CN202622796U - Piezoelectric drive micro-clamper for precise assembly - Google Patents

Abstract

The utility model discloses a piezoelectric drive micro-clamper for precise assembly, which has a clamping force sensing function. The precise motion control of a micro-clamper is realized by controlling piezoelectric drive ceramic drive voltage so that lossless clamping of abnormal components over sizes (0.1 mu m-6 mm) is realized. During clamping, a microscopic vision camera is arranged above the micro-clamper, a suitable clamping head is selected according to the sizes of components to be clamped, and the clamping head is controlled to be close to the components according to a microscopic vision image when the clamper and the components are not in contact; and when the clamper and the components are in contact, a micro-sensor is used for sensing the clamping force, and the micro-clamper is controlled to move according to a feedback force signal. The piezoelectric drive micro-clamper for the precise assembly, disclosed by the utility model, can improve the accuracy and the reliability, and realizes the lossless clamping of the components to meet the requirements of the precise assembly.

Description

The little gripper clamp of Piezoelectric Driving that is used for accurate assembling

Technical field

The utility model relates to accurate assembling and field of micro electromechanical technology, is specifically related to a kind of little gripper clamp of Piezoelectric Driving that is used for accurate assembling.

Background technology

Development along with Micrometer-Nanometer Processing Technology, microelectric technique, MEMS etc. presses for a plurality of minute yardstick parts is assembled into complication system.Little gripper clamp is as the end effector that directly contacts with the clamping object in little assembly system, and the completion of little fittage is played decisive role.There are following three shortcomings in conventional clamper: the positioning accuracy that 1) can't reach micron level; 2) can not realize striding the parallel clamping of yardstick part; 3) do not possess the perception of chucking power.Therefore, traditional clamper can't be used in the precision assembling.

The little gripper clamp of Piezoelectric Driving possesses advantages such as response is fast, resolution ratio is high, control accuracy is high, chucking power is big, therefore is widely used in various fields.The little gripper clamp of Piezoelectric Driving that research has the chucking power induction is a research focus in the accurate assembling.

The utility model content

The purpose of the utility model is to provide a kind of little gripper clamp of general Piezoelectric Driving with little force sensing function that is used for accurate assembling, overcomes the deficiency of traditional gripper clamp, realizes the harmless clamping to special-shaped minute yardstick part.

For realizing above-mentioned purpose, the utility model proposes a kind of little gripper clamp of Piezoelectric Driving that is used for accurate assembling, it is characterized in that; This little gripper clamp comprises: dismantled and assembled clamping head 1, dismantled and assembled clamping head 18, piezoelectric strain sheet 2, piezoelectric strain sheet 17, submissive clamping device 3; Last fixed cap 6; Piezoelectric ceramic actuator 8, pretension piece 10, top 14 and little gripper clamp base 12;

Dismantled and assembled clamping head 1, dismantled and assembled clamping head 18 are sleeved on the retaining part of submissive clamping device 3; Submissive clamping device 3 is connected with little gripper clamp base 12 with screw 16 through screw 4, screw 5, screw 15; Little gripper clamp base 12 is fixed on the electronic or manual platform, so that little gripper clamp automation or semi-automatic motion; Piezoelectric strain sheet 2, piezoelectric strain sheet 17 stick on the maximum flexible hinge place of submissive clamping device 3 deflections;

Said piezoelectric ceramic actuator 8 profiles are cylinder, and an end inserts the circular hole on little gripper clamp base 12, and the other end contacts with top 14; Last fixed cap 6 is pressed on the piezoelectric ceramic actuator 8, and links to each other with little gripper clamp base 12 with screw 13 through screw 7; Last fixed cap 6 and piezoelectric ceramic actuator 8 contacts site are designed to circular-arc, make piezoelectric ceramic actuator 8 in axial direction promote top 14 motions only; In the semi-circular groove that top 14 is placed on little gripper clamp base 12, an end and submissive clamping device 3 contact, and the other end contacts with piezoelectric ceramic actuator 8;

Pretension piece 10 is connected with little gripper clamp base 12 with screw 11 through screw 9, for piezoelectric ceramic actuator 8 provides pretightning force.

Said little gripper clamp volume that the utility model proposes is little, in light weight, the limited working space of adaptation fine manipulation microscopically.Compare with other micro clamping device, the utlity model has bigger versatility and applicability, have very high practical value.

Description of drawings

Fig. 1 is the vertical view of the little gripper clamp of the utility model.

Fig. 2 is submissive clamping device structure chart.

Fig. 3 is the flexible hinge structure chart.

Fig. 4 is submissive clamping device amplification principle figure.

Fig. 5 is held the sketch map that part is placed on base platform.

The specific embodiment

For the purpose, technical scheme and the advantage that make the utility model is clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, to the utility model further explain.

The utility model can be used for the accurate clamping of part, mobile and assembling.Fig. 1 is the vertical view of the little gripper clamp of the utility model, and is as shown in Figure 1, and the little gripper clamp of the utility model mainly comprises: dismantled and assembled clamping head 1,18; Piezoelectric strain sheet 2,17, submissive clamping device 3, last fixed cap 6; Piezoelectric ceramic actuator 8, pretension piece 10, top 14 and little gripper clamp base 12.

Dismantled and assembled clamping head 1,18 is sleeved on the retaining part of submissive clamping device 3; Submissive clamping device 3 is connected with little gripper clamp base 12 with 16 through screw 4,5,15; Little gripper clamp base 12 is fixed on the electronic or manual platform, with automation or the semi-automatic motion that realizes little gripper clamp; Piezoelectric strain sheet 2,17 sticks on the maximum flexible hinge place of submissive clamping device 3 deflections; And the maximum strain direction of strain grid sensitive direction and flexible hinge is consistent in the piezoelectric strain sheet, to realize the perception of 2,17 pairs of little gripper clamp chucking powers of piezoelectric strain sheet;

Piezoelectric ceramic actuator 8 can be realized nano level Motion Resolution rate as the drive source of little gripper clamp; Said piezoelectric ceramic actuator 8 profiles are cylinder, and an end inserts the circular hole on little gripper clamp base 12, and the other end contacts with top 14; Use is simultaneously gone up fixed cap 6 and is pressed on the piezoelectric ceramic actuator 8, and links to each other with little gripper clamp base 12 with 13 through screw 7; Last fixed cap 6 and piezoelectric ceramic actuator 8 contacts site are designed to circular-arc, make piezoelectric ceramic actuator 8 in axial direction promote top 14 motions only; In the semi-circular groove that top 14 is placed on little gripper clamp base 12; One end and submissive clamping device 3 contact; The other end contacts with piezoelectric ceramic actuator 8; To come directly towards 14 through pretension piece 10 and be stuck in the middle of submissive clamping device 3 and the piezoelectric ceramic actuator 8, the output displacement and the power output of piezoelectric ceramic actuator 8 passed to submissive clamping device 3;

Pretension piece 10 is connected with little gripper clamp base 12 with 11 through screw 9; For piezoelectric ceramic actuator 8 provides pretightning force; Piezoelectric ceramic actuator 8 closely contacted with submissive clamping device 3 before said pretension piece 10 was used to guarantee the clamping operation on the one hand; Be used to regulate the initial distance (submissive clamping device 3 is converted into the motion between dismantled and assembled clamping head 1 and 18 with the feeding of pretension piece 10, adjusts the distance of little clamping jaw thus) of little clamping jaw on the other hand, to realize the clamping of different scale object;

Submissive clamping device 3 converts piezoelectric ceramic actuator 8 motion in axial direction between dismantled and assembled clamping head 1 and 18 clamping movement.Fig. 2 is the structure chart of submissive clamping device 3, and said submissive clamping device 3 adopts secondary flexible hinge lever and parallel four-bar structure combining.Secondary flexible hinge lever construction amplifies the input secondary of piezoelectric ceramic actuator 8, and wherein one-level is amplified is input as the input displacement y of piezoelectric ceramic actuator 8 along power F direction ₀, be output as the displacement at hinge H2 place; The displacement that is input as hinge H2 place that secondary amplifies is output as the output displacement x of dismantled and assembled clamping head 1 and 18, and is as shown in Figure 2.

H1～H7 is a straight beam type flexible hinge structure, and wherein t is the thickness of flexible hinge thinnest part, and R is the rounding radius, and l is the straight beam partial-length, and b is the thickness of hinge, and is as shown in Figure 3.Parallel four-bar structure on the said submissive clamping device 3 is used to limit secondary flexible hinge lever construction around certain some rotation, realizes the purpose of dismantled and assembled clamping head 1 and 18 parallel clamping part.

The amplification principle of submissive clamping device 3 is as shown in Figure 4, the coordinate (x of the A that sets up an office _A, y _A) be:

$\left\{\begin{array}{c}{x}_A=x_{O^{\&prime;}}+{\mathrm{<figure-callout\; id="1"\; label="l"\; filenames="HDA00001723253300011.png"\; state="\{\{state\}\}">l</figure-callout>}}_1\cos {\mathrm{\&theta;}}_1\\ y_A=y_{O^{\&prime;}}+{\mathrm{<figure-callout\; id="1"\; label="l"\; filenames="HDA00001723253300011.png"\; state="\{\{state\}\}">l</figure-callout>}}_1\sin {\mathrm{\&theta;}}_1\end{array}\right.$

Wherein, (x _{O '}, y _{O '}) be the coordinate of strong point O ', l ₁Be bar l ₁Length, θ ₁Straight line and horizontal angle for AB formation:

Coordinate (the x of point B _B, y _B) be:

$\left\{\begin{array}{c}{x}_B=x_{O^{\&prime;}}-{\mathrm{<figure-callout\; id="2"\; label="l"\; filenames="HDA00001723253300011.png"\; state="\{\{state\}\}">l</figure-callout>}}_2\cos {\mathrm{\&theta;}}_1\\ y_B=y_{O^{\&prime;}}-{\mathrm{<figure-callout\; id="2"\; label="l"\; filenames="HDA00001723253300011.png"\; state="\{\{state\}\}">l</figure-callout>}}_2\sin {\mathrm{\&theta;}}_1\end{array}\right.$

Wherein, l ₂Be bar l ₂Length.

As A end input displacement y upwards ₀The time, bar l ₃Turn clockwise bar l around a B ₂Drive bar l ₃Be rotated counterclockwise around O ', the corner of both direction is all very little and basic identical.Therefore, the coordinate (x of some C _C, y _C) be:

$\left\{\begin{array}{c}{x}_C=x_B\\ y_C=y_B-{\mathrm{<figure-callout\; id="3"\; label="l"\; filenames="HDA00001723253300011.png"\; state="\{\{state\}\}">l</figure-callout>}}_3\end{array}\right.$

Wherein, l ₃Be bar l ₃Length.

Coordinate (the x of point D _D, y _D) be:

$\left\{\begin{array}{c}{x}_D=x_C-l_4\\ y_D=y_C\end{array}\right.$

Wherein, l ₄Be bar l ₄Length.

Coordinate (the x of point F _F, y _F) be:

$\left\{\begin{array}{c}{x}_F=({\mathrm{<figure-callout\; id="6"\; label="l"\; filenames="HDA00001723253300011.png"\; state="\{\{state\}\}">l</figure-callout>}}_6+l_7)\cos ({\mathrm{\&theta;}}_2+{\mathrm{\&theta;}}_3)\\ y_F=({\mathrm{<figure-callout\; id="6"\; label="l"\; filenames="HDA00001723253300011.png"\; state="\{\{state\}\}">l</figure-callout>}}_6+l_7)\sin ({\mathrm{\&theta;}}_2+{\mathrm{\&theta;}}_3)\end{array}\right.$

Wherein, l ₆Be bar l ₆Length, l ₇Be bar l ₇Length,

l ₅Be bar l ₅Length.

Because θ ₁Very little, so cos θ ₁≈ 1, therefore can be imported and export the relation of displacement:

$\mathrm{\&Delta;x}=(l_6+l_7)\cos [\arctan \left(\frac{y_{o^{\&prime;}}-l_3-{\mathrm{<figure-callout\; id="2"\; label="l"\; filenames="HDA00001723253300011.png"\; state="\{\{state\}\}">l</figure-callout>}}_2\frac{{\mathrm{\&Delta;y}}_0}{l_1}}{x_{o^{\&prime;}}-l_2-l_4}\right)+\arctan \frac{l_5}{l_6}],$

According to treating that the clamping accessory size selects rational dismantled and assembled clamping head 1 and 18, the deformation through flexible hinge place on the submissive clamping device 3 of piezoelectric strain sheet 2,17 perception in the clamping process, and gather deformation signal through data acquisition unit.When clamping head 1 with 18 when being held part 19 and contacting, the input voltage according to the deformation signal adjustment piezoelectric ceramic actuator of gathering 8 constitutes closed loop PID control with this, realizes the purpose to the harmless clamping of part.

That is to say; When clamping head with treat that the clamping part contacts after; As input, the deflection at the flexible hinge place of the detected submissive clamping device of piezoelectric strain sheet is output with the input voltage of piezoelectric ceramic actuator, adopts the PID method that said deflection is carried out closed-loop control.

Fig. 5 is the position view of part to be assembled on the little gripper clamp of the utility model; When precision component is carried out clamping; Being held part 19 is placed on the base platform 20; This base platform is fixed on the vibration-isolating platform, and the electronic or manual platform that fixedly is held little gripper clamp of part 19 also is fixed on the vibration-isolating platform.

The overall dimensions of little gripper clamp of the utility model is 86mm * 60mm * 5mm (length * wide * height), and the clamping displacement resolution is 20nm, and the clamping repetitive positioning accuracy is 0.15 μ m.The utlity model has compact conformation, characteristics such as working space is big, kinematic accuracy height can realize striding the harmless clamping of yardstick part.

Above-described specific embodiment; Purpose, technical scheme and beneficial effect to the utility model have carried out further explain, it should be understood that the above is merely the specific embodiment of the utility model; Be not limited to the utility model; All within the spirit and principle of the utility model, any modification of being made, be equal to replacement, improvement etc., all should be included within the protection domain of the utility model.

Claims (8)

1. the little gripper clamp of Piezoelectric Driving that is used for accurate assembling is characterized in that this little gripper clamp comprises: dismantled and assembled clamping head (1), dismantled and assembled clamping head (18); Piezoelectric strain sheet (2), piezoelectric strain sheet (17); Submissive clamping device (3), last fixed cap (6), piezoelectric ceramic actuator (8); Pretension piece (10), top (14) and little gripper clamp base (12);

Dismantled and assembled clamping head (1), dismantled and assembled clamping head (18) are sleeved on the retaining part of submissive clamping device (3); Submissive clamping device (3) is connected with little gripper clamp base (12) with screw (16) through screw (4), screw (5), screw (15); Little gripper clamp base (12) is fixed on the electronic or manual platform, so that little gripper clamp automation or semi-automatic motion; Piezoelectric strain sheet (2), piezoelectric strain sheet (17) stick on the maximum flexible hinge place of submissive clamping device (3) deflection;

Said piezoelectric ceramic actuator (8) profile is a cylinder, and an end inserts the circular hole on little gripper clamp base (12), and the other end and top (14) contact; Last fixed cap (6) is pressed on the piezoelectric ceramic actuator (8), and links to each other with little gripper clamp base (12) with screw (13) through screw (7); Last fixed cap (6) and piezoelectric ceramic actuator (8) contact site are designed to circular-arc, make piezoelectric ceramic actuator (8) in axial direction promote top (14) motion only; Top (14) is placed in the semi-circular groove on little gripper clamp base (12), and an end and submissive clamping device (3) contact, and the other end contacts with piezoelectric ceramic actuator (8);

Pretension piece (10) is connected with little gripper clamp base (12) with screw (11) through screw (9), for piezoelectric ceramic actuator (8) provides pretightning force.

2. device according to claim 1 is characterized in that, the maximum strain direction of strain grid sensitive direction and flexible hinge is consistent in the said piezoelectric strain sheet, so that little gripper clamp chucking power is carried out perception.

3. device according to claim 2 is characterized in that, said piezoelectric ceramic actuator (8) can be realized nano level Motion Resolution rate as the drive source of little gripper clamp.

4. device according to claim 1; It is characterized in that; Pretension piece (10) will come directly towards (14) and be stuck in the middle of submissive clamping device (3) and the piezoelectric ceramic actuator (8), and the output displacement and the power output of piezoelectric ceramic actuator (8) passed to submissive clamping device (3).

5. device according to claim 1 is characterized in that, piezoelectric ceramic actuator (8) closely contacted with submissive clamping device (3) before said pretension piece (10) was used to guarantee the clamping operation, also was used to regulate the initial distance of little clamping jaw.

6. device according to claim 1 is characterized in that, said submissive clamping device (3) converts piezoelectric ceramic actuator (8) motion in axial direction between dismantled and assembled clamping head (1) and the dismantled and assembled clamping head (18) clamping movement.

7. device according to claim 6 is characterized in that, said submissive clamping device (3) adopts secondary flexible hinge lever and parallel four-bar structure combining, and secondary flexible hinge lever construction amplifies the input secondary of piezoelectric ceramic actuator (8).

8. device according to claim 1; It is characterized in that, when clamping head (1) and clamping head (18) be held part (19) when contacting, according to the input voltage of the deformation signal adjustment piezoelectric ceramic actuator of gathering (8); Part constitutes closed loop PID control, can't harm clamping.

Images