CN103507063A - 6-SPS type micro-motion parallel robot on the basis of piezoelectric ceramic drive - Google Patents
6-SPS type micro-motion parallel robot on the basis of piezoelectric ceramic drive Download PDFInfo
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Abstract
The invention discloses a 6-SPS type micro-motion parallel robot on the basis of piezoelectric ceramic drive. The 6-SPS type micro-motion parallel robot on the basis of piezoelectric ceramic drive comprises a workbench, a base, a workbench bottom cover, a base cover and six branch chains, wherein the workbench and the base are arranged in a parallel mode, the workbench bottom cover is arranged at the bottom of the workbench, the base cover is arranged on the top of the base, the branch chains are arranged on the workbench bottom cover and the base cover in a parallel connection mode, six inclined blocks are fixedly arranged in the workbench bottom cover, six inclined blocks are fixedly arranged in the base cover, each branch chain comprises a piezoelectric ceramic linkage rod, an upper portion flexible hinge and a lower portion flexible hinge, each upper portion flexible hinge and each lower portion flexible hinge are arranged at the upper end and the lower end of each piezoelectric ceramic linkage rod respectively, and the six piezoelectric ceramic linkage rods are electrically connected with piezoelectric ceramic displacement actuators respectively. According to the 6-SPS type micro-motion parallel robot on the basis of piezoelectric ceramic drive, the precision machinery technology, the driving technology and the measurement feedback technology are combined into a whole, the design of integration among mechanisms, drive and detection is achieved, the 6-SPS type micro-motion parallel robot on the basis of piezoelectric ceramic drive has the advantages of being small in size, compact in structure, high in rigidity, high in frequency response and the like, and nano-scale locating accuracy can be achieved.
Description
Technical field
The present invention relates to micro-actuation techniques and parallel robot technical field, particularly relate to a kind of 6-SPS type Microrobot based on Piezoelectric Ceramic.
Background technology
Micro-positioning and parallel moving mechanism are current scientific research and the new focus of engineering application.Micro-actuation techniques is intersected and has been become a heat subject in conjunction with the Microrobot producing with parallel robot technology, at present about the research and development of Microrobot with apply increasingly extensive, the field of application is also in continuous expansion, and the application of Microrobot mainly concentrates on the fields such as space, vibration isolation, medical treatment, optics, industry.
In prior art, as University On The Mountain Of Swallows has developed a kind of isotropic six-freedom micro displacement parallel robot (patent No.: CN202428438U), this robot is by being placed on the Piezoelectric Ceramic at parallel-plate compliant translational joint frame structure middle part, by push rod displacement enlargement, displacement is passed to parallel-plate compliant translational joint, realize the movement of workbench, though this jiggle robot has good displacement decoupling, complex structure.Beijing Institute of Technology develops a kind of 3-PPTTRS six freedom degree parallel precise jiggle robot (patent No.: CN1788942A), although this invention has working space in a big way, but owing to containing static-pressure screw nut mechanism in this robot system, in motion process, inevitably there is drive gap, affect transmission accuracy, ，Gai robot also has hydraulic oil supply unit in addition, make whole jiggle robot volume larger, having limited it has the use of requirement occasion in some sizes.Harbin Institute of Technology develops a kind of three-branch chain six-freedom degree parallel flexible hinge micromotion mechanism (patent No.: CN1962209A), from space structure, this robot belongs to 6-PSS type Microrobot, piezoelectric ceramics is arranged on base, the output of piezoelectric ceramics is delivered on the Connection Block being attached thereto through elastic parallel plate, then the supporting rod of two ends band flexible hinge couples together Connection Block and upper mounting plate again, this mechanism form transmission chain length, error component is many, and base is larger, processing difficulties.
Therefore,, for above-mentioned technical problem, be necessary to provide a kind of 6-SPS type Microrobot based on Piezoelectric Ceramic.
Summary of the invention
In view of this, the object of the present invention is to provide a kind of 6-SPS type Microrobot based on Piezoelectric Ceramic, it has, and volume is little, compact conformation, rigidity large, frequency response advantages of higher, and can realize nano level positioning precision.
To achieve these goals, the technical scheme that the embodiment of the present invention provides is as follows:
A kind of 6-SPS type Microrobot based on Piezoelectric Ceramic, comprise the workbench and the base that be arranged in parallel, be arranged at the workbench bottom of workbench below, be arranged at the base cover of base top, and be arranged at six side chains that are arranged in parallel in workbench bottom and base cover, in described workbench bottom and base cover, be fixed with respectively six skewbacks, on workbench bottom, in the lower surface of skewback and base cover, the upper surface of skewback is corresponding tilt setting one by one, described side chain comprises piezoelectric ceramics gangbar and is located at respectively top flexible hinge and the lower flexible hinge at the upper and lower two ends of piezoelectric ceramics gangbar, skewback fixed installation on described top flexible hinge and workbench bottom, skewback fixed installation in lower flexible hinge and base cover, in described six piezoelectric ceramics gangbar, be electrically connected with respectively piezoelectric ceramics displacement driver.
As a further improvement on the present invention, the second installation portion that described top flexible hinge and lower flexible hinge comprise respectively corresponding the first main part and the second main part arranging, be fixedly connected on the connecting portion of the first main part and the second main part central authorities, be arranged at the first installation portion of middle position outside the first main part and be arranged at middle position outside the second main part, described the first installation portion and skewback fixed installation, the second installation portion and the fixed installation of piezoelectric ceramics gangbar.
As a further improvement on the present invention, described top flexible hinge and lower flexible hinge are spherical pair flexible hinge, the cross section of described connecting portion is circular, and cross section reduces gradually from two ends to middle radius, and the vertical section of connecting portion is the rounded settings that cave inward in both sides.
As a further improvement on the present invention, the least radius of described cross section is 0.5mm, and the circular radius that vertical section caves inward is 1mm.
As a further improvement on the present invention, the length that on described lower flexible hinge, the length of the first installation portion is longer than the first installation portion on the flexible hinge of top.
As a further improvement on the present invention, between described lower flexible hinge and skewback, be provided with the adjustment pad on sheathed and the first installation portion.
As a further improvement on the present invention, described piezoelectric ceramics gangbar comprises pedestal, is located at sleeve pipe on pedestal, is located at pretension head and connector on sleeve pipe, is located at the piezoelectric ceramics in sleeve pipe and is located at the filler between piezoelectric ceramics and pretension head in sleeve pipe.
As a further improvement on the present invention, described base cover is provided with some for the socket with outside piezoelectric ceramics displacement driver electric connection, and described socket is electrically connected by electric wire and described piezoelectric ceramics.
As a further improvement on the present invention, the material of described top flexible hinge and lower flexible hinge is nylon.
As a further improvement on the present invention, on described workbench, displacement measurement module is installed.
The 6-SPS type Microrobot that the present invention is based on Piezoelectric Ceramic integrates precision optical machinery, driving and measurement feedback technique, mechanism, driving, the integrated design of detection have been realized, have that volume is little, compact conformation, rigidity are large, frequency response advantages of higher, and can realize nano level positioning precision.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, the accompanying drawing the following describes is only some embodiment that record in the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the perspective view of 6-SPS type Microrobot in an embodiment of the present invention;
Fig. 2 a, 2b are respectively side view and the front view of an embodiment of the present invention middle and upper part flexible hinge;
Fig. 3 a, 3b are respectively side view and the front view of an embodiment of the present invention middle and lower part flexible hinge;
Fig. 4 is flexible hinge modeling parameters figure;
Fig. 5 is the structural representation of piezoelectric ceramics gangbar in an embodiment of the present invention;
Fig. 6 is side chain assembly structural representation in an embodiment of the present invention;
Fig. 7 is skewback structural representation in an embodiment of the present invention;
Fig. 8 is the assembly structure schematic diagram of 6-SPS type Microrobot in an embodiment of the present invention.
The specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Embodiment based in the present invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, should belong to the scope of protection of the invention.
In order to realize precision optical machinery, driving and measurement feedback technique in one, realize mechanism, driving, that the integrated design of detection ，Shi robot has error component is few, integrated level is high, micrometric displacement detecting reliability and precision are good, and compact conformation is processed the advantages such as easy for installation.The present invention proposes a kind of employing closed loop Piezoelectric Ceramic, and piezoelectric ceramics, not only as driving element but also as supporting rod, completes the 6-SPS type Microrobot based on Piezoelectric Ceramic of measuring ability simultaneously.
Shown in ginseng Fig. 1, this 6-SPS type Microrobot by workbench 1, workbench bottom 2, skewback 3, top flexible hinge 4, piezoelectric ceramics gangbar 5, lower flexible hinge 6, adjust pad 7, base cover 8, socket 9, base 10 totally 10 parts form.
In the present invention 6-SPS type Microrobot comprise workbench 1 and the base 10, the workbench bottom 2 that is arranged at workbench 1 below that be arranged in parallel, be arranged at the base cover 8 of base 10 tops and be arranged at workbench bottom 2 and base cover 8 on six side chains that are arranged in parallel, workbench bottom 2 and base cover 8 be interior is fixed with respectively six skewbacks 3, and on workbench bottom 2, in the lower surface of skewback and base cover 8, the upper surface of skewback is corresponding tilt setting one by one.Wherein side chain comprises piezoelectric ceramics gangbar 5 and is located at respectively top flexible hinge 4 and the lower flexible hinge 6 at the upper and lower two ends of piezoelectric ceramics gangbar, top flexible hinge 4 fixedly mounts with the skewback 3 on workbench bottom 2, lower flexible hinge 6 fixedly mounts with the skewback 3 in base cover 8, is provided with and adjusts pad 7 between lower flexible hinge 6 and skewback 3.In six piezoelectric ceramics gangbar 5, be electrically connected with respectively piezoelectric ceramics displacement driver (not shown), base cover 8 is provided with some for the socket 9 with outside piezoelectric ceramics displacement driver electric connection, and socket 9 is electrically connected by electric wire and piezoelectric ceramics gangbar.
In the present invention's one preferred embodiment, concrete assembly relation is as follows:
Workbench 1 is connected by hexagon socket cap head screw with workbench bottom 2, and skewback 3 is located by straight pin, is fixed on workbench 1, shown in the concrete structure of skewback 3 ginseng Fig. 7 with hexagon socket cap head screw;
Top flexible hinge 4(hinge employing nylon material) the inclined-plane matched in clearance of one end and skewback 3, and hold holding screw pretension by cone, prevent that in the course of work, hinge is loosening, the other end and piezoelectric ceramics 5 are threaded connection (the SZBS150/7/40VS12 model that piezoelectric ceramics is selected Suzhou rich real machine people technology Co., Ltd).One end of lower hinge 6 is threaded with piezoelectric ceramics, and the inclined-plane matched in clearance of the other end and skewback, by the fixing relative position of skewback 3 and lower flexible hinge 6 of cone end holding screw.Between lower flexible hinge 6 and skewback 3, have and adjust pad 7, repair adjustment in assembling process, guarantees the locus of each member;
Skewback 3 is located and is connected with soket head cap screw with base 10 use cylindrical pins, between base 10 and base cover 8, with soket head cap screw, connects.
In conjunction with Fig. 2 a, Fig. 2 b, top flexible hinge 4 comprises corresponding the first main part 41 and the second main part 42 arranging, is fixedly connected on the connecting portion 43 of the first main part 41 and the second main part 42 central authorities, the second installation portion 45 that is arranged at the first installation portion 44 of the first main part 41 outside middle positions and is arranged at the second main part 42 outside middle positions, the first installation portion 44 fixedly mounts with the skewback 3 on workbench bottom 2, the second installation portion 45 and 5 fixed installations of piezoelectric ceramics gangbar.
The second installation portion 45 is M3 screw thread in the present embodiment, and the first installation portion 44 is Φ 6 optical axises.Flexible hinge is carried out to modeling analysis, as Fig. 4 chooses optimal solution R=1mm, r=0.5mm.Consider that nylon material has reasonable normal direction stress-bearing capability, very little torsion and bending stiffness, be as the desirable material of flexible hinge.
In conjunction with Fig. 3 a, Fig. 3 b, lower flexible hinge 6 comprises corresponding the first main part 61 and the second main part 62 arranging, is fixedly connected on the connecting portion 63 of the first main part 61 and the second main part 62 central authorities, the second installation portion 65 that is arranged at the first installation portion 64 of the first main part 61 outside middle positions and is arranged at the second main part 62 outside middle positions, the first installation portion 64 fixedly mounts with the skewback 3 in base cover 8, the second installation portion 65 and 5 fixed installations of piezoelectric ceramics gangbar.
Similarly, the second installation portion 65 is M3 screw thread, and the first installation portion 64 is Φ 6 optical axises.Flexible hinge is carried out to modeling analysis, as Fig. 4 chooses optimal solution R=1mm, r=0.5mm.Material is chosen nylon material equally.
Because pad between lower flexible hinge 6 and skewback 3 is adjusted pad 7, so the first installation portion 64 optical axises are than the long 2mm of top flexible hinge the first installation portion 44 optical axis.
Shown in Fig. 5, piezoelectric ceramics gangbar 5 comprises pedestal 56, be located at sleeve pipe 54 on pedestal 56, be located at pretension head 52 and connector 51 on sleeve pipe 54, be located at the piezoelectric ceramics 55 in sleeve pipe 54 and be located at the filler 53 between piezoelectric ceramics 55 and pretension head 52 in sleeve pipe 54.Piezoelectric ceramics is encapsulated in frame for movement, can improves reliability, stability and the installability of piezoelectric ceramics.
Shown in Fig. 6, side chain by skewback 3, top flexible hinge 4, piezoelectric ceramics gangbar 5, lower flexible hinge 6, adjust pad 7 totally five parts form.Article six, side chain, both as supporting rod, can provide power again, also transmits motion, and integrated level is high.
The assembling of this 6-SPS type Piezoelectric Ceramic Microrobot can realize according to following steps:
Between skewback and workbench, with straight pin, locate, and with hexagon socket cap head screw, both are fixed, now screw is without tightening, and clinodiagonal two screws arbitrarily of only need screwing on, complete in this way the assembling of six skewbacks and workbench, the position relationship of skewback and workbench is with reference to Fig. 8;
Complete according to the method described above the assembling between six skewbacks and base, position relationship is with reference to Fig. 8;
At the two ends of piezoelectric ceramics gangbar, screw on respectively top flexible hinge and lower flexible hinge, form six driving-chains, while screwing, do not destroy flexible hinge;
In lower flexible hinge optical axis one end, put adjustment pad, respectively flexible hinge optical axis one end, top and the bottom is embedded in the skewback and the skewback on base on workbench, position relationship is as Fig. 8;
Adjust the position of six driving-chains, as do not realized the position relationship of Parallel Symmetric between upper mounting plate and base, unload and adjust pad reconditioning, repeat aforesaid operations until the spatial relation meeting the demands;
Finally cone end holding screw is screwed in the screwed hole of skewback side, holds out against hinge, the position of fixed hinge, hinge through while preventing jiggle robot work;
Unload the screw between lower table and skewback, remove workbench, cover upper table bottom, then workbench and bottom are closed, with screw, both are fixed;
Between workbench and skewback, with screw, screw on, now all screws are all tightened;
Take off equally base, put base cover, base and base cover are closed, tighten and connect all screws of skewback and base and be connected base and all screws of base cover, full view is shown in Fig. 1.
On workbench, install and measure module, according to the actual maximum displacement scope that can export of the inverse kinematic modeling formula of parallel robot and piezoelectric ceramics, during each axle self-movement, input makes any branch road elongation in piezoelectric ceramics reach driving voltage value while doing large displacement, the largest motion scope when at this moment recording numerical value and being certain axle independently moving.The miniature laser interferometer that the resolution ratio of robot and repetitive positioning accuracy adopt two German SIOS companies to produce, model is AE SP500E, and measurement category is 500mm, and Measurement Resolution is 1.24nm, during test, in constant temperature vibration isolation environment, carries out.Line measurement adopts an interferometer directly to measure, and angular surveying adopts two interferometers indirectly to measure.Before test, need to paste in the work top Shang of robot appropriate location reflecting optics.Owing to being measured number of devices, limit, only measure a parameter at every turn.Measurement scheme and robot measurement range of movement are similar, just change measurement support into reflecting optics, and in the present invention, robot performance's test result is in Table 1.
Table 1 robot performance test
| Test target axle | Range of movement | Motion Resolution rate | Repetitive positioning accuracy |
| X-axis | ±48μm | 15nm | 54nm |
| Y-axis | ±53μm | 15nm | 56nm |
| Z axis | ±16μm | 6nm | 26nm |
| θ x axle | ±0.5mrad | 0.1μrad | 0.27μrad |
| θ y axle | ±0.5mrad | 0.1μrad | 0.29μrad |
| θ z axle | ±1.48mrad | 0.3μrad | 0.88μrad |
The distinguishing features such as comparing parallel robot with serial machine people has rigidity high, and inertia is low, and precision is high, and error is without accumulation, and inverse kinematic is convenient; Comprehensive present Research both domestic and external and application present situation, mainly contain following several micrometric displacement brake application in nanoscale precision positioning field: electromagnetic attraction type of drive, electrostatic force type of drive, piezo-electric effect type of drive, SME type of drive, magnetostrictive effect type of drive, voice coil motor, thermal expansion effects type of drive.
Piezoelectric actuator only relies on the size of controlling extra electric field just can reach very little displacement resolution (Subnano-class), piezoelectric ceramics brake has advantages of that other actuators are incomparable in ultraprecise location and micrometric displacement control, as little in volume, displacement resolution is high, fast response time, High power output, conversion efficiency is high, static state is not generated heat etc., is braking member more satisfactory in Micro-displacement Technique; Although there is the performance of many excellences in piezoelectric ceramics, but exist and can only under given voltage, produce thrust in micro-nano motion, the flimsy problem of its internal structure when the External Force Actings such as under tension, torsion and shearing force, piezoelectric ceramics is encapsulated in frame for movement, thus reliability, stability and the installability of raising piezoelectric ceramics; Spherical pair flexible hinge is for doing the finite angular displacements of compound movement around axle, its feature is: volume is little, machinery-free friction, gapless, autokinesis is high, has good rigidity and fatigue resistance, be suitable for Position Control, storage release energy and realize high frequency period vibration etc.
In sum, the 6-SPS type Microrobot that the present invention is based on Piezoelectric Ceramic integrates precision optical machinery, driving and measurement feedback technique, mechanism, driving, the integrated design of detection have been realized, have that volume is little, compact conformation, rigidity are large, frequency response advantages of higher, and can realize nano level positioning precision.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and in the situation that not deviating from spirit of the present invention or essential characteristic, can realize the present invention with other concrete form.Therefore, no matter from which point, all should regard embodiment as exemplary, and be nonrestrictive, scope of the present invention is limited by claims rather than above-mentioned explanation, is therefore intended to include in the present invention dropping on the implication that is equal to important document of claim and all changes in scope.Any Reference numeral in claim should be considered as limiting related claim.
In addition, be to be understood that, although this description is described according to embodiment, but not each embodiment only comprises an independently technical scheme, this narrating mode of description is only for clarity sake, those skilled in the art should make description as a whole, and the technical scheme in each embodiment also can, through appropriately combined, form other embodiments that it will be appreciated by those skilled in the art that.
Claims (10)
1. the 6-SPS type Microrobot based on Piezoelectric Ceramic, comprise the workbench and the base that be arranged in parallel, be arranged at the workbench bottom of workbench below, be arranged at the base cover of base top, and be arranged at six side chains that are arranged in parallel in workbench bottom and base cover, it is characterized in that, in described workbench bottom and base cover, be fixed with respectively six skewbacks, on workbench bottom, in the lower surface of skewback and base cover, the upper surface of skewback is corresponding tilt setting one by one, described side chain comprises piezoelectric ceramics gangbar and is located at respectively top flexible hinge and the lower flexible hinge at the upper and lower two ends of piezoelectric ceramics gangbar, skewback fixed installation on described top flexible hinge and workbench bottom, skewback fixed installation in lower flexible hinge and base cover, in described six piezoelectric ceramics gangbar, be electrically connected with respectively piezoelectric ceramics displacement driver.
2. 6-SPS type Microrobot according to claim 1, it is characterized in that, the second installation portion that described top flexible hinge and lower flexible hinge comprise respectively corresponding the first main part and the second main part arranging, be fixedly connected on the connecting portion of the first main part and the second main part central authorities, be arranged at the first installation portion of middle position outside the first main part and be arranged at middle position outside the second main part, described the first installation portion and skewback fixed installation, the second installation portion and the fixed installation of piezoelectric ceramics gangbar.
3. 6-SPS type Microrobot according to claim 2, it is characterized in that, described top flexible hinge and lower flexible hinge are spherical pair flexible hinge, the cross section of described connecting portion is circular, and cross section reduces gradually from two ends to middle radius, and the vertical section of connecting portion is the rounded settings that cave inward in both sides.
4. 6-SPS type Microrobot according to claim 3, is characterized in that, the least radius of described cross section is 0.5mm, and the circular radius that vertical section caves inward is 1mm.
5. 6-SPS type Microrobot according to claim 2, is characterized in that, the length that on described lower flexible hinge, the length of the first installation portion is longer than the first installation portion on the flexible hinge of top.
6. 6-SPS type Microrobot according to claim 5, is characterized in that, is provided with the adjustment pad on sheathed and the first installation portion between described lower flexible hinge and skewback.
7. 6-SPS type Microrobot according to claim 1, it is characterized in that, described piezoelectric ceramics gangbar comprises pedestal, be located at sleeve pipe on pedestal, be located at pretension head and connector on sleeve pipe, be located at the piezoelectric ceramics in sleeve pipe and be located at the filler between piezoelectric ceramics and pretension head in sleeve pipe.
8. 6-SPS type Microrobot according to claim 7, is characterized in that, described base cover is provided with some for the socket with outside piezoelectric ceramics displacement driver electric connection, and described socket is electrically connected by electric wire and described piezoelectric ceramics.
9. 6-SPS type Microrobot according to claim 1, is characterized in that, the material of described top flexible hinge and lower flexible hinge is nylon.
10. 6-SPS type Microrobot according to claim 1, is characterized in that, displacement measurement module is installed on described workbench.
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| CN103878766A (en) * | 2014-04-04 | 2014-06-25 | 苏州大学 | Three-PRS type micro-motion parallel robot |
| CN104002299A (en) * | 2014-05-12 | 2014-08-27 | 西安理工大学 | Six-degree-of-freedom parallel micro platform |
| CN106090543A (en) * | 2016-08-04 | 2016-11-09 | 苏州大学 | Two-dimensional micro-rotating device of fine sighting telescope |
| CN106112955A (en) * | 2016-07-14 | 2016-11-16 | 安庆里外里工业产品设计有限公司 | A kind of construction transfer robot based on Stewart parallel institution |
| CN106624775A (en) * | 2016-11-29 | 2017-05-10 | 洛阳博智自动控制技术有限公司 | Assembling method for six-degree-of-freedom motion platform |
| CN107052782A (en) * | 2016-11-29 | 2017-08-18 | 洛阳博智自动控制技术有限公司 | A kind of assembly method of Three-degree-of-freedom motion platform |
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| CN110703407A (en) * | 2019-10-17 | 2020-01-17 | 中国科学院长春光学精密机械与物理研究所 | High-precision spliced reflector supporting and driving structure |
| CN111421526A (en) * | 2020-04-27 | 2020-07-17 | 无锡富瑞德测控仪器股份有限公司 | Large-stroke multi-degree-of-freedom nanoscale positioning device and control method |
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| CN111421526A (en) * | 2020-04-27 | 2020-07-17 | 无锡富瑞德测控仪器股份有限公司 | Large-stroke multi-degree-of-freedom nanoscale positioning device and control method |
| CN111421526B (en) * | 2020-04-27 | 2023-10-20 | 无锡富瑞德测控仪器股份有限公司 | Large-stroke multi-degree-of-freedom nanoscale positioning device and control method |
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