CN100493814C - Multifunctional laser processing tool bit with measuring apparatus - Google Patents
Multifunctional laser processing tool bit with measuring apparatus Download PDFInfo
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- CN100493814C CN100493814C CN 200710009644 CN200710009644A CN100493814C CN 100493814 C CN100493814 C CN 100493814C CN 200710009644 CN200710009644 CN 200710009644 CN 200710009644 A CN200710009644 A CN 200710009644A CN 100493814 C CN100493814 C CN 100493814C
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Abstract
The present invention relates to laser processing, opto electromechanical technology and image processing technology, and is especially one multifunctional laser cutter with one measurement unit. The multifunctional laser cutter has adjustable laser spot with changeable spot shape and energy distribution for boring, cutting, welding and other functions. It includes one optical system and one signal acquiring, signal processing and controlling device. The optical system includes an He-Ne laser, a CO2 laser, a plane mirror, a beam expanding collimator, a positive rotating prism, a negative rotating prism and a focusing lens; and the signal acquiring, signal processing and controlling device includes a signal acquiring and processing unit, a controller and a feedback circuit.
Description
Technical field
The present invention relates to a kind of laser processing tool bit, especially relate to relevant information such as a kind of light, mechanical, electrical integrated and image processing and handle laser processing tool bit with functions such as punching, cutting, welding and measurements.
Background technology
Laser Processing is a laser technology main field of application now, particularly in semiconductor and microelectronic industry, auto industry, shipping industry.In recent years, sharply increase for the demand of laser process equipment, but most of laser process equipment can only be realized single processing request.Because the restriction in the aperture of laser beam own, existing laser drilling device adopt the mode of scanning cutting processing to realize the processing of larger aperture morely.This scanning processing mode exists consuming time and the rough deficiency that waits of finished surface.For overcoming these deficiencies, adding man-hour, require the spot size of laser beam to change according to process requirements.
Rotating prism is because simple in structure, and can produce approximate diffraction light-free bundle within the specific limits, thereby receives much concern.Utilize the rotating prism optical system can realize the optical beam transformation of various ways, for example, be annular beam, plane with the solid cross-section optical beam transformation or radially carefully encircle focused beam, perhaps do opposite conversion, perhaps Gaussian beam is transformed into diffraction light-free bundle etc.Light beam that it is superior and energy conversion characteristics make it all have very tempting value (Feng Guoying in laser boring, cylindrical work heat treatment, welding, section, the medium Laser Processing application of high accuracy collimation technique, Lv Baida, Cai Bangwei. the axicon optical system is to the conversion and the application [J] of laser beam. laser technology, 1996,20 (3)).
Summary of the invention
The objective of the invention is at deficiencies such as existing laser process equipment function singlenesses, provide a kind of hot spot adjustable, obtaining to satisfy the light spot shape and the Energy distribution of different process requirements, thereby realize the multifunctional laser processing tool bit that has measurement mechanism of functions such as collection punching, cutting, welding.
For this reason, the present invention utilizes Optical Formula, the computing formula of the dependency relation of the laser beam of acquisition He-Ne laser instrument and CO2 laser emitting, measurement to the black light light beam is transformed into measurement to visible light beam, avoid using optical element, to reduce cost at the black light light velocity measurement.Simultaneously, adopt real-time measuring beam state, and in time parameter is revised, to have improved crudy, precision and working (machining) efficiency by control system.
The present invention includes optical system and gather the control treating apparatus.
Optical system is provided with:
He-Ne laser instrument, He-Ne laser instrument are used for indication of aiming location and conduct illumination imaging source;
CO
2Laser instrument, CO
2The light beam of the actual processing of laser instrument emitted laser Shu Zuowei;
Have the level crossing of transmission and reflex concurrently, the level crossing that has transmission and reflex concurrently is used for He-Ne laser instrument emitted laser bundle and CO
2The coupling of laser instrument emitted laser bundle, the laser beam after the coupling is coaxial with optical system, and the level crossing that has transmission and reflex concurrently is located at He-Ne laser instrument emitted laser Shu Qianfang;
The beam-expanding collimation device, the beam-expanding collimation device is used for He-Ne laser beam and CO
2The beam-expanding collimation of laser beam, and to He-Ne laser beam and CO
2The angle of divergence of laser beam is compressed, and the beam-expanding collimation device is located at CO
2The single beam dead ahead of laser instrument emission;
Positive rotation prism and negative rotation change prism, positive rotation prism and negative rotation commentaries on classics prism be located at beam-expanding collimation device dead ahead and with beam-expanding collimation device spigot shaft coaxle;
Condenser lens, condenser lens are used for the outgoing beam from positive rotation prism and negative rotation commentaries on classics prism is focused on again, and condenser lens is located at negative rotation changes the prism dead ahead, and changes the prism spigot shaft coaxle with negative rotation.
Gathering the control treating apparatus is provided with:
Information gathering processor, information gathering processor are used for He-Ne laser beam spot data are gathered in real time, calculate He-Ne laser beam and CO according to Optical Formula
2The dependency relation of laser beam, and then obtain CO
2The actual spot size of laser beam, and on computers it is carried out Treatment Analysis is to CO
2The measurement of laser beam is transformed into the measurement to the He-Ne laser beam, and the information gathering processor is provided with camera head and computer, and camera head is located at processing work the place ahead, the output termination computer of camera head;
Controller, controller is used for CO
2Parameters such as the width of laser beam, energy, peak power and repetition rate are controlled, optimization and positive rotation prism and negative rotation changes prism and the condenser lens relative position is adjusted, to obtain the index of practical requirement;
Feedback circuit, feedback circuit are used for giving controller with the feedback information after the signal acquisition process, to adjust positive and negative rotating prism interval, condenser lens position and optimization CO in the optical system
2The running parameter of laser instrument, the processing signals output of the input termination information gathering processor of feedback circuit, the feedback information output termination controller input of feedback circuit, the control signal output of controller meets CO respectively
2The joystick of laser instrument and positive rotation prism and negative rotation change the optical bench of prism and condenser lens.
He-Ne laser instrument and CO
2After beam-expanding collimation device in the laser beam process optical system of laser emitting and positive rotation prism and negative rotation change prism, has the linear correlation relation.According to the dependency relation between them,, can obtain CO by measurement to the actual hot spot of He-Ne laser beam
2The hot spot situation of laser beam.
The level crossing that has transmission and reflex concurrently can adopt the packaged type level crossing, by changing its position, the stiffness of coupling of conversion visible light beam preferably plates the anti-reflection film that sees through 10.6 μ m and 0.6328 mum wavelength with the loss that reduces light energy and the veiling glare of the system of elimination on level crossing.
The beam-expanding collimation device can adopt the inverted telescope structure, and the beam-expanding collimation device has been realized the beam-expanding collimation to laser beam, the angle of divergence of compression laser beam.Suppose θ
1, θ
2Be respectively the laser-beam divergence angle that enters before and after this optical module, K is the multiplication factor of beam-expanding collimation device for this reason, then pass through the beam-expanding collimation device after, the angle of divergence of laser beam be before the incident 1/K doubly.
It is the coupled apparatus that is processed by same optical material that positive rotation prism and negative rotation change prism, has identical cone angle and refractive index, its spigot shaft coaxle.When the d=0 of two rotating prisms interval, rotating prism combined system role is identical with the ordinary optical window.By adjusting it at interval, reach the focusing purpose, and then control hot spot ring footpath.Utilize rotating prism not have the diffraction characteristic minimizing and defocus, realize the light spot shape of light beam, the conversion of size.Adjust positive and negative rotating prism interval d and can make the footpath continuous transformation of outgoing beam ring.
Condenser lens focuses on the outgoing beam that changes prism from negative rotation again.Its focal length and positive rotation prism and negative rotation change prism and are complementary, and change the relative position of prism by changing it with positive rotation prism, negative rotation, further change beam sizes and energy density intensity, thereby the power density of processing request are satisfied in acquisition.Realized fine setting, i.e. secondary adjustment to optical beam transformation.
The information gathering processor utilizes the CCD camera head based on the laser triangulation technology, realizes the photosignal conversion, and visible light beam hot spot data are carried out acquisition process.By visible light beam hot spot real time data on the surface of gathering processing work, calculate the dependency relation of visible light beam and black light light beam according to Optical Formula, and then obtain the actual spot size of black light light beam, and on computers it is carried out Treatment Analysis.Measurement to invisible light beam is transformed into measurement to visible light beam.
The present invention is directed to the deficiency of existing laser process equipment, utilize the characteristic of rotating prism to realize the laser cutting tool that a kind of spot size is controlled, can be used for processing the aperture of different size.Do not need to change process tool, just can realize punching, cut, the switching between the multinomial processing request such as welding.Because beam and focus is controlled, for the processing request of larger aperture, do not need mode with the scanning cutting, can obtain comparatively smooth finished surface, improved working (machining) efficiency.The present invention can control laser beam light spot shape and Energy distribution effectively, and the laser processing device that to can be multinomial machining functions such as exploitation performance is good, cost performance is high, applied widely collection cutting, punching, welding be one lays the foundation.
Description of drawings
Fig. 1 is the structure composition frame chart of the embodiment of the invention.
Fig. 2 is the positive rotation prism of the embodiment of the invention and the structural representation that negative rotation changes prism.
The specific embodiment
Following examples will the present invention is further illustrated in conjunction with the accompanying drawings.
Referring to Fig. 1, the present invention includes optical system A and gather control treating apparatus B.Optical system A is provided with He-Ne laser instrument 1, has level crossing 2, the CO of transmission and reflex concurrently
2Laser instrument 3, beam-expanding collimation device 4, positive rotation prism and negative rotation change prism 5 and condenser lens 6.The level crossing 2 of the laser beam that He-Ne laser instrument 1 emits through having transmission and reflex concurrently is coupled in the beam-expanding collimation device 4, with the illumination imaging source as indication mechanism and information gathering processor 8.CO
2Laser instrument 3 emitted laser bundles have reduced the angle of divergence of light beam behind beam-expanding collimation device 4, and are met the laser beam of suitable aperture size.Light beam behind the collimation changes the conversion of prism 5 and condenser lens 6 realization light beams through positive rotation prism and negative rotation.
Gather control treating apparatus B and be provided with information gathering processor 8, controller 9 and feedback circuit 10.Information gathering processor 8 is gathered the real time data that the visible light beam tabula rasa is gone up on processing work 7 surfaces by the CCD camera head, visible light beam that calculates according to Optical Formula and the linear correlation of invisible light beam relation, obtain the real time data of invisible light beam hot spot, and handle on computers.Signal after information gathering processor 8 is handled sends feedback circuit 10 to.Feedback circuit 10 is given controller 9 feedback information that obtains.Controller 9 is accepted the information that feedback circuit 10 feeds back, and the running parameter of laser instrument is optimized, further control the parameters such as width, energy, peak power and repetition rate of laser pulse, and the position of control adjustment positive rotation prism 5a and negative rotation commentaries on classics prism 5b interval (referring to Fig. 2) and condenser lens 6, with the parameter index that obtains to meet the demands.
The present invention adopts rotating prism, utilizes the positive rotation prism to produce light intensity and the stable diffraction light-free bundle of spot size in certain zone, has made things convenient for focusing, aligning and the location of light beam, improves beam quality.In conjunction with changeing prism 5b and condenser lens, realize the conversion control of light beam by the relative position of adjusting optical module with negative rotation that positive rotation prism 5a has identical cone angle and a refractive index.Among the present invention, the position relative fixed of positive rotation prism 5a and condenser lens 6.In a single day the required size scope is determined, only needs the position of positive rotation prism of adjustment and condenser lens.And in this size range, for the hot spot that obtains the different size size only need be finely tuned the position that negative rotation changes prism.The adjustment mode has automatic and manual dual mode.The position relative fixed of positive rotation prism and condenser lens, compact conformation, the adjusting in light path is easy.It is fine-tuning that negative rotation changes prism 5b position, can revise the error that itself crudy is brought.The booster action of gathering control treating apparatus B can further reduce the error that system produces, and it is compensated and corrected, and improves precision.Among the present invention, according to imaging formula, obtain linear correlation relation on computers via visible light beam after the optical system and black light light beam, measurement to the black light light beam is transformed to measurement to visible light beam, reduced specific (special) requirements, thereby reduced cost the collection optics.Secondly, adjust owing in real time the surface of the work beam and focus is measured and in time relevant parameter is optimized to control, thereby improved crudy, precision and efficient.
The present invention changes prism 5b interval and the corresponding adjustment of condenser lens 6 positions do by aligning rotating prism 5a and negative rotation, obtains to satisfy the machining beams of different processing requests (laser cutting, laser boring, laser weld etc.), realizes multi-functional processing.The present invention has applied widely, the processing dimension in processing aperture and can quantitatively adjust working (machining) efficiency height, low cost and other advantages in field of laser processing.And do not need mobile laser focusing device and workpiece to be machined, and overcome shortcomings such as using expensive precision optical machinery device, all have very tempting using value at manufacture fields such as laser boring, cutting, welding.Among the present invention,, control the parameter index of machining beams effectively, make crudy and efficient further improve more owing to real-time measurement to laser beam.
Claims (5)
1. the multifunctional laser processing tool bit that has measurement mechanism is characterized in that comprising optical system and gathers the control treating apparatus;
Optical system is provided with:
He-Ne laser instrument, He-Ne laser instrument are used for indication of aiming location and conduct illumination imaging source;
CO
2Laser instrument, CO
2The light beam of the actual processing of laser instrument emitted laser Shu Zuowei;
Have the level crossing of transmission and reflex concurrently, the level crossing that has transmission and reflex concurrently is used for He-Ne laser instrument emitted laser bundle and CO
2The coupling of laser instrument emitted laser bundle, the laser beam after the coupling is coaxial with optical system, and the level crossing that has transmission and reflex concurrently is located at He-Ne laser instrument emitted laser Shu Qianfang;
The beam-expanding collimation device, the beam-expanding collimation device is used for He-Ne laser beam and CO
2The beam-expanding collimation of laser beam, and to He-Ne laser beam and CO
2The angle of divergence of laser beam is compressed, and the beam-expanding collimation device is located at CO
2The single beam dead ahead of laser instrument emission;
Positive rotation prism and negative rotation change prism, positive rotation prism and negative rotation commentaries on classics prism be located at beam-expanding collimation device dead ahead and with beam-expanding collimation device spigot shaft coaxle;
Condenser lens, condenser lens are used for the outgoing beam from positive rotation prism and negative rotation commentaries on classics prism is focused on again, and condenser lens is located at negative rotation changes the prism dead ahead, and changes the prism spigot shaft coaxle with negative rotation;
Gathering the control treating apparatus is provided with:
Information gathering processor, information gathering processor are used for He-Ne laser beam spot data are gathered in real time, calculate He-Ne laser beam and CO according to Optical Formula
2The dependency relation of laser beam, and then obtain CO
2The actual spot size of laser beam, and on computers it is carried out Treatment Analysis is to CO
2The measurement of laser beam is transformed into the measurement to the He-Ne laser beam, and the information gathering processor is provided with camera head and computer, and camera head is located at processing work the place ahead, the output termination computer of camera head;
Controller, controller is used for CO
2The width of laser beam, energy, peak power and repetition rate parameter are controlled, optimization and positive rotation prism and negative rotation changes prism and the condenser lens relative position is adjusted, to obtain the index of practical requirement;
Feedback circuit, feedback circuit are used for giving controller with the feedback information after the signal acquisition process, to adjust positive and negative rotating prism interval, condenser lens position and optimization CO in the optical system
2The running parameter of laser instrument, the processing signals output of the input termination information gathering processor of feedback circuit, the feedback information output termination controller input of feedback circuit, the control signal output of controller meets CO respectively
2The joystick of laser instrument and positive rotation prism and negative rotation change the optical bench of prism and condenser lens.
2. the multifunctional laser processing tool bit that has measurement mechanism as claimed in claim 1, the level crossing that it is characterized in that having concurrently transmission and reflex is the packaged type level crossing.
3. the multifunctional laser processing tool bit that has measurement mechanism as claimed in claim 1 or 2 is characterized in that being coated with the anti-reflection film that sees through 10.6 μ m and 0.6328 mum wavelength on the level crossing that has transmission and reflex concurrently.
4. the multifunctional laser processing tool bit that has measurement mechanism as claimed in claim 1 is characterized in that the beam-expanding collimation device is the inverted telescope structure.
5. the multifunctional laser processing tool bit that has measurement mechanism as claimed in claim 1 is characterized in that positive rotation prism and negative rotation change prism for the coupled apparatus by same optical material processing, have identical cone angle and refractive index, its spigot shaft coaxle.
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| CN 200710009644 CN100493814C (en) | 2007-10-10 | 2007-10-10 | Multifunctional laser processing tool bit with measuring apparatus |
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|---|---|---|---|
| CN 200710009644 CN100493814C (en) | 2007-10-10 | 2007-10-10 | Multifunctional laser processing tool bit with measuring apparatus |
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| CN100493814C true CN100493814C (en) | 2009-06-03 |
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