CN213902251U - Small-sized double-shaft high-precision positioning platform based on optical fiber alignment - Google Patents
Small-sized double-shaft high-precision positioning platform based on optical fiber alignment Download PDFInfo
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- CN213902251U CN213902251U CN202023299596.XU CN202023299596U CN213902251U CN 213902251 U CN213902251 U CN 213902251U CN 202023299596 U CN202023299596 U CN 202023299596U CN 213902251 U CN213902251 U CN 213902251U
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Abstract
The utility model discloses a high-precision positioning platform based on small double shafts aligned by optical fibers, which comprises a base, wherein the top of the base is fixedly connected with a lower guide rail, the left side of the base is provided with an electrode port, the top of the lower guide rail is fixedly connected with a limiting block, the outer wall of the lower guide rail is slidably connected with a guide rail slide seat, the top of the guide rail slide seat is fixedly connected with a bottom plate, the top of the bottom plate is fixedly connected with an upper guide rail, the outer wall of the upper guide rail is slidably connected with an upper guide rail slide seat, the top of the upper guide rail slide seat is fixedly connected with a basic positioning platform, the inner cavity of the bottom plate is provided with a grating ruler, the left side of the grating ruler is provided with a grating reading head, the middle part of the inner cavity of the bottom plate is provided with a motor, the two sides of the motor are provided with linear motor coils, the outer part of the motor is fixedly connected with linear motor magnetic tracks, square wave pulses are counted through the grating reading head, the displacement and the speed of the grating ruler can be obtained, and the use accuracy of the equipment is further improved.
Description
Technical Field
The utility model relates to an electromechanical device technical field specifically is based on optic fibre aims at small-size biax high accuracy positioning platform.
Background
In recent years, with the rapid development of microelectronics, life sciences, medical and health, biochemistry, semiconductors, optics, data storage, ultra-precision machines and their manufacture, precision measurement and other subjects, people have more and more demands on micro-nano precision positioning technology and micro-nano precision driving technology. Therefore, various actuators having precise positioning or having precise driving have been developed. Traditional driver generally adopts step motor to drive ball screw and realizes precision positioning or precision drive, perhaps adopts manual fine thread sight location or drive to be unipolar location platform mostly, its precision is lower, then seems to be less than a little when some high accuracy preparation, consequently need provide a high accuracy location platform.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
Not enough to prior art, the utility model provides a based on small-size biax high accuracy positioning platform is aimed at to optic fibre has solved the problem that proposes in the aforesaid.
(II) technical scheme
In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: based on small-size biax high accuracy positioning platform is aimed at to optic fibre, which comprises a base, the top fixedly connected with bottom rail of base, the left side of base is provided with the electrode port, the top fixedly connected with stopper of bottom rail, the outer wall sliding connection of bottom rail has the guide rail slide, the top fixedly connected with bottom plate of guide rail slide, the top fixedly connected with of bottom plate goes up the guide rail, the outer wall sliding connection of going up the guide rail has the upper rail slide, the top fixed connection of upper rail slide has basic positioning platform, the inner chamber of bottom plate is provided with grating chi, grating chi's left side is provided with the grating reading head, the middle part of bottom plate inner chamber is provided with the motor, the both sides of motor are provided with the linear electric motor coil, the outside fixedly connected with linear electric motor magnetic track of motor.
Preferably, the lower guide rail and the upper guide rail are both double guide rails and are symmetrically distributed, so that the stability of the equipment can be improved, and the upper guide rail and the lower guide rail are perpendicular to each other and can slide in all directions to do work.
Preferably, the bottom of base and the top of basic locating platform all seted up a plurality of mounting holes for use with other equipment fixing cooperation.
Preferably, the grating reading head is composed of a light source, a converging lens, an indicating grating, a photoelectric element and an adjusting mechanism, when a small angle theta is formed between the lines on the indicating grating and the lines on the scale grating, and two grating scale facets are relatively placed in parallel, under the irradiation of the light source, the grating lines are positioned on the almost vertical grating lines to form light and dark stripes which are alternately arranged, the stripes are called as 'Moire fringes', the arrangement direction of the Moire fringes is vertical to the bisector of the included angle of the two grating lines, 4 photoelectric devices are placed at certain intervals within the width of the Moire fringes to realize the electronic fine and direction judgment functions, because the displacement is a vector, namely the size and the direction of the two paths of photoelectric signals are detected, at least two paths of photoelectric signals with different phases are needed, and in order to eliminate common mode interference, direct current components and even harmonics, 4 paths of photoelectric signals obtained by 4 photosensitive devices are respectively sent to the input ends of 2 differential amplifiers, two paths of signals output from the differential amplifier have a phase difference of pi/2, and are shaped into signals with a duty ratio of 1: 1, then, through distinguishing the comparison to the phase place of square wave, just can obtain the moving direction of grating chi, through counting square wave pulse, can obtain the displacement and the speed of grating chi, and then improve the precision that equipment used.
Preferably, the side surface of the basic positioning platform and the front surface of the bottom plate are both provided with a sealing plate.
(III) advantageous effects
The utility model provides a based on small-size biax high accuracy positioning platform is aimed at to optic fibre possesses following beneficial effect:
(1) the small-sized double-shaft high-precision positioning platform based on optical fiber alignment comprises a grating reading head, a converging lens, an indicating grating, photoelectric elements, an adjusting mechanism and the like, wherein when a small angle theta is formed between lines on the indicating grating and lines on a scale grating, and two grating scale facets are arranged in parallel relatively, under the irradiation of a light source, the grating reading head is positioned on an almost vertical grating line to form light and shade alternative stripes, the stripes are called as Moire stripes, the arrangement direction of the Moire stripes is vertical to a bisector of an included angle of the two grating lines, and in the width of the Moire stripes, 4 photoelectric devices are arranged at certain intervals to realize the electronic fineness and direction judgment functions The DC component and even harmonic, 4 paths of photoelectric signals obtained by 4 photosensitive devices are respectively sent to the input ends of 2 differential amplifiers, the phase difference of two paths of signals output from the differential amplifiers is pi/2, and the two paths of signals are shaped, firstly, the two paths of signals are shaped into signals with the duty ratio of 1: 1, then, through distinguishing the comparison to the phase place of square wave, just can obtain the moving direction of grating chi, through counting square wave pulse, can obtain the displacement and the speed of grating chi, and then improve the precision that equipment used.
(2) The XY integrated positioning platform based on the optical fiber alignment small-sized double-shaft high-precision positioning platform and the nano-scale positioning precision is a linear motor direct-drive platform, adopts a crossed roller bearing, has excellent dynamic performance and positioning precision, has a no-load cutoff frequency of more than 120Hz at most, adopts an XY integrated design, has the characteristic of small low lateral Abbe error, can be customized according to the requirements of customers, can be used as a two-dimensional motion platform for independent use, is provided with a plurality of mounting holes at the bottom of a base and the top of a basic positioning platform, can be used for being matched with other equipment for mounting and using, and can be matched with ART130, ART130-5V or RSML series turntables to form different configurations to meet the requirements of customers.
(3) The small double-shaft high-precision positioning platform based on optical fiber alignment has strong driving capability, the maximum speed is 350mm/s, the no-load acceleration can reach 1g, a linear amplifier is adopted, under the premise that the laboratory environment is well subjected to vibration isolation, the on-site stability and the minimum stepping quantity of the platform can be smaller than 5nm, the platform is mainly applied to optical fiber coupling in the communication field, wafer defect detection in the semiconductor field, gene sequencing in the biomedical field and the like, and a flexible customization scheme can be provided according to application of a client.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a left side view of the present invention;
fig. 3 is a sectional view taken along line a-a of fig. 1 according to the present invention.
In the figure: 1. a base; 2. a lower guide rail; 201. a rail slide; 3. an electrode port; 301. a limiting block; 4. a base plate; 5. an upper guide rail; 501. an upper rail slide; 6. a base positioning platform; 7. a grating scale; 8. a motor; 9. a linear motor coil; 10. a linear motor magnetic track; 11. a grating reading head.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
Referring to fig. 1-3, a small-sized dual-axis high-precision positioning platform based on optical fiber alignment includes a base 1, a lower guide rail 2, a guide rail sliding seat 201, an electrode port 3, a limiting block 301, a bottom plate 4, an upper guide rail 5, an upper guide rail sliding seat 501, a basic positioning platform 6, a grating ruler 7, a motor 8, a linear motor coil 9, a linear motor magnetic track 10, and a grating reading head 11.
The initial positions and the connection relations of the structures are as follows:
Furthermore, the lower guide rail 2 and the upper guide rail 5 are both double guide rails which are symmetrically distributed, so that the stability of the equipment can be improved, and the upper guide rail and the lower guide rail are perpendicular to each other and can slide in all directions to do work.
Further, a plurality of mounting holes have all been seted up with basic locating platform 6's top to the bottom of base 2 for use with other equipment fixing cooperations.
Furthermore, the grating reading head 11 is composed of a light source, a converging lens, an indicating grating, a photoelectric element, an adjusting mechanism and the like, when a small angle theta is formed between the lines on the indicating grating and the lines on the scale grating, and when two grating scale facets are placed in parallel relatively, under the irradiation of the light source, the two grating scale facets are positioned on the almost vertical grating lines to form light and dark stripes which are alternated, the stripes are called as moire stripes, and the arrangement direction of the moire stripes is vertical to the bisector of the included angle between the two grating lines.
Furthermore, the side surface of the basic positioning platform 6 and the front surface of the bottom plate 4 are both provided with sealing plates.
This based on small-size biax high accuracy positioning platform during operation of optical fiber alignment: the equipment is provided with an upper guide rail 5 and a lower guide rail 2, the lower guide rail 2 and the upper guide rail 5 are double guide rails which are symmetrically distributed and can improve the stability of the equipment, the upper guide rail and the lower guide rail are vertical to each other and can slide in all directions to do work, after the power is switched on, a motor drives a basic positioning platform 6 to slide to do work, a grating ruler 7 and a grating reading head 11 are arranged in the equipment, the grating reading head 11 comprises a light source, a converging lens, an indicating grating, a photoelectric element, an adjusting mechanism and the like, when a small angle theta is formed between lines on the indicating grating and lines on a scale grating, and when two grating ruler facets are relatively placed in parallel, the two grating ruler facets are positioned on the almost vertical grating lines under the irradiation of the light source to form light and shade alternate stripes which are called as 'Moire stripes', the Moire stripes are arranged in the direction which the two bisectors of the included angle of the grating lines are vertical to each other, in the width of moire fringe, 4 photoelectric devices are placed at certain intervals to realize the functions of electronic component and direction judgment, because the displacement is a vector, namely the size and the direction of the displacement are detected, at least two paths of photoelectric signals with different phases are needed, in order to eliminate common mode interference, direct current components and even harmonics, 4 paths of photoelectric signals obtained by 4 photosensitive devices are respectively sent to the input ends of 2 differential amplifiers, the phase difference of the two paths of signals output from the differential amplifiers is pi/2, and the two paths of signals are shaped, and firstly the two paths of signals are shaped into signals with the duty ratio of 1: 1, then, through distinguishing the comparison to the phase place of square wave, just can obtain the moving direction of grating chi, through counting square wave pulse, can obtain the displacement and the speed of grating chi, and then improve the precision that equipment used.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (6)
1. Based on small-size biax high accuracy positioning platform is aimed at to optic fibre, including base (1), its characterized in that: the utility model discloses a guide rail structure, including base (1), the top fixedly connected with lower rail (2) of base (1), the left side of base (1) is provided with electrode port (3), the top fixedly connected with stopper (301) of lower rail (2), the outer wall sliding connection of lower rail (2) has guide rail slide (201), the top fixedly connected with bottom plate (4) of guide rail slide (201), guide rail (5) are gone up to the top fixedly connected with of bottom plate (4), the outer wall sliding connection of going up guide rail (5) has last guide rail slide (501), the top fixedly connected with of going up guide rail slide (501) has basic location platform (6), the inner chamber of bottom plate (4) is provided with grating chi (7), the left side of grating chi (7) is provided with grating reading head (11).
2. The compact biaxial high-precision positioning stage based on optical fiber alignment of claim 1, wherein: the lower guide rail (2) and the upper guide rail (5) are both double guide rails and are symmetrically distributed.
3. The compact biaxial high-precision positioning stage based on optical fiber alignment of claim 1, wherein: the bottom of base (1) and the top of basic locating platform (6) have all seted up a plurality of mounting holes for use with other equipment fixing cooperations.
4. The compact biaxial high-precision positioning stage based on optical fiber alignment of claim 1, wherein: the grating reading head (11) comprises a light source, a converging lens, an indicating grating, a photoelectric element, an adjusting mechanism and the like, when a small angle theta is formed between lines on the indicating grating and lines on the scale grating, and when two grating scale facets are arranged in parallel relatively, the two grating scale facets are positioned on almost vertical grating lines under the irradiation of the light source to form light and dark alternate stripes which are called as 'Moire fringes', and the arrangement direction of the Moire fringes is vertical to a bisector of an included angle between the two grating lines.
5. The compact biaxial high-precision positioning stage based on optical fiber alignment of claim 1, wherein: and sealing plates are arranged on the side surface of the basic positioning platform (6) and the front surface of the bottom plate (4).
6. The compact biaxial high-precision positioning stage based on optical fiber alignment of claim 1, wherein: the middle part of bottom plate (4) inner chamber is provided with motor (8), the both sides of motor (8) are provided with linear electric motor coil (9), the outside fixedly connected with linear electric motor magnetic track (10) of motor (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023299596.XU CN213902251U (en) | 2020-12-31 | 2020-12-31 | Small-sized double-shaft high-precision positioning platform based on optical fiber alignment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023299596.XU CN213902251U (en) | 2020-12-31 | 2020-12-31 | Small-sized double-shaft high-precision positioning platform based on optical fiber alignment |
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| Publication Number | Publication Date |
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| CN213902251U true CN213902251U (en) | 2021-08-06 |
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| CN202023299596.XU Active CN213902251U (en) | 2020-12-31 | 2020-12-31 | Small-sized double-shaft high-precision positioning platform based on optical fiber alignment |
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| CN (1) | CN213902251U (en) |
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- 2020-12-31 CN CN202023299596.XU patent/CN213902251U/en active Active
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