CN100439049C - Plane movement mechanism and its device for micro robot - Google Patents

Plane movement mechanism and its device for micro robot Download PDF

Info

Publication number
CN100439049C
CN100439049C CNB2004100689716A CN200410068971A CN100439049C CN 100439049 C CN100439049 C CN 100439049C CN B2004100689716 A CNB2004100689716 A CN B2004100689716A CN 200410068971 A CN200410068971 A CN 200410068971A CN 100439049 C CN100439049 C CN 100439049C
Authority
CN
China
Prior art keywords
clamp leg
diamond structure
robot
flexible
contiguous blocks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004100689716A
Other languages
Chinese (zh)
Other versions
CN1586828A (en
Inventor
阎绍泽
秦振
温诗铸
张付兴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Original Assignee
Tsinghua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University filed Critical Tsinghua University
Priority to CNB2004100689716A priority Critical patent/CN100439049C/en
Publication of CN1586828A publication Critical patent/CN1586828A/en
Application granted granted Critical
Publication of CN100439049C publication Critical patent/CN100439049C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Manipulator (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The present invention relates to a planar motion mechanism and a device for a minitype robot, which belongs to the technical field of minitype robots and precise mechanical motion control and is characterized in that the planar motion mechanism comprises four links, four connecting blocks, clamping legs and a piezoelectric / electrostrictive driver, wherein the four links and the four connecting blocks form a flexible diamond structure by a flexible hinge, and the four connecting blocks are positioned at four corners of the flexible diamond structure. The piezoelectric / electrostrictive driver is arranged between the two corresponding connecting blocks of the flexible diamond structure; four clamping legs are arranged and are respectively fixedly connected with the four connecting blocks. The present invention can realize the plane omnibearing motion of the minitype robot by using the geometric characteristics of the flexible diamond structure and a single piezoelectric ceramic driver. The sequential control design is carried out on the piezoelectric ceramic / electrostrictive driver and the clamping legs, and therefore, the minitype robot can move along the X direction and the Y direction, and the rotary plane three-degree-of-freedom motion can be realized. The present invention can be used for micromotion robots in various micro operating systems.

Description

A kind of planar motion mechanism of micro robot and micro robot
Technical field:
A kind of planar motion mechanism of micro robot and micro robot belong to micro robot technology and precision optical machinery movement control technology field, relate in particular to a kind of microminiature mobile robot.
Background technology:
In micro robot technology and precision optical machinery movement control technology field, when the Motion Resolution rate reached micron order even nanoscale, piezoelectric ceramics/electrostrictive actuator demonstrated bigger advantage.Piezoelectric ceramics/electrostrictive actuator has been widely used in jiggle robot, little feeding detent mechanism or system because its displacement resolution height, rigidity are big, response is fast, the efficient advantages of higher.
Adopt the jiggle robot of piezoelectric ceramics/electrostrictive actuator, not only can realize the one dimension rectilinear motion, and can realize the two dimensional surface motion by the innovative design of mechanism.Be used for little feeding location or ultraprecise mechanism or system at piezoelectric ceramics/electrostrictive actuator, adopt flexure hinge mechanism usually, reach the purpose of miniaturization, minimizing transmission link.
The shifting principle that the present jiggle robot that drives based on piezoelectric ceramics/electrostriction element adopts mainly contains three kinds: slippage-viscous (slip-stick) principle, inertia impact principle and Creeping Principle.Be explained respectively below.
Slippage-viscous principle is mainly utilized the inertia of object and the frictional force between object and the contact-making surface.Mobile device is positioned on platform or the slide bar, because the effect of inertia of its main body, when the slow elongation of piezoelectric ceramic actuator was shunk then fast, piezoelectric ceramic actuator drove mobile device and produces a minute movement with respect to platform or slide bar.Repeat said process repeatedly, can realize the motion in mobile device in a big way.The people such as Martel of U.S. MIT utilize this principle to develop sufficient humanoid robot (the S.Martel and L.C.Olague that declines of leg, General description of the wireless miniature nanowalkerrobot designed for atomic-scale operations, Proceed ings of SPIE, 2001, Vol.4568, pp.231-240 is used for the general description .SPIE collection of thesis of the radio micro nanometer walking robot of atomic scale microoperation, 2001, Vol.4568, pp.231-240), there are three supporting legs that processed by piezoelectric ceramic tube in this robot, every leg can occur bending and deformation and dilatation, utilizes slippage-viscous principle to realize micrometric displacement.Adopt the jiggle robot weak point of slippage-viscous principle mainly to show: precision is not high, and reliability and controllability are all poor, and load capacity is low.
The micrometric displacement robot that adopts the inertia impact principle to drive, its representational agent structure is the structure that piezoelectric ceramic actuator two ends connect firmly with two masses (counterweight) respectively.Utilize the quick elongation and slow the contraction or opposite process of piezoelectric ceramic actuator, realize that the little of robot moves, for example Japanese DENSO company has developed the automation testing (K.Shinichiro that flaw detection Micro-Robot in the pipe that piezoelectric element drives is used for tiny industrial pipeline, I.Toskiki, O.Nobuyuki.Multi-layered Piezoelectric Bimorph Actuator.IEEE International Symposium onMicromachine and Human Science.1997,73-77 plurality of layers of double piezoelectric chip actuator .IEEE micromechanics and humanities international conference collection of thesis, 1997,73-77), this Micro-Robot is mainly by a laminated piezoelectric driver, counterweight and two support bars are formed, and two support bars are supported on both sides in the tube wall respectively.The quality of reasonable disposition body and counterweight adopts the sawtooth voltage of certain frequency, certain amplitude to act on piezoelectric element, just can realize that the front and back straight line of Micro-Robot in pipeline moves.
People such as that Tsing-Hua University continues in vain is flat, Wang Jingsong adopt Creeping Principle designed a kind of pipe robot (Bai Shaoping, Wang Jingsong etc. small-sized creepage robot principle and realization. robot, 1994, Vol.16 (3), 140-143.).This robot is made up of two clamp piezo ceramic elements, a piezoelectric ceramic actuator and a flexible frame, clamp by two piezoelectric ceramic actuators control flexible frames and pipeline with unclamp, elongating or shortening of a piezoelectric ceramic actuator control flexible frame realized continuous, the grand movement of robot in pipeline.This robotlike's advantage is that load capacity is more intense, and stroke is big, and controllability is good; But the straight line advance and retreat that its motion only is a direction move.
By above-mentioned analysis, a piezoelectric ceramics/electrostrictive actuator is adopted in present as can be seen plane jiggle robot realization motion in one dimension at least.If realize the plane omnibearing movable, then need to dispose a plurality of drivers, drive with a driver at least in each dimension direction of motion.This must increase the weight of robot, and cost improves, and is unfavorable for the motion control of stepping robot, also is not suitable for the microminiaturization of structure.
Summary of the invention:
The present invention is based on the vermicular movement principle, adopt single piezoelectric ceramics/electrostrictive actuator, realize the plane omnibearing movable.A kind of micro robot planar motion mechanism that the present invention is designed contains four connecting rods, four contiguous blocks, clamp leg, piezoelectric driver; It is characterized in that described four connecting rods and four contiguous blocks constitute a flexible diamond structure by flexible hinge, described four contiguous blocks are positioned on four angles of described flexible diamond structure; Described piezoelectric driver places between two relative contiguous blocks of flexible diamond structure; Described clamp leg has four, connects firmly with four contiguous blocks respectively.
A kind of micro robot is characterized in that, it contains flexible diamond structure, piezoelectric driver, clamp leg and fixed base plate; Described flexible diamond structure is formed by connecting by four connecting rods, four contiguous blocks and eight flexible hinges, and described four contiguous blocks are positioned on four angles of described flexible diamond structure; Described piezoelectric driver places between two relative contiguous blocks of flexible diamond structure; Described clamp leg has four, and an end connects firmly respectively in the bottom of four contiguous blocks, and the other end places on the described fixed base plate.
Described piezoelectric driver is embedded between two relative contiguous blocks by being full of cooperation.
Described piezoelectric driver can also connect firmly on a contiguous block by an end, and the other end is connected on another relative contiguous block with a pretension bolt by a slide block.
Described piezoelectric driver can also an end by support member, laterally bearing pin, axle sleeve, vertically bearing pin links to each other with a contiguous block, the other end of described piezoelectric driver by support member, laterally bearing pin, axle sleeve, vertical bearing pin, slide block with and a pretension bolt be connected on another relative contiguous block.
The two ends of described piezoelectric driver are connected on two relative contiguous blocks by ball pivot respectively.
Experimental results show that the present invention utilizes the geometrical feature of diamond structure, use single piezoelectric ceramic actuator just can realize the plane omnibearing movable of robot.This robot device has compact conformation, and characteristics such as resolution ratio height, controllability are good can be used for the micromotion robot in the various micro OSs, have reached its intended purposes.
Description of drawings:
Fig. 1 is the motion schematic diagram that the present invention designs.
Fig. 2 is one of structural representation of the microminiature mobile robot that designs of the present invention.
Fig. 3 is the side view of Fig. 2.
Fig. 4 is the vertical view of Fig. 3.
Fig. 5 is a clamp leg structural representation.
Fig. 6 be the microminiature mobile robot that designs of the present invention structural representation two;
Fig. 7 is the vertical view of Fig. 6;
Three of the structural representation of the microminiature mobile robot of Fig. 8 the present invention design;
Fig. 9 is the vertical view of Fig. 8.
The specific embodiment:
Below in conjunction with accompanying drawing, introduce content of the present invention in detail.
Among Fig. 1-Fig. 9,1,3,16 and 17 is respectively contiguous block, the 2nd, and connecting rod (totally 4), the 4th, flexible hinge (totally 8) constitutes flexible diamond structure by contiguous block 1,3,16 and 17, connecting rod 2, flexible hinge 4; The 5th, piezoelectric ceramics/electrostrictive actuator, the 6th, driver is installed support member (totally 2), the 7th, horizontal bearing pin (totally 2), the 8th, axle sleeve (totally 2), the 9th, vertical bearing pin (totally 2); The 10th, pretension slide block, the 11st, pretension bolt; 12,13,14 and 15 is respectively the clamp leg, wherein, the 18th, electromagnetic core, the 19th, solenoid, the 20th, supporting leg; 21 is fixed base plate.
Fig. 1 is the micro robot planar motion mechanism based on the plane Creeping Principle of the present invention, and its basic mentality of designing is to utilize single piezoelectric ceramics/electrostrictive actuator, and configuration clamp leg is realized the planar three freedom motion of robot.
As shown in Figure 1, contiguous block 1,3,16 and 17, connecting rod 2, flexible hinge 4 constitute flexible diamond structure.Piezoelectric ceramics/electrostrictive actuator 5 places the diamond structure diagonal positions, connects firmly with contiguous block 16 and 17. Clamp leg 12,13,14 and 15 is fixed on respectively on contiguous block 16,3,17 and 1.Fig. 5 has provided a kind of version of clamp leg, is made up of electromagnetic core 18, solenoid 19 and supporting leg 20, and electromagnetic core 18 connects firmly with supporting leg 20, and solenoid 19 is wound on the electromagnetic core 18, and supporting leg 20 places on the fixed base plate 21.
The diagonal that is located at installation of driver in the flexible diamond structure is a directions X, and another diagonal of flexible diamond structure is the Y direction, as shown in Figure 1.The straight line of robot and turning motion are by the elongation of piezoelectric ceramics/electrostrictive actuator 5 and shortening, and cooperate clamp leg 12,13,14 and 15 with the absorption of fixed base plate 21 with unclamp the control realization.Piezoelectric ceramics/electrostrictive actuator 5, clamp leg 12,13,14 and 15 are carried out the SECO design, can realize the plane omnibearing movable of microminiature mobile robot along directions X, Y direction and rotation.Translational speed can be regulated by the operating frequency that change is added on voltage magnitude on piezoelectric ceramics/electrostrictive actuator 5 and frequency and control clamp leg 12,13,14 and 15.Basic exercise principle of the present invention that Here it is.
Clamp leg 12,13,14 and 15 with dashed lines draw among Fig. 1, and the motion principle of the planar motion mechanism of this micro robot is as follows:
1.X direction motion
Clamp leg 13 and 15 and base plate 21 be in pine position state, realize along the rectilinear motion on the driver output direction of displacement by piezoelectric ceramics/electrostrictive actuator 5, clamp leg 12 and 14 action controls.
At first clamp leg 12 is adsorbed in base plate 21, and clamp leg 14 is in the pine position; Drive 5 elongations of piezoelectric ceramics/electrostrictive actuator, make clamp leg 14 slippage forward on base plate 21; Make clamp leg 14 be adsorbed in base plate 21 again, clamp leg 12 is in the pine position; Removal is added in the voltage on piezoelectric ceramics/electrostrictive actuator 5, makes it return to the original length, drives 12 slippages forward of clamp leg, makes whole device move forward a step; Make clamp leg 12 be adsorbed in base plate 21 again, clamp leg 14 is in the pine position.Robot is returned to original state, has finished along directions X step of walking to be over.The circulation said process can be realized the vermicular movement of robot along directions X.Change the control sequence of two clamp legs 12,14 and piezoelectric ceramics/electrostrictive actuator 5, can realize counter motion.Control is added on voltage waveform or the voltage magnitude on piezoelectric ceramics/electrostrictive actuator 5, can realize the advance and retreat motion of asynchronous distance.
2.Y direction motion
Clamp leg 12 and 14 and base plate 21 be in pine position state, realize the horizontal rectilinear motion of relative driver output direction of displacement by piezoelectric ceramics/electrostrictive actuator 5, clamp leg 13 and 15 action controls.
At first clamp leg 15 is adsorbed in base plate 21, and clamp leg 13 is in the pine position; Drive 5 elongations of piezoelectric ceramics/electrostrictive actuator, make clamp leg 13 in base plate 21 upper edge Y direction slippages; Make clamp leg 13 be adsorbed in base plate 21 again, clamp leg 15 is in the pine position; Removal is added in the voltage on piezoelectric ceramics/electrostrictive actuator 5, makes it return to the original length, drives clamp leg 15 with further, makes whole device walk a step along the Y direction; Make clamp leg 15 be adsorbed in base plate 21 again, clamp leg 13 is in the pine position.Robot is returned to original state, has finished along driver output direction of displacement step of walking to be over.The circulation said process can be realized the vermicular movement of robot along the Y direction.Change the control sequence of two clamp legs 13,15 and piezoelectric ceramics/electrostrictive actuator 5, can realize along the counter motion of Y direction.Control is added on voltage waveform or the voltage magnitude on piezoelectric ceramics/electrostrictive actuator 5, can realize the advance and retreat motion of asynchronous distance.
3. turn
Realize turning motion by piezoelectric ceramics/electrostrictive actuator 5, clamp leg 12,13,14 and 15 action controls.
(1) motion principle of turning clockwise
At first clamp leg 12 and 15 absorption, clamp leg 13 and 14 pine positions; Piezoelectric ceramics/electrostrictive actuator 5 applies the voltage elongation, the configuration of flexible diamond structure changes, its piezoelectric ceramics/electrostrictive actuator 5 place diagonal are the center minute angle that turns clockwise with clamp leg 12, drive clamp leg 13 and 14 slippages; 14 absorption of clamp leg, clamp leg 15 pine position (release stress) earlier adsorbs again, clamp leg 12 and 13 pine positions; Shed the voltage that is applied to piezoelectric ceramics/electrostrictive actuator 5, the diagonal that piezoelectric ceramics/electrostrictive actuator 5 is installed in the flexible diamond structure shortens, this diagonal is the center minute angle that turns clockwise with clamp leg 14, drives clamp leg 12 and 13 slippages; Clamp leg 12 and 15 absorption, clamp leg 13 and 14 pine positions.Robot is returned to original state, has finished and has turned over a minute angle clockwise.The circulation said process can be realized the turning motion of robot.Control is added on voltage waveform or the voltage magnitude on piezoelectric ceramics/electrostrictive actuator 5, can realize that robot turns over different angles clockwise in the single circulation.
(2) motion principle of turning counterclockwise
At first clamp leg 12 and 13 absorption, clamp leg 14 and 15 pine positions; Piezoelectric ceramics/electrostrictive actuator 5 applies the voltage elongation, the configuration of flexible diamond structure changes, its piezoelectric ceramics/electrostrictive actuator 5 place diagonal are that the center is rotated counterclockwise a minute angle with clamp leg 12, drive clamp leg 14 and 15 slippages; 14 absorption of clamp leg, clamp leg 13 pine position (release stress) earlier adsorbs again, clamp leg 12 and 15 pine positions; Shed the voltage that is applied to piezoelectric ceramics/electrostrictive actuator 5, the diagonal that piezoelectric ceramics/electrostrictive actuator 5 is installed in the flexible diamond structure shortens, this diagonal is that the center is rotated counterclockwise a minute angle with clamp leg 14, drives clamp leg 12 and 15 slippages; Clamp leg 12 and 13 absorption, clamp leg 14 and 15 pine positions.Robot is returned to original state, has finished and has turned over a minute angle counterclockwise.The circulation said process can be realized the turning motion of robot.Control is added on voltage waveform or the voltage magnitude on piezoelectric ceramics/electrostrictive actuator 5, can realize that robot turns over different angles counterclockwise in the single circulation.
4. the principle that rotatablely moves
Realize with certain clamp leg being rotatablely moving of center by piezoelectric ceramics/electrostrictive actuator 5, clamp leg 12,13,14 and 15 action controls.
(1) motion principle that turns clockwise
Being the example that clockwise turns at center around clamp leg 12.At first clamp leg 12 and 15 absorption, clamp leg 13 and 14 pine positions; Piezoelectric ceramics/electrostrictive actuator 5 applies voltage elongation, and the configuration of flexible diamond structure changes, and its piezoelectric ceramic actuator 5 place diagonal be the center minute angle that turns clockwise with clamp leg 12, drive clamp leg 13 and 14 slippages; 13 absorption of clamp leg, clamp leg 12 pine position (release stress) earlier adsorbs again, clamp leg 14 and 15 pine positions; Shed the voltage that is applied to piezoelectric ceramics/electrostrictive actuator 5, the diagonal that piezoelectric ceramics/electrostrictive actuator 5 is installed in the flexible diamond structure shortens, this diagonal is the center minute angle that turns clockwise with clamp leg 12, drives clamp leg 14 and 15 slippages; 15 absorption of clamp leg, clamp leg 12 pine position absorption more earlier, clamp leg 13 and 14 pine positions.Robot is returned to original state, finished with clamp leg 12 be the center turn over a minute angle clockwise.The circulation said process can realize that robot is the clockwise rotation at center with certain clamp leg.Control is added on voltage waveform or the voltage magnitude on piezoelectric ceramics/electrostrictive actuator 5, can realize that robot turns over different angles clockwise in the single circulation.Similarly, can realize that with any one clamp leg be the clockwise rotation at center.
(2) motion principle that is rotated counterclockwise
Being that being rotated counterclockwise of center is example around clamp leg 12.At first clamp leg 12 and 13 absorption, clamp leg 14 and 15 pine positions; Piezoelectric ceramics/electrostrictive actuator 5 applies the voltage elongation, and the configuration of flexible diamond structure changes, and its piezoelectric ceramic actuator 5 place diagonal are that the center is rotated counterclockwise a minute angle with clamp leg 12, drives clamp leg 14 and 15 slippages; 15 absorption of clamp leg, clamp leg 12 pine position (release stress) earlier adsorbs again, clamp leg 13 and 14 pine positions; Shed the voltage that is applied to piezoelectric ceramics/electrostrictive actuator 5, the diagonal that piezoelectric ceramics/electrostrictive actuator 5 is installed in the flexible diamond structure shortens, this diagonal is that the center is rotated counterclockwise a minute angle with clamp leg 12, drives clamp leg 13 and 14 slippages; 13 absorption of clamp leg, clamp leg 12 pine position absorption more earlier, clamp leg 14 and 15 pine positions.Robot is returned to original state, finished with clamp leg 12 be the center turn over a minute angle counterclockwise.The circulation said process can realize that robot is rotatablely moving of center with certain clamp leg.Control is added on voltage waveform or the voltage magnitude on piezoelectric ceramics/electrostrictive actuator 5, can realize that robot turns over different angles counterclockwise in the single circulation.
Based on above-mentioned plane Creeping Principle, first kind of structural representation of the micro robot of single Piezoelectric Ceramic of the present invention as shown in Figure 2.Mainly cause driver 5 and form by flexible diamond structure, 12,13,14 and 15, piezoelectric ceramics/electricity of clamp leg.
Robot motion mechanism corresponding shown in Figure 1, contiguous block 1,3,16 and 17, connecting rod 2, flexible hinge 4 constitute flexible diamond structure.Piezoelectric ceramics/electrostrictive actuator 5 is embedded in the diamond structure diagonal positions, connects firmly with contiguous block 16 and 17. Contiguous block 16,3,17 and 1 lower position connect firmly clamp leg 12,13,14 and 15 respectively.Fig. 3 is the side view of Fig. 2 along negative directions X, and clamp leg 12,14 and 15 only is shown among the figure.Fig. 4 is the vertical view of Fig. 3, and clamp leg 12,13,14 and 15 is shown by dashed lines.Utilize single piezoelectric ceramics/electrostrictive actuator, cooperate the control of clamp leg, realize that robot moves along the planar three freedom of directions X, Y direction and rotation.
The action control of clamp leg can be adopted Electromagnetic Drive, is realized by magnetic core and coil.Fig. 5 has provided a kind of version of clamp leg, is made up of electromagnetic core 18, solenoid 19 and supporting leg 20, and electromagnetic core 18 connects firmly with supporting leg 20, and solenoid 19 is wound on the electromagnetic core 18, and supporting leg 20 places on the fixed base plate 21.When the control electric current passed through coil 19, electromagnetic attraction made electromagnetic core 18 and base plate 21 constitute closed magnetic circuits, and supporting leg 20 is adsorbed on the base plate 21; During no power, be in pine position state.
Fig. 6 is second kind of structural representation of micro robot of single Piezoelectric Ceramic of the present invention.Mainly cause driver 5, pretension slide block 10 and pretension bolt 11 and form by flexible diamond structure, 12,13,14 and 15, piezoelectric ceramics/electricity of clamp leg. Contiguous block 1,3,16 and 17, connecting rod 2, flexible hinge 4 constitute flexible diamond structure. Contiguous block 16,3,17 and 1 lower position connect firmly clamp leg 12,13,14 and 15 respectively.Piezoelectric ceramics/electrostrictive actuator 5 is embedded in the diamond structure diagonal positions, connects firmly with contiguous block 16 and pretension slide block 10.Slide block 10 can slide in contiguous block 17 upper edge Y directions, and pretension bolt 11 withstands on the slide block 10 by the screwed hole on the contiguous block 17, can change pretightning force on piezoelectric ceramics/electrostrictive actuator 5 by regulating bolt 11.Directly compare with driver, reduced installation difficulty, and can adjust pretightning force, increased the security and the flexibility of structure according to different operating modes by the mode that interference fit is embedded in the flexible diamond structure.Fig. 7 is the vertical view of the described structure of Fig. 6, and clamp leg 12,13,14 and 15 is shown by dashed lines.
Fig. 8 is the third structural representation of the micro robot of single Piezoelectric Ceramic of the present invention.Mainly by flexible diamond structure, 12,13,14 and 15, piezoelectric ceramics/electricity of clamp leg cause driver 5, pretension slide block 10 and pretension bolt 11, support member 6, laterally bearing pin 7, axle sleeve 8, vertically bearing pin 9 is formed.Contiguous block 1,3,16 and 17, connecting rod 2, flexible hinge 4 constitute flexible diamond structure.Pretension slide block 10 and pretension bolt 11 are arranged on contiguous block 17, and slide block 10 can slide in contiguous block 17 upper edge Y directions, and pretension bolt 11 withstands on the slide block 10 by the screwed hole on the contiguous block 17.Piezoelectric ceramics/electrostrictive actuator 5 is embedded in the diagonal positions of flexible diamond structure, is attached at the diagonal positions of flexible diamond structure by support member 6, horizontal bearing pin 7, axle sleeve 8, vertical bearing pin 9, pretension slide block 10 and pretension bolt 11; Regulate pretension bolt 11, realize pretension by 10 pairs of actuator assemblies of slide block.Because piezoelectric ceramics/electrostrictive actuator can not bear moment of flexure, adopt vertical bearing pin 9 and horizontal bearing pin 7 to constitute the composite rotating hinges with support member 6, axle sleeve 8, slide block 10 respectively, make driver constitute the composite rotating hinges with support member 6, axle sleeve 8, slide block 10 respectively, make the not effect of moment by bending of driver 5 with vertical bearing pin 9 and horizontal bearing pin 7.Contiguous block 16,3,17 and 1 lower position connect firmly clamp leg 12,13,14 and 15 respectively.Fig. 9 is the vertical view of the described structure of Fig. 8, and clamp leg 12,13,14 and 15 is shown by dashed lines.
In addition, the two ends of piezoelectric ceramics/electrostrictive actuator 5 are connected on two relative contiguous blocks of flexible diamond structure by ball pivot respectively.
The motion principle of above-described micro robot device is all identical with the described mechanical motion principle of Fig. 1.
Flexible diamond structure of the present invention can be selected beryllium-bronze material, finishes by the line cutting processing, comprises eight identical flexible hinge structures.Because the existence of flexible hinge, topographical variations will take place in flexible diamond structure under less external force effect.If piezoelectric ceramics/electrostrictive actuator pressurization elongation, flexible diamond structure also can deform thereupon; Piezoelectric ceramics/electrostrictive actuator decompression is shortened or is removed voltage, and then flexible diamond structure can shorten thereupon or be returned to original state.
Clamp leg profile is cylindrical, comprises that mainly inside is used for the iron core and the outside iron cover that is used to form magnetic loop of winding around.Iron puts has processed the end of a thread that micropore is used to draw coil on the inner iron core.Coil electricity is clamp leg absorption fixed base plate then, and coil blackout then clamp leg unclamps workbench.

Claims (6)

1, a kind of planar motion mechanism of micro robot contains four connecting rods, four contiguous blocks, clamp leg, piezoelectric driver; It is characterized in that described four connecting rods and four contiguous blocks constitute a flexible diamond structure by flexible hinge, described four contiguous blocks are positioned on four angles of described flexible diamond structure; Described piezoelectric driver places between two relative contiguous blocks of flexible diamond structure; Described clamp leg has four, connects firmly with four contiguous blocks respectively.
2, a kind of micro robot is characterized in that, it contains flexible diamond structure, piezoelectric driver, clamp leg and fixed base plate; Described flexible diamond structure is formed by connecting by four connecting rods, four contiguous blocks and eight flexible hinges, and described four contiguous blocks are positioned on four angles of described flexible diamond structure; Described piezoelectric driver places between two relative contiguous blocks of flexible diamond structure; Described clamp leg has four, and an end connects firmly respectively in the bottom of four contiguous blocks, and the other end places on the described fixed base plate.
3, micro robot according to claim 2 is characterized in that, described piezoelectric driver is embedded between two relative contiguous blocks by being full of cooperation.
4, micro robot according to claim 2 is characterized in that, an end of described piezoelectric driver connects firmly on a contiguous block, and the other end is connected on another relative contiguous block with a pretension bolt by a slide block.
5, micro robot according to claim 2, it is characterized in that, one end of described piezoelectric driver by support member, laterally bearing pin, axle sleeve, vertically bearing pin links to each other with a contiguous block, the other end of described piezoelectric driver by support member, laterally bearing pin, axle sleeve, vertical bearing pin, slide block with and a pretension bolt be connected on another relative contiguous block.
6, micro robot according to claim 2 is characterized in that, the two ends of described piezoelectric driver are connected on two relative contiguous blocks by ball pivot respectively.
CNB2004100689716A 2004-07-15 2004-07-15 Plane movement mechanism and its device for micro robot Expired - Fee Related CN100439049C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB2004100689716A CN100439049C (en) 2004-07-15 2004-07-15 Plane movement mechanism and its device for micro robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2004100689716A CN100439049C (en) 2004-07-15 2004-07-15 Plane movement mechanism and its device for micro robot

Publications (2)

Publication Number Publication Date
CN1586828A CN1586828A (en) 2005-03-02
CN100439049C true CN100439049C (en) 2008-12-03

Family

ID=34604226

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004100689716A Expired - Fee Related CN100439049C (en) 2004-07-15 2004-07-15 Plane movement mechanism and its device for micro robot

Country Status (1)

Country Link
CN (1) CN100439049C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014095091A1 (en) * 2012-12-21 2014-06-26 Abb Technology Ltd Miniature crawler and a miniature inspector using the same

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100389011C (en) * 2005-06-30 2008-05-21 上海交通大学 Skidding bionic micro robot with two-stage moving precision
CN100357069C (en) * 2005-11-10 2007-12-26 上海大学 2D shifting unit
US20100145511A1 (en) * 2008-08-18 2010-06-10 Popa Dan O Microcrawler and conveyor robots, controllers, systems, and methods
CN101947779B (en) * 2010-09-01 2012-08-08 华南理工大学 Structure of combination drive type micro robot
CN102284955A (en) * 2011-07-22 2011-12-21 吉林大学 Six-freedom degree micro robot based on hybrid drive
CN103645558B (en) * 2012-12-28 2016-08-17 清华大学 Distorting lens
CN107351068B (en) * 2017-08-28 2020-03-31 燕山大学 Two-degree-of-freedom plane motion parallel mechanism
CN107425113B (en) * 2017-09-12 2023-06-13 苏州迈客荣自动化技术有限公司 Novel piezoelectric ceramic
CN107437903A (en) * 2017-09-12 2017-12-05 苏州迈客荣自动化技术有限公司 A kind of rhombus ceramic driver
CN108262629B (en) * 2018-03-21 2023-12-26 吉林大学 Large-stroke high-precision two-degree-of-freedom quick cutter servo device
DE102019120720A1 (en) * 2019-07-31 2021-02-04 Tdk Electronics Ag Mechanical reinforcement element
CN111301551B (en) * 2020-02-22 2021-05-25 杭州电子科技大学 Magnetic bar framework full-magnetic control robot based on paper folding art and magnetic control method thereof
CN114180010B (en) * 2021-11-02 2022-11-18 浙江大学 Submarine stratum space cable distribution robot
CN114211480A (en) * 2021-11-04 2022-03-22 淮阴工学院 Actuator, robot, and actuator driving method
CN114872013B (en) * 2022-04-29 2023-12-15 厦门大学 Multi-motion model type micro-robot and motion control method thereof
CN116638517A (en) * 2023-06-01 2023-08-25 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) Universal mobile robot based on inertial drive

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05340341A (en) * 1992-06-09 1993-12-21 Fujitsu Ltd Mobile robot
CN1235405A (en) * 1999-05-28 1999-11-17 清华大学 Miniature monoblock precisive plane moving mechanism and device thereof
US6294859B1 (en) * 1997-09-10 2001-09-25 Eads Deutschland Gmbh Electrostrictive or piezoelectric actuator device with a stroke amplifying transmission mechanism

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05340341A (en) * 1992-06-09 1993-12-21 Fujitsu Ltd Mobile robot
US6294859B1 (en) * 1997-09-10 2001-09-25 Eads Deutschland Gmbh Electrostrictive or piezoelectric actuator device with a stroke amplifying transmission mechanism
CN1235405A (en) * 1999-05-28 1999-11-17 清华大学 Miniature monoblock precisive plane moving mechanism and device thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014095091A1 (en) * 2012-12-21 2014-06-26 Abb Technology Ltd Miniature crawler and a miniature inspector using the same

Also Published As

Publication number Publication date
CN1586828A (en) 2005-03-02

Similar Documents

Publication Publication Date Title
CN100439049C (en) Plane movement mechanism and its device for micro robot
Liu et al. Development of a two-dimensional linear piezoelectric stepping platform using longitudinal-bending hybrid actuators
US7849762B2 (en) Constrained tri-sphere kinematic positioning system
EP1637277A1 (en) Parallel kinematics machine with elastic joints
CN101362336A (en) Two-degree of freedom translational parallel manipulator by redundant actuation
CN102291039A (en) Multi-degree-of-freedom bionic piezoelectric driver
Li et al. A miniature impact drive mechanism with spatial interdigital structure
CN101190526A (en) Two freedom mobile parallel connection mechanism with buffering ability
CN104852627B (en) Inchworm-type piezoelectric torque actuator capable of realizing single-step large torsion angle and actuating method
CN101362337A (en) Two-degree of freedom translational redundant parallel manipulator
CN103684037A (en) Double-end clamping piezoelectric motor for utilizing opposite-direction rubs to reduce friction force and control method
CN109889087B (en) Four-degree-of-freedom piezoelectric objective table and excitation method thereof
CN109951101A (en) The ultraprecise four-degree-of-freedom positioning pose_adjuster and its motivational techniques of Piezoelectric Driving
KR101094820B1 (en) Long-Range Precise Linear Motion Device and Method for controlling the same
CN100376362C (en) Integrated three freedom micro-containing operators
KR100362930B1 (en) Surface motor and a moving system with 6 Degrees of freedom
Kortschack et al. Driving principles of mobile microrobots for micro-and nanohandling
CN112904519A (en) Multi-degree-of-freedom high-precision motion platform based on few-branch-chain mechanism
CN202135076U (en) Multi-freedom bionic piezoelectric driving device
CN108788792B (en) Plane-driven pitching three-degree-of-freedom motion platform
WO2010114488A1 (en) Active manipulator
CN116343901B (en) Three-degree-of-freedom micro-motion platform and working method
JP6254060B2 (en) Vertical movement stage for charged particle beam apparatus and charged particle beam apparatus
CN212131181U (en) Stick smooth platform structure with elastic element support rail
CN219738929U (en) Freedom degree switching device for flexible hinge

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20081203

Termination date: 20100715