts to be held, using the input voltage of piezoelectric ceramic actuator as input, the deflection at the flexible hinge place of the flexible clamping mechanism that piezoelectric strain sheet detects, for exporting, adopts PID method to carry out closed-loop control;
Step 6, when chucking power meets the requirement of holding parts, cuts off the power supply of piezoelectric ceramic actuator, completes the harmless clamping treating holding parts.The micro-gripper clamp tool of Piezoelectric Driving that the present invention proposes has the following advantages: 1) flexible clamping mechanism adopts the configurations that lever and parallel four-bar structure combine, and realizes the parallel clamping to holding parts; 2) solve the contradiction between clamping range and Motion Resolution rate, realize across clamping resolution ratio higher under yardstick clamping range; 3) detect clamping deformation by piezoelectric strain sheet, the size of perception chucking power thus, realizes the harmless clamping of part.Described micro-gripper clamp volume that the present invention proposes is little, lightweight, adapt to fine manipulation microscope under limited working space.Compared with other micro clamping device, the present invention has larger versatility and applicability, has very high practical value.
Accompanying drawing explanation
Fig. 1 is the top view of the micro-gripper clamp of the present invention.
Fig. 2 is flexible clamping mechanism structure chart.
Fig. 3 is flexible hinge structure figure.
Fig. 4 is flexible clamping mechanism amplification principle figure.
Fig. 5 is the schematic diagram placed on base platform by holding parts.
Fig. 6 is the method flow diagram using micro-gripper clamp holding parts.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
The present invention can be used for the accurate clamping of part, movement and assembling.Fig. 1 is the top view of the micro-gripper clamp of the present invention, and as shown in Figure 1, the micro-gripper clamp of the present invention mainly comprises: dismantled and assembled clamping head 1,18, piezoelectric strain sheet 2,17, flexible clamping mechanism 3, upper fixed cap 6, piezoelectric ceramic actuator 8, pretension block 10, top 14 and micro-gripper clamp base 12.
Dismantled and assembled clamping head 1,18 is sleeved on the retaining part of flexible clamping mechanism 3; Flexible clamping mechanism 3 is connected with micro-gripper clamp base 12 with 16 by screw 4,5,15; Micro-gripper clamp base 12 is fixed on electronic or manual platform, to realize the automation of micro-gripper clamp or semi-automatic motion; Piezoelectric strain sheet 2,17 is pasted onto the maximum flexible hinge place of flexible clamping mechanism 3 deflection, and the maximum strain direction straining grid sensitive direction and flexible hinge in piezoelectric strain sheet is consistent, to realize the perception of piezoelectric strain sheet 2,17 to micro-gripper clamp chucking power;
Piezoelectric ceramic actuator 8, as the drive source of micro-gripper clamp, can realize nano level Motion Resolution rate; Described piezoelectric ceramic actuator 8 profile is cylinder, and the circular hole on micro-gripper clamp base 12 is inserted in one end, and the other end and top 14 contact; Use upper fixed cap 6 to be pressed on piezoelectric ceramic actuator 8 simultaneously, and be connected with micro-gripper clamp base 12 with 13 by screw 7; Upper fixed cap 6 and piezoelectric ceramic actuator 8 contact site are designed to arc-shaped, make piezoelectric ceramic actuator 8 in axial direction promote top 14 only and move; Top 14 is placed in the semi-circular groove on micro-gripper clamp base 12, one end and flexible clamping mechanism 3 contact, the other end contacts with piezoelectric ceramic actuator 8, by pretension block 10, top 14 is stuck in the middle of flexible clamping mechanism 3 and piezoelectric ceramic actuator 8, the output displacement of piezoelectric ceramic actuator 8 and power output are passed to flexible clamping mechanism 3;
Pretension block 10 is connected with micro-gripper clamp base 12 with 11 by screw 9, for piezoelectric ceramic actuator 8 provides pretightning force, described pretension block 10 1 aspect is for ensureing piezoelectric ceramic actuator 8 and flexible clamping mechanism 3 close contact before clipping operation, on the other hand for regulating the initial distance of micro-clamping jaw, (feeding of pretension block 10 to be converted into the motion between dismantled and assembled clamping head 1 and 18 by flexible clamping mechanism 3, adjust the distance of micro-clamping jaw thus), to realize the clamping of different scale object;
Piezoelectric ceramic actuator 8 motion is in axial direction converted to the clamping movement between dismantled and assembled clamping head 1 and 18 by flexible clamping mechanism 3.Fig. 2 is the structure chart of flexible clamping mechanism 3, the structure that described flexible clamping mechanism 3 adopts secondary flexible hinge lever and parallel four-bar to combine.The input secondary of piezoelectric ceramic actuator 8 amplifies by secondary flexible hinge lever construction, and what wherein one-level was amplified is input as the input displacement y of piezoelectric ceramic actuator 8 along power F direction 0, export the displacement into hinge H2 place; The displacement being input as hinge H2 place that secondary amplifies, exports the output displacement Δ x into dismantled and assembled clamping head 1 and 18, as shown in Figure 2.
H1 ~ H7 is straight beam type flexible hinge structure, and wherein t is the thickness of flexible hinge thinnest part, and R is rounding radii, and l is linear beam portion length, and b is the thickness of hinge, as shown in Figure 3.Parallel four-bar structure on described flexible clamping mechanism 3 rotates around certain point for limiting secondary flexible hinge lever construction, realize dismantled and assembled clamping head 1 with 18 the object of parallel holding parts.
The amplification principle of flexible clamping mechanism 3 as shown in Figure 4, the coordinate (x of the A that sets up an office a, y a) be:
x A = x O ′ + l 1 cos θ 1 y A = y O ′ + l 1 sin θ 1
Wherein, (x o ', y o ') be the coordinate of strong point O ', l 1for bar l 1length, θ 1the straight line formed for AB and horizontal angle:
Coordinate (the x of some B b, y b) be:
x B = x O ′ - l 2 cos θ 1 y B = y O ′ - l 2 sin θ 1
Wherein, l 2for bar l 2length.
As A end input displacement y upwards 0time, bar l 3turn clockwise around a B, bar l 2driven rod l 3be rotated counterclockwise around O ', the corner of both direction is all very little and substantially identical.Therefore, the coordinate (x of C is put c, y c) be:
x C = x B y C = y B - l 3
Wherein, l 3for bar l 3length.
Coordinate (the x of some D d, y d) be:
x D = x C - l 4 y D = y C
Wherein, l 4for bar l 4length.
Coordinate (the x of some F f, y f) be:
x F = ( l 6 + l 7 ) cos ( θ 2 + θ 3 ) y F = ( l 6 + l 7 ) sin ( θ 2 + θ 3 )
Wherein, l 6for bar l 6length, l 7for bar l 7length, l 5for bar l 5length.
Due to θ 1very little, so cos θ 1≈ 1, therefore can obtain the relation of constrained input displacement:
Δx = ( l 6 + l 7 ) cos [ arctan ( y o ′ - l 3 - l 2 Δy 0 l 1 x o ′ - l 2 - l 4 ) + arctan l 5 l 6 ] ,
Select rational dismantled and assembled clamping head 1 and 18 according to accessory size to be held, by the deformation at flexible hinge place on piezoelectric strain sheet 2,17 perception flexible clamping mechanism 3 in clamping process, and gather deformation signal by data acquisition unit.When clamping head 1 with 18 with when being contacted by holding parts 19, according to gather deformation signal adjustment piezoelectric ceramic actuator 8 input voltage, formed closed loop PID control with this, realized the object that part be can't harm to clamping.
Fig. 5 is the position view of part to be assembled on the micro-gripper clamp of the present invention, when clamping precision component, be placed on base platform 20 by holding parts 19, this base platform is fixed on vibration-isolating platform, fixes and is also fixed on vibration-isolating platform by the electronic or manual platform of micro-gripper clamp of holding parts 19.
The invention also proposes a kind of method using described micro-gripper clamp holding parts, as shown in Figure 6, the method comprises the following steps its flow chart:
Step 1, is placed on part to be held on electric controlled sliding moving platform, and selects suitable clamping head according to the physical dimension of part to be assembled, to realize clamping across yardstick part;
Step 2, installs micro-vision camera above micro-gripper clamp, camera is aimed at the clamping head of micro-gripper clamp, to gather the position coordinates at assembly space and the attitude angle of part to be assembled;
Step 3, the position coordinates of the part to be held arrived according to described camera collection and attitude angle, the electric controlled sliding moving platform controlling to be connected with micro-gripper clamp base moves, and makes part to be held enter the working range of clamping head;
Step 4, after part to be held enters clamping head working range, first passes through the distance between the micro-vision image determination clamping head of collection and part to be held; Then connect the control power supply of piezoelectric ceramic actuator, piezoelectric ceramic actuator exports moving displacement, and this output displacement is passed to flexible clamping mechanism, and the axial-movement of piezoelectric ceramic actuator is converted into the holding action of clamping head by flexible clamping mechanism; Clamping head is made to contact part to be held finally by the output displacement controlling piezoelectric ceramic actuator;
Step 5, when after clamping head and feature contacts to be held, using the input voltage of piezoelectric ceramic actuator as input, the deflection at the flexible hinge place of the flexible clamping mechanism that piezoelectric strain sheet detects, for exporting, adopts PID method to carry out closed-loop control to described deflection;
PID closed loop control method is closed loop control method conventional in prior art, does not repeat at this.
Step 6, when chucking power meets the requirement of holding parts (deflection at corresponding flexible hinge place arrives certain value), cuts off the power supply of piezoelectric ceramic actuator, completes the harmless clamping treating holding parts.
The overall dimensions of micro-gripper clamp of the present invention is 86mm × 60mm × 5mm (long × wide × high), and clamping displacement resolution is 20nm, and clamping repetitive positioning accuracy is 0.15 μm.The present invention has compact conformation, and working space is large, kinematic accuracy high, can realize the harmless clamping across yardstick part.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (8)

1. the micro-gripper clamp of the Piezoelectric Driving for Fine Boring, it is characterized in that, this micro-gripper clamp comprises: the first dismantled and assembled clamping head (1), the second dismantled and assembled clamping head (18), first piezoelectric strain sheet (2), the second piezoelectric strain sheet (17), flexible clamping mechanism (3), upper fixed cap (6), piezoelectric ceramic actuator (8), pretension block (10), top (14) and micro-gripper clamp base (12);
First dismantled and assembled clamping head (1), the second dismantled and assembled clamping head (18) are sleeved on the retaining part of flexible clamping mechanism (3); Flexible clamping mechanism (3) is connected with micro-gripper clamp base (12) with the 4th screw (16) by the first screw (4), the second screw (5), the 3rd screw (15); Micro-gripper clamp base (12) is fixed on electronic or manual platform, to make micro-gripper clamp automation or semi-automatic motion; First piezoelectric strain sheet (2), the second piezoelectric strain sheet (17) are pasted onto the maximum flexible hinge place of flexible clamping mechanism (3) deflection;
Described piezoelectric ceramic actuator (8) profile is cylinder, and the circular hole on micro-gripper clamp base (12) is inserted in one end, and the other end and top (14) contact; Upper fixed cap (6) is pressed on piezoelectric ceramic actuator (8), and is connected with micro-gripper clamp base (12) with the 6th screw (13) by the 5th screw (7); Upper fixed cap (6) and piezoelectric ceramic actuator (8) contact site are designed to arc-shaped, make piezoelectric ceramic actuator (8) in axial direction promote top (14) motion only; Top (14) is placed in the semi-circular groove on micro-gripper clamp base (12), and one end and flexible clamping mechanism (3) contact, and the other end contacts with piezoelectric ceramic actuator (8);
Pretension block (10) is connected with micro-gripper clamp base (12) with the 8th screw (11) by the 7th screw (9), for piezoelectric ceramic actuator (8) provides pretightning force;
Piezoelectric ceramic actuator (8) motion is in axial direction converted to the clamping movement between the first dismantled and assembled clamping head (1) and the second dismantled and assembled clamping head (18) by described flexible clamping mechanism (3), the structure that described flexible clamping mechanism (3) adopts secondary flexible hinge lever and parallel four-bar to combine, the input secondary of piezoelectric ceramic actuator (8) amplifies by secondary flexible hinge lever construction, and what wherein one-level was amplified is input as the input displacement y of piezoelectric ceramic actuator (8) along force direction 0the output that secondary amplifies is the output displacement Δ x of the first dismantled and assembled clamping head (1) and the second dismantled and assembled clamping head (18), parallel four-bar structure rotates around certain point for limiting secondary flexible hinge lever construction, realize the first dismantled and assembled clamping head (1) and the second dismantled and assembled clamping head (18) parallel holding parts, wherein:
Δx = ( l 6 + l 7 ) cos [ arctan ( y o ′ - l 3 - l 2 Δy 0 l 1 x o ′ - l 2 - l 4 ) + arctan l 5 l 6 ] ,
Wherein, (x o', y o') be the coordinate of strong point O', l 1for the length between External Force Acting point A and strong point O', l 2for the length between strong point O' and the first intermediate point B, l 3be the length between the first intermediate point B and the second intermediate point C, l 4be the length between the second intermediate point C and the 3rd intermediate point D, l 5be the vertical length between the 3rd intermediate point D and the 4th intermediate point E, l 6be the length between the 4th intermediate point E and described flexible clamping mechanism (3) place coordinate origin O, l 7be the length between the 4th intermediate point E and the 5th intermediate point F.
2. the micro-gripper clamp of Piezoelectric Driving according to claim 1, is characterized in that, the maximum strain direction straining grid sensitive direction and flexible hinge in described first and second piezoelectric strain sheets is consistent, to carry out perception to micro-gripper clamp chucking power.
3. the micro-gripper clamp of Piezoelectric Driving according to claim 2, is characterized in that, described piezoelectric ceramic actuator (8), as the drive source of micro-gripper clamp, can realize nano level Motion Resolution rate.
4. the micro-gripper clamp of Piezoelectric Driving according to claim 1, it is characterized in that, pretension block (10) will come directly towards (14) and be stuck in the middle of flexible clamping mechanism (3) and piezoelectric ceramic actuator (8), and the output displacement of piezoelectric ceramic actuator (8) and power output are passed to flexible clamping mechanism (3).
5. the micro-gripper clamp of Piezoelectric Driving according to claim 1, it is characterized in that, described pretension block (10) for ensureing piezoelectric ceramic actuator (8) and flexible clamping mechanism (3) close contact before clipping operation, also for regulating the initial distance of micro-clamping jaw.
6. the micro-gripper clamp of Piezoelectric Driving according to claim 1, it is characterized in that, when clamping head (1) and clamping head (18) are with when being contacted by holding parts (19), according to the input voltage of deformation signal adjustment piezoelectric ceramic actuator (8) gathered, form closed loop PID control, to clamp part is harmless.
7. use a method for the micro-gripper clamp holding parts described in claim 1, it is characterized in that, the method comprises the following steps:
Step 1, is placed on part to be held on electric controlled sliding moving platform, and selects suitable clamping head according to the physical dimension of part to be assembled;
Step 2, installs micro-vision camera above micro-gripper clamp, camera is aimed at the clamping head of micro-gripper clamp, to gather the position coordinates at assembly space and the attitude angle of part to be assembled;
Step 3, the position coordinates of the part to be held arrived according to described camera collection and attitude angle, the electric controlled sliding moving platform controlling to be connected with micro-gripper clamp base moves, and makes part to be held enter the working range of clamping head;
Step 4, after part to be held enters clamping head working range, first passes through the distance between the micro-vision image determination clamping head of collection and part to be held; Then connect the control power supply of piezoelectric ceramic actuator, piezoelectric ceramic actuator exports moving displacement, and this output displacement is passed to flexible clamping mechanism, and the axial-movement of piezoelectric ceramic actuator is converted into the holding action of clamping head by flexible clamping mechanism; Clamping head is made to contact part to be held finally by the output displacement controlling piezoelectric ceramic actuator;
Step 5, when after clamping head and feature contacts to be held, using the input voltage of piezoelectric ceramic actuator as input, the deflection at the flexible hinge place of the flexible clamping mechanism that piezoelectric strain sheet detects, for exporting, adopts PID method to carry out closed-loop control to described deflection;
Step 6, when chucking power meets the requirement of holding parts, cuts off the power supply of piezoelectric ceramic actuator, completes the harmless clamping treating holding parts.
8. method according to claim 7, is characterized in that, the requirement of described holding parts is that the deflection at corresponding flexible hinge place arrives a certain predetermined value.
CN201210181310.9A 2012-06-04 2012-06-04 The method of the micro-gripper clamp of the Piezoelectric Driving for Fine Boring and holding parts Expired - Fee Related CN102689300B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210181310.9A CN102689300B (en) 2012-06-04 2012-06-04 The method of the micro-gripper clamp of the Piezoelectric Driving for Fine Boring and holding parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210181310.9A CN102689300B (en) 2012-06-04 2012-06-04 The method of the micro-gripper clamp of the Piezoelectric Driving for Fine Boring and holding parts

Publications (2)

Publication Number Publication Date
CN102689300A CN102689300A (en) 2012-09-26
CN102689300B true CN102689300B (en) 2015-10-28

Family

ID=46855120

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210181310.9A Expired - Fee Related CN102689300B (en) 2012-06-04 2012-06-04 The method of the micro-gripper clamp of the Piezoelectric Driving for Fine Boring and holding parts

Country Status (1)

Country Link
CN (1) CN102689300B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103350333A (en) * 2013-06-03 2013-10-16 大连理工大学 Tiny component assembling device and method
CN103331588B (en) * 2013-06-18 2016-01-20 北京航空航天大学 A kind of micro-clamp device with clamping and rubbing function
CN105406755B (en) * 2015-12-07 2017-06-30 天津大学 A kind of integral type micro-nano double fastener holder
CN107621222B (en) * 2017-09-26 2023-11-03 上海市计量测试技术研究院 Vibrating wire type strain gauge calibrating device
CN109129411B (en) * 2018-09-30 2022-03-22 重庆大学 Micro clamp integrating clamping force sensor and clamping jaw displacement sensor
CN110640732B (en) * 2019-09-30 2022-10-11 佛山科学技术学院 Self-adaptive grabbing method of flexible gripper
CN111571621B (en) * 2020-05-11 2021-09-03 宁波大学 Structure-integrated clamp finger translation type compliant mechanism piezoelectric micro clamp
CN112223274B (en) * 2020-08-28 2021-09-07 浙江理工大学 Piezoelectric driving flexible hinge clamping device based on binocular ranging and control method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19523229A1 (en) * 1995-06-27 1997-01-02 Riad Dipl Ing Salim Micro-gripper for micro-assembly with substrate and microstructure body
CN101717063A (en) * 2009-11-19 2010-06-02 大连理工大学 Flexible microgripper through topological optimization
JP4842354B2 (en) * 2009-08-28 2011-12-21 株式会社カイジョー Clamp mechanism and wire bonding apparatus equipped with the same
CN202622796U (en) * 2012-06-04 2012-12-26 中国科学院自动化研究所 Piezoelectric drive micro-clamper for precise assembly

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030201654A1 (en) * 2002-04-26 2003-10-30 Ellis Matthew D. Microgripper having linearly actuated grasping mechanisms

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19523229A1 (en) * 1995-06-27 1997-01-02 Riad Dipl Ing Salim Micro-gripper for micro-assembly with substrate and microstructure body
JP4842354B2 (en) * 2009-08-28 2011-12-21 株式会社カイジョー Clamp mechanism and wire bonding apparatus equipped with the same
CN101717063A (en) * 2009-11-19 2010-06-02 大连理工大学 Flexible microgripper through topological optimization
CN202622796U (en) * 2012-06-04 2012-12-26 中国科学院自动化研究所 Piezoelectric drive micro-clamper for precise assembly

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
单片柔顺机构微夹钳的性能分析及控制技术的研究;董浩民;《中国优秀硕士学位论文全文数据库，工程科技Ⅱ辑》;20120115(第1期);正文第18-25页、附图2.1-2.6 *

Also Published As

Publication number Publication date
CN102689300A (en) 2012-09-26

Similar Documents

Publication Publication Date Title
CN102689300B (en) The method of the micro-gripper clamp of the Piezoelectric Driving for Fine Boring and holding parts
CN202622796U (en) Piezoelectric drive micro-clamper for precise assembly
CN102175388B (en) Three-dimensional calibration device for curve flexible touch sensor array
CN102328311B (en) Two-finger flexible micromotion clamper
JP2009515724A5 (en)
JPH06173909A (en) Pneumatic pressure/electric actuator
CN103264385B (en) Automatic microoperation device
CN110614630B (en) Tool correcting device of mechanical arm
CN101407060A (en) Microgripper based on MEMS technology and control system
CN104362890B (en) Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement
CN203380882U (en) Automatic micro-operation device
CN203510207U (en) Grabbing device
CN204195577U (en) Electric automatization floating clamping device
CN107014410A (en) The optical fiber alignment and the long control device and method of chamber made for optical fiber F P sensors
CN207534316U (en) Guide rail assembled fixture
Gao et al. A kinematics modeling and stress analysis method for flexible micro-gripper
CN201931291U (en) Positioning aid
CN203775079U (en) Large stroke high-precision micro nano holder
CN205033228U (en) Manipulator
CN203712721U (en) Mechanical arm of air cylinder
CN110103164B (en) Positioning device
CN208528473U (en) A kind of normally close valve press-loading apparatus guaranteeing dynamic iron movement clearance
CN203522426U (en) Large stroke micro-displacement driver
CN203409747U (en) Station switch device
CN220297142U (en) Single-shaft ultrathin high-speed manipulator

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20151028