TW201321125A - High-frequency oscillation spindle device - Google Patents
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本發明係提供一種利用驅動主軸裝置之高頻振盪方式,即可減少致動機構之負荷重量,以提高主軸頭之振盪頻率,而可大幅提昇加工效率之高頻振盪主軸裝置及其加工方法。The invention provides a high-frequency oscillation spindle device and a processing method thereof, which can reduce the load weight of the actuation mechanism by using the high-frequency oscillation mode of the drive spindle device, thereby improving the oscillation frequency of the spindle head, and greatly improving the machining efficiency.
按,於加工硬脆材料(如玻璃、陶瓷材料、二氧化鋯.....等)時,一般係利用高頻振盪(頻率為500~1000Hz)的加工方式,其進行高頻振盪加工過程中,刀具與工件間產生易於吸入切削液及排出切屑之微小空隙,以大幅降低刀具之切削阻力,且減少加工所產生的熱應力造成的變形,相對的,即可提昇工件之加工精度、加工表面品質,以及刀具之使用壽命。According to the processing of hard and brittle materials (such as glass, ceramic materials, zirconium dioxide, etc.), generally use high-frequency oscillation (frequency of 500 ~ 1000Hz) processing method, which performs high-frequency oscillation processing In the middle, between the tool and the workpiece, a small gap is formed which is easy to suck in the cutting fluid and discharge the chip, so as to greatly reduce the cutting resistance of the tool and reduce the deformation caused by the thermal stress generated by the machining. In contrast, the machining accuracy and processing of the workpiece can be improved. Surface quality and the life of the tool.
請參閱第1圖所示,係為應用於加工硬脆材料之加工機,其係於機台10上裝設有供架置工件20之工作台11,以及供架置刀具30之主軸頭12;該工作台11係連結於X軸向位移模組13及Y軸向位移模組14,以供驅動工作台11作X軸向及Y軸向之加工進給位移,且以致動模組驅動工作台11作X軸向及Y軸向之高頻振盪運動,另機台10上設有立柱101,於該立柱101之一側以Z軸向位移模組15連結裝設主軸頭12,以供驅動主軸頭12作Z軸向之加工進給位移;於工件20上進行時,即利用X、Y、Z軸向位移模組13、14、15驅動工作台11上之工件20與主軸頭12上之刀具30作X、Y、Z軸向之加工進給位移,於加工過程中,並以致動模組驅動工作台11作X軸向及Y軸向之高頻振盪運動,而以高頻振盪之加工方式於工件進行加工作業;惟,該驅動工作台11作高頻振盪運動之加工方式,由於該致動模組驅動工作台11作高頻振盪時,其係必須負荷工作台11及工件20之重量,且工件20之重量愈重,相對於X、Y軸向所產生之運動慣性力量就愈大,而該慣性力量將限制致動模組驅動工作台11及工件20之振盪頻率,進而無法提昇加工效率及刀具使用壽命;另為解決振盪頻率無法提昇之缺弊,其雖可於主軸頭12連結致動模組,以驅動主軸頭12作高頻振盪運動,惟,該主軸頭12係連結Z軸向位移模組15,使主軸頭12僅能驅動作Z軸向之高頻振盪運動,並無法驅動作X、Y軸向之高頻振盪運動,而僅能適用於進行Z軸向之進給加工(如鑽孔),對於X、Y軸向之進給加工效率則無法有效提昇。Referring to Fig. 1, there is shown a processing machine for processing hard and brittle materials, which is provided with a table 11 for mounting a workpiece 20 on a machine table 10, and a spindle head 12 for mounting the tool 30. The worktable 11 is coupled to the X-axis displacement module 13 and the Y-axis displacement module 14 for driving the table 11 to perform the machining feed displacement of the X-axis and the Y-axis, and is driven by the actuation module. The table 11 is configured to perform high-frequency oscillating motion in the X-axis and the Y-axis. The other machine 10 is provided with a column 101. The Z-axis displacement module 15 is coupled to the spindle head 12 on one side of the column 101 to The driving spindle head 12 is used for the Z-axis machining feed displacement; when the workpiece 20 is performed, the workpiece 20 and the spindle head on the table 11 are driven by the X, Y, Z axial displacement modules 13, 14, 15 The tool 30 on the 12 is used for the machining feed displacement of the X, Y and Z axes. During the machining process, the actuating module drives the table 11 to perform the high frequency oscillation movement of the X axis and the Y axis, and the height is high. The processing method of the frequency oscillation is performed on the workpiece; however, the driving table 11 is processed by the high-frequency oscillation motion, because the actuation module drives the table 11 When performing high-frequency oscillation, it is necessary to load the weight of the table 11 and the workpiece 20, and the heavier the weight of the workpiece 20, the greater the inertial force generated by the motion relative to the X and Y axes, and the inertial force will be limited. The actuation module drives the oscillation frequency of the table 11 and the workpiece 20, thereby failing to improve the machining efficiency and the service life of the tool; and to solve the drawback that the oscillation frequency cannot be improved, the spindle module 12 can be coupled to the actuation module to The spindle head 12 is driven to perform high-frequency oscillating motion. However, the spindle head 12 is coupled to the Z-axis displacement module 15 so that the spindle head 12 can only drive the high-frequency oscillatory motion of the Z-axis and cannot be driven as X and Y. The axial high-frequency oscillating motion can only be applied to the Z-axis feed machining (such as drilling), and the feed efficiency of the X and Y axes cannot be effectively improved.
有鑑於此,本發明人遂以其多年從事相關行業的研發與製作經驗,針對目前所面臨之問題深入研究,經過長期努力之研究與試作,終究研創出一種高頻振盪主軸裝置,並藉以大幅改善習式之缺弊,此即為本發明之設計宗旨。In view of this, the inventor has been engaged in research and development and production experience of related industries for many years, and has conducted in-depth research on the problems currently faced. After long-term efforts and research, he has finally developed a high-frequency oscillation spindle device, and To improve the shortcomings of the practice, this is the design purpose of the invention.
本發明之目的一,係提供一種高頻振盪主軸裝置,該主軸裝置係包含有主軸頭、具至少一滑移模組之滑移機構,以及具至少一致動模組之致動機構,該主軸頭係連結於滑移機構之滑移模組上,以使主軸頭可作至少一軸向之往復滑移,且以致動機構之致動模組驅動主軸頭作至少一軸向之高頻振盪運動,另以該主軸裝置搭配裝設於工具機之機座上,並以工具機之進給機構驅動主軸裝置作加工進給位移,且於加工過程中,同時以致動機構之致動模組驅動主軸頭作至少一軸向之高頻振盪運動,而以高頻振盪的方式進行加工;藉此,利用主軸裝置之高頻振盪方式,即可減少致動機構之負荷重量,以提高主軸頭之振盪頻率,並降低刀具之切削阻力,進而達到大幅提昇加工效率之實用目的。A first object of the present invention is to provide a high frequency oscillating spindle device, the spindle device comprising a spindle head, a sliding mechanism having at least one sliding module, and an actuation mechanism having at least one movable module, the spindle The head system is coupled to the slip module of the slip mechanism such that the spindle head can perform at least one axial reciprocating slip, and the actuating module of the actuating mechanism drives the spindle head to perform at least one axial high frequency oscillation The movement is additionally equipped with the spindle device on the machine base of the machine tool, and the spindle mechanism is driven by the feed mechanism of the machine tool for machining feed displacement, and during the machining process, the actuation module of the actuation mechanism is simultaneously The spindle head is driven to perform at least one axial high-frequency oscillation motion, and is processed by high-frequency oscillation; thereby, the high-frequency oscillation mode of the spindle device can reduce the load weight of the actuation mechanism to improve the spindle head. The oscillation frequency and the cutting resistance of the tool are reduced, thereby achieving the practical purpose of greatly improving the processing efficiency.
本發明之目的二,係提供一種高頻振盪主軸裝置,其中,該主軸頭係連結於滑移機構之滑移模組上,以使主軸頭可作至少一軸向之往復滑移,且以致動機構之致動模組驅動主軸頭作至少一軸向之高頻振盪運動,另以該主軸裝置搭配裝設於工具機之機座上,並以工具機之進給機構驅動主軸裝置作加工進給位移,且於加工過程中,同時以致動機構之致動模組驅動主軸頭作至少一軸向之高頻振盪運動,而以高頻振盪的方式進行加工,即可減少致動機構之負荷重量,以提高主軸頭之振盪頻率,並降低刀具之切削阻力,進而達到大幅提昇刀具使用壽命之實用目的。A second object of the present invention is to provide a high frequency oscillation spindle device, wherein the spindle head is coupled to a slip module of the slip mechanism so that the spindle head can be reciprocally slipped at least in an axial direction, and The actuating module of the moving mechanism drives the spindle head to perform at least one axial high-frequency oscillation movement, and the spindle device is matched with the machine seat of the machine tool, and the spindle device is driven by the feeding mechanism of the machine tool. The feed displacement, and during the machining process, the actuation module of the actuation mechanism drives the spindle head to perform at least one axial high-frequency oscillation motion, and the high-frequency oscillation is processed to reduce the actuation mechanism. The load weight is used to increase the oscillation frequency of the spindle head and reduce the cutting resistance of the tool, thereby achieving the practical purpose of greatly increasing the service life of the tool.
為對本發明有更進一步之瞭解,茲舉一較佳實施例並配合圖式,詳述如后:In order to further understand the present invention, a preferred embodiment and the drawings are described in detail as follows:
請參閱第2~5圖所示,本發明之主軸裝置40係包含有主軸頭41、具至少一滑移模組之滑移機構,以及具至少一致動模組之致動機構;該主軸頭41係連結於滑移機構之至少一滑移模組,以使主軸頭41可作至少一軸向之往復滑移,且以致動機構之至少一致動模組驅動主軸頭41作至少一軸向之高頻振盪運動;於本實施例中,該滑移機構係設有第一滑移模組42、第二滑移模組43及第三滑移模組44,以使主軸頭41可作第一、二、三軸向之往復滑移;其中,該第一滑移模組42係設有具導軌422之第一連結座421,以及具導槽424之第一移動座423,該第一連結座421之導軌422與第一移動座423之導槽424相互滑設,且於該第一移動座423連結裝設主軸頭41,而使主軸頭41可隨著第一移動座423相對第一連結座421作第一軸向(X軸向)之相對滑移,另該第一滑移模組42之第一連結座421上設有組接件45,以供連結第二滑移模組43,該第二滑移模組43設有具導軌432之第二連結座431,以及具導槽434之第二移動座433,該第二連結座431之導軌432與第二移動座433之導槽434相互滑設,且以第二移動座433連結組接件45,使主軸頭41、第一滑移模組42及組接件45可隨著第二移動座433相對第二連結座431作第二軸向(Y軸向)之滑移,又該第二滑移模組43之第二連結座431連結第三滑移模組44,該第三滑移模組44設有具導軌442之第三連結座441,以及具導槽444之第三移動座443,該第三連結座441之導軌442與第三移動座443之導槽444相互滑設,且第三移動座443連結該第二滑移模組43之第二連結座431,使主軸頭41、第一滑移模組42、第二滑移模組43及組接件45可隨著第三移動座443相對第三連結座441作第三軸向(Z軸向)之滑移;該致動機構係對應滑移機構之第一滑移模組42、第二滑移模組43及第三滑移模組44設有可為線性馬達之第一致動模組46、第二致動模組47及第三致動模組48,以供驅動主軸頭41作第一、二、三軸向之高頻振盪運動;其中,該第一致動模組46係設有連結第一滑移模組42第一連結座421之第一定子461,以及連結第一滑移模組42第一移動座423之第一動子462,並以第一致動模組46之第一定子461驅動第一動子462連動第一移動座423作第一軸向之高頻振盪運動,另該第二致動模組47設有連結第二滑移模組43第二連結座431之第二定子471,以及連結第二滑移模組43第二移動座433之第二動子472,並以第二致動模組47之第二定子471驅動第二動子472連動第二移動座433作第二軸向之高頻振盪運動,又該第三致動模組48設有連結第三滑移模組44第三連結座441之第三定子481,以及連結第三滑移模組44第三移動座443之第三動子482,並以第三致動模組48之第三定子481驅動第三動子482連動第三移動座443作第三軸向之高頻振盪運動,進而以第一致動模組46、第二致動模組47及第三致動模組48驅動主軸頭41作第一、二、三軸向之高頻振盪運動。Referring to Figures 2 to 5, the spindle device 40 of the present invention comprises a spindle head 41, a slip mechanism having at least one slip module, and an actuating mechanism having at least one movable module; the spindle head 41 is coupled to at least one slip module of the slip mechanism such that the spindle head 41 can perform at least one axial reciprocating slip, and at least one of the actuating mechanisms drives the spindle head 41 to at least one axial direction. In the embodiment, the sliding mechanism is provided with a first sliding module 42, a second sliding module 43, and a third sliding module 44, so that the spindle head 41 can be used. The first, second, and third axial reciprocating slips; wherein the first sliding module 42 is provided with a first connecting seat 421 having a guide rail 422, and a first moving seat 423 having a guiding slot 424, the first The guide rail 422 of the joint seat 421 and the guide groove 424 of the first movable seat 423 are slidably disposed, and the spindle head 41 is coupled to the first movable seat 423 so that the spindle head 41 can be opposite to the first movable seat 423. The first connecting seat 421 is opposite to the first axial direction (X-axis), and the first connecting seat 421 of the first sliding module 42 is provided with a connecting member. 45, for connecting the second sliding module 43, the second sliding module 43 is provided with a second connecting seat 431 having a guide rail 432, and a second moving seat 433 having a guiding groove 434, the second connecting seat The guide rail 432 of the 431 and the guide groove 434 of the second moving base 433 are slidably disposed with each other, and the assembly member 45 is coupled by the second movable seat 433, so that the spindle head 41, the first sliding module 42 and the assembly 45 can be used. The second moving seat 433 is slid in the second axial direction (Y-axis) with respect to the second connecting base 431, and the second connecting seat 431 of the second sliding module 43 is coupled to the third sliding module 44. The third sliding block 44 is provided with a third connecting seat 441 having a guide rail 442, and a third moving seat 443 having a guiding groove 444. The guiding groove 442 of the third connecting seat 441 and the guiding groove of the third moving base 443 The 424 is slidably disposed, and the third movable base 443 is coupled to the second joint 431 of the second sliding module 43 to make the spindle head 41, the first sliding module 42, the second sliding module 43 and the assembly The member 45 can slide along the third axial direction (Z-axis) with the third movable seat 443; the actuating mechanism is the first sliding module 42 corresponding to the sliding mechanism, and the second Slip module 43 and third The sliding module 44 is provided with a first actuation module 46, a second actuation module 47 and a third actuation module 48, which can be linear motors, for driving the spindle head 41 as the first, second and third axes. The first actuator module 46 is provided with a first stator 461 that connects the first joint 421 of the first slip module 42 and the first slip module 42. a first mover 462 of the movable seat 423, and the first mover 462 of the first actuation module 46 drives the first mover 462 to interlock the first movable seat 423 for the first axial high frequency oscillation movement, and The second actuator module 47 is provided with a second stator 471 connecting the second joint 431 of the second slip module 43 and a second mover 472 connecting the second moving block 433 of the second slip module 43. And the second stator 471 of the second actuation module 47 drives the second mover 472 to interlock the second movable seat 433 for the second axial high frequency oscillation movement, and the third actuation module 48 is provided with the connection. The third stator 481 of the third joint 441 of the three-slip module 44 and the third mover 482 of the third movable seat 443 of the third slip module 44 and the third actuator module 48 Stator 481 drive The third mover 482 moves the third movable seat 443 to perform the third-axis high-frequency oscillating motion, and further drives the spindle by the first actuation module 46, the second actuation module 47, and the third actuation module 48. The head 41 is used for the first, second and third axial high frequency oscillation movements.
請參閱第6圖所示,本發明之主軸裝置40係可搭配裝設於各種型式之工具機,以供進行工件之加工作業;於本實施例中,該工具機係於機座50上裝設供架置刀具之主軸裝置40,以及供架置工件之工作台51,並以進給機構驅動主軸裝置40上之刀具與工作台51上之工件作相對位移,以進行加工作業;於本實施例中,該進給機構係於工作台51連結第一驅動模組52,以供驅動工作台51座第一軸向(X軸向)之往復位移,於該第一驅動模組52之底部另連結第二驅動模組53,以供驅動第一驅動模組52及工作台51作第二軸向(Y軸向)之往復位移,另於機座50上設有機柱501,且於該機柱501一側裝設第三驅動模組54,該第三驅動模組54設有可驅動作第三軸向(Z軸向)往復位移之升降座541,以供連結裝設主軸裝置40,該主軸裝置40係以第三滑移模組44之第三連結座441連結於第三驅動模組54之升降座541,並以該第三驅動模組54之升降座541連動主軸裝置40作第三軸向(Z軸向)之往復位移,進而可利用進給機構之第一驅動模組52、第二驅動模組53及第三驅動模組54驅動工作台51之工件與主軸裝置40上之刀具作相對位移。Referring to FIG. 6, the spindle device 40 of the present invention can be installed in various types of machine tools for processing workpieces. In this embodiment, the machine tool is mounted on the machine base 50. Providing a spindle device 40 for mounting the tool, and a table 51 for mounting the workpiece, and driving the tool on the spindle device 40 with the feeding mechanism to perform relative displacement on the workpiece on the table 51 for processing; In the embodiment, the feeding mechanism is coupled to the first driving module 52 on the table 51 for reciprocating displacement of the first axial direction (X-axis) of the driving table 51, and the first driving module 52 is The second driving module 53 is connected to the bottom portion for driving the first driving module 52 and the working table 51 to perform a reciprocating displacement in the second axial direction (Y-axis), and the base 50 is provided with the machine post 501, and A third driving module 54 is disposed on one side of the column 501, and the third driving module 54 is provided with a lifting seat 541 that can be driven as a third axial (Z-axis) reciprocating displacement for connecting and mounting the spindle device. 40. The spindle device 40 is connected to the third driving module 54 by the third connecting base 441 of the third sliding module 44. The base 541 is coupled with the lifting device 541 of the third driving module 54 to rotate the spindle device 40 for the third axial direction (Z-axis), and the first driving module 52 and the second of the feeding mechanism can be utilized. The drive module 53 and the third drive module 54 drive the workpiece of the table 51 to be relatively displaced by the tool on the spindle device 40.
請參閱第7、8圖所示,本發明於進行加工作業時,首先於工作台51上架置工件60,該主軸裝置40之主軸頭41則架置有刀具70,而以高頻振盪的方式對工件60進行加工,其高頻振盪加工方法係包含利用加工進給手段及高頻振盪手段;該加工進給手段係以進給機構之第一驅動模組52及第二驅動模組53驅動工作台51上之工件60作第一、二軸向之加工進給位移,另以第三驅動模組54驅動升降座541連動主軸裝置40作第三軸向之加工進給位移,進而使主軸頭41上之刀具70與工作台51上之工件60作第一、二、三軸向之加工進給位移,且於主軸裝置40主軸頭41上之刀具70對工件60進行加工之過程中,同時進行高頻振盪手段,其係以主軸裝置40之第一致動模組46、第二致動模組47及第三致動模組48同時驅動主軸頭41作第一、二、三軸向之高頻振盪運動,而以高頻振盪的方式對工件60進行加工作業;藉此,本發明係利用主軸裝置之高頻振盪手段,即可減少致動機構之驅動負荷重量,以提高主軸頭41之振盪頻率,並降低刀具70之切削阻力,進而達到大幅提昇加工效率及昇刀具使用壽命之實用目的。Referring to Figures 7 and 8, the present invention firstly mounts the workpiece 60 on the table 51 during the machining operation. The spindle head 41 of the spindle device 40 is mounted with the cutter 70 and is oscillated at a high frequency. The workpiece 60 is processed, and the high-frequency oscillation processing method includes a processing feeding means and a high-frequency oscillation means; the processing feeding means is driven by the first driving module 52 and the second driving module 53 of the feeding mechanism. The workpiece 60 on the table 51 is used for the first and second axial machining feed displacement, and the third driving module 54 drives the lifting base 541 to interlock the spindle device 40 for the third axial machining feed displacement, thereby further making the spindle The tool 70 on the head 41 and the workpiece 60 on the table 51 are subjected to the first, second and third axial machining feed displacements, and the tool 70 on the spindle head 41 of the spindle device 40 processes the workpiece 60. Simultaneously, the high frequency oscillating means is used to drive the spindle head 41 as the first, second and third axes simultaneously by the first actuation module 46, the second actuation module 47 and the third actuation module 48 of the spindle device 40. The high-frequency oscillatory motion is performed, and the workpiece 60 is performed in a high-frequency oscillation manner. Therefore, the present invention utilizes the high-frequency oscillation means of the spindle device to reduce the driving load weight of the actuating mechanism, thereby increasing the oscillation frequency of the spindle head 41 and reducing the cutting resistance of the cutter 70, thereby achieving a substantial increase. The practical purpose of processing efficiency and tool life.
10...機台10. . . Machine
101...立柱101. . . Column
11...工作台11. . . Workbench
12...主軸頭12. . . Spindle head
13...X軸向位移模組13. . . X axial displacement module
14...Y軸向位移模組14. . . Y axial displacement module
15...Z軸向位移模組15. . . Z axial displacement module
20...工件20. . . Workpiece
30...刀具30. . . Tool
40...主軸裝置40. . . Spindle device
41...主軸頭41. . . Spindle head
42...第一滑移模組42. . . First slip module
421...第一連結座421. . . First link
422...導軌422. . . guide
423...第一移動座423. . . First mobile seat
424...導槽424. . . Guide slot
43...第二滑移模組43. . . Second slip module
431...第二連結座431. . . Second link
432...導軌432. . . guide
433...第二移動座433. . . Second mobile seat
434...導槽434. . . Guide slot
44...第三滑移模組44. . . Third slip module
441...第三連結座441. . . Third link
442...導軌442. . . guide
443...第三移動座443. . . Third mobile seat
444...導槽444. . . Guide slot
45...組接件45. . . Group connector
46...第一致動模組46. . . First motion module
461...第一定子461. . . First stator
462...第一動子462. . . First mover
47...第二致動模組47. . . Second actuation module
471...第二定子471. . . Second stator
472...第二動子472. . . Second mover
48...第三致動模組48. . . Third actuation module
481...第三定子481. . . Third stator
482...第三動子482. . . Third mover
50...機座50. . . Machine base
501...機柱501. . . Machine column
51...工作台51. . . Workbench
52...第一驅動模組52. . . First drive module
53...第二驅動模組53. . . Second drive module
54...第三驅動模組54. . . Third drive module
541...升降座541. . . Lifting seat
60...工件60. . . Workpiece
70...刀具70. . . Tool
第1圖:習用加工機之結構示意圖。Figure 1: Schematic diagram of the structure of the conventional processing machine.
第2圖:本發明主軸裝置之結構示意圖(一)。Figure 2: Schematic diagram of the structure of the spindle device of the present invention (1).
第3圖:本發明主軸裝置之結構示意圖(二)。Figure 3: Schematic diagram of the structure of the spindle device of the present invention (2).
第4圖:本發明主軸裝置之結構示意圖(三)。Figure 4: Schematic diagram of the structure of the spindle device of the present invention (3).
第5圖:本發明主軸裝置之結構示意圖(四)。Figure 5: Schematic diagram of the structure of the spindle device of the present invention (4).
第6圖:本發明主軸裝置與工具機搭配組裝之示意圖。Figure 6 is a schematic view showing the assembly of the spindle device and the machine tool of the present invention.
第7圖:本發明進行加工作業之動作示意圖(一)。Figure 7: Schematic diagram of the operation of the present invention for processing operations (1).
第8圖:本發明進行加工作業之動作示意圖(二)。Figure 8: Schematic diagram of the operation of the present invention for processing operations (2).
40...主軸裝置40. . . Spindle device
41...主軸頭41. . . Spindle head
42...第一滑移模組42. . . First slip module
421...第一連結座421. . . First link
422...導軌422. . . guide
423...第一移動座423. . . First mobile seat
424...導槽424. . . Guide slot
43...第二滑移模組43. . . Second slip module
431...第二連結座431. . . Second link
432...導軌432. . . guide
433...第二移動座433. . . Second mobile seat
434...導槽434. . . Guide slot
44...第三滑移模組44. . . Third slip module
441...第三連結座441. . . Third link
442...導軌442. . . guide
443...第三移動座443. . . Third mobile seat
444...導槽444. . . Guide slot
45...組接件45. . . Group connector
46...第一致動模組46. . . First motion module
47...第二致動模組47. . . Second actuation module
48...第三致動模組48. . . Third actuation module
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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TW100143318A TW201321125A (en) | 2011-11-25 | 2011-11-25 | High-frequency oscillation spindle device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW100143318A TW201321125A (en) | 2011-11-25 | 2011-11-25 | High-frequency oscillation spindle device |
Publications (2)
Publication Number | Publication Date |
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TW201321125A true TW201321125A (en) | 2013-06-01 |
TWI450791B TWI450791B (en) | 2014-09-01 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW100143318A TW201321125A (en) | 2011-11-25 | 2011-11-25 | High-frequency oscillation spindle device |
Country Status (1)
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TW (1) | TW201321125A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI697379B (en) * | 2015-09-24 | 2020-07-01 | 日商西鐵城時計股份有限公司 | Control device of machine tool and machine tool provided with the control device |
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TWI259788B (en) * | 2004-11-23 | 2006-08-11 | Univ Nat Taipei Technology | Revolving ultrasonic automatic drilling device and automatic machining process thereof |
JP2006255506A (en) * | 2005-03-15 | 2006-09-28 | Fujitsu Ltd | Oscillator |
TW200900196A (en) * | 2007-06-29 | 2009-01-01 | Chen Yong Min | CNC machine tool having a sliding member movable at a high speed |
TW200948520A (en) * | 2008-05-16 | 2009-12-01 | Univ Nat Formosa | Combined device of ultrasonic welding and spin welding |
TW201036735A (en) * | 2009-04-14 | 2010-10-16 | lu-jia Liao | Glass processing equipment and processing method |
TW201121702A (en) * | 2009-12-30 | 2011-07-01 | Univ Nat Formosa | Two stage type long stroke nano-scale precision positioning system. |
TWI385048B (en) * | 2009-12-31 | 2013-02-11 | Metal Ind Res & Dev Ct | Composite processing apparatus |
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