CN109872768B - Multi-degree-of-freedom flexible micromanipulator based on bionic flapping wings - Google Patents
Multi-degree-of-freedom flexible micromanipulator based on bionic flapping wings Download PDFInfo
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Abstract
A multi-degree-of-freedom compliant micromanipulator based on a bionic flapping wing relates to a piezoelectric stack compliant micromanipulator and comprises an operating platform, a non-coplanar base, a connecting seat and three single-degree-of-freedom displacement mechanisms; three single-degree-of-freedom displacement mechanisms are mounted on the non-coplanar base, and the operating platform is supported by the three single-degree-of-freedom displacement mechanisms; each single-degree-of-freedom displacement mechanism comprises an inner displacement transmission mechanism and a rack with a flexible hinge; the internal displacement transmission mechanism comprises a rigid frame, a pushing block, a first piezoelectric stack driver, a second piezoelectric stack driver and amplification decoupling mechanisms which are arranged in pairs; the frame is connected with the operation platform, and the rigid frame is connected with the non-coplanar base. The invention has the advantages of no displacement coupling and multi-degree-of-freedom motion, and is suitable for micro-operation robot systems and micro-electro-mechanical systems.
Description
Technical Field
The invention relates to a micron and nano piezoelectric stack compliant micromanipulator, in particular to a multi-degree-of-freedom compliant micromanipulator based on a bionic flapping wing.
Background
With the rapid development of nanotechnology, the application in the fields of precision machining and precision measurement, microelectronic engineering, bioengineering, nanoscience and technology and the like is increasingly wide, the social requirements for micro-nano-scale operators are higher and higher, and besides the micro-nano-scale positioning precision and larger movement stroke, the micro-nano-scale operators are further required to have excellent stability, certain rigidity and sufficiently fast response speed.
The flexible mechanism replaces the traditional mechanism motion joint with a flexible hinge, and adopts a novel assembly-free mechanism for transmitting or converting motion and force by elastic deformation of a flexible element. The flexible parallel mechanism is used as a novel transmission structure form and is suitable for a transmission mechanism in the field of precision positioning.
At present, scholars at home and abroad deeply research planar single-degree-of-freedom and double-degree-of-freedom micro-motion platforms, and the mechanism has a simple structure. However, for more complicated operations, the precision positioning platform needs to move not only in the x and y directions but also in the Z direction, and in addition, the problem of small operation stroke is more prominent in the practical use process. Therefore, it is necessary to develop a three-degree-of-freedom compliant micromanipulator.
Disclosure of Invention
The invention provides a multi-degree-of-freedom compliant micromanipulator based on a bionic flapping wing, aiming at overcoming the defects of the prior art, and based on the advantages of a bionic flapping wing robot driven by flexible piezoelectric fibers, the manipulator realizes the purposes of large working table surface, large stroke, no displacement coupling, multi-degree-of-freedom motion and high precision.
The technical scheme of the invention is as follows:
the multi-degree-of-freedom compliant micromanipulator based on the bionic flapping wings comprises an operating platform, a non-coplanar base, a connecting seat and three single-degree-of-freedom displacement mechanisms;
three single-degree-of-freedom displacement mechanisms are mounted on the non-coplanar base, the operating platform is supported by the three single-degree-of-freedom displacement mechanisms, and the three single-degree-of-freedom displacement mechanisms are mutually vertically arranged and drive the operating platform to have degrees of freedom in the directions of an x axis, a y axis and a z axis; each single-degree-of-freedom displacement mechanism comprises an inner displacement transmission mechanism and a rack with a flexible hinge; the internal displacement transmission mechanism comprises a rigid frame, a pushing block, a first piezoelectric stack driver, a second piezoelectric stack driver and amplification decoupling mechanisms which are arranged in pairs; each amplification decoupling mechanism comprises a first guide rod, a second guide rod, a push rod and an amplification rod, the first guide rod, the second guide rod and the amplification rod are arranged in parallel and are perpendicular to the push rod, a first piezoelectric stack driver capable of pushing the first guide rod to move is arranged between the rigid frame and the first guide rod, and a second piezoelectric stack driver capable of pushing the second guide rod to move is arranged between the rigid frame and the second guide rod; the device comprises a base, a guide rod I, a guide rod II, a pushing block, a single-shaft circular-section double-notch flexible hinge, a single-shaft circular-section double.
Further, the single-shaft circular-section double-notch flexible hinge is a straight-circular-type double-notch flexible hinge.
Further, the machine frame comprises an inner side frame and an outer side frame which are cut by wires; the inner side frame comprises an inner push rod and an inner side column; the outer side frame comprises a rigid push rod, a rigid bottom rod and an outer side frame; the inner push rod is connected with the push block, and the inner push rod is connected with the inner side column, the inner side column is connected with the rigid bottom rod, the rigid push rod is connected with the outer side column, and the outer side column is connected with the rigid bottom rod through the leaf-shaped flexible hinges.
Further, the inner side column and the rigid bottom rod, the rigid push rod and the outer side column and the rigid bottom rod are connected together through hinge connecting pieces which are arranged between the two leaf-shaped flexible hinges and connected with the two leaf-shaped flexible hinges, and the two leaf-shaped flexible hinges are arranged perpendicular to each other.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention adopts an internal and external independent displacement mechanism, a decoupling mechanism and a multi-stage amplification mechanism to amplify the displacement for multiple times, so that the micromanipulator has larger stroke.
2. The three independent displacement mechanisms are vertically arranged in pairs, and the X-direction drive, the Y-direction drive and the Z-direction drive are independently realized without mutual interference, so that the three-degree-of-freedom accurate displacement of the operating platform is realized.
3. The operating platform is large and can meet the travel requirements required by a plurality of complex practical situations.
4. The invention applies a plurality of piezoelectric stack drivers which are symmetrically and reasonably arranged, improves the stability of output force, enables the output of the force to be more exquisite and uniform, ensures the stable and accurate operation of the micromanipulator, and improves the overall stability of the micromanipulator.
5. The driving mechanism and the external amplifying mechanism are respectively arranged on different planes, the structure is compact, the layout is reasonable, the occupied position is small, and the overall size is further reduced while the larger stroke and the operation precision are ensured.
6. The structure of the invention adopts linear cutting processing, the connection between the linear cutting processing and the linear cutting processing adopts flexible hinges with different shapes according to different application functions, and the invention has the advantages of small volume, no mechanical friction, high guiding precision, small processing difficulty, easy guarantee of processing precision and reduction of loading quantity.
7. The weight is lighter, the operation is simple and convenient, and the micro-robot is suitable for micro-operation robot systems and micro-electro-mechanical systems.
Drawings
FIG. 1 is an overall schematic view of a multi-degree-of-freedom compliant micromanipulator based on a bionic flapping wing according to the present invention;
FIG. 2 is a block diagram of a compliant micromanipulator with one degree of freedom orientation;
FIG. 3 is a block diagram of a degree of freedom displacement mechanism;
FIG. 4 is a structural view of an inner displacement transmission mechanism in the displacement mechanism;
FIG. 5 is a schematic structural view of a non-planar base;
FIG. 6 is a schematic view of a connecting seat for connecting the different-surface base and the operating platform;
FIG. 7 is a schematic diagram of the detection of a position sensing strain gage and an output force sensing strain gage in accordance with one embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the embodiments described below are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, the multi-degree-of-freedom compliant micromanipulator based on bionic flapping wings is characterized in that: the device comprises an operating platform 5, a non-coplanar base 2, a connecting seat 4 and three single-degree-of-freedom displacement mechanisms 1;
three single-degree-of-freedom displacement mechanisms 1 are mounted on the non-coplanar base 2, the operating platform 5 is supported by the three single-degree-of-freedom displacement mechanisms 1, and the three single-degree-of-freedom displacement mechanisms 1 are mutually vertically arranged and drive the operating platform 5 to have degrees of freedom in the directions of an x axis, a y axis and a z axis;
each single-degree-of-freedom displacement mechanism 1 comprises an inner displacement transmission mechanism and a frame with a flexible hinge; the internal displacement transmission mechanism comprises a rigid frame 1003, a pushing block 1004, a first piezoelectric stack driver 1001, a second piezoelectric stack driver 1002 and amplification decoupling mechanisms arranged in pairs; each amplification decoupling mechanism comprises a first guide rod 1009, a second guide rod 1014, a push rod 1006 and an amplification rod 1012, the first guide rod 1009, the second guide rod 1014 and the amplification rod 1012 are arranged in parallel and are perpendicular to the push rod 1006, a first piezoelectric stack driver 1001 capable of pushing the first guide rod 1009 to move is arranged between the rigid frame 1003 and the first guide rod 1009, and a second piezoelectric stack driver 1002 capable of pushing the second guide rod 1014 to move is arranged between the rigid frame 1003 and the second guide rod 1014;
the guide rod I1009 is connected with the rigid frame 1003, the guide rod I1009 is connected with the amplifying rod 1012, the amplifying rod 1012 is connected with the guide rod II 1014, the guide rod II 1014 is connected with the rigid frame 1003, the amplifying rod 1012 is connected with the push rod 1006 and the push rod 1006 is connected with the push block 1004 through a single-shaft circular-section double-notch flexible hinge 1008, the push block 1004 is connected with a frame with a flexible hinge, the frame is connected with the operation platform 5, and the rigid frame 1003 is connected with the different-surface base 2.
As shown in fig. 1, the whole flexible micromanipulator is formed by vertically combining three single-degree-of-freedom displacement mechanisms 1, as shown in fig. 5, the non-coplanar base is provided with three mutually perpendicular plate surfaces, each plate surface is provided with one single-degree-of-freedom displacement mechanism 1, in a space formed by the rigid push rod 101, the connecting seat 4 is an L-shaped connecting seat, and the rigid frame 1003 is connected with the non-coplanar base 2, the rigid push rod 101 and the operation platform 5 through the L-shaped connecting seat. The operation platform 5 is fixed on three rigid push rods 101 through an L-shaped connecting seat and screws, a rigid frame 1003 is connected on the non-coplanar base 2,
when the single-degree-of-freedom displacement mechanism in one direction moves 1, the operating platform 5 is displaced in the same direction. The three single-degree-of-freedom displacement mechanisms 5 are fixed on the different-surface base 2 through the L-shaped connecting seats, and each single-degree-of-freedom displacement mechanism 1 is separated from the different-surface base 2 adjacent to the vertical direction, so that the action of the manipulator is not hindered, which can be seen from fig. 2.
As shown in fig. 1 and 6, the longer arm 42 of the L-shaped connecting seat is connected to the rigid frame 1003 of the internal displacement transmission mechanism in the displacement mechanism, and the shorter arm 41 of the L-shaped connecting seat is connected to the surface of the different-surface base 2. And then the L-shaped connecting seat in the figure 1 is used for fixing the operating platform 5 to the single-degree-of-freedom displacement mechanism 1 fixed on the non-coplanar base 2, so that the whole bionic flapping wing-based multi-degree-of-freedom compliant micromanipulator can be assembled.
In the above scheme, the single-axis circular-section double-notch flexible hinge 1008 is a straight-circle double-notch flexible hinge. The straight-circular double-notch flexible hinge improves the reliability of movement and realizes no mechanical friction.
In the above embodiment, as a modification, the inner column 111 and the rigid bottom rod 109, the rigid push rod 101 and the outer column 105, and the outer column 105 and the rigid bottom rod 109 are connected together by the hinge connection 103 disposed between and connected to the two leaf-shaped flexible hinges 102, and the two leaf-shaped flexible hinges 102 are disposed perpendicular to each other.
The frame with the flexible hinge in the above embodiment comprises an inner side frame and an outer side frame which are cut by a wire; the medial frame includes an inner push bar 110 and a medial post 111; the outer frame comprises a rigid push rod 101, a rigid bottom rod 109 and an outer frame 105; the inner push rod 110 is connected with the push block 1004, and the inner push rod 110 and the inner column 111, the inner column 111 and the rigid bottom rod 109, the rigid push rod 101 and the outer column 105, and the outer column 105 and the rigid bottom rod 109 are connected through the leaf-shaped flexible hinges 102.
As shown in fig. 3 and 4, the amplification decoupling mechanism shown in fig. 4 is arranged in left-right symmetrical pairs, the first piezoelectric stack driver 1001 fixed between the rigid frame 1003 and the first guide bar 1009 pushes the first guide bar 1009 connected to the uniaxial circular-section double-slit flexible hinge 1008, and the amplification and transmission via the two uniaxial circular-section double-slit flexible hinges 1008 gives a downward force to the tail end of the amplification bar 1012, at the same time, the second piezoelectric stack driver 1002 fixed between the rigid frame 1003 and the second guide bar 1014 also pushes the second guide bar 1014 connected to the uniaxial circular-section double-slit flexible hinge 1008, and the amplification and transmission via the two uniaxial circular-section double-slit flexible hinges 1008 gives an upward force slightly away from the tail end of the amplification bar 1012, and the two mutually staggered forces at the tail end are amplified on the amplification bar 1012, and the decoupling mechanism is coupled with the symmetrical other half of the multistage amplification mechanism, the pushing block 1004 is pushed to move up or down by the uniaxial circular cross section double slit flexible hinge 1008, the push rod 1006 and the uniaxial circular cross section double slit flexible hinge 1008.
The push block 1004 is fixed on the inner push rod 110 through two screws, and when the push block 1004 moves, the inner push rod 110 is driven to move. The outer column 105 and the inner column 111 are divided into two parts by wire cutting, the inner column 111 is mainly used for receiving the pushing force transmitted by the pushing block 1004, when the pushing force in one degree of freedom direction is received by the acting force of the inner pushing rod 110, the pushing force in the direction is transmitted to the rigid pushing rod 101, the other two-direction single-degree-of-freedom displacement mechanisms 1 are deformed through a parallelogram decoupling mechanism formed by the hinge connectors 103 in the inner side frame and the outer side frame and the two leaf-shaped flexible hinges 102, so that the other two-direction displacement mechanisms cannot influence the movement in the direction, finally, the rigid pushing rod 101 can provide one degree of freedom for the operation platform 5 connected with the rigid pushing rod, and the three non-planar and mutually perpendicular single-degree-of freedom displacement mechanisms 1 can provide the operation platform 5 with the degrees of freedom in three directions of x, y and z by the above method.
In one embodiment, referring to fig. 3, the multi-degree-of-freedom compliant micromanipulator based on bionic flapping wings further comprises a displacement detection device, which is a position detection strain gauge 112, wherein the position detection strain gauge 112 is installed on the side surface of the leaf-shaped flexible hinge 102 connected with the rigid push rod 101.
As shown in fig. 7, the position detection strain gauge forms a bridge circuit, the bridge circuit is amplified by the strain amplifier and then transmitted to the industrial personal computer through the PCI card through the a/D port, the industrial personal computer obtains the displacement of the operation platform through calculation, x = U1/k1, x is the platform displacement, U1 is the output voltage of the bridge circuit after being amplified by the strain amplifier, and k1 is the proportionality coefficient. The industrial personal computer needs to be calibrated to obtain a proportionality coefficient k1 before calculating the displacement of the operating platform, and the specific method comprises the following steps: (1) the displacement mechanism drives the operation platform 5 to displace in the X-axis, Y-axis or Z-axis direction; (2) the displacement x0 of the loading platform is detected by using a capacitance or laser displacement sensor, the output voltage U1 of the position detection strain gauge is measured, and the proportionality coefficient k1 of the displacement and the output voltage is calculated according to the formula k1= U1/x 0.
In the above embodiment, the multi-degree-of-freedom compliant micromanipulator based on the bionic flapping wing further comprises an output force detection device, the output force detection device is an output force detection strain gauge 113, and the output force detection strain gauge 113 is installed on the side surface of the leaf-shaped flexible hinge 102 connected with the rigid bottom rod 109. The output force detection device is used for detecting the driving force applied to the operation platform. The displacement detection device and the output force detection device are respectively arranged on different leaf-shaped flexible hinges. The displacement detection device and the output force detection device can detect the displacement of the object carrying operation platform and the output force of the displacement mechanism in real time.
As shown in fig. 7, the output force detection strain gauge forms a bridge circuit, the bridge circuit is amplified by the strain amplifier and then transmitted to the industrial personal computer through the PCI card through the a/D port, the industrial personal computer obtains the driving force of the displacement mechanism through calculation, F = U2/k2, F is the driving force of the displacement mechanism, U2 is the output voltage of the bridge circuit amplified by the strain amplifier, and k2 is a proportionality coefficient. The industrial personal computer needs to be calibrated to obtain a proportionality coefficient k2 before calculating the driving force of the displacement mechanism, and the specific method is as follows: (1) the displacement mechanism drives the operation platform 5 to displace in the directions of an x axis, a y axis or a z axis; (2) the driving force F0 of the displacement mechanism is detected by the output force sensor, the output voltage U2 of the output force detection strain gauge is measured, and the proportional coefficient k2 of the output force and the output voltage is calculated according to the formula k2= U2/F0.
Displacement detection devices or output force detection devices are arranged on the side surfaces of all the leaf-shaped flexible hinges; the operation platform 5 is correspondingly provided with a displacement detection device and an output force detection device. As shown in fig. 3, position detection strain gauges 112 are mounted on the side surfaces of the leaf-shaped flexible hinges 102 connected to the rigid push rods 101, and output force detection strain gauges 113 are mounted on the side surfaces of the leaf-shaped flexible hinges 102 connected to the rigid bottom rods 109, so that the displacement of the operation platform 5 and the output force of the displacement mechanism are detected more accurately.
The multi-degree-of-freedom compliant micromanipulator based on the bionic flapping wings is integrally formed by linear cutting, and can be formed only by simple assembly. The formed flexible micromanipulator has no gap, no friction, high guiding precision and increased operation stroke.
Although the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.
Claims (7)
1. The multi-degree-of-freedom flexible micromanipulator based on the bionic flapping wings is characterized in that: the device comprises an operation platform (5), a non-coplanar base (2), a connecting seat (4) and three single-degree-of-freedom displacement mechanisms (1);
three single-degree-of-freedom displacement mechanisms (1) are mounted on the non-coplanar base (2), the operating platform (5) is supported by the three single-degree-of-freedom displacement mechanisms (1), and the three single-degree-of-freedom displacement mechanisms (1) are mutually vertically arranged and drive the operating platform (5) to have the degrees of freedom in the directions of an x axis, a y axis and a z axis;
each single-degree-of-freedom displacement mechanism (1) comprises an inner displacement transmission mechanism and a rack with a flexible hinge; the internal displacement transmission mechanism comprises a rigid frame (1003), a pushing block (1004), a first piezoelectric stack driver (1001), a second piezoelectric stack driver (1002) and amplification decoupling mechanisms arranged in pairs; each amplification decoupling mechanism comprises a first guide rod (1009), a second guide rod (1014), a push rod (1006) and an amplification rod (1012), the first guide rod (1009), the second guide rod (1014) and the amplification rod (1012) are arranged in parallel and are perpendicular to the push rod (1006), a first piezoelectric stack driver (1001) capable of pushing the first guide rod (1009) to move is arranged between the rigid frame (1003) and the first guide rod (1009), and a second piezoelectric stack driver (1002) capable of pushing the second guide rod (1014) to move is arranged between the rigid frame (1003) and the second guide rod (1014);
the device comprises a frame, an operation platform (5) and a rigid frame (1003), wherein the frame is connected with the operation platform (5), the rigid frame (1003) is connected with an out-of-plane base (2), the guide rod I (1009) is connected with an amplification rod (1012), the amplification rod (1012) is connected with a guide rod II (1014), the guide rod II (1014) is connected with the rigid frame (1003), the amplification rod (1012) is connected with a push rod (1006) and the push rod (1006) is connected with a push block (1004) through single-shaft circular-section double-notch flexible hinges (1008), the push block (1004) is connected with the frame with the flexible hinges.
2. The multi-degree-of-freedom compliant micromanipulator based on a bionic flapping wing of claim 1, wherein: the single-axis circular cross-section double-notch flexible hinge (1008) is a straight circular double-notch flexible hinge.
3. The multi-degree-of-freedom compliant micromanipulator based on bionic flapping wings of claim 1 or 2, wherein: the rack comprises an inner side frame and an outer side frame which are formed by linear cutting; the inner side frame comprises an inner push rod (110) and an inner side column (111); the outer frame comprises a rigid push rod (101), a rigid bottom rod (109) and an outer frame (105); the inner push rod (110) is connected with the push block (1004), and the inner push rod (110) is connected with the inner side column (111), the inner side column (111) is connected with the rigid bottom rod (109), the rigid push rod (101) is connected with the outer side column (105), and the outer side column (105) is connected with the rigid bottom rod (109) through leaf-shaped flexible hinges (102).
4. The multi-degree-of-freedom compliant micromanipulator based on a bionic flapping wing of claim 3, wherein: the inner side column (111) and the rigid bottom rod (109), the rigid push rod (101) and the outer side column (105) and the rigid bottom rod (109) are connected together through hinge connectors (103) which are arranged between and connected with the two leaf-shaped flexible hinges (102), and the two leaf-shaped flexible hinges (102) are arranged perpendicular to each other.
5. The multi-degree-of-freedom compliant micromanipulator based on bionic flapping wings of claim 4, wherein: the device is characterized by further comprising a displacement detection device, wherein the displacement detection device is a position detection strain gauge (112), and the position detection strain gauge (112) is installed on the side face of the leaf-shaped flexible hinge (102) connected with the rigid push rod (101).
6. The multi-degree-of-freedom compliant micromanipulator based on a bionic flapping wing of claim 5, wherein: the output force detection device is an output force detection strain gauge (113), and the output force detection strain gauge (113) is arranged on the side surface of the leaf-shaped flexible hinge (102) connected with the rigid bottom rod (109).
7. The multi-degree-of-freedom compliant micromanipulator based on bionic flapping wings of claim 4, 5 or 6, wherein: the connecting seat (4) is an L-shaped connecting seat, and the rigid frame (1003) is connected with the non-coplanar base (2), the rigid push rod (101) and the operating platform (5) through the L-shaped connecting seat.
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| EP2761357B1 (en) * | 2011-09-28 | 2022-09-07 | Bruker Nano, Inc. | Testing assembly including a multiple degree of freedom stage |
| CN204897391U (en) * | 2015-06-30 | 2015-12-23 | 宁波大学 | Piezoelectricity micro -displacement based on flexible hinge enlargies |
| CN108000486B (en) * | 2017-08-03 | 2024-03-08 | 宁波大学 | Three-degree-of-freedom compliant piezoelectric micro gripper |
| CN107863130B (en) * | 2017-09-20 | 2020-07-17 | 宁波大学 | Translational two-degree-of-freedom parallel flexible structure piezoelectric micromotion platform |
| CN107673305B (en) * | 2017-09-20 | 2019-12-13 | 宁波大学 | Two-translation one-rotation three-freedom-degree parallel flexible structure piezoelectric micromotion platform |
| CN108312086B (en) * | 2017-12-21 | 2019-11-12 | 宁波大学 | The adjustable multiple degrees of freedom flexible micro clamping device of constant force |
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