JP7214489B2 - Stage device and micromanipulator - Google Patents

Description

TECHNICAL FIELD The present invention relates to a stage device and a micromanipulator, and more particularly to a stage device and a micromanipulator useful in the field of assisted reproductive medicine.

In the field of assisted reproductive medicine, intracytoplasmic sperm injection (hereinafter referred to as "ICSI") is known as a method of directly injecting sperm into an egg. In addition, in ICSI, it is necessary to arrange the center axes of the injection pipette containing the sperm and the holding pipette holding the ovum on the same line. ”) is required to adjust the mounting angle.

This fine angle adjustment work is very important in ICSI, which requires fine work. A method is known for finely adjusting the angle of two pipettes by manually adjusting an angle adjusting screw provided on a fixed portion separated from the tips of the two pipettes by a predetermined distance. For example, Patent Document 1 describes a manipulator device that positions a microtool using a stage device having a hydraulic mechanism for adjustment in the translational direction and a device having a manual mechanism with an angle adjustment screw for tilt adjustment. . Further, Patent Document 2 describes an alignment stage that performs translational movement and rotational movement by combining two linear motors.

Japanese Patent No. 6163260 Japanese Patent No. 5887278

Yasuhisa Araki, "Technical Text for Assisted Reproductive Medicine", Ishiyaku Publishing Co., Ltd., January 10, 2015, p. 85-87

Normally, the fine adjustment of the angles of the two pipettes is performed while observing the field of view of the microscope with the tips of the two pipettes placed within the field of view of the microscope. However, in the method of manually adjusting the angle adjustment screw as described in Patent Document 1, the pipette may shake greatly during the adjustment work, and the tip of the pipette may be out of the microscope's field of view. It is hard to say that the adjustment work is easy. This problem is noticeable when the angle adjustment screw is located far from the tip of the pipette. In addition, in the configuration described in Patent Document 2, since there is no force to hold the pipette when power is not supplied, the pipette moves when the power supply is cut off. may cause problems.

The present invention is a technology that makes it possible to easily adjust the position and angle of the object to be driven in the field of view of the microscope with little deflection, and to maintain the adjusted state of the position and angle even when power is not supplied. intended to provide

A stage apparatus according to the present invention comprises a first stage having first linear motion means and second linear motion means, a second stage having third linear motion means and fourth linear motion means, a third stage having a fifth linear motion means, wherein the first linear motion means, the second linear motion means, the third linear motion means, the fourth linear motion means and the fifth linear motion means; A stage device comprising a vibration type actuator having a vibrating body and a contact body capable of relative movement as drive sources, wherein the first stage comprises the first linear motion means and the second linear motion means. By setting the driving amount of the linear motion means to be the same, the object to be driven is driven in the first direction, and by providing a difference between the driving amounts of the first linear motion means and the second linear motion means, the above-mentioned The object to be driven is rotated around an axis parallel to a second direction orthogonal to the first direction, and the second stage controls the amount of driving of the third linear motion means and the fourth linear motion means. are the same to drive the object to be driven in the second direction. The third stage rotates the driven object in the first direction and the second direction by driving the fifth linear motion means. The first linear motion means and the second linear motion means each have a movable portion capable of moving in the second direction, and the first stages are driven in a third direction orthogonal to each other. A first top plate having a first cam surface and a second cam surface parallel to each other and slidably contacting the first cam surface at two locations with a predetermined interval in the second direction. and a cam follower fixed to the movable portion of the first direct acting means and moving forward and backward in the second direction, wherein the in-plane direction of the first cam surface and the second cam surface is the second cam surface. 2, the normal direction of the first cam surface and the second cam surface forms an acute angle with the first direction, and the second cam surface forms an acute angle with the second linear motion means. is slidably supported by the movable portion of the

According to the present invention, the deflection of the tip of the object to be driven is small within the field of view of the microscope, and the position and angle can be easily adjusted. Become.

1 is a block diagram of a manipulator system according to an embodiment of the invention; FIG. FIG. 2 is an external perspective view of a stage device included in the manipulator system of FIG. 1; FIG. 3 is an external perspective view of a linear motion unit included in the stage device of FIG. 2; FIG. 4 is an exploded perspective view of the linear motion unit of FIG. 3; 3 is a diagram showing the configuration of a Z stage that constitutes the stage device of FIG. 2; FIG. 3 is a diagram showing the configuration of a Y stage that constitutes the stage device of FIG. 2; FIG. It is a figure showing the mode of the angle fine adjustment which rotates a pipette to the surroundings of the Z-axis. FIG. 3 is a diagram showing the configuration of an X stage that constitutes the stage device of FIG. 2; It is a figure explaining the structure of an angle adjustment unit. FIG. 3 is an enlarged cross-sectional view showing a rotary drive unit and its vicinity; FIG. 4 is a diagram showing an example of an injection pipette; FIG. 4 is a first schematic diagram showing how the angle of the injection pipette is finely adjusted. FIG. 10 is a second schematic diagram showing how the angle of the injection pipette is finely adjusted.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Here, a manipulator system used in assisted reproductive medicine will be taken up as an example of a micromanipulator equipped with a stage device according to the present invention. However, the stage device and micromanipulation device according to the present invention are not limited to this.

FIG. 1 is a block diagram showing a schematic configuration of a manipulator system 1 according to an embodiment of the invention. The manipulator system 1 comprises a microscope 2 , an imaging unit 3 , a display 4 , a controller 100 , a first manipulator 200 , a first injector device 300 , a second manipulator 400 and a second injector device 500 .

The microscope 2 has a focusing unit 2a that focuses on ova and sperm during ICSI work, the injection pipette 203 of the first manipulator 200, the holding pipette (not shown) of the second manipulator 400, and the like. The imaging unit 3 has an imaging element such as a CMOS sensor that acquires images via the optical system of the microscope 2, and acquires images of ova, sperm, injection pipette 203, holding pipette 403, and the like. The image acquired by the imaging unit 3 is input to the image input section 109 of the controller 100 .

Controller 100 has display panel 101 , operation panel 102 , image input section 109 , image analysis section 107 , image output section 108 , displacement detection section 103 , calculation section 104 , storage section 105 and control section 106 . The operation panel 102 includes, for example, dials, switches, and foot pedals (not shown) for inputting control parameters used by the control unit 106 . A display panel 101 displays control parameters and the like set by the operation panel 102 . In addition, by configuring the display panel 101 as a touch panel, the display panel 101 can be used as one operation means constituting the operation panel 102 .

An image sent from the imaging unit 3 is input to the image input unit 109 . An image input to the image input unit 109 is sent to the image analysis unit 107 and the image output unit 108 . An image analysis unit 107 analyzes the image obtained by the imaging unit 3 . The analysis result of the image analysis unit 107 is sent to the calculation unit 104 and the image output unit 108 . The image output unit 108 outputs the analysis result sent from the image analysis unit 107 and the image sent from the image input unit 109 to the display 4 . The display 4 displays the image sent from the image output unit 108, and combines and displays the analysis result sent from the image analysis unit 107 at that time, so that the object to be observed with the microscope 2 can be displayed more precisely. can be expressed. It is also possible to remotely operate the first manipulator 200 and the like while observing the display 4 .

The displacement detection unit 103 detects each displacement of the output unit 201 and the input unit 202 of the first manipulator 200 and each displacement of the output unit 401 and the input unit 402 of the second manipulator 400 . A displacement detection result detected by the displacement detection unit 103 is sent to the calculation unit 104 . The calculation unit 104 performs predetermined calculations based on the analysis result obtained from the image analysis unit 107 , the displacement detection result obtained from the displacement detection unit 103 , and the information read from the storage unit 105 . A calculation result by the calculation unit 104 is sent to the control unit 106 and the storage unit 105 .

The control unit 106 outputs the control amount based on the calculation result of the calculation unit 104 and the information read from the storage unit 105 to the output unit 201 of the first manipulator 200 and the output unit 401 of the second manipulator 400. . The storage unit 105 stores the calculation result of the calculation unit 104 and the control amount obtained by the control unit 106 . In addition, the storage unit 105 performs calculations of the image input to the image input unit 109, the analysis result of the image analysis unit 107, the movement amount detected by the displacement detection unit 103, the input amount input to the operation panel 102, and the like. Information other than unit 104 and control unit 106 can also be stored.

The first manipulator 200 has an output section 201 and an input section 202 . The output unit 201 has an injection pipette 203 (object to be driven), an injection pipette holder 204 (holding means for holding the object to be driven), and a stage device 900 . Note that the output unit 201 and its detailed configuration will be described later. Also, the configuration of the input unit 202 will be described after the configuration and operation of the output unit 201 are described.

The stage device 900 has a Z stage 800 (first stage), a Y stage 700 (second stage), an X stage 600 (third stage), an angle adjustment unit 2200 and a rotation drive unit 2300 . As will be described later, the Z stage 800 can move the injection pipette 203 in the Z-axis direction (first direction) and rotate it around the Y-axis. As will be described later, the Y stage 700 can move the injection pipette 203 in the Y-axis direction (second direction) and rotate it around the Z-axis. The X stage 600 can move the injection pipette 203 in the X-axis direction (third direction), as will be described later. The X-axis direction, the Y-axis direction, and the Z-axis direction are orthogonal to each other. The Y-axis direction is a direction perpendicular to the X-axis direction and the Z-axis direction.

The first injector device 300 has a cylinder 301 , a piston 302 whose capacity can be adjusted by moving back and forth in the cylinder 301 , and an operating portion 303 which can drive the piston 302 back and forth. One end of the tube 304 is connected to the cylinder 301 . The other end of the tube 304 is connected to the injection pipette 203 via the injection pipette holder 204 of the first manipulator 200 . As a result, the first injector device 300 can advance and retreat an injectate such as sperm filled in the injection pipette 203 by operating the operation portion 303 to advance and retreat the piston 302 .

The second manipulator 400 has an output section 401 and an input section 402 . The second manipulator 400 differs from the first manipulator 200 in that it has a holding pipette in place of the injection pipette 203, but the rest of the configuration is the same, so illustration and description are omitted. A holding pipette holds, for example, an egg. Fine angle adjustments and fine manipulations described below that can be performed on the injection pipette 203 can be performed on the holding pipette as well.

Since the second injector device 500 has the same configuration as the first injector device 300, illustration thereof is omitted. A tube (not shown) provided in the second injector device 500 connects a cylinder (not shown) and a holding pipette of the second manipulator 400, and enables internal pressure operation of the holding pipette.

Next, the configuration of the output section 201 of the first manipulator 200 will be described in detail. FIG. 2 is a perspective view showing a schematic configuration of the stage device 900. As shown in FIG. The Z stage 800 includes a stage base portion 3000, two linear motion units 690 (a first linear motion unit and a second linear motion unit) arranged on the stage base portion 3000, and supported by these two linear motion units 690. Z top plate 3100 (first top plate). The Y stage 800 includes two linear motion units 690 (a third linear motion unit and a fourth linear motion unit) arranged on a Z top plate 3100 and a Y top plate supported by these two linear motion units 690. It has a plate 3200 (second top plate). The X stage 600 has one linear motion unit 690 (fifth linear motion unit) arranged on the Y top plate 3200 . An angle adjustment unit 2200 is fixed on the X stage 600 with screws 2201L, and a rotation drive unit 2300 is arranged on the angle adjustment unit 2200. As shown in FIG. Detailed configurations of the stage device 900, the angle adjustment unit 2200, and the rotation drive unit 2300 will be described later.

The injection pipette 203 to be subjected to angle adjustment and axial movement is held by the injection pipette holder 204 so that the central axis of the held portion is coaxial with the central axis of the injection pipette holder 204 . The injection pipette holder 204 is held by a rotary drive unit 2300 .

The linear motion unit 690 will be described. 3 is an external perspective view of the linear motion unit 690. FIG. Here, for convenience, the longitudinal direction of the linear motion unit 690 and the direction in which the movable portion 670 can move as described later is defined as the X-axis direction. In this case, the Y-axis direction can be defined as the width direction of the linear motion unit 690 , and the Z-axis direction can be defined as the height direction of the linear motion unit 690 . 4 is an exploded perspective view of the linear motion unit 690. FIG.

The direct-acting unit 690 has a stationary housing portion 601 and a cover 602, which are fixed portions, and the cover 602 is fixed to the housing portion 601 with screws 602L. A vibration type actuator 680 as a drive source and a movable section 670 driven by the vibration type actuator 680 are arranged inside the housing section 601 . Vibration type actuator 680 has contact member 604 , pressure member 608 , pressure force transmission member 609 , buffer member 610 , actuator holder 613 , rolling roller 614 , rolling roller spring 615 and vibrating body holder 616 . The vibrating body 660 has an elastic body 606 and a piezoelectric element 607 (electro-mechanical energy conversion element).

The actuator holder 613 is fixed to the cover 602 with screws 613L. The vibrating body holder 616 is supported by the actuator holder 613 via the rolling roller 614 and the rolling roller spring 615 . As a result, the actuator holder 613 supports the vibrating body holder 616 without rattling in the X-axis direction and is movable in the Z-axis direction.

The vibrating body 660 has an elastic body 606 and a piezoelectric element 607, and the piezoelectric element 607 is fixed to the elastic body 606 by means such as adhesion. The elastic body 606 is a thin plate-like component made of a metal material such as stainless steel, and has two protrusions that protrude toward the contact body 604 . The vibrating body 660 is held by the vibrating body holder 616 by fixing a part of the longitudinal end (X-axis direction end in FIG. 4) of the elastic body 606 to the vibrating body holder 616 by means of adhesion or the like. .

The contact body 604 is fixed to the movable base 603 with screws 604L at the ends in the longitudinal direction, and is in contact with the tips of two projections formed on the elastic body 606. As shown in FIG. The pressing member 608 generates a pressing force for bringing the vibrating body 660 into contact with the contact body 604 . The pressure transmitting member 609 has two protrusions 609a that are slidably inserted into holes 602c provided in the cover 602, and is guided in the Z-axis direction. The pressing force transmission member 609 is arranged between the vibrating body 660 and the pressing member 608 and transmits the pressing force from the pressing member 608 to the vibrating body 660 .

The cushioning member 610 is arranged between the pressing force transmission member 609 and the piezoelectric element 607 and plays a role of transmitting the force of the pressing member 608 to the vibrating body 660 without attenuation. It should be noted that the cushioning member 610 is fixed to the pressure transmitting member 609 by means such as adhesion. A two-phase AC voltage 618 is applied to the piezoelectric element 607 via the wiring board 611 . The wiring board 611 is attached to the surface of the piezoelectric element 607 on the cushioning member 610 side, and is drawn out of the direct-acting unit 690 through the groove 602 b provided in the cover 602 .

The movable portion 670 has a movable base portion 603 and a movable plate 605 . The movable plate 605 has a wall portion parallel to the Z-axis direction inserted into an opening 602a provided in the cover 602, and two wall portions perpendicular to the Z-axis direction (hereinafter referred to as “upper surface portion” and “lower surface portion”). are arranged to face each other with the cover 602 interposed therebetween. The lower surface of the movable plate 605 is fixed to the movable base 603 with screws 605L. The movable base 603 is provided with three movable guides 603a, 603b, and 603c extending in the X-axis direction. On the other hand, fixed guide portions 601a, 601b, and 601c are provided on the housing portion 601, which is a fixed portion, so as to face the movable guide portions 603a, 603b, and 603c. Three rolling balls 612 are arranged between the movable guides 603a, 603b, 603c and the fixed guides 601a, 601b, 601c so that the movable base 603 and the movable plate 605 can be integrally guided in the X-axis direction. is sandwiched between

The amount of movement of the movable portion 670 when the linear motion unit 690 is driven is defined as the "driving amount of the linear motion unit 690". The linear motion unit 690 has a displacement sensor (not shown) such as a linear encoder for detecting movement of the movable part 670 , and a detection signal output from the displacement sensor is sent to the displacement detection part 103 . The displacement detector 103 obtains the amount of movement of the movable part 670 from the acquired detection signal. The amount of movement obtained by the displacement detection unit 103 is used for drive control of the output unit 201 of the first manipulator 200, as will be described later.

Next, a method of driving the vibration type actuator 680 for driving the movable portion 670 will be described. When a two-phase AC voltage 618 whose frequency and phase difference can be changed is applied to the piezoelectric element 607 to generate a predetermined vibration in the vibrating body 660 , the vibrating body 660 exerts a frictional driving force (thrust force) on the contact body 604 . give. Here, the vibrating body 660 is fixed to the cover 602 via the actuator holder 613 and the like. On the other hand, since the contact member 604 is fixed to the movable base portion 603 of the movable portion 670 , it can move integrally with the movable portion 670 , and the amount of movement of the contact member 604 is the amount of movement of the movable portion 670 . That is, the contact member 604 and the movable portion 670 integrally move relative to the fixed vibrating member 660 . The movement direction of the contact member 604 and the movable portion 670 at that time is the X-axis direction, which is the extending direction of the movable guide portions 603a to 603c and the fixed guide portions 601a to 601c. By changing the frequency and phase difference of the two-phase AC voltage 618 applied to the piezoelectric element 607, the movement direction of the movable part 670 can be changed between the negative direction and the positive direction of the X axis, and the movement speed can be changed. can be adjusted.

Note that a method for controlling such a vibration type actuator 680 is described in Japanese Unexamined Patent Application Publication No. 2012-16107, etc., so detailed description thereof will be omitted. In the vibration type actuator 680 , frictional force is generated between the vibrating body 660 and the contact body 604 by the pressing force from the pressing member 608 when the piezoelectric element 607 is not energized. This frictional force acts as a holding force for holding the position and orientation of the injection pipette 203 in the first manipulator 200 and as a holding force for holding the position and orientation of the holding pipette in the second manipulator 400 . Therefore, since each pipette does not move even when the piezoelectric element 607 is not energized, it is possible to avoid the occurrence of a problem in the ICSI operation.

Next, the configuration of each stage that constitutes stage device 900 will be described in the order of Z stage 800, Y stage 700, and X stage 600. FIG.

5(a) is a top view of the Z stage 800, FIG. 5(b) is a left side view of the Z stage 800, FIG. 5(c) is a front view of the Z stage 800, and FIG. It is a right side view. For convenience of explanation, the two linear motion units 690 that constitute the Z stage 800 are referred to as a linear motion unit 690Z1 and a linear motion unit 690Z2, respectively.

Linear motion units 690Z1 and 690Z2 are fixed on stage base 3000 with screws (not shown) so that the moving direction of movable part 670 is the Y-axis direction. A protruding member 801 having two protruding portions 801a that are spaced apart in the Y-axis direction at a predetermined distance and protrude in the positive direction of the Z-axis is fixed to the movable plate 605 of the linear motion unit 690Z1 with a screw 801L. It is

The Z top plate 3100 is provided with a first cam surface 3100b and a second cam surface 3100c whose in-plane direction forms an acute angle with the Y-axis direction and whose normal direction forms an acute angle with the Z-axis direction. A V-shaped cam groove 3100a extending in the Y-axis direction is formed on the first cam surface 3100b, and the two projections 801a of the projecting member 801 are slidably engaged with the cam groove 3100a. ing. By slidably engaging the two projections 801a with the cam groove 3100a, the Z top plate 3100 is supported without being displaced in the X-axis direction even when the linear motion unit 690Z1 is driven.

The second cam surface 3100c is formed parallel to the first cam surface 3100b and separated from the first cam surface 3100b in the X-axis direction. The movable plate 605 of the linear motion unit 690Z2 is provided with a protrusion 605a that protrudes in the positive direction of the Z-axis, and this protrusion 605a slidably contacts the second cam surface 3100c. ing. Thus, the one protrusion 605a and the two protrusions 801a that contact the Z top plate 3100 form cam followers that advance and retreat in one direction perpendicular to the Z-axis direction (specifically, the Y-axis direction). It is in slidable contact with the Z top plate 3100 and supports the Z top plate 3100 .

A wall portion erected in the positive direction of the Z axis (+Z direction) is provided at the end of the stage base portion 3000 constituting the Z stage 800 in the X axis direction. An existing Z guide portion 3000Z is provided. The Z top plate 3100 is provided with two shaft portions 3100z that engage with the Z guide portions 3000Z. As a result, the Z top plate 3100 is guided in the Z-axis direction while its movement in the Y-axis direction is restricted.

With the above configuration, the Z top plate 3100 can be displaced in the Z-axis direction by making the driving amounts of the linear motion units 690Z1 and 690Z2 the same (moving amounts of the two movable parts 670). In addition, by providing a difference in the driving amount of each of the linear motion units 690Z1 and 690Z2 to generate a difference in the amount of relative movement in the Z-axis direction between the cam groove 3100a and the second cam surface 3100c, the Z top plate 3100 can be rotated around the Y axis. In other words, by controlling the driving of the Z stage 800, fine driving of the injection pipette 203 in the Z-axis direction and fine adjustment of the rotation angle around the Y-axis can be performed. Further, the holding force generated in the vibration type actuators 680 provided in the linear motion units 690Z1 and 690Z2 can maintain the position and orientation of the Z top plate 3100 even when the vibration type actuators 680 are not energized.

As described above, linear motion unit 690 has a displacement sensor that detects the movement of movable portion 670 . In the Z stage 800 , displacement sensors detect the movements of the movable parts 670 of the linear motion units 690 Z 1 and 690 Z 2 , and the detection signals are sent to the displacement detector 103 . The displacement detection unit 103 obtains the amount of movement and sends it to the calculation unit 104 . The computation unit 104 computes the displacement amount in the Z-axis direction and the rotation angle around the Y-axis of the Z top plate 3100 based on the acquired movement amount, and outputs the computation result to the control unit 106 . The control unit 106 controls the operation of the first manipulator 200 by outputting the control amount based on the calculation result obtained from the calculation unit 104 to the output unit 201 of the first manipulator 200 . Equivalent control can be executed by providing means for measuring the relative position and relative angle between the stage base 3000 and the Z top plate 3100 without providing displacement sensors to the linear motion units 690Z1 and 690Z2.

6(a) is a top view of the Y stage 700, FIG. 6(b) is a left side view of the Y stage 700, FIG. 6(c) is a front view of the Y stage 700, and FIG. It is a right side view. For convenience of explanation, the two linear motion units 690 constituting the Y stage 800 are hereinafter referred to as a linear motion unit 690Y1 and a linear motion unit 690Y2, respectively.

The linear motion units 690Y1 and 690Y2 are arranged on the upper surface of the Z top plate 3100 (the surface on which the first cam surface 3100b and the second cam surface 3100c are provided) so that the moving direction of the movable portion 670 is the Y-axis direction. is fixed with screws (not shown). A rolling ball support member 701 is fixed to the cover 602 of the linear motion unit 690Y2 with screws (not shown). A concave portion 701 a for supporting the rolling ball 702 is provided on the upper surface of the rolling ball support member 701 . A concave portion 3200a is provided at a portion of the Y top plate 3200 that faces the concave portion 701a. Thus, the rolling ball 702 is sandwiched between the recess 701a and the recess 3200a in the Z-axis direction in a rollable state.

The protrusion 605a of the linear motion unit 690Y2 engages with a V-shaped groove 3200b formed on the surface of the Y top plate 3200 on the side of the linear motion unit 690Y2 so as to extend in the X-axis direction. On the other hand, the protrusion 605a of the linear motion unit 690Y1 engages with a protrusion receiving portion 3200c formed by digging into a conical shape in the surface of the Y top plate 3200 on the side of the linear motion unit 690Y1. Therefore, the Y top plate 3200 is supported by three points, the two protrusions 605a of the linear motion units 690Y1 and 690Y2 and the rolling balls 702. As shown in FIG.

In such a configuration, when the linear motion units 690Y1 and 690Y2 are driven by the same amount (the amount of movement of the movable portion 670 in the Y-axis direction), the Y top plate 3200 moves while the rolling balls 702 roll. It is displaced in the Y-axis direction according to the movement of the two protrusions 605a. Further, by providing a difference between the driving amounts of the linear motion units 690Y1 and 690Y2, the Y top plate 3200 can be rotated about the Z axis with the projection receiving portion 3200c as a fulcrum. In other words, by controlling the drive of the Y stage 700, fine driving of the injection pipette 203 in the Y-axis direction and fine adjustment of the rotational angle around the Z-axis can be performed. Further, the holding force generated in the vibration actuators 680 of the linear motion units 690Y1 and 690Y2 can maintain the position and orientation of the Y top plate 3200 even when the vibration actuators 680 are not energized.

As an example, FIG. 7 shows how the angle of the injection pipette 203 is finely adjusted by rotating the injection pipette 203 about the Z-axis centering on the field of view U of the microscope. Note that the rotation angle of the Y top plate 3200 about the Z axis can be obtained from the difference in the amount of movement of the two movable portions 670 (projections 605a) and the distance between the two projections 605a.

A displacement sensor provided in each of the linear motion units 690Y1 and 690Y2 detects the movement of the movable portion 670 of each of the linear motion units 690Y1 and 690Y2 and sends a detection signal to the displacement detection portion 103 . The displacement detection unit 103 obtains the amount of movement based on the detection signal and sends it to the calculation unit 104 . The calculation unit 104 calculates the displacement amount of the Y top plate 3200 in the Y-axis direction and the rotation angle around the Z-axis based on the obtained movement amount, and outputs the calculation result to the control unit 106 . The control unit 106 controls the operation of the first manipulator 200 by outputting the control amount based on the calculation result obtained from the calculation unit 104 to the output unit 201 of the first manipulator 200 . Equivalent control can also be executed by providing means for measuring the relative position and relative angle of the Z top plate 3100 and the Y top plate 3200 without providing displacement sensors to the linear motion units 690Y1 and 690Y2.

8A is a left side view of the X stage 600, FIG. 8B is a front view of the X stage 600, and FIG. 8C is a right side view of the X stage 600. FIG. For convenience of explanation, one linear motion unit 690 constituting the X stage 600 is hereinafter referred to as a linear motion unit 690X1.

In the X stage 600, the linear motion unit 690X1 is formed with screws (not shown) on the upper surface of the Y top plate 3200 (groove portion 3200b and projection receiving portion 3200c) so that the moving direction of the movable portion 670 is the X-axis direction. surface opposite to the surface). The X stage 600 is driven only by the linear motion unit 690X1. That is, by controlling the drive of the X stage 600, the stage device 900 can be minutely driven in the X-axis direction. Further, the holding force generated in the vibration actuator 680 of the linear motion unit 690X1 can maintain the position of the angle adjustment unit 2200 in the X-axis direction even when the vibration actuator 680 is not energized.

In the X stage 600, a displacement sensor provided in the linear motion unit 690X1 detects movement of the movable portion 670 of the linear motion unit 690X1 and sends a detection signal to the displacement detection portion 103. FIG. The displacement detection unit 103 obtains the amount of movement based on the detection signal and sends it to the calculation unit 104 . The calculation unit 104 calculates the amount of movement of the angle adjustment unit 2200 in the X-axis direction based on the acquired amount of movement, and outputs the calculation result to the control unit 106 . The control unit 106 controls the operation of the first manipulator 200 by outputting the control amount based on the calculation result acquired from the calculation unit 104 to the output unit 201 of the first manipulator 200 . Equivalent control can also be executed by providing a means for measuring the relative position of the Y top plate 3200 and the angle adjustment base 2201 (see FIG. 9) that constitutes the angle adjustment unit 2200 without providing the linear motion unit 690X1 with a displacement sensor. can do.

Next, the angle adjustment unit 2200 and the rotation drive unit 2300 will be described using the output section 201 of the first manipulator 200 as an example. FIG. 9(a) is a perspective view of an angle adjustment unit 2200 having a rotation drive unit 2300. FIG. FIG. 9(b) is a cross-sectional view of the angle adjustment unit 2200 including the rotation drive unit 2300, and is represented by a ZX cross section in a state where the central axis of the injection pipette 203 is perpendicular to the Y axis. FIG. 10 is an enlarged view of the rotary drive unit 2300 and its vicinity in the cross-sectional view of FIG. 9(b).

The angle adjustment unit 2200 is a mechanism for adjusting the angle A between the X-axis direction and the rotation center axis of the rotation drive unit 2300, and includes an angle adjustment base 2201, an angle adjustment portion 2204, an angle adjustment screw 2203, and a bias spring. 2202. The angle adjustment base 2201 is fixed to the movable plate 605 of the X stage 600 with screws 2201L. The angle adjustment base 2201 has a hinge portion 2201a, and the angle adjustment portion 2204 is connected to the angle adjustment base 2201 at the hinge portion 2201a so as to be rotatable about the Y axis. The angle adjusting base 2201 is provided with a female threaded portion 2201 b that engages with the angle adjusting screw 2203 . A biasing spring 2202 is provided between the angle adjusting base 2201 and the angle adjusting portion 2204 so as to bias the angle adjusting portion 2204 against the angle adjusting screw 2203 . Thus, in the angle adjustment unit 2200, the angle A can be adjusted by turning the angle adjustment screw 2203 to rotate the angle adjustment portion 2204 about the hinge portion 2201a.

The angle adjustment unit 2200 may be provided with an angle sensor (angle measuring means) or an angle scale that detects the angle formed by the angle adjustment base 2201 and the angle adjustment section 2204 . When an angle sensor is provided, the angle detected by the displacement detection unit 103 based on the output signal from the angle sensor can be displayed on the display panel 101 or the display 4 .

In the first manipulator 200, the rotation angle around the Y axis generated on the Z top plate 3100 by providing a difference in the driving amount of each of the linear motion units 690Z1 and 690Z2 of the Z stage 800 is an angle that can be adjusted by the angle adjustment unit 2200. It is set at the same angle as A. Here, the angle A of the two pipettes (the injection pipette 203 and the holding pipette (not shown)) is in the range of 10° to 50° (30°±20°), and the workability for each operator is A good angle is used.

FIG. 11 shows three injection pipettes 203 with angles specific to angle A, where angle A = 10° in (a), angle A = 30° in (b), and angle A = 30° in (c). A=50°. Assuming that the angle required for fine angle adjustment is ±10°, a total adjustment range of 0° to 60° (30°±30°) is required.

If only the Z stage 800 were to enable such angle adjustment, the drive amount of the direct-acting units 690Z1 and 690Z2 would increase, resulting in an increase in the size of the entire stage device 900. FIG. On the other hand, for one operator, the unique angle A of the pipette is specified as one angle (e.g., 30°), so the operator-specific angle adjustment can be done once for the same operator. If you do, you don't need to readjust. Therefore, the first manipulator 200 is configured so that the angle adjustment unit 2200 performs rough angle adjustment (for example, 30°±20°) first, and then the Z stage 800 performs angle fine adjustment ±10°. It is

FIG. 12 is a diagram showing fine angle adjustment of ±10° of the pipette viewed from the negative direction (−Y direction) of the Y-axis, taking the injection pipette 203 with the angle A of 30° as an example. The Z stage 800 (first manipulator 200 ) can be miniaturized. The angle adjustment unit 2200 is configured to manually adjust the angle A. For example, the angle adjustment screw 2203 can be configured to be rotationally driven by a stepping motor, and the angle A can be adjusted electrically. may be configured.

The rotation drive unit 2300 has a vibration type actuator 2100 , a rotation support section 2301 and a rotation section 2303 . The rotation support portion 2301 is fixed to the angle adjustment portion 2204 with screws 2301L, and rotatably holds the rotation portion 2303 via bearings 2302 (for example, bearings). The rotating part 2303 holds the injection pipette holder 204 with a holding member (not shown) such as a set screw so that the position of the injection pipette holder 204 does not shift, and is rotated by the vibration actuator 2100 . The rotation center axis of the rotating part 2303 is coaxial with the center axis of the injection pipette holder 204 that it holds.

Vibration type actuator 2100 includes contact body 2101 and vibrating body 660 . Since the vibrating body 660 is the same as the vibrating body 660 that constitutes the vibration type actuator 680, description of the details of the structure and the driving principle will be omitted. The vibrating body 660 is supported by a vibrating body holder 616, the vibrating body holder 616 is held by an actuator holder 613, and the actuator holder 613 is fixed to the angle adjusting portion 2204 with screws (not shown).

The contact member 2101 is formed in an arc shape centering on the rotation center axis of the rotating portion 2303 and is fixed to the rotating portion 2303 with screws (not shown). The vibrating body 660 applies a driving force (thrust force) to the contact body 2101 in a tangential direction of an arc around the rotation center axis of the rotating part 2303 . As a result, the rotating portion 2303 and the contact member 2101 rotate integrally around the rotation center axis of the rotating portion 2303 .

Here, a frictional force (holding force) is generated between the vibrating body 660 and the contact body 2101 due to the pressing force of the pressing member 608 . Therefore, the injection pipette 203 does not rotate even when the power supply to the vibration type actuator 2100 is cut off. Therefore, it is possible to avoid the occurrence of a situation in which trouble occurs in the ICSI work.

The two-phase AC voltage is applied to the vibration type actuator 2100 via a wiring board (not shown), which is drawn out so as not to come into contact with the injection pipette holder 204 . Further, the rotary drive unit 2300 has a displacement sensor (not shown). The displacement measured by the displacement sensor is sent to the displacement detector 103 . The displacement detection unit 103 obtains the amount of displacement and sends it to the calculation unit 104 . The calculation unit 104 calculates the displacement amount of the rotation unit 2303 based on the acquired displacement amount, and outputs the calculation result to the control unit 106 . The control unit 106 controls the operation of the first manipulator 200 by outputting the control amount based on the calculation result acquired from the calculation unit 104 to the output unit 201 of the first manipulator 200 .

By using the rotation drive unit 2300 in this way, the angle of the injection pipette 203 can be finely adjusted around the central axis of the injection pipette holder 204 as the center of rotation. FIG. 13 is a diagram showing how the injection pipette 203 is finely adjusted about the central axis of the injection pipette holder 204 within the microscope visual field U. As shown in FIG.

Next, the configuration of the input section 202 for driving the output section 201 will be described. It has input means (for example, a joystick) for driving the X-stage 600 in the X-axis direction, the Y-stage 700 in the Y-axis direction, and the Z-stage 800 in the Z-axis direction. The input unit 202 is also used to rotate the Z stage 800 around the Y axis (Pitch), rotate the Y stage 700 around the Z axis (Yaw), and rotate the rotary drive unit 2300 around the rotation center axis (Roll). It has an input means (for example, a dial). In this way, the operation amount for driving the stage device 900 can be input as a continuously changing value through the input unit 202 , and the input operation amount is detected by the displacement detection unit 103 . Instead of the configuration that allows the input of values that change continuously, a configuration that allows the input of multi-step values having a degree of resolution that does not pose a problem in terms of performance may be employed.

As described above, by using the stage device 900 equipped with the angle adjustment unit 2200 having the rotation drive unit 2300, each axial direction of the injection pipette 203 can be adjusted within the microscope field of view as shown in FIGS. It is possible to motorize the fine adjustment work of the angle. At this time, since the deflection at the tip of the injection pipette 203 is suppressed, fine angle adjustment can be easily performed. Although the first manipulator 200 including the injection pipette 203 has been described so far, the same effect can be obtained with the second manipulator 400 including the holding pipette.

Although the present invention has been described in detail based on its preferred embodiments, the present invention is not limited to these specific embodiments, and various forms without departing from the gist of the present invention can be applied to the present invention. included.

For example, in the above-described embodiment, as the linear motion unit 690, the vibration type actuator 680 having the plate-like vibrating body 660 is used as the driving source. can also be used. For example, a linear motion unit has a ring-shaped vibrating body and a contact body, the contact body is rotated by vibration excited by the vibrating body, and the rotary motion of the contact body is converted into linear motion by a gear or the like. The stage apparatus according to the present invention can be realized even if it is used. In addition, when it is not necessary to maintain the position and posture of the driven object (pipette) when the stage device is not energized, the rotary output of an electromagnetic motor such as a stepping motor can be used as the drive source for the linear motion unit. It is also possible to use the one converted to

Although the stage apparatus 900 according to the above embodiment has the Z stage 800 in the lower stage, the Y stage 700 in the middle stage, and the X stage 600 in the upper stage, the arrangement of each stage is not limited to this. For example, a configuration in which the positions of the Y stage 700 and the Z stage 800 are exchanged is also possible. It is also possible to adopt a configuration in which the X stage 600 is arranged in the middle stage or the lower stage. However, in that case, in order to maintain the balance of the entire stage apparatus, either a guide for suppressing rotation around the X axis is provided, or two linear motion units are used to hold the mechanism above it at three or more points. It is necessary to take measures such as

1 manipulator system 106 control section 200 first manipulator 400 second manipulator 600 X stage 604 contact body 660 vibrating body 670 movable section 680 vibration type actuator 690, 690X1 linear motion unit 690Y1, 690Y2 linear motion unit 690Z1, 690Z2 linear motion unit 800 Z stage 900 Stage device 2100 Vibration type actuator 2200 Angle adjustment unit 2300 Rotation drive unit 3100 Z top plate 3100b First cam surface 3100c Second cam surface 3200 Y top plate

Claims (11)

a first stage having a first linear motion means and a second linear motion means;
a second stage having third linear motion means and fourth linear motion means;
a third stage having a fifth linear motion means;
The first direct-acting means, the second direct-acting means, the third direct-acting means, the fourth direct-acting means, and the fifth direct-acting means are each used as a driving source, and are in contact with a vibrating body capable of relative movement. A stage apparatus comprising a vibration type actuator having a body,
The first stage drives the object to be driven in a first direction by setting the driving amounts of the first linear motion means and the second linear motion means to be the same. and the second direct-acting means to rotate the driven object around an axis parallel to a second direction perpendicular to the first direction by providing a difference in the amount of driving,
The second stage drives the object to be driven in the second direction by setting the driving amounts of the third linear motion means and the fourth linear motion means to be the same. rotating the object to be driven about an axis parallel to the first direction by providing a difference between the driving amounts of the moving means and the fourth direct-acting means;
the third stage drives the driven object in a third direction orthogonal to the first direction and the second direction by driving the fifth linear motion means ;
each of the first direct-acting means and the second direct-acting means has a movable portion capable of moving in the second direction;
The first stage includes:
a first top plate having a first cam surface and a second cam surface parallel to each other;
It slidably abuts on the first cam surface at two locations with a predetermined interval in the second direction, is fixed to the movable portion of the first direct-acting means, and advances and retreats in the second direction. and a cam follower for
In-plane directions of the first cam surface and the second cam surface form an acute angle with the second direction,
A normal direction of the first cam surface and the second cam surface forms an acute angle with the first direction,
A stage device , wherein the second cam surface is slidably supported by a movable portion of the second direct-acting means . 2. A stage apparatus according to claim 1, further comprising an angle adjustment unit arranged on said stage apparatus so as to be movable in said third direction. A rotary drive unit attached to the angle adjustment unit,
3. The stage device according to claim 2, wherein the angle adjustment unit adjusts an angle formed between the third direction and the rotation center axis of the rotation drive unit. The rotary drive unit is
a vibration actuator;
a rotating part that holds the object to be driven;
a rotation support part that supports the rotation part so as to be rotatable around the rotation center axis;
The vibration type actuator is
a vibrating body held by the angle adjustment unit;
a contact body attached to the rotating part and in contact with the vibrating body,
When a predetermined vibration is excited in the vibrating body, the vibrating body applies a driving force to the contact body in a tangential direction of an arc centered on the rotation center axis, thereby rotating the rotating part. 4. The stage device according to claim 3. The first cam surface is slidably engaged to allow the cam follower to move in the second direction, and a groove portion that restricts movement of the cam follower in the third direction. 5. The stage device according to any one of claims 1 to 4 , characterized by: The second stage includes:
a second top plate supported by the third linear motion means and the fourth linear motion means;
a rolling ball sandwiched between the fourth direct-acting means and the second top plate;
each of the third linear motion means and the fourth linear motion means has a movable portion movable in the second direction;
The second top plate is supported by three points, that is, the movable portion of the third direct-acting means, the movable portion of the fourth direct-acting means, and the rolling balls. The stage device according to any one of claims 1 to 5 . each of the movable portion of the third direct-acting means and the movable portion of the fourth direct-acting means has a projecting portion projecting toward the second top plate;
The second top plate is
a conical receiving portion that engages with the protrusion of the third linear motion means;
7. The stage device according to claim 6 , further comprising a groove portion extending in the third direction and engaged with the projection portion of the fourth direct-acting means. The fifth direct-acting means is arranged on the surface of the second top plate opposite to the surface facing the third direct-acting means and the fourth direct-acting means. The stage device according to claim 6 or 7 . The third direct-acting means and the fourth direct-acting means are arranged on the surface of the first top plate opposite to the surface on which the first cam surface and the second cam surface are provided. 9. The stage device according to any one of claims 1 to 8 , wherein the stage device is a stage device;
a driven object;
holding means for holding the object to be driven and fixed to the stage device, wherein
The stage device is
a first stage having a first linear motion means and a second linear motion means;
a second stage having third linear motion means and fourth linear motion means;
a third stage having a fifth linear motion means;
The first direct-acting means, the second direct-acting means, the third direct-acting means, the fourth direct-acting means, and the fifth direct-acting means are each used as a driving source, and are in contact with a vibrating body capable of relative movement. a vibrating actuator having a body;
The first stage drives the object to be driven in a first direction by setting the driving amounts of the first linear motion means and the second linear motion means to be the same. and the second direct-acting means to rotate the driven object about an axis parallel to a second direction orthogonal to the first direction by providing a difference in the amount of driving,
The second stage drives the object to be driven in the second direction by setting the driving amounts of the third linear motion means and the fourth linear motion means to be the same. rotating the object to be driven about an axis parallel to the first direction by providing a difference between the driving amounts of the moving means and the fourth direct-acting means;
the third stage drives the driven object in a third direction orthogonal to the first direction and the second direction by driving the fifth linear motion means ;
each of the first direct-acting means and the second direct-acting means has a movable portion capable of moving in the second direction;
The first stage includes:
a first top plate having a first cam surface and a second cam surface parallel to each other;
It slidably abuts on the first cam surface at two locations with a predetermined interval in the second direction, is fixed to the movable portion of the first direct-acting means, and advances and retreats in the second direction. and a cam follower for
In-plane directions of the first cam surface and the second cam surface form an acute angle with the second direction,
A normal direction of the first cam surface and the second cam surface forms an acute angle with the first direction,
A micromanipulator according to claim 1, wherein said second cam surface is slidably supported by a movable portion of said second direct-acting means . The holding means are
an angle adjustment unit arranged on the stage device so as to be movable in the third direction;
a rotary drive unit that holds the object to be driven and is attached to the angle adjustment unit;
The angle adjusting unit adjusts the angle of the driven object in a plane orthogonal to the second direction by adjusting the angle formed by the third direction and the central axis of rotation of the rotary drive unit. 11. The micromanipulator according to claim 10 , characterized in that:

Images