CN112129234A - Be used for jumbo size wafer thickness testing platform - Google Patents
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- CN112129234A CN112129234A CN201910553310.9A CN201910553310A CN112129234A CN 112129234 A CN112129234 A CN 112129234A CN 201910553310 A CN201910553310 A CN 201910553310A CN 112129234 A CN112129234 A CN 112129234A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
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Abstract
The invention provides a large-size wafer thickness detection platform, which comprises a marble base; a pair of Y-direction marble guide rail and Y-direction marble guide rail which are arranged in parallel are installed on the marble base, a Y-direction sliding block and a Y-direction sliding block are respectively arranged on the Y-direction marble guide rail and the Y-direction marble guide rail, Y-direction motor stator connecting pieces and Y-direction motor stator connecting pieces are arranged on the outer side faces of the Y-direction marble guide rail and the Y-direction marble guide rail, Y-direction grating reading devices are arranged on the Y-direction sliding block and the Y-direction sliding block, and the Y-direction sliding block are connected through a. The objective table is designed in a hollow way, and the Y axis adopts Y1/Y2 bidirectional inverted U-shaped air flotation double-drive design, so that the integral inherent frequency of the platform can be improved, the processing and debugging difficulty is reduced, and the X-direction precision and the movement speed are ensured; the jumping of the carrying surface is within 1 micron, so that the detection requirements of increasing and stricter industry sizes are met; the air floatation platform is simple to maintain and does not pollute a clean room.
Description
Technical Field
The invention mainly relates to the field of wafer detection, in particular to a large-size wafer thickness detection platform.
Background
The motion platform that present is used for detection such as wafer thickness, two-sided flaw is a mechanical guide rail cavity platform, and the platform receives mechanical guide rail precision and part machining precision restriction, and it can only accomplish to carry the object plane to beat several microns greatly, and installs loaded down with trivial details, in addition, because of the mechanical guide rail is the contact guide rail, easily produces the granule, inconveniently is used for the higher occasion of clean grade requirement.
At present, a hollow air floating platform for detecting the thickness of a wafer, double-sided defects and the like is small in hollow diameter due to the limitation of air floating structure design, part processing precision and installation and debugging precision, and mainly focuses on small-size related detection.
A new patent of the invention in china has been disclosed, with the application number cn201310656750.x, the patent name: an apparatus and method for wafer surface defect detection, the application date: 2013-12-06, the present invention relates to the field of semiconductor manufacturing equipment, and more particularly, to an apparatus and method for wafer surface defect detection, the apparatus including a main body portion and a control unit for controlling the main body portion, the main body portion including: the motion platform is provided with an X axis and a Y axis, the X axis and the Y axis define a motion plane, and the Y axis can be used for bearing the wafer; a first Z axis mounted on the X axis and vertically movable with respect to the movement plane; the linear array camera is arranged on the first Z axis, is focused through the first Z axis and is used for detecting the defects on the surface of the wafer; the first light source is used for assisting the linear array camera to acquire images; a second Z axis mounted on the X axis and vertically movable with respect to the movement plane; the area array camera is arranged on the second Z axis, focuses through the second Z axis and is used for rechecking the defects on the surface of the wafer; and the second light source is used for assisting the area array camera to acquire images. The invention can improve the efficiency and quality of surface flaw detection.
Disclosure of Invention
The invention provides a large-size wafer thickness detection platform, aiming at the defects in the prior art, and providing a platform for detecting the thickness of a large-size wafer with the requirement of the jump of a carrying plane within 1 micron, double-sided defects and the like, wherein the platform comprises a marble base (1), a Y1 directional marble guide rail (4), a Y2 directional marble guide rail (17), a Y directional grating reading device and an X directional grating reading device;
a pair of parallel Y1-direction marble guide rail (4) and Y2-direction marble guide rail (17) are installed on the marble base (1), Y1-direction marble guide rail (4) and Y2-direction marble guide rail (17) are respectively provided with Y1-direction slider and Y2-direction slider, the outer side surface is provided with Y1-direction motor stator connecting piece (2) and Y2-direction motor stator connecting piece (15), Y1-direction slider and Y2-direction slider are both provided with Y-direction grating reading devices,
the Y-1 directional sliding block and the Y-2 directional sliding block are connected through a Y-directional beam piece (1310) to form a Y-directional integral sliding block, the Y-1 directional sliding block and the Y-2 directional sliding block are respectively connected with a Y-1 directional motor rotor (18) and a Y-2 directional motor rotor (19), the Y-1 directional motor stator connecting piece (2) is arranged below the Y-1 directional motor rotor (18) and is connected with a Y-1 directional motor stator (3), the Y-2 directional motor stator connecting piece (15) is arranged below the Y-2 directional motor rotor (19) and is connected with a Y-2 directional motor stator (16),
a pair of X1-direction guide rails (1309) and X2-direction guide rails (1304) which are arranged in parallel are arranged below the Y-direction beam piece (1310) to form an X-direction guide rail, an X-direction grating reading device is further arranged on the Y-direction beam piece (1310), and an X-axis sliding block is arranged on the X-direction guide rail;
marble beams (7) are erected on two sides of the marble base (1) through a left upright post (14) and a right upright post (5), a Z-axis platform (11) is installed on each marble beam (7) through a Z-axis platform connecting piece (12), an upper spectrum confocal sensor (9) is vertically installed on each Z-axis platform (11) through an upper sensor clamping adjusting piece (10), and a lower spectrum confocal sensor (8) is arranged below the upper spectrum confocal sensor (9) in a non-contact manner;
the upper spectrum confocal sensor (9) and the lower spectrum confocal sensor (8) are coincided with the vertical central line of the hollow X-axis sliding block.
Preferably, air floatation acting surfaces are adopted on the top surface and two vertical side surfaces of the Y1 marble guide rail (4) and the Y2 marble guide rail (17).
Preferably, the Y1 directional slider consists of a pair of Y1 directional slider air-bearing 1 guide (1301) and Y1 directional slider air-bearing 2 guide (1302) which are vertically arranged in parallel, and a Y1 directional slider 3 air-bearing member (1303) which is arranged above the Y1 directional slider, and the Y2 directional slider consists of a pair of Y2 directional slider 1 air-bearing member (1307) and Y1 directional slider 2 air-bearing member (1308) which are vertically arranged in parallel, and a Y2 directional slider 3 air-bearing member (1306) which is arranged above the Y2 directional slider 1 air-bearing member and the Y1 directional slider 2 air-bearing member.
Preferably, Y1 is preloaded to the slider air-bearing 1 guide (1301) and Y1 is preloaded to the air-bearing 2 guide (1302) by positive pressure, Y1 is loaded to the slider 3 air-bearing (1303) and vacuum preloading is adopted; y2 is towards slider 1 air supporting (1307) and Y1 is towards slider 2 air supporting (1308), and Y2 on it is towards slider 3 air supporting and adopting vacuum preloading for slider 1306.
Preferably, the Y-direction grating reading device comprises a Y1-direction grating scale (23), a Y2-direction grating (20), a Y1-direction reading head (22) and a Y2-direction reading head (21), wherein the Y1-direction grating scale (23) and the Y2-direction grating (20) are respectively installed on an L-shaped part of the marble base (1), the Y1-direction reading head (22) is installed on the Y1-direction slider 3 air floating piece (1303), and the Y2-direction reading head (21) is installed on the Y2-direction slider 3 air floating piece (1306).
Preferably, the X-axis slider comprises an X-direction slider 1 air floating piece (603), an X-direction slider 2 air floating piece (605) and an X-direction carrying piece (604), the X-direction slider 1 air floating piece (603) and the X-direction slider 2 air floating piece (605) are connected through the X-direction carrying piece (604) to form the X-axis slider, and the X-direction carrying piece (604) is connected with an X1 direction motor mover (602), an X1 direction motor stator (1311), an X2 direction motor mover (601) and an X2 direction motor stator (1305), so that X-direction air floating double drive is realized.
Preferably, the X-direction grating reading device comprises an X1-direction grating scale (1313), an X2-direction grating scale (1312), an X1-direction reading head (607) and an X2-direction reading head (606), wherein the X1-direction grating scale (1313) and the X2-direction grating scale (1312) are installed on two sides of the Y-direction beam piece (1310), the X1-direction reading head (607) is installed on the X-direction slider 1 air floating piece (603), and the X2-direction reading head (606) is installed on the X-direction slider 2 air floating piece (605).
Preferably, the air floating piece (603) of the X-direction sliding block 1 and the air floating piece (605) of the X-direction sliding block 2 both adopt an L-shaped air floating structure form, the side surface of the air floating piece adopts a vacuum preloading type air floating design, and the bottom surface of the air floating piece also adopts a vacuum preloading type air floating design.
The invention has the beneficial effects that: the objective table is designed in a hollow mode, the Y axis is designed in a Y1/Y2 bidirectional inverted U-shaped air flotation double-drive mode, the integral inherent frequency of the platform can be improved, the Y-shaped cross beam and the X-direction guide rail structure are designed, the processing and debugging difficulty is reduced, and the X-direction precision and the movement speed are guaranteed; the jumping of the carrying surface is within 1 micron, so that the detection requirements of increasing and stricter industry sizes are met; the air floatation platform is simple to maintain and does not pollute a clean room.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a front view of the general structure of the present invention;
FIG. 3 is a schematic view of the overall structure of the Y-axis slider according to the present invention;
FIG. 4 is a front view of the overall structure of the Y-axis slider of the present invention;
FIG. 5 is a schematic view of the overall structure of the X-axis slider according to the present invention;
in the figure, the position of the upper end of the main shaft,
1. a marble base; 2. y1 motor stator connection; 3. y1 to the motor stator; 4. y1 marble guide; 5. a right upright post; 6. an X-direction slider assembly; 7. a marble beam; 8. a lower spectral confocal sensor; 9. an upper spectral confocal sensor; 10. the upper sensor clamps the adjusting piece; 11. a Z-axis platform; 12. a Z-axis platform connection; 13. a Y-direction slider assembly; 14. a left upright post; 15. y2 motor stator connection; 16. y2 to the motor stator; 17. y2 marble guide; 18. y1 directional motor rotor; 19. y2 directional motor rotor;
20. y2 directional grating; 21. y2 to the reading head; 22. y1 to the reading head; 23. y1 directional grating ruler;
1301. y1 guide the slider air bearing 1; 1302. y1 is guided to the air float 2; 1303. y1 air float towards the slider 3;
1304. x2 to the guide rail; 1305. x2 to the motor stator; 1306. y2 air float towards the slider 3;
1307. y2 is towards the slider 1 air float;
1308. y1 air float towards the slider 2; 1309. x1 to the guide rail; 1310. a Y-direction beam member;
1311. x1 to the motor stator;
1312. an X2 directional grating ruler; 1313. x1 directional grating ruler
601. An X2 directional motor rotor; 602. an X1 directional motor rotor; 603. an X-direction slider 1 air-floating piece; 604. an X-direction carrying piece; 605. an X-direction slide block 2 air floating piece; 606. x2 directional read head; 607. x1 toward the read head.
Detailed Description
As shown in fig. 1 to 5, the present invention includes: the device comprises a marble base (1), a Y1 marble guide rail (4), a Y2 marble guide rail (17), a Y grating reading device and an X grating reading device;
a pair of parallel Y1-direction marble guide rail (4) and Y2-direction marble guide rail (17) are installed on the marble base (1), Y1-direction marble guide rail (4) and Y2-direction marble guide rail (17) are respectively provided with Y1-direction slider and Y2-direction slider, the outer side surface is provided with Y1-direction motor stator connecting piece (2) and Y2-direction motor stator connecting piece (15), Y1-direction slider and Y2-direction slider are both provided with Y-direction grating reading devices,
the Y-1 directional sliding block and the Y-2 directional sliding block are connected through a Y-directional beam piece (1310) to form a Y-directional integral sliding block, the Y-1 directional sliding block and the Y-2 directional sliding block are respectively connected with a Y-1 directional motor rotor (18) and a Y-2 directional motor rotor (19), the Y-1 directional motor stator connecting piece (2) is arranged below the Y-1 directional motor rotor (18) and is connected with a Y-1 directional motor stator (3), the Y-2 directional motor stator connecting piece (15) is arranged below the Y-2 directional motor rotor (19) and is connected with a Y-2 directional motor stator (16),
a pair of X1-direction guide rails (1309) and X2-direction guide rails (1304) which are arranged in parallel are arranged below the Y-direction beam piece (1310) to form an X-direction guide rail, an X-direction grating reading device is further arranged on the Y-direction beam piece (1310), and an X-axis sliding block is arranged on the X-direction guide rail;
marble beams (7) are erected on two sides of the marble base (1) through a left upright post (14) and a right upright post (5), a Z-axis platform (11) is installed on each marble beam (7) through a Z-axis platform connecting piece (12), an upper spectrum confocal sensor (9) is vertically installed on each Z-axis platform (11) through an upper sensor clamping adjusting piece (10), and a lower spectrum confocal sensor (8) is arranged below the upper spectrum confocal sensor (9) in a non-contact manner;
the upper spectrum confocal sensor (9) and the lower spectrum confocal sensor (8) are coincided with the vertical central line of the hollow X-axis sliding block.
In use:
(1) the marble base is provided with a Y1/Y2 directional marble guide rail, and the upper surface and two sides of the marble air-floating guide rail are air-floating acting surfaces. The Y-axis slide block component Y1/Y2 upward air floating piece is respectively connected with a Y1/Y2 directional motor rotor, and Y1/Y2 directional motor rotor is transversely arranged on the base marble through a connecting piece to form a Y-axis double-n air floating guide double-drive mechanism;
(2) the Y-direction beam is hollow in structure, and an X1/X2-direction guide rail is arranged below the Y-direction beam to form an integral X-direction guide rail, so that the split machining, the integral machining grinding, the installation and the debugging are facilitated, and the X-axis precision is ensured;
(3) the Y-axis material can adopt aluminum alloy or ceramic components;
(4) the XY-direction sliding table is of a hollow structure, and allows the upper and lower non-contact type spectrum confocal sensors to perform related detection on wafer thickness, defects and the like; the upper spectrum confocal sensor is arranged on the Z-axis sliding table through the clamping adjusting piece, and the Z-axis connecting piece is arranged on the cross beam, so that the upper, lower, left, right, front and back adjustment of the upper spectrum confocal sensor can be realized.
In the implementation, preferably, air floatation acting surfaces are adopted on the top surface and two vertical side surfaces of the Y1 marble guide rail (4) and the Y2 marble guide rail (17).
The Y-axis slide block component Y1/Y2 upward air floating piece is respectively connected with the Y1/Y2 directional motor rotor, and the Y1/Y2 directional motor rotor is transversely arranged on the base marble through a connecting piece to form a Y-axis double-n air floating guide double-drive mechanism.
In this embodiment, the Y1 directional slider is preferably composed of a pair of vertically parallel Y1 directional slider air bearing 1 guide (1301) and Y1 directional slider air bearing 2 guide (1302), and a pair of vertically parallel Y1 directional slider 3 air bearing (1303) disposed above the two, and the Y2 directional slider is preferably composed of a pair of vertically parallel Y2 directional slider 1 air bearing (1307) and Y1 directional slider 2 air bearing (1308), and a pair of vertically parallel Y2 directional slider 3 air bearing (1306).
In the implementation, preferably, the Y1 is preloaded to the slider air-bearing 1 guide (1301) and the Y1 is preloaded to the air-bearing 2 guide (1302) in a positive pressure mode, and Y1 is loaded to the slider 3 air-bearing element (1303) and is preloaded in a vacuum mode; y2 is towards slider 1 air supporting (1307) and Y1 is towards slider 2 air supporting (1308), and Y2 on it is towards slider 3 air supporting and adopting vacuum preloading for slider 1306.
In this implementation, the Y-direction grating reading device preferably includes a Y1-direction grating scale (23), a Y2-direction grating (20), a Y1-direction reading head (22), and a Y2-direction reading head (21), the Y1-direction grating scale (23) and the Y2-direction grating (20) are respectively mounted on an L-shaped member of the marble base (1), the Y1-direction reading head (22) is mounted on the Y1-direction slider 3 air-floating member (1303), and the Y2-direction reading head (21) is mounted on the Y2-direction slider 3 air-floating member (1306).
In use, the Y1/Y2 directional gratings are mounted on the L-shaped pieces on two sides of the theory respectively. The Y1/Y2 directional reading heads are respectively arranged on the upper air-floating pieces of the Y1/Y2 directional inverted U slider.
In this embodiment, the X-axis slider preferably includes an X-direction slider 1 air-floating member (603), an X-direction slider 2 air-floating member (605), and an X-direction carrying member (604), the X-direction slider 1 air-floating member (603) and the X-direction slider 2 air-floating member (605) are connected by the X-direction carrying member (604) to form the X-axis slider, and the X-direction carrying member (604) is connected with an X1-direction motor mover (602), an X1-direction motor stator (1311), an X2-direction motor mover (601) and an X2-direction motor stator (1305), thereby realizing X-direction air-floating dual drive.
The Y-direction beam is hollow in structure, an X1/X2-direction guide rail is arranged below the Y-direction beam, two directions of X1/X2 adopt L-shaped air floating pieces, the side surface of each air floating piece adopts a vacuum preloading type air floating design, and the bottom surface of each air floating piece also adopts a vacuum preloading type air floating design; the two similar L-shaped air floating pieces are connected through the load piece to form an X-direction air floating slide block, and the load piece is connected with the X1 and the X2-direction motor rotor, so that X-direction air floating double drive is realized, split machining, integral machining, grinding and installation and debugging are facilitated, and the X-axis precision is ensured.
In this implementation, preferably, the X-direction grating reading device includes an X1-direction grating scale (1313), an X2-direction grating scale (1312), an X1-direction reading head (607) and an X2-direction reading head (606), the X1-direction grating scale (1313) and the X2-direction grating scale (1312) are installed on two sides of the Y-direction beam member (1310), the X1-direction reading head (607) is installed on the X-direction slider 1 air floating member (603), and the X2-direction reading head (606) is installed on the X-direction slider 2 air floating member (605).
In use, the X1/X2 directional grating scales are respectively and directly arranged on two sides of the Y beam, and the X1/X2 directional reading heads are respectively arranged on the X1/X2 directional air floating pieces.
In this embodiment, the X-direction slider 1 air-floating member (603) and the X-direction slider 2 air-floating member (605) are preferably both designed as an L-shaped air-floating structure, and the side surface thereof is designed as a vacuum pre-loading air-floating member, and the bottom surface thereof is also designed as a vacuum pre-loading air-floating member.
According to the embodiment, the Y axis adopts the design of two inverted U-shaped air-floating slide blocks, the structural design form of the Y axis beam and the X axis bidirectional guide rail can be divided into processing and whole grinding, the processing and debugging difficulty degree of the air-floating pieces greatly reduced by the Y axis beam and the X axis beam is ensured, and the hollow object carrying surface is guaranteed to jump in 1um in the whole motion plane. And the air floatation parts are all processed by adopting integrated air floatation, so that the cost is greatly reduced compared with that of a full air cushion type air floatation machine.
The above-described embodiments are merely illustrative of the principles and utilities of the present patent application and are not intended to limit the present patent application. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of this patent application. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical concepts disclosed in the present application shall be covered by the claims of this patent application.
Claims (8)
1. A thickness detection platform for large-size wafers is characterized by comprising a marble base (1), a Y1-direction marble guide rail (4), a Y2-direction marble guide rail (17), a Y-direction grating reading device and an X-direction grating reading device; a pair of parallel Y1-direction marble guide rail (4) and Y2-direction marble guide rail (17) are installed on the marble base (1), Y1-direction marble guide rail (4) and Y2-direction marble guide rail (17) are respectively provided with Y1-direction slider and Y2-direction slider, the outer side surface is provided with Y1-direction motor stator connecting piece (2) and Y2-direction motor stator connecting piece (15), Y1-direction slider and Y2-direction slider are both provided with Y-direction grating reading devices,
the Y-direction slider 1 and the Y-direction slider 2 are connected through a Y-direction beam piece (1310) to form a Y-direction integral slider, the Y-1-direction slider and the Y-2-direction slider are respectively connected with a Y1-direction motor rotor (18) and a Y2-direction motor rotor (19) on the outer side faces, the Y1-direction motor stator connecting piece (2) is arranged below the Y1-direction motor rotor (18) and is connected with a Y1-direction motor stator (3), and the Y2-direction motor stator connecting piece (15) is arranged below the Y2-direction motor rotor (19) and is connected with a Y2-direction motor stator (16); a pair of X1-direction guide rails (1309) and X2-direction guide rails (1304) which are arranged in parallel are arranged below the Y-direction beam piece (1310) to form an X-direction guide rail, an X-direction grating reading device is further arranged on the Y-direction beam piece (1310), and an X-axis sliding block is arranged on the X-direction guide rail;
marble beams (7) are erected on two sides of the marble base (1) through a left upright post (14) and a right upright post (5), a Z-axis platform (11) is installed on each marble beam (7) through a Z-axis platform connecting piece (12), an upper spectrum confocal sensor (9) is vertically installed on each Z-axis platform (11) through an upper sensor clamping adjusting piece (10), and a lower spectrum confocal sensor (8) is arranged below the upper spectrum confocal sensor (9) in a non-contact manner;
the upper spectrum confocal sensor (9) and the lower spectrum confocal sensor (8) are coincided with the vertical central line of the hollow X-axis sliding block.
2. The platen of claim 1, wherein: the top surface and the vertical two side surfaces of the Y1 marble guide rail (4) and the Y2 marble guide rail (17) are respectively provided with an air floatation acting surface.
3. The platen of claim 2, wherein: the Y1 directional slider consists of a pair of Y1 directional slider air-bearing 1 guide (1301) and Y1 directional slider air-bearing 2 guide (1302) which are vertically arranged in parallel, and a Y1 directional slider 3 air-bearing member (1303) which is arranged above the Y1 directional slider air-bearing 1 guide and the Y1 directional slider air-bearing 2 guide, the Y2 directional slider consists of a pair of Y2 directional slider 1 air-bearing member (1307) and Y1 directional slider 2 air-bearing member (1308) which are vertically arranged in parallel, and a Y2 directional slider 3 air-bearing member (1306) which is arranged above the Y2 directional slider 1 air-bearing member and.
4. The platen of claim 3, wherein: the Y1 is preloaded to the slider air-bearing 1 guide piece (1301) and the Y1 is preloaded to the air-bearing 2 guide piece (1302) in a positive pressure mode, and the Y1 is loaded to the slider 3 air-bearing piece (1303) and is preloaded in a vacuum mode; y2 is towards slider 1 air supporting (1307) and Y1 is towards slider 2 air supporting (1308), and Y2 on it is towards slider 3 air supporting and adopting vacuum preloading for slider 1306.
5. The platen of claim 4, wherein: the Y-direction grating reading device comprises a Y1-direction grating scale (23), a Y2-direction grating (20), a Y1-direction reading head (22) and a Y2-direction reading head (21), wherein the Y1-direction grating scale (23) and the Y2-direction grating (20) are respectively installed on an L-shaped part of a marble base (1), the Y1-direction reading head (22) is installed on a Y1-direction slider 3 air floating part (1303), and the Y2-direction reading head (21) is installed on a Y2-direction slider 3 air floating part (1306).
6. The platen of claim 5, wherein: the X-axis slider comprises an X-direction slider 1 air floating piece (603), an X-direction slider 2 air floating piece (605) and an X-direction carrying object (604), the X-direction slider 1 air floating piece (603) and the X-direction slider 2 air floating piece (605) are connected through the X-direction carrying object (604) to form the X-axis slider, and the X-direction carrying object (604) is connected with an X1 direction motor rotor (602), an X1 direction motor stator (1311), an X2 direction motor rotor (601) and an X2 direction motor stator (1305), so that X-direction air floating double drive is realized.
7. The platen of claim 6, wherein: the X-direction grating reading device comprises an X1-direction grating scale (1313), an X2-direction grating scale (1312), an X1-direction reading head (607) and an X2-direction reading head (606), wherein the X1-direction grating scale (1313) and the X2-direction grating scale (1312) are arranged on two sides of a Y-direction beam piece (1310), the X1-direction reading head (607) is arranged on an X-direction slider 1 air floating piece (603), and the X2-direction reading head (606) is arranged on an X-direction slider 2 air floating piece (605).
8. The platen of claim 7, wherein: the X-direction slider 1 air floating piece (603) and the X-direction slider 2 air floating piece (605) both adopt an L-shaped air floating structure, the side surface of the X-direction slider adopts a vacuum preloading type air floating design, and the bottom surface of the X-direction slider adopts a vacuum preloading type air floating design.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910553310.9A CN112129234A (en) | 2019-06-25 | 2019-06-25 | Be used for jumbo size wafer thickness testing platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910553310.9A CN112129234A (en) | 2019-06-25 | 2019-06-25 | Be used for jumbo size wafer thickness testing platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112129234A true CN112129234A (en) | 2020-12-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910553310.9A Pending CN112129234A (en) | 2019-06-25 | 2019-06-25 | Be used for jumbo size wafer thickness testing platform |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116086330A (en) * | 2023-02-17 | 2023-05-09 | 无锡星微科技有限公司 | Thickness detection platform for large-size wafer |
| CN116968199A (en) * | 2023-09-25 | 2023-10-31 | 无锡星微科技有限公司杭州分公司 | Air-floating rotary table for wafer cutting |
| CN117074739A (en) * | 2023-10-18 | 2023-11-17 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
-
2019
- 2019-06-25 CN CN201910553310.9A patent/CN112129234A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116086330A (en) * | 2023-02-17 | 2023-05-09 | 无锡星微科技有限公司 | Thickness detection platform for large-size wafer |
| CN116086330B (en) * | 2023-02-17 | 2024-01-12 | 无锡星微科技有限公司 | Thickness detection platform for large-size wafer |
| CN116968199A (en) * | 2023-09-25 | 2023-10-31 | 无锡星微科技有限公司杭州分公司 | Air-floating rotary table for wafer cutting |
| CN116968199B (en) * | 2023-09-25 | 2023-12-22 | 无锡星微科技有限公司杭州分公司 | Air-floating rotary table for wafer cutting |
| CN117074739A (en) * | 2023-10-18 | 2023-11-17 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
| CN117074739B (en) * | 2023-10-18 | 2024-01-30 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
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