CN105700108A - Piezoelectric ceramic micro actuator for controlling vibration of optical mirror - Google Patents
Piezoelectric ceramic micro actuator for controlling vibration of optical mirror Download PDFInfo
- Publication number
- CN105700108A CN105700108A CN201610227613.8A CN201610227613A CN105700108A CN 105700108 A CN105700108 A CN 105700108A CN 201610227613 A CN201610227613 A CN 201610227613A CN 105700108 A CN105700108 A CN 105700108A
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- Prior art keywords
- optical mirror
- mirror plane
- piezoelectric
- sleeve
- vibration control
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
Abstract
The invention relates to the technical field of active vibration control and provides a piezoelectric ceramic micro actuator for controlling the vibration of an optical mirror to solve the problem that when a common actuator is used in optical system control in the prior art, active control of light beam direction is high in power consumption and requires complex structure. The piezoelectric ceramic micro actuator comprises a front cover, a piezoelectric stack for controlling the position of pitching off-course direction of the optical mirror, and a sleeve for receiving the piezoelectric stack, wherein one end of the front cover abuts against the optical mirror, the other end of the front cover is connected with one end of the piezoelectric stack and is received in the sleeve, and the other end of the piezoelectric stack is retightened and received in the sleeve. The piezoelectric ceramic micro actuator for controlling the vibration of an optical mirror disclosed in the invention is convenient to use and adjust, and realizes active control of light beam direction by directly controlling an optical element.
Description
Technical field
The present invention relates to Active Vibration Control technical field, be specifically related to a kind of piezoelectric microactuators device for optical mirror plane vibration control。
Background technology
Along with the continuous progress of optical technology, the application of optical system is constantly expanded, and the required precision of optical system is also improving constantly。But, the imaging contexts of optical system is affected increasing by the interference such as the applied environment of optical system becomes increasingly complex also, ambient vibration。The problem of the beam-pointing instability that ambient vibration causes is prevalent in all kinds of optical system, and its performance is caused significant impact。
But, realize optical system imaging preferably under vibration by actuator more than existing, the effect of actuator is, according to the control law determined, control object is applied control power。In recent years, on the basis of traditional fluid start, gas actuation device and electrical equipment actuator, research and develop multiple intelligent actuator, such as piezoelectric ceramic actuator, piezoelectric membrane actuator, electrostriction actuator etc.。But these actuator ubiquity power consumption problems high, baroque existing。
Summary of the invention
It is an object of the invention to provide a kind of piezoelectric microactuators device for optical mirror plane vibration control, this invention solves in prior art the beam-pointing that conventional actuator carries out existing when optical system controls and actively controls that power consumption is high, the technical problem of baroque difficulty。
The present invention provides a kind of piezoelectric microactuators device for optical mirror plane vibration control, including protecgulum, for controlling optical mirror plane in the piezoelectric pile of its pitching yaw direction present position with for holding the sleeve of piezoelectric pile, one end of protecgulum is connected on optical mirror plane, and the other end is connected with one end of piezoelectric pile and is contained in sleeve；The other end of piezoelectric pile is contained in sleeve in advance tightly。
Further, one end of protecgulum is provided with blunt end, and blunt end is connected on optical mirror plane。
Further, the other end of protecgulum is provided with the groove for making piezoelectric pile insert, and the groove that falls is arranged in the other end of protecgulum, is provided with chamfering in groove。
Further, also include linear bearing and inner sleeve, protecgulum and piezoelectric pile to be connected by linear bearing lubrication；Inner sleeve is sheathed on linear bearing, and accommodation is fixedly connected in sleeve。
Further, also including the bonnet for propping up piezoelectric pile, one section of bonnet is inserted in piezoelectric pile, and the other end is slideably positioned in sleeve。
Further, bonnet includes the upper cylinder and the lower cylinder that are connected, and upper cylinder is inserted in piezoelectric pile, and lower cylinder is slideably positioned in sleeve。
Further, also including the jackscrew for fixing piezoelectric pile position, one end of jackscrew is connected with sleeve by screw thread, and the other end stretches out outside sleeve。
Further, in sleeve, segmentation is sequentially provided with the first fixing groove, the second sliding tray and the 3rd supports groove, and inner sleeve accommodation is connected in the first fixing groove；Bonnet is slidingly accommodated in the second sliding tray；Jackscrew is threadedly connected to the 3rd and supports in groove。
Another aspect of the present invention additionally provides a kind of optical mirror plane micromatic setting, including optical mirror plane device, at least 2 described above for the piezoelectric microactuators device of optical mirror plane vibration control, microdrive support and microscope base body, one end for the piezoelectric microactuators device of optical mirror plane vibration control is installed in microdrive support, the other end is connected on the optical mirror plane of optical mirror plane device and is arranged in pairs for the piezoelectric microactuators device of optical mirror plane vibration control, is connected to respectively on the basifacial two opposite sides of optical frames。
Further, optical mirror plane device includes microscope base, the microscope base plate being installed on microscope base, the eyeglass being installed on microscope base plate and just to microscope base interval install microscope base body, the outer lower portion interval of microscope base body is provided with the microdrive support for installing microdrive。
The technique effect of the present invention:
A kind of piezoelectric microactuators device for optical mirror plane vibration control provided by the invention, this microdrive is easy to use, be prone to adjust, and can directly manipulate optical element and realize beam-pointing and actively control。
Optical mirror plane micromatic setting provided by the invention is smaller, coordinates existing control method can realize the accurate control to eyeglass, is smaller in size than existing actuator, can better adapt to needs on star。
Specifically refer to the described below of the various embodiments that the piezoelectric microactuators device for optical mirror plane vibration control according to the present invention proposes, by apparent for the above and other aspect making the present invention。
Accompanying drawing explanation
Fig. 1 is the explosive decomposition schematic diagram of the piezoelectric microactuators device preferred embodiment for optical mirror plane vibration control provided by the invention；
Fig. 2 is the assembling schematic diagram of the piezoelectric microactuators device preferred embodiment for optical mirror plane vibration control provided by the invention；
The master that Fig. 3 is the protecgulum of the preferred embodiment of the present invention looks partial schematic sectional view；
Fig. 4 is the sleeve partial schematic sectional view of the preferred embodiment of the present invention；
Fig. 5 is the piezoelectric microactuators device preferred embodiment installment state schematic diagram for optical mirror plane vibration control provided by the invention；
Fig. 6 be the piezoelectric microactuators device preferred embodiment for optical mirror plane vibration control provided by the invention for adjusting Z axis or/and X axis angle installment state close-up schematic view；
Fig. 7 is that the preferred embodiment of the present invention controls effect curve figure schematic diagram in 10Hz excitation situation；
Fig. 8 is total displacement close-up schematic view in Fig. 7
Fig. 9 is that the preferred embodiment of the present invention controls effect curve schematic diagram in 50Hz excitation situation；
Figure 10 is total displacement close-up schematic view in Fig. 9；
Figure 11 is that the preferred embodiment of the present invention controls effect curve schematic diagram in 150Hz excitation situation；
Figure 12 is total displacement close-up schematic view in Figure 11；
Figure 13 is that the preferred embodiment of the present invention controls effect curve schematic diagram in arbitrary excitation situation；
Figure 14 is total displacement close-up schematic view in Figure 13；
Figure 15 verifies the vibration control experiment light path schematic diagram of optical adjusting frame used in test in the preferred embodiment of the present invention。
Marginal data:
100, optical mirror plane device；110, microscope base；120, microscope base plate；130, eyeglass；140, microscope base body；150, microdrive support；210, protecgulum；211, blunt end；212, fall groove；220, linear bearing；230, inner sleeve；240, piezoelectric pile；250, bonnet；260, sleeve；261, the first fixing groove；262, the second sliding tray；263, the 3rd groove is supported；270, jackscrew。
Detailed description of the invention
The accompanying drawing constituting the part of the application is used for providing a further understanding of the present invention, and the schematic description and description of the present invention is used for explaining the present invention, is not intended that inappropriate limitation of the present invention。
Referring to Fig. 1～2, the invention provides a kind of piezoelectric microactuators device for optical mirror plane vibration control, including protecgulum 210, for controlling optical mirror plane in the piezoelectric pile 240 of its pitching yaw direction present position with for holding the sleeve 260 of piezoelectric pile 240, one end of protecgulum 210 is connected on optical mirror plane, and the other end is connected with one end of piezoelectric pile 240 and is contained in sleeve 260；Being contained in sleeve 260 of the other end pretension of piezoelectric pile 240。This microdrive utilizes the flexible ability by voltage driving that piezoelectric pile 240 has so that optical mirror plane can rotate on its pitching yaw direction, and then realizes the adjustment to optical mirror plane。Instead of existing actuator, smaller, adopt existing control method can realize the control to optical mirror plane。Control method used herein can be, but not limited to such as fuzzy control method, PID control method etc.。The parts of these control algolithms can be realized, may be disposed at on part electrical connector part to be controlled。Parts containing each control algolithm can be replaced mutually。
Further, including protecgulum 210, linear bearing 220, inner sleeve 230, for the piezoelectric pile 240 that optical mirror plane is controlled, for propping up the bonnet 250 of piezoelectric pile 240, for holding the sleeve 260 of piezoelectric pile 240 and for fixing the jackscrew 270 of piezoelectric pile 240 position。Protecgulum 210 is connected with piezoelectric pile 240 by linear bearing 220。Inner sleeve 230 is sheathed on outside linear bearing 220, and fixing with sleeve 260 is connected。So that the front end of protecgulum 210 is stretched out outside sleeve 260, the piezoelectric pile 240, inner sleeve 230 and the linear bearing 220 that are connected with protecgulum 210 are all contained in sleeve 260。Bonnet 250 is contained in sleeve 260, and its one end is connected to the bottom surface of piezoelectric pile 240。One end of jackscrew 270 is stretched in sleeve 260, and is connected on the another side of bonnet 250, and the other end of jackscrew 270 stretches out outside sleeve 260。Jackscrew 270 can be used for regulating the pretension degree of the whole piezoelectric microactuators device for optical mirror plane vibration control。
Preferably, referring to Fig. 3, protecgulum 210 includes blunt end 211 and chamfered end, and blunt end 211 arranges hemispherical head, can be prevented effectively from optical mirror plane and protecgulum 210 top is applied shearing force。Arrange groove 212 in chamfered end。Can be inserted into piezoelectric pile 240 in groove 212。It is furthermore preferred that blunt end 211 is the hemispherical head of 4mm for radius。Adopt the blunt end 211 of this size, can effectively reduce when protecgulum 210 contacts with minute surface and produce excessive frictional force, and then minute surface is caused abrasion。Can also realize accurate control, it is to avoid in control process, the generation of hyperkinesia simultaneously。
Preferably, the groove 212 that should fall is the groove 212 of deep 8mm diameter 5mm, and port is provided with chamfering, improves the degree of being completely embedded with piezoelectric pile 240。
It is furthermore preferred that protecgulum 210 is cylindrical structure, long 37mm, diameter 8mm, adopt stainless steel material to process。Now rigidity can meet requirement。
Linear bearing 220 used can be common linear bearing 220, it is preferred to external diameter 15mm, internal diameter 8mm, long 17mm, adopt the linear bearing 220 of this size, can effectively realize piezoelectric pile 240 when stretching, so as to promote protecgulum 210 guiding movement with protecgulum 210 when lubrication。
Inner sleeve 230 is a tubular structure, it is furthermore preferred that be long 17mm, and the tube structure of external diameter 22mm internal diameter 15mm。For linear bearing 220 being fixed on sleeve 260 inwall。Thus contributing to the realization of the lubrication guide effect of linear bearing 220。More there is choosing, adopt stainless steel material to process。
Piezoelectric pile 240 can be commercially available prod。It can be such as general love nanometer displacement technology (Shanghai) Co., Ltd. (PI) product P-843.60。Piezoelectric pile 240 can under driving voltage effect, in conjunction with elongating or shortening of algorithms most in use control realization predetermined length, thus realizing the accurate control to optical mirror plane to be adjusted。
Preferably, bonnet 250 includes stacked 2 coaxial cylindrical body。The two is cylindrical to be increased under upper for diameter。Adopt this structure, can effectively realize the pressuring action to piezoelectric pile 240。It is furthermore preferred that the long 15mm of bonnet 250 lower cylinder, diameter 16mm。The long 6mm of upper cylinder, diameter 8mm。Lower cylinder is provided with fall groove 212, upper cylinder and the piezoelectric pile 240 of the deep 1mm of long 1.5mm and is screwed near upper cylinder place。Adopt the bonnet 250 of this mechanism, can when keeping required rigidity so that microdrive overall dimensions is minimum。
Preferably, referring to Fig. 4, in sleeve 260, segmentation is sequentially provided with first fixing groove the 261, second sliding tray 262 and the 3rd and supports groove 263, and the first fixing groove 261 is used for installing inner sleeve 230, in order to realize fixing inner sleeve 230, the diameter of the first fixing groove 261 is close to inner sleeve 230。Second sliding tray 262 is used for holding piezoelectric pile 240 and bonnet 250, and along with stretching of piezoelectric pile 240, bonnet 250 can slide in the second sliding tray 262。3rd supports groove 263 for holding jackscrew 270。Preferably, lower cylinder can slide in the second holding tank in sleeve 260。Due to the diameter and the 3rd of the second holding tank, to support groove 263 different, thus can limit the motion of bonnet 250。Preferably, in order to reduce overall dimensions, sleeve 260 inwall offers electric wire mounting groove, to arrange piezoelectric pile 240 live wire。Drive voltage signal line isoelectric line specifically can be set。
Preferably, one end of jackscrew 270 is stretched into the 3rd and is supported in groove 263, threaded with it, and jackscrew 270 can peak on bonnet 250。The other end of jackscrew 270 stretches out outside sleeve 260, it is simple to operation realizes the adjustment to jackscrew 270。For regulating piezoelectric pile 240 pretension degree, it is achieved quickly accurately correction。
Referring to Fig. 5～6, another aspect of the present invention additionally provides a kind of optical mirror plane micromatic setting, 100, at least 2, optical mirror plane device is described above for the piezoelectric microactuators device of optical mirror plane vibration control, microdrive support 150 and microscope base body 140, one end for the piezoelectric microactuators device of optical mirror plane vibration control is installed in microdrive support 150, the other end is connected on the optical mirror plane of optical mirror plane device 100, and 2 piezoelectric microactuators devices for optical mirror plane vibration control are connected to the basifacial two opposite sides of optical frames respectively。By being respectively provided with at least two aforementioned microdrives in the two opposite sides of the bottom of eyeglass 130, the control to eyeglass 130 pitching yaw direction present position and adjustment can be realized。
Optical mirror plane device 100 can be all kinds of conventional optical mirror plane devices 100。Preferably, optical mirror plane device 100 include microscope base 110, the microscope base plate 120 being installed on microscope base 110, the eyeglass 130 being installed on microscope base plate 120 and just to microscope base 110 interval install microscope base body 140。The side of microscope base body 140 is arranged to install the microdrive support 150 of the piezoelectric microactuators device for optical mirror plane vibration control。One end for the piezoelectric microactuators device of optical mirror plane vibration control is installed in microdrive support 150, and the other end peaks on microscope base plate 120 through microscope base body 140。Adopt device can realize the microscope base plate 120 angle adjustment in pitch orientation (as rotated around X-axis) and yaw direction (such as rotation about the z axis)。
During use, piezoelectric microactuators device for optical mirror plane vibration control provided by the invention is installed on the rear side of microscope base body 140, and make its protecgulum 210 withstand on microscope base plate 120, by inserting the depth coarse adjustment microdrive degree of support to microscope base plate 120 of degree, namely as shown in Figure 6, coarse adjustment microscope base plate 120 is in the angle of pitch orientation (turning about the Z axis) and yaw direction (turning about the X axis)。The jackscrew 270 initial position with fixing microdrive provided by the invention is tightened, afterwards again through turning jackscrew 270 rear end, it is achieved the pretension degree of fine setting piezoelectric pile 240 after coarse adjustment。Needed for piezoelectric pile 240, all kinds of electric wires arrange groove and are connected in piezoelectric pile 240, input driving voltage, control piezoelectric pile 240 elongation and shorten, it is achieved the pose adjustment to microscope base plate 120 pitch orientation and yaw direction。
Prove that the piezoelectric microactuators utensil for optical mirror plane vibration control provided by the invention has good control accuracy below by way of Control release。Contrast experiment is not for use under drive case provided by the invention, in the control result of the close control gained of the same terms。
Adopt the 10Hz that amplitude is identical, 50Hz, on three frequencies of 150Hz harmonic excitation, the base platform of the optical adjusting frame being provided with microdrive provided by the invention is carried out exciting, the laser beam that generating laser sends is after exciting direct reflection, the screen of optical sensitive detector is formed laser facula, microdrive provided by the invention is by controlling the pitching yaw-position of microscope base plate 120, control laser facula side-play amount on optical sensitive detector screen, it is achieved laser beam points to and controls。
Experiment obtains the side-play amount on optical sensitive detector of the hot spot after excited direct reflection is controlled effect curve respectively as shown in Fig. 7～14, control effect curve under arbitrary excitation is such as shown in Figure 13～14, the vertical coordinate of Fig. 7 to Figure 14 is laser facula side-play amount on light sensor screen, and unit is mm。
From Fig. 7～14 it can be seen that the side-play amount of laser facula is substantially no more than 0.05mm after vibration control。The index path of the vibration control experiment of this optical adjusting frame is as shown in figure 15, wherein optical sensitive detector screen is vertical with laser eyepiece pointing direction, screen center is apart from excited specular optical center L=10m, and the relation that thus can be calculated between beam deflection angle θ and the laser facula total drift amount a on optical sensitive detector screen is shown below:
Be can be calculated by above formula, beam-pointing stability under lens systems vibration environment is controlled to reach microradian magnitude and (reads vertical coordinate by piezoelectric microactuators device provided by the invention, then reflection ray traveling optical paths is illustrated, finally it is converted into angle, obtain microradian magnitude), demonstrate microdrive provided by the invention and can effectively realize controlling。Contrast is the displacement before and after controlling, and after adopting piezoelectric microactuators device provided by the invention to be controlled, the total displacement amount of controlled device die-offs to less than 0.05mm, it was demonstrated that the present invention provides device effect obvious。
Present configuration is simple, it is flexible to control, it is adaptable to the vibration control of various optical elements and beam-pointing actively control。
Those skilled in the art will know that the scope of the present invention is not restricted to example discussed above, it is possible to it is carried out some changes and amendment, without deviating from the scope of the present invention that appended claims limits。Although oneself is through illustrating and describing the present invention in the accompanying drawings and the description in detail, but such explanation and description are only illustrate or schematic, and nonrestrictive。The present invention is not limited to the disclosed embodiments。
By to accompanying drawing, the research of specification and claims, it will be appreciated by those skilled in the art that and realize the deformation of the disclosed embodiments when implementing the present invention。In detail in the claims, term " includes " being not excluded for other steps or element, and indefinite article " " or " one " are not excluded for multiple。The fact that some measure quoted in mutually different dependent claims do not mean that the combination of these measures can not be advantageously used。Any reference marker in claims is not construed to limit the scope of the present。
Claims (10)
1. the piezoelectric microactuators device for optical mirror plane vibration control, it is characterized in that, including protecgulum, for controlling described optical mirror plane in the piezoelectric pile of its pitching yaw direction present position with for holding the sleeve of piezoelectric pile, one end of described protecgulum is connected on described optical mirror plane, and the other end is connected with one end of described piezoelectric pile and is contained in described sleeve；The other end of described piezoelectric pile is contained in described sleeve in advance tightly。
2. the piezoelectric microactuators device for optical mirror plane vibration control according to claim 1, it is characterised in that one end of described protecgulum is provided with blunt end, and described blunt end is connected on described optical mirror plane。
3. the piezoelectric microactuators device for optical mirror plane vibration control according to claim 2, it is characterized in that, the other end of described protecgulum is provided with the groove for making described piezoelectric pile insert, and described groove is arranged in the other end of described protecgulum, is provided with chamfering in described groove。
4. the piezoelectric microactuators device for optical mirror plane vibration control according to claim 3, it is characterised in that also include linear bearing and inner sleeve, described protecgulum and described piezoelectric pile and connected by linear bearing lubrication；Described inner sleeve is sheathed on described linear bearing, and accommodation is fixedly connected in described sleeve。
5. the piezoelectric microactuators device for optical mirror plane vibration control according to claim 4, it is characterized in that, also including the bonnet for propping up described piezoelectric pile, a section of described bonnet is inserted in described piezoelectric pile, and the other end is slideably positioned in described sleeve。
6. the piezoelectric microactuators device for optical mirror plane vibration control according to claim 5, it is characterized in that, described bonnet includes the upper cylinder and the lower cylinder that are connected, and described upper cylinder is inserted in described piezoelectric pile, and described lower cylinder is slideably positioned in described sleeve。
7. the piezoelectric microactuators device for optical mirror plane vibration control according to claim 6, it is characterized in that, also including the jackscrew for fixing described piezoelectric pile position, one end of described jackscrew is connected with described sleeve by screw thread, and the other end stretches out outside described sleeve。
8. the piezoelectric microactuators device for optical mirror plane vibration control according to claim 7, it is characterized in that, in described sleeve, segmentation is sequentially provided with the first fixing groove, the second sliding tray and the 3rd supports groove, and the accommodation of described inner sleeve is connected in the described first fixing groove；
Described bonnet is slidingly accommodated in described second sliding tray；
Described jackscrew is threadedly connected to the described 3rd and supports in groove。
9. an optical mirror plane micromatic setting, it is characterized in that, including optical mirror plane device, at least 2 piezoelectric microactuators devices for optical mirror plane vibration control as according to any one of claim 1～8, microdrive support and microscope base body, described one end for the piezoelectric microactuators device of optical mirror plane vibration control is installed in described microdrive support, the other end is connected on the optical mirror plane of described optical mirror plane device, the described piezoelectric microactuators device for optical mirror plane vibration control is arranged in pairs, and be connected to respectively on the basifacial two opposite sides of described optical frames。
10. optical mirror plane micromatic setting according to claim 9, it is characterized in that, described optical mirror plane device includes microscope base, the microscope base plate being installed on described microscope base, the eyeglass being installed on microscope base plate and just to described microscope base interval install microscope base body, the outer lower portion interval of described microscope base body is provided with the microdrive support for installing described microdrive。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610227613.8A CN105700108B (en) | 2016-04-13 | 2016-04-13 | Piezoelectric microactuators device for optical mirror plane vibration control |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610227613.8A CN105700108B (en) | 2016-04-13 | 2016-04-13 | Piezoelectric microactuators device for optical mirror plane vibration control |
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| CN105700108A true CN105700108A (en) | 2016-06-22 |
| CN105700108B CN105700108B (en) | 2018-02-09 |
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| CN201610227613.8A Expired - Fee Related CN105700108B (en) | 2016-04-13 | 2016-04-13 | Piezoelectric microactuators device for optical mirror plane vibration control |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106352815A (en) * | 2016-09-18 | 2017-01-25 | 国防科学技术大学 | Laser beam measurement and direction control experiment system |
| WO2019080176A1 (en) * | 2017-10-24 | 2019-05-02 | 谢宏林 | Electronic cigarette |
| CN110703407A (en) * | 2019-10-17 | 2020-01-17 | 中国科学院长春光学精密机械与物理研究所 | High-precision spliced reflector supporting and driving structure |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007003990A (en) * | 2005-06-27 | 2007-01-11 | Konica Minolta Opto Inc | Lens barrel and imaging apparatus |
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
| CN103091834A (en) * | 2013-02-20 | 2013-05-08 | 清华大学 | Deformation mirror |
| CN103257447A (en) * | 2013-06-05 | 2013-08-21 | 清华大学 | Deformable mirror |
| CN103728722A (en) * | 2012-12-28 | 2014-04-16 | 清华大学 | Deformable mirror and actuator assembly thereof |
-
2016
- 2016-04-13 CN CN201610227613.8A patent/CN105700108B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007003990A (en) * | 2005-06-27 | 2007-01-11 | Konica Minolta Opto Inc | Lens barrel and imaging apparatus |
| CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
| CN103728722A (en) * | 2012-12-28 | 2014-04-16 | 清华大学 | Deformable mirror and actuator assembly thereof |
| CN103091834A (en) * | 2013-02-20 | 2013-05-08 | 清华大学 | Deformation mirror |
| CN103257447A (en) * | 2013-06-05 | 2013-08-21 | 清华大学 | Deformable mirror |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106352815A (en) * | 2016-09-18 | 2017-01-25 | 国防科学技术大学 | Laser beam measurement and direction control experiment system |
| US20180081146A1 (en) * | 2016-09-18 | 2018-03-22 | National University Of Defense Technology | Experimental System for Laser Beam Measurement and Steering Control |
| CN106352815B (en) * | 2016-09-18 | 2018-10-19 | 国防科学技术大学 | Laser beam measures and is directed toward control experimental system |
| US10473889B2 (en) * | 2016-09-18 | 2019-11-12 | National University Of Defense Technology | Experimental system for laser beam measurement and steering control |
| WO2019080176A1 (en) * | 2017-10-24 | 2019-05-02 | 谢宏林 | Electronic cigarette |
| CN110703407A (en) * | 2019-10-17 | 2020-01-17 | 中国科学院长春光学精密机械与物理研究所 | High-precision spliced reflector supporting and driving structure |
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| CN105700108B (en) | 2018-02-09 |
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