CN103293662B - Reflective mirror surface shape control device - Google Patents
Reflective mirror surface shape control device Download PDFInfo
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- CN103293662B CN103293662B CN201310226580.1A CN201310226580A CN103293662B CN 103293662 B CN103293662 B CN 103293662B CN 201310226580 A CN201310226580 A CN 201310226580A CN 103293662 B CN103293662 B CN 103293662B
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- eyeglass
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- heating
- refrigerating unit
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- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 238000005057 refrigeration Methods 0.000 claims abstract description 4
- 238000007493 shaping process Methods 0.000 claims abstract description 4
- 238000009826 distribution Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 238000009828 non-uniform distribution Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 239000004575 stone Substances 0.000 claims 1
- 241000219739 Lens Species 0.000 abstract description 9
- 210000000695 crystalline len Anatomy 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 5
- 238000005265 energy consumption Methods 0.000 abstract description 3
- 230000003044 adaptive effect Effects 0.000 description 7
- 238000012937 correction Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002365 multiple layer Substances 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
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- Optical Elements Other Than Lenses (AREA)
Abstract
The invention discloses a kind of reflective mirror surface shape control device, including：Eyeglass, eyeglass produce deformation active force is received, and the wavefront front of light beam of the face shape after deformation to irradiation thereon has shaping operation；Base, base are connected with eyeglass, produce deformation for receiving the energy variation of heating/refrigerating unit, and by deformation effect on eyeglass；Heating/refrigerating unit, heating/refrigerating unit are arranged on the bottom of base, and the deformation for base provides temperature conditionss；Hygrosensor, hygrosensor are installed in the base, pass to the temperature change value occurred on base for detecting heated/refrigeration unit, to be controlled regulation.Present configuration is simple, and degree of regulation is high, and Real time Efficiency is high, reduces energy consumption, while infrastructure cost is very low and efficient small distorting lenss of many point of adjustment of achievable small size make.
Description
Technical field
The present invention relates to precision optical instrument field, and in particular to a kind of reflective mirror surface shape control device.
Background technology
Distorting lenss, also known as deformation reflection mirror, among mainly applying to various ADAPTIVE OPTICS SYSTEMS, as wave-front corrector
Part corrects wavefront error, plays an important role in ADAPTIVE OPTICS SYSTEMS, is important in ADAPTIVE OPTICS SYSTEMS
One of part, the research and development of distorting lenss are related to the calibration capability and correction accuracy of whole ADAPTIVE OPTICS SYSTEMS.
Deformable reflective mirror compensated by changing oneself surface face shape Wave-front phase distortion, can be divided into continuous surface shape and
Discrete surface two types. continuous surface deformable mirror, its advantage can be to obtain continuous face shape, and correction accuracy is high, its shortcoming
Be face shape deflection it is smaller.The deformation reflection mirror of continuous surface can be divided into overall actuating and two kinds of discrete actuating again.It is overall
Actuating mainly has double piezoelectric deforming mirrors and Bao Mo distorting lenss, is characterized in when control voltage acts on a certain actuating unit, whole
Individual mirror surface will all be deformed, and this kind of distorting lenss are mainly used in coordinating the low of correction wavefront distortion with curvature wavefront sensor
Order mode part.A discrete feature for activating distorting lenss is only actuating when control voltage acts on an actuator
Device adjacent area produces local deformation.When wherein direction of actuation is parallel to minute surface, actuator acts on mirror edge, Zhi Nengyong
In the correction particular aberration such as out of focus and astigmatism, therefore the application in ADAPTIVE OPTICS SYSTEMS receives limitation.Direction of actuation is hung down
The straight continuous surface deformable mirror in minute surface can correct each rank aberration, and can reach very high correction accuracy, therefore become certainly
Most widely used a kind of wave-front corrector in adaptive optics system.
It is domestic more early in the research of the deformable mirror system aspects of top adjustment degree, first set was established in 1986 and is swashed
Light Wavefront Rectification system（Refer to academic report document, Jiang Wenhan, adaptive optical technique,《Second academician of Chinese Academy of Engineering is big
Can academic report compilation》, July nineteen ninety-five）, it is 70mm*70mm. from application which adjusts bore, up to the present, in this side
Face using it is most successful be exactly Lao Lunsilifei Mores National Laboratory of the U.S. laser nuclear fusion system.They using by
The deformable mirror system of the 400mm*400mm of Beamlet Developeies.Side of the system using electromagnetic brake braking
Formula, actuator adopt hexagonal arrangement mode, realize heavy caliber（400mm*400mm）With the performance compared with top adjustment precision.Its
Displacement transmission system is that actuator directly contact elastic spring, elastic spring are sticked in active optics minute surface by the way of
Together.The positive movement displacement of so actuator is reacted directly on optical mirror plane, its negative sense displacement then because elastic spring return
Answer power to realize.The structure and complexity of the existing distorting lenss by spring-return power, because needing Precision Machining, manufacturing cost compared with
It is high.
The content of the invention
It is contemplated that at least solving one of above-mentioned technical problem to a certain extent or providing at a kind of useful business
Industry is selected.For this purpose, it is an object of the invention to proposing the high reflective minute surface profile control dress of a kind of simple structure, degree of regulation
Put.
For achieving the above object, reflective mirror surface shape control device according to embodiments of the present invention, including：At least one
Eyeglass, the eyeglass produce deformation active force is received, the wavefront front of light beam of the face shape after deformation to irradiation thereon
There is shaping operation；Base, the base are connected with the eyeglass, are produced for receiving the energy variation of heating/refrigerating unit
Deformation, and by deformation effect on the eyeglass；Heating/refrigerating unit described at least one, the heating/refrigerating unit and institute
State base to be connected, for providing temperature conditionss for the deformation of the base；At least one hygrosensor, the hygrosensor
Be connected with the base, the temperature change value occurred on base is passed to for detecting heated/refrigeration unit, to be controlled
System is adjusted.
In one embodiment of the invention, it is to be joined directly together between the eyeglass and the base, or passes through mirror post
It is indirectly connected to.
In one embodiment of the invention, the heating/refrigerating unit be uniformly distributed or non-uniform Distribution be arranged on
The inside or surface of the base.
In one embodiment of the invention, the hygrosensor be uniformly distributed or non-uniform Distribution be arranged on it is described
The inside or surface of base.
In one embodiment of the invention, the thickness of the eyeglass is equal to or more than or less than the thickness of the base.
In one embodiment of the invention, there is in the base fluting, it is described to slot for changing the base
Can deformation adjustment region.
In one embodiment of the invention, the eyeglass includes that many sub- eyeglasses are formed by stacking, and/or, the base
It is formed by stacking including many sub- bases.
In one embodiment of the invention, the eyeglass is different with the linear expansion coefficient of the base.
In one embodiment of the invention, the material of the eyeglass is quartz or glass.
Present configuration is simple, and degree of regulation is high, and Real time Efficiency is high, reduces energy consumption, while infrastructure cost is very low and can be real
The efficient small distorting lenss of many point of adjustment of existing small size make.
The additional aspect and advantage of the present invention will be set forth in part in the description, and partly will become from the following description
Obtain substantially, or recognized by the practice of the present invention.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the present invention will become from the description with reference to accompanying drawings below to embodiment
It is substantially and easy to understand, wherein：
Fig. 1 is the structural representation of the reflective mirror shape control device according to first embodiment of the invention；
Fig. 2 is the structural representation of the reflective mirror shape control device according to second embodiment of the invention；
Fig. 3 is the structural representation of the reflective mirror shape control device according to third embodiment of the invention；
Fig. 4 is the structural representation of the reflective mirror shape control device according to fourth embodiment of the invention；
Fig. 5 is the structural representation of the reflective mirror shape control device according to fifth embodiment of the invention；
Fig. 6 is the structural representation of the reflective mirror shape control device according to sixth embodiment of the invention；
Fig. 7 is the structural representation of the reflective mirror shape control device according to seventh embodiment of the invention.
Specific embodiment
Embodiments of the invention are described below in detail, the example of the embodiment is shown in the drawings, wherein from start to finish
Same or similar label represents same or similar element or the element with same or like function.Below with reference to attached
The embodiment of figure description is exemplary, it is intended to for explaining the present invention, and be not considered as limiting the invention.
In describing the invention, it is to be understood that term " " center ", " longitudinal direction ", " horizontal ", " length ", " width ",
" thickness ", " on ", D score, "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outward ", " up time
The orientation or position relationship of the instruction such as pin ", " counterclockwise " is, based on orientation shown in the drawings or position relationship, to be for only for ease of
The description present invention and simplified description, rather than indicate or imply that the device or element of indication must have specific orientation, Yi Te
Fixed azimuth configuration and operation, therefore be not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include one or more this feature.In describing the invention, " multiple " are meant that two or more,
Unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be being fixedly connected, or being detachably connected, or be integrally connected；It can be machine
Tool connects, or electrically connects；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be two units
Connection inside part.For the ordinary skill in the art, above-mentioned term can be understood at this as the case may be
Concrete meaning in bright.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature it " on " or D score
The first and second feature directly contacts can be included, it is also possible to be not directly contact including the first and second features but by it
Between other characterisation contact.And, fisrt feature second feature " on ", " top " and " above " it is special including first
Levy directly over second feature and oblique upper, or fisrt feature level height is merely representative of higher than second feature.Fisrt feature exists
Second feature " under ", " lower section " and " below ", or be merely representative of immediately below second feature and obliquely downward including fisrt feature
Fisrt feature level height is less than second feature.
Reflective mirror surface shape control device according to embodiments of the present invention, including：At least one eyeglass 1, eyeglass 1 are connecing
Deformation is produced by active force, the wavefront front of light beam of the face shape after deformation to irradiation thereon has shaping operation；Base 2,
Base 2 is connected with eyeglass 1, produces deformation for receiving the energy variation of heating/refrigerating unit 3, and by deformation effect in mirror
On piece 1；At least one heating/refrigerating unit 3, heating/refrigerating unit 3 are connected with base 2, for providing for the deformation of base 2
Temperature conditionss；At least one hygrosensor 4, hygrosensor 4 are connected with base 2, for detecting heated/refrigeration unit 3
The temperature change value occurred on base 2 is passed to, to be controlled regulation.
To make those skilled in the art more fully understand the present invention, it is further explained with reference to Figure of description.
Referring to Fig. 1 and Fig. 2, in one embodiment of the invention, to be joined directly together between eyeglass 1 and base 2, Huo Zhetong
Cross mirror post to be indirectly connected to.Specifically, can be by 2 direct bonding of eyeglass 1 and base.By 5 indirect bonding of mirror post can be：First will
Highly consistent mirror post 5 is arranged on 2 upper surface of base, then eyeglass 1 is arranged on 5 upper surface of mirror post；Or first by 5 He of mirror post
Eyeglass 1 is pasted, and is then pasted onto 2 upper surface of base together.The power of deformation is transmitted by mirror post 5 when base 2 is deformed upon
To eyeglass 1 so as to driving it to produce preferable face shape.
Referring to Fig. 1 and Fig. 3, in one embodiment of the invention, heating/refrigerating unit 3 is uniformly distributed or non-homogeneous point
Cloth ground is arranged on the inside or surface of base 2；Hygrosensor 4 be uniformly distributed or non-uniform Distribution in base 2
Portion or surface.Typically first by 2 perforate of base, perforate is used to lay heating/refrigerating unit 3 and hygrosensor 4.The quantity of perforate
How many and position can be selected according to being actually needed with distribution.
Referring to Fig. 3, Fig. 4 and Fig. 5, in one embodiment of the invention, the thickness of eyeglass 1 is equal to or more than or is less than
The thickness of base 2.The relativeness of concrete thickness can be selected according to actual needs.
Referring to Fig. 6, in one embodiment of the invention, there is fluting in base 2, slotting can for change base 2
Deformation adjustment region.With eyeglass directly contact, and cannot be only capable of passing where transmission has contact in terms of deformation transmission at groove
Pass, so grooved position can be taken according to the distribution of wavefront front to be corrected with size, to precisely control
Deformation.
Referring to Fig. 7, in one embodiment of the invention, eyeglass 1 includes that many sub- eyeglasses are formed by stacking, and/or, base
2 include that many sub- bases are formed by stacking.The structure of multiple-layer stacked can realize some complex combination effects.
In one embodiment of the invention, eyeglass 1 is different with the linear expansion coefficient of base 2.Just because of linear expansion coefficient is different,
Deformation could be produced, minute surface profile control is carried out.This is that the actuating power of the present invention is located.
In one embodiment of the invention, the material of eyeglass 1 is quartz or glass.Base 2 is then metal or nonmetallic.
From the foregoing, it will be observed that the eyeglass 1 in reflective mirror shape control device is the light beam for reflected illumination thereon, together
When by adjust 1 plane of eyeglass on height size distribution the reflected beams to adjust wavefront front.Reflective mirror shape
In control device, the linear expansion coefficient of base 2 is different from eyeglass 1.Eyeglass 1 is acted in reflective mirror shape control device
On power source come from heating/refrigerating unit 3.Heating/refrigerating unit 3, which is installed together with base 2.When Jing light beams are surveyed
Good wavefront surface shape check point is distributed on 3 array of heating/refrigerating unit, and each heating/refrigerating unit 3 produces corresponding temperature
Degree field distribution deforms upon base 2, and on eyeglass 1, which is produced deformation and is obtained preferable face shape deformation effect；Pass through
The change of 3 array temperature field distribution of large area control heating/refrigerating unit, can drive 1 deformation of eyeglass to obtain the face shape wanted.
Hygrosensor 4 its be arranged on base 2 be used for the temperature variations everywhere of real-time detection base 2.
Present configuration is simple, and degree of regulation is high, and Real time Efficiency is high, reduces energy consumption, while infrastructure cost is very low and can be real
The efficient small distorting lenss of many point of adjustment of existing small size make.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
Example ", or the description of " some examples " etc. mean specific features with reference to the embodiment or example description, structure, material or spy
Point is contained at least one embodiment or example of the present invention.In this manual, to the schematic representation of above-mentioned term not
Identical embodiment or example are referred to necessarily.And, the specific features of description, structure, material or feature can be any
One or more embodiments or example in combine in an appropriate manner.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art is in the principle and objective without departing from the present invention
In the case of above-described embodiment can be changed within the scope of the invention, change, replace and modification.
Claims (1)
1. a kind of reflective mirror surface shape control device, it is characterised in that include：
At least one eyeglass, the eyeglass produce deformation active force is received, light of the face shape after deformation to irradiation thereon
The wavefront front of beam has shaping operation, wherein, the eyeglass includes that many sub- eyeglasses are formed by stacking, and the material of the eyeglass is stone
English or glass；
Base, the base are indirectly connected to by mirror post with the eyeglass, and the base includes that many sub- bases are formed by stacking, institute
State, it is described slot for change the base can deformation adjustment region, wherein, the eyeglass and described
The linear expansion coefficient of base is different, and the base is used to receiving the energy variation of heating/refrigerating unit causes the local of the eyeglass
Deformation, wherein, the thickness of the eyeglass is equal to or more than or less than the thickness of the base；
Heating/refrigerating unit described at least one, the heating/refrigerating unit are connected with the base, for for the base
Deformation provide temperature conditionss, wherein, the heating/refrigerating unit be uniformly distributed or non-uniform Distribution be arranged on the base
Inside or surface；
At least one hygrosensor, the hygrosensor are connected with the base, are passed for detecting heated/refrigeration unit
To the temperature change value occurred on base, to be controlled regulation, wherein, the hygrosensor is uniformly distributed or non-equal
Even distribution ground is arranged on the inside or surface of the base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310226580.1A CN103293662B (en) | 2013-06-07 | 2013-06-07 | Reflective mirror surface shape control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310226580.1A CN103293662B (en) | 2013-06-07 | 2013-06-07 | Reflective mirror surface shape control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103293662A CN103293662A (en) | 2013-09-11 |
| CN103293662B true CN103293662B (en) | 2017-04-05 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310226580.1A Active CN103293662B (en) | 2013-06-07 | 2013-06-07 | Reflective mirror surface shape control device |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103969823B (en) * | 2014-05-05 | 2017-01-11 | 中国科学院长春光学精密机械与物理研究所 | Wavefront active compensating device of optical system |
| CN104682170B (en) * | 2015-02-15 | 2017-07-14 | 中国科学院上海光学精密机械研究所 | The array laser gain media face type regulating and controlling mechanism of air pressure driving |
| CN106125298A (en) * | 2016-08-31 | 2016-11-16 | 中国科学院长春光学精密机械与物理研究所 | Contactless space optical remote sensor reflecting mirror surface shape control system |
| CN108594427B (en) * | 2018-06-19 | 2023-12-19 | 西南科技大学 | thermally driven deformable mirror |
| CN109324411A (en) * | 2018-11-27 | 2019-02-12 | 中国电子科技集团公司第十研究所 | A kind of laser distorted wavefront bearing calibration and device |
| CN109852930B (en) * | 2019-03-29 | 2021-06-15 | 中国科学院上海技术物理研究所 | Method for compensating film coating deformation of medium-caliber dielectric film plane reflector |
| CN110543010B (en) * | 2019-08-23 | 2021-01-19 | 中国科学院高能物理研究所 | Ultra-precise active optical modulation method and system |
| CN114967036B (en) * | 2022-05-30 | 2024-02-02 | 深圳综合粒子设施研究院 | Mirror surface shape control structure and beam line device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655563A (en) * | 1985-11-25 | 1987-04-07 | Itek Corporation | Variable thickness deformable mirror |
| CN1752794A (en) * | 2004-09-20 | 2006-03-29 | 阿尔卡特公司 | Locally deformable mirror comprising electroactive material whose thickness can be varied by means of electrical effects |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6846086B2 (en) * | 2002-03-11 | 2005-01-25 | Intel Corporation | Mirror assembly with thermal contour control |
| JP4032133B2 (en) * | 2003-03-31 | 2008-01-16 | 独立行政法人産業技術総合研究所 | Deformable mirror device |
-
2013
- 2013-06-07 CN CN201310226580.1A patent/CN103293662B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655563A (en) * | 1985-11-25 | 1987-04-07 | Itek Corporation | Variable thickness deformable mirror |
| CN1752794A (en) * | 2004-09-20 | 2006-03-29 | 阿尔卡特公司 | Locally deformable mirror comprising electroactive material whose thickness can be varied by means of electrical effects |
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