CN110136771A - A kind of high bandwidth two-freedom parallel connection meek precisively positioning platform - Google Patents
A kind of high bandwidth two-freedom parallel connection meek precisively positioning platform Download PDFInfo
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- CN110136771A CN110136771A CN201910258255.0A CN201910258255A CN110136771A CN 110136771 A CN110136771 A CN 110136771A CN 201910258255 A CN201910258255 A CN 201910258255A CN 110136771 A CN110136771 A CN 110136771A
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Abstract
The invention discloses a kind of high bandwidth two-freedom parallel connection meek precisively positioning platforms, comprising: fixed frame is provided with center hollow-out parts and biasing hollow-out parts；Four groups of compliance units are relatively arranged on the center hollow-out parts inner wall in cross-shaped symmetrical connection two-by-two；End mobile platform is connected positioned at center hollow-out parts center and with the flexible hinge end of the chain of each compliance unit, provides loading condition for platform；Two piezoelectricity fold stack drivers are separately positioned in two biasing hollow-out parts, and front end acts on corresponding compliance unit rear end, provides high-frequency driving force for end mobile platform；Two high bandwidth capacitance sensors, for obtaining the displacement information of end mobile platform X, Y-direction；Two groups of improved Wedge-type pre-tightening apparatus are fixed on the fixed frame for pre-tightening piezoelectricity fold stack driver.The present invention has the characteristics that high bandwidth, high-precision, lower coupling, can solve the problems, such as that current locating platform low-response, coupling performance are poor.
Description
Technical field
The present invention relates to a kind of positioning devices in micro & nano technology field, and in particular to a kind of high bandwidth two-freedom is simultaneously
Join meek precisively positioning platform.
Background technique
Currently, meek precisively positioning platform has infiltrated into every field, including scanning probe microscopy, micro-nano technology,
The fields such as nano measurement, biomolecule science and micro-nano operation.Meek precisively positioning platform has without rub sassafras, gapless, knot
The features such as structure is compact comes passing movement, Neng Goushi by the driving of piezoelectric ceramic actuator and the flexible deformation of compliance unit
The displacement of existing Nano grade.But with deepening continuously for each area research, sound of the researchers for submissive close locating platform
It answers speed to propose requirement, needs the meek precisively positioning platform of high bandwidth to realize quick precise motion.For example, scanning
In probe microscope, the bandwidth characteristic of meek precisively positioning platform will affect microscopical image taking speed, possess quick imaging
The scanning probe microscopy of speed needs the meek precisively positioning platform of high bandwidth.Therefore, precision positioning submissive for high bandwidth
The research of platform has far-reaching significance.
The intrinsic frequency of meek precisively positioning platform largely determines the bandwidth of system, in structure design, rationally,
Compact structure is conducive to design the meek precisively positioning platform of high natural frequency.For at present both at home and abroad for submissive precision
There is low bandwidth in the research of locating platform, height coupling pre-tightens the problems such as difficult, the present invention is based on the combinations of improved flexible beam mostly
And improved voussoir pre-tightening apparatus devises a kind of high bandwidth two-freedom parallel connection meek precisively positioning platform, such platform structure
It is compact, the characteristics of being easily installed, possess high-precision, high bandwidth, lower coupling, relatively large stroke, it is suitable for high speed precision positioning
Occasion.
Summary of the invention
The present invention one of in view of the above technical problems, it is flat to propose a kind of high bandwidth two-freedom submissive precision positioning in parallel
Platform, such platform are based on improved flexible beam and improved Wedge-type pre-tightening apparatus, flat compared to the submissive precision positioning of tradition
Platform possesses high bandwidth, lower coupling, the advantages that being easily assembled.
To achieve the purpose of the present invention, the present invention is implemented with the following technical solutions:
A kind of high bandwidth two-freedom parallel connection meek precisively positioning platform, comprising:
Fixed frame, the middle part is provided with center hollow-out parts, are each provided with one partially along center hollow-out parts X, the Y centerline direction
Set hollow-out parts；
Four groups of compliance units are relatively arranged on the center hollow-out parts inner wall in cross-shaped symmetrical connection two-by-two；
End mobile platform, is located at center hollow-out parts center and center hollow-out parts are directed toward with each compliance unit respectively in four sides
The flexible hinge end of the chain at center is connected, and is displaced and exports as submissive locating platform, provides loading condition for platform；
Two piezoelectricity fold stack drivers are separately positioned in two biasing hollow-out parts, and front end act on it is corresponding submissive
Unit rear end provides high-frequency driving force for end mobile platform, is deformed compliance unit；
Two high bandwidth capacitance sensors, are separately fixed on the fixed frame, for obtaining end mobile platform X, the side Y
To displacement information；
Two groups of improved Wedge-type pre-tightening apparatus are fixed on the fixed frame and are respectively acting on corresponding piezoelectric stack driving
Device rear end, for pre-tightening piezoelectricity fold stack driver.
Further, compliance unit described in every group include beam with both ends fixed, it is several be parallel to each other and with the both-end
Parallel blot beam connected vertically in the middle part of fixed beam.
Further, the beam with both ends fixed is to wait rectangular sections straight beam, and both ends are connected with the fixed frame, intermediate
Side and piezoelectricity fold stack driver installation pre-tighten, and the opposite other side is connected with the parallel blot beam.The beam with both ends fixed
It is pushed by piezoelectricity fold stack driver, provides displacement drive effect for platform；In addition rigidity also is provided for platform, it is rigid that rigidity accounts for platform
90% or more of degree.
Further, to wait rectangular cross section beams among the parallel blot beam, both ends are respectively arranged with straight round hinge
With thickening straight beam, the straight round hinge and thickening straight beam are fixedly connected with in the middle part of end mobile platform, beam with both ends fixed respectively.When
When the end mobile platform direction of motion is parallel to the movement of beam axis, the parallel blot beam plays transmitting displacement；Work as end
The mobile platform direction of motion perpendicular to beam axis movement when, the parallel blot beam provides guiding role for platform, straight round
Hinge fraction can be improved platform kinematic accuracy and reduce the coupling error of platform；In addition the parallel blot beam due to its thicken it is straight
Beam portion point, moreover it is possible to increase the coupling stiffness of beam with both ends fixed middle section, reduce parasitic error.
Further, improved Wedge-type pre-tightening apparatus described in every group include hold down assembly and be successively set on it is described
Bias preload block, the steel ball, quiet voussoir between hollow-out parts inner wall and corresponding piezoelectricity fold stack driver rear end, dynamic voussoir, the pressure
Tight component includes the compression beam being fixed by screws on the fixed frame, is provided in the compression beam and adjusts the dynamic wedge
The holding screw of block Z-direction position.It holds down assembly through pre-loading screw and compresses dynamic voussoir, the preload amount for being kept fixed it is prevented
Chock is skidded off by crowded, suitable for the high meek precisively positioning platform for pre-tightening rigidity；Steel ball can make pretightning force direction and pressure
Electricity stacks center line and keeps conllinear, avoids that lateral forces occur.
Further, the compression beam of improved Wedge-type pre-tightening apparatus described in two groups is an integral structure.
Further, the high bandwidth capacitance sensor is non-contact capacitive sensor for it, and it is mobile to read end
The displacement information of platform.
Further, the high bandwidth capacitance sensor is fixed on the fixed frame by capacitance sensor fixture
On.
Further, the capacitance sensor fixture includes firm banking and pre-tightens lid, and the firm banking passes through spiral shell
Bolt is connected with fixed frame, and the high bandwidth capacitance sensor is placed on the firm banking, and the preload lid will by bolt
The high bandwidth capacitance sensor is fixed to appropriate location.
Further, the compliance unit, end mobile platform, fixed frame are monolithic construction.To ensure arming
With error, the monolithic construction uses the processing method of low-speed WEDM, remaining described component is using accurate mach
Processing method.
Compared to the prior art the present invention, has the advantages that
(1) present invention uses improved flexible beam, i.e. parallel blot beam, improves the company of the fixation driving beam middle section of platform
Rigidity is connect, the parasitic displacement of platform is effectively reduced；Using the submissive hinge of big flexibility, the coupling of end mobile platform is reduced
Error；
(2) present invention combines improved compliance unit compactly to be designed using parallel structure, so that submissive precision positioning
Platform possesses the intrinsic frequency close to 10kHz, greatly improves the bandwidth performance of precisely locating platform；
(3) improvement Wedge-type pre-tightening apparatus proposed by the invention is pre-tightened compared to common tools for bolts ' pretension and voussoir, it is possible to provide
Bigger pretightning force reduces displacement loss amount.
Detailed description of the invention
Fig. 1 is high bandwidth two-freedom parallel connection meek precisively positioning platform overall diagram；
Fig. 2 is compliance unit, the monolithic construction figure of end mobile platform and fixed frame；
Fig. 3 is improved Wedge-type pre-tightening apparatus schematic diagram；
Fig. 4 (a) is the present invention using platform first three rank mode schematic diagram after the optimization of parallel blot beam.
Fig. 4 (b) under scale using etc. straight beams traditional platform first three rank mode schematic diagram.
In figure: 1- compliance unit；101- beam with both ends fixed；102- parallel blot beam；The improved Wedge-type pre-tightening apparatus of 2-；
201- pre-tightens block；202- steel ball；The quiet voussoir of 203-；204- dynamic voussoir；205- holding screw；206- holds down assembly；The end 3- is moved
Moving platform；4- piezoelectricity fold stack driver；5- high bandwidth capacitance sensor；6- capacitance sensor fixture；7- fixed frame.
Specific embodiment
For a better understanding of the present invention, the present invention is further elaborated with reference to the accompanying drawing.
As shown in Figure 1, 2, 3, a kind of high bandwidth two-freedom parallel connection meek precisively positioning platform, comprising:
Fixed frame 7, the middle part is provided with center hollow-out parts, are each provided with one along center hollow-out parts X, the Y centerline direction
Bias hollow-out parts；
Four groups of compliance units 1 are relatively arranged on the center hollow-out parts inner wall in cross-shaped symmetrical connection two-by-two；
End mobile platform 3, is located at center hollow-out parts center and center hollow out is directed toward with each compliance unit 1 respectively in four sides
The flexible hinge end of the chain at portion center is connected, and is displaced and exports as submissive locating platform, provides loading condition for platform；
Two piezoelectricity fold stack drivers 4 are separately positioned in two biasing hollow-out parts, and front end act on it is corresponding submissive
1 rear end of unit provides high-frequency driving force for end mobile platform 3, is deformed compliance unit；
Two high bandwidth capacitance sensors 5 are separately fixed on the fixed frame 7, for obtaining end mobile platform 3 X, Y
The displacement information in direction；
Two groups of improved Wedge-type pre-tightening apparatus 2 are fixed on the fixed frame 7 and are respectively acting on corresponding piezoelectric stack and drive
Dynamic 4 rear end of device, for pre-tightening piezoelectricity fold stack driver 4.
As shown in Fig. 2, compliance unit 1 described in every group include beam with both ends fixed 101, three be parallel to each other and with it is described
101 middle part parallel blot beam 102 connected vertically of beam with both ends fixed.The beam with both ends fixed 101 is to wait rectangular sections straight beam,
Both ends are connected with the fixed frame, and intermediate side and piezoelectricity fold stack driver installation pre-tighten, and the opposite other side is put down with described
Row FRP-Concrete Hybrid Beams 102 are connected.The beam with both ends fixed is pushed by piezoelectricity fold stack driver, provides displacement drive effect for platform；Separately
Rigidity also is provided for platform outside, rigidity accounts for 90% or more of platform rigidity.
It is equal rectangular cross section beams among the parallel blot beam 102, both ends are respectively arranged with straight round hinge and thickening
Straight beam, the straight round hinge and thickening straight beam are fixedly connected with in the middle part of end mobile platform, beam with both ends fixed respectively.When end is moved
When the moving platform direction of motion is parallel to the movement of beam axis, the parallel blot beam plays transmitting displacement；When end is mobile flat
The platform direction of motion perpendicular to beam axis movement when, the parallel blot beam provides guiding role for platform, straight round hinge part
Divide the coupling error that platform kinematic accuracy can be improved and reduce platform；In addition the parallel blot beam is due to its thickening straight beam portion
Point, moreover it is possible to increase the coupling stiffness of beam with both ends fixed middle section, reduces parasitic error.
As shown in figure 3, improved Wedge-type pre-tightening apparatus 2 described in every group includes holding down assembly 206 and to be successively set on
The biasing hollow-out parts inner wall and corresponding 4 rear end of piezoelectricity fold stack driver between preload block 201, steel ball 202, quiet voussoir
203, dynamic voussoir 204,206 compression beams including being fixed by screws on the fixed frame 7 that hold down assembly, the pressure
It is provided on tight beam and adjusts holding screw 205 of the dynamic voussoir 204Z to position.It holds down assembly through pre-loading screw and compresses
Dynamic voussoir, the preload amount for being kept fixed it, anti-chock are skidded off by crowded, suitable for the high submissive precision positioning for pre-tightening rigidity
Platform.The compression beam of improved Wedge-type pre-tightening apparatus 2 described in two groups is an integral structure.
The high bandwidth capacitance sensor 5 is non-contact capacitive sensor for it, solid by capacitance sensor fixture 6
It is scheduled on the fixed frame 7, for reading the displacement information of end mobile platform.The capacitance sensor fixture 6 includes solid
Determine pedestal and pre-tighten lid, the firm banking is connected by bolt with fixed frame, and the high bandwidth capacitance sensor 5 is placed
On the firm banking, the high bandwidth capacitance sensor 5 is fixed to appropriate location by bolt by the preload lid.
In addition, the compliance unit 1, end mobile platform 3, fixed frame 7 are monolithic construction.To ensure without assembly
Error, the monolithic construction use the processing method of low-speed WEDM, remaining described component adds using precision is mach
Work mode.
The layout of the high bandwidth two-freedom parallel connection meek precisively positioning platform is as shown in Figure 1, it can be seen that this is flat
Platform X-direction is identical as the layout of Y-direction, and by taking X-direction as an example, integral layout successively includes: fixed frame rack 7, improved
Wedge-type pre-tightening apparatus 2, compliance unit 1, end mobile platform 3, compliance unit 1, high bandwidth capacitance sensor 5 and capacitance sensing
Device fixture 6.
The structure of the precisely locating platform is using symmetrical parallel-connection structure, i.e., beam with both ends fixed is with parallel blot beam by upper
The form of stating is connected to form a module, and using the module as array element, using end mobile platform as origin, matrix number 4 is carried out
Circumference array is constituted along X, the symmetrical compliant structure of Y-axis.
The specific working mode of the high bandwidth two-freedom parallel connection meek precisively positioning platform can illustrate are as follows:
As shown in Figure 1, external voltage drives piezoelectricity fold stack driver 4,4 one end of piezoelectricity fold stack driver is pre- by improved Wedge-type
Tight device is fixed, and the other end forces in beam with both ends fixed 101, and due to the flexible deformation of material, the displacement of generation passes through parallel
FRP-Concrete Hybrid Beams 102 are transferred to end mobile platform 3, and the displacement information of the end mobile platform 3 is by 5 institute of high bandwidth capacitance sensor
It obtains.Symmetrical structure and improved flexible beam action due to platform, the coupling error and parasitic displacement base of this platform
Originally it can eliminate, overcome the problems such as traditional meek precisively positioning platform bandwidth is low, coupling performance is poor, preload is difficult,
The intrinsic frequency of the high bandwidth two-freedom parallel connection meek precisively positioning platform is very high, close to 10kHz, first three rank
Mode can find out by Fig. 4 (a), have shown in such as Fig. 4 (b) with first three rank mode of the traditional platform under size compared with and preferably couple
Performance, coupling error ratio are 1:15.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, those skilled in the art can make various deformations or amendments within the scope of the claims, this not shadow
Ring substantive content of the invention.
Claims (10)
1. a kind of high bandwidth two-freedom parallel connection meek precisively positioning platform characterized by comprising
Fixed frame (7), the middle part is provided with center hollow-out parts, are each provided with along center hollow-out parts X, the Y centerline direction
One biasing hollow-out parts；
Four groups of compliance units (1) are relatively arranged on the center hollow-out parts inner wall in cross-shaped symmetrical connection two-by-two；
End mobile platform (3) is located at center hollow-out parts center and is directed toward in the hollow-out parts of center with each compliance unit (1) respectively
The flexible hinge end of the chain of the heart is connected；
Two piezoelectricity fold stack drivers (4) are separately positioned in two biasing hollow-out parts, and front end act on it is corresponding soft
Along unit (1) rear end, high-frequency driving force is provided for end mobile platform (3)；
Two high bandwidth capacitance sensors (5), are separately fixed on the fixed frame (7), for obtaining end mobile platform
(3) X, Y-direction displacement information；
Two groups of improved Wedge-type pre-tightening apparatus (2), are fixed on the fixed frame (7) and are respectively acting on corresponding piezo stack
Stack driver (4) rear end, for pre-tightening piezoelectricity fold stack driver (4).
2. high bandwidth two-freedom parallel connection meek precisively positioning platform according to claim 1, which is characterized in that every group of institute
Compliance unit (1) is stated to include beam with both ends fixed (101), several are parallel to each other and vertical in the middle part of the beam with both ends fixed connect
The parallel blot beam (102) connect.
3. high bandwidth two-freedom parallel connection meek precisively positioning platform according to claim 2, which is characterized in that described double
Holding fixed beam (101) is to wait rectangular sections straight beam, and both ends are connected with the fixed frame, and intermediate side and piezoelectric stack drive
Device installation pre-tightens, and the opposite other side is connected with the parallel blot beam (102).
4. high bandwidth two-freedom parallel connection meek precisively positioning platform according to claim 3, which is characterized in that described flat
To wait rectangular cross section beams among row FRP-Concrete Hybrid Beams (102), both ends are respectively arranged with straight round hinge and thicken straight beam, the straight circle
Type hinge and thickening straight beam are fixedly connected with in the middle part of end mobile platform, beam with both ends fixed respectively.
5. high bandwidth two-freedom parallel connection meek precisively positioning platform according to claim 1, which is characterized in that every group of institute
The improved Wedge-type pre-tightening apparatus (2) stated includes the biasing hollow-out parts inner wall for holding down assembly (206) and being successively set on
Preload block (201), steel ball (202), quiet voussoir (203) between corresponding piezoelectricity fold stack driver (4) rear end, dynamic voussoir
(204), described hold down assembly (206) include the compression beam being fixed by screws on the fixed frame (7), the compression beam
On be provided with the holding screw (205) for adjusting dynamic voussoir (204) the Z-direction position.
6. high bandwidth two-freedom parallel connection meek precisively positioning platform according to claim 5, which is characterized in that two groups of institutes
The compression beam for stating improved Wedge-type pre-tightening apparatus (2) is an integral structure.
7. high bandwidth two-freedom parallel connection meek precisively positioning platform according to claim 1, which is characterized in that described
High bandwidth capacitance sensor (5) is non-contact capacitive sensor for it.
8. high bandwidth two-freedom parallel connection meek precisively positioning platform according to claim 1, which is characterized in that described
High bandwidth capacitance sensor (5) is fixed on the fixed frame (7) by capacitance sensor fixture (6).
9. high bandwidth two-freedom parallel connection meek precisively positioning platform according to claim 8, which is characterized in that the electricity
Hold clamp of sensor (6) to include firm banking and pre-tighten lid, the firm banking is connected by bolt with fixed frame, described
High bandwidth capacitance sensor (5) is placed on the firm banking, and the preload lid passes through bolt for the high bandwidth capacitance sensing
Device (5) is fixed to appropriate location.
10. high bandwidth two-freedom parallel connection meek precisively positioning platform according to claim 1, which is characterized in that described
Compliance unit (1), end mobile platform (3), fixed frame (7) are monolithic construction.
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| CN201910258255.0A CN110136771B (en) | 2019-04-01 | 2019-04-01 | High-bandwidth two-degree-of-freedom parallel flexible precision positioning platform |
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| CN201910258255.0A CN110136771B (en) | 2019-04-01 | 2019-04-01 | High-bandwidth two-degree-of-freedom parallel flexible precision positioning platform |
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| CN110136771B CN110136771B (en) | 2021-09-21 |
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| CN113246102A (en) * | 2021-05-27 | 2021-08-13 | 华南理工大学 | Rigid-flexible coupling device with variable flexibility direction and mechanical arm |
| CN113522709A (en) * | 2021-06-18 | 2021-10-22 | 天津大学 | Detachable two-dimensional ultrasonic vibration platform based on flexible hinge structure |
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