CN110703407A - High-precision spliced reflector supporting and driving structure - Google Patents

High-precision spliced reflector supporting and driving structure Download PDF

Info

Publication number
CN110703407A
CN110703407A CN201910987997.7A CN201910987997A CN110703407A CN 110703407 A CN110703407 A CN 110703407A CN 201910987997 A CN201910987997 A CN 201910987997A CN 110703407 A CN110703407 A CN 110703407A
Authority
CN
China
Prior art keywords
cavity
sub
support
piezoelectric ceramic
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910987997.7A
Other languages
Chinese (zh)
Other versions
CN110703407B (en
Inventor
刘强
王书新
田富湘
谭进国
王忠善
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN201910987997.7A priority Critical patent/CN110703407B/en
Publication of CN110703407A publication Critical patent/CN110703407A/en
Application granted granted Critical
Publication of CN110703407B publication Critical patent/CN110703407B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/183Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Astronomy & Astrophysics (AREA)
  • Sustainable Development (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The invention discloses a high-precision splicing reflector supporting and driving structure which comprises a supporting rod assembly and a flexible structure, wherein the flexible structure is formed at the joint of the supporting rod assembly and a foundation and the joint of the supporting rod assembly and a sub reflector; the support rod assembly comprises a plurality of support rods; the number of the supporting rods is matched with the number of the edges of the sub-reflecting mirrors, and the supporting directions of the supporting rods are different from each other so as to provide constraint forces in different directions for the sub-reflecting mirrors; a piezoelectric ceramic driver is integrated in the support rod; the support driving structure integrates the piezoelectric ceramic driver in the support rod and is connected with the sub-reflector through the flexible structure, so that the high-precision common-phase requirement of the spliced reflector can be well met, the weight and the volume of the reflector component can be greatly reduced, and the support driving structure has important significance for realizing the on-orbit imaging of the large-caliber spliced reflector.

Description

High-precision spliced reflector supporting and driving structure
Technical Field
The invention relates to the technical field of space optics, in particular to a high-precision common-phase reflector supporting and piezoelectric driving integrated structure suitable for a large-caliber splicing reflector.
Background
The aperture of the reflector in the optical remote sensor directly determines the spatial resolution capability of the optical system, and the aperture of the reflector of the optical remote sensor is larger along with the higher and higher requirement of the spatial detection precision. The large-aperture space optical remote sensing camera with the reflector aperture reaching 10m cannot be realized by adopting an integral main mirror, and is also unnecessary to adopt the integral main mirror, because the integral reflector with the aperture of 10m magnitude is extremely high in processing, manufacturing, assembling, adjusting, detecting and transporting and the eyeball of a carrier rocket, the spliced main mirror is adopted for the large-aperture reflector to replace a single main mirror, the spliced main mirror is formed by splicing sub-mirrors with small apertures, and the sub-mirrors are convenient to manufacture, transport, install and maintain.
The primary mirror of the space optical remote sensor adopting the splicing primary mirror imaging mode is of an expandable structure and is formed by splicing the sub-mirrors in blocks, the primary mirror and the supporting mechanism are folded and folded during emission, are synchronously driven to expand after entering a track and are accurately spliced into a common-phase primary mirror under active control.
However, the large-aperture reflector is not spliced in an on-orbit unfolding manner at present, and the difficulty is that the requirement on the co-phase precision of the splicing of the sub-mirrors is extremely high, and the co-phase precision is difficult to meet the requirement on optical imaging during ground verification, so that the improvement on the co-phase of the sub-mirrors is the key content of the research on the spliced reflector.
Disclosure of Invention
The invention aims to solve the technical problem that no mechanism for realizing on-track unfolding and splicing of a large-diameter reflector exists in the prior art, and provides a support driving structure which realizes full-freedom constraint of a reflector component and high-precision adjustment of multiple degrees of freedom of a spliced sub-reflector under the condition of ensuring the surface shape precision of the spliced reflector.
In order to achieve the above purpose, the invention provides the following technical scheme:
the invention relates to a high-precision splicing reflector supporting and driving structure, which forms an integrated structure with a sub-reflector, and mainly comprises:
one end of the supporting rod assembly is connected with the fixed platform, and the other end of the supporting rod assembly is connected with the sub-reflector;
the flexible structures are formed at the joints of the supporting rod assemblies and the fixed platform and the joints of the supporting rod assemblies and the sub-reflecting mirrors;
the sub-reflecting mirrors are arranged as mirror bodies of polygonal structures;
the support rod assembly comprises a plurality of support rods;
the number of the supporting rods is matched with the number of the edges of the sub-reflecting mirrors, and the supporting directions of the supporting rods are different from each other so as to provide constraint forces in different directions for the sub-reflecting mirrors;
a piezoelectric ceramic driver is integrated in the support rod;
the support rod and the flexible structures integrated at the two ends of the support rod form an adjusting part;
the adjusting component is driven by a piezoelectric ceramic driver to adjust the corresponding position of the sub-reflecting mirror.
Furthermore, the support rod comprises a rod body, an embedded cavity is formed inside the rod body, and the piezoelectric ceramic driver is embedded into the embedded cavity;
the joint of the piezoelectric ceramic driver and the rod body is designed into an in-rod connecting structure by a vector stiffness method;
the embedded cavity comprises a first cavity formed at the lower end of the supporting rod and a second cavity used for embedding the piezoelectric ceramic driver;
the first cavity is coaxial with the second cavity, the cross-sectional size of the first cavity is smaller than that of the second cavity, and the joint of the second cavity and the first cavity is formed into a plane structure;
the lower end of the piezoelectric ceramic driver is attached to the lower end of the second cavity;
the embedded cavity also comprises a third cavity formed at the upper end of the second cavity;
the third cavity is coaxial with the second cavity, the sectional dimension of the third cavity is smaller than that of the second cavity, and the joint of the second cavity and the third cavity is formed into a slope structure;
a gap is reserved between the upper end of the piezoelectric ceramic driver and the inclined plane structure;
the planar structure and the inclined plane structure form an in-rod connecting structure of the piezoelectric ceramic driver and the supporting rod.
Further, the inclined surface structure comprises a first surface close to one side of the piezoelectric ceramic driver and a second surface far away from the piezoelectric ceramic driver and facing outwards;
the first surface is an inclined surface;
the second surface is a plane;
the first surface is an inclined surface which is inclined upwards from inside to outside, and the inclination angle of the first surface is 5 degrees;
the inclined plane structure is provided with a rigidity groove;
the rigidity groove is divided into a first rigidity groove arranged on the first surface and a second rigidity groove arranged on the second surface;
the depth of the first rigidity groove is sequentially increased from outside to inside, and the increasing multiplying power of the first rigidity groove is 1.1 times;
the second stiffness groove is an equal-depth stiffness groove.
Furthermore, a variable rigidity structure is formed at least at the upper end of the supporting rod;
the variable stiffness structure is a cylindrical structure with the section size smaller than that of the support rod;
the supporting rod is connected with the flexible structure through the variable stiffness structure.
Furthermore, a plurality of groups of stress release grooves are formed in the flexible structure at intervals along the circumferential direction of the flexible structure.
In the technical scheme, the high-precision splicing reflector supporting and driving structure provided by the invention has the following beneficial effects:
1. the support driving structure integrates the piezoelectric ceramic driver in the support rod and is connected with the sub-reflector through the flexible structure, so that the high-precision common-phase requirement of the spliced reflector can be well met, the weight and the volume of the reflector component can be greatly reduced, and the support driving structure has important significance for realizing the on-orbit imaging of the large-caliber spliced reflector;
2. the supporting driving structure is provided with a plurality of groups of supporting rods with different supporting directions according to the shape of the sub-reflector, so that the sub-reflector can be reasonably restricted in a plurality of degrees of freedom, and high-precision adjustment can be realized; the piezoelectric ceramic driver is a nano-scale piezoelectric ceramic driver, and can realize high-precision adaptation to the extension and the shortening of the supporting rod by matching with an external flexible structure.
Drawings
In order to more clearly illustrate the embodiments of the present application or technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained by those skilled in the art according to the drawings.
FIG. 1 is a schematic structural diagram of a high-precision tiled reflector support driving structure disclosed in an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a support rod of a high precision tiled mirror support drive structure according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a vector stiffness method designed connection structure of a piezoelectric ceramic driver and a support rod of a high-precision splicing reflector support driving structure disclosed in the embodiment of the invention.
Description of reference numerals:
101. a sub-mirror; 102. a fixed platform;
2. a support bar; 3. a flexible structure; 4. a variable stiffness structure;
201. a piezoelectric ceramic driver; 202. a first chamber; 203. a second chamber; 204. a third chamber; 205. a first side; 206. a second face; 207. a first stiffness groove; 208. a second stiffness groove;
301. a stress relief groove.
Detailed Description
In order to make the technical solutions of the present invention better understood, those skilled in the art will now describe the present invention in further detail with reference to the accompanying drawings.
See fig. 1-3;
fig. 1 shows a schematic structural diagram of a high-precision tiled reflector support driving structure disclosed in this embodiment;
the embodiment discloses a high accuracy concatenation speculum supports drive structure, and this supports drive structure and forms the integral type structure with sub-speculum 101, and this supports drive structure mainly includes:
one end of the supporting rod assembly is connected with the fixed platform 102, and the other end of the supporting rod assembly is connected with the sub-reflector 101;
the flexible structure 3 is formed at the joint of the support rod assembly and the fixed platform 102 and the joint of the support rod assembly and the sub-reflector 101;
the sub-mirror 101 is provided as a mirror body of a polygonal structure;
the support rod assembly comprises a plurality of support rods 2;
the number of the support rods 2 is matched with the number of the edges of the sub-reflecting mirror 101, and the support directions of the support rods 2 are different from each other so as to provide constraint forces in different directions for the sub-reflecting mirror 101;
a piezoelectric ceramic driver 201 is integrated in the support rod 2;
the support rod 2 and the flexible structure 3 integrated at the two ends form an adjusting part;
the adjustment member is driven by a piezo ceramic driver 201 to adjust the corresponding position of the sub-mirror 101.
Specifically, the supporting driving structure disclosed in this embodiment is mainly used to form an integrated design with the sub-mirror 101, and the length of the supporting rod 2 is adjusted to realize the correction of the position and posture of the sub-mirror 101, so as to meet the technical requirements of on-track splicing of mirrors.
The supporting driving structure of the present embodiment is mainly integrated with the sub-reflector 101, wherein one end of the supporting rod 2 is connected to the fixed platform 102, and the other end is connected to the sub-reflector 101, and the piezoelectric ceramic driver 201 is integrated inside the supporting rod 2 in the present embodiment to drive the movement of the supporting rod 2, and meanwhile, the flexible structure 3 is connected to the end of the supporting rod 2 for adapting to the supporting adjustment of the supporting rod 2, and the flexible structure 3 adapts to the movement of the supporting rod 2.
In this embodiment, the sub-reflector 101 is taken as a hexagonal sub-reflector for further explanation:
in order to adapt to the hexagonal sub-reflector and constrain six degrees of freedom thereof, six support rods 2 need to be configured, and the six support rods 2 form a parallel mechanism in pairs; according to the distribution of six edges of the hexagonal sub-reflector, the six support rods 2 are reasonably distributed, so that the six degrees of freedom can be restrained.
Preferably, the support rod 2 of this embodiment includes a rod body, an embedded cavity is formed inside the rod body, and the piezoelectric ceramic driver 201 is embedded into the embedded cavity;
the joint of the piezoelectric ceramic driver 201 and the rod body is designed into an in-rod connecting structure by a vector stiffness method;
the embedded cavity comprises a first cavity 202 formed at the lower end of the support rod 2 and a second cavity 203 for embedding the piezoelectric ceramic driver 201;
the first cavity 202 and the second cavity 203 are coaxial, the cross-sectional dimension of the first cavity 202 is smaller than that of the second cavity 203, and the joint of the second cavity 203 and the first cavity 202 is formed into a planar structure;
the lower end of the piezoelectric ceramic driver 201 is attached to the lower end of the second cavity 203;
the embedding cavity further comprises a third cavity 204 formed at the upper end of the second cavity 203;
the third cavity 204 is coaxial with the second cavity 203, the sectional dimension of the third cavity 204 is smaller than that of the second cavity 203, and the joint of the second cavity 203 and the third cavity 204 is formed into a slope structure;
a gap is reserved between the upper end of the piezoelectric ceramic driver 201 and the inclined plane structure;
the planar structure and the inclined plane structure constitute an in-rod connection structure of the piezoelectric ceramic driver 201 and the support rod 2.
Wherein, the embodiment further defines the specific process structure of the in-rod connection structure of the piezoceramic driver 201 and the support rod 2;
the inclined surface structure includes a first surface 205 close to one side of piezoelectric ceramic actuator 201, and a second surface 206 far away from piezoelectric ceramic actuator 201 and facing outward;
the first face 205 is a bevel;
the second face 206 is planar;
the first surface 205 is an inclined surface inclined upwards from inside to outside, and the inclination angle of the first surface 205 is 5 degrees;
the inclined plane structure is provided with a rigidity groove;
the stiffness groove is divided into a first stiffness groove 207 opening on the first face 205 and a second stiffness groove 208 opening on the second face 206;
the depth of the first rigidity groove 207 is sequentially increased from outside to inside, and the increasing multiplying power of the first rigidity groove 207 is 1.1 times;
the second stiffness groove 208 is an equal depth stiffness groove.
In this embodiment, the support rod 2 and the piezoelectric ceramic driver 201 are integrated into a whole to form an integrated design, and meanwhile, the joint between the piezoelectric ceramic driver 201 and the inside of the support rod 2 is designed by a vector stiffness method, specifically, the joint between the upper end of the piezoelectric ceramic driver 201 and the support rod 2 is designed to be a structure with a variable wall thickness, and a stiffness groove formed in the structure is combined to finally obtain a stiffness value matched with the support direction. The width of the stiffness groove is unchanged, the first stiffness groove 207 formed on the first surface 205 gradually changes along with the trend depth of the inclined surface, and the changing multiplying power is designed according to 1.1 times.
Preferably, in order to be able to integrate the flexible structure 3 with the end of the support bar 2, at least the upper end of the support bar 2 is formed with a variable stiffness structure 4;
the variable stiffness structure 4 is a cylindrical structure with the section size smaller than that of the support rod 2;
the support rod 2 is connected with the flexible structure 3 through the variable stiffness structure 4.
Wherein, the flexible structure 3 is provided with a plurality of groups of stress relief grooves 301 at intervals along the circumferential direction.
When actual stress changes, the stress part can be eliminated through the multiple groups of stress release grooves 301 formed in the flexible structure 3, so that the support rod 2 can be normally adjusted, and finally the accurate adjustment of the shape of the reflector surface is realized.
In the technical scheme, the high-precision splicing reflector supporting and driving structure provided by the invention has the following beneficial effects:
the support driving structure integrates the piezoelectric ceramic driver 201 in the support rod 2 and is connected with the sub-reflector 101 through the flexible structure 3, so that the high-precision common-phase requirement of the spliced reflector can be well met, the weight and the volume of the reflector component can be greatly reduced, and the support driving structure has important significance for realizing the on-orbit imaging of the large-caliber spliced reflector;
the supporting driving structure is provided with a plurality of groups of supporting rods with different supporting directions according to the shape of the sub-reflector, so that the sub-reflector can be reasonably restricted in a plurality of degrees of freedom, and high-precision adjustment can be realized; the piezoelectric ceramic actuator 201 is a nano-scale piezoelectric ceramic actuator, and can realize high-precision adaptation to the extension and the shortening of the support rod 2 by matching with the external flexible structure 3.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the invention.

Claims (5)

1. High accuracy concatenation speculum supports drive structure, and this supports drive structure and forms the integral type structure with sub-speculum (101), its characterized in that, this supports drive structure and mainly includes:
one end of the supporting rod assembly is connected with a fixed platform (102), and the other end of the supporting rod assembly is connected with the sub-reflector (101);
the flexible structure (3) is formed at the joint of the support rod assembly and the fixed platform (102) and the joint of the support rod assembly and the sub-reflector (101);
the sub-reflecting mirror (101) is configured as a mirror body with a polygonal structure;
the support rod assembly comprises a plurality of support rods (2);
the number of the supporting rods (2) is matched with the number of sides of the sub-reflecting mirror (101), and the supporting directions of the supporting rods (2) are different from each other so as to provide different directions of restraining force for the sub-reflecting mirror (101);
a piezoelectric ceramic driver (201) is integrated in the support rod (2);
the support rod (2) and the flexible structures (3) integrated at the two ends of the support rod form an adjusting part;
the adjusting component is driven by a piezoelectric ceramic driver (201) to adjust the corresponding position of the sub-reflecting mirror (101).
2. The support driving structure of a high-precision splicing reflecting mirror according to claim 1, wherein the supporting rod (2) comprises a rod body, an embedded cavity is formed inside the rod body, and the piezoelectric ceramic driver (201) is embedded in the embedded cavity;
the joint of the piezoelectric ceramic driver (201) and the rod body is designed into an in-rod connecting structure by a vector stiffness method;
the embedded cavity comprises a first cavity (202) formed at the lower end of the support rod (2) and a second cavity (203) used for embedding the piezoelectric ceramic driver (201);
the first cavity (202) is coaxial with the second cavity (203), the cross-sectional dimension of the first cavity (202) is smaller than that of the second cavity (203), and the joint of the second cavity (203) and the first cavity (202) is formed into a plane structure;
the lower end of the piezoelectric ceramic driver (201) is attached to the lower end of the second cavity (203);
the embedded cavity further comprises a third cavity (204) formed at the upper end of the second cavity (203);
the third cavity (204) is coaxial with the second cavity (203), the cross-sectional dimension of the third cavity (204) is smaller than that of the second cavity (203), and the joint of the second cavity (203) and the third cavity (204) is formed into a slope structure;
a gap is reserved between the upper end of the piezoelectric ceramic driver (201) and the inclined plane structure;
the plane structure and the inclined plane structure form an in-rod connecting structure of the piezoelectric ceramic driver (201) and the support rod (2).
3. A high precision tiled mirror support drive structure according to claim 2, wherein the ramp structure comprises a first face (205) close to the piezo ceramic actuator (201) side and a second face (206) remote from the piezo ceramic actuator (201) and facing outwards;
the first face (205) is a bevel;
the second face (206) is planar;
the first surface (205) is an inclined surface which inclines upwards from inside to outside, and the inclination angle of the first surface (205) is 5 degrees;
the inclined plane structure is provided with a rigidity groove;
the stiffness groove is divided into a first stiffness groove (207) opening on the first face (205) and a second stiffness groove (208) opening on the second face (206);
the depth of the first rigidity groove (207) is sequentially increased from outside to inside, and the increasing multiplying power of the first rigidity groove (207) is 1.1 times;
the second stiffness groove (208) is an equal-depth stiffness groove.
4. A high precision tiled mirror support driving arrangement according to claim 2, characterized in that at least the upper ends of the support rods (2) are formed with a variable stiffness structure (4);
the variable stiffness structure (4) is a cylindrical structure with the section size smaller than that of the support rod (2);
the supporting rod (2) is connected with the flexible structure (3) through the variable stiffness structure (4).
5. A high-precision spliced mirror support driving structure as claimed in claim 1, wherein said flexible structure (3) is provided with a plurality of sets of stress relief grooves (301) along its circumference at intervals.
CN201910987997.7A 2019-10-17 2019-10-17 High-precision spliced reflector supporting and driving structure Active CN110703407B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910987997.7A CN110703407B (en) 2019-10-17 2019-10-17 High-precision spliced reflector supporting and driving structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910987997.7A CN110703407B (en) 2019-10-17 2019-10-17 High-precision spliced reflector supporting and driving structure

Publications (2)

Publication Number Publication Date
CN110703407A true CN110703407A (en) 2020-01-17
CN110703407B CN110703407B (en) 2020-10-30

Family

ID=69200475

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910987997.7A Active CN110703407B (en) 2019-10-17 2019-10-17 High-precision spliced reflector supporting and driving structure

Country Status (1)

Country Link
CN (1) CN110703407B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113126239A (en) * 2021-04-13 2021-07-16 西安交通大学 Five-degree-of-freedom adjusting platform for splicing off-axis aspheric sub-mirrors
CN114244976A (en) * 2021-11-16 2022-03-25 北京空间机电研究所 10-hundred million-level pixel visible light area array splicing detector
JP2023046745A (en) * 2021-09-24 2023-04-05 キヤノン株式会社 Holding device, exposure device, and article manufacturing method
CN118192031A (en) * 2024-05-20 2024-06-14 同济大学 Sub-mirror adjusting device, space telescope and ground simulation adjustment system

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150134A (en) * 1984-12-25 1986-07-08 Nec Corp Optical head
CN201561825U (en) * 2009-09-29 2010-08-25 西北工业大学 Elastomer of six-dimensional force sensor
CN103507063A (en) * 2013-10-08 2014-01-15 苏州大学 6-SPS type micro-motion parallel robot on the basis of piezoelectric ceramic drive
CN103744177A (en) * 2014-01-09 2014-04-23 中国科学院光电技术研究所 Combined type wavefront corrector
CN103823302A (en) * 2014-03-03 2014-05-28 重庆大学 One-dimensional rapid control reflector
CN105572862A (en) * 2015-12-22 2016-05-11 中国科学院长春光学精密机械与物理研究所 Optical-mechanical integrated rapid control reflector
CN105700108A (en) * 2016-04-13 2016-06-22 中国人民解放军国防科学技术大学 Piezoelectric ceramic micro actuator for controlling vibration of optical mirror
CN106405785A (en) * 2016-09-30 2017-02-15 北京空间机电研究所 Thermal deformation-designable load-carrying structure for large-aperture reflector assembly
CN106773021A (en) * 2016-12-27 2017-05-31 西安交通大学 A kind of deflection mirror device and method of center of rotation and minute surface center superposition
CN108980246A (en) * 2018-09-10 2018-12-11 东北大学 A kind of vibration isolator based on quasi- zero stiffness
CN109270656A (en) * 2018-10-11 2019-01-25 中国科学院长春光学精密机械与物理研究所 A kind of reflecting mirror focus adjusting mechanism and its mirror assembly
CN109269718A (en) * 2018-11-23 2019-01-25 北京航天试验技术研究所 A kind of engine vectored thrust calibrating installation of step-less adjustment

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150134A (en) * 1984-12-25 1986-07-08 Nec Corp Optical head
CN201561825U (en) * 2009-09-29 2010-08-25 西北工业大学 Elastomer of six-dimensional force sensor
CN103507063A (en) * 2013-10-08 2014-01-15 苏州大学 6-SPS type micro-motion parallel robot on the basis of piezoelectric ceramic drive
CN103744177A (en) * 2014-01-09 2014-04-23 中国科学院光电技术研究所 Combined type wavefront corrector
CN103823302A (en) * 2014-03-03 2014-05-28 重庆大学 One-dimensional rapid control reflector
CN105572862A (en) * 2015-12-22 2016-05-11 中国科学院长春光学精密机械与物理研究所 Optical-mechanical integrated rapid control reflector
CN105700108A (en) * 2016-04-13 2016-06-22 中国人民解放军国防科学技术大学 Piezoelectric ceramic micro actuator for controlling vibration of optical mirror
CN106405785A (en) * 2016-09-30 2017-02-15 北京空间机电研究所 Thermal deformation-designable load-carrying structure for large-aperture reflector assembly
CN106773021A (en) * 2016-12-27 2017-05-31 西安交通大学 A kind of deflection mirror device and method of center of rotation and minute surface center superposition
CN108980246A (en) * 2018-09-10 2018-12-11 东北大学 A kind of vibration isolator based on quasi- zero stiffness
CN109270656A (en) * 2018-10-11 2019-01-25 中国科学院长春光学精密机械与物理研究所 A kind of reflecting mirror focus adjusting mechanism and its mirror assembly
CN109269718A (en) * 2018-11-23 2019-01-25 北京航天试验技术研究所 A kind of engine vectored thrust calibrating installation of step-less adjustment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113126239A (en) * 2021-04-13 2021-07-16 西安交通大学 Five-degree-of-freedom adjusting platform for splicing off-axis aspheric sub-mirrors
JP2023046745A (en) * 2021-09-24 2023-04-05 キヤノン株式会社 Holding device, exposure device, and article manufacturing method
JP7328292B2 (en) 2021-09-24 2023-08-16 キヤノン株式会社 Holding device, exposure device, and article manufacturing method
CN114244976A (en) * 2021-11-16 2022-03-25 北京空间机电研究所 10-hundred million-level pixel visible light area array splicing detector
CN114244976B (en) * 2021-11-16 2024-04-12 北京空间机电研究所 10 hundred million grades of pixel visible light face array splice detector
CN118192031A (en) * 2024-05-20 2024-06-14 同济大学 Sub-mirror adjusting device, space telescope and ground simulation adjustment system

Also Published As

Publication number Publication date
CN110703407B (en) 2020-10-30

Similar Documents

Publication Publication Date Title
CN110703407B (en) High-precision spliced reflector supporting and driving structure
US7216995B2 (en) Deployable reflector
CN108594396A (en) Quasi-zero expansion space optical remote sensor supporting structure and method
CN104516212B (en) The manufacture method of Optical devices, projection optical system, exposure device and article
KR102205092B1 (en) Piezoelectric actuator, deformable mirror and method of manufacturing deformable mirror
CA2318045A1 (en) Assembly for mounting and correcting the position of an element, such as a mirror, of a space telescope
CN208270826U (en) Quasi-zero expansion space optical remote sensor supporting structure
US11506865B2 (en) Honeycomb sandwich panel, optical device, and artificial satellite
US20090316281A1 (en) Laterally Adjustable Optical Mount with Bent Lever Manipulator Units
US9016879B2 (en) Primary mirror support structure and telescope unit
CN109723945B (en) Precise pointing platform based on flexible parallelogram mechanism
US10139617B2 (en) Reaction compensated steerable platform
US20210011282A1 (en) Optical scanning device and method of control therefor
US20160062109A1 (en) Optical scanning device
JP2018059986A (en) Imaging device
US20050157413A1 (en) Mirror support mechanism and optical apparatus using the same
US9891402B2 (en) Optical mount comprising at least one clamping unit with an adhesive gap
WO2010131556A1 (en) Piezoelectric actuator
CN110687932A (en) On-orbit adjustment method for secondary mirror of space optical remote sensor and space optical remote sensor
JP7000559B2 (en) Devices and methods that provide linear motion of the device
CN112130277B (en) Flexible supporting structure suitable for space camera reflector
US10197792B2 (en) Reaction compensated steerable platform
KR101446954B1 (en) Measurement apparatus for operating load of fast steering mirror unit for large telescopic system and large telescopic system having the same
JP4283311B2 (en) Reflector device
CN113277122B (en) Electromagnetic two-dimensional deflection adjusting device and method with self-sensing function

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant