CN219473273U - Multi-degree-of-freedom gantry air-floatation movement system for precise optical detection imaging - Google Patents
Multi-degree-of-freedom gantry air-floatation movement system for precise optical detection imaging Download PDFInfo
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Abstract
The utility model discloses a multi-degree-of-freedom gantry air floatation moving system for precise optical detection imaging, which comprises a base, wherein two sets of Y-axis air floatation guide rails are symmetrically fixed above the base through a pressing mechanism; the X-axis air-floating guide rail is characterized in that two ends of the X-axis air-floating guide rail are fixed on a Y-axis air-floating sleeve of the Y-axis air-floating guide rail through first screws, and a two-dimensional nano platform is fixed on the X-axis air-floating sleeve of the X-axis air-floating guide rail through second screws; the gantry support is symmetrically fixed above the base through a first bolt, and a gantry beam is fixed above the gantry support through a second bolt; the Z-axis lifting platform and the Z-axis moving platform are both fixed on the front side of the gantry beam through third bolts, and the side surface of the Z-axis moving platform is fixed with a three-dimensional nanometer moving platform through a right-angle adapter. The scanning detection imaging precision is improved, and meanwhile, the large-stroke movement is realized; the method can be used for various scanning detection imaging application scenes with different ranges, different speeds and different precision requirements.
Description
Technical Field
The utility model relates to the field of gantry air-floating motion systems, in particular to a multi-degree-of-freedom gantry air-floating motion system for precise optical detection imaging.
Background
The precise optical detection imaging is mainly used for monitoring the state of a sample in the fields of semiconductors, nano functional materials, biology, chemical industry, food, medicine research and the like, and the motion system is an important use system for completing the precise optical detection imaging and is mainly used for carrying instruments such as a microscope, a CCD camera, a precise optical scanner (atomic force microscope) and the like.
In order to realize large-range movement, a common movement system on the market at present adopts a movable gantry structure to carry a Z-displacement table, for example, a scanner is arranged on the Z-displacement table, so that the scanner is unstable in the XY direction, the scanning precision is low, and the application scene is limited.
Disclosure of Invention
In view of the above-mentioned drawbacks or shortcomings in the prior art, it is desirable to provide a multi-degree-of-freedom gantry air-bearing motion system for precision optical detection imaging, which improves the scanning detection imaging precision, and simultaneously realizes large-stroke motion, and can be used for various scanning detection imaging application scenes with different ranges, different speeds and different precision requirements.
According to the technical scheme provided by the embodiment of the utility model, the multi-degree-of-freedom gantry air-floating movement system for precise optical detection imaging comprises a base, wherein two sets of Y-axis air-floating guide rails are symmetrically fixed above the base through a pressing mechanism; the X-axis air-floating guide rail is characterized by comprising an X-axis air-floating guide rail, wherein two ends of the X-axis air-floating guide rail are fixed on a Y-axis air-floating sleeve of the Y-axis air-floating guide rail through first screws, and a two-dimensional nano platform is fixed on the X-axis air-floating sleeve of the X-axis air-floating guide rail through second screws; the gantry support is symmetrically fixed above the base through a first bolt, and a gantry beam is fixed above the gantry support through a second bolt; the Z-axis lifting platform and the Z-axis moving platform are both fixed on the front side of the gantry beam through third bolts, and the front side of the Z-axis moving platform is fixed with a three-dimensional nano-moving platform through a right-angle adapter. The device also comprises a left outgoing line mechanism and a right outgoing line mechanism, wherein the left outgoing line mechanism and the right outgoing line mechanism are fixed on the front side of the gantry beam through a fourth bolt. The device also comprises a drag chain mechanism, wherein the moving end of the drag chain mechanism is fixed at two ends of the X-axis air-float guide rail, and the fixed end of the drag chain mechanism is fixed at two sides of the base. The U-shaped linear motor is symmetrically fixed on two sides of the base, and the U-shaped linear motor rotor is fixed on two ends of the X-axis air floatation guide rail. The Y-axis air-floating guide rail comprises a Y-axis guide rail strip and a Y-axis air-floating sleeve, the Y-axis guide rail strip penetrates through the Y-axis air-floating sleeve, and the Y-axis air-floating sleeve comprises a Y-axis air-floating side plate I, a Y-axis air-floating side plate II, a Y-axis air-floating bottom plate and a Y-axis air-floating connecting plate which are connected through third screws. The X-axis air-floating guide rail comprises an X-axis air-floating guide rail strip and an X-axis air-floating sleeve, the X-axis air-floating guide rail strip penetrates through the X-axis air-floating sleeve, and the X-axis air-floating sleeve comprises an X-axis air-floating side plate I, an X-axis air-floating side plate II, an X-axis air-floating bottom plate and an X-axis air-floating connecting plate which are connected through fourth screws. The compressing mechanism comprises a front compressing block and a rear compressing block, and the rear compressing block and the front compressing block are arranged above the base plate through fifth screws. The top of the gantry beam is fixedly connected with a cover cap.
In summary, the utility model has the following beneficial effects: by means of special XY-axis air-float guide rail design, the influence of the Z-direction air film stability of the Y-axis air-float guide rail on the Z-direction air film stability of the X-axis air-float guide rail is eliminated, the stability of a sample in the static and dynamic measurement Z-direction is guaranteed, the scanning detection imaging precision is improved, and meanwhile, large-stroke movement is realized; by arranging different micro-motion platforms and nano-motion platforms, the method can be used for various scanning detection imaging application scenes with different ranges, different speeds and different precision requirements.
Drawings
Other features, objects and advantages of the present utility model will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic view of the structure of the joint of the Y-axis air bearing guide rail and the pressing mechanism;
FIG. 3 is a schematic view of the structure of the X-axis air bearing rail of the present utility model;
FIG. 4 is a schematic view of the structure of the Z-axis motion platform of the present utility model;
fig. 5 is a schematic structural diagram of the three-dimensional nano motion platform according to the present utility model.
Reference numerals in the drawings: 1. a base; 2. a gantry support; 3. a gantry beam; 4. an X-axis air-float guide rail; 4-1, X-axis air-floating guide rail bars; 4-2, an X-axis air floatation bottom plate; 4-3, an X-axis air floatation side plate I; 4-4, an X-axis air floatation side plate II; 4-5, an X-axis air-float connecting plate; 5. a U-shaped linear motor; 6. a cover cap; 7. a left wire outlet mechanism; 8. a Z-axis lifting platform; 9. a Z-axis motion platform; 9-1, a moving table top; 10. a drag chain mechanism; 11. a right side wire outlet mechanism; 12. a two-dimensional nano-platform; 13. a right angle adaptor; 14. a three-dimensional nano motion platform; 14-1, a platform body; 14-2, annular piezoelectric ceramics; 15. y-axis air-float guide rail; 15-1, Y-axis guide rail bars; 15-2, a Y-axis air floatation side plate I; 15-3, a Y-axis air floatation bottom plate; 15-4, a Y-axis air floatation side plate II; 15-5, a Y-axis air-float connecting plate; 15-6, front compaction blocks; 15-7, backing plate; 15-8, a rear compaction block.
Detailed Description
The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be noted that, for convenience of description, only the portions related to the utility model are shown in the drawings.
It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other. The utility model will be described in detail below with reference to the drawings in connection with embodiments.
As shown in fig. 1, 2, 3 and 5, the multi-degree-of-freedom gantry air-floating movement system for precision optical detection imaging comprises a base 1 for bearing a gantry and other air-floating movement platforms, wherein two sets of Y-axis air-floating guide rails 15 are symmetrically fixed above the base 1 through a pressing mechanism; the X-axis air-floating guide rail 4, two ends of the X-axis air-floating guide rail 4 are fixed on a Y-axis air-floating sleeve of the Y-axis air-floating guide rail 15 through first screws, a two-dimensional nano platform 12 is fixed on the X-axis air-floating sleeve of the X-axis air-floating guide rail 4 through second screws, the two-dimensional nano platform 12 is a nano platform with larger XY-axis travel than the three-dimensional nano motion platform 14, scanning imaging monitoring with a larger travel range can be realized, and a vacuum sucker and the like for fixing a sample can be loaded on the scanning imaging monitoring; the gantry support 2 is symmetrically fixed above the base 1 through a first bolt, and a gantry beam 3 is fixed above the gantry support 2 through a second bolt; the Z-axis lifting platform 8 and the Z-axis moving platform 9 are both fixed on the front side of the gantry beam 3 through third bolts, the three-dimensional nano-moving platform 14 is fixed on the front side of the Z-axis moving platform 9 through a right-angle adapter 13, a transmission guiding mode of the Z-axis lifting platform 8 is a micro platform formed by adding a ball screw and a cross ball screw, a microscope can be installed on a moving table of the Z-axis lifting platform 8, the Z-axis lifting platform 8 completes focusing and abdicating actions of the microscope through lifting movement, the three-dimensional nano-moving platform 14 is mainly provided with a measuring head for detecting imaging, such as an atomic force microscope measuring head, and the like, the XY axis of the three-dimensional nano-moving platform 14 is of a traditional parallel flexible hinge structure, and the Z axis is provided with a special-shaped flexible hinge structure by adopting annular piezoelectric ceramics 14-2 to increase resonance frequency for realizing the purpose of Z-direction high-speed vibration of the carried measuring head.
As shown in fig. 1, the device further comprises a left wire outlet mechanism 7 and a right wire outlet mechanism 11, wherein the left wire outlet mechanism 7 and the right wire outlet mechanism 11 are fixed on the front side of the gantry beam 3 through fourth bolts. The device further comprises a drag chain mechanism 10, wherein the moving ends of the drag chain mechanism 10 are fixed at two ends of the X-axis air-float guide rail 4, and the fixed ends of the drag chain mechanism 10 are fixed at two sides of the base 1 and used for power source wiring of the X-axis air-float guide rail 4 and two sets of Y-axis air-float guide rails 15. The device also comprises a U-shaped linear motor 5, wherein stators of the U-shaped linear motor 5 are symmetrically fixed on two sides of the base 1, and active cells of the U-shaped linear motor 5 are fixed on two ends of the X-axis air floatation guide rail 4 to provide power for air floatation Y-axis movement.
As shown in fig. 1 and 2, the Y-axis air-floating guide rail 15 comprises a Y-axis guide rail bar 15-1 and the Y-axis air-floating sleeve, the Y-axis guide rail bar 15-1 passes through the Y-axis air-floating sleeve, the Y-axis air-floating sleeve comprises a Y-axis air-floating side plate one 15-2, a Y-axis air-floating side plate two 15-4, a Y-axis air-floating bottom plate 15-3 and a Y-axis air-floating connecting plate 15-5 which are connected through a third screw, an air-floating bearing surface is formed at the joint of the Y-axis air-floating side plate one 15-2, the Y-axis air-floating side plate two 15-4 and the Y-axis guide rail bar 15-1, the Y-axis air-floating bottom plate 15-3 and the base 1 are matched to form an air-floating bearing surface, the Y-axis guide rail bar 15-1 is fixed, the air-floating bearing surface is formed to limit the other 5 degrees of freedom of the Y-axis air-floating guide rail 15, the Y-direction air-floating shaft is powered by the U-shaped linear motors 5 at two sides of the fixed base 1 only in the Y direction, a positive air pressure channel is arranged on an air-floating bearing surface formed by the cooperation of the two air-floating side plates and the Y-axis guide rail strip 15-1 to form an air film, an exhaust gas collecting air channel is arranged outside the exhaust gas discharging system through an air pipe, an air-floating bearing surface formed by the cooperation of the Y-axis air-floating bottom plate 15-3 and the base 1 is provided with the positive air pressure channel, an exhaust gas collecting air channel is arranged, a negative air pressure air channel is arranged, a preload is formed in the Z direction, the rigidity and the stability of the Z-direction air film are improved, a silicon carbide ceramic square tube is selected for improving the rigidity of the Y-axis air-floating guide rail 15, and the silicon carbide ceramic square tube is high in rigidity, but low in strength and strong in brittleness. The compressing mechanism comprises a front compressing block 15-6 and a rear compressing block 15-8, the rear compressing block 15-8 and the front compressing block 15-6 are arranged above the base plate 15-7 through fifth screws, the Z-direction interference fit is compressed through the screws, and the Y-axis guide rail bar 15-1 is fixed by propping up the top screw laterally.
As shown in fig. 1 and 3, the X-axis air-floating guide rail 4 includes an X-axis air-floating guide rail bar 4-1 and an X-axis air-floating sleeve, the X-axis air-floating guide rail bar 4-1 passes through the X-axis air-floating sleeve, the X-axis air-floating sleeve includes an X-axis air-floating side plate one 4-3, an X-axis air-floating side plate two 4-4, an X-axis air-floating bottom plate 4-2 and an X-axis air-floating connecting plate 4-5, the two air-floating side plates and the X-axis air-floating guide rail bar 4-1 form an air-floating bearing surface, a positive air-pressure channel and an exhaust gas collecting air channel are arranged, the X-axis air-floating bottom plate 4-2 also cooperates with the base 1 to form an air-floating bearing surface, a positive air-pressure channel and an exhaust gas collecting air channel and a negative air-pressure air channel are arranged, the X-axis is powered by a U-shaped linear motor 5, and two ends of the X-axis air-floating guide rail 4 are fixed on the air-floating sleeve of the two Y-axis air-floating guide rail 15 through screws. The air floatation bottom surfaces of the X-axis air floatation guide rail and the Y-axis air floatation guide rail form an air floatation bearing surface with the large-area upper table surface of the base 1, a gap is reserved between the X-axis air floatation sleeve and the X-axis air floatation guide rail strip 4-1 in the Z direction, the X-axis air floatation guide rail and the Y-axis air floatation guide rail can realize the movement of XY large stroke on the premise of ensuring that the cross section size is fixed by adopting the air floatation bearing connection similar to the parallel connection, meanwhile, the Z-direction stability error of the Y-axis air floatation guide rail 15 can not be accumulated on the X-axis of a final bearing sample, the final Z-direction stability of the bearing sample can reach the nano level by the design of the X-axis air floatation guide rail 4 and the Y-axis air floatation guide rail 15, the detection imaging precision is ensured, and the reverse gap of the traditional transmission mode is eliminated by adopting the air floatation bearing design, and the repetition precision can reach the hundred nano level.
As shown in fig. 1 and fig. 4, the top of the gantry beam 3 is fixedly connected with a cover 6, the structure of the Z-axis moving platform 9 is similar to that of the Z-axis lifting platform 8, the Z-axis moving platform is a moving platform with a crossed ball guide rail and a ball screw, the power source is a stepping motor with a speed reducer, the mechanical resolution can reach the nano level, 9-1 in the Z-axis moving platform 9 is a moving table surface, a Z-axis nano platform is embedded in the moving table surface 9-1, the piezoelectric ceramic provides power, the capacitive sensor is used as position feedback, the nano-level positioning precision can be realized, the thickness of the moving table body is designed and ensured to be small, and the functions of coarse adjustment and fine adjustment of the Z-axis can be realized.
When in use, the utility model is characterized in that: the XY axis air-float guide rail system moves to the edge of the equipment to load and take a sample, moves to the position right below the three-dimensional nano motion platform 14 carrying the measuring head, and the Z axis motion platform 9 drives the measuring head to be adjusted to a proper position, (1) small-range high-precision high-speed scanning detection imaging: the three-dimensional nano motion platform 14XYZ moves in three axes to finish scanning imaging, (2) scanning detection imaging with smaller range and high precision and higher speed: the two-dimensional nano platform 12XY axis and the three-dimensional nano motion platform 14Z axis are matched to move to finish scanning imaging, (3) large-scale low-speed scanning detection imaging: the XY axis air-float guide rail system and the three-dimensional nanometer motion platform 14 move in a Z axis coordination mode, and scanning imaging is completed. The two Z-axis lifting platforms 8 can be carried with a microscope to monitor the state of a sample and a scanning detection imaging probe.
In the assembly engineering, two sets of Y-axis air-float guide rails 15 are placed on a base 1, the distance from the full length side surface of a left-side Y-axis air-float guide rail 15 to the side surface datum surface of the base 1 is measured, the side surface of the Y-axis air-float guide rail 15 is guaranteed to be parallel to the side surface datum surface of the base 1, the Y-axis air-float guide rail 15 is tightly pressed by a pressing mechanism, an X-axis air-float guide rail 4 is placed on an air-float sleeve of the Y-axis air-float guide rail 15, the X-axis air-float guide rail 4 is adjusted to be perpendicular to the side surface of the Y-axis air-float guide rail 15, one end of the X-axis air-float guide rail 4 is fixed to the left-side Y-axis air-float guide rail 15, the other side Y-axis air-float guide rail 15 is in loose connection with the X-axis air-float guide rail 4 by a screw without tightening, the sleeve Y-axis air-float guide rail 15 is ventilated with the X-axis air-float guide rail 4, the X-axis air-float guide rail 4 is reciprocally pushed to move in the Y direction, the position of the other side Y-axis air-float guide rail 15 is adjusted until the X-axis air-float guide rail 4 is pushed to have a blocking phenomenon.
The above description is only illustrative of the preferred embodiments of the utility model and the technical principles employed. Meanwhile, the scope of the utility model is not limited to the technical scheme formed by the specific combination of the technical features, and other technical schemes formed by any combination of the technical features or the equivalent features thereof without departing from the inventive concept are also covered. Such as the above-mentioned features and the technical features disclosed in the present utility model (but not limited to) having similar functions are replaced with each other.
Claims (8)
1. A multi freedom longmen air supporting moving system for accurate optical detection formation of image, characterized by: comprising the steps of (a) a step of,
the device comprises a base (1), wherein two sets of Y-axis air floatation guide rails (15) are symmetrically fixed above the base (1) through a pressing mechanism;
the X-axis air-floating guide rail (4), two ends of the X-axis air-floating guide rail (4) are fixed on a Y-axis air-floating sleeve of the Y-axis air-floating guide rail (15) through first screws, and a two-dimensional nano platform (12) is fixed on the X-axis air-floating sleeve of the X-axis air-floating guide rail (4) through second screws;
the gantry support (2) is symmetrically fixed above the base (1) through a first bolt, and a gantry beam (3) is fixed above the gantry support (2) through a second bolt;
the Z-axis lifting platform (8) and the Z-axis moving platform (9) are both fixed on the front side of the gantry beam (3) through third bolts, and the front side of the Z-axis moving platform (9) is fixed with a three-dimensional nanometer moving platform (14) through a right-angle adapter (13).
2. The multi-degree-of-freedom gantry air-bearing motion system for precision optical detection imaging of claim 1, wherein: the novel gantry beam is characterized by further comprising a left outgoing line mechanism (7) and a right outgoing line mechanism (11), wherein the left outgoing line mechanism (7) and the right outgoing line mechanism (11) are fixed on the front side of the gantry beam (3) through fourth bolts.
3. The multi-degree-of-freedom gantry air-bearing motion system for precision optical detection imaging of claim 1, wherein: the device further comprises a drag chain mechanism (10), wherein the moving end of the drag chain mechanism (10) is fixed at two ends of the X-axis air-float guide rail (4), and the fixed end of the drag chain mechanism (10) is fixed at two sides of the base (1).
4. The multi-degree-of-freedom gantry air-bearing motion system for precision optical detection imaging of claim 1, wherein: the device further comprises a U-shaped linear motor (5), stators of the U-shaped linear motor (5) are symmetrically fixed on two sides of the base (1), and movers of the U-shaped linear motor (5) are fixed at two ends of the X-axis air floatation guide rail (4).
5. The multi-degree-of-freedom gantry air-bearing motion system for precision optical detection imaging of claim 1, wherein: the Y-axis air floatation guide rail (15) comprises a Y-axis guide rail strip (15-1) and a Y-axis air floatation sleeve, the Y-axis guide rail strip (15-1) penetrates through the Y-axis air floatation sleeve, and the Y-axis air floatation sleeve comprises a Y-axis air floatation side plate I (15-2), a Y-axis air floatation side plate II (15-4), a Y-axis air floatation bottom plate (15-3) and a Y-axis air floatation connecting plate (15-5) which are connected through third screws.
6. The multi-degree-of-freedom gantry air-bearing motion system for precision optical detection imaging of claim 1, wherein: the X-axis air floatation guide rail (4) comprises an X-axis air floatation guide rail strip (4-1) and an X-axis air floatation sleeve, wherein the X-axis air floatation guide rail strip (4-1) penetrates through the X-axis air floatation sleeve, and the X-axis air floatation sleeve comprises an X-axis air floatation side plate I (4-3), an X-axis air floatation side plate II (4-4), an X-axis air floatation bottom plate (4-2) and an X-axis air floatation connecting plate (4-5) which are connected through fourth screws.
7. The multi-degree-of-freedom gantry air-bearing motion system for precision optical detection imaging of claim 1, wherein: the compressing mechanism comprises a front compressing block (15-6) and a rear compressing block (15-8), wherein the rear compressing block (15-8) and the front compressing block (15-6) are arranged above the base plate (15-7) through fifth screws.
8. The multi-degree-of-freedom gantry air-bearing motion system for precision optical detection imaging of claim 1, wherein: the top of the gantry beam (3) is fixedly connected with a cover cap (6).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202222899300.0U CN219473273U (en) | 2022-11-01 | 2022-11-01 | Multi-degree-of-freedom gantry air-floatation movement system for precise optical detection imaging |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202222899300.0U CN219473273U (en) | 2022-11-01 | 2022-11-01 | Multi-degree-of-freedom gantry air-floatation movement system for precise optical detection imaging |
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