JP7346073B2 - Coating mechanism and coating device - Google Patents

Description

The present invention relates to a coating mechanism and a coating device.

Patent Document 1 (Japanese Unexamined Patent Publication No. 2015-112577) describes a coating mechanism. The coating mechanism described in Patent Document 1 includes a coating needle and a coating needle holder. The applicator needle holder holds the applicator needle so that the tip of the applicator needle is exposed.

Patent Document 2 (Japanese Unexamined Patent Publication No. 2004-317189) describes a transfer mechanism. The transfer mechanism described in Patent Document 2 includes a plurality of transfer members and a holding member. A plurality of holes are formed in the holding member. The holding member holds the transfer member by inserting the transfer member into the hole.

JP 2015-112577 Publication Japanese Patent Application Publication No. 2004-317189

The number of coating needles that the coating mechanism described in Patent Document 1 has is one. Therefore, the coating mechanism described in Patent Document 1 has room for improvement in terms of increasing the coating speed. In the transfer mechanism described in Patent Document 2, the hole of the holding member is formed to have a predetermined fitting tolerance with respect to the transfer member. If this fitting tolerance becomes large, while it becomes easier for the transfer member to slide relative to the holding member, there is a risk that the transfer member may wobble relative to the holding member. If the transfer member shakes with respect to the holding member, the pitch of the liquid material applied to the substrate will vary. If this fitting tolerance becomes small, there is a risk that the transfer member may slide poorly with respect to the holding member.

Further, in the transfer mechanism described in Patent Document 2, no particular consideration is given to the fact that the height position of the substrate to which the liquid material is applied varies from transfer member to transfer member.

The present invention has been made in view of the problems of the prior art as described above. More specifically, the present invention improves the coating speed, alleviates the influence of variations in the height position of the substrate to which the coating liquid is applied and the height position of the well bottom surface, and improves the pitch of the coating liquid applied to the substrate. The present invention provides a coating mechanism that can suppress variations.

A coating mechanism according to one aspect of the present invention includes a plurality of coating needles and a coating needle holder that holds the coating needles. The applicator needle has a distal end and a base end opposite to the distal end, and is held by the applicator needle holder so that the distal end is exposed from the applicator needle holder. The coating needle holder includes a housing, a plurality of fixing members to which the coating needles are fixed, and a height displacement absorption mechanism that individually absorbs displacement of the plurality of coating needles in the direction from the proximal end to the distal end.

In the above application mechanism, the application needle holder may further include a linear motion mechanism that supports the fixing member movably in the direction from the base end to the distal end inside the housing.

The coating mechanism described above may further include a container filled with the coating liquid applied by the coating needle. The container may have a lid closing the top end of the container and a bottom wall closing the bottom end of the container. The lid may have a first through hole through which the application needle can be inserted. A second through hole through which a coating needle can be inserted may be formed in the bottom wall.

In the above application mechanism, the application needle holder may further include a plurality of elastic members that bias the fixing member along the direction from the proximal end to the distal end.

In the above application mechanism, the housing may include a first housing portion to which the linear motion mechanism is attached, and a second housing portion attached to the first housing portion. The elastic member may be attached to the fixed member at one end and to the second housing portion at the other end. The second housing portion may be configured to be able to change its relative position with respect to the first housing portion in the direction from the proximal end to the distal end.

In the above application mechanism, the application needle may include a plane at the distal end that intersects in the direction from the proximal end to the distal end.

In the above application mechanism, a concave portion that is depressed toward the base end may be formed in the plane.

In the above application mechanism, a convex portion may be formed on the plane to protrude in a direction from the base end to the distal end.

In the above coating mechanism, the coating needle may be configured to apply the coating liquid to a well formed on the surface of the well plate. The distance between two adjacent application needles may be equal to the distance between two adjacent wells.

A coating device according to one aspect of the present invention includes the coating mechanism described above.

According to the coating mechanism and coating device according to one aspect of the present invention, variation in the pitch of the coating liquid applied to the substrate is suppressed, and the coating speed is improved.

FIG. 3 is a front view of the coating mechanism 100. 3 is a side view of the coating mechanism 100. FIG. FIG. 2 is a front view of the coating mechanism 100 in which the coating needle 8 and coating needle holder 9 are not shown. 9 is a perspective view of a housing 91. FIG. FIG. 3 is an exploded perspective view of a housing 91. FIG. FIG. 3 is a rear view of the coating needle holder 9. FIG. It is a front view of the application needle holder 9 with illustration of the holder lid 91g omitted. FIG. 2 is a perspective view of a coating device 200. 3 is an enlarged view of the vicinity of the tip 8a of the coating needle 8 in the coating mechanism 300. FIG. FIG. 7 is an enlarged view of the vicinity of the tip 8a of the coating needle 8 in a first modification of the coating mechanism 300. 7 is an enlarged view of the vicinity of the tip 8a of the coating needle 8 in a second modification of the coating mechanism 300. FIG. FIG. 4 is an exploded perspective view of a housing 91 in the coating mechanism 400. It is a front view of the application needle holder 9 in the application mechanism 300 with illustration of the holder lid 91g omitted.

Details of the embodiments will be described with reference to the drawings. In the following drawings, the same or corresponding parts are given the same reference numerals, and overlapping descriptions will not be repeated.

(First embodiment)
The configuration of the coating mechanism (hereinafter referred to as "coating mechanism 100") according to the first embodiment will be described below.

FIG. 1 is a front view of the coating mechanism 100. FIG. 2 is a side view of the coating mechanism 100. As shown in FIGS. 1 and 2, the application mechanism 100 includes a pedestal 1, a servo motor 2, a cam 3, a bearing 4, a cam connection plate 5, a movable part 6, an elastic member 7, and a plurality of components. It has a coating needle 8, a coating needle holder 9, and a plurality of containers 10. The number of containers 10 corresponds to the number of application needles 8.

The servo motor 2 has a main body 21 and a shaft 22. The main body portion 21 rotates the shaft 22 around the central axis. The extending direction of the shaft 22 (the direction along the central axis of the shaft 22) is referred to as a first direction DR1. The servo motor 2 is attached to the pedestal 1.

The cam 3 is attached to the shaft 22. The cam 3 has a first surface 31 and a second surface 32. The cam 3 is attached to the shaft 22 at the first surface 31 . Therefore, as the shaft 22 rotates, the cam 3 also rotates. The second surface 32 is the opposite surface to the first surface 31.

The first surface 31 has a first flat area, a slope area, and a second flat area along the circumferential direction. In the first flat region, the distance between the first surface 31 and the second surface 32 is constant. In the second flat region, the distance between the first surface 31 and the second surface 32 is constant. The distance between the first surface 31 and the second surface 32 in the first flat region is larger than the distance between the first surface 31 and the second surface 32 in the second flat region. The slope area is located between the first flat area and the second flat area in the circumferential direction. The slope area is continuous with the first flat area and the second flat area. The distance between the first surface 31 and the second surface 32 in the slope region gradually becomes smaller from the first region toward the second region.

The bearing 4 is arranged such that the outer peripheral surface of the bearing 4 is in contact with the first surface 31. The cam connection plate 5 has one end and the other end. The cam connecting plate 5 is connected to the bearing 4 at one end.

The movable part 6 is connected to the other end of the cam connection plate 5. The movable part 6 has a movable base 61. FIG. 3 is a front view of the coating mechanism 100 with the coating needle 8 and coating needle holder 9 not shown. As shown in FIG. 3, a magnet 61a and a magnet 61b are attached to the movable base 61. The movable base 61 has a reference surface 61c and a reference surface 61d. A coating needle holder 9 is attached to the movable base 61.

As shown in FIG. 2, the elastic member 7 is fixed at one end to a fixed pin attached to the pedestal 1, and at the other end to a fixed pin attached to the movable part 6. The elastic member 7 urges the movable part 6 so that the bearing 4 is pressed against the first surface 31. The elastic member 7 is, for example, a coil spring.

When the main body portion 21 rotates the shaft 22, the cam 3 rotates. Since the distance between the first surface 31 and the second surface 32 changes along the circumferential direction, as the cam 3 rotates, the position of the bearing 4 in the first direction DR1 in contact with the first surface 31 changes. The bearing 4 is connected to the movable part 6 via a cam connection plate 5. The applicator needle holder 9 is attached to the movable part 6 (movable base 61). Therefore, as the position of the bearing 4 changes in the first direction DR1, the position of the coating needle holder 9 in the first direction DR1 changes.

The applicator needle holder 9 has a housing 91 . FIG. 4 is a perspective view of the housing 91. As shown in FIG. 4, the housing 91 has an upper wall 91a, a first side wall 91b, a second side wall 91c, a third side wall 91d, and a fourth side wall 91e. The first side wall 91b and the second side wall 91c face each other in the second direction DR2, and the third side wall 91d and the fourth side wall 91e face each other in the third direction DR3. The second direction DR2 is a direction orthogonal to the first direction DR1 and the third direction DR3, and the third direction DR3 is a direction orthogonal to the first direction DR1 and the second direction DR2.

FIG. 5 is an exploded perspective view of the housing 91. As shown in FIG. 5, the housing 91 includes a holder base 91f (first housing portion) and a holder lid 91g (second housing portion).

The holder base 91f includes a first side wall 91b, a first standing wall 91h, and a second standing wall 91i. The first standing wall 91h and the second standing wall 91i protrude from the first side wall 91b toward the second side wall 91c, and extend along the first direction DR1. The first standing wall 91h and the second standing wall 91i are arranged at intervals along the third direction DR3. A screw hole 91ha is formed in the first upright wall 91h, and a screw hole 91ia is formed in the second upright wall 91i.

The holder lid 91g includes a second side wall 91c, a third side wall 91d, a fourth side wall 91e, and a spring receiving portion 91j. The spring receiving portion 91j constitutes an upper wall 91a together with the end portions of the first upright wall 91h and the second upright wall 91i in the first direction DR1.

A through hole 91ca and a through hole 91cb are formed in the second side wall 91c. The through hole 91ca and the through hole 91cb penetrate the second side wall 91c in the thickness direction. The through hole 91ca and the through hole 91cb are arranged at positions overlapping the screw hole 91ha and the screw hole 91ia, respectively, in a state where the holder lid 91g is assembled to the holder base 91f. The holder lid 91g is assembled by passing a screw (not shown) through the through hole 91ca and screwing it into the screw hole 91ha, and by passing a screw (not shown) through the through hole 91cb and screwing it into the screw hole 91ia. , is attached to the holder base 91f.

The width of the through hole 91ca in the first direction DR1 is larger than the width of the through hole 91ca in the third direction DR3. The width of the through hole 91ca in the first direction DR1 is larger than the width of the through hole 91ca in the third direction DR3. The through hole 91ca has, for example, an elliptical shape with a long axis along the first direction DR1. The width of the through hole 91cb in the first direction DR1 is larger than the width of the through hole 91cb in the third direction DR3. The width of the through hole 91cb in the first direction DR1 is larger than the width of the through hole 91cb in the third direction DR3. The through hole 91cb has, for example, an elliptical shape with a long axis along the first direction DR1. Since the through hole 91ca and the through hole 91cb have the above shapes, the holder lid 91g can change the relative position with respect to the holder base 91f in the first direction DR1.

FIG. 6 is a rear view of the applicator needle holder 9. As shown in FIG. 6, a magnet 91k and a magnet 91l are attached to the surface of the first side wall 91b opposite to the second side wall 91c. The housing 91 is attached to the movable base 61 by attracting the magnet 91k to the magnet 61a and by attracting the magnet 91l to the magnet 61b. Thereby, the housing 91 and the movable base 61 can be easily attached. Note that the housing 91 may be attached to the movable base 61 using bolts, nuts, or the like.

When the housing 91 is attached to the movable base 61, the upper wall 91a is in contact with the reference surface 61c, and the third side wall 91d is in contact with the reference surface 61d. In a state where the upper wall 91a is in contact with the reference surface 61c and the third side wall 91d is in contact with the reference surface 61d, the magnet 61a is arranged at a position shifted toward the reference surface 61c from the position where it directly faces the magnet 91k. The magnet 61b is disposed at a position shifted toward the reference plane 61d from the position directly facing the magnet 91l. As a result, the attraction force of each magnet acts in the direction in which the upper wall 91a and the third side wall 91d are pressed against the reference surface 61c and the reference surface 61d, respectively, so that the positioning accuracy of the housing 91 with respect to the movable base 61 can be improved. I can do it.

FIG. 7 is a front view of the coating needle holder 9 with the holder lid 91g not shown. As shown in FIG. 7, the application needle holder 9 further includes a plurality of fixing members 92, a plurality of linear motion mechanisms 93, and a plurality of elastic members 94. The number of fixed members 92, the number of linear motion mechanisms 93, and the number of elastic members 94 are equal to the number of application needles 8. That is, a fixing member 92, a linear motion mechanism 93, and an elastic member 94 are provided for each application needle 8.

The applicator needle 8 is fixed to the fixing member 92 . The applicator needle 8 has a distal end 8a and a proximal end 8b. The direction from the base end 8b to the distal end 8a is along the first direction DR1. The applicator needle 8 is held by the applicator needle holder 9 by being fixed to the fixing member 92 so that the tip 8a is exposed from the applicator needle holder 9.

The linear motion mechanism 93 is arranged inside the housing 91. The linear motion mechanism 93 is attached to the surface of the first side wall 91b facing the second side wall 91c. The linear motion mechanisms 93 are arranged at intervals along the third direction DR3. The linear motion mechanism 93 is arranged between the first upright wall 91h and the second upright wall 91i. The linear motion mechanism 93 supports the fixed member 92 so as to be movable along the first direction DR1. Movement of the fixed member 92 in directions other than the first direction DR1 is regulated by a linear motion mechanism 93. The linear motion mechanism 93 is, for example, a linear guide.

The elastic member 94 is attached to the fixed member 92 at one end, and attached to the spring receiving portion 91j at the other end. The elastic member 94 urges the fixing member 92 in the direction from the base end 8b to the distal end 8a. The elastic member 94 functions as a height displacement absorbing mechanism that absorbs variations in the position of the substrate SUB to which the coating liquid is applied in the first direction DR1. By changing the relative position of the holder lid 91g to the holder base 91f in the first direction DR1, the biasing force exerted by the elastic member 94 can be adjusted. The biasing force of the elastic member 94 is preferably as small as possible to maintain the position of the fixing member 92. The elastic member 94 is, for example, a coil spring.

In the above description, an example has been described in which the number of coating needles 8 held by the coating needle holder 9 is four, but the number of coating needles 8 is not limited to this. The applicator needle holder 9 may hold a plurality of sets of applicator needles 8 arranged along the third direction DR3 and a plurality of sets along the second direction DR2.

Container 10 is arranged at a position closer to substrate SUB than application needle holder 9 in first direction DR1. The container 10 is filled with a coating liquid. The upper end of the container 10 is closed with a lid. A through hole is formed in the lid of the container 10, and the coating needle 8 is passed through the through hole. The coating liquid is a paste containing conductive particles when drawing a circuit pattern on the substrate SUB. The coating solution may be a solution containing cells or proteins. The substrate SUB may be a well plate in which a plurality of wells (holes with bottoms) are formed on the surface. For example, 6 to 384 wells are formed in a grid pattern on the surface of the well plate. A specific example of a well plate is a microwell plate (a registered trademark of Thermo Fisher Scientific Inc.). Note that in the well plate, the position of the well bottom surface in the first direction DR1 may vary from well to well. Note that when a well plate is used as the substrate SUB, it is preferable that the distance between two adjacent wells be equal to the distance between two adjacent coating needles 8. The lower end of the container 10 is closed by a bottom wall. By operating the servo motor 2, the tip 8a to which the coating liquid is attached protrudes from the through hole formed in the bottom wall of the container 10. Note that the diameter of the through hole formed in the bottom wall of the container 10 is set to a size that prevents the coating liquid from flowing out due to the surface tension of the coating liquid.

A container 10 is arranged for each application needle 8. Each container 10 is filled with a different coating liquid. Each container 10 may be filled with the same coating liquid. The container 10 may be formed in one piece.

The effects of the coating mechanism 100 will be explained below.
In the coating mechanism 100, the coating needle holder 9 holds a plurality of coating needles 8. Therefore, according to the coating mechanism 100, the coating liquid can be applied to a plurality of locations at once, thereby improving the coating speed.

The position of the substrate SUB to which the coating liquid is applied in the first direction DR1 may vary depending on the application needle 8. In the coating mechanism 100, since a height position absorbing mechanism (elastic member 94) is provided for each coating needle 8, the variation in the position of the substrate SUB to which the coating liquid is applied in the first direction DR1 is adjusted for each coating needle 8. can be absorbed into.

In the coating mechanism 100, the fixing member 92 to which the coating needle 8 is fixed is guided along the first direction DR1 by a linear motion mechanism 93, and movement in directions other than the first direction DR1 is restricted. Therefore, according to the coating mechanism 100, the wobbling of the coating needle 8 and the variation in the pitch at which the coating liquid is applied due to the wobbling are suppressed.

In the coating mechanism 100, the coating needle holder 9 has an elastic member 94. Since the elastic member 94 biases the fixing member 92 along the direction from the base end 8b to the distal end 8a, when the applicator needle holder 9 is moved up and down by operating the servo motor 2, the fixing member Fluctuations in the relative position of the coating needle 92 (coating needle 8) to the coating needle holder 9 can be suppressed. Further, by elastically deforming the elastic member 94 when the coating needle 8 contacts the substrate SUB, application of excessive stress to the coating needle 8 can be suppressed.

In the application mechanism 100, the relative position of the holder lid 91g to the holder base 91f in the first direction DR1 can be adjusted, so that the biasing force exerted by the elastic member 94 on the fixing member 92 can be optimized. Note that the biasing force applied to the fixing member 92 by the elastic member 94 influences the stress applied to the coating needle 8 when the coating needle 8 contacts the substrate SUB.

In the coating mechanism 100, since the container 10 has a lid, drying of the coating liquid is suppressed. Since the coating mechanism 100 has a container 10 for each coating needle 8, mixing of different coating liquids with each other is suppressed.

The configuration of the coating apparatus (hereinafter referred to as "coating apparatus 200") according to the first embodiment will be described below.

FIG. 8 is a perspective view of the coating device 200. As shown in FIG. 8, the coating device 200 includes a coating mechanism 100, a first stage 210, a second stage 220, a third stage 230, an optical system 240, a camera 250, and a control computer 260. , a monitor 270, and an operation panel 280.

The coating mechanism 100 is attached to the first stage 210. Thereby, the application mechanism 100 is movable along the first direction DR1. A substrate SUB is placed on the second stage 220 and the third stage 230. The second stage 220 and the third stage 230 are capable of moving the substrate SUB in the second direction DR2 and the third direction DR3, respectively.

The optical system 240 observes the coating position on the substrate SUB. Camera 250 converts the image on substrate SUB observed by optical system 240 into an electrical signal. The camera 250 is, for example, a CCD (Charge Coupled Device) image sensor, a CMOS (Complementary Metal Oxide Semiconductor) image sensor, or the like.

The control computer 260 controls the coating mechanism 100, the first stage 210, the second stage 220, the third stage 230, the optical system 240, and the camera 250. The control computer 260 moves the coating needle 8 up and down at a predetermined speed by determining the rotational speed of the servo motor 2 based on the coating speed command value of the control program. A coating operation is performed by moving the coating needle 8 up and down. If the control computer 260 is communicating with an upper control system (not shown), the coating speed command value may be received from the upper control system. The control computer 260 stores parameters corresponding to the type of coating liquid in the storage unit, and calculates the above-mentioned coating speed command value according to the specified type of coating liquid and the coating amount or coating size. It's okay.

The monitor 270 displays the image signal acquired by the camera 250 and the image from the control computer 260. The operation panel 280 is configured to allow input of commands to the control computer 260.

When drawing a circuit pattern on the substrate SUB using the coating device 200, firstly, by operating the second stage 220 and the third stage 230, the area on the substrate SUB where the circuit pattern is drawn is covered by the optical system. Move the substrate SUB so that it is located directly below 240. Second, the drawing start position is determined by observing and confirming the drawing start position using the optical system 240.

Third, based on the determined drawing start position, the first stage 210 is operated to lower the coating mechanism 100 to a position where the tip 8a contacts the substrate SUB when the coating needle 8 is protruded from the container 10. let Note that since the relationship between the lowering end position of the coating needle 8 and the focus position of the optical system 240 is stored in advance in the control computer 260, the lowering amount of the coating mechanism 100 can be adjusted based on the focus position of the optical system 240. All you have to do is decide. Fourth, by operating the servo motor 2 to cause the coating needle 8 to protrude from the container 10, the coating liquid adhering to the tip 8a is brought into contact with the substrate SUB.

When coating is performed continuously, the second stage 220 and the third stage 230 are operated so that the next drawing position is located directly below the coating mechanism 100, and the fourth operation described above is performed. By repeating the above operations, a circuit pattern is drawn on the substrate SUB using the coating material. Note that after all coatings are completed, the coating mechanism 100 is raised by operating the first stage 210.

If the area on which the circuit pattern is drawn is large and the height of the surface of the substrate SUB varies greatly during the drawing, the focus position of the optical system 240 may be checked during the drawing as necessary, and the position of the coating needle 8 may be adjusted. The coating operation may be continued while being corrected. The adjustment of the focus position at this time may be performed automatically using image processing. The position of the coating needle 8 may be adjusted in real time by constantly detecting the height of the surface of the substrate SUB using a laser sensor or the like.

In the above, an example in which a circuit pattern is drawn on the substrate SUB has been described, but if a plurality of wells are formed on the substrate SUB (the substrate SUB is a well plate), two wells adjacent to the pitch of the well By matching the intervals between the two coating needles 8, it is possible to coat a number of wells equal to the number of coating needles 8 at once in one coating operation.

(Second embodiment)
The configuration of the coating mechanism (hereinafter referred to as "coating mechanism 300") according to the second embodiment will be described below. Here, points that are different from the configuration of the coating mechanism 100 will be mainly explained, and redundant explanations will not be repeated.

FIG. 9 is an enlarged view of the vicinity of the tip 8a of the coating needle 8 in the coating mechanism 300. As shown in FIG. 9, the applicator needle 8 has a flat surface 8aa at the tip 8a. The plane 8aa intersects with the first direction DR1 (ie, the direction from the base end 8b to the distal end 8a). It is preferable that the plane 8aa is orthogonal to the first direction DR1. The plane 8aa has, for example, a circular shape. The diameter of the plane 8aa is, for example, 50 μm or more and 330 μm or less.

<First modification example>
FIG. 10 is an enlarged view of the vicinity of the tip 8a of the coating needle 8 in the first modified example of the coating mechanism 300. As shown in FIG. 10, a recess 8ab is formed in the plane 8aa. The recess 8ab is depressed toward the base end 8b.

<Second modification example>
FIG. 11 is an enlarged view of the vicinity of the tip 8a of the coating needle 8 in a second modification of the coating mechanism 300. As shown in FIG. 11, a convex portion 8ac is formed on the plane 8aa. The convex portion 8ac protrudes from the plane 8aa along the direction from the base end 8b to the distal end 8a.

(Third embodiment)
The configuration of a coating mechanism (hereinafter referred to as "coating mechanism 400") according to the third embodiment will be described below. Here, points that are different from the configuration of the coating mechanism 100 will be mainly explained, and redundant explanations will not be repeated.

FIG. 12 is an exploded perspective view of the housing 91 in the coating mechanism 400. As shown in FIG. 12, the holder base 91f includes an upper wall 91a, a first side wall 91b, a first upright wall 91h, and a second upright wall 91i. The holder lid 91g includes a second side wall 91c, a third side wall 91d, and a fourth side wall 91e.

FIG. 13 is a front view of the application needle holder 9 in the application mechanism 300 with the holder lid 91g not shown. As shown in FIG. 13, in the coating needle holder 9 of the coating mechanism 300, the other end of the elastic member 94 is attached to the upper wall 91a by a spring receiving screw 95. The biasing force exerted by the elastic member 94 on the fixing member 92 is adjusted by adjusting the tightening state of the spring receiving screw 95.

Although the embodiments of the present invention have been described above, the embodiments described above can be modified in various ways. Moreover, the scope of the present invention is not limited to the above-described embodiments. The scope of the present invention is indicated by the claims, and is intended to include all changes within the meaning and scope equivalent to the claims.

The above-described embodiments are particularly advantageously applied to a coating mechanism and a coating device having the coating mechanism.

1 frame, 2 servo motor, 3 cam, 4 bearing, 5 cam connection plate, 6 movable part, 7 elastic member, 8 coating needle, 8a tip, 8aa plane, 8ab recess, 8b base end, 9 coating needle holder, 10 container , 21 main body, 22 shaft, 31 first surface, 32 second surface, 61 movable base, 61a, 61b magnet, 61c, 61d reference surface, 91 housing, 91a upper wall, 91b first side wall, 91c second side wall , 91ca, 91cb through hole, 91d third side wall, 91e fourth side wall, 91f holder base, 91g holder lid, 91h first standing wall, 91ha screw hole, 91i second standing wall, 91ia screw hole, 91j spring receiving part, 91k, 91l magnet, 92 fixed member, 93 linear motion mechanism, 94 elastic member, 95 spring receiving screw, 100 coating mechanism, 200 coating device, 210 first stage, 220 second stage, 230 third stage, 240 optical system, 250 camera, 260 control computer, 270 monitor, 280 operation panel, 300, 400 coating mechanism, DR1 first direction, DR2 second direction, DR3 third direction, SUB substrate.

Claims (9)

multiple application needles,
and a coating needle holder that holds the coating needle,
The applicator needle has a distal end and a proximal end opposite to the distal end, and is held by the applicator needle holder such that the distal end is exposed from the applicator needle holder,
The coating needle holder includes a housing, a plurality of fixing members to which the coating needles are fixed, and a height displacement absorption mechanism that individually absorbs displacement of the plurality of coating needles in a direction from the base end to the distal end. and has
further comprising a container filled with the coating liquid applied by the coating needle,
The container has a lid that closes an upper end of the container, and a bottom wall that closes a lower end of the container,
A first through hole is formed in the lid, through which the applicator needle can be inserted;
A coating mechanism, wherein a second through hole through which the coating needle can be inserted is formed in the bottom wall. The coating mechanism according to claim 1, wherein the coating needle holder further includes a linear motion mechanism that supports the fixing member movably in a direction from the base end toward the distal end inside the housing. . 3. The application mechanism according to claim 2, wherein the height displacement absorption mechanism is constituted by an elastic member that biases the fixing member along a direction from the base end to the distal end. The housing includes a first housing portion to which the linear motion mechanism is attached, and a second housing portion attached to the first housing portion,
The elastic member is attached to the fixed member at one end and attached to the second housing portion at the other end,
The coating mechanism according to claim 3 , wherein the second housing portion is configured to be able to change a relative position with respect to the first housing portion in a direction from the base end toward the distal end. The application mechanism according to any one of claims 1 to 4, wherein the application needle includes, at the distal end, a plane that intersects in a direction from the base end toward the distal end. 6. The application mechanism according to claim 5, wherein the flat surface is provided with a recess that is recessed toward the base end. The application mechanism according to claim 5, wherein a convex portion is formed on the plane to protrude along a direction from the base end toward the distal end. The coating needle is configured to apply a coating liquid to a well formed on a surface of a well plate,
The coating mechanism according to any one of claims 1 to 7, wherein the spacing between two adjacent coating needles is equal to the spacing between two neighboring wells. A coating device comprising the coating mechanism according to any one of claims 1 to 8.

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