CN100496855C - Laser cutting machine tool for precision finishing - Google Patents
Laser cutting machine tool for precision finishing Download PDFInfo
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- CN100496855C CN100496855C CN 200510086252 CN200510086252A CN100496855C CN 100496855 C CN100496855 C CN 100496855C CN 200510086252 CN200510086252 CN 200510086252 CN 200510086252 A CN200510086252 A CN 200510086252A CN 100496855 C CN100496855 C CN 100496855C
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Abstract
The invention relates to a laser cutting machine tool used to accurately process, which uses arc generated by the reaction of object and focused laser beam as beacon wave front, or simultaneously uses reflected light from retrodirective reflector as optical aberration signal of laser itself. Wave-front controller processes signal from wave-front detecter into control message by control algorithm or data anastomosing and drive electronic control system to deform reflecting mirror and compensate thermal perturbation generated by heat quantity from interaction of focusing smudge and object. This method prevents endothermal deformation caused by directly using collective lens, prevents focal point exacerbation and position dispersion caused by optical aberration of laser itself, and locates focus accurately so as to increase machine precision.
Description
Technical field
The present invention relates to a kind of laser cutting machine, particularly relate to a kind of precise laser cutting machine that can improve the Laser Processing quality in real time.
Background technology
Along with fast development of national economy, the demand of laser cutting machine is increased day by day.When the laser cutting machine demand increases, the requirement of Laser Processing quality is also improved constantly.The principal element that influences the Laser Processing quality is the focal beam spot quality of laser beam and the drift of focal spot position that heat deformation causes, and it is determining the machining accuracy of workpiece to be processed.
Not high in order to overcome conventional laser cutting machine machining accuracy, defectives such as the easy drift in point of contact, can on laser cutting machine, use plane or spherical deformation speculum, wave front detector, spectroscope, retroeflector, optical element such as condenser lens or collimation lens, utilize wave front detector, deformation reflection mirror, the closed loop feedback system that the wavefront controller forms, wave front detector is surveyed the signal that obtains is converted into deformation reflection mirror through control algolithm control signal by the wavefront controller, drive deformation reflection mirror and change wavefront shape, realize the real-time correction of disturbance wavefront error, thereby make the focal beam spot quality that arrives on the thing to be cut good.
Summary of the invention
The technical problem that the present invention solves is: overcome turbulent perturbation that the interaction of laser and thing to be cut causes and conventional laser cutting machine because wavefront distortion, focal beam spot debase and the drift that laser self wavefront distortion, condenser lens heat deformation cause provides a kind of precise laser cutting machine that can improve the focal beam spot quality in real time.
Technical solution one of the present invention is: laser cutting machine comprises spherical deformation speculum, spectroscope, wave front detector, electric-control system etc., its characteristics are: the spherical deformation speculum focuses on laser on the thing to be cut, the retroreflection arc light that focal beam spot and thing to be cut interaction produce is as the beacon beam of wave front detector, after wave front detector detects the beacon beam of thermic disturbance, change the thermic disturbance that the interaction of surface shape compensation laser and thing to be cut causes by electric-control system drive ball facial disfigurement speculum.Collimated laser light is behind the spherical deformation speculum, assemble to thing to be cut through the spectroscope reflection, its focal beam spot and thing to be cut interact and produce the retroreflection arc light, this retroreflection arc light is transmitted through collimation lens through whole transmissions of spectroscope or part, before the perturbation wave of a certain frequency in the arc light beacon wavefront behind the wave front detector detection collimation, thereby drive ball facial disfigurement speculum changes the thermic disturbance that face shape interacts and produces with compensating focusing laser and thing to be cut, make the focal beam spot quality of laser good, cutting is accurate.
The technology of the present invention solution two is: the precise laser cutting machine comprises the plane deformation speculum, spectroscope, condenser lens, wave front detector, electric-control system etc., its characteristics are: condenser lens focuses on laser on the thing to be cut, the retroreflection arc light that focal beam spot and thing to be cut interaction produce is as the beacon beam of wave front detector, the beacon beam that wave front detector detects has carried the thermic disturbance that the cut point heating causes, the wavefront distortion that the condenser lens distortion causes, change face shape thereby drive the plane deformation speculum, compensate the thermic disturbance that the interaction of laser and thing to be cut causes, the distortion aberration of condenser lens etc.Collimated laser light is through the plane deformation speculum, behind the spectroscope, condenser lens is assembled it to thing to be cut, its focal beam spot and thing to be cut interact and produce the retroreflection arc light, after this retroreflection arc light line focus collimated all through or part see through spectroscope, transfer to wave front detector then, before the perturbation wave of a certain frequency in the arc light behind the wave front detector detection collimation, thereby drive the plane deformation speculum and change the wavefront distortion that face shape causes with the thermal deformation of compensating focusing lens, the thermal agitation that laser focusing and thing to be cut interaction produce etc., make the focal beam spot quality of laser good, cutting is accurate.
Technical solution three of the present invention is: the precise laser cutting machine comprises spherical deformation speculum, retroreflection device, spectroscope, condenser lens, wave front detector one, wave front detector two, electric-control system etc., its characteristics are: described spherical deformation speculum focuses on laser on the thing to be cut, and the interact retroreflection arc light that produces of the focal beam spot of laser and thing to be cut sees through after the collimated collimated of spectroscope beacon beam as wave front detector one; See through spectroscopical small part laser through the retroreflection light echo of the retroeflector beacon beam as wave front detector two, the beacon beam that two wave front detectors are surveyed forms thermic disturbance, the spectroscopical thermal-induced deformation equal error that the interaction of passage disturbance, laser and the thing to be cut of control signal drive ball facial disfigurement speculum change surface shape compensation laser causes after data fusion.Collimated laser light is behind the spherical deformation speculum, become convergent beam, convergent beam reflexes to thing to be cut through spectroscope, the retroreflection arc light that focused light spot and thing to be cut interaction produce is transmitted through collimation lens through whole transmissions of spectroscope or part, and the perturbation wave previous crops of a certain frequency in the arc light beacon wavefront that wave front detector one is surveyed after collimating is a beacon beam; Small part laser sees through spectroscope, through the reflected light of retroreflection device beacon beam as wave front detector two, two beacon beams form corresponding control signal drive ball facial disfigurement speculum and change face shape with the disturbance of compensation laser optical path, laser focusing hot spot and the thermal agitation of thing to be cut interaction generation, spectroscopical thermal deformation etc. after data fusion, make the focal beam spot quality of laser good, cutting is accurate.
Technical solution four of the present invention is: the precise laser cutter system comprises plane deformation speculum, retroreflection device, spectroscope, condenser lens, wave front detector one, wave front detector two, electric-control system etc., its characteristics are: described condenser lens focuses on laser on the thing to be cut, and the retroreflection arc light that the focal beam spot of laser and thing to be cut interaction produce sees through the beacon beam of spectroscope as wave front detector one after being focused collimated; See through spectroscopical small part laser through the retroreflection light echo of the retroeflector beacon beam as wave front detector two, two bundle beacon beams form thermic disturbance, the spectroscopical thermal-induced deformation equal error that interaction that control signal drives passage disturbance, laser and the thing to be cut of plane deformation speculum change surface shape compensation laser causes after data fusion.Collimated laser light is behind plane deformation speculum, spectroscope, assembled to thing to be cut by convergent lens, see through spectroscope after the retroreflection arc light line focus collimated that focal beam spot and thing to be cut interaction produce, the perturbation wave previous crops of a certain frequency in the arc light that wave front detector one is surveyed after collimating is a beacon beam; The small part collimated laser light sees through spectroscope, through the reflected light of retroreflection device beacon beam as wave front detector two, two beacon beams form corresponding control signal and drive plane deformation speculum change face shape with the disturbance of compensation laser optical path, laser focusing hot spot and the thermal agitation of thing to be cut interaction generation, spectroscopical thermal deformation etc. after data fusion, make the focal beam spot quality of laser good, cutting is accurate.
The present invention compared with prior art has following advantage: the present invention utilizes deformation reflection mirror, wave front detector, wavefront controller etc. to form closed loop feedback system, the thermal agitation that real-Time Compensation laser focusing hot spot and thing to be cut interact and produce, or compensate the aberration of laser own, optical path disturbance, spectroscopical thermal deformation etc. simultaneously, make high-power cutting laser can have the good focusing optical quality, improve cutting accuracy.
Description of drawings
Fig. 1 is the laser cutting machine tool for precision finishing schematic diagram of one of the technology of the present invention solution;
Fig. 2 is two a laser cutting machine tool for precision finishing schematic diagram of the technology of the present invention solution;
Fig. 3 be the technology of the present invention solution three in the laser cutting machine tool for precision finishing schematic diagram;
Fig. 4 is four a laser cutting machine tool for precision finishing schematic diagram of the technology of the present invention solution.
The specific embodiment
As shown in Figure 1, the embodiment of one of the technology of the present invention solution comprises thing 1 to be cut, spherical deformation speculum 3, spectroscope 2, collimation lens 4, wave front detector 5, electric-control system 6 etc., collimated laser light is behind spherical deformation speculum 3, become convergent beam, convergent beam reflexes to thing 1 to be cut through spectroscope 2, laser and thing to be cut interact and produce the retroreflection arc light, this retroreflection arc light is transmitted through collimation lens 4 through spectroscope 2 whole transmissions or part, before the perturbation wave of a certain frequency in the arc light beacon wavefront that wave front detector 5 is surveyed after collimating, thereby drive ball facial disfigurement speculum 3 changes the thermal agitation of face shape with compensation laser optical path disturbance and laser focusing hot spot and thing to be cut interaction generation, improve the focal beam spot quality of laser, make cutting accurate.
As shown in Figure 2, two embodiment of the technology of the present invention solution comprises thing 1 to be cut, condenser lens 2, plane deformation speculum 3, spectroscope 4, wave front detector 5, electric-control system 6 etc., collimated laser light is behind plane deformation speculum 3 and spectroscope 4, assemble to thing 1 to be cut by condenser lens 2, focal beam spot and thing to be cut 1 interact and produce the retroreflection arc light, this retroreflection arc light sees through spectroscope 2 whole transmissions or part transmission wave front detectors 5 after being focused collimated, before wave front detector 5 is surveyed the perturbation wave of a certain frequency in the arc light beacon wavefront, thereby drive plane deformation speculum 3 and change the thermal agitation that face shape interacts and produces with compensating focusing laser facula and thing to be cut, make the focal beam spot quality of laser good, cutting is accurate.
The described precise laser cutting machine of one of such scheme is characterized in that: to thing to be cut, its curvature can be spheric curvature or aspheric curvature to use spherical deformation speculum laser convergence.Two described laser cutting machines of scheme is characterized in that: use condenser lens laser convergence to thing to be cut.The driver of the deformation reflection mirror that scheme one and scheme two are used can use opposite shapes such as piezoelectric ceramic actuator, electrostriction ceramics driver, magnetostriction alloy driver to revise.This system utilizes laser and thing to be cut to interact the wavefront of a certain frequency in the retroreflection that produces as the Wavefront detecting beacon.Wave front detector is only surveyed the wavefront of a certain frequency in the arc light.Spectroscopical film in the system is to be designed to laser is all reflected, to whole transmissions of a certain wave band or the part transmission away from laser wavelength.
Scheme one and scheme two can compensate the wavefront distortion that heat that the point of contact produces causes, make the point of contact stable, have improved the focal beam spot quality to a certain extent.But the wavefront distortion of laser itself all can not be surveyed and compensate to its door.These two kinds of schemes are suitable for laser focal beam spot and to be cut its, and to cut the thing thermic disturbance cause that interacts be a large amount of situations.
As shown in Figure 3, three embodiment of the technology of the present invention solution comprise thing 1 to be cut, retroreflection device 2, spectroscope 3, spherical deformation speculum 4, collimation lens 5, wave front detector 6, wave front detector 7, electric-control system 8 etc., spherical deformation speculum 3 focuses on the laser after collimating on the thing 1 to be cut, the retroreflection arc light that focal beam spot and thing to be cut interaction produce sees through spectroscope 3, by the beacon beam of collimation lens 5 collimation backs as wave front detector 6; The small part laser that sees through spectroscope 3 is through the retroreflection light echo of the retroeflector beacon beam as wave front detector 7, the two bundle beacon beams that wave front detector 6 and wave front detector 7 surveyed form thermic disturbance, the spectroscopical thermal-induced deformation equal error that interaction that control signal drive ball facial disfigurement speculum 4 changes the aberration of surface shape compensation laser own, passage disturbance, laser and thing to be cut causes after data fusion, its data fusion method can adopt document " common light path/common mode block adaptive optical data fusion method.The optics journal, Vol.24, P131～136,2004 " disclosed several data fusion methods, as methods such as slope fusion, corrugated fusion, voltage fusions.
As shown in Figure 4, four embodiment of the technology of the present invention solution comprise thing 1 to be cut, condenser lens 2, plane deformation speculum 3, spectroscope 4, retroreflection device 5, wave front detector 6, wave front detector 7, electric-control system 8 etc., condenser lens 2 focuses on collimated laser light on the thing 1 to be cut, the retroreflection arc light line focus lens 2 collimation backs that focal beam spot and thing to be cut interaction produce see through the beacon beam of spectroscope 4 as wave front detector 6, the small part laser that sees through spectroscope 3 is through the retroreflection light echo of the retroeflector beacon beam as wave front detector 7, and two bundle beacon beams form control signal and drive the aberration of plane deformation speculum 4 change surface shape compensation laser own after data fusion, the passage disturbance, the thermic disturbance that the interaction of laser and thing to be cut causes, spectroscopical thermal-induced deformation equal error.Its data fusion method can adopt document " to be total to light path/common mode block adaptive optical data fusion method.The optics journal, Vol.24, P131～136,2004 " disclosed several data fusion methods, as methods such as slope fusion, corrugated fusion, voltage fusions.
Above-mentioned scheme three and scheme four are characterised in that: the retroreflection arc light that the focal beam spot of laser and thing to be cut interaction produce is as the beacon beam of wave front detector 6, and this beacon beam has carried the thermic disturbance of laser and deposits yields to be cut; The small part laser of spectroscope transmission is formed into the pseudo-conjugation of ejected wave (about retroeflector can be referring to document " reflector array be analyzed as the fidelity of pseudo-phase conjugation device " as pseudo-phase conjugation device after the retroeflector reflection simultaneously.Light laser and ion beam, Vol.13, P287～P290,2001), this puppet phase-conjugate wave front is as the beacon of wave front detector 7, and it has carried the aberration of laser own, spectroscopical thermal deformation aberration etc.Two kinds of beacons form corresponding control signal drive ball facial disfigurement speculum or plane deformation speculum later on through data fusion and change face shape with the disturbance of compensation laser optical path, laser focusing hot spot and thing to be cut the interact thermal agitation of generation, spectroscopical thermal deformation etc., make the focal beam spot quality of laser good, cutting is accurate.
Two wave front detectors in scheme three and the scheme four have been surveyed respectively and have been carried the thermic disturbance arc light retroreflection light echo wavefront that laser and thing to be cut interact and cause, carry the laser beacon wavefront of the aberration of laser own, spectroscopical thermal-induced deformation aberration, compare embodiment one and embodiment two, scheme 3 and scheme 4 have realized the aberration of full light path is surveyed and proofreaied and correct, and can further improve machining accuracy.But embodiment 1 is relative simple with embodiment 2 structures, compares at the aberration of laser own and laser and the thing to be cut thermic aberration that causes that interacts, and when the latter be main aberration, use embodiment 1 and embodiment 2 can save cost, cut down expenses.
The spherical deformation mirror curvature of the present invention program one and scheme three can be a spheric curvature, it also can be aspheric curvature, the deformation reflection mirror of spheric curvature and aspheric curvature can directly become a hot spot to the cutting laser convergence of collimation, can avoid the heat absorption distortion of using convergent lens to bring.
The solution of the present invention one to the scheme four used spectroscope owing to need all reflect the used laser of cutting, so that focal beam spot is off-energy not, and this speculum must carry out transmission to the arc light that cutting produces again, so this spectroscopical film is to be designed to laser is all reflected, to whole transmissions of arc light wave band or the part transmission away from laser wavelength.
The retroreflection device that scheme three and scheme four are used can be angle vertebra prism array, microballon reflective array or phase conjugation device.These several optical elements all can carry out retroreflection to incident wavefront with the wavefront of pseudo-conjugation or conjugation, so that the reflection incident wavefront information of the wavefront slope information truth that wave front detector is surveyed.
The wave front detector that adopts in four schemes of the present invention, it can be Hartmann wave front sensor, as document " Hartmann Sensers for Optical Testing " Robert J.Zielinski, B.MartinLevine, Brain MoNeil.SPIE Vol.314, P398,1997) disclosed Hartmann wave front sensor, or disclosed Hartmann wave front sensor based on microprism array in the Chinese patent application numbers 200310100168.1, can also be other wave front detectors such as curvature sensor.The electric-control system that adopts comprises wave front processor and high-voltage amplifier, wave front processor calculates the wavefront slope information that wave front detector is surveyed in real time, and the formation control signal, change aberration of surface shape compensation laser own and various disturbance aberration through high-voltage amplifier rear drive deformation reflection mirror.
Claims (12)
1, laser cutting machine tool for precision finishing, it is characterized in that: comprise the spherical deformation speculum, spectroscope, collimation lens, wave front detector, electric-control system, use the spherical deformation speculum laser convergence to thing to be cut, collimated laser light is behind the spherical deformation speculum, become convergent beam, convergent beam reflexes to its focal beam spot of thing to be cut and thing to be cut interaction generation retroreflection arc light through spectroscope, this retroreflection arc light is transmitted through collimation lens through whole transmissions of spectroscope or part, before the perturbation wave of a certain frequency in the retroreflection arc light behind the wave front detector detection collimation, thereby drive ball facial disfigurement speculum changes the thermal agitation that face shape interacts and produces with compensating focusing laser facula and thing to be cut.
2, laser cutting machine tool for precision finishing according to claim 1 is characterized in that: described spherical deformation mirror curvature is spheric curvature or aspheric curvature.
3, laser cutting machine tool for precision finishing according to claim 1 is characterized in that: described spectroscopical film is to be designed to laser is all reflected, to whole transmissions of a certain wave band or the part transmission away from laser wavelength.
4, laser cutting machine tool for precision finishing, it is characterized in that: comprise the plane deformation speculum, spectroscope, condenser lens, wave front detector, electric-control system, use condenser lens laser convergence to thing to be cut, collimated laser light is through the plane deformation speculum, behind the spectroscope, condenser lens is assembled it to thing to be cut, its focal beam spot and thing to be cut interact and produce the retroreflection arc light, after this retroreflection arc light line focus collimated all through or part see through spectroscope, transfer to wave front detector then, before the perturbation wave of a certain frequency in the retroreflection arc light behind the wave front detector detection collimation, thereby drive ball facial disfigurement speculum changes the thermal agitation that face shape interacts and produces with compensating focusing laser facula and thing to be cut.
5, laser cutting machine tool for precision finishing according to claim 4 is characterized in that: described spectroscopical film is to be designed to laser is all reflected, to whole transmissions of a certain wave band or the part transmission away from laser wavelength.
6, laser cutting machine tool for precision finishing, it is characterized in that: comprise the spherical deformation speculum, spectroscope, the retroreflection device, collimation lens, two wave front detectors, electric-control system, the conjugate wavefront that uses the formation of retroreflection device orienting reflex is as the beacon of laser own, the retroreflection arc light that uses the cut point generation is as thermic disturbance beacon, collimated laser light is behind the spherical deformation speculum, become convergent beam, the retroreflection arc light that its focal beam spot and thing to be cut interaction produce is transmitted through collimation lens through whole transmissions of spectroscope or part, the perturbation wave previous crops of a certain frequency in the retroreflection arc light after a wave front detector detection collimates is a beacon beam, another wave front detector is surveyed and is seen through conjugate wavefront that spectroscopical small part laser forms through retroreflection device orienting reflex as beacon beam, and two bundle beacon beams form control signal drive ball facial disfigurement speculum change surface shape compensation complete light path aberration after data fusion.
7, laser cutting machine tool for precision finishing according to claim 6 is characterized in that: described spherical deformation mirror curvature is spheric curvature or aspheric curvature.
8, laser cutting machine tool for precision finishing according to claim 6 is characterized in that: described spectroscopical film is to be designed to the transmission of laser small part, to whole transmissions of a certain wave band or the part transmission away from laser wavelength.
9, laser cutting machine tool for precision finishing according to claim 6 is characterized in that: described retroreflection device is angle vertebra prism array, microballon reflective array or phase conjugation device.
10, laser cutting machine tool for precision finishing, comprise the plane deformation speculum, spectroscope, condenser lens, the retroreflection device, two wave front detectors, electric-control system, it is characterized in that: the conjugate wavefront that uses the formation of retroreflection device orienting reflex is as the beacon of laser own, the retroreflection arc light that uses the cut point generation is as thermic disturbance beacon, collimated laser light is through the plane deformation speculum, behind the spectroscope, being focused lens assembles to thing to be cut, see through spectroscope after the retroreflection arc light line focus collimated that focal beam spot and thing to be cut interaction produce, the perturbation wave previous crops of a certain frequency in the retroreflection arc light after a wave front detector detection collimates is a beacon beam, another wave front detector is surveyed small part and is seen through spectroscope, and the conjugate wavefront that forms through the retroeflector orienting reflex is as beacon beam, and two bundle beacon beams form control signal and drive plane deformation speculum change surface shape compensation complete light path aberration after data fusion.
11, laser cutting machine tool for precision finishing according to claim 10 is characterized in that: described retroreflection device can be angle vertebra prism array, microballon reflective array or phase conjugation device.
12, laser cutting machine tool for precision finishing according to claim 10 is characterized in that: described spectroscopical film is to be designed to the transmission of laser small part, to whole transmissions of a certain wave band or the part transmission away from laser wavelength.
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| CN 200510086252 CN100496855C (en) | 2005-08-19 | 2005-08-19 | Laser cutting machine tool for precision finishing |
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| CN 200510086252 CN100496855C (en) | 2005-08-19 | 2005-08-19 | Laser cutting machine tool for precision finishing |
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| CN100496855C true CN100496855C (en) | 2009-06-10 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP4960043B2 (en) * | 2006-08-31 | 2012-06-27 | 日立ビアメカニクス株式会社 | Laser processing method and laser processing apparatus |
| JP4402708B2 (en) | 2007-08-03 | 2010-01-20 | 浜松ホトニクス株式会社 | Laser processing method, laser processing apparatus and manufacturing method thereof |
| CN100493814C (en) * | 2007-10-10 | 2009-06-03 | 厦门大学 | Multifunctional laser processing tool bit with measuring apparatus |
| CN102658431B (en) * | 2012-05-18 | 2014-09-03 | 中国科学院光电技术研究所 | Device capable of automatically diagnosing and correcting divergence angle and beam quality of laser beam |
| CN104379296B (en) * | 2012-06-15 | 2016-06-29 | 三菱电机株式会社 | Laser processing device |
| CN103848393B (en) * | 2013-12-04 | 2016-01-13 | 中国科学院长春光学精密机械与物理研究所 | A kind of adjustment of the ultraprecise depth of parallelism for electrostatic induction technology and detection system |
| US10008822B2 (en) * | 2014-10-10 | 2018-06-26 | The Boeing Company | Laser system and method for controlling the wave front of a laser beam |
| CN109648951B (en) * | 2019-01-04 | 2020-07-24 | 江苏科麦特科技发展有限公司 | Non-continuous aluminum-plastic composite belt and preparation method thereof |
| CN110142503B (en) * | 2019-05-17 | 2020-09-29 | 中国科学院西安光学精密机械研究所 | Defocusing compensation system for laser cutting and compensation method thereof |
| CN112975162B (en) * | 2021-04-21 | 2021-08-24 | 武汉华工激光工程有限责任公司 | Ground glass cutting device and method based on adaptive optics |
| CN114951966A (en) * | 2022-05-30 | 2022-08-30 | 深圳华工新能源装备有限公司 | Method and system for automatic focusing and dynamic focus compensation in wafer processing |
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