CN104091619A - Two-dimensional nano flexible motion platform - Google Patents
Two-dimensional nano flexible motion platform Download PDFInfo
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- CN104091619A CN104091619A CN201410265441.4A CN201410265441A CN104091619A CN 104091619 A CN104091619 A CN 104091619A CN 201410265441 A CN201410265441 A CN 201410265441A CN 104091619 A CN104091619 A CN 104091619A
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Abstract
The invention discloses a two-dimensional nano flexible motion platform. The two-dimensional nano flexible motion platform comprises a base, a terminal platform located on the inner side of the edge of the base, an X-direction driver and a Y-direction driver, a first X-direction flexible decoupling part, a first Y-direction flexible decoupling part, a second X-direction flexible decoupling part and a second Y-direction flexible decoupling part, wherein the first X-direction flexible decoupling part extends in the X-direction and is respectively connected with the terminal platform and the X-direction driver, the first Y-direction flexible decoupling part extends in the Y-direction and is respectively connected with the base and the X-direction driver, the second X-direction flexible decoupling part extends in the X-direction and is respectively connected with the base and the Y-direction driver, and the second Y-direction flexible decoupling part extends in the X-direction and is respectively connected with the terminal platform and the Y-direction driver. The two-dimensional nano flexible motion platform has the advantages of being high in motion accuracy and the like.
Description
Technical field
The present invention relates to a kind of two-dimensional nano compliant motion platform.
Background technology
There is the defect that terminal platform displacement error is large in existing two-dimensional nano compliant motion platform.
Summary of the invention
The present invention is intended to solve at least to a certain extent one of technical matters in correlation technique.For this reason, one object of the present invention is to propose a kind of two-dimensional nano compliant motion platform with kinematic accuracy advantages of higher.
According to the two-dimensional nano compliant motion platform of the embodiment of the present invention, comprise: pedestal; Terminal platform, described terminal platform is positioned at the inner side at the edge of described pedestal; X-direction driver and Y-direction driver; The flexible decoupling zero part of the first X-direction and the flexible decoupling zero part of the first Y-direction, the flexible decoupling zero part of described the first X-direction extends and is connected with described X-direction driver with described terminal platform respectively along X-direction, and the flexible decoupling zero part of described the first Y-direction extends and is connected with described X-direction driver with described pedestal respectively along Y-direction; And the flexible decoupling zero part of the second X-direction and the flexible decoupling zero part of the second Y-direction, the flexible decoupling zero part of described the second X-direction extends and is connected with described Y-direction driver with described pedestal respectively along X-direction, and the flexible decoupling zero part of described the second Y-direction extends and is connected with described Y-direction driver with described terminal platform respectively along Y-direction.
According to the two-dimensional nano compliant motion platform of the embodiment of the present invention, by scratching of the flexible decoupling zero part of described the second X-direction and the flexible decoupling zero part of described the first Y-direction, be out of shape the decoupling zero of the both direction motion (X-direction motion and Y-direction motion) realizing described terminal platform, thereby can realize the high-precision motion of described terminal platform.Wherein, the flexible decoupling zero part of described the second X-direction and the flexible decoupling zero part of described the first Y-direction only bear tension in any motor point, thereby have avoided the pressurized destabilization problems of elongate rod.
Therefore, according to the two-dimensional nano compliant motion platform of the embodiment of the present invention, there is kinematic accuracy advantages of higher.
In addition, two-dimensional nano compliant motion platform according to the above embodiment of the present invention can also have following additional technical characterictic:
According to one embodiment of present invention, the flexible decoupling zero part of described the first X-direction is two and two relative X-directions symmetries of the flexible decoupling zero part of described the first X-direction, the flexible decoupling zero part of described the first Y-direction is two and two relative X-directions symmetries of the flexible decoupling zero part of described the first Y-direction, described the second X-direction flexibility decoupling zero part is two and two relative Y-directions symmetries of the flexible decoupling zero part of described the second X-direction, and the flexible decoupling zero part of described the second Y-direction is two and two relative Y-directions symmetries of the flexible decoupling zero part of described the second Y-direction.Kinematic accuracy that thus can further described raising two-dimensional nano compliant motion platform.
According to one embodiment of present invention, described two-dimensional nano compliant motion platform further comprises: the first X-direction web member, described the first X-direction web member extends along X-direction, and each in described X-direction driver, the flexible decoupling zero part of described the first X-direction and the flexible decoupling zero part of described the first Y-direction is all connected with described the first X-direction web member; With the first Y-direction web member, described the first Y-direction web member extends along Y-direction, and each in described Y-direction driver, the flexible decoupling zero part of described the second X-direction and the flexible decoupling zero part of described the second Y-direction is all connected with described the first Y-direction web member.
By described the first X-direction web member and described the first Y-direction web member are set, thus can make the flexible decoupling zero part of described the first X-direction more easily, easily be connected with described X-direction driver with each in the flexible decoupling zero part of described the first Y-direction and can make the flexible decoupling zero part of described the second X-direction with in described the second Y-direction flexibility decoupling zero part each more easily, be easily connected with described Y-direction driver.
According to one embodiment of present invention, described two-dimensional nano compliant motion platform further comprises: the second X-direction web member, described the second X-direction web member is located on described the first Y-direction web member and along X-direction and extends, and the flexible decoupling zero part of described the second Y-direction is connected with described the second X-direction web member; With the second Y-direction web member, described the second Y-direction web member is located on described the first X-direction web member and along Y-direction and extends, and the flexible decoupling zero part of described the first X-direction is connected with described the second Y-direction web member.
Can make thus the flexible decoupling zero part of described the second Y-direction more easily, be easily connected with described the first Y-direction web member, and can make described the first X-direction flexibility decoupling zero part more easily, be easily connected with described the first X-direction web member.
According to one embodiment of present invention, described pedestal comprises base body and is located at the first connecting portion and the second connecting portion on described base body, described the first connecting portion extends and is connected with the flexible decoupling zero part of described the first Y-direction along X-direction, and described the second connecting portion extends and is connected with the flexible decoupling zero part of described the second X-direction along Y-direction; Described terminal platform comprises terminal platform body, L shaped the 3rd connecting portion and the 4th L shaped connecting portion, the first limb of described the 3rd connecting portion extends and is connected with described terminal platform body along X-direction, the second limb of described the 3rd connecting portion extends and is connected with the flexible decoupling zero part of described the first X-direction along Y-direction, the first limb of described the 4th connecting portion extends and is connected with described terminal platform body along Y-direction, and the second limb of described the 4th connecting portion extends and is connected with the flexible decoupling zero part of described the second Y-direction along X-direction.
Can make thus the flexible decoupling zero part of described the first Y-direction and the flexible decoupling zero part of described the second X-direction more easily, be easily connected with described base body.
According to one embodiment of present invention, described base body is three-back-shaped, described terminal platform body is three-back-shaped, each in the flexible decoupling zero part of described the first X-direction, the flexible decoupling zero part of described the second X-direction, the flexible decoupling zero part of described the first Y-direction and the flexible decoupling zero part of described the second Y-direction is flexible leaf spring, and wherein said pedestal, described terminal platform, the flexible decoupling zero part of described the first X-direction, the flexible decoupling zero part of described the second X-direction, the flexible decoupling zero part of described the first Y-direction and the flexible decoupling zero part of described the second Y-direction are integrally formed.Can further improve the kinematic accuracy of described two-dimensional nano compliant motion platform thus.
According to one embodiment of present invention, described two-dimensional nano compliant motion platform further comprises: the flexible decoupling zero part of the 3rd X-direction and the flexible decoupling zero part of the 3rd Y-direction, the flexible decoupling zero part of described the 3rd X-direction extends and is connected with described terminal platform along X-direction, and the flexible decoupling zero part of described the 3rd Y-direction extends and is connected with described pedestal along Y-direction; And the flexible decoupling zero part of the 4th X-direction and the flexible decoupling zero part of the 4th Y-direction, the flexible decoupling zero part of described the 4th X-direction extends and is connected with described pedestal along X-direction, and the flexible decoupling zero part of described the 4th Y-direction extends and is connected with described terminal platform along Y-direction.
According to the two-dimensional nano compliant motion platform of the embodiment of the present invention, by scratching of the flexible decoupling zero part of described the second X-direction, the flexible decoupling zero part of described the 4th X-direction, the flexible decoupling zero part of described the first Y-direction and the flexible decoupling zero part of described the 3rd Y-direction, be out of shape the decoupling zero of the both direction motion (X-direction motion and Y-direction motion) realizing described terminal platform, thereby can further improve the kinematic accuracy of described terminal platform.Wherein, the flexible decoupling zero part of described the second X-direction, the flexible decoupling zero part of described the 4th X-direction, the flexible decoupling zero part of described the first Y-direction and the flexible decoupling zero part of described the 3rd Y-direction only bear tension in any motor point, thereby have avoided the pressurized destabilization problems of elongate rod.
According to one embodiment of present invention, the flexible decoupling zero part of described the first X-direction is symmetrical with the relative Y-direction of the flexible decoupling zero part of described the 3rd X-direction, and the flexible decoupling zero part of described the first Y-direction is symmetrical with the relative Y-direction of the flexible decoupling zero part of described the 3rd Y-direction; The flexible decoupling zero part of described the second X-direction is symmetrical with the relative X-direction of the flexible decoupling zero part of described the 4th X-direction, and the flexible decoupling zero part of described the second Y-direction is symmetrical with the relative X-direction of the flexible decoupling zero part of described the 4th Y-direction.Can further improve the kinematic accuracy of described two-dimensional nano compliant motion platform thus.
According to one embodiment of present invention, described two-dimensional nano compliant motion platform further comprises: the first flexible strutting piece and second flexible strutting piece of relative X-direction symmetry, described the first flexible strutting piece is connected with described terminal platform with described pedestal respectively with each in described the second flexible strutting piece, and described X-direction driver, the flexible decoupling zero part of described the first X-direction and the flexible decoupling zero part of described the first Y-direction are between described the first flexible strutting piece and described the second flexible strutting piece; And the 3rd flexible strutting piece and the 4th flexible strutting piece of relative X-direction symmetry, described the first flexible strutting piece is symmetrical with the relative Y-direction of described the 3rd flexible strutting piece, described the second flexible strutting piece is symmetrical with the relative Y-direction of described the 4th flexible strutting piece, wherein said the 3rd flexible strutting piece is connected with described terminal platform with described pedestal respectively with each in described the 4th flexible strutting piece, and described Y-direction driver, the flexible decoupling zero part of described the second X-direction and the flexible decoupling zero part of described the second Y-direction are between described the second flexible strutting piece and described the 4th flexible strutting piece.
According to the two-dimensional nano compliant motion platform of the embodiment of the present invention by described the first flexible strutting piece is set, described the second flexible strutting piece, described the 3rd flexible strutting piece and described the 4th flexible strutting piece, thereby can make the flexible decoupling zero part of described the first X-direction, the flexible decoupling zero part of described the second X-direction, the flexible decoupling zero part of described the first Y-direction, the flexible decoupling zero part of described the second Y-direction, the flexible decoupling zero part of described the 3rd X-direction, the flexible decoupling zero part of described the 4th X-direction, each in the flexible decoupling zero part of described the 3rd Y-direction and the flexible decoupling zero part of described the 4th Y-direction keeps tension state in any time of described terminal platform motion, avoided it to cross the raw pressurized unstability of small property.
According to one embodiment of present invention, described the first flexible strutting piece to each in described the 4th flexible strutting piece is two and forms rhombus, circle or oval.Can make thus the structure of described two-dimensional nano compliant motion platform more reasonable.
According to one embodiment of present invention, described two-dimensional nano compliant motion platform further comprises the detecting device for detection of the stroke of described terminal platform, and described detecting device is located on described pedestal.
Accompanying drawing explanation
Fig. 1 is the structural representation of two-dimensional nano compliant motion platform according to an embodiment of the invention;
Fig. 2 is the enlarged drawing of the a-quadrant in Fig. 1;
Fig. 3 is the enlarged drawing in the B region in Fig. 1;
Fig. 4 is the structural representation of two-dimensional nano compliant motion platform according to another embodiment of the invention;
Fig. 5 is the structural representation of two-dimensional nano compliant motion platform according to another embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, be intended to for explaining the present invention, and can not be interpreted as limitation of the present invention.
Below with reference to Fig. 1-Fig. 5, describe according to the two-dimensional nano compliant motion platform 10 of the embodiment of the present invention.As Figure 1-Figure 5, according to the two-dimensional nano compliant motion platform 10 of the embodiment of the present invention, comprise pedestal 101, terminal platform 102, X-direction driver (not shown), Y-direction driver (not shown), the flexible decoupling zero part 1041 of the first X-direction, the flexible decoupling zero part 1051 of the first Y-direction, the flexible decoupling zero part 1042 of the second X-direction and the flexible decoupling zero part 1052 of the second Y-direction.
Terminal platform 102 is positioned at the inner side at the edge of pedestal 101.The flexible decoupling zero part 1041 of the first X-direction is connected with X-direction driver with terminal platform 102 respectively along X-direction extension and the flexible decoupling zero part 1041 of the first X-direction, and the flexible decoupling zero part 1051 of the first Y-direction is connected with X-direction driver with pedestal 101 respectively along Y-direction extension and the flexible decoupling zero part 1051 of the first Y-direction.In other words, the flexible decoupling zero part 1041 of the first X-direction and terminal platform 102 are all connected with each in X-direction driver, and the first Y-direction flexibility decoupling zero part 1051 and pedestal 101 are all connected with each in X-direction driver.
The flexible decoupling zero part 1042 of the second X-direction is connected with Y-direction driver with pedestal 101 respectively along X-direction extension and the flexible decoupling zero part 1042 of the second X-direction, and the flexible decoupling zero part 1052 of the second Y-direction is connected with Y-direction driver with terminal platform 102 respectively along Y-direction extension and the flexible decoupling zero part 1052 of the second Y-direction.In other words, the flexible decoupling zero part 1042 of the second X-direction and pedestal 101 are connected with each in Y-direction driver, and the second Y-direction flexibility decoupling zero part 1052 and terminal platform 102 are connected with each in Y-direction driver.
Below with reference to Fig. 1-Fig. 5, describe according to the course of work of the two-dimensional nano compliant motion platform 10 of the embodiment of the present invention.When X-direction driver drives terminal platform 102, the flexible decoupling zero part 1041 of the first X-direction pulls terminal platform 102 motions, and now the flexible decoupling zero part 1041 of the first X-direction does not deform, but distortion occurs to scratch accordingly the flexible decoupling zero part 1051 of the first Y-direction.
In like manner, when Y-direction driver drives terminal platform 102, the flexible decoupling zero part 1052 of the second Y-direction pulls terminal platform 102 motions, and now the flexible decoupling zero part 1052 of the second Y-direction does not deform, and distortion occurs to scratch accordingly the flexible decoupling zero part 1042 of the second X-direction.
When X-direction driver and Y-direction driver are worked simultaneously (X-direction driver drives terminal platform 102 and Y-direction driver drives terminal platform 102), in X-direction and Y-direction, produce respectively above-mentioned motion, thereby realize terminal platform 102 free movement planar.
According to the two-dimensional nano compliant motion platform 10 of the embodiment of the present invention, by scratching of the flexible decoupling zero part 1042 of the second X-direction and the flexible decoupling zero part 1051 of the first Y-direction, be out of shape the decoupling zero of the both direction motion (X-direction motion and Y-direction motion) realizing terminal platform 102, thereby can realize the high-precision motion of terminal platform 102.Wherein, the flexible decoupling zero part 1042 of the second X-direction and the flexible decoupling zero part 1051 of the first Y-direction only bear tension in any motor point, thereby have avoided the pressurized destabilization problems of elongate rod.
Therefore, according to the two-dimensional nano compliant motion platform 10 of the embodiment of the present invention, there is kinematic accuracy advantages of higher.
As Figure 1-Figure 5, according to the two-dimensional nano compliant motion platform 10 of the embodiment of the present invention, comprise pedestal 101, terminal platform 102, X-direction driver, Y-direction driver, the flexible decoupling zero part 1041 of the first X-direction, the flexible decoupling zero part 1051 of the first Y-direction, the flexible decoupling zero part 1042 of the second X-direction and the flexible decoupling zero part 1052 of the second Y-direction.
Pedestal 101 can comprise base body 1011, and base body 1011 can be three-back-shaped.Terminal platform 102 can comprise terminal platform body 1021, and terminal platform body 1021 can be three-back-shaped.Particularly, the inside edge of base body 1011 and outer edge can be rectangles, and the inside edge of terminal platform body 1021 and outer edge can be also rectangles.
As shown in Figure 1, Figure 4 and Figure 5, in some embodiments of the invention, two-dimensional nano compliant motion platform 10 further comprises the flexible decoupling zero part 1043 of the 3rd X-direction, the flexible decoupling zero part 1044 of the 4th X-direction, the flexible decoupling zero part 1053 of the 3rd Y-direction and the flexible decoupling zero part 1054 of the 4th Y-direction.The flexible decoupling zero part 1043 of the 3rd X-direction is connected with terminal platform 102 along X-direction extension and the flexible decoupling zero part 1043 of the 3rd X-direction, and the flexible decoupling zero part 1053 of the 3rd Y-direction is connected with pedestal 101 along Y-direction extension and the flexible decoupling zero part 1053 of the 3rd Y-direction.The flexible decoupling zero part 1044 of the 4th X-direction is connected with pedestal 101 along X-direction extension and the flexible decoupling zero part 1044 of the 4th X-direction, and the flexible decoupling zero part 1054 of the 4th Y-direction is connected with terminal platform 102 along Y-direction extension and the flexible decoupling zero part 1054 of the 4th Y-direction.
When X-direction driver drives terminal platform 102, the flexible decoupling zero part 1041 of the first X-direction and the flexible decoupling zero part 1043 of the 3rd X-direction pull terminal platform 102 motions, now the flexible decoupling zero part 1041 of the first X-direction and the flexible decoupling zero part 1043 of the 3rd X-direction do not deform, but distortion occurs to scratch accordingly the flexible decoupling zero part 1053 of the flexible decoupling zero part 1051 of the first Y-direction and the 3rd Y-direction.
In like manner, when Y-direction driver drives terminal platform 102, the flexible decoupling zero part 1052 of the second Y-direction and the flexible decoupling zero part 1054 of the 4th Y-direction pull terminal platform 102 motions, now the flexible decoupling zero part 1052 of the second Y-direction and the flexible decoupling zero part 1054 of the 4th Y-direction do not deform, and distortion occurs to scratch accordingly the flexible decoupling zero part 1044 of the flexible decoupling zero part 1042 of the second X-direction and the 4th X-direction.
When X-direction driver and Y-direction driver are worked simultaneously (X-direction driver drives terminal platform 102 and Y-direction driver drives terminal platform 102), in X-direction and Y-direction, produce respectively above-mentioned motion, thereby realize terminal platform 102 free movement planar.
According to the two-dimensional nano compliant motion platform 10 of the embodiment of the present invention, by scratching of the flexible decoupling zero part 1042 of the second X-direction, the flexible decoupling zero part 1044 of the 4th X-direction, the flexible decoupling zero part 1051 of the first Y-direction and the flexible decoupling zero part 1053 of the 3rd Y-direction, be out of shape the decoupling zero of the both direction motion (X-direction motion and Y-direction motion) realizing terminal platform 102, thereby can further improve the kinematic accuracy of terminal platform 102.Wherein, the flexible decoupling zero part 1042 of the second X-direction, the flexible decoupling zero part 1044 of the 4th X-direction, the flexible decoupling zero part 1051 of the first Y-direction and the flexible decoupling zero part 1053 of the 3rd Y-direction only bear tension in any motor point, thereby have avoided the pressurized destabilization problems of elongate rod.
Advantageously, each in X-direction driver and Y-direction driver can be voice coil motor or piezoelectric ceramics.
Each in the flexible decoupling zero part 1041 of the first X-direction, the flexible decoupling zero part 1042 of the second X-direction, the flexible decoupling zero part 1043 of the 3rd X-direction, the flexible decoupling zero part 1044 of the 4th X-direction, the flexible decoupling zero part 1051 of the first Y-direction, the flexible decoupling zero part 1052 of the second Y-direction, the flexible decoupling zero part 1053 of the 3rd Y-direction and the flexible decoupling zero part 1054 of the 4th Y-direction can be flexible leaf spring.
Pedestal 101, terminal platform 102, the flexible decoupling zero part 1041 of the first X-direction, the flexible decoupling zero part 1042 of the second X-direction, the flexible decoupling zero part 1043 of the 3rd X-direction, the flexible decoupling zero part 1044 of the 4th X-direction, the flexible decoupling zero part 1051 of the first Y-direction, the flexible decoupling zero part 1052 of the second Y-direction, the flexible decoupling zero part 1053 of the 3rd Y-direction and the flexible decoupling zero part 1054 of the 4th Y-direction can be integrally formed.Can further improve the kinematic accuracy of two-dimensional nano compliant motion platform 10 thus.
As Figure 1-Figure 5, in one embodiment of the invention, each in the flexible decoupling zero part 1041 of the first X-direction, the flexible decoupling zero part 1042 of the second X-direction, the flexible decoupling zero part 1043 of the 3rd X-direction, the flexible decoupling zero part 1044 of the 4th X-direction, the flexible decoupling zero part 1051 of the first Y-direction, the flexible decoupling zero part 1052 of the second Y-direction, the flexible decoupling zero part 1053 of the 3rd Y-direction and the flexible decoupling zero part 1054 of the 4th Y-direction can be two.
Wherein, two relative X-directions of the flexible decoupling zero part 1041 of the first X-direction are symmetrical, and two relative X-directions of the flexible decoupling zero part 1043 of the 3rd X-direction are symmetrical, and two relative X-directions of the flexible decoupling zero part 1051 of the first Y-direction are symmetrical, and two relative X-directions of the flexible decoupling zero part 1053 of the 3rd Y-direction are symmetrical.Two relative Y-directions of the flexible decoupling zero part 1042 of the second X-direction are symmetrical, and two relative Y-directions of the flexible decoupling zero part 1044 of the 4th X-direction are symmetrical, and two relative Y-directions of the flexible decoupling zero part 1052 of the second Y-direction are symmetrical, and two relative Y-directions of the flexible decoupling zero part 1054 of the 4th Y-direction are symmetrical.Can further improve the kinematic accuracy of two-dimensional nano compliant motion platform 10 thus.
The flexible decoupling zero part 1041 of the first X-direction is symmetrical with the relative Y-direction of the flexible decoupling zero part 1043 of the 3rd X-direction, and the flexible decoupling zero part 1051 of the first Y-direction is symmetrical with the relative Y-direction of the flexible decoupling zero part 1053 of the 3rd Y-direction.The flexible decoupling zero part 1042 of the second X-direction is symmetrical with the relative X-direction of the flexible decoupling zero part 1044 of the 4th X-direction, and the flexible decoupling zero part 1052 of the second Y-direction is symmetrical with the relative X-direction of the flexible decoupling zero part 1054 of the 4th Y-direction.Can further improve the kinematic accuracy of two-dimensional nano compliant motion platform 10 thus.
As shown in Figure 1, Figure 4 and Figure 5, advantageously, two-dimensional nano compliant motion platform 10 further comprises the first X-direction web member 1061 and the first Y-direction web member 1063.The first X-direction web member 1061 extends along X-direction, and each in X-direction driver, the flexible decoupling zero part 1041 of the first X-direction and the flexible decoupling zero part 1051 of the first Y-direction is all connected with the first X-direction web member 1061.The first Y-direction web member 1063 extends along Y-direction, and each in Y-direction driver, the flexible decoupling zero part 1042 of the second X-direction and the flexible decoupling zero part 1052 of the second Y-direction is all connected with the first Y-direction web member 1063.That is to say, the flexible decoupling zero part 1041 of the first X-direction is connected with X-direction driver by the first X-direction web member 1061 with the flexible decoupling zero part 1051 of the first Y-direction, and the flexible decoupling zero part 1042 of the second X-direction is connected with Y-direction driver by the first Y-direction web member 1063 with the flexible decoupling zero part 1052 of the second Y-direction.
By the first X-direction web member 1061 and the first Y-direction web member 1063 are set, thus can make the flexible decoupling zero part 1041 of the first X-direction more easily, easily be connected with X-direction driver with each in the flexible decoupling zero part 1051 of the first Y-direction and can make the flexible decoupling zero part 1042 of the second X-direction with in the second Y-direction flexibility decoupling zero part 1052 each more easily, be easily connected with Y-direction driver.
The first X-direction web member 1061 is that two and the first Y-direction web member 1063 are two.Each in X-direction driver, the flexible decoupling zero part 1041 of the first X-direction and the flexible decoupling zero part 1051 of the first Y-direction is all connected with a first X-direction web member 1061, and the flexible decoupling zero part 1043 of the 3rd X-direction is all connected with another the first X-direction web member 1061 with each in the 3rd Y-direction flexibility decoupling zero part 1053.
Each in Y-direction driver, the flexible decoupling zero part 1042 of the second X-direction and the flexible decoupling zero part 1052 of the second Y-direction is all connected with a first Y-direction web member 1063, and the flexible decoupling zero part 1044 of the 4th X-direction is all connected with another the first Y-direction web member 1063 with each in the 4th Y-direction flexibility decoupling zero part 1054.
As shown in Figure 1, Figure 4 and Figure 5, two-dimensional nano compliant motion platform 10 further comprises the second X-direction web member 1062 and the second Y-direction web member 1064.The second X-direction web member 1062 is located on the first Y-direction web member 1063 and the second X-direction web member 1062 extends along X-direction, and the flexible decoupling zero part 1052 of the second Y-direction is connected with the second X-direction web member 1062.The second Y-direction web member 1064 is located on the first X-direction web member 1061 and the second Y-direction web member 1064 extends along Y-direction, and the flexible decoupling zero part 1041 of the first X-direction is connected with the second Y-direction web member 1064.Can make thus the flexible decoupling zero part 1052 of the second Y-direction more easily, be easily connected with the first Y-direction web member 1063, and can make the first X-direction flexibility decoupling zero part 1041 more easily, be easily connected with the first X-direction web member 1061.
The second X-direction web member 1062 is that two and the second Y-direction web member 1064 are two.Another the second X-direction web member 1062 is located on another the first Y-direction web member 1063, and the flexible decoupling zero part 1054 of the 4th Y-direction is connected with another the second X-direction web member 1062.Another the second Y-direction web member 1064 is located on another the first X-direction web member 1061, and the flexible decoupling zero part 1043 of the 3rd X-direction is connected with another the second Y-direction web member 1064.
As Figure 1-Figure 5, pedestal 101 also comprises the first connecting portion 1012 and the second connecting portion 1013 being located on base body 1011, the first connecting portion 1012 is connected with the flexible decoupling zero part 1051 of the first Y-direction along X-direction extension and the first connecting portion 1012, and the second connecting portion 1013 is connected with the flexible decoupling zero part 1042 of the second X-direction along Y-direction extension and the second connecting portion 1013.Can make thus the flexible decoupling zero part 1051 of the first Y-direction and the flexible decoupling zero part 1042 of the second X-direction more easily, be easily connected with base body 1011.
Pedestal 101 also comprises the 5th connecting portion 1014 and the 6th connecting portion 1015 being located on base body 1011.The 5th connecting portion 1014 is connected with the flexible decoupling zero part 1053 of the 3rd Y-direction along X-direction extension and the 5th connecting portion 1014, and the 6th connecting portion 1015 is connected with the flexible decoupling zero part 1044 of the 4th X-direction along Y-direction extension and the 6th connecting portion 1015.Can make thus the flexible decoupling zero part 1053 of the 3rd Y-direction and the flexible decoupling zero part 1044 of the 4th X-direction more easily, be easily connected with base body 1011.
Wherein, each in the first connecting portion 1012, the second connecting portion 1013, the 5th connecting portion 1014 and the 6th connecting portion 1015 is two, two relative X-directions of the first connecting portion 1012 are symmetrical, two relative Y-directions of the second connecting portion 1013 are symmetrical, two relative X-directions of the 5th connecting portion 1014 are symmetrical, and two relative Y-directions of the 6th connecting portion 1015 are symmetrical.
Between the flexible decoupling zero part 1051 of base body 1011, the first connecting portion 1012 and the first Y-direction, limit for holding the space of X-direction driver, between the flexible decoupling zero part 1042 of base body 1011, the second connecting portion 1013 and the second X-direction, limit for holding the space of Y-direction driver.
As Figure 1-Figure 5, terminal platform 102 also comprises the 3rd L shaped connecting portion 1022 and the 4th L shaped connecting portion 1023.The first limb of the 3rd connecting portion 1022 extends and is connected with terminal platform body 1021 along X-direction, the second limb of the 3rd connecting portion 1022 extends and is connected with the flexible decoupling zero part 1041 of the first X-direction along Y-direction, the first limb of the 4th connecting portion 1023 extends and is connected with terminal platform body 1021 along Y-direction, and the second limb of the 4th connecting portion 1023 extends and is connected with the flexible decoupling zero part 1052 of the second Y-direction along X-direction.Can make thus the flexible decoupling zero part 1041 of the first X-direction and the flexible decoupling zero part 1052 of the second Y-direction more easily, be easily connected with terminal platform body 1021.
Terminal platform 102 also comprises the 7th L shaped connecting portion 1024 and the 8th L shaped connecting portion 1025.The first limb of the 7th connecting portion 1024 extends and is connected with terminal platform body 1021 along X-direction, and the second limb of the 7th connecting portion 1024 extends and is connected with the flexible decoupling zero part 1043 of the 3rd X-direction along Y-direction.The first limb of the 8th connecting portion 1025 extends and is connected with terminal platform body 1021 along Y-direction, and the second limb of the 8th connecting portion 1025 extends and is connected with the flexible decoupling zero part 1054 of the 4th Y-direction along X-direction.Can make thus the flexible decoupling zero part 1043 of the 3rd X-direction and the flexible decoupling zero part 1054 of the 4th Y-direction more easily, be easily connected with terminal platform body 1021.
As shown in Figure 1, Figure 4 and Figure 5, in examples more of the present invention, two-dimensional nano compliant motion platform 10 further comprises the first flexible strutting piece 1031 of relative X-direction symmetry and the 3rd flexible strutting piece 1033 of the second flexible strutting piece 1032 and relative X-direction symmetry and the 4th flexible strutting piece 1034.
The first flexible strutting piece 1031 is connected with terminal platform 102 with pedestal 101 respectively with each in the second flexible strutting piece 1032, and X-direction driver, the flexible decoupling zero part 1041 of the first X-direction and the flexible decoupling zero part 1051 of the first Y-direction are between the first flexible strutting piece and the second flexible strutting piece.The 3rd flexible strutting piece 1033 is connected with terminal platform 102 with pedestal 101 respectively with each in the 4th flexible strutting piece 1034, and Y-direction driver, the flexible decoupling zero part 1042 of the second X-direction and the flexible decoupling zero part 1052 of the second Y-direction are between the second flexible strutting piece 1032 and the 4th flexible strutting piece 1034.Wherein, the first flexible strutting piece 1031 is symmetrical with the relative Y-direction of the 3rd flexible strutting piece 1033, and the second flexible strutting piece 1032 is symmetrical with the relative Y-direction of the 4th flexible strutting piece 1034.
When X-direction driver drives terminal platform 102, the flexible decoupling zero part 1041 of the first X-direction pulls terminal platform 102 motions, and now the flexible decoupling zero part 1041 of the first X-direction does not deform, but distortion occurs to scratch accordingly the flexible decoupling zero part 1051 of the first Y-direction.The first flexible strutting piece 1031 and the second flexible strutting piece 1032 are subject to the power of X-direction and stretch along X-direction, and the 3rd flexible strutting piece 1033 and the 4th flexible strutting piece 1034 are subject to the power of X-direction and along X-direction compression, to support also guiding terminal platform 102, along X-direction, move.
In like manner, when Y-direction driver drives terminal platform 102, the flexible decoupling zero part 1052 of the second Y-direction pulls terminal platform 102 motions, and now the flexible decoupling zero part 1052 of the second Y-direction does not deform, and distortion occurs to scratch accordingly the flexible decoupling zero part 1042 of the second X-direction.
The second flexible strutting piece 1032 and the 4th flexible strutting piece 1034 are subject to the power of Y-direction and stretch along Y-direction, and the first flexible strutting piece 1031 and the 3rd flexible strutting piece 1033 are subject to the power of Y-direction and along Y-direction compression, to support also guiding terminal platform 102, along Y-direction, move.
According to the two-dimensional nano compliant motion platform 10 of the embodiment of the present invention by the first flexible strutting piece 1031 is set, the second flexible strutting piece 1032, the 3rd flexible strutting piece 1033 and the 4th flexible strutting piece 1034, thereby can make the flexible decoupling zero part 1041 of the first X-direction, the flexible decoupling zero part 1042 of the second X-direction, the flexible decoupling zero part 1051 of the first Y-direction, the flexible decoupling zero part 1052 of the second Y-direction, the flexible decoupling zero part 1043 of the 3rd X-direction, the flexible decoupling zero part 1044 of the 4th X-direction, each in the flexible decoupling zero part 1053 of the 3rd Y-direction and the flexible decoupling zero part 1054 of the 4th Y-direction keeps tension state in any time of terminal platform 102 motions, avoided it to cross the raw pressurized unstability of small property.
That is to say, the first flexible strutting piece 1031, the second flexible strutting piece 1032, the 3rd flexible strutting piece 1033 and the 4th flexible strutting piece 1034 can be realized the pressure compensation of plane motion, make the elastic force of forward and reverse stroke of terminal platform 102 identical.
Each in the first flexible strutting piece 1031, the second flexible strutting piece 1032, the 3rd flexible strutting piece 1033 and the 4th flexible strutting piece 1034 is two and forms rhombus, circle or oval.Can make thus the structure of two-dimensional nano compliant motion platform 10 more reasonable.For example, two the first flexible strutting pieces 1031 form rhombus, circle or oval.
Particularly, each in the first flexible strutting piece 1031, the second flexible strutting piece 1032, the 3rd flexible strutting piece 1033 and the 4th flexible strutting piece 1034 can be cardinal principle V-arrangement.
The base body 1011 of take below describes as example as three-back-shaped as three-back-shaped and terminal platform body 1021.The flexible decoupling zero part 1051 of the first Y-direction, the flexible decoupling zero part 1053 of the 3rd Y-direction, the flexible decoupling zero part 1042 of the second X-direction are connected with four inner edges of base body 1011 respectively with the flexible decoupling zero part 1044 of the 4th X-direction, and the flexible decoupling zero part 1041 of the first X-direction, the flexible decoupling zero part 1052 of the second Y-direction, the flexible decoupling zero part 1043 of the 3rd X-direction are connected with four outsides of terminal platform body 1021 respectively with the flexible decoupling zero part 1054 of the 4th Y-direction.
The first flexible strutting piece 1031, the second flexible strutting piece 1032, the 3rd flexible strutting piece 1033 are connected with four angles of terminal platform body 1021 respectively with the 4th flexible strutting piece 1034, and the first flexible strutting piece 1031, the second flexible strutting piece 1032, the 3rd flexible strutting piece 1033 are connected with four angles of base body 1011 respectively with the 4th flexible strutting piece 1034.
Advantageously, the relative two-dimensional nano compliant motion platform 10 of two-dimensional nano compliant motion platform 10 center is centrosymmetric.Two-dimensional nano compliant motion platform 10 can be integrally formed.Can further improve the kinematic accuracy of two-dimensional nano compliant motion platform 10 thus.
As shown in Figure 4 and Figure 5, the detecting device that two-dimensional nano compliant motion platform 10 further comprises for detection of the stroke of terminal platform 102, detecting device is located on pedestal 101.
Described detecting device can be grating scale sensor, laser interferometer or capacitive transducer.
Particularly, described detecting device comprises the X-direction stroke detector 1071 of the stroke in X-direction for detection of terminal platform 102 and the Y-direction stroke detector 1072 of the stroke in Y-direction for detection of terminal platform 102.
Two-dimensional nano compliant motion platform 10 may further include controller, described controller is connected with X-direction stroke detector 1071, Y-direction stroke detector 1072, X-direction driver and Y-direction driver respectively, to X-direction driver is controlled and according to the detected value of Y-direction stroke detector 1072, Y-direction driver is controlled according to the detected value of X-direction stroke detector 1071.Can further improve the kinematic accuracy of two-dimensional nano compliant motion platform 10 thus.
In description of the invention, it will be appreciated that, term " " center ", " longitudinally ", " laterally ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", " counterclockwise ", " axially ", " radially ", orientation or the position relationship of indications such as " circumferentially " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.
In addition, term " first ", " second " be only for describing object, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, at least one this feature can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the invention, the implication of " a plurality of " is at least two, for example two, and three etc., unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, the terms such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or be integral; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals or the interaction relationship of two elements, unless separately there is clear and definite restriction.For the ordinary skill in the art, can understand as the case may be above-mentioned term concrete meaning in the present invention.
In the present invention, unless otherwise clearly defined and limited, First Characteristic Second Characteristic " on " or D score can be that the first and second features directly contact, or the first and second features are by intermediary indirect contact.And, First Characteristic Second Characteristic " on ", " top " and " above " but First Characteristic directly over Second Characteristic or oblique upper, or only represent that First Characteristic level height is higher than Second Characteristic.First Characteristic Second Characteristic " under ", " below " and " below " can be First Characteristic under Second Characteristic or tiltedly, or only represent that First Characteristic level height is less than Second Characteristic.
In the description of this instructions, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, to the schematic statement of above-mentioned term not must for be identical embodiment or example.And, the specific features of description, structure, material or feature can one or more embodiment in office or example in suitable mode combination.In addition,, not conflicting in the situation that, those skilled in the art can carry out combination and combination by the feature of the different embodiment that describe in this instructions or example and different embodiment or example.
Although illustrated and described embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, and those of ordinary skill in the art can change above-described embodiment within the scope of the invention, modification, replacement and modification.
Claims (11)
1. a two-dimensional nano compliant motion platform, is characterized in that, comprising:
Pedestal;
Terminal platform, described terminal platform is positioned at the inner side at the edge of described pedestal;
X-direction driver and Y-direction driver;
The flexible decoupling zero part of the first X-direction and the flexible decoupling zero part of the first Y-direction, the flexible decoupling zero part of described the first X-direction extends and is connected with described X-direction driver with described terminal platform respectively along X-direction, and the flexible decoupling zero part of described the first Y-direction extends and is connected with described X-direction driver with described pedestal respectively along Y-direction; And
The flexible decoupling zero part of the second X-direction and the flexible decoupling zero part of the second Y-direction, the flexible decoupling zero part of described the second X-direction extends and is connected with described Y-direction driver with described pedestal respectively along X-direction, and the flexible decoupling zero part of described the second Y-direction extends and is connected with described Y-direction driver with described terminal platform respectively along Y-direction.
2. two-dimensional nano compliant motion platform according to claim 1, it is characterized in that, the flexible decoupling zero part of described the first X-direction is two and two relative X-directions symmetries of the flexible decoupling zero part of described the first X-direction, the flexible decoupling zero part of described the first Y-direction is two and two relative X-directions symmetries of the flexible decoupling zero part of described the first Y-direction, described the second X-direction flexibility decoupling zero part is two and two relative Y-directions symmetries of the flexible decoupling zero part of described the second X-direction, and the flexible decoupling zero part of described the second Y-direction is two and two relative Y-directions symmetries of the flexible decoupling zero part of described the second Y-direction.
3. two-dimensional nano compliant motion platform according to claim 1, is characterized in that, further comprises:
The first X-direction web member, described the first X-direction web member extends along X-direction, and each in described X-direction driver, the flexible decoupling zero part of described the first X-direction and the flexible decoupling zero part of described the first Y-direction is all connected with described the first X-direction web member; With
The first Y-direction web member, described the first Y-direction web member extends along Y-direction, and each in described Y-direction driver, the flexible decoupling zero part of described the second X-direction and the flexible decoupling zero part of described the second Y-direction is all connected with described the first Y-direction web member.
4. two-dimensional nano compliant motion platform according to claim 3, is characterized in that, further comprises:
The second X-direction web member, described the second X-direction web member is located on described the first Y-direction web member and along X-direction and extends, and the flexible decoupling zero part of described the second Y-direction is connected with described the second X-direction web member; With
The second Y-direction web member, described the second Y-direction web member is located on described the first X-direction web member and along Y-direction and extends, and the flexible decoupling zero part of described the first X-direction is connected with described the second Y-direction web member.
5. two-dimensional nano compliant motion platform according to claim 1, is characterized in that,
Described pedestal comprises base body and is located at the first connecting portion and the second connecting portion on described base body, described the first connecting portion extends and is connected with the flexible decoupling zero part of described the first Y-direction along X-direction, and described the second connecting portion extends and is connected with the flexible decoupling zero part of described the second X-direction along Y-direction;
Described terminal platform comprises terminal platform body, L shaped the 3rd connecting portion and the 4th L shaped connecting portion, the first limb of described the 3rd connecting portion extends and is connected with described terminal platform body along X-direction, the second limb of described the 3rd connecting portion extends and is connected with the flexible decoupling zero part of described the first X-direction along Y-direction, the first limb of described the 4th connecting portion extends and is connected with described terminal platform body along Y-direction, and the second limb of described the 4th connecting portion extends and is connected with the flexible decoupling zero part of described the second Y-direction along X-direction.
6. two-dimensional nano compliant motion platform according to claim 5, it is characterized in that, described base body is three-back-shaped, described terminal platform body is three-back-shaped, each in the flexible decoupling zero part of described the first X-direction, the flexible decoupling zero part of described the second X-direction, the flexible decoupling zero part of described the first Y-direction and the flexible decoupling zero part of described the second Y-direction is flexible leaf spring, and wherein said pedestal, described terminal platform, the flexible decoupling zero part of described the first X-direction, the flexible decoupling zero part of described the second X-direction, the flexible decoupling zero part of described the first Y-direction and the flexible decoupling zero part of described the second Y-direction are integrally formed.
7. two-dimensional nano compliant motion platform according to claim 1, is characterized in that, further comprises:
The flexible decoupling zero part of the 3rd X-direction and the flexible decoupling zero part of the 3rd Y-direction, the flexible decoupling zero part of described the 3rd X-direction extends and is connected with described terminal platform along X-direction, and the flexible decoupling zero part of described the 3rd Y-direction extends and is connected with described pedestal along Y-direction; And
The flexible decoupling zero part of the 4th X-direction and the flexible decoupling zero part of the 4th Y-direction, the flexible decoupling zero part of described the 4th X-direction extends and is connected with described pedestal along X-direction, and the flexible decoupling zero part of described the 4th Y-direction extends and is connected with described terminal platform along Y-direction.
8. two-dimensional nano compliant motion platform according to claim 7, is characterized in that,
The flexible decoupling zero part of described the first X-direction is symmetrical with the relative Y-direction of the flexible decoupling zero part of described the 3rd X-direction, and the flexible decoupling zero part of described the first Y-direction is symmetrical with the relative Y-direction of the flexible decoupling zero part of described the 3rd Y-direction;
The flexible decoupling zero part of described the second X-direction is symmetrical with the relative X-direction of the flexible decoupling zero part of described the 4th X-direction, and the flexible decoupling zero part of described the second Y-direction is symmetrical with the relative X-direction of the flexible decoupling zero part of described the 4th Y-direction.
9. according to the two-dimensional nano compliant motion platform described in any one in claim 1-8, it is characterized in that, further comprise:
The first flexible strutting piece and second flexible strutting piece of relative X-direction symmetry, described the first flexible strutting piece is connected with described terminal platform with described pedestal respectively with each in described the second flexible strutting piece, and described X-direction driver, the flexible decoupling zero part of described the first X-direction and the flexible decoupling zero part of described the first Y-direction are between described the first flexible strutting piece and described the second flexible strutting piece; And
The 3rd flexible strutting piece and the 4th flexible strutting piece of relative X-direction symmetry, described the first flexible strutting piece is symmetrical with the relative Y-direction of described the 3rd flexible strutting piece, described the second flexible strutting piece is symmetrical with the relative Y-direction of described the 4th flexible strutting piece, wherein said the 3rd flexible strutting piece is connected with described terminal platform with described pedestal respectively with each in described the 4th flexible strutting piece, and described Y-direction driver, the flexible decoupling zero part of described the second X-direction and the flexible decoupling zero part of described the second Y-direction are between described the second flexible strutting piece and described the 4th flexible strutting piece.
10. according to the two-dimensional nano compliant motion platform described in any one in claim 1-9, it is characterized in that, described the first flexible strutting piece to each in described the 4th flexible strutting piece is two and forms rhombus, circle or oval.
11. according to the two-dimensional nano compliant motion platform described in any one in claim 1-10, it is characterized in that, further comprise the detecting device for detection of the stroke of described terminal platform, described detecting device is located on described pedestal.
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