⑸9732 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種奈米平台系統，尤指一種兩段式長 行程奈米級精密定位系統者。 、 【先前技術】 按，隨著現今產業的導向，近年來隨著工具機、各種 產業機械與量測儀器的高精度化…，不論是在精穷機 械、半導體產業、微(奈)米科技皆朝微小化與精密化：展 ，再加上超精密的加工機、半導體製程裝置、電子資訊機 益與原子力！頁微鏡#皆需要高精冑較位技術與儀器進行 輔助’使得半導體技術儼然已進入到奈米的領域和技術， 進而成為目前的主流之一； 目前現有的長行程定位平台所使用的傳動方式大致可 分為兩種形式’一種為利用線性滑執與滾珠螺才旱，另一種 則疋利用空氣塾與线轴承，其中利用線性滑軌與滚珠螺 桿所組成的平台，具備剛性較佳與穩定性佳的優點，但其 所使用的傳動元件必須有潤滑油，所以會有油氣產生^ 此較適合用於精度等級要求較低（微純）的環境，而利用 空氣塾與所組成的平台，具備低料力、可承受 重負荷與低污染等的優點’適合運用於精度 又 次微米級）的環境； 八权问（ <…π笊本寻級的疋位平台與回授量測系統是 夕產業使用的重要工具之—，其驅動源必須具備體 反應時間良好與精度高的制動器，且在動作時必； 生高量的熱能或摩擦問題以避免降低推動的效率:、 3 1379732 前現有奈米定位平台的相關設備大部 口的，不但設備相當昂貴且維”賴國外廒商進 現有奈米定位平台皆屬田不易，再則，目前 口白屬於小乾圍的位移 約在厘米（mm)等級以内，且 —％ ’行程的限制 几为的回授晉 用光學尺與光學讀頭進行量測，然而，j系統大都是使 著長度的增加而產生越大的誤差，盆光¥尺的精度會隨 尺㈣時會累積相當大的加工誤差；且：：學尺超過1公 重複性佳但是不準確的現象，進而造成二=量測結果有 因此’若將光學尺運用在長行程的卜=辨識， 識的誤差，進而影響加工精度或檢驗精度位置辨 達到長行程作動與奈米級的精 何同時 虽於解決的問題。 的要求，是目前業界 【發明内容】. 因此，本發明人有鑑於現有長行程定位平台盘夺米定 位平台，無法同時達到長行程作動與奈米級的精密定位的 要求的不足與問題，特經過不斷的研究與試驗，終於發展 出一種能改進現有缺失之本發明。 本發明之目的係在於提供一種兩段式長行程奈米級精 密定位系統’其係透過線性馬達運動機構搭配壓電運動平 台的兩段式控制方法’藉以提供一大範圍的奈来級定位效 果’且利用一雷射干涉儀定位系統作為回授系統，有別與 現有回授量測機台利用光學尺提供回授訊號，可有效提高 準確性’ it而提供’方便組裝、成本低且具高精度長行程 定位效果之目的者。 為達到上述目的，本發明係提供一種兩段式長行程奈 4 1379732 量測回授組 米級精密定位系統，其係包含有一平台組 及一控制組，其中： 該平台組係設有-底座、—長行程氣浮式平台及—微 動壓…’該底座設有一平台’該長行程氣浮式平台係 可移動地設於底座平台上且設有一基準座及一驅動組，令 基準座係設有兩縱向m以，其中兩縱向座係^ 且間隔地固設於底座的平…該橫向座係設於兩縱向座 之間而排列成-Η形的基準座’該驅動組係設於基準座上 且δ又有二個線性馬達，其中各綠，|4 ι、 甲各線性馬達係分別設於兩縱向 座及橫向座之頂面’且各線性馬達係朝外延伸有—可骨動 的結合板，而該微動壓電平台係與橫向座上的線性馬^相 結合而介於兩縱向座之間，該微動壓電平台係設有一承載 台、一微動調整組及-加工平台，其中該承載台的底部係 與橫向座上線性馬達的結合板相固設結合，該微動調整組 仏與承載台相結合且設有一撓性座及兩壓電致動器，該撓 性座係設於承載台頂面ϋ壓電致動器係、設於承載台頂 面且與撓性座相貼冑’該加工+台係與連#塊相结合而位 於承載台上方； 該量測回授組係與平台組相結合且設有一雷射干涉儀 、一反射裝置及一訊號接收裝置，其中該雷射干涉儀係固 叹於底座的平台上且設有一雷射光束、複數個分光鏡及複 數個平面干涉鏡，該反射骏置係與平台組的加工平台相結 口且用以反射經過各平面干涉鏡反射出的雷射光束，該訊 唬接收哀置係固設於底座的平台上且用以接收各平面干涉 鏡經平面反射鏡反射之雷射光束；以及 /y 5 1379732 該控制組係與平台組與量測回授組相電性連接且設有 mr作站設有—電腦及一控制器，該電腦係内 建有一用以接故各接收器 说帝 ^ ^ ^# ^ ^ ^ ^ ϋ ^ ，、電a、長仃程氣洋式平台的驅動組及微動壓電平二的微 動調整組相電性連接，透過處理軟體所發出的訊號^驅 動組的各線性馬達進行作動進而達到長行程移動鱼快速定 位控制的效果，且透過各壓電致動器的作動而達到對於加 工平台產生微量的X方向位移與微量的θζ角度變化，進 而補正長行程氣浮式平台移動時所產生之χ 與θζ角度誤差。 進一步，該長行程氣浮式平台係設有兩與縱向座、橫 向座及底座平台相結合的空氣轴承組，其中兩空氣車由承组 :、分別設：兩縱向座間且與平台與兩縱向座的内側面相貼 靠，各空氣軸承組係設有複數個空氣塾及一轴承座，其中 各空氣塾係分別與平台及縱向座内側面相貼靠，該轴承座 係與各空氣墊相結合而懸空於縱向座與平台之間，而該橫 向座係設於兩軸承座之間…設於縱向座上線性馬：： 結合板係分別與兩軸承座相結合。 再進一步，該撓性座係設有兩固定塊、—連接塊及兩 撓性體中兩固定麟固設於承載台上且與兩縱向座相 平行，該連接塊係橫向設於承載台上且介於兩固定塊之間 ’而各撓性體係與其中一固定塊及連接塊相連接，而兩壓 電致動器係分别與連接塊的側邊相貼靠。 較佳地，该雷射干涉儀係設有一第—分光鏡 '一第二 分光鏡、-9。度反射鏡、一第一平面干涉鏡、_第二= 6 1379732 面干涉鏡及一第三平面干涉鏡，其中兩分光鏡係間隔設於 底座平台上且位於雷射光束射出的路徑上，該9〇度反射 鏡係设於底座平台上且與兩分光鏡呈一直線配置，而各平 面干涉鏡係設於底座的平台上用以接收經分光鏡分光或9〇 度反射鏡反射之雷射光束，該反射裝置係設有一第一平面 反射鏡及一第二平面反射鏡，兩平面反射鏡係分別設於微 動壓電平台的加工平台上且呈一直角配置之空間關係，用 以反射經過各平面干涉鏡反射出的雷射光束，而該訊號接 收裝置係設有一第一接受器、一第二接收器及一第三接收 益’各接收器係用以接收各平面干涉鏡經平面反射鏡反射 之雷射光束。 較佳地’各線性馬達係設有複數個定子與一動子，其 中各定子係固設於線性馬達内表面的上、下端面而形成一 磁力導軌，而該動子係可滑動地設於該磁力導轨内且與結 合板相結合。(5) 9732 6. Description of the Invention: [Technical Field] The present invention relates to a nano-platform system, and more particularly to a two-stage long-stroke nano-precision positioning system. [Previous technology] According to the current industry, in recent years, with the high precision of machine tools, various industrial machinery and measuring instruments..., whether in the poor machinery, semiconductor industry, micro (na) technology Both miniaturization and precision: exhibitions, plus ultra-precision processing machines, semiconductor process devices, electronic information machines and atomic forces! Page micro-mirror # all need high-precision technology and equipment to assist 'making semiconductor technology has entered the field and technology of nano, and thus become one of the current mainstream; the current long-distance positioning platform used in the transmission The method can be roughly divided into two types: one is to use linear sliding and the ball screw to dry, and the other is to use air enthalpy and wire bearing. The platform composed of linear sliding rail and ball screw has better rigidity. The advantage of good stability, but the transmission components used must have lubricating oil, so there will be oil and gas generation. This is more suitable for the environment with lower accuracy level (micro-pure), and the platform is composed of air enthalpy and air. , with low material force, can withstand heavy load and low pollution, etc. 'suitable for use in precision and sub-micron level environment】; eight right question (<...π笊 leveling platform and feedback measurement) The system is an important tool for the use of the industry. The drive source must have a brake with good body reaction time and high precision, and it must be in operation; a high amount of heat or friction The problem is to avoid reducing the efficiency of the promotion: 3 1379732 The existing equipment of the existing nano positioning platform is not only expensive but also difficult to maintain. The existing nano-positioning platform is not easy, and then At present, the mouth white is the displacement of the small dry circumference, which is within the centimeter (mm) level, and the feedback of the -% 'stroke limit is measured by the optical ruler and the optical read head. However, the j system mostly makes With the increase of the length, the larger the error occurs, the accuracy of the basin light ruler will accumulate considerable processing error with the ruler (4); and: the phenomenon that the ruler exceeds 1 public repeatability but is inaccurate, resulting in two =The measurement result has the result that if the optical ruler is applied to the long stroke, the identification error, and thus the machining accuracy or the inspection accuracy position, the long stroke actuation and the nanometer level are simultaneously solved. The requirements of the current industry are [inventions]. Therefore, the inventors have been able to achieve long-stroke actuation and nano-precision at the same time in view of the existing long-stroke positioning platform. Insufficient requirements and problems of the position, through continuous research and experimentation, finally developed a invention which can improve the existing defects. The object of the present invention is to provide a two-stage long-stroke nano-precision positioning system The two-stage control method of the linear motor motion mechanism combined with the piezoelectric motion platform 'provides a wide range of Nylon positioning effect' and utilizes a laser interferometer positioning system as a feedback system, which is different from the existing feedback quantity. The measuring machine uses an optical scale to provide a feedback signal, which can effectively improve the accuracy of 'it provides a convenient assembly, low cost and high-precision long-stroke positioning effect. To achieve the above purpose, the present invention provides a two-stage The long-range Nai 4 1379732 measurement and feedback group of meters-level precision positioning system includes a platform group and a control group, wherein: the platform group is provided with a base, a long-stroke air-floating platform and a micro-motion ...the base is provided with a platform. The long-stroke air-floating platform is movably disposed on the base platform and is provided with a reference seat and a drive group. The reference base is provided with two longitudinal positions, wherein the two longitudinal seats are fixedly spaced apart from the base. The transverse seat is disposed between the two longitudinal seats and arranged in a --shaped reference seat. The system is disposed on the reference base and has two linear motors, wherein each of the green, |4, and A linear motors are respectively disposed on the top surfaces of the two longitudinal seats and the lateral seat, and each linear motor extends outward. a bone-moving binding plate, wherein the micro-motion piezoelectric platform is combined with a linear horse on the lateral seat between the two longitudinal seats, the micro-motion piezoelectric platform is provided with a carrying platform, a fretting adjustment group and a processing platform, wherein the bottom of the carrier is fixedly coupled to the bonding plate of the linear motor on the lateral seat, the micro-motion adjustment group is combined with the carrier and provided with a flexible seat and two piezoelectric actuators, The flexible seat is disposed on the top surface of the carrying platform, the piezoelectric actuator system, is disposed on the top surface of the loading platform, and is attached to the flexible seat. The processing + the system and the connecting block are located above the carrying platform; The measurement feedback group is combined with the platform group and is provided with a laser interferometer and a counter The device and a signal receiving device, wherein the laser interferometer is attached to the platform of the base and is provided with a laser beam, a plurality of beam splitters and a plurality of plane interference mirrors, and the processing platform of the reflection unit and the platform group a phase beam is used to reflect a laser beam reflected by each plane interference mirror, and the signal receiving device is fixed on the platform of the base and receives the laser beam reflected by the plane mirrors through the plane mirror And /y 5 1379732 The control group is electrically connected to the platform group and the measurement feedback group and is provided with a mr station as a computer and a controller, and the computer system has a built-in receiving device for receiving each The device says that ^ ^ ^ # ^ ^ ^ ^ ϋ ^ , , electric a, the drive group of the long-range air-powered platform and the micro-motion adjustment group of the micro-motion level two are electrically connected, and the signal sent by the processing software ^ Each linear motor of the driving group is operated to achieve the effect of rapid positioning control of the long-stroke moving fish, and through the actuation of each piezoelectric actuator, a slight X-direction displacement and a slight θζ angle change are generated for the processing platform, thereby complementing The χ and θζ angle errors produced by the positive long stroke air-floating platform. Further, the long-stroke air-floating platform is provided with two air bearing groups combined with a longitudinal seat, a lateral seat and a base platform, wherein the two air vehicles are composed of: respectively: two longitudinal seats and two platforms The inner side of the seat abuts each other, and each air bearing set is provided with a plurality of air rafts and a bearing seat, wherein each air raft is respectively abutted against the platform and the inner side of the longitudinal seat, and the bearing seat is combined with each air cushion. Suspended between the longitudinal seat and the platform, and the lateral seat is disposed between the two bearing seats... The linear horse is disposed on the longitudinal seat: the combined plate system is respectively combined with the two bearing seats. Further, the flexible seat is provided with two fixing blocks, the connecting block and the two fixed bodies, wherein the two fixing bodies are fixed on the carrying platform and parallel to the two longitudinal seats, and the connecting blocks are laterally disposed on the carrying platform. And between the two fixed blocks' and each flexible system is connected with one of the fixed blocks and the connecting block, and the two piezoelectric actuators respectively abut the side edges of the connecting block. Preferably, the laser interferometer is provided with a first beam splitter 'a second beam splitter, -9'. a mirror, a first plane interferometer, a second = 6 1379732 plane interferometer and a third plane interferometer, wherein the two split mirrors are spaced apart on the base platform and located on the path of the laser beam, The 9-turn mirror is disposed on the base platform and arranged in line with the two beamsplitters, and each plane interference mirror is disposed on the platform of the base for receiving the laser beam reflected by the beam splitter or the 9-degree mirror The reflecting device is provided with a first plane mirror and a second plane mirror respectively, and the two plane mirrors are respectively disposed on the processing platform of the micro-motion piezoelectric platform and have a spatial relationship of a right angle arrangement for reflecting each The laser beam reflected by the plane interference mirror, and the signal receiving device is provided with a first receiver, a second receiver and a third receiving receiver for receiving the plane interference mirrors through the plane mirror Reflected laser beam. Preferably, each linear motor is provided with a plurality of stators and a mover, wherein each stator is fixed on the upper and lower end faces of the inner surface of the linear motor to form a magnetic guide rail, and the mover is slidably disposed on the The magnetic rail is combined with the bonding plate.
較佳地’該微動壓電平台設有複數個設於承載台上且 與加工平台相結合的交又滾子導軌軸承組。 較佳地，該第一分光鏡係為一 33%與67%的分光鏡， 而第二分光鏡係為一 50%與50%的分光鏡。 較佳地-亥承載台在異於兩縱向座的兩側邊底部係設 有複數個與橫向座側面及平台相貼靠的空氣墊。 較佳地，該底座係設有複數個與平台相結合的支柱及 釔σ木，δ亥長行程氣浮式平台係可移動地設於底座平台 上而位於結合架下方，且該平台與各支柱間係設有—隔震 墊’而該結合架係橫向架設於平台上，藉以架設機械加工 1379732 8寸所需之刀具。 較佳地，兩縱向座及該橫向 Μ ^ 、π座分別為一花崗岩塊體。 错由上述的技術手段，本發 密定位丰， 曼月兩奴式長行程奈米級精 糸統係至少具有以下的優點及功效： 長行^作動：本發明兩_|Π·斗且，_ ^ 位系祕^ , 兩奴式長仃程奈米級精密定 ’、、”，主要係透過H形的長行转汽.Λ i 墊涔酡Μ + -ν 仃私虱〉子式平台係利用空氣 丄配的方式及其利用線性馬達做為 有摩擦阻力小、k供具 負荷H s i 低以及可承載重 同一伞；L 十八十口其父與γ移動軸均再 上，進而降低機台高度及減小機 的直度及角度誤差。 機“多動時所產生 —二、㈣微調作動：本發明兩段式長行程夺 疋位系統所提供的微動壓電平么 “ 可㈣β〜 Μ €十σ ’係精由壓電致動器具有 #應特性、電能與機械能之間的高轉換率 及^化及不易發熱的特點，因此，具有較高位移分率 及W位精度和重複精度， 刀辨羊 角度調整。 不水羊級的位移與 二、回授效果佳：本發明兩段 位系統所提供的量、丁缸不…卡級精密定 )里挪回授組，其最大量測範圍為Χ: 2八 尺（m)、Υ ·· 2公尺（m) 公 線線位移解析戶我 而量測解析度··直 良線位移解析度為1奈料_)，純 ，不僅可提供一志，竹厌与U.01秒 距離量測範圍（數公尺等級）、 (0.04〜1〇_)、高稃〜4 寻，及）问解析度Preferably, the micro-motion piezoelectric platform is provided with a plurality of roller-roller bearing sets disposed on the carrier and combined with the processing platform. Preferably, the first beam splitter is a 33% and 67% beam splitter, and the second beam splitter is a 50% and 50% beam splitter. Preferably, the hoisting platform is provided with a plurality of air cushions on the bottom sides of the two longitudinal seats opposite to the lateral seat side and the platform. Preferably, the base is provided with a plurality of pillars and 钇σ wood combined with the platform, and the δ hai long-stroke air floating platform is movably disposed on the base platform and below the combined frame, and the platform and each The pillars are provided with a vibration isolation pad', and the combination frame is erected on the platform, thereby erecting the tools required for machining 1397732 8 inches. Preferably, the two longitudinal seats and the lateral Μ ^ and π seats are respectively a granite block. The above-mentioned technical means, the dense and dense positioning, the Manchu and the two slave long-length nano-fine system have at least the following advantages and effects: Long line ^ actuation: the invention two _| Π · fighting, _ ^ Position secret ^, two slaves long 仃 奈 奈 奈 精密 精密 ' ' ' , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , It adopts the method of air enthalpy and its use of linear motor as the frictional resistance is small, the load of H is low, and the load can carry the same umbrella; L 18 is the father and the γ moving axis are both up, and then lower The height of the machine and the straightness and angle error of the machine are reduced. The machine generates “multiple motions—two. (4) fine-tuning actuation: the level of the micro-motion provided by the two-stage long-stroke clamping system of the present invention. ~ Μ € 十σ 'The fine electrode has a high conversion rate between electric energy and mechanical energy, and is characterized by high conversion rate and W-bit accuracy. And repeatability, the knife distinguishes the angle of the sheep. The displacement of the non-water sheep grade and the second, the feedback effect is good: Invented the two-segment system to provide the amount, the Ding cylinder is not... the card-level precision setting), the maximum measurement range is Χ: 2 8 feet (m), Υ · · 2 meters (m) Line displacement analysis user and measurement resolution ·· straight line displacement resolution is 1 _), pure, not only can provide a Zhi, bamboo and U.01 second distance measurement range (a few meters level), ( 0.04~1〇_), high 稃~4 寻, and) ask resolution
门穩疋性、反應快速（大於1MH 境因素干擾等的44 Η . 排除環 守〕将性，進而可同時量測χ、γ盥 化並即時控制補償使其精度達到奈米等級。的變 8 1379732 【實施方式】 為能詳細瞭解本發明的技術特徵及實用功效並可依 照說明書的内容來實施，玆進一步以圖式（如第一至三圖所 示）所示的較佳實施例，詳細說明如后： 本發明提供一兩段式長行程奈米級精密定位系統，其 係包含有一平台組（1 〇)、一量測回授組（2〇)及一控制組（3〇) ，其中： 該平台組（1 0)係設有一底座（1彳）、一長行裎氣浮式耳 台（12)及-微動壓電平台（1 3) 中該底座⑴）係設有複类 個支柱（111)、一平台（112)及一結合架（113)，該平台Ο” 係與各支柱（1 11)頂面相結合，較佳地，該平台（1 1 2)與名 支柱（111)間係設有一隔震墊（114)，而該結合架（1彳3)係搞 向架設於平台（1 1 2)上，藉以架設機械加工時所需之刀具； 請配合參看如第五至七圖所示，該長行程氣浮式平合 (12)係可移動池設於底座（11)平台（112)上而位於結合架 (113)下方，該長行程氣浮式平台（12)係設有_基準座 及—驅動組（15),該基準座（14)係設有兩縱向座（141)、兩 空氣軸承組（142)及一橫向座（143)，其中兩縱向座（141)精 平行且間隔地固設於底座⑴）的平台（112)上而兩空氣勒 承組(142)係分別設於兩縱向座(14”間且與平台⑴⑽兩 縱向座（141)的内側面相貼靠，各空氣軸承組（142)係咬有 複數個空氣塾（144)及-轴承座（145)，其中各空氣塾（144 係分別與平台⑴2)及縱向座（141)内側面相貼靠，而_ 承座⑽）係與各空氣塾（144)相結合而懸❹縱向座（141 與平台（112)之間，該橫向座（143)係設於兩轴承座（145)之 9 1379732 間’進而使兩縱向座（141)與橫向座（143)排列成一 “Η”形 的基準座⑽當作-基準面，較佳地’兩縱向座（141)及該 橫向座⑽）分別為-花崗岩塊體，由於花崗岩材料穩定， 熱膨脹係數低，因此00等級的研磨平面精度可達2" m/m ’各空氣軸承組（142)於使用係採用真空預載的形式，並需 在最佳氣膜間隙下進行操作’藉以保證最佳剛度和理想的 承載能力； 該驅動組（15)係設於基準座（14)上且設有三個線性馬 達（151)，其中各線性馬達（151)係分別設於兩縱向座（141) 及橫向座（143)之頂面，且各線性馬達（151)係設有複數個 定子⑽m-動子（153)，其中各定子（152)係固設於線性 馬達(151)内表面的上、下端面而形成一磁力導執，而該動 子（153)係可滑動地設於該磁力導轨内且朝外延伸有一結合 板（154)，其中兩設於縱向座（141)上線性馬達（⑸）的結合 板（154)係分別與兩軸承座（145)相結合，其中利用線性馬 達（151)為直線傳動方式，可消除中間環節帶來的各種定位 誤差’且各磁力導軌導向的精度係可達到〇々m/200關 的直線導向精度，因此其定位精度高且反應速度快，且 該動子（153)與各定子（152)之間始終保持1的空氣_ 而不接觸，由磁力系統支撐’可消除定子(152)與動子 (153)間的接觸摩擦阻力，λΑ提高系統靈敏度與快速性， 因為無接觸傳遞、幾乎無機械磨差損耗、工作安全可靠且 壽命長’ 利用線性馬達（151)驅動的磁力導軌來精密導向 ’可避免儀器高速移動時產生慣性傾斜的趨勢，所以，利 用線性馬達（1 51) 4線的直接驅動方式可使系統本身結構大 J379732 為簡化且重量與體積也可大大的降低； 凊再配合參看如第八至十圖所示，該微動壓電平台 (13)係與橫向座（彳43)上的線性馬達（15υ相結合而介於兩 ..縱向座（14υ之間，該微動壓電平台（13)係設有一承載台 (1 6)、一微動調整組（17)、複數個交又滾子導軌軸承組〇8) 及一加工平台（19)，其中該承載台（16)的底部係與橫向座 (143)上線性馬達（151)的結合板（154)相固設結合使承載 □ (16)可透過長行程氣浮式平台（12)而相對底座（I”產生X •方向與Υ方向的移動，較佳地，該承載台（1 6)在異於兩縱 向座（1 41)的兩側邊底部係設有複數個與橫向座（143)側面 及平台（112)相貼靠的空氣墊（161); 該微動調整組（17)係與承載台（16)相結合且設有一撓 性座（171)及兩壓f致動器（172)，纟中該撓性座（川）係設 於承載台（16)頂面上且設有兩固定塊（173)、一連接塊 (174)及兩撓性體(175)’ #中兩固定塊(173)係固設於承載 台（16)上且與兩縱向座（141)相平行，該連接塊（口句係橫 籲向設於承載台（16)上且介於兩固定塊（173)之間，而各挽性 體（175)係與其中一固定塊（173)及連接塊（174)相連接，兩 壓電致動器（172)係設於承載台（16)頂面且分別與連接塊 (1 7 4)的側邊相貼靠； 各交又滾子導軌輛承組（1 8)係分別設於承載台（16)上 ，該加工平台（19)係與連异妾塊（174)及各交又滾子導軌車由承 組(18)相結合而位於承載台(16)上方，該微動壓電平台( 方、作動時係如第十—圖所示’主要利用兩壓電致動哭(1 72 .作為動力驅動源，對於連接塊（m)進行同時推動或L推一 1379732 拉的作動，使撓性體（175)產生彈性 f 1 74 )甚叫旦AA V 進而使連接塊 生螆里的X方向位移與微量的Θ 2角 讓微動壓電平台（13)具有雙 0有又輪（χ、θζ)微調整的功效，並 :的各交又滚子導執轴承組⑽做為輔助支揮 ;=;r由於各交又滚子導執轴承組〇一 相父m旋轉轴的結構特性（其作動方式屬於 一白知技術’故不閣述），當連接塊（174)產生微量的x方 向位移與微量的Θ z角度變仆B士 _ %，且加工平台（19)係與連 接塊⑽)及各交又滾子導軌轴承組（18)相結合，使得加工 平台(19)能精確的產纟χ方向位移與&角度變化且能 在高負載下仍可保持良好的精度，因此，透過撓性體（π) 具有材料變形的特性設計一體積小的微動屢電平台，並配 合麼電致動H(172)具㈣積小、反應速度快、解析度高及 機電轉換效率高的特性’達到奈米級微動的能力； "月配。參看如第四圖所示，該量測回授組（2〇)係與平 台組（1 ◦)相結合且設有—雷射干涉儀（21)…反射裝置（22) 及-訊號接收裝置(23)，其中該雷射干涉儀(21)係固設於 底座（彳1)的平台（112)上且設有一雷射光束（211)、一第一 刀光鏡（2 12)、-第二分光鏡（213)、一 9〇度反射鏡（2 '一第一平面干涉鏡（215)、一第二平面干涉鏡（2 16)及一 第三平面干涉鏡（217)，其中兩分光鏡（21 2, 21 3)係間隔設 於底座（11)平台（112)上且位於雷射光束（211)射出的路徑 上，較佳地，該第一分光鏡（212)係為一 33%與67%的分 光鏡’而第二分光鏡（213)係為—5〇%與5〇0/〇的分光鏡； °亥9〇度反射鏡（214)係設於底座（彳1)平台（112)上且與 12 1379732 兩分光鏡（212，21 3)呈一直線配置，而各平面干涉鏡（21 5 ，216 ’ 21 7)係設於底座（1 1)的平台（112)上用以接收經分 光鏡（2 12, 213)分光或90度反射鏡（214)反射之雷射光束 ’較佳地’該第一平面干涉鏡（21 5)係用以接收第一分光鏡 (212)所反射的雷射光束，而第二平面干涉鏡（216)係用以 接收第二分光鏡（213)所反射的雷射光束，而該第三平面干 涉鏡（2 17)係用以接收經90度反射鏡（214)所反射之雷射光 束； 該反射裝置（22)係與平台組（1〇)的加工平台（19)相結合 且設有一第一平面反射鏡（221)及一第二平面反射鏡（222) ’兩平面反射鏡（221，222)係分別設於微動壓電平台（13) 的加工平台（1 9)上且呈一直角配置之空間關係，用以反射 經過各平面干涉鏡（2 1 5，21 6，21 7)反射出的雷射光束， 較佳地，該第一平面反射鏡（2 2 1)係用以反射第一平面干涉 鏡（21 5)與第二平面干涉鏡（216)之雷射光束，而第二平面 反射鏡（222)係用以反射第三平面干涉鏡（21 7)之雷射光束 該訊號接收裝置（2 3)係固設於底座的平台上且設有一 第一接受器（231)、一第二接收器（232)及一第三接收器 (233)，各接收器（231，232，233)係用以接收各平面干涉 鏡（21 5，21 6，21 7)經平面反射鏡（221，222)反射之雷射 光束，較佳地’該第一接收器（2 31)係用以接收第一平面干 涉鏡（21 5)所反射的雷射光束，藉以量測出加工平台（彳9)的 X軸的位移量，該第二接收器（232)係用以接收第二平面干 涉鏡（21 6)所反射的雷射光束，藉以量測出加工平台（1 9)的 13 1379732 X軸的位移量，藉由第一接收器（231)與第二接收器（232) 個別量測出的X轴位移量的差值計算而得加工平台（19)旋 轉角度誤差量（0 z) ’該第三接收器（233)係用以接收第三 平面干涉鏡（2 17)所反射的雷射光束，藉以量測出加工平台 (1 9)的γ軸的位移量； 該量測回授組（20)於操作時，該雷射干涉儀（21)的雷 射光束（2 11)經過第一分光鏡（212)後，其雷射光束的強度 被分成一 33%的雷射光束（L1)與一 67%的雷射光束（L2)， 鲁其中反射的33%雷射光束（L1)直接射入第一平面干涉鏡 (2 1 5)上，該雷射光線直接穿透第一平面干涉鏡（2 j 5)並打 在一第一平面反射鏡（221)上再反射回到第一平面干涉鏡 (2 1 5)由第一接收器（231)接收，進而量測出加工平台u 9) 的X轴的位移量，而另一道穿透過第一分光鏡（2 12)的雷 射光又經過第二分光鏡（213)分成兩道雷射光源（ι_2與L3) ’其中一道雷射光源（L2)直接穿透過第二分光鏡（213)後直 接打在9 0度反射鏡（21 4)並射入一第三平面干涉鏡（2 ί 7)上 籲，其雷射光束經由第三平面干涉鏡（217)反射打在第二平面 反射鏡（222)上並反射回到第三平面干涉鏡（21 7)，其反射 回來的雷射光束由第三接收器（233)接收以得知γ軸的位 移量’同理經過第二分光鏡（21 3)的另一道雷射光源（|_3)， 被第"二分光鏡（213)直接反射射入第二平面干涉鏡（216)上 ’其雷射光源直接穿透第二平面干涉鏡（216)打在第一平面 反射鏡（221)上並反射回到第二平面干涉鏡（216)，其反射 回來的雷射光東由第二接收器（232)接收以得知X軸的位 移量’故藉由第一接收器（231)與第二接收器（232)個別量 14 1379732 測出的χ軸的位移量的差值計算而得加工平台（19)旋轉角 度誤差量（0Z);以及 該控制組（30)係與平台組（10)與量測回授組（2〇)相電性 連接且設有-X作站（31)，該：作站（31)係設有—電腦（32) 及一控制器（33)，其中該電腦（32)係内建有一用以接收各 接收器（23彳’ 232’ 233)訊號的處理軟_未示），而該控 制器（叫係與電腦（32) '長行程氣浮式平台（12)的驅動组 (15)及微動壓電平台（13)的微動調整組（17)相電性連接，透 過處理軟體所發出的訊號而使驅動組(1 5)的各線性馬達 (1川進行作動進μ到長行程㈣與快速定位控制的效果 ，且透過各麼電致動器（172)的作動而達到對於加工平台 (19) 產生微量的χ彳向位移與微量的㊀：角度變化，進而 補正長行程氣浮式平台（12)移動時所產生之χ方向位移誤 差與θζ肖度誤差。本發明的兩段式長行程奈米級精密定 位系統，其作動原理主要係採用兩段式的定位控制來達到 長行程與奈米級的定位操作’其中第一階段係利用Η形長 行程氣浮式平台(12)來進行步進位移，其步進位移的最大 範圍可達2m(mm)x2QQ公厘_)，而第二階段 利用微動壓電平台。3)進行微小位移的補償，#定好产 可以達到奈米等級，而該量測回授組(2〇)由於雷射光二 經過-段距離之後仍會維持細小的光束，不會像1 源會散開’同時具有極高的亮度、穩定性與精確性良^的 波長，再加上干涉現象容易觀測’因此，該量測回授，且 (20) 係可準：地對於長行程移動平台進行χ軸、丫轴盘偏 擺角度Μ :的定位誤差量測與回授訊號控制補償。 15 1379732 糟由上述的技術手段，本發明的兩段式長行程奈米級 精密定位系統係以線性馬達（151)配合微動壓電平台完 '成奈求級定位，並且搭配量測回授組（20)針對於運動長^ 程移動平台進行X車由、γ轴與偏擺角度誤差㊀Z的定位誤 差里冽與回授訊號控制補償，再透過電腦（32)的處理軟體 料各接收器（231，232, 233)訊號進行計算後，經由控 制器（33)控制驅動組（15)各線性馬達（151)進行作動進而達 到長行程移動與快速定位控制的效果，並透過各壓電致動 ♦器⑽）的作動而達到對於加工平台⑽產生微量的χ方向 位移與微量的θζ角度變化，進而補正長行程氣浮式平台 (12)移+動時所羞生之X方向位移誤差與㊀乙角度誤差，因 此，藉由本發明兩段式長行程奈米級精密定位系統，不僅 可有效降低成本以提升競爭力，且可透過模組化的組合方 式’有效減少未來修護上和生產上的時間，進而提供一方 便組裝、成本低且具高精度長行程定位效果之檢測方法及 " 裝置者。 、所述僅疋本發明的較佳實施例，並非對本發明 作任^形式上的限制，任何所屬技術領土或中具有通常知識 者’右在不脫離本發明所提技術方案的範圍内，利用本發 、晏丁技術内合所作出局部更動或修飾的等效實施例， 並且未脫離本發明的技術方案内容，均仍屬於本發明技術 方案的範圍内。 【圖式簡單說明】 級精密定位系統之 第一圖係本發明兩段式長行程奈米 立體外觀示意圖。 16 丄 第一圖係本發明平& ffl 〇 D，，且與量測回授組之立體外觀示意 第三圖係本發明平台 圖。 、·且與置測回授組之外觀側視示意 示意圖 第四圖係本發明平A 3十D組與量測回授組之放大 立體外觀 第五圖係本發明平台 ••之局σ卩放大立體外觀示意 弟/、圖係本發明平Α 4 % 3十台組分離加工平台 外觀示意圖。 第七圖係本發明平A ^ D、，且刀離承載台之局部放大立 觀不意圖。 圖 之局部放大立體 體外 意圖 思圖 第八圖係本發明平台組之局部放大俯視示意圖。 第九圖係本發明平台組分離承載台之局部放大俯視示 0 第十圖係本發明微動調整組之局部放大俯視示意圖。 第十一圖係本發明微動調整組局部放大之操作俯視示 【主要元件符號說明】 (1〇)平台組 (111)支柱 (1 1 3)結合架 (12)長行程氣浮式平台 (14)基準座 (142)空氣軸承組 U 1)底座 (112)平台 (114)隔震墊 (1 3)微動壓電平台 (1 41)縱向座 (14 3)橫向座 17 1379732The door is stable and the response is fast (44 Η greater than 1MH interference, etc.). The sputum can be measured simultaneously, and the compensation can be measured at the same time and the compensation can be controlled to the nanometer level. 1379732 [Embodiment] In order to understand the technical features and practical effects of the present invention in detail and can be implemented in accordance with the contents of the specification, further detailed embodiments shown in the drawings (as shown in the first to third figures) are detailed. Description: The present invention provides a two-stage long-stroke nano-precision positioning system, which includes a platform group (1 〇), a measurement feedback group (2 〇), and a control group (3 〇). Wherein: the platform group (10) is provided with a base (1彳), a long row of helium floating earpieces (12) and a micro-motion piezoelectric platform (1 3) in which the base (1) is provided with a compound class a pillar (111), a platform (112) and a binding frame (113), the platform is combined with the top surface of each pillar (11), preferably, the platform (1 1 2) and the pillar ( 111) is provided with a vibration isolation pad (114), and the combination frame (1彳3) is mounted on the platform (1 1 2) By means of arranging the tools required for machining; please refer to the fifth to seventh figures, the long-stroke air-floating flat (12) movable pool is located on the base (11) platform (112) Below the binding frame (113), the long-stroke air-floating platform (12) is provided with a _ reference seat and a driving group (15), the reference seat (14) is provided with two longitudinal seats (141), two air bearings a group (142) and a lateral seat (143), wherein the two longitudinal seats (141) are fixed in parallel and spaced apart on the platform (112) of the base (1) and the two air bearing units (142) are respectively disposed on the two The longitudinal seat (14" is in abutment with the inner side surfaces of the two longitudinal seats (141) of the platform (1) (10), and each of the air bearing sets (142) is bitten with a plurality of air rafts (144) and a bearing housing (145), wherein each air塾 (the 144 series respectively abut the platform (1) 2) and the inner side of the longitudinal seat (141), and the _ bearing (10) is combined with the air rafts (144) to hang the longitudinal seat (between the 141 and the platform (112)) The transverse seat (143) is disposed between 9 1379732 of the two bearing seats (145) to further arrange the two longitudinal seats (141) and the lateral seat (143) into a "Η" shape. The reference seat (10) serves as a reference plane, preferably the 'two longitudinal seats (141) and the lateral seat (10) are respectively - granite blocks. Since the granite material is stable and the coefficient of thermal expansion is low, the grinding plane accuracy of the 00 grade can be Up to 2" m/m 'each air bearing set (142) is in the form of a vacuum preload in use and needs to be operated at the optimum air gap to ensure optimum stiffness and ideal load carrying capacity; (15) is disposed on the reference base (14) and is provided with three linear motors (151), wherein each linear motor (151) is respectively disposed on the top surfaces of the two longitudinal seats (141) and the lateral seat (143), and Each linear motor (151) is provided with a plurality of stators (10) m-movers (153), wherein each stator (152) is fixed to the upper and lower end faces of the inner surface of the linear motor (151) to form a magnetic guide, and The mover (153) is slidably disposed in the magnetic guide rail and extends outwardly with a coupling plate (154). Two of the coupling plates (154) of the linear motor ((5)) disposed on the longitudinal seat (141) are attached. Combined with two bearing housings (145), wherein the linear motor (151) is straight The line transmission mode can eliminate various positioning errors brought by the intermediate links' and the accuracy of each magnetic guide guide can reach the linear guiding precision of 〇々m/200 off, so the positioning accuracy is high and the reaction speed is fast, and the mover (153) The air _ is always kept at 1 with each stator (152) without contact, and the magnetic system supports 'can eliminate the frictional friction between the stator (152) and the mover (153). λΑ improves system sensitivity and speed. Sex, because there is no contact transmission, almost no mechanical wear loss, safe and reliable operation and long life. 'The magnetic guide rail driven by the linear motor (151) is used to precisely guide 'can avoid the tendency of inertial tilt when the instrument moves at high speed, so use Linear motor (1 51) The 4-wire direct drive method makes the system itself large in size. The J379732 is simplified and the weight and volume can be greatly reduced. 凊Re-matching, as shown in Figures 8 to 10, the micro-motion piezoelectric platform ( 13) is connected with a linear motor (15υ on the lateral seat (彳43) and between two.. longitudinal seat (14υ, the micro-motion piezoelectric platform (13) is provided with a carrying platform (16), a jog adjustment group (17), a plurality of cross roller bearing sets 〇8) and a processing platform (19), wherein the bottom of the carrying platform (16) is coupled with a linear motor (151) on the lateral seat (143) The combination plate (154) is fixedly coupled such that the carrier □ (16) can transmit the X direction and the Υ direction relative to the base (I) through the long stroke air floating platform (12). Preferably, the carrier (1) a plurality of air cushions (161) abutting the side of the lateral seat (143) and the platform (112) at a bottom of the two sides of the two longitudinal seats (1 41); the fretting adjustment group (17) in combination with the carrying platform (16) and provided with a flexible seat (171) and a two-pressure f actuator (172), wherein the flexible seat (chuan) is disposed on the top of the carrying platform (16) The surface is provided with two fixing blocks (173), one connecting block (174) and two flexible bodies (175)'. The two fixing blocks (173) are fixed on the carrying platform (16) and two longitudinal seats. (141) Parallel, the connecting block (the slogan is horizontally located on the carrying platform (16) and interposed between the two fixed blocks (173), and each of the connecting bodies (175) is attached to one of the fixed blocks (173) and connection block (174) phase Connected, the two piezoelectric actuators (172) are arranged on the top surface of the carrying platform (16) and respectively abut the side edges of the connecting block (174); each of the roller and roller guide bearing groups (1 8 The system is respectively disposed on the carrying platform (16), and the processing platform (19) is combined with the connecting block (174) and the respective roller-roller vehicles by the bearing group (18) and located at the carrying platform (16). Above, the micro-actuated piezoelectric platform (square, when actuated as shown in the tenth-figure diagram) mainly uses two piezoelectric actuators to cry (1 72. as a power drive source, simultaneous push or L push for the connection block (m) The action of a 1397732 pull causes the flexible body (175) to produce an elastic f 1 74 ) which is called AA V and thus causes the X-direction displacement in the joint block and the trace amount of Θ 2 to allow the micro-motion piezoelectric platform (13) to have Double 0 has the effect of round (χ, θζ) micro-adjustment, and: each roller and roller bearing bearing group (10) is used as auxiliary branch; =; r due to each roller and roller bearing bearing group The structural characteristics of the parent m rotation axis (the mode of operation belongs to a white knowing technique), so when the connecting block (174) produces a slight amount of x-direction displacement and a small amount of Θ z angle changes to servant B _ %, And the processing platform (19) is combined with the connecting block (10)) and the respective roller guide bearing sets (18), so that the processing platform (19) can accurately produce the yaw direction displacement and the & angle change and can be high The load can still maintain good precision. Therefore, the flexible body (π) has the property of material deformation to design a small-sized micro-motion and electric platform, and cooperate with the electric actuator H (172) with (4) small product and reaction speed. Fast, high resolution and high electromechanical conversion efficiency' ability to achieve nano-level micro-motion; "monthly. Referring to the fourth figure, the measurement feedback group (2〇) is combined with the platform group (1◦) and is provided with a laser interferometer (21)...reflecting device (22) and a signal receiving device. (23), wherein the laser interferometer (21) is fixed on the platform (112) of the base (彳1) and is provided with a laser beam (211), a first mirror (2 12), - a second beam splitter (213), a 9-turn mirror (2'-first plane interference mirror (215), a second plane interference mirror (2 16) and a third plane interference mirror (217), two of which The beam splitter (21 2, 21 3) is disposed on the platform (11) of the base (11) and is located on the path of the laser beam (211). Preferably, the first beam splitter (212) is a 33% and 67% of the beam splitter' and the second beam splitter (213) is a beam splitter of -5〇% and 5〇0/〇; °H 9 degree mirror (214) is set on the base (彳1 The platform (112) is arranged in line with the 12 1379732 two-beam splitter (212, 21 3), and each plane interference mirror (21 5 , 216 ' 21 7) is disposed on the platform (112) of the base (1 1) Used to receive the spectroscope (2 12, 213) split or 90 degrees The laser beam reflected by the mirror (214) is preferably 'the first plane interferometer (21 5) for receiving the laser beam reflected by the first beam splitter (212), and the second plane interferometer ( 216) for receiving a laser beam reflected by the second beam splitter (213), and the third plane interference mirror (2 17) is for receiving a laser beam reflected by the 90 degree mirror (214); The reflecting device (22) is combined with the processing platform (19) of the platform group (1) and is provided with a first plane mirror (221) and a second plane mirror (222) 'two plane mirrors (221) , 222) are respectively disposed on the processing platform (19) of the micro-motion piezoelectric platform (13) and have a spatial relationship of a right-angled configuration for reflecting through each plane interference mirror (2 1 5, 21 6, 21 7) The reflected laser beam, preferably, the first planar mirror (2 2 1) is for reflecting the laser beam of the first plane interference mirror (21 5) and the second plane interference mirror (216), and The second planar mirror (222) is for reflecting the laser beam of the third plane interferometer (21 7). The signal receiving device (23) is fixed at the bottom. The platform is provided with a first receiver (231), a second receiver (232) and a third receiver (233), and each receiver (231, 232, 233) is configured to receive each plane interference mirror. (21 5, 21 6, 21 7) a laser beam reflected by a plane mirror (221, 222), preferably 'the first receiver (2 31) is for receiving a first plane interference mirror (21 5 The reflected laser beam is used to measure the displacement of the X-axis of the processing platform (彳9), and the second receiver (232) is configured to receive the lightning reflected by the second planar interferometer (21 6) The beam is measured to measure the displacement of the 13 1379732 X-axis of the processing platform (1 9), and the difference between the X-axis displacements measured by the first receiver (231) and the second receiver (232) The value of the processing platform (19) rotation angle error amount (0 z) 'The third receiver (233) is used to receive the laser beam reflected by the third plane interference mirror (2 17), thereby measuring The amount of displacement of the gamma axis of the processing platform (19); the laser beam (2 11) of the laser interferometer (21) passes through the first beam splitting during operation of the measurement feedback group (20) After (212), the intensity of the laser beam is divided into a 33% laser beam (L1) and a 67% laser beam (L2), and the 33% of the reflected laser beam (L1) is directly incident. On the first plane interferometer (2 15), the laser beam directly penetrates the first plane interferometer (2 j 5) and is struck on a first plane mirror (221) and then reflected back to the first plane interference The mirror (2 15) is received by the first receiver (231) to measure the displacement of the X-axis of the processing platform u 9), and the other laser light that has passed through the first beam splitter (2 12) passes through The second beam splitter (213) is divided into two laser light sources (ι_2 and L3). One of the laser light sources (L2) directly penetrates the second beam splitter (213) and directly hits the 90 degree mirror (21 4). And incident on a third plane interferometer (2 ί 7), the laser beam is reflected by the third plane interferometer (217) on the second plane mirror (222) and reflected back to the third plane interference The mirror (21 7), the reflected laser beam is received by the third receiver (233) to know the displacement amount of the γ-axis. Similarly, another mine passing through the second beam splitter (21 3) The light source (|_3) is directly reflected by the second "division mirror (213) into the second plane interferometer (216). The laser light source directly penetrates the second plane interference mirror (216) and is first. The plane mirror (221) is reflected back to the second plane interferometer (216), and the reflected laser light is received by the second receiver (232) to know the displacement of the X-axis. Calculating the difference between the displacement amount of the x-axis measured by the receiver (231) and the second receiver (232) by the individual amount 14 1379732, the machining platform (19) rotation angle error amount (0Z); and the control group (30) The system is connected to the platform group (10) and the measurement feedback group (2〇) and has a -X station (31). The station (31) is provided with a computer (32) and a The controller (33), wherein the computer (32) has a built-in processing soft_not shown for receiving the signals of each receiver (23彳' 232' 233), and the controller (called the system and the computer (32) The drive group (15) of the long-stroke air-floating platform (12) and the jog adjustment group (17) of the micro-motion piezoelectric platform (13) are electrically connected through the signal sent by the processing software. Each of the linear motors of the drive group (1 5) (1) performs the action of moving into the long stroke (4) and the rapid positioning control, and achieves the production of the processing platform (19) by the actuation of each of the electric actuators (172). A small amount of yaw displacement and a slight one: angle change, and then correct the χ direction displacement error and θ ζ 度 误差 产生 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The two-stage long-stroke nano-precision positioning system of the invention mainly adopts two-stage positioning control to achieve long-stroke and nano-level positioning operation. The first stage utilizes a long-stroke gas with a long stroke. The floating platform (12) is used for step displacement, and the maximum range of step displacement is up to 2m (mm) x 2QQ mm _), while the second stage utilizes a micro-motion piezoelectric platform. 3) For the compensation of small displacement, #定好产 can reach the nanometer level, and the measurement feedback group (2〇) will maintain a small beam after the laser light passes the -segment distance, and will not be like a source. Dispersing 'wavelength with high brightness, stability and accuracy, plus interference is easy to observe', therefore, the measurement feedback, and (20) can be accurate: ground for long-stroke mobile platform χ axis, 丫 axis yaw angle Μ : positioning error measurement and feedback signal control compensation. 15 1379732 According to the above technical means, the two-stage long-stroke nano-precision positioning system of the present invention is equipped with a linear motor (151) and a micro-actuated piezoelectric platform to complete the positioning, and the measurement and feedback group (20) For the motion-long mobile platform, the X-vehicle, γ-axis and yaw angle error-Z positioning error 回 and feedback signal control compensation, and then through the computer (32) processing soft material receivers ( 231, 232, 233) After the signal is calculated, the linear motor (151) of the driving group (15) is controlled by the controller (33) to perform the action of long stroke movement and rapid positioning control, and is actuated by each piezoelectric. ♦ (10)) to achieve a slight χ directional displacement and a small amount of θ ζ angle change for the processing platform (10), and then correct the X-direction displacement error of the long-stroke air-floating platform (12) when moving and moving B angle error, therefore, the two-stage long-stroke nano-precision positioning system of the invention can not only effectively reduce the cost to enhance the competitiveness, but also effectively reduce the future repair through the modular combination method. And the production time, thereby providing one will assemble, low cost and having a high-precision detection of the stroke length and positioning effect " means those. The preferred embodiments of the present invention are not intended to limit the scope of the present invention, and any person skilled in the art or having the ordinary knowledge can use the right without departing from the scope of the present invention. Equivalent embodiments of the present invention, which are modified or modified by the present invention, and which do not depart from the technical solutions of the present invention, are still within the scope of the technical solutions of the present invention. [Simple diagram of the diagram] The first diagram of the stage precision positioning system is a three-dimensional appearance of the two-stage long-stroke nanometer of the present invention. 16 丄 The first figure is the flat & ffl 〇 D of the present invention, and is similar to the stereoscopic appearance of the measurement feedback group. The third figure is the platform diagram of the present invention. 4, the schematic view of the appearance of the set-back feedback group, the fourth figure is the enlarged stereoscopic appearance of the flat A 3 D group and the measurement feedback group of the present invention. The fifth figure is the platform of the present invention. The magnified stereoscopic appearance shows the younger brother, and the drawing is a schematic view of the appearance of the separation processing platform of the 4% 3 set of the present invention. The seventh figure is a flat view of the present invention, and the knife is not intended to be partially enlarged from the stage. Partially enlarged three-dimensional view of the figure In vitro intentions The eighth figure is a partially enlarged top view of the platform set of the present invention. The ninth drawing is a partial enlarged plan view of the separation platform of the platform group of the present invention. The tenth figure is a partially enlarged top view of the micro-motion adjustment group of the present invention. The eleventh figure is a top view of the operation of the micro-motion adjustment group of the present invention. [Main component symbol description] (1〇) platform group (111) pillar (1 1 3) combined frame (12) long-stroke air-floating platform (14) Reference seat (142) air bearing unit U 1) base (112) platform (114) isolation pad (1 3) micro-motion piezoelectric platform (1 41) longitudinal seat (14 3) lateral seat 17 1379732
(144)空氣墊 (1 5)驅動組 (151)線性馬達 (153)動子 (16) 承載台 (17) 微動調整組 (172)壓電致動器 (174)連接塊 (18) 交叉滾子導轨軸承組 (2 0)量測回授組 (21) 雷射干涉儀 (2 12)第一分光鏡 (214)90度反射鏡 (2 16)第二平面干涉鏡 (22) 反射裝置 (221)第一平面反射鏡 (23) 訊號接收裝置 (232)第二接收器 (30)控制組 (32)電腦 (1 4 5)軸承座 (152)定子 (154)結合板 (161)空氣墊 (171)撓性座 (173)固定塊 (175)撓性體 (19)加工平台 (2 11)雷射光束 (213)第二分光鏡 (215)第一平面干涉鏡 (217)第三平面干涉鏡 (222)第二平面反射鏡 (231)第一接受器 (233)第三接收器 (31)工作站 (33)控制器 is(144) Air cushion (1 5) Drive group (151) Linear motor (153) Mover (16) Carrying table (17) Jog adjustment group (172) Piezo actuator (174) Connection block (18) Cross roll Sub-rail bearing set (20) Measuring feedback group (21) Laser interferometer (2 12) First beam splitter (214) 90 degree mirror (2 16) Second plane interferometer (22) Reflecting device (221) First plane mirror (23) Signal receiving device (232) Second receiver (30) Control group (32) Computer (1 4 5) Bearing housing (152) Stator (154) Bonding plate (161) Air Pad (171) flexible seat (173) fixed block (175) flexible body (19) processing platform (2 11) laser beam (213) second beam splitter (215) first plane interference mirror (217) third Planar Interferometer (222) Second Planar Mirror (231) First Receiver (233) Third Receiver (31) Workstation (33) Controller is