CN102519646A - Micro-power loading test method of nonlinear piezoelectric micro-energy collector - Google Patents
Micro-power loading test method of nonlinear piezoelectric micro-energy collector Download PDFInfo
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- CN102519646A CN102519646A CN2011104221334A CN201110422133A CN102519646A CN 102519646 A CN102519646 A CN 102519646A CN 2011104221334 A CN2011104221334 A CN 2011104221334A CN 201110422133 A CN201110422133 A CN 201110422133A CN 102519646 A CN102519646 A CN 102519646A
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Abstract
The invention relates to a micro-power loading test method of a nonlinear piezoelectric micro-energy collector, belonging to the technical field of tests, in particular to micro-power loading and testing of the nonlinear piezoelectric micro-energy collector. A non-contact micro-power loading test method is in three forms respectively as follows: the Z-directional micro repelling force loading test of the piezoelectric micro-energy collector when a reversing connecting piece, a piezoelectric ceramic pile actuator and the piezoelectric micro-energy collector are vertically arranged in the Z direction, the Z-directional micro repelling force loading test of the piezoelectric micro-energy collector when the reversing connecting piece, the piezoelectric ceramic pile actuator and the piezoelectric micro-energy collector are horizontally arranged in the X direction, and the equivalent stiffness test of the piezoelectric micro-energy collector. The test method solves the milli-newton level micro-power loading test problem of the nonlinear piezoelectric micro-energy collector; the loaded micro-power is in the micro-newton level; the test method is high in precision, good in micro-power loading stability and simple and convenient for operation; the micro-power loading amplitude is easy and precise to control; and sample wafers are difficult to damage.
Description
Technical field
The invention belongs to technical field of measurement and test, little power of particularly non-linear piezoelectric micromotor energy resource collecting device loads and test.
Background technology
Existing chemical cell finite capacity needs constantly to change the battery that exhausts at work, is difficult to satisfy the growth requirement of radio sensing network.Along with the power consumption of microdevice reduces gradually, utilize ambient vibration will become a kind of novel energy form for it provides the energy.Piezoelectricity energy resource collecting device utilizes the electromechanical coupling characteristics of piezoelectric to collect environment energy of vibration source; Has long, energy resource density advantages of higher of life-span; Common piezoelectricity energy resource collecting device mainly is based on the linear oscillator principle; Typical structure is the piezoelectric cantilever of terminal installation quality piece, and mostly its size is tens millimeters to tens centimetres.Yet, have characteristics such as exhibition frequency and output charge are big based on the piezoelectricity energy resource collecting device of non-linear principle.The primary structure of non-linear piezoelectricity energy resource collecting device is that two permanent magnets are arranged in the end and the homopolarity relative position of piezoelectric cantilever respectively, receive the piezoelectric cantilever nonlinear vibration of exciting with the elementary cell of piezoelectric cantilever as the vibration energy collection.Wherein the effect of permanent magnet is: (1) can reduce the natural frequency of piezoelectric cantilever significantly as the end mass piece of piezoelectric cantilever, makes it to be suitable for the vibration environment of low frequency 0-1000Hz.The nonlinear vibration characteristics that repulsive force between (2) two permanent magnets causes, the frequency that can improve system realize opening up characteristic and the output voltage that improves piezoelectricity energy resource collecting device frequently.
Along with the development of MEMS and the further reduction of microdevice power consumption, another kind of MEMS piezoelectric micromotor energy resource collecting device begins to receive publicity.2010; Gondola B Ando mentions in document " Nonlinear mechanism in MEMS devices for energy harvesting applications [J] .Journal of Micromechanics and Microengineering; 20 (2010); 125020 (12pp). "; Process non-linear piezoelectric micromotor energy resource collecting device based on soi wafer, it is of a size of 2000 microns of length, 800 microns of width, 15 microns of thickness, when two little permanent magnet spacings are approximately 1.7 millimeters, has non-linear bistable state phenomenon.Non-linear piezoelectric micromotor energy resource collecting device based on the micro-electromechanical processing technology making; Size can be in 1 millimeter or several millimeters scopes; Two little permanent magnets are arranged in the end and the same polarity relative position of piezoelectric micro-cantilever beam; Little permanent magnet three-dimensional dimension is all less than 1mm, and little repulsive force that piezoelectric micromotor energy resource collecting device receives arrives in the hundreds of milli ox zero.Through changing the spacing of little permanent magnet; When loading little repulsive force for non-linear piezoelectric micromotor energy resource collecting device; Piezoelectric micro-cantilever beam in the non-linear piezoelectric micromotor energy resource collecting device structure can occur bending and deformation; Because little repulsive force is very little, is easy to the piezoelectric micro-cantilever beam that fractures in little power loading procedure, accurately load and test relatively difficulty of little repulsive force.
Being 20071001275.5 at number of patent application is called in " micro-force loading device of piezoelectric film cantilever beam type micro-force sensor "; Little power that this charger is not suitable for non-linear piezoelectric micromotor energy resource collecting device loads test; Main cause has: 1, in non-linear piezoelectric micromotor energy resource collecting device; Little permanent magnet that piezoelectric micro-cantilever beam is terminal makes probe tip can't normally contact with the semi-girder surface, and in contact declines the power loading procedure; Probe can slide on the print surface, damages print easily; 2. owing to the diastrophic influence of the little forcer of piezoelectric bimorph, error is bigger; 3. can not load little power at the axial direction of non-linear piezoelectric micromotor energy resource collecting device.
Summary of the invention
The technical barrier that the present invention will solve is some shortcomings that overcome the contact micro-force loading device of present technology existence, finds the little power of a kind of noncontact to load the method for test, and little power that will be suitable for non-linear piezoelectric micromotor energy resource collecting device especially loads test.The whole loading device utilizes micron-sized microbit in-migration to transmit little power, and the displacement between two little permanent magnets reduces, and causes producing between two little permanent magnets little repulsive force of milli newton level, utilizes the high-precision electronic balance to realize the test of little power simultaneously.The little power of milli newton level that has solved non-linear piezoelectric micromotor energy resource collecting device loads test problem, and not only precision is high to make it, and little power loading stability is good, and easy and simple to handle, the amplitude that the little power of accurate easily control loads, not fragile print.
The technical scheme that the present invention adopts is that a kind of little power of non-linear piezoelectric micromotor energy resource collecting device loads method of testing; The little power of noncontact loads method of testing and divides three kinds of modes; Be respectively when switching-over web member 6, piezoelectric ceramics stack actuator 8, the vertical Z of piezoelectric micromotor energy resource collecting device I to layout, the Z of piezoelectric micromotor energy resource collecting device I loads test to little repulsive force; When switching-over web member 6, piezoelectric ceramics stacked actuator 8, piezoelectric micromotor energy resource collecting device I horizontal X to layout, the Z of piezoelectric micromotor energy resource collecting device I loaded test to little repulsive force; The equivalent stiffness test of piezoelectric micromotor ability beam collector I; The method of testing concrete steps are following:
1. when switching-over web member 6, piezoelectric ceramics stacked actuator 8, the vertical Z of piezoelectric micromotor energy resource collecting device I to layout, the Z of piezoelectric micromotor energy resource collecting device I loaded test to little repulsive force:
The first step is built device; Switching-over web member 6, piezoelectric ceramics stack the vertical successively Z of actuator 8, piezoelectric micromotor energy resource collecting device I from top to bottom to layout; The switching-over web member 6 of flute profile is connected the lower end of monoblock type multiaxis displacement platform 4 through bolt 5; Piezoelectric ceramics stacks actuator 8 and switching-over web member 6 is affixed through cementing agent 7, and web member 10 is fixed on piezoelectric ceramics through cementing agent 9 and stacks on the actuator 8, and the substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the web member 10 through cementing agent 11; The N utmost point of little permanent magnet A points to negative Z-direction; Little permanent magnet B is fixed on the cushion block 13 through cementing agent 12, and the N utmost point of little permanent magnet B points to positive Z-direction, and cushion block 13 is fixed on the electronic balance 14;
Second step, little power loaded test, regulated X axle, the Y axle of monoblock type multiaxis displacement platform 4, the milscale of Z axle respectively, made little permanent magnet A and the vertical conllinear of little permanent magnet B; Distance between the two is the 20-25 millimeter, secondly, regulates the milscale of the Z axle of monoblock type multiaxis displacement platform 4; Piezoelectric micromotor energy resource collecting device I is moved to negative Z-direction, and stepping is 10 microns, when the distance between little permanent magnet A and the little permanent magnet B reaches 2.5 millimeters; Suspend the milscale of the Z axle of regulating monoblock type multiaxis displacement platform 4; Use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, make piezoelectric micromotor energy resource collecting device I move 1 micron of stepping to negative Z direction.Meanwhile, through the suffered little repulsive force size of the little permanent magnet B of electronic balance 14 tests, promptly the Z of piezoelectric micromotor energy resource collecting device I is to little repulsive force size.
2. when switching-over web member 6, piezoelectric ceramics stacked actuator 8, piezoelectric micromotor energy resource collecting device I horizontal X to layout, the Z of piezoelectric micromotor energy resource collecting device I loaded test to little repulsive force:
The first step is built device; Switching-over web member 6, piezoelectric ceramics stack actuator 8, piezoelectric micromotor energy resource collecting device I successively from right to left horizontal X to layout; The switching-over web member 6 of flute profile is connected the lower end of monoblock type multiaxis displacement platform 4 through bolt 5, and it is affixed through cementing agent 7 with switching-over web member 6 that piezoelectric ceramics stacks actuator 8, and little permanent magnet B is fixed on piezoelectric ceramics through cementing agent 17 and stacks on the actuator 8; The N polar orientations of permanent magnet B is born X-direction; The substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the cushion block 13 through cementing agent 18, and the positive X-direction of N polar orientations of little permanent magnet A is fixed on cushion block 13 on the electronic balance 14;
Second step, little power loaded test, regulated X axle, the Y axle of monoblock type multiaxis displacement platform 4, the milscale of Z axle respectively, made little permanent magnet A and the horizontal conllinear of little permanent magnet B; Distance between the two is the 20-25 millimeter, secondly, regulates the milscale of the X axle of monoblock type multiaxis displacement platform 4; Little permanent magnet B is moved to negative X-direction, and stepping is 10 microns, when the distance between little permanent magnet A and the little permanent magnet B reaches 2.5 millimeters; Suspend the milscale of the X axis of regulating monoblock type multiaxis displacement platform 4; Use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, little permanent magnet B is moved, 1 micron of stepping to negative X-direction; Meanwhile, big or small through the suffered Z of electronic balance 14 test piezoelectric micromotor energy resource collecting device I to little repulsive force.
3. the equivalent stiffness test of piezoelectric micromotor ability beam collector I:
The first step is built device, and switching-over web member 6, piezoelectric ceramics stack the vertical successively Z of actuator 8 from top to bottom to layout, and piezoelectric micromotor energy resource collecting device I horizontal X is to layout.Switching-over web member 6 is connected the lower end of monoblock type multiaxis displacement platform 4 through bolt 5; It is affixed through cementing agent 7 with switching-over web member 6 that piezoelectric ceramics stacks actuator 8; Web member 20 is fixed on piezoelectric ceramics through cementing agent 19 and stacks on the actuator 8; Little permanent magnet B is fixed on the web member 20 through cementing agent 21, and the N polar orientations of permanent magnet B is born Z-direction, and the substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the cushion block 13 through cementing agent 22; The N utmost point of terminal little permanent magnet A of piezoelectric micromotor energy resource collecting device I points to positive Z-direction, and cushion block 13 is fixed on the electronic balance 14;
Little power of second step loads test and also obtains little permanent magnet spacing and little repulsive force size variation relation curve, regulates X axle, the Y axle of monoblock type multiaxis displacement platform 4, the milscale of Z axle respectively, makes little permanent magnet A and the vertical conllinear of little permanent magnet B; And distance between the two is the 20-25 millimeter; Regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4, piezoelectric micromotor energy resource collecting device I is moved to negative Z-direction, stepping is 10 microns; When the distance between little permanent magnet A and the little permanent magnet B reaches 2.5 millimeters; Suspend the milscale of the Z axle of regulating monoblock type multiaxis displacement platform 4, use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, piezoelectric micromotor energy resource collecting device I is moved to negative Z direction; 1 micron of stepping; Meanwhile, big or small through the Z that electronic balance 14 test piezoelectric micromotor energy resource collecting device I are suffered to little repulsive force, draw out little permanent magnet spacing and little repulsive force size variation graph of relation.
X axle, the Y axle of monoblock type multiaxis displacement platform 4, the milscale of Z axle are regulated in the 3rd step equivalent stiffness k test respectively, make little permanent magnet A and the vertical conllinear of little permanent magnet B; Regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4; Little permanent magnet B is moved to negative Z axle, and little permanent magnet A and little permanent magnet B distance between the two are 20 millimeters, are designated as X0; Adopt the Z axle milscale or (with) drive power supply for piezoelectric ceramics drive pressure electroceramics stacks actuator 8 and moves; Obtain little permanent magnet B at the axial displacement X1 of Z, because the existence of little repulsive force between little permanent magnet A and the little permanent magnet B, piezoelectric micromotor can bend by beam collector I; The displacement of terminal little permanent magnet A is designated as X; Distance between little permanent magnet A and the little permanent magnet B is designated as X2 at this moment, and electronic balance 14 tests little repulsive force size at this moment is F, finds out the X2 value by little permanent magnet spacing and little repulsive force size variation graph of relation that second step obtained; The Z-direction displacement X=X1+X2-X0 of little permanent magnet A, the equivalent stiffness calculating formula of piezoelectric micromotor ability beam collector I is k=F/X.
The invention has the beneficial effects as follows: the equivalent stiffness that can test piezoelectric micromotor energy resource collecting device; Can regulate the spacing between little permanent magnet A and the little permanent magnet B with 1 micron stepping, under the diastrophic condition of piezoelectric micromotor energy resource collecting device, accurately test the little repulsive force between two little permanent magnets; Can also adopt piezoelectric ceramics to stack actuator as a kind of non-contacting exciting mode, be used to drive the vibration of piezoelectric micromotor energy resource collecting device as exciting source.
Description of drawings
Accompanying drawing 1 is non-linear piezoelectric micromotor energy resource collecting device front view.Wherein: 1-substrate, 2-bonding agent, 3-bonding agent, the little permanent magnet A of A-, the little permanent magnet B of B-, C-electrode C, D-electrode D, I-piezoelectric micromotor energy resource collecting device.
Accompanying drawing 2 is the E-E sectional view of substrate.Wherein: a-silicon layer, b-silicon dioxide layer, c-bottom electrode layer, d-piezoelectric material layer, e-upper electrode layer, f-insulation course.
Accompanying drawing 3 is that Z loads test pattern to little repulsive force.Wherein: Z-solid axes Z axle, X-solid axes X axle, I-piezoelectric micromotor energy resource collecting device I, 1-substrate, 2-bonding agent, C-electrode C; D-electrode D, 4-monoblock type multiaxis displacement platform, 5-bolt, the 6-web member that commutates, the 7-bonding agent, the 8-piezoelectric ceramics stacks actuator; G-electrode G, F-electrode F, 9-bonding agent, 10-web member, 11-bonding agent, the little permanent magnet A of A-; The little permanent magnet B of B-, 12-bonding agent, 13-cushion block, 14-electronic balance, 15-vibration-damped table, 16-plexiglass tent.
Accompanying drawing 4 is that Z loads test pattern to little repulsive force.Wherein: Z-solid axes Z axle, X-solid axes X axle, I-piezoelectric micromotor energy resource collecting device I, 1-substrate, 2-bonding agent, C-electrode C; D-electrode D, 4-monoblock type multiaxis displacement platform, 5-bolt, the 6-web member that commutates, the 7-bonding agent, the 8-piezoelectric ceramics stacks actuator; G-electrode G, F-electrode F, 17-bonding agent, the little permanent magnet A of A-, the little permanent magnet B of B-; The 18-bonding agent, 13-cushion block, 14-electronic balance, 15-vibration-damped table, 16-plexiglass tent.
Accompanying drawing 5 is the equivalent stiffness test pattern of piezoelectric micromotor energy resource collecting device.Wherein: Z-solid axes Z axle, X-solid axes X axle, I-piezoelectric micromotor energy resource collecting device, 1-substrate, 2-bonding agent, C-electrode C; D-electrode D, 4-monoblock type multiaxis displacement platform, 5-bolt, the 6-web member that commutates, the 7-bonding agent, the 8-piezoelectric ceramics stacks actuator; G-electrode G, F-electrode F, 19-bonding agent, 20-web member, 21-bonding agent, the little permanent magnet A of A-; The little permanent magnet B of B-, 22-bonding agent, 13-cushion block, 14-electronic balance, 15-vibration-damped table, 16-plexiglass tent.
Accompanying drawing 7 is little permanent magnet spacing and little repulsive force size variation graph of relation.Wherein: ordinate is little repulsive force, and unit is milli newton mN, and horizontal ordinate is little permanent magnet spacing, and unit is micron μ m.
Embodiment
Specify enforcement of the present invention below in conjunction with accompanying drawing.The little power of noncontact loads method of testing and divides three kinds of modes, is respectively when switching-over web member 6, piezoelectric ceramics stack actuator 8, the vertical Z of piezoelectric micromotor energy resource collecting device I to layout, and the Z of piezoelectric micromotor energy resource collecting device I loads test to little repulsive force; When switching-over web member 6, piezoelectric ceramics stacked actuator 8, piezoelectric micromotor energy resource collecting device I horizontal X to layout, the Z of piezoelectric micromotor energy resource collecting device I loaded test to little repulsive force; The equivalent stiffness test of piezoelectric micromotor energy resource collecting device I.Little power loads when testing, and is fixed on the vibration-damped table after all devices are integrated, and covers device with plexiglass tent.
Non-linear piezoelectric micromotor energy resource collecting device front view shown in accompanying drawing 1; Have only when producing interactional little repulsive force between little permanent magnet A and the little permanent magnet B, just have the vibration nonlinear characteristic, be referred to as non-linear piezoelectric micromotor energy resource collecting device I; Piezoelectric micromotor energy resource collecting device I comprises substrate 1; Bonding agent 2, little permanent magnet A, electrode C and electrode D; The E-E cross section of substrate 1 is respectively silicon layer a from the bottom to top, silicon dioxide layer b, and bottom electrode layer c, piezoelectric material layer d, upper electrode layer e and insulation course f, as shown in Figure 2.The length range of piezoelectric micromotor energy resource collecting device I is 1500 microns to 3000 microns, and width range is 500 microns to 800 microns, and wherein the thickness range of piezoelectric micro-cantilever beam is 15 microns to 25 microns.
At first, adopt micro-electromechanical processing technology to process substrate 1, in this example; Substrate 1 is a piezoelectric micro-cantilever beam, and length is 3000 microns, and width is 800 microns; Thickness is 25 microns; Among the E-E of cross section, be respectively silicon layer a, silicon dioxide layer b, bottom electrode layer c, piezoelectric material layer d, upper electrode layer e and insulation course f from the bottom to top, as shown in Figure 2.The permanent magnet material of selecting for use is a neodymium iron boron, and the length of polarised direction is 800 microns, adopts scribing machine that permanent magnet is cut into little permanent magnet A and little permanent magnet B, and little permanent magnet A and little permanent magnet B are square, and the high size of length and width is 800 microns.Adopt low viscosity adhesive with substrate 1 and little permanent magnet A bonding, be combined into piezoelectric micromotor energy resource collecting device I as shown in fig. 1.Little power loads when testing, and is fixed on the vibration-damped table 15 after all devices are integrated, and covers device with plexiglass tent 16, and whole device is adapted at the ultra toilet work of fixed temperature and humidity.
1. when switching-over web member 6, piezoelectric ceramics stacked actuator 8, the vertical Z of piezoelectric micromotor energy resource collecting device I to layout, the Z of piezoelectric micromotor energy resource collecting device I loaded test to little repulsive force:
The first step is built device; Shown in accompanying drawing 3; Switching-over web member 6, piezoelectric ceramics stack the vertically vertical successively Z of actuator 8, piezoelectric micromotor energy resource collecting device I from top to bottom to layout, and the switching-over web member 6 of flute profile is connected monoblock type multiaxis displacement platform 4 lower ends through bolt 5, and it is affixed through cementing agent 7 with switching-over web member 6 that piezoelectric ceramics stacks actuator 8; Web member 10 is fixed on piezoelectric ceramics through cementing agent 9 and stacks on the actuator 8; The substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the web member 10 through cementing agent 11, and the N utmost point of little permanent magnet A points to negative Z-direction, and little permanent magnet B is fixed on the cushion block 13 through cementing agent 12; The N utmost point of little permanent magnet B points to positive Z-direction, and cushion block 13 is fixed on the electronic balance 14;
Second step, little power loaded test, regulated X axle, the Y axle of monoblock type multiaxis displacement platform 4, the milscale of Z axle respectively, make little permanent magnet A and the vertical conllinear of little permanent magnet B, and distance between the two was the 20-25 millimeter.Secondly, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4, piezoelectric micromotor energy resource collecting device I is moved to negative Z-direction; Stepping is 10 microns; When the distance between little permanent magnet A and the little permanent magnet B reaches 2.5 millimeters, suspend the milscale of the Z axle of regulating monoblock type multiaxis displacement platform 4, use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8; Make piezoelectric micromotor energy resource collecting device I move 1 micron of stepping to negative Z direction.Meanwhile, through the suffered little repulsive force size of the little permanent magnet B of electronic balance 14 tests, promptly the Z of piezoelectric micromotor energy resource collecting device I is to little repulsive force size.
2. when switching-over web member 6, piezoelectric ceramics stacked actuator 8, piezoelectric micromotor energy resource collecting device I horizontal X to layout, the Z of piezoelectric micromotor energy resource collecting device I loaded test to little repulsive force:
The first step is built device; Shown in accompanying drawing 4, switching-over web member 6, piezoelectric ceramics stack actuator 8, piezoelectric micromotor energy resource collecting device I horizontal X are to layout from right to left successively, and the switching-over web member 6 of flute profile is connected monoblock type multiaxis displacement platform 4 lower ends through inner bolt 5; It is affixed through cementing agent 7 with switching-over web member 6 that piezoelectric ceramics stacks actuator 8; Little permanent magnet B is fixed on piezoelectric ceramics through cementing agent 17 and stacks on the actuator 8, and the N polar orientations of permanent magnet B is born X-direction, and the substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the cushion block 13 through cementing agent 18; The N utmost point of little permanent magnet A points to positive X-direction, and cushion block 13 is fixed on the electronic balance 14;
Second step, little power loaded test, and the milscale of the X axle of adjusting monoblock type multiaxis displacement platform 4, Y axle, Z axle makes little permanent magnet A and the horizontal conllinear of little permanent magnet B; And distance between the two is the 20-25 millimeter, secondly, regulates the milscale of the X axle of monoblock type multiaxis displacement platform 4; Little permanent magnet B is moved to negative X-direction, and stepping is 10 microns, when the distance between little permanent magnet A and the little permanent magnet B reaches 2.5 millimeters; Suspend the milscale of the X axis of regulating monoblock type multiaxis displacement platform 4; Use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, little permanent magnet B is moved, 1 micron of stepping to negative directions X; Meanwhile, big or small through the suffered Z of electronic balance 14 test piezoelectric micromotor energy resource collecting device I to little repulsive force.
3. the equivalent stiffness test of piezoelectric micromotor ability beam collector I:
The first step is built device; Shown in accompanying drawing 5; Switching-over web member 6 and piezoelectric ceramics stack actuator 8 from top to bottom vertically Z to arrange, piezoelectric micromotor energy resource collecting device I horizontal X is to layout, switching-over web member 6 is connected monoblock type multiaxis displacement platform 4 lower ends through bolt 5, it is affixed through cementing agent 7 with switching-over web member 6 that piezoelectric ceramics stacks actuator 8; Web member 20 is fixed on piezoelectric ceramics through cementing agent 19 and stacks on the actuator 8; Little permanent magnet B is fixed on the web member 20 through cementing agent 21, and the N polar orientations of permanent magnet B is born Z-direction, and the substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the cushion block 13 through cementing agent 22; The N utmost point of terminal little permanent magnet A of piezoelectric micromotor energy resource collecting device I points to positive Z-direction, and cushion block 13 is fixed on the electronic balance 14;
Little power of second step loads test and obtains little permanent magnet spacing and little repulsive force size variation graph of relation; Regulate X axle, the Y axle of monoblock type multiaxis displacement platform 4, the milscale of Z axle respectively; Make little permanent magnet A and the vertical conllinear of little permanent magnet B, and distance between the two is the 20-25 millimeter.Secondly, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4, piezoelectric micromotor energy resource collecting device I is moved to negative Z-direction; Stepping is 10 microns, when the distance between little permanent magnet A and the little permanent magnet B reaches 2.5 millimeters, suspends the milscale of the Z axle of regulating monoblock type multiaxis displacement platform 4; Use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, make piezoelectric micromotor energy resource collecting device I move 1 micron of stepping to negative Z direction; Meanwhile; Z through electronic balance 14 test piezoelectric micromotor energy resource collecting device I are suffered is big or small to little repulsive force, draws out little permanent magnet spacing and little repulsive force size variation graph of relation, shown in accompanying drawing 7.
The 3rd step equivalent stiffness k test; Regulate X axle, the Y axle of monoblock type multiaxis displacement platform 4, the milscale of Z axle respectively; Make little permanent magnet A and the vertical conllinear of little permanent magnet B, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4, little permanent magnet B is moved to negative Z axle; Little permanent magnet A and little permanent magnet B distance between the two are 20 millimeters, are designated as X0.Adopt the Z axle milscale or (with) drive power supply for piezoelectric ceramics drive pressure electroceramics stacks actuator 8 and moves; Little permanent magnet B is at the axial displacement X1 of Z; Because the existence of little repulsive force between little permanent magnet A and the little permanent magnet B; Piezoelectric micromotor can bend by beam collector I, and the displacement of terminal little permanent magnet A is designated as X, and the distance between little permanent magnet A and the little permanent magnet B is designated as X2 at this moment; Electronic balance 14 tests little repulsive force size F at this moment; Find out X 2 values by the little permanent magnet spacing shown in the accompanying drawing 7 and little repulsive force size variation graph of relation again, the Z-direction displacement of little permanent magnet A is X=X1+X2-X0, and the equivalent stiffness calculating formula of piezoelectric micromotor ability beam collector I is: k=F/X.
It is to utilize micron-sized microbit in-migration to transmit little power that the little power of the non-linear piezoelectric micromotor energy resource collecting of the present invention device loads method of testing, and the displacement between two little permanent magnets reduces, and causes producing between little permanent magnet AB little repulsive force of milli newton level.Adopt drive power supply for piezoelectric ceramics excitation piezoelectric ceramics to stack actuator; Two distances between little permanent magnet are reduced with the displacement of 1 micron of stepping; Simultaneously; Utilize the high-precision electronic balance to realize the test of little power, the little power of milli newton level that has solved non-linear piezoelectric micromotor energy resource collecting device loads test problem.
Claims (1)
1. little power of non-linear piezoelectric micromotor energy resource collecting device loads method of testing; It is characterized in that; The little power of noncontact loads method of testing and divides three kinds of modes; Be respectively when switching-over web member (6), piezoelectric ceramics stack actuator (8), the vertical Z of piezoelectric micromotor energy resource collecting device (I) to layout, the Z of piezoelectric micromotor energy resource collecting device (I) loads test to little repulsive force; When switching-over web member (6), piezoelectric ceramics stacked actuator (8), piezoelectric micromotor energy resource collecting device (I) horizontal X to layout, the Z of piezoelectric micromotor energy resource collecting device (I) loaded test to little repulsive force; The equivalent stiffness test of piezoelectric micromotor ability beam collector (I); The method of testing concrete steps are following:
1. vertically Z is when arranging when switching-over web member (6), piezoelectric ceramics stack actuator (8), piezoelectric micromotor energy resource collecting device (I), and the Z of piezoelectric micromotor energy resource collecting device (I) loads test to little repulsive force:
The first step is built device; Switching-over web member (6), piezoelectric ceramics stack the vertical successively Z of actuator (8), piezoelectric micromotor energy resource collecting device (I) from top to bottom to layout; The switching-over web member (6) of flute profile is connected monoblock type multiaxis displacement platform (4) lower end through bolt (5); Piezoelectric ceramics stacks actuator (8) and switching-over web member (6) is affixed through cementing agent (7), and web member (10) is fixed on piezoelectric ceramics through cementing agent (9) and stacks on the actuator (8), and the substrate (1) of piezoelectric micromotor energy resource collecting device (I) is fixed on the web member (10) through cementing agent (11); The N utmost point of little permanent magnet (A) points to negative Z-direction; Little permanent magnet (B) is fixed on the cushion block (13) through cementing agent (12), and the N utmost point of little permanent magnet (B) points to positive Z-direction, cushion block (13) is fixed on the electronic balance (14) again;
Second step, little power loaded test; Regulate X axle, the Y axle of monoblock type multiaxis displacement platform (4), the milscale of Z axle respectively, make vertically conllinear of little permanent magnet (A) and little permanent magnet (B), and distance between the two is the 20-25 millimeter; Regulate the milscale of the Z axle of monoblock type multiaxis displacement platform (4); Piezoelectric micromotor energy resource collecting device (I) is moved to negative Z-direction, and stepping is 10 microns, when the distance between little permanent magnet (A) and the little permanent magnet (B) reaches 2.5 millimeters; Suspend the milscale of the Z axle of regulating monoblock type multiaxis displacement platform (4); Use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator (8), piezoelectric micromotor energy resource collecting device (I) is moved, 1 micron of stepping to negative Z-direction; Test the suffered little repulsive force size of little permanent magnet (B) through electronic balance (14) again, i.e. the axial little repulsive force size of the Z of piezoelectric micromotor energy resource collecting device (I);
2. when switching-over web member (6), piezoelectric ceramics stacked actuator (8), piezoelectric micromotor energy resource collecting device (I) horizontal X to layout, the Z of piezoelectric micromotor energy resource collecting device (I) loaded test to little repulsive force:
The first step is built device; Switching-over web member (6), piezoelectric ceramics stack actuator (8), piezoelectric micromotor energy resource collecting device (I) successively from right to left horizontal X to layout; The switching-over web member (6) of flute profile is connected monoblock type multiaxis displacement platform (4) lower end through bolt (5); It is affixed through cementing agent (7) with switching-over web member (6) that piezoelectric ceramics stacks actuator (8); Little permanent magnet (B) is fixed on piezoelectric ceramics through cementing agent (17) and stacks on the actuator (8), and the N polar orientations of permanent magnet (B) is born X-direction, and the substrate (1) of piezoelectric micromotor energy resource collecting device (I) is fixed on the cushion block (13) through cementing agent (18); The positive X-direction of N polar orientations of permanent magnet (A) is fixed on cushion block (13) on the electronic balance (14);
Second step, little power loaded test, regulated X axle, the Y axle of monoblock type multiaxis displacement platform (4), the milscale of Z axle respectively, made little permanent magnet (A) and the horizontal conllinear of little permanent magnet (B); And distance between the two is the 20-25 millimeter; Regulate the milscale of the X axle of monoblock type multiaxis displacement platform (4), little permanent magnet (B) is moved to negative X-direction, stepping is 10 microns; When the distance between little permanent magnet (A) and the little permanent magnet (B) reaches 2.5 millimeters; Suspend the milscale of the X axis of regulating monoblock type multiaxis displacement platform (4), use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator (8), little permanent magnet (B) is moved to negative directions X; 1 micron of stepping, big or small through the suffered Z of electronic balance (14) test piezoelectric micromotor energy resource collecting device (I) again to little repulsive force;
3. the equivalent stiffness of piezoelectric micromotor ability beam collector (I) test
The first step is built device; Switching-over web member (6) and piezoelectric ceramics stack actuator (8) successively from top to bottom vertically Z to arrange, piezoelectric micromotor energy resource collecting device (I) horizontal X is to layout; Switching-over web member (6) is connected monoblock type multiaxis displacement platform (4) lower end through bolt (5); It is affixed through cementing agent (7) with switching-over web member (6) that piezoelectric ceramics stacks actuator (8), and web member (20) is fixed on piezoelectric ceramics through cementing agent (19) and stacks on the actuator (8), and little permanent magnet (B) is fixed on the web member (20) through cementing agent (21); The N polar orientations of permanent magnet (B) is born Z-direction; The substrate (1) of piezoelectric micromotor energy resource collecting device (I) is fixed on the cushion block (13) through cementing agent (22), and the N utmost point of terminal little permanent magnet (A) of piezoelectric micromotor energy resource collecting device (I) points to positive Z-direction, and cushion block (13) is fixed on the electronic balance (14);
Little power of second step loads test and draws little permanent magnet spacing and little repulsive force size variation graph of relation; Regulate X axle, the Y axle of monoblock type multiaxis displacement platform (4), the milscale of Z axle respectively, make vertically conllinear of little permanent magnet (A) and little permanent magnet (B), and distance between the two is the 20-25 millimeter; Regulate the milscale of the Z axle of monoblock type multiaxis displacement platform (4); Piezoelectric micromotor energy resource collecting device (I) is moved to negative Z-direction, and stepping is 10 microns, when the distance between little permanent magnet (A) and the little permanent magnet (B) reaches 2.5 millimeters; Suspend the Z axle milscale of regulating monoblock type multiaxis displacement platform (4); Use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator (8), make piezoelectric micromotor energy resource collecting device (I) move 1 micron of stepping to negative Z direction; Z through electronic balance (14) test piezoelectric micromotor energy resource collecting device (I) is suffered is big or small to little repulsive force, draws out little permanent magnet spacing and little repulsive force size variation graph of relation;
X axle, the Y axle of monoblock type multiaxis displacement platform (4), the milscale of Z axle are regulated in the 3rd step equivalent stiffness k test respectively, make the vertical conllinear of little permanent magnet (A) and little permanent magnet (B); Regulate the milscale of the Z axle of monoblock type multiaxis displacement platform (4); Little permanent magnet (B) is moved to negative Z axle, and little permanent magnet (A) and little permanent magnet (B) distance between the two are 20 millimeters, are designated as X0; Adopt the Z axle milscale or (with) drive power supply for piezoelectric ceramics drive pressure electroceramics stacks actuator (8) and moves; Obtain little permanent magnet (B) at the axial displacement X1 of Z, because the existence of little repulsive force between little permanent magnet (A) and the little permanent magnet (B), piezoelectric micromotor can bend by beam collector (I); The displacement of terminal little permanent magnet (A) is designated as X; Distance between little permanent magnet (A) and the little permanent magnet (B) is designated as X2 at this moment, and electronic balance (14) test little repulsive force size F at this moment finds out the X2 value by little permanent magnet spacing and little repulsive force size variation graph of relation again; The Z-direction displacement of little permanent magnet (A) is X=X1+X2-X0, and the equivalent stiffness calculating formula of piezoelectric micromotor ability beam collector (I) is: k=F/X.
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