CN201498217U - Spatial three-translation micro-motion ultraprecise positioning platform - Google Patents
Spatial three-translation micro-motion ultraprecise positioning platform Download PDFInfo
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- CN201498217U CN201498217U CN 200920189388 CN200920189388U CN201498217U CN 201498217 U CN201498217 U CN 201498217U CN 200920189388 CN200920189388 CN 200920189388 CN 200920189388 U CN200920189388 U CN 200920189388U CN 201498217 U CN201498217 U CN 201498217U
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Abstract
The utility model relates to the ultraprecise positioning technology, in particular to a spatial three-translation micro-motion ultraprecise positioning platform. A conventional three-freedom parallel-connected mechanism is commonly realized by adopting a rigid element, and commonly adopts the driving scheme of a servo motor and a precise screw rod for realizing the precise positioning, however, the positioning precision of the positioning mode only can reach nano level because the screw thread gap and the driving friction exist. Three submissive branch chains which have the same structure are respectively fixed on a fixed base through screws, simultaneously, and a tail executor is embedded among the movable platforms of three submissive branch chains. After a piezoelectric ceramic driver installed on the submissive branch chains is driven, a flexible connecting rod 8 and a flexible connecting rod 13 generate deformation, and transmit to a bracket 6, and the bracket 6 can transmit the motion to the platform through a flexible connecting rod 12 and a flexible connecting rod 15, the spatial three-translation motion of the ultraprecise positioning platform is determined according to the motions of three submissive branch chains, and the ultraprecise positioning is finally realized.
Description
Technical field
The utility model relates to the ultraprecise location technology, particularly a kind of space three translation fine motion ultraprecise locating platforms.
Background technology
Have high precision precisely locating platform system and in sophisticated industry production in modern age and scientific research field, occupy extremely important status.It is the key link that directly influences precision, ultra precision cutting level of processing, precision measurement level and VLSI (very large scale integrated circuit) production level, and its every technical indicator is the important symbol of various countries' hi-tech development level simultaneously.Precision positioning technology in magnetic head production, large scale integrated circuit manufacturing and detection, biochip technology, communication micro switch and many leading-edge fields such as fiber alignment, microelectronic product manufacturing, precision and ultraprecise processing, accurate operation, precision measurement, MEMS (micro electro mechanical system), biomedical engineering in be with a wide range of applications.Along with the high speed development of technology such as microelectric technique, mechanics of communication, precision and ultraprecise processing, also more and more urgent to the requirement of precision positioning technology.Require system platform to have micron order, submicron order even nano level repetitive positioning accuracy in accurate the manufacturing.For example, at microelectronic, along with the raising of large scale integrated circuit integrated level, live width has reached submicron order, and the device delineation width that has reaches 0.75 μ m.Need to require the high performance ultraprecise space orientation platform of development as its technical support to bearing accuracy is harsh in the manufacture process.Realize sub-micron even nano level space orientation, the conventional driving and the kind of drive are no longer suitable.For example, conventional 3-freedom parallel mechanism generally all is that the utilization stiffener is realized, in order to realize precision positioning, usually adopt servomotor and precision lead screw transmission scheme, yet this locator meams is owing to the existence of thread pitch and gearing friction, and its bearing accuracy generally can only reach micron order.In order to compensate driving error, improve resolution, often adopt electromagnetism or Piezoelectric Driving that workbench is carried out the fine location adjustment, but adjustment process is long, system complex, and because the space coupling make that the spatial positioning accuracy adjustment is difficult to realize.
The utility model content
For overcoming above-mentioned deficiency, the utility model provides a kind of space three translation fine motion ultraprecise locating platforms.Use the plastic deformation of the complete submissive side chain in parallel of three balanced configurations, realize three translation fine motion ultraprecises location, locating platform space.
The technical scheme that its technical matters that solves the utility model adopts is: a kind of space three translation fine motion ultraprecise locating platforms, three identical submissive side chains 1 are fastened on respectively on three faces of fixed pedestal 3, ultraprecise locating platform 2 is fixed on the end effector 4, and end effector 4 is set in the middle of the moving platform 14 of three submissive side chains;
Fixed platform 5 in the submissive side chain 1 is connected with support 6 by flexible link 8,13, and support 6 is connected with moving platform 14 by flexible link 12,15, Piezoelectric Ceramic 9,16 driven in synchronism flexible links 8,13, and formation has full compliant structure side chain;
Three identical submissive side chains 1 are fastened on three faces of fixed pedestal 3 by screw 11 respectively.
The beneficial effects of the utility model are: utilize the elastic deformation of compliant component and the motion of non-rigid support is transmitted or a kind of novel assemble mechanism of exempting from of converting motion, power or energy, the influence of having avoided parallel institution terminal platform motion characteristic to be caused owing to the gap of kinematic pair axis rigging error and kinematic pair existence, accurate positioning; Inherited parallel institution space multifreedom motion characteristic, overcome usual manner because factors such as threaded hole stroke and gearing friction to the influence of precision positioning precision, reach the nanometer-level ultra-precise location.
Description of drawings
Fig. 1 is the utility model structural representation.
Fig. 2 is the structural representation of a submissive side chain among Fig. 1.
1. submissive side chains, 2. ultraprecise locating platform, 3. fixed pedestal among the figure, 4. end effector, 5. fixed platform, 6. support, 7. cradle head, 8. flexible link, 9. Piezoelectric Ceramic, 10.U the type joint, 11. screws, 12. flexible links, 13. flexible link, 14. moving platform, 15. flexible links, 16. Piezoelectric Ceramic.
Wherein flexible link 8 is identical with flexible link 13, and flexible link 12 is identical with flexible link 15, and Piezoelectric Ceramic 9 is identical with Piezoelectric Ceramic 16.
Embodiment
Three identical submissive side chains of structure are separately fixed on the fixed pedestal 3 by screw 11, and end effector 4 is embedded between the moving platform 14 of three submissive side chains simultaneously.After being installed in Piezoelectric Ceramic 9,16 drivings on the submissive side chain, flexible link 8 and flexible link 13 deform, pass to support 6, support 6 passes to moving platform 14 by flexible link 12 and flexible link 15 with motion again, determine space three translation motions of ultraprecise locating platform 2 according to the motion of three submissive side chains, finally realize the ultraprecise location.
Ultraprecise locating platform 2, end effector 4, fixed platform 5, moving platform 14, cradle head 7, U type joint 10, Piezoelectric Ceramic 9,16 etc. are prior art products or structure in the utility model.
Cradle head 7 in the utility model, are connected flexible link 8,13 two ends, realize the plastic deformation transmission.
The utility model has been inherited parallel institution space multifreedom motion characteristic, has overcome usual manner because factors such as threaded hole stroke and gearing friction to the influence of precision positioning precision, reach the nanometer-level ultra-precise location.
Claims (4)
1. space three translation fine motion ultraprecise locating platforms, it is characterized in that: three identical submissive side chains (1) are fastened on respectively on three faces of fixed pedestal (3), ultraprecise locating platform (2) is fixed on the end effector (4), and end effector (4) is set in the middle of the moving platform (14) of three submissive side chains.
2. according to the described a kind of space of claim 1 three translation fine motion ultraprecise locating platforms, it is characterized in that: the fixed platform (5) in the submissive side chain (1) is connected with support (6) by flexible link (8), (13), support (6) is connected with moving platform (14) by flexible link (12), (15), Piezoelectric Ceramic (9), (16) driven in synchronism flexible link (8), (13), formation has full compliant structure side chain.
3. according to the described a kind of space of claim 2 three translation fine motion ultraprecise locating platforms, it is characterized in that: flexible link (8), (13) two ends connect cradle head (7) respectively, and flexible link (12), (15) two ends connect U type joint (10) respectively.
4. according to the described a kind of space of claim 1 three translation fine motion ultraprecise locating platforms, it is characterized in that: three identical submissive side chains (1) are fastened on three faces of fixed pedestal (3) by screw (11) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200920189388 CN201498217U (en) | 2009-09-30 | 2009-09-30 | Spatial three-translation micro-motion ultraprecise positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200920189388 CN201498217U (en) | 2009-09-30 | 2009-09-30 | Spatial three-translation micro-motion ultraprecise positioning platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201498217U true CN201498217U (en) | 2010-06-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200920189388 Expired - Fee Related CN201498217U (en) | 2009-09-30 | 2009-09-30 | Spatial three-translation micro-motion ultraprecise positioning platform |
Country Status (1)
| Country | Link |
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| CN (1) | CN201498217U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101871549A (en) * | 2010-06-04 | 2010-10-27 | 上海理工大学 | Three-degree-of-freedom precision-positioning workbench |
| CN104440817A (en) * | 2014-12-04 | 2015-03-25 | 山东大学 | Spatial three-dimensional micro-displacement precise positioning device |
| CN107282948A (en) * | 2016-04-12 | 2017-10-24 | 浙江科技学院 | A kind of Three Degree Of Freedom device processed applied to ultra-precise cutting |
| CN107673305A (en) * | 2017-09-20 | 2018-02-09 | 宁波大学 | A kind of two translations one rotate freedom degree parallel connection flexible structure piezoelectric micromotion platform |
| CN108418465A (en) * | 2018-05-14 | 2018-08-17 | 西安科技大学 | A kind of submicron order precision flexible micro system |
| CN109949856A (en) * | 2019-03-15 | 2019-06-28 | 天津理工大学 | A kind of Modularized 6 freedom degree precise jiggle mechanism based on flexible hinge |
| CN110211627A (en) * | 2019-05-14 | 2019-09-06 | 江南大学 | High-precision large-stroke table space translation precisely locating platform effective greatly |
-
2009
- 2009-09-30 CN CN 200920189388 patent/CN201498217U/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101871549A (en) * | 2010-06-04 | 2010-10-27 | 上海理工大学 | Three-degree-of-freedom precision-positioning workbench |
| CN101871549B (en) * | 2010-06-04 | 2012-06-13 | 上海理工大学 | Three-degree-of-freedom precision-positioning workbench |
| CN104440817A (en) * | 2014-12-04 | 2015-03-25 | 山东大学 | Spatial three-dimensional micro-displacement precise positioning device |
| CN107282948A (en) * | 2016-04-12 | 2017-10-24 | 浙江科技学院 | A kind of Three Degree Of Freedom device processed applied to ultra-precise cutting |
| CN107673305A (en) * | 2017-09-20 | 2018-02-09 | 宁波大学 | A kind of two translations one rotate freedom degree parallel connection flexible structure piezoelectric micromotion platform |
| CN107673305B (en) * | 2017-09-20 | 2019-12-13 | 宁波大学 | Two-translation one-rotation three-freedom-degree parallel flexible structure piezoelectric micromotion platform |
| CN108418465A (en) * | 2018-05-14 | 2018-08-17 | 西安科技大学 | A kind of submicron order precision flexible micro system |
| CN108418465B (en) * | 2018-05-14 | 2024-02-27 | 西安科技大学 | Submicron-level precise flexible micro-motion system |
| CN109949856A (en) * | 2019-03-15 | 2019-06-28 | 天津理工大学 | A kind of Modularized 6 freedom degree precise jiggle mechanism based on flexible hinge |
| CN109949856B (en) * | 2019-03-15 | 2021-01-29 | 天津理工大学 | Modularized six-degree-of-freedom precise micro-motion mechanism based on flexible hinge |
| CN110211627A (en) * | 2019-05-14 | 2019-09-06 | 江南大学 | High-precision large-stroke table space translation precisely locating platform effective greatly |
| CN110211627B (en) * | 2019-05-14 | 2023-12-22 | 江南大学 | High-precision large-stroke large-effective table top space translational precision positioning platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100602 Termination date: 20100930 |