CN115773445A - Multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging - Google Patents
Multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging Download PDFInfo
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- 239000002994 raw material Substances 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 5
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Abstract
The invention discloses a multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging, which comprises a base, wherein two sets of Y-axis air floatation guide rails are symmetrically fixed above the base through a pressing mechanism; two ends of the X-axis air floatation guide rail are fixed on a Y-axis air floatation sleeve of the Y-axis air floatation guide rail through first screws, and a two-dimensional nano platform is fixed on the X-axis air floatation sleeve of the X-axis air floatation guide rail through second screws; the gantry support is symmetrically fixed above the base through first bolts, and a gantry beam is fixed above the gantry support through second bolts; the Z-axis lifting platform and the Z-axis moving platform are fixed on the front side of the gantry beam through third bolts, and the three-dimensional nano moving platform is fixed on the side face of the Z-axis moving platform through a right-angle adapter. The scanning detection imaging precision is improved, and meanwhile, the movement with a large stroke is realized; the system can be used for various scanning detection imaging application scenes with different ranges, different speeds and different precision requirements.
Description
Technical Field
The invention relates to the field of gantry air-floatation motion systems, in particular to a multi-degree-of-freedom gantry air-floatation motion system for precise optical detection imaging.
Background
The precise optical detection imaging is mainly used for monitoring the sample state in the fields of semiconductor, nanometer functional material, biology, chemical industry, food, medicine research and the like, and the motion system is an important use system for completing the precise optical detection imaging and is mainly used for carrying instruments such as a microscope, a CCD camera, a precise optical scanner (atomic force microscope) and the like.
At present, in order to realize large-range movement of a common motion system in the market, a movable gantry structure is adopted to carry a Z-direction displacement table, and if a scanner is installed on the Z-direction displacement table, the scanner is unstable in the XY direction, the scanning precision is low, and the application scene is limited.
Disclosure of Invention
In view of the above defects in the prior art, it is desirable to provide a multi-degree-of-freedom gantry air-floating motion system for precise optical detection imaging, which improves the scanning detection imaging precision, realizes large-stroke motion, and is capable of meeting various scanning detection imaging application scenarios with different ranges, different speeds, and different precision requirements.
According to the technical scheme provided by the embodiment of the invention, the multi-degree-of-freedom gantry air-floating motion system for precise optical detection imaging comprises a base, wherein two sets of Y-axis air-floating guide rails are symmetrically fixed above the base through a pressing mechanism; the two ends of the X-axis air floatation guide rail are fixed on a Y-axis air floatation sleeve of the Y-axis air floatation guide rail through first screws, and a two-dimensional nano platform is fixed on the X-axis air floatation sleeve of the X-axis air floatation guide rail through second screws; the gantry support is symmetrically fixed above the base through first bolts, and a gantry beam is fixed above the gantry support through second bolts; the Z-axis lifting platform and the Z-axis moving platform are fixed on the front side of the gantry beam through third bolts, and the three-dimensional nano moving platform is fixed on the front side of the Z-axis moving platform through a right-angle adapter. The gantry beam is characterized by further comprising a left wire outlet mechanism and a right wire outlet mechanism, wherein the left wire outlet mechanism and the right wire outlet mechanism are fixed on the front side of the gantry beam through a fourth bolt. The X-axis air floatation guide rail device is characterized by further comprising a drag chain mechanism, wherein the moving end of the drag chain mechanism is fixed at two ends of the X-axis air floatation guide rail, and the fixed end of the drag chain mechanism is fixed at two sides of the base. The X-axis air floatation guide rail is characterized by further comprising a U-shaped linear motor, stators of the U-shaped linear motor are symmetrically fixed on two sides of the base, and a rotor of the U-shaped linear motor is fixed at two ends of the X-axis air floatation guide rail. The Y-axis air-flotation guide rail comprises a Y-axis guide rail bar and a Y-axis air-flotation sleeve, the Y-axis guide rail bar penetrates through the Y-axis air-flotation sleeve, and the Y-axis air-flotation sleeve comprises a first Y-axis air-flotation side plate, a second Y-axis air-flotation side plate, a Y-axis air-flotation bottom plate and a Y-axis air-flotation connecting plate which are connected through third screws. The X-axis air-floatation guide rail comprises an X-axis air-floatation guide rail bar and an X-axis air-floatation sleeve, the X-axis air-floatation guide rail bar penetrates through the X-axis air-floatation sleeve, and the X-axis air-floatation sleeve comprises a first X-axis air-floatation side plate, a second X-axis air-floatation side plate, an X-axis air-floatation bottom plate and an X-axis air-floatation connecting plate which are connected through fourth screws. The pressing structure comprises a front pressing block and a rear pressing block, and the rear pressing block and the front pressing block are mounted above the base plate through fifth screws. And the top of the gantry beam is fixedly connected with a cover.
In conclusion, the invention has the beneficial effects that: through special XY axle air supporting guide rail design, eliminate Y axle air supporting guide rail Z to the influence of air film stability to X axle air supporting guide rail Z to the air film stability, guarantee the sample is in the stability of static and dynamic measurement Z to, improve and scan and detect the imaging precision, realize the movement of the large stroke at the same time; by arranging different micron motion platforms and nanometer motion platforms, the system can be competent for various scanning detection imaging application scenes with different ranges, different speeds and different precision requirements.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the joint of the Y-axis air-bearing guide rail and the hold-down mechanism of the present invention;
FIG. 3 is a schematic structural view of an X-axis air-bearing guide rail according to the present invention;
FIG. 4 is a schematic structural diagram of a Z-axis motion stage according to the present invention;
fig. 5 is a schematic structural diagram of the three-dimensional nano motion platform of the present invention.
Reference numbers in the figures: 1. a base; 2. a gantry support; 3. a gantry beam; 4. an X-axis air-bearing guide rail; 4-1, X-axis air-floatation guide rail bar; 4-2, an X-axis air floatation bottom plate; 4-3, a first X-axis air floatation side plate; 4-4, a second X-axis air floatation side plate; 4-5, X-axis air floatation connecting plates; 5. a U-shaped linear motor; 6. a cover; 7. a left side wire outlet mechanism; 8. a Z-axis lifting platform; 9. a Z-axis motion platform; 9-1, a motion table; 10. a drag chain mechanism; 11. a right side wire outlet mechanism; 12. a two-dimensional nano-platform; 13. a right angle adaptor; 14. a three-dimensional nano motion platform; 14-1, a platform body; 14-2, annular piezoelectric ceramics; 15. y-axis air-bearing guide rails; 15-1, Y-axis guide rail bar; 15-2, a first Y-axis air floatation side plate; 15-3, Y-axis air flotation bottom plates; 15-4, a Y-axis air floatation side plate II; 15-5, Y-axis air flotation connecting plates; 15-6, a front compaction block; 15-7, a backing plate; 15-8, and a rear pressing block.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in fig. 1, fig. 2, fig. 3 and fig. 5, a multi-degree-of-freedom gantry air-floating motion system for precise optical detection imaging comprises a base 1 for bearing a gantry and other air-floating motion platforms, wherein two sets of Y-axis air-floating guide rails 15 are symmetrically fixed above the base 1 through a pressing mechanism; the X-axis air-floating device comprises an X-axis air-floating guide rail 4, wherein two ends of the X-axis air-floating guide rail 4 are fixed on a Y-axis air-floating sleeve of a Y-axis air-floating guide rail 15 through first screws, a two-dimensional nano platform 12 is fixed on the X-axis air-floating sleeve of the X-axis air-floating guide rail 4 through second screws, the two-dimensional nano platform 12 is a nano platform with a stroke larger than that of a three-dimensional nano motion platform 14XY axis, scanning imaging monitoring in a larger stroke range can be realized, and a vacuum sucker and the like can be used for loading and fixing a sample on the nano platform; the gantry support 2 is symmetrically fixed above the base 1 through first bolts, and a gantry beam 3 is fixed above the gantry support 2 through second bolts; the Z-axis lifting platform 8 and the Z-axis moving platform 9 are both fixed on the front side of the gantry beam 3 through third bolts, a three-dimensional nano moving platform 14 is fixed on the front side of the Z-axis moving platform 9 through a right-angle adapter 13, the transmission guide mode of the Z-axis lifting platform 8 is a micro platform formed by a ball screw and a crossed ball screw, a microscope can be mounted on the moving table surface of the Z-axis lifting platform 8, the Z-axis lifting platform 8 completes focusing and abdicating actions of the microscope through lifting movement, the three-dimensional nano moving platform 14 mainly carries measuring heads used for detecting imaging, such as atomic force microscope measuring heads and other equipment, the XY axis of the three-dimensional nano moving platform 14 is a traditional parallel flexible hinge structure, the Z axis is used for achieving the purpose that the carried measuring head vibrates in a Z direction at a high speed, and an annular piezoelectric ceramic 14-2 and flexible hinge structure is adopted to increase resonance frequency.
As shown in fig. 1, the gantry beam type wire drawing device further comprises a left wire drawing mechanism 7 and a right wire drawing mechanism 11, wherein the left wire drawing mechanism 7 and the right wire drawing mechanism 11 are fixed on the front side of the gantry beam 3 through fourth bolts. The X-axis air-floatation mechanism is characterized by further comprising a drag chain mechanism 10, wherein the movable end of the drag chain mechanism 10 is fixed at two ends of the X-axis air-floatation guide rail 4, and the fixed end of the drag chain mechanism 10 is fixed at two sides of the base 1 and used for power source wiring of the X-axis air-floatation guide rail 4 and the two sets of Y-axis air-floatation guide rails 15. The air floatation mechanism is characterized by further comprising a U-shaped linear motor 5, stators of the U-shaped linear motor 5 are symmetrically fixed on two sides of the base 1, and rotors of the U-shaped linear motor 5 are fixed at two ends of the X-axis air floatation guide rail 4 and provide power for air floatation Y-axis movement.
As shown in fig. 1 and 2, the Y-axis air-floating guide rail 15 includes a Y-axis guide rail bar 15-1 and the Y-axis air-floating sleeve, the Y-axis guide rail bar 15-1 passes through the Y-axis air-floating sleeve, the Y-axis air-floating sleeve includes a first Y-axis air-floating side plate 15-2, a second Y-axis air-floating side plate 15-4, a Y-axis air-floating bottom plate 15-3 and a Y-axis air-floating connecting plate 15-5 which are connected by a third screw, the first Y-axis air-floating side plate 15-2, the second Y-axis air-floating side plate 15-4 and the Y-axis guide rail bar 15-1 form an air-floating bearing surface, the Y-axis air-floating bottom plate 15-3 and the base 1 form an air-floating bearing surface to fix the Y-axis guide rail bar 15-1, the air-floating bearing surface limits the remaining 5 degrees of freedom of the Y-axis guide rail 15, the Y-direction air-floating shaft moves only in the Y direction, the power is provided by the U-shaped linear motors 5 on two sides of the fixed base 1, a positive air pressure channel is arranged on an air-floating bearing surface formed by matching the two air-floating side plates with the Y-axis guide rail bar 15-1 to form an air film, a waste gas collecting air channel is arranged to discharge waste gas out of a system through an air pipe, a positive air pressure channel is arranged on an air-floating bearing surface formed by matching the Y-axis air-floating bottom plate 15-3 with the base 1, a waste gas collecting air channel is arranged, a negative air pressure air channel is arranged, preload is formed in the Z direction, the rigidity and the stability of the Z-direction air film are improved, a silicon carbide ceramic square tube is selected for improving the rigidity of the Y-axis air-floating guide rail 15, and the Y-axis guide rail bar 15-1 is made of a silicon carbide ceramic square tube which is high in rigidity, but low in strength and strong in brittleness. The pressing structure comprises a front pressing block 15-6 and a rear pressing block 15-8, the rear pressing block 15-8 and the front pressing block 15-6 are installed above the base plate 15-7 through fifth screws, and are pressed through screws in a Z-direction interference fit mode, and are pressed through jackscrews in the lateral direction to fix the Y-axis guide rail bar 15-1.
As shown in fig. 1 and 3, the X-axis air-floating guide rail 4 includes an X-axis air-floating guide rail bar 4-1 and the X-axis air-floating sleeve, the X-axis air-floating guide rail bar 4-1 passes through the X-axis air-floating sleeve, the X-axis air-floating sleeve includes an X-axis air-floating side plate one 4-3, an X-axis air-floating side plate two 4-4, an X-axis air-floating bottom plate 4-2 and an X-axis air-floating connecting plate 4-5 which are connected by a fourth screw, the two air-floating side plates and the X-axis air-floating guide rail bar 4-1 form an air-floating bearing surface, a positive air pressure channel and a waste gas collecting air channel are provided, the X-axis air-floating bottom plate 4-2 also cooperates with the base 1 to form an air-floating bearing surface, a positive air pressure channel, a waste gas collecting air channel and a negative air pressure air channel are provided, the X-axis is powered by a U-shaped linear motor 5, and both ends of the X-axis air-floating guide rail 4 are fixed on the air-floating sleeves of the two Y-axis air-floating guide rails 15 by screws. The air floatation bottom surfaces of the X-axis air floatation guide rail and the Y-axis air floatation guide rail form air floatation bearing surfaces with the large-area upper table surface of the base 1, gaps are reserved between the X-axis air floatation sleeve and the X-axis air floatation guide rail strip 4-1 in the Z direction, the motion of XY large stroke can be realized on the premise that the cross section dimension is certain by connecting similar parallel air floatation bearings, meanwhile, the Z-direction stability error of the Y-axis air floatation guide rail 15 cannot be accumulated on the X axis for finally bearing a sample, through the design of the X-axis air floatation guide rail 4 and the Y-axis air floatation guide rail 15, the final Z-direction stability of the bearing sample can reach a nanometer level, the detection imaging precision is ensured, and the reverse gaps of the traditional transmission mode are eliminated due to the adoption of the air floatation bearing design, and the repetition precision can reach hundreds of nanometers.
As shown in fig. 1 and 4, the top of the gantry beam 3 is fixedly connected with a cover 6, the structure of a Z-axis motion platform 9 is similar to that of a Z-axis lifting platform 8, the Z-axis motion platform is a motion platform of a cross ball guide rail and a ball screw, a power source is a stepping motor with a speed reducer, the mechanical resolution can reach a nanometer level, 9-1 in the Z-axis motion platform 9 is a motion table top, a Z-axis nanometer platform is embedded in the motion table top 9-1, power is provided by piezoelectric ceramics, a capacitance sensor is used for position feedback, the nanometer positioning precision can be realized, and the design ensures that the thickness of the motion table body is small, and the functions of Z-axis coarse adjustment and fine adjustment can be realized.
When in use: the XY axis air-float guide rail system moves to the edge of the equipment to load and take the sample, moves to the position under the three-dimensional nano motion platform 14 carrying the measuring head, the Z axis motion platform 9 drives the measuring head to adjust to a proper position, (1) scanning and detecting imaging in a small range and high precision and high speed: the three-dimensional nanometer motion platform 14XYZ three-axis motion completes the scanning imaging, (2) the scanning detection imaging with small range, high precision and high speed: the two-dimensional nano platform 12XY axis and the three-dimensional nano motion platform 14Z axis move in a matching way to complete scanning imaging, (3) large-range low-speed scanning detection imaging: and the XY axis air floatation guide rail system and the Z axis of the three-dimensional nano motion platform 14 move in a matching way to finish scanning imaging. The two Z-axis lifting platforms 8 can carry a microscope to monitor samples and scan, detect and image the states of measuring heads.
In the assembly process, two sets of Y-axis air-floating guide rails 15 are placed on a base 1, the distance from the full-length side face of the left Y-axis air-floating guide rail 15 to a reference face of the side face of the base 1 is measured, the side face of the Y-axis air-floating guide rail 15 is ensured to be parallel to the reference face of the side face of the base 1, the Y-axis air-floating guide rail 15 is pressed by a pressing mechanism, the X-axis air-floating guide rail 4 is placed on an air-floating sleeve of the Y-axis air-floating guide rail 15, the X-axis air-floating guide rail 4 is adjusted to be perpendicular to the side face of the Y-axis air-floating guide rail 15, one end of the X-axis air-floating guide rail 4 is fixed with the left Y-axis air-floating guide rail 15, the other-side Y-axis air-floating guide rail 15 is loosely connected with the X-axis air-floating guide rail 4 by screws, tightening is not needed, the Y-axis air-floating guide rail 15 and the X-axis air-floating guide rail 4 are ventilated, the X-axis air-floating guide rail 4 is pushed to move in a reciprocating manner, the other-Y-axis air-floating guide rail 15 is adjusted until the X-floating guide rail is not blocked by the pressing mechanism.
The foregoing description is only exemplary of the preferred embodiments of the invention and is illustrative of the principles and techniques that may be employed. Meanwhile, the scope of the present invention is not limited to the specific combinations of the above-described features, and other embodiments in which the above-described features or their equivalents are arbitrarily combined without departing from the spirit of the present invention are also encompassed. For example, the above features and the technical features (but not limited to) having similar functions disclosed in the present invention are mutually replaced to form the technical solution.
Claims (8)
1. A multi-degree-of-freedom gantry air-flotation motion system for precise optical detection imaging is characterized in that: comprises the steps of (a) preparing a mixture of a plurality of raw materials,
the air floatation device comprises a base (1), wherein two sets of Y-axis air floatation guide rails (15) are symmetrically fixed above the base (1) through a pressing mechanism;
the X-axis air-floating guide rail (4), two ends of the X-axis air-floating guide rail (4) are fixed on a Y-axis air-floating sleeve of the Y-axis air-floating guide rail (15) through first screws, and a two-dimensional nano platform (12) is fixed on the X-axis air-floating sleeve of the X-axis air-floating guide rail (4) through second screws;
the gantry support (2) is symmetrically fixed above the base (1) through first bolts, and a gantry beam (3) is fixed above the gantry support (2) through second bolts;
the Z-axis lifting platform (8) and the Z-axis moving platform (9) are fixed on the front side of the gantry beam (3) through third bolts, and the three-dimensional nano moving platform (14) is fixed on the front side of the Z-axis moving platform (9) through a right-angle adapter (13).
2. The multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging as claimed in claim 1, is characterized in that: the gantry beam structure is characterized by further comprising a left side outgoing line mechanism (7) and a right side outgoing line mechanism (11), wherein the left side outgoing line mechanism (7) and the right side outgoing line mechanism (11) are fixed to the front side of the gantry beam (3) through fourth bolts.
3. The multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging according to claim 1, is characterized in that: the X-axis air floatation guide rail device is characterized by further comprising a drag chain mechanism (10), wherein the moving end of the drag chain mechanism (10) is fixed at two ends of the X-axis air floatation guide rail (4), and the fixed end of the drag chain mechanism (10) is fixed at two sides of the base (1).
4. The multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging according to claim 1, is characterized in that: the X-axis air-floating guide rail device is characterized by further comprising a U-shaped linear motor (5), wherein stators of the U-shaped linear motor (5) are symmetrically fixed on two sides of the base (1), and rotors of the U-shaped linear motor (5) are fixed at two ends of the X-axis air-floating guide rail (4).
5. The multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging according to claim 1, is characterized in that: the Y-axis air-floating guide rail (15) comprises a Y-axis guide rail bar (15-1) and a Y-axis air-floating sleeve, the Y-axis guide rail bar (15-1) penetrates through the Y-axis air-floating sleeve, and the Y-axis air-floating sleeve comprises a first Y-axis air-floating side plate (15-2), a second Y-axis air-floating side plate (15-4), a Y-axis air-floating bottom plate (15-3) and a Y-axis air-floating connecting plate (15-5) which are connected through a third screw.
6. The multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging according to claim 1, is characterized in that: the X-axis air-floatation guide rail (4) comprises an X-axis air-floatation guide rail bar (4-1) and an X-axis air-floatation sleeve, the X-axis air-floatation guide rail bar (4-1) penetrates through the X-axis air-floatation sleeve, and the X-axis air-floatation sleeve comprises a first X-axis air-floatation side plate (4-3), a second X-axis air-floatation side plate (4-4), an X-axis air-floatation bottom plate (4-2) and an X-axis air-floatation connecting plate (4-5) which are connected through fourth screws.
7. The multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging according to claim 1, is characterized in that: the pressing structure comprises a front pressing block (15-6) and a rear pressing block (15-8), and the rear pressing block (15-8) and the front pressing block (15-6) are installed above the base plate (15-7) through fifth screws.
8. The multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging according to claim 1, is characterized in that: the top of the gantry beam (3) is fixedly connected with a cover (6).
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| CN202211357815.6A CN115773445A (en) | 2022-11-01 | 2022-11-01 | Multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging |
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| CN202211357815.6A CN115773445A (en) | 2022-11-01 | 2022-11-01 | Multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117074739A (en) * | 2023-10-18 | 2023-11-17 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117074739A (en) * | 2023-10-18 | 2023-11-17 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
| CN117074739B (en) * | 2023-10-18 | 2024-01-30 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
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Inventor after: Jia Jing Inventor after: Xu Pengyue Inventor after: Wen Jie Inventor before: Xu Pengyue Inventor before: Wen Jie Inventor before: Jia Jing |
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