CN109872768A - The submissive micromanipulator of multiple degrees of freedom based on bionic flapping-wing - Google Patents
The submissive micromanipulator of multiple degrees of freedom based on bionic flapping-wing Download PDFInfo
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Abstract
The submissive micromanipulator of multiple degrees of freedom based on bionic flapping-wing, it is related to the submissive micromanipulator of piezoelectric stack, it includes operating platform, antarafacial pedestal, attachment base and three single-degree-of-freedom displacement mechanisms；There are three single-degree-of-freedom displacement mechanisms, operating platform to be supported by three single-degree-of-freedom displacement mechanisms for installation on antarafacial pedestal；Each single-degree-of-freedom displacement mechanism includes intrinsic displacement transmission mechanism and the rack with flexible hinge；The intrinsic displacement transmission mechanism includes rigid frame, pushing block, piezoelectricity fold stack driver one, piezoelectricity fold stack driver two and the amplification decoupling mechanism being arranged in pairs；Rack is connect with operating platform, and rigid frame is connect with antarafacial pedestal.The present invention has the advantages that non-displacement coupling and multifreedom motion, is suitable for micro-manipulating robot system and MEMS.
Description
Technical field
The present invention relates to micron and the submissive micromanipulator of nanoscale piezoelectric stack, and in particular to a kind of based on bionic flapping-wing
The submissive micromanipulator of multiple degrees of freedom.
Background technique
With the rapid development of nanotechnology, in Precision Machining and accurate measurement, microelectronic engineering, bioengineering, nanometer
Application further extensive in the fields such as science and technology, requirement of the society for micro/nano level operator is also higher and higher, removes it
Except the positioning accuracy of micro/nano level and biggish movement travel, more require its with excellent stability, certain rigidity with
And sufficiently fast response speed.
Compliant mechanism be with flexible hinge replace traditional mechanism movable joint, using compliant component flexible deformation transmitting or
A kind of Novel free assemble mechanism of converting motion and power.Compliant parallel mechanism is suitble to as a kind of novel drive mechanism form
Transmission mechanism for precision positioning field.
Currently, domestic and foreign scholars study more deep, the mechanism knot to plane single-degree-of-freedom and double freedom micromotion platform
Structure is simple.But for more complicated operation, precisely locating platform not only needs to move in x and y both direction, it is also necessary to the side Z
To movement, in addition, the small problem of operational stroke is also more prominent during actual use.Therefore research Three Degree Of Freedom is soft
Seem particularly necessary along micromanipulator.
Summary of the invention
The present invention to overcome the shortcomings of the existing technology, provide a kind of submissive micromanipulator of the multiple degrees of freedom based on bionic flapping-wing,
The operator is on the basis of existing micro/nano level operator, the bionic flapping-wing machine people based on the driving of flexible piezoelectric fiber
Some advantages, Lai Shixian work top is big, and stroke is big, non-displacement coupling, multifreedom motion and purpose with high accuracy.
The technical solution of the present invention is as follows:
The submissive micromanipulator of multiple degrees of freedom based on bionic flapping-wing includes operating platform, antarafacial pedestal, attachment base and three
Single-degree-of-freedom displacement mechanism；
There are three single-degree-of-freedom displacement mechanisms for installation on antarafacial pedestal, and operating platform is by three single-degree-of-freedom displacement mechanism branch
Support, the orthogonal setting of three single-degree-of-freedom displacement mechanisms simultaneously drive operating platform to have the freedom on x-axis, y-axis and z-axis direction
Degree；Each single-degree-of-freedom displacement mechanism includes intrinsic displacement transmission mechanism and the rack with flexible hinge；The intrinsic displacement
Transmission mechanism includes rigid frame, pushing block, piezoelectricity fold stack driver one, piezoelectricity fold stack driver two and the amplification being arranged in pairs
Decoupling mechanism；Each amplification decoupling mechanism includes guide rod one, guide rod two, push rod and amplification bar, guide rod one, guide rod two
It is arranged in parallel with amplification bar three, and three is vertically arranged with push rod, being disposed between rigid frame and guide rod one can push
The mobile piezoelectricity fold stack driver one of guide rod one, being disposed between rigid frame and guide rod two can push guide rod two mobile
Piezoelectricity fold stack driver two；Between guide rod one and rigid frame, between guide rod one and amplification bar, amplification bar and guide rod
Between two, between guide rod two and rigid frame, amplify between bar and push rod and pass through between push rod and pushing block uniaxial circle
The connection of tee section two incision flexible hinge, pushing block are connect with the rack with flexible hinge, and the rack and operating platform connect
It connects, rigid frame is connect with antarafacial pedestal.
Further, uniaxial circular cross-section two incision flexible hinge is straight round two incision flexible hinge.
Further, the rack includes interior side frame and outer side frame as made of wire cutting；Interior side frame includes interior catch bar
And columnae medialis；Outer side frame includes that rigid catch bar, rigid bottom bar and outside are lived；Interior catch bar is connect with pushing block, interior catch bar
Between columnae medialis, between columnae medialis and rigid bottom bar, between rigid catch bar and mixed lateral column, between mixed lateral column and rigid bottom bar
Connected by lobate shape flexible hinge.
Further, between columnae medialis and rigid bottom bar, between rigid catch bar and mixed lateral column and mixed lateral column and rigidity
It is linked together between bottom bar by the way that the hinge connector connecting between two lobate shape flexible hinge and with the two is arranged in, two
A lobate shape flexible hinge is arranged in a mutually vertical manner.
The beneficial effect of the present invention compared with prior art is:
1, the present invention uses inside and outside independent displacement mechanism, decoupling mechanism and multistage enlarger, will be displaced repeatedly amplification,
Micromanipulator is set to possess bigger stroke.
2, the present invention is disposed vertically two-by-two using three mutual independent displacement mechanisms, and X drives to driving, Y-direction driving with Z-direction
Dynamic independent realization, does not interfere with each other, realizes the exact shift of operating platform Three Degree Of Freedom.
3, operating platform is larger, is suitable for range demands required for the actual conditions of many complexity.
4, the present invention applies multiple piezoelectricity fold stack drivers, symmetrical rationally to place, and improves the stability of power output, makes power
Output it is finer and smoother, uniform, ensure that micromanipulator stablizes accurate operation, improve the overall stability of micromanipulator.
5, present invention driving is with external enlarger respectively in Different Plane, and compact-sized, rationally distributed and engaged position is small,
While guaranteeing larger stroke and operation precision, overall dimensions are further reduced.
6, structure of the invention uses linear cutter, and connection therebetween is according to the difference of application function, using not similar shape
The flexible hinge of shape, have it is small in size, without mechanical friction, guiding accuracy is high, difficulty of processing is small, machining accuracy is easy to guarantee, subtracts
The advantages of few assembly amount.
7, weight is lighter, operates simple and convenient, is suitable for micro-manipulating robot system and MEMS.
Detailed description of the invention
Fig. 1 is that the present invention is based on the overall schematics of the submissive micromanipulator of the multiple degrees of freedom of bionic flapping-wing；
Fig. 2 is the structure chart of the submissive micromanipulator in one degree of freedom direction；
Fig. 3 is the structure chart of one degree of freedom displacement mechanism；
Fig. 4 is the structure chart of intrinsic displacement transmission mechanism in displacement mechanism；
Fig. 5 is the structural schematic diagram of antarafacial pedestal；
Fig. 6 is the connecting base structure schematic diagram for connecting antarafacial pedestal and operating platform；
Fig. 7 is the position detection foil gauge of one embodiment of the invention and the detection principle diagram of power output detection foil gauge.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that embodiments described below is a part of the embodiment of the present invention, instead of all the embodiments.Based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
Shown in referring to figures 1-4, the submissive micromanipulator of multiple degrees of freedom based on bionic flapping-wing, it is characterised in that: it includes
Operating platform 5, antarafacial pedestal 2, attachment base 4 and three single-degree-of-freedom displacement mechanisms 1；
There are three single-degree-of-freedom displacement mechanisms 1 for installation on antarafacial pedestal 2, and operating platform 5 is by three single-degree-of-freedom displacement machines
Structure 1 supports, and the orthogonal setting of three single-degree-of-freedom displacement mechanisms 1 simultaneously drives operating platform 5 to have x-axis, y-axis and z-axis direction
On freedom degree；
Each single-degree-of-freedom displacement mechanism 1 includes intrinsic displacement transmission mechanism and the rack 10 with flexible hinge；Institute
Stating intrinsic displacement transmission mechanism includes rigid frame 1003, pushing block 1004, piezoelectricity fold stack driver 1, piezoelectric stack driving
Device 2 1002 and the amplification decoupling mechanism being arranged in pairs；Each amplification decoupling mechanism includes guide rod 1, guide rod two
1014, push rod 1006 and amplification bar 1012, guide rod 1, guide rod 2 1014 and amplification 1012 three of bar are arranged in parallel,
And three is vertically arranged with push rod 1006, guide rod one can be pushed by being disposed between rigid frame 1003 and guide rod 1
1009 mobile piezoelectricity fold stack drivers 1, guiding can be pushed by being disposed between rigid frame 1003 and guide rod 2 1014
The mobile piezoelectricity fold stack driver 2 1002 of bar 2 1014；
Between guide rod 1 and rigid frame 1003, guide rod 1 and amplification bar 1012 between, amplification bar
Between 1012 and guide rod 2 1014, between guide rod 2 1014 and rigid frame 1003, amplification bar 1012 and push rod 1006 it
Between and push rod 1006 and pushing block 1004 between connected by uniaxial circular cross-section two incision flexible hinge 1008, pushing block
1004 connect with the rack 10 with flexible hinge, and the rack 10 is connect with operating platform 5, rigid frame 1003 and antarafacial bottom
Seat 2 connects.
As shown in Figure 1, entire flexibility micromanipulator is composed by three single-degree-of-freedom displacement mechanisms 1 are orthogonal,
As shown in figure 5, antarafacial pedestal is mutually perpendicular plate face there are three tools, a single-degree-of-freedom displacement machine is installed in each plate face
Structure 1 is formed by space in rigid catch bar 101, and the attachment base 4 is L shape attachment base, rigid frame 1003 and antarafacial bottom
It is connected between seat 2, rigid catch bar 101 and operating platform 5 by L shape attachment base.It is by L shape attachment base and screw that operation is flat
Platform 5 is fixed on three rigid catch bars 101, rigid frame 1003 is connect on antarafacial pedestal 2,
When the single-degree-of-freedom displacement mechanism in direction movement 1, operating platform 5 can be also displaced in same direction therewith.
Three single-degree-of-freedom displacement mechanisms 5 are then fixed on antarafacial pedestal 2 by L shape attachment base, and each single-degree-of-freedom is displaced
There is interval between the antarafacial pedestal 2 of the adjacent vertical direction of mechanism 1, it is ensured that the action of operator is unobstructed, this is from Fig. 2
It can be seen that.
As shown in figures 1 to 6, longer arm 42 connects intrinsic displacement transmission mechanism rigid frame in displacement mechanism in L shape attachment base
Frame 1003, shorter arm 41 connects the face of antarafacial pedestal 2 in L shape attachment base.Pass through L shape attachment base fixed operation platform 5 in Fig. 1 again
Onto the single-degree-of-freedom displacement mechanism 1 having been affixed on antarafacial pedestal 2, multiple degrees of freedom entirely based on bionic flapping-wing can be completed
The assembling of submissive micromanipulator.
In above scheme, uniaxial circular cross-section two incision flexible hinge 1008 is straight round two incision flexible hinge.Straight circle
Type two incision flexible hinge improves the reliability of movement and realizes without mechanical friction.
As an improvement scheme in above embodiment, between columnae medialis 111 and rigid bottom bar 109, rigid catch bar
Pass through between 101 and mixed lateral column 105 and between mixed lateral column 105 and rigid bottom bar 109 and is arranged in two lobate shape flexible hinge
The hinge connector 103 connecting between 102 and with the two links together, and two lobate shape flexible hinge 102 is mutually perpendicular to set
It sets.
Rack 10 in the embodiment above with flexible hinge includes interior side frame and outer side frame as made of wire cutting；It is interior
Side frame includes interior catch bar 110 and columnae medialis 111；Outer side frame includes that rigid catch bar 101, rigid bottom bar 109 and outside are lived
105；Interior catch bar 110 is connect with pushing block 1004, between interior catch bar 110 and columnae medialis 111, columnae medialis 111 and rigid bottom
Pass through lobate shape between bar 109, between rigid catch bar 101 and mixed lateral column 105, between mixed lateral column 105 and rigid bottom bar 109
Flexible hinge 102 connects.
As shown in Figure 3 and Figure 4, amplification decoupling mechanism bilateral symmetry shown in Fig. 4 is arranged in pairs, is fixed on rigid frame
Piezoelectricity fold stack driver 1 between 1003 and guide rod 1 pushes and uniaxial circular cross-section two incision flexible hinge
1008 connected guide rods 1 are given via the amplification and transmitting of two uniaxial circular cross-section two incision flexible hinges 1008
The one downward power of tail end for giving amplification bar 1012 is fixed between rigid frame 1003 and guide rod 2 1014 at the same time
Piezoelectricity fold stack driver 2 1002 also push the guide rod two being connected with uniaxial circular cross-section two incision flexible hinge 1008
1014, via the amplification and transmitting of two uniaxial circular cross-section two incision flexible hinges 1008, give from amplification 1012 tail end of bar
The slightly remote upward power in one, place, two are amplified on amplification bar 1012 in the interlaced power of tail end, and and symmetrical
The other half multistage amplification decoupling mechanism together, pass through uniaxial circular cross-section two incision flexible hinge 1008,1006 and of push rod
Uniaxial circular cross-section two incision flexible hinge 1008 pushes the movement of pushing block 1004 upward or downward.
Pushing block 1004 is fixed on interior catch bar 110 by two screws, when pushing block 1004 is mobile, is pushed away in drive
Lever 110 is mobile.And mixed lateral column 105 and columnae medialis 111 are divided into two parts by wire cutting, and the columnae medialis 111 of the inside is main
The motive force come for receiving the transmitting of pushing block 1004 should when active force by the interior catch bar 110 in one degree of freedom direction
The motive force in direction is transmitted on rigid catch bar 101, and the single-degree-of-freedom displacement mechanism 1 of other both directions passes through inside and outside side frame
In the parallelogram decoupling mechanism deformation that constitutes of hinge connector 103 and two leaf shape flexible hinges 102, make other two
The displacement mechanism in a direction will not impact the movement of the direction, and last rigidity catch bar 101 is provided for side therewith
The single-degree-of-freedom displacement mechanism 1 of the one degree of freedom of connected operating platform 5, three antarafacials and orthogonal placement just can pass through
Above method gives operating platform 5 with the freedom degree in three directions of x, y, z.
In one embodiment, shown in Figure 3, the submissive micromanipulator of the multiple degrees of freedom based on bionic flapping-wing is also
Including displacement detector, institute's displacement sensing device is position detection foil gauge 112, and the position detection foil gauge 112 is pacified
On the side for the lobate shape flexible hinge 102 being connect with rigid catch bar 101.
As shown in fig. 7, position detection foil gauge form bridgt circuit, bridgt circuit by strain amplifier amplification after, by
A/D mouthfuls are transferred on industrial personal computer by PCI board card, and industrial personal computer obtains the displacement of operating platform by calculating, and x=U1/k1, x are
Platform displacement, U1 are bridgt circuit through the amplified output voltage of strain amplifier, and k1 is proportionality coefficient.Industrial personal computer is calculating behaviour
Make to need first to calibrate before platform displacement to obtain proportionality coefficient k1, specific practice is: (1) displacement mechanism drives operating platform 5 in X
Axis, Y-axis or Z-direction are subjected to displacement；(2) article carrying platform displacement x 0 is detected using capacitor or laser displacement sensor, and measured
The output voltage U1 of position detection foil gauge calculates the proportionality coefficient k1 of displacement with output voltage according to formula k1=U1/x0.
In above embodiment, the submissive micromanipulator of the multiple degrees of freedom based on bionic flapping-wing further includes power output detection
Device, the detector for output force are that power output detects foil gauge 113, power output detection foil gauge 113 be mounted on
On the side for the lobate shape flexible hinge 102 that rigid bottom bar 109 connects.Detector for output force is put down for detecting to be applied to operate
Driving force on platform.Displacement detector and detector for output force are separately mounted on different lobate shape flexible hinges.Position
Move detection device and detector for output force be capable of displacement and displacement mechanism to loading operating platform power output carry out it is real-time
Detection.
As shown in fig. 7, power output detection foil gauge form bridgt circuit, bridgt circuit by strain amplifier amplification after,
It is transferred on industrial personal computer by A/D mouthfuls by PCI board card, driving force of the industrial personal computer by calculating acquisition displacement mechanism, F=U2/k2,
F is the driving force of displacement mechanism, and U2 is bridgt circuit through the amplified output voltage of strain amplifier, and k2 is proportionality coefficient.Work
Control machine needs first to calibrate before the driving force for calculating displacement mechanism obtains proportionality coefficient k2, and specific practice is: (1) displacement mechanism
Driving operating platform 5 is subjected to displacement in x-axis, y-axis or z-axis direction；(2) driving of output force snesor check bit telephone-moving structure is utilized
Power F0, and the output voltage U2 of power output detection foil gauge is measured, power output and output voltage are calculated according to formula k2=U2/F0
Proportionality coefficient k2.
Displacement detector or detector for output force are mounted on all lobate shape flexible hinge sides；Operation is flat
Platform 5 is corresponding to have displacement detector and detector for output force.As shown in figure 3, being connect with rigid catch bar 101 lobate
Position detection foil gauge 112 is mounted on the side of shape flexible hinge 102, the lobate shape connecting with rigid bottom bar 109 is flexible
Power output detection foil gauge 113 is mounted on the side of hinge 102, to detect the displacement of operating platform 5 more accurately
With the power output of displacement mechanism.
The submissive micromanipulator of multiple degrees of freedom based on bionic flapping-wing is integrally formed by wire cutting, it is only necessary to which one simple
It assembles i.e. plastic.It is such molding submissive micromanipulator gapless, high without friction, guiding accuracy, and increase operation row
Journey.
Invention is disclosed as above with preferable case study on implementation, and however, it is not intended to limit the invention, any to be familiar with this profession
Technical staff, without departing from the scope of the present invention, when the structure and technology contents that can use the disclosure above are made
A little change or the equivalence enforcement case for being modified to equivalent variations, but anything that does not depart from the technical scheme of the invention,
Any simple modification, equivalent change and modification done according to the technical essence of the invention to the above case study on implementation still belong to this
Inventive technique scheme range.
Claims (7)
1. the submissive micromanipulator of multiple degrees of freedom based on bionic flapping-wing, it is characterised in that: it includes operating platform (5), antarafacial bottom
Seat (2), attachment base (4) and three single-degree-of-freedom displacement mechanisms (1)；
There are three single-degree-of-freedom displacement mechanism (1), operating platform (5) to be displaced by three single-degree-of-freedoms for installation on antarafacial pedestal (2)
Mechanism (1) support, three single-degree-of-freedom displacement mechanisms (1) it is orthogonal setting and drive operating platform (5) have x-axis, y-axis and
Freedom degree on z-axis direction；
Each single-degree-of-freedom displacement mechanism (1) includes intrinsic displacement transmission mechanism and the rack (10) with flexible hinge；Institute
Stating intrinsic displacement transmission mechanism includes rigid frame (1003), pushing block (1004), piezoelectricity fold stack driver one (1001), piezo stack
Stack driver two (1002) and the amplification decoupling mechanism being arranged in pairs；Each amplification decoupling mechanism include guide rod one (1009),
Guide rod two (1014), push rod (1006) and amplification bar (1012), guide rod one (1009), guide rod two (1014) and amplification bar
(1012) three is arranged in parallel, and three is vertically arranged with push rod (1006), rigid frame (1003) and guide rod one (1009)
Between be disposed with the piezoelectricity fold stack driver one (1001) that guide rod one (1009) can be pushed mobile, rigid frame (1003) with lead
To being disposed with the piezoelectricity fold stack driver two (1002) that guide rod two (1014) can be pushed mobile between bar two (1014)；
Between guide rod one (1009) and rigid frame (1003), guide rod one (1009) and amplification bar (1012) between, amplification
Between bar (1012) and guide rod two (1014), between guide rod two (1014) and rigid frame (1003), amplify bar (1012)
Pass through uniaxial circular cross-section two incision flexible hinge between push rod (1006) and between push rod (1006) and pushing block (1004)
Chain (1008) connection, pushing block (1004) are connect with the rack (10) with flexible hinge, the rack (10) and operating platform
(5) it connects, rigid frame (1003) is connect with antarafacial pedestal (2).
2. the submissive micromanipulator of multiple degrees of freedom according to claim 1 based on bionic flapping-wing, it is characterised in that: uniaxial round
Section two incision flexible hinge (1008) is straight round two incision flexible hinge.
3. the submissive micromanipulator of the multiple degrees of freedom according to claim 1 or claim 2 based on bionic flapping-wing, it is characterised in that: described
Rack (10) includes interior side frame and outer side frame as made of wire cutting；Interior side frame includes interior catch bar (110) and columnae medialis
(111)；Outer side frame includes that (105) are lived in rigid catch bar (101), rigid bottom bar (109) and outside；
Interior catch bar (110) connect with pushing block (1004), between interior catch bar (110) and columnae medialis (111), columnae medialis
(111) between rigid bottom bar (109), between rigid catch bar (101) and mixed lateral column (105), mixed lateral column (105) and rigidity bottom
It is connected by lobate shape flexible hinge (102) between bar (109).
4. the submissive micromanipulator of multiple degrees of freedom according to claim 3 based on bionic flapping-wing, it is characterised in that: columnae medialis
(111) between rigid bottom bar (109), between rigid catch bar (101) and mixed lateral column (105) and mixed lateral column (105) with it is rigid
Property bottom bar (109) between pass through the hinge connector that is arranged between two lobate shape flexible hinge (102) and connect with the two
(103) it links together, two lobate shape flexible hinge (102) is arranged in a mutually vertical manner.
5. the submissive micromanipulator of multiple degrees of freedom according to claim 4 based on bionic flapping-wing, it is characterised in that: described to be based on
The submissive micromanipulator of the multiple degrees of freedom of bionic flapping-wing further includes displacement detector, and institute's displacement sensing device is answered for position detection
Become piece (112), the position detection foil gauge (112) is mounted on the lobate shape flexible hinge connecting with rigid catch bar (101)
(102) on side.
6. the submissive micromanipulator of multiple degrees of freedom according to claim 5 based on bionic flapping-wing, it is characterised in that: described to be based on
The submissive micromanipulator of the multiple degrees of freedom of bionic flapping-wing further includes detector for output force, and the detector for output force is power output
It detects foil gauge (113), it is soft that power output detection foil gauge (113) is mounted on the lobate shape connecting with rigid bottom bar (109)
On the side of property hinge (102).
7. the submissive micromanipulator of multiple degrees of freedom according to claim 4,5 or 6 based on bionic flapping-wing, it is characterised in that: institute
Stating attachment base (4) is L shape attachment base, rigid frame (1003) and antarafacial pedestal (2), rigid catch bar (101) and operating platform
(5) it is connected between by L shape attachment base.
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