CN115773445A - A multi-degree-of-freedom gantry air-floating motion system for precision optical detection and imaging - Google Patents

Abstract

The invention discloses a multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging, which comprises a base, wherein two sets of Y-axis air floatation guide rails are symmetrically fixed above the base through a pressing mechanism; two ends of the X-axis air floatation guide rail are fixed on a Y-axis air floatation sleeve of the Y-axis air floatation guide rail through first screws, and a two-dimensional nano platform is fixed on the X-axis air floatation sleeve of the X-axis air floatation guide rail through second screws; the gantry support is symmetrically fixed above the base through first bolts, and a gantry beam is fixed above the gantry support through second bolts; the Z-axis lifting platform and the Z-axis moving platform are fixed on the front side of the gantry beam through third bolts, and the three-dimensional nano moving platform is fixed on the side face of the Z-axis moving platform through a right-angle adapter. The scanning detection imaging precision is improved, and meanwhile, the movement with a large stroke is realized; the system can be used for various scanning detection imaging application scenes with different ranges, different speeds and different precision requirements.

Description

A multi-degree-of-freedom gantry air-floating motion system for precision optical detection and imaging

technical field

The invention relates to the field of gantry air-floating motion systems, in particular to a multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging.

Background technique

Precision optical detection imaging is mainly used for sample status monitoring in the fields of semiconductors, nano functional materials, biology, chemical industry, food, pharmaceutical research, etc., and the motion system is an important application system for precision optical detection imaging, mainly used to carry microscopes and CCD cameras , Precision optical scanner (atomic force microscope) and other instruments.

In order to achieve large-scale movement, the common motion systems on the market today use a mobile gantry structure to carry a Z-direction translation platform. For example, if the scanner is installed on the Z-direction translation platform, the scanner will be unstable in the XY direction and the scanning accuracy will be low. Application scenarios There are limitations.

Contents of the invention

In view of the above-mentioned defects or deficiencies in the prior art, it is desired to provide a multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging, which can improve the accuracy of scanning detection and imaging, and at the same time realize large-stroke motion, which can be used in different ranges and different A variety of scanning detection imaging application scenarios with different speed and accuracy requirements.

According to the technical solution provided by the embodiment of the present invention, a multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging includes a base, and two sets of Y-axis air-floating motion systems are symmetrically fixed on the top of the base through a pressing mechanism. Guide rail; X-axis air-floating guide rail, the two ends of the X-axis air-floating guide rail are fixed on the Y-axis air-bearing sleeve of the Y-axis air-floating guide rail through the first screw, and the X-axis air-floating sleeve of the X-axis air-floating guide rail A two-dimensional nano-platform is fixed on the floating sleeve by second screws; a gantry support is symmetrically fixed above the base by first bolts, and a gantry is fixed above the gantry support by second bolts Beam; the Z-axis lifting platform and the Z-axis motion platform are fixed on the front side of the gantry beam through the third bolt, and the front side of the Z-axis motion platform is fixed with a three-dimensional nano-motion platform through a right-angle adapter. It also includes a left side outlet mechanism and a right side outlet mechanism, and the left side outlet mechanism and the right side outlet mechanism are fixed on the front side of the gantry beam by fourth bolts. It also includes a drag chain mechanism, the moving end of the drag chain mechanism is fixed at both ends of the X-axis air bearing guide rail, and the fixed end of the drag chain mechanism is fixed at both sides of the base. It also includes a U-shaped linear motor, the U-shaped linear motor stator is symmetrically fixed on both sides of the base, and the U-shaped linear motor mover is fixed at both ends of the X-axis air bearing guide rail. The Y-axis air bearing guide rail includes a Y-axis guide rail bar and the Y-axis air bearing sleeve, the Y-axis guide rail bar passes through the Y-axis air bearing sleeve, and the Y-axis air bearing sleeve includes a Y-axis air bearing sleeve connected by a third screw. Y-axis air bearing side plate 1, Y-axis air bearing side plate 2, Y-axis air bearing bottom plate and Y-axis air bearing connecting plate. The X-axis air bearing guide rail includes an X-axis air bearing guide rail bar and the X-axis air bearing sleeve, the X-axis air bearing guide rail bar passes through the X-axis air bearing sleeve, and the X-axis air bearing sleeve includes a The fourth screw-connected X-axis air-floating side plate 1, X-axis air-floating side plate 2, X-axis air-floating bottom plate and X-axis air-floating connecting plate. The pressing structure includes a front pressing block and a rear pressing block, and the rear pressing block and the front pressing block are installed above the backing plate through fifth screws. A cover is fixedly connected to the top of the gantry beam.

To sum up, the beneficial effect of the present invention is: through the special design of the XY-axis air-floating guide rail, the influence of the Z-direction air film stability of the Y-axis air-floating guide rail on the Z-direction air film stability of the X-axis air-floating guide rail is eliminated, ensuring The stability of the sample in the static and dynamic measurement of the Z direction improves the scanning detection imaging accuracy, and at the same time realizes the movement of a large stroke; by arranging different micron motion platforms and nanometer motion platforms, it can be competent for multiple applications with different ranges, different speeds, and different precision requirements. A scanning detection imaging application scenario.

Description of drawings

Other characteristics, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

Fig. 1 is a structural representation of the present invention;

Fig. 2 is a structural schematic diagram of the connection between the Y-axis air-floating guide rail and the pressing mechanism of the present invention;

Fig. 3 is a structural schematic diagram of the X-axis air bearing guide rail of the present invention;

Fig. 4 is a structural schematic diagram of the Z-axis motion platform of the present invention;

Fig. 5 is a schematic structural diagram of the three-dimensional nano-motion platform of the present invention.

Labels in the figure: 1, base; 2, gantry support; 3, gantry beam; 4, X-axis air-floating guide rail; 4-1, X-axis air-floating guide rail bar; 4-2, X-axis air-floating floor; 4- 3. X-axis air flotation side plate 1; 4-4, X-axis air flotation side plate 2; 4-5, X-axis air flotation connecting plate; 5. U-shaped linear motor; 6. Cover; 7. Left outlet Mechanism; 8. Z-axis lifting platform; 9. Z-axis motion platform; 9-1. Motion table; 10. Drag chain mechanism; 11. Right outlet mechanism; 12. Two-dimensional nano-platform; 14. Three-dimensional nano-motion platform; 14-1. Platform main body; 14-2. Annular piezoelectric ceramics; 15. Y-axis air-floating guide rail; 15-1. Y-axis guide rail; 15-2. Y-axis air-floating side plate 1; 15-3, Y-axis air flotation bottom plate; 15-4, Y-axis air flotation side plate 2; 15-5, Y-axis air flotation connecting plate; 15-6, front pressing block; 15-7, backing plate ; 15-8, the rear compression block.

Detailed ways

The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain related inventions, rather than to limit the invention. It should also be noted that, for ease of description, only parts related to the invention are shown in the drawings.

It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and examples.

As shown in Fig. 1, Fig. 2, Fig. 3 and Fig. 5, a multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging includes a base 1, which is used to carry the gantry and other air-floating motion platforms. Two sets of Y-axis air-floating guide rails 15 are symmetrically fixed on the top of the base 1 through a pressing mechanism; On the Y-axis air bearing sleeve of the floating guide rail 15, the X-axis air bearing sleeve of the X-axis air bearing guide rail 4 is fixed with a two-dimensional nano-platform 12 by a second screw, and the two-dimensional nano-platform 12 is 14XY A nano-platform with a large axial stroke can realize scanning imaging monitoring with a larger stroke range, and a vacuum suction cup for fixing samples can be loaded on it; the gantry support 2, the gantry support 2 is symmetrically fixed on the base 1 by the first bolt The top of the gantry support 2 is fixed with the gantry beam 3 by the second bolt; the Z-axis lifting platform 8 and the Z-axis motion platform 9 are fixed on the front side of the gantry beam 3 by the third bolt. The front side of the Z-axis motion platform 9 is fixed with a three-dimensional nano-motion platform 14 through a right-angle adapter 13. The transmission and guidance mode of the Z-axis lifting platform 8 is a micron platform with a ball screw and a cross ball screw, and the Z-axis lifting platform 8 moves A microscope can be installed on the table, and the Z-axis lifting platform 8 completes the focusing and abdication actions of the microscope through lifting movement. The XY axis is a traditional parallel flexible hinge structure, and the Z axis is used to realize the Z-direction high-speed vibration of the mounted probe. The annular piezoelectric ceramic 14-2 and special-shaped flexible hinge structure are used to increase the resonance frequency.

As shown in FIG. 1 , it also includes a left wire outlet mechanism 7 and a right wire outlet mechanism 11 , and the left wire outlet mechanism 7 and the right wire outlet mechanism 11 are fixed on the front side of the gantry beam 3 by fourth bolts. It also includes a drag chain mechanism 10, the moving end of the drag chain mechanism 10 is fixed on both ends of the X-axis air bearing guide rail 4, and the fixed end of the drag chain mechanism 10 is fixed on both sides of the base 1 for the X-axis air bearing. The power source wiring of the floating guide rail 4 and the two sets of Y-axis air bearing guide rails 15 is routed. It also includes a U-shaped linear motor 5, the stator of the U-shaped linear motor 5 is symmetrically fixed on both sides of the base 1, and the movers of the U-shaped linear motor 5 are fixed at both ends of the X-axis air bearing guide rail 4 to provide air Power for floating Y-axis movement.

As shown in Figures 1 and 2, the Y-axis air bearing guide rail 15 includes a Y-axis guide rail bar 15-1 and the Y-axis air bearing sleeve, and the Y-axis guide rail bar 15-1 passes through the Y-axis air bearing sleeve. Floating sleeve, the Y-axis air-floating sleeve includes Y-axis air-floating side plate 1 15-2, Y-axis air-floating side plate 2 15-4, Y-axis air-floating bottom plate 15-3 and Y-axis Air flotation connecting plate 15-5, Y-axis air flotation side plate 1 15-2, Y-axis air flotation side plate 2 15-4 cooperate with Y-axis guide rail 15-1 to form an air flotation bearing surface, Y-axis air flotation bottom plate 15-3 cooperates with the base 1 to form an air bearing surface, and fixes the Y-axis guide rail bar 15-1. The air bearing surface formed above restricts the remaining 5 degrees of freedom of the Y-axis air bearing guide rail 15, and only moves in the Y direction. The Y-direction air bearing is powered by the U-shaped linear motors 5 on both sides of the fixed base 1, and the air bearing surface formed by the cooperation of the two air bearing side plates and the Y-axis guide rail 15-1 is provided with a positive air pressure channel to form an air bearing surface. Membrane, set the waste gas collection air channel to discharge the exhaust gas out of the system through the air pipe, set the positive air pressure channel on the air bearing surface formed by the cooperation of the Y-axis air bearing bottom plate 15-3 and the base 1, set the exhaust gas collection air channel, and set the negative air pressure air channel. The Z-direction forms a preload to improve the stiffness and stability of the Z-direction air film. In order to improve the stiffness of the Y-axis air bearing guide rail 15, the material of the Y-axis guide rail 15-1 is made of silicon carbide ceramic square tube. The silicon carbide ceramic square tube has high rigidity, but Low strength, strong brittleness. The compression structure includes a front compression block 15-6 and a rear compression block 15-8, and the rear compression block 15-8 and the front compression block 15-6 are installed on the backing plate 15 by the fifth screw On the top of -7, the Z-direction interference fit is compressed by screws, and the side is tightened by jacking screws to fix the Y-axis guide rail bar 15-1.

As shown in Figures 1 and 3, the X-axis air bearing guide rail 4 includes an X-axis air bearing guide rail bar 4-1 and the X-axis air bearing sleeve, and the X-axis air bearing guide rail bar 4-1 passes through the Describe the X-axis air bearing sleeve, the X-axis air bearing sleeve includes the X-axis air bearing side plate 1 4-3, the X-axis air bearing side plate 2 4-4, and the X-axis air bearing bottom plate 4-4 connected by the fourth screw. 2 and the X-axis air-floating connecting plate 4-5, two air-floating side plates and the X-axis air-floating guide rail bar 4-1 form an air-floating bearing surface, set positive air pressure channels and waste gas collection air channels, and the X-axis air-floating bottom plate 4- 2 also cooperates with the base 1 to form an air bearing surface, and sets positive air pressure channels, waste gas collection air channels and negative air pressure air channels. On the air bearing cover of the Y-axis air bearing guide rail 15. The air-floating bottom surfaces of the X-axis air-floating guide rail and the Y-axis air-floating guide rail form an air-bearing bearing surface with the large-area upper table of the base 1, and the X-axis air-floating sleeve and the X-axis air-floating guide rail bar 4-1 are left in the Z direction. There is a gap, this kind of parallel air bearing connection can ensure the XY large stroke movement under the premise of a certain cross-sectional size, and at the same time, the Z-direction stability error of the Y-axis air-bearing guide rail 15 will not accumulate to the X-axis of the final sample. On the axis, through the design of the above-mentioned X-axis air-bearing guide rail 4 and Y-axis air-bearing guide rail 15, the final Z-direction stability of the loaded sample can reach nanometer level, ensuring the detection and imaging accuracy, because the air bearing design is used to eliminate the traditional transmission method Backlash, repeatability up to hundreds of nanometers.

As shown in Figures 1 and 4, the top of the gantry beam 3 is fixedly connected with a cover 6, and the structure of the Z-axis motion platform 9 is similar to that of the Z-axis lifting platform 8, both of which are cross ball guide rails plus ball screw type motion The power source of the platform is a stepping motor with a reducer, and the mechanical resolution can reach nanometer level. 9-1 of the Z-axis motion platform 9 is a motion table, and a Z-axis nano-platform is embedded in the motion table 9-1, which is driven by piezoelectric Power is provided by ceramics, and capacitive sensors are used as position feedback to achieve nanometer-level positioning accuracy. This design ensures that the thickness of the motion platform is small, and the functions of Z-axis coarse adjustment and fine adjustment can be realized.

When in use: the XY-axis air-floating guide rail system quickly moves to the edge of the equipment to load and take samples, moves to the right below the three-dimensional nano-motion platform 14 equipped with the probe, and the Z-axis motion platform 9 drives the probe to adjust to a suitable position. (1) Small range High-precision and high-speed scanning detection imaging: three-dimensional nano-motion platform 14XYZ three-axis movement, complete scanning imaging, (2) small range high-precision high-speed scanning detection imaging: two-dimensional nano-platform 12XY axis and three-dimensional nano-motion platform 14Z axis coordinate movement , Complete scanning imaging, (3) Large-scale low-speed scanning detection imaging: XY-axis air bearing guide rail system and 14Z-axis three-dimensional nano-motion platform coordinate movement to complete scanning imaging. The two Z-axis lifting platforms 8 can be equipped with a microscope to monitor the sample and scan to detect the state of the imaging probe.

In the assembly project, put two sets of Y-axis air-floating guide rails 15 on the base 1, measure the distance from the full-length side of the left Y-axis air-floating guide rail 15 to the reference plane of the side of the base 1, and ensure that the side of the Y-axis air-floating guide rail 15 is in contact with the base. 1. The side reference plane is parallel, and the Y-axis air-floating guide rail 15 is pressed by the pressing mechanism. Vertical to the side of the Y-axis air bearing guide rail 15, fix one end of the X-axis air bearing guide rail 4 to the left Y-axis air bearing guide rail 15, and loosely connect the Y-axis air bearing guide rail 15 on the other side to the X-axis air bearing guide rail 4 with screws. No need to tighten it, ventilate the Y-axis air bearing guide 15 with the X-axis air bearing 4, push the X-axis air bearing 4 back and forth to make it move in the Y direction, adjust the position of the Y-axis air bearing 15 on the other side until it is pushed The X-axis air-floating guide rail 4 has no jamming phenomenon, and the Y-axis air-floating guide rail 15 is compressed by a pressing mechanism.

The above description is only a description of the preferred embodiments of the present invention and the technical principles used. At the same time, the scope of the invention involved in the present invention is not limited to the technical solution formed by the specific combination of the above-mentioned technical features, but also covers the technical solutions made by the above-mentioned technical features or their equivalent features without departing from the inventive concept. Other technical solutions formed by any combination. For example, a technical solution formed by replacing the above-mentioned features with technical features disclosed in the present invention (but not limited to) having similar functions.

Claims (8)

1. A multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging, characterized in that it includes, a base (1), two sets of Y-axis air-floating guide rails (15) are symmetrically fixed above the base (1) through a pressing mechanism; The X-axis air-floating guide rail (4), the two ends of the X-axis air-floating guide rail (4) are fixed on the Y-axis air-floating sleeve of the Y-axis air-floating guide rail (15) by first screws, and the X-axis The X-axis air bearing sleeve of the air bearing guide rail (4) is fixed with a two-dimensional nanometer platform (12) by a second screw; A gantry support (2), the gantry support (2) is symmetrically fixed above the base (1) by first bolts, and a gantry crossbeam ( 3); The Z-axis lifting platform (8) and the Z-axis motion platform (9) are both fixed on the front side of the gantry beam (3) by a third bolt, and the front side of the Z-axis motion platform (9) is passed through a right-angle adapter (13) is fixed with a three-dimensional nanometer motion platform (14). 2. A kind of multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging according to claim 1, characterized in that: it also includes a left-hand outlet mechanism (7) and a right-hand outlet mechanism (11), so The left side outlet mechanism (7) and the right side outlet mechanism (11) are fixed on the front side of the gantry beam (3) by fourth bolts. 3. A multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging according to claim 1, characterized in that: it also includes a tow chain mechanism (10), and the moving end of the tow chain mechanism (10) It is fixed at both ends of the X-axis air bearing guide rail (4), and the fixed end of the drag chain mechanism (10) is fixed at both sides of the base (1). 4. A multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging according to claim 1, characterized in that: it also includes a U-shaped linear motor (5), and the U-shaped linear motor (5) The stator is symmetrically fixed on both sides of the base (1), and the mover of the U-shaped linear motor (5) is fixed on both ends of the X-axis air bearing guide rail (4). 5. A multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging according to claim 1, characterized in that: the Y-axis air-floating guide rail (15) includes a Y-axis guide rail bar (15-1 ) and the Y-axis air bearing sleeve, the Y-axis guide rail bar (15-1) passes through the Y-axis air bearing sleeve, and the Y-axis air bearing sleeve includes a Y-axis air bearing side connected by a third screw Plate one (15-2), Y-axis air-floating side plate two (15-4), Y-axis air-floating bottom plate (15-3) and Y-axis air-floating connecting plate (15-5). 6. A multi-degree-of-freedom gantry air-bearing motion system for precision optical detection and imaging according to claim 1, characterized in that: the X-axis air-bearing guide rail (4) includes an X-axis air-bearing guide rail bar (4 -1) and the X-axis air bearing sleeve, the X-axis air bearing guide rail bar (4-1) passes through the X-axis air bearing sleeve, and the X-axis air bearing sleeve includes an X shaft connected by a fourth screw. Axis air bearing side plate one (4-3), X axis air bearing side plate two (4-4), X axis air bearing bottom plate (4-2) and X axis air bearing connecting plate (4-5). 7. A multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging according to claim 1, characterized in that: the pressing structure includes a front pressing block (15-6) and a rear pressing block The block (15-8), the rear compression block (15-8) and the front compression block (15-6) are installed on the backing plate (15-7) by the fifth screw. 8. A multi-degree-of-freedom gantry air-floating motion system for precise optical detection and imaging according to claim 1, characterized in that: a cover (6) is fixedly connected to the top of the gantry beam (3).

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