CN103645558B - Distorting lens - Google Patents
Distorting lens Download PDFInfo
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- CN103645558B CN103645558B CN201310701623.7A CN201310701623A CN103645558B CN 103645558 B CN103645558 B CN 103645558B CN 201310701623 A CN201310701623 A CN 201310701623A CN 103645558 B CN103645558 B CN 103645558B
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- piezoelectric actuator
- actuation channel
- pedestal
- distorting lens
- metal shell
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Abstract
The present invention proposes a kind of distorting lens, including: pedestal, described pedestal has the actuation channel of the most through described pedestal;Piezoelectric actuator, described piezoelectric actuator is arranged in described actuation channel and the propelling head process of described piezoelectric actuator is for the upper surface of described pedestal;Actuation channel closure plate, described actuation channel closure plate is connected to be enclosed in described actuation channel described piezoelectric actuator with described pedestal;With mirror body, described mirror body is connected with the propelling head of described piezoelectric actuator.Distorting lens according to embodiments of the present invention, uses piezoelectric actuator to provide pretightning force, makes distorting lens produce deformation, thus it is possible to vary the optical component surface shape of active optics, and can reach higher degree of regulation.
Description
Technical field
The present invention relates to a kind of distorting lens, can be applicable to accurate transmission micro-displacement, and can be used for changing the optics of active optics
Component side shape.
Background technology
Distorting lens, also known as deformation reflection mirror, mainly applies among various ADAPTIVE OPTICS SYSTEMS, as wavefront correction device
Correction wavefront error, plays an important role in ADAPTIVE OPTICS SYSTEMS, is the important portion in ADAPTIVE OPTICS SYSTEMS
One of part, the research and development of distorting lens is related to calibration capability and the correction accuracy of whole ADAPTIVE OPTICS SYSTEMS.
Deformation reflection mirror is to compensate Wave-front phase and distort by changing oneself face, surface shape, can be divided into continuous surface shape and discrete
Surface two types.
Continuous surface deformable mirror, its advantage is to obtain continuous print face shape, and correction accuracy is high, and its shortcoming is the deformation of face shape
Measure smaller.The deformation reflection mirror of continuous surface can be divided into again overall actuating and discrete actuating two kinds.Overall actuating mainly has double
Piezoelectric deforming mirror and Bao Mo distorting lens, be characterized in that whole mirror surface is all when controlling voltage and acting on a certain actuating unit
To be deformed, this kind of distorting lens is mainly used in coordinating the low step mode part of correction wavefront distortion with curvature wavefront sensor.
One feature of discrete actuating distorting lens is when controlling voltage and acting on an actuator, only this actuator adjacent region
Territory produces local deformation.When wherein direction of actuation is parallel to minute surface, actuator acts on mirror edge, is only used for correction
The particular aberration such as out of focus and astigmatism, therefore the application in ADAPTIVE OPTICS SYSTEMS receives limitation.Direction of actuation is perpendicular to mirror
The continuous surface deformable mirror in face can correct each rank aberration, and can reach the highest correction accuracy, therefore becomes adaptive optical
A kind of wave-front corrector most widely used in system.
The research of the domestic deformable mirror system aspects at top adjustment degree relatively early, i.e. established first set laser wave in 1986
Correction system in face (refers to academic report document, Jiang Wenhan, adaptive optical technique, " Chinese Academy of Engineering's second time academician's conference
Academic report collects ", July nineteen ninety-five), its regulation bore is 70mm*70mm.From application, up to the present, exist
This respect application is most successful is exactly the laser nuclear fusion system of Lao Lunsilifei More National Laboratory of the U.S..They use
Deformable mirror system by the 400mm*400mm of Beamlet Developed.This system uses electromagnetic brake braking
Mode, actuator uses hexagonal arrangement mode, it is achieved that the performance of heavy caliber (400mm*400mm) and relatively top adjustment precision.
The mode that its displacement transmission system uses is, actuator direct contact resilient reed, elastic spring and active optics minute surface adhesion
Together.So positive movement displacement of actuator is reacted directly on optical mirror plane, and its negative sense displacement is then because of elastic spring
Restoring force realizes.
Summary of the invention
It is contemplated that solve one of above-mentioned technical problem the most to a certain extent.
To this end, it is an object of the present invention to propose a kind of optical component surface shape that can change active optics, and can
Reach the distorting lens of higher degree of regulation.
Distorting lens according to embodiments of the present invention, including: pedestal, described pedestal has the most through described pedestal
Actuation channel;Piezoelectric actuator, described piezoelectric actuator is arranged in described actuation channel and the pushing away of described piezoelectric actuator
Enter the head process upper surface for described pedestal;Actuation channel closure plate, described actuation channel closure plate be connected with described pedestal with
Described piezoelectric actuator is enclosed in described actuation channel;Propelling head with mirror body, described mirror body and described piezoelectric actuator
It is connected.
Distorting lens according to embodiments of the present invention, uses piezoelectric actuator to provide pretightning force, makes distorting lens produce deformation, permissible
Change the optical component surface shape of active optics, and higher degree of regulation can be reached.
It addition, distorting lens according to the above embodiment of the present invention can also have a following additional technical characteristic:
An example according to the present invention, described piezoelectric actuator includes metal shell and the piezoelectricity being located in described metal shell
Pottery.
An example according to the present invention, described metal shell is configured to spring-like.
An example according to the present invention, described piezoelectric ceramics and described metal shell interference fit.
An example according to the present invention, described distorting lens also includes vernier knob, described actuation channel closure plate has with
The through hole that described vernier knob is suitable, described vernier knob be located on described actuation channel closure plate and with described Piezoelectric Driving
The lower end of device is connected.
An example according to the present invention, described distorting lens also includes that disc spring, described disc spring are located in described actuation channel, institute
State the propelling head of piezoelectric actuator through described disc spring.
The additional aspect of the present invention and advantage will part be given in the following description, and part will become bright from the following description
Aobvious, or recognized by the practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or the additional aspect of the present invention and advantage will be apparent from from combining the accompanying drawings below description to embodiment
With easy to understand, wherein:
Fig. 1 is the schematic diagram of distorting lens according to an embodiment of the invention;With
Fig. 2 is the schematic diagram of the piezoelectric actuator of distorting lens according to an embodiment of the invention.
Detailed description of the invention
Embodiments of the invention are described below in detail, and the example of described embodiment is shown in the drawings, the most identical
Or similar label represents same or similar element or has the element of same or like function.Retouch below with reference to accompanying drawing
The embodiment stated is exemplary, it is intended to is used for explaining the present invention, and is not considered as limiting the invention.
In describing the invention, it is to be understood that term " " center ", " longitudinally ", " laterally ", " length ", " width ",
" thickness ", " on ", D score, "front", "rear", "left", "right", " vertically ", " level ", " top ", " end " " interior ",
Orientation or the position relationship of the instruction such as " outward ", " clockwise ", " counterclockwise " are based on orientation shown in the drawings or position relationship,
It is for only for ease of the description present invention and simplifies description rather than instruction or imply that the device of indication or element must have specific
Orientation, with specific azimuth configuration and operation, be therefore not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that instruction or hint relative importance
Or the implicit quantity indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can be expressed
Or implicitly include one or more this feature.In describing the invention, " multiple " are meant that two or two
Above, unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, term " install ", " being connected ", " connection ", " fixing "
Should be interpreted broadly Deng term, connect for example, it may be fixing, it is also possible to be to removably connect, or be integrally connected;Can
To be mechanical connection, it is also possible to be electrical connection;Can be to be joined directly together, it is also possible to be indirectly connected to by intermediary, permissible
It it is the connection of two element internals.For the ordinary skill in the art, above-mentioned art can be understood as the case may be
Language concrete meaning in the present invention.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature it " on " or D score
Can include that the first and second features directly contact, it is also possible to include that the first and second features are not directly contact but logical
Cross the other characterisation contact between them.And, fisrt feature second feature " on ", " top " and " on
Face " include that fisrt feature directly over second feature and oblique upper, or is merely representative of fisrt feature level height higher than the
Two features.Fisrt feature second feature " under ", " lower section " and " below " include that fisrt feature is special second
Directly over levying and oblique upper, or it is merely representative of fisrt feature level height less than second feature.
Below with reference to the accompanying drawings distorting lens according to embodiments of the present invention is described in detail.
As depicted in figs. 1 and 2, distorting lens according to embodiments of the present invention, including: pedestal 1, piezoelectric actuator 2, activate
Channel enclosed sheet 3 and mirror body 4.
Specifically, pedestal 1 has the actuation channel 11 of the most through pedestal 1.
Piezoelectric actuator 2 is arranged on interior and piezoelectric actuator 2 the propelling 21 of actuation channel 11 and protrudes from the upper table of pedestal 1
Face.
Actuation channel closure plate 3 is connected to be enclosed in actuation channel 11 piezoelectric actuator 2 with pedestal 1.
Mirror body 4 is connected with the propelling 21 of piezoelectric actuator 2.
More specifically, according to an example of the present invention, piezoelectric actuator 2 includes metal shell 22 and is located at metal shell 22
Interior piezoelectric ceramics 20.Advantageously, metal shell 22 is configured to spring-like.Further, outside piezoelectric ceramics 20 is with metal
Shell 22 interference fit.
When piezo-activator 2 extends, piezo-activator 2 provides positive displacement upwards, when piezo-activator 2 shrinks,
Piezoelectric ceramics 20, to provide pretightning force, when piezoelectric ceramics 20 shrinks, gold is compressed in advance owing to preceding metal shell 22 is internal
Belong to shell 22 and also produce contraction, produce downward negative displacement;The positive negative sense displacement of piezoelectric actuator 2 provides positive and negative for mirror body 4
To displacement, distorting lens according to embodiments of the present invention is made to produce deformation.
Distorting lens according to embodiments of the present invention, uses piezoelectric actuator to provide pretightning force, makes distorting lens produce deformation, permissible
Change the optical component surface shape of active optics, and higher degree of regulation can be reached.
An example according to the present invention, described distorting lens also includes vernier knob 5.Have with micro-on actuation channel closure plate 3
Adjust the through hole that knob 5 is suitable.Vernier knob 5 be located on actuation channel closure plate 3 and with the lower end phase of piezoelectric actuator 2
Even.
An example according to the present invention, described distorting lens also includes disc spring 6.Disc spring 6 is located in actuation channel 11, piezoelectricity
The propelling 2 of driver 2 is through disc spring 6.
In other words, distorting lens according to embodiments of the present invention, pedestal 1 is the matrix installing distorting lens accessory.Disc spring 6 is filled
Enter in actuation channel 11, then it is internal that piezo-activator 2 is put into pedestal 1, at pedestal 1 afterbody, actuation channel closure plate is installed
3, then vernier knob 5 is screwed in actuation channel closure plate 3, rotary fine adjustment knob 5 changes pretightning force size.By mirror body
4 are connected with the propelling 21 of piezoelectric actuator 2.
The power resources of piezo-activator 2 are the piezoelectric ceramics 20 at center, are that metal shell 22 wraps in piezoelectric ceramics 20 periphery
Enclose.Metal shell 22 becomes spring-like, and three bread confined pressure electroceramics 20.Piezoelectric ceramics 20 and metal shell 22 used
The mode coordinated that is full of is integrated.When piezoelectric ceramics 20 shrinks, metal shell 22 the most together shrinks, when piezoelectric ceramics 20
During elongation, push metal shell 22, because metal shell 22 had previously been fabricated to spring-like, make in internal piezoelectric ceramics 20 elongation
Extend with lower generation.The employing of piezoelectric actuator 2 decreases the number of fitting parts in actuation channel 11, make mechanism more succinct,
Assembling is rapidly.The shearing produced when metal shell 22 outside piezoelectric ceramics 20 allows the installer to prevent vernier knob 5 to regulate
The power destruction to driver.In this design makes actuation channel 11, accessory simplifies, convenient installation.
In the description of this specification, reference term " embodiment ", " some embodiments ", " example ", " specifically show
Example " or the description of " some examples " etc. means to combine this embodiment or example describes specific features, structure, material or
Feature is contained at least one embodiment or the example of the present invention.In this manual, the schematic representation to above-mentioned term
It is not necessarily referring to identical embodiment or example.And, the specific features of description, structure, material or feature can be
Any one or more embodiments or example combine in an appropriate manner.
Although above it has been shown and described that embodiments of the invention, it is to be understood that above-described embodiment is exemplary,
Being not considered as limiting the invention, those of ordinary skill in the art is without departing from the principle of the present invention and the situation of objective
Under above-described embodiment can be changed within the scope of the invention, revise, replace and modification.
Claims (3)
1. a distorting lens, it is characterised in that including:
Pedestal, described pedestal has the actuation channel of the most through described pedestal;
Piezoelectric actuator, described piezoelectric actuator be arranged in described actuation channel and described piezoelectric actuator propelling head process for
The upper surface of described pedestal;
Actuation channel closure plate, described actuation channel closure plate is connected described to be enclosed in by described piezoelectric actuator with described pedestal
In actuation channel;With
Mirror body, described mirror body is connected with the propelling head of described piezoelectric actuator;
Described piezoelectric actuator includes metal shell and the piezoelectric ceramics being located in described metal shell;
Described metal shell is configured to spring-like;
Described piezoelectric ceramics and described metal shell interference fit.
Distorting lens the most according to claim 1, it is characterised in that also include vernier knob, described actuation channel is closed
Having the through hole suitable with described vernier knob on sheet, described vernier knob is located on described actuation channel closure plate and with described
The lower end of piezoelectric actuator is connected.
Distorting lens the most according to claim 1, it is characterised in that also include that disc spring, described disc spring are located at described actuating
In passage, the propelling head of described piezoelectric actuator passes described disc spring.
Priority Applications (1)
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CN201310701623.7A CN103645558B (en) | 2012-12-28 | 2013-12-19 | Distorting lens |
Applications Claiming Priority (4)
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CN201210586363 | 2012-12-28 | ||
CN2012105863639 | 2012-12-28 | ||
CN201210586363.9 | 2012-12-28 | ||
CN201310701623.7A CN103645558B (en) | 2012-12-28 | 2013-12-19 | Distorting lens |
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CN103645558A CN103645558A (en) | 2014-03-19 |
CN103645558B true CN103645558B (en) | 2016-08-17 |
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CN104539188B (en) * | 2015-01-04 | 2017-01-18 | 中国科学院光电技术研究所 | High-precision pressure driving device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5208506A (en) * | 1990-11-14 | 1993-05-04 | Nec Corporation | Laminated piezoelectric actuator |
CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
CN102709463A (en) * | 2012-06-28 | 2012-10-03 | 陈�峰 | Device and manufacturing method for packing piezoelectric ceramic |
Family Cites Families (3)
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CN100439049C (en) * | 2004-07-15 | 2008-12-03 | 清华大学 | Plane movement mechanism and its device for micro robot |
US7429815B2 (en) * | 2006-06-23 | 2008-09-30 | Caterpillar Inc. | Fuel injector having encased piezo electric actuator |
CN202527351U (en) * | 2012-04-17 | 2012-11-14 | 苏州工业园区海纳科技有限公司 | Round tube type energy transducer |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5208506A (en) * | 1990-11-14 | 1993-05-04 | Nec Corporation | Laminated piezoelectric actuator |
CN101504487A (en) * | 2009-03-20 | 2009-08-12 | 中国科学院光电技术研究所 | Large-diameter detachable piezoelectric deforming reflection mirror |
CN102709463A (en) * | 2012-06-28 | 2012-10-03 | 陈�峰 | Device and manufacturing method for packing piezoelectric ceramic |
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