CN211669428U - Automatic focusing device based on inner coaxial vision - Google Patents
Automatic focusing device based on inner coaxial vision Download PDFInfo
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- CN211669428U CN211669428U CN201922465516.4U CN201922465516U CN211669428U CN 211669428 U CN211669428 U CN 211669428U CN 201922465516 U CN201922465516 U CN 201922465516U CN 211669428 U CN211669428 U CN 211669428U
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Abstract
The utility model discloses an automatic focusing device based on inner coaxial vision, which comprises a controller, a camera and a focusing platform connected with the controller, an indicating light source, a laser light source, a beam combiner, a galvanometer, a field lens and a workpiece platform; the galvanometer and the field lens are arranged on the focusing platform; the beam combining mirror is arranged on the emergent paths of the indicating light source and the laser light source and is used for combining the light pulses generated by the laser light source and the indicating light source; the laser light source is used for generating processing laser, and the indicating light source is used for generating indicating laser; the utility model discloses an interior coaxial vision auto focus and software algorithm compensation make the focus of laser beam machining product be in the within range of processing focus, improve the uniformity of laser beam machining back product to make equipment be in good processing state always, reduce the defective rate of equipment processing product, improve equipment's utilization rate.
Description
Technical Field
The utility model belongs to the technical field of laser beam machining, specifically an automatic focusing device based on interior coaxial vision.
Background
In laser processing equipment, the consistency of products after laser processing is always the key point for improving the added value of the products by the equipment. The method is particularly important for finding the laser focus of the currently processed product quickly and accurately for materials sensitive to laser processing and products with poor sizes. The novel automatic focusing device based on inner coaxial vision designed this time has the function of automatic focusing in real time before newly-increased laser processing products, improves the consistency of products after laser processing, and can improve the stability of equipment and increase the added value of the products of the equipment.
Laser micromachining technology has been widely used in the field of material micro-nano machining. It has been a challenge to maintain the focus at all times on the surface of the material during processing. This problem directly affects the accuracy of laser micromachining.
The traditional automatic focusing mode is based on a distance measuring principle, the distance between an object and a lens is calculated by utilizing laser distance measuring and ultrasonic distance measuring modes, so that a driving motor adjusts the position of the lens, and the focusing is induced by capacitance. In addition, there are some occasions where a dedicated mechanical structure is designed to achieve focusing according to a specific processing technology. With the development of CCD/CMOS technology, an automatic focusing technology based on image processing is developed, the method is used for directly judging the defocusing degree according to the image definition, is more direct and effective than the traditional distance measuring method, and is widely applied to a single lens reflex.
The patent with publication number CN208289218U discloses an automatic focusing device for laser micromachining based on image processing, which comprises a control module, a standard image acquisition mechanism and a laser processing platform; the laser processing platform comprises an image correcting mechanism and a laser processing mechanism, and the image correcting mechanism and the laser processing mechanism share a focusing mechanism; the standard image acquisition mechanism comprises imaging equipment, a light source, a dichroic mirror, a focusing platform and a focusing objective lens; the light of the light source is focused by the focusing objective lens and then irradiates the surface of the processed object; the imaging device collects reflected light on the surface of the processing object through the dichroic mirror, and the focusing platform adjusts the distance between the focusing objective lens and the surface of the processing object so as to generate a digital image with optimal definition on the surface of the processing object; the control module generates a definition standard value according to the optimal image; when focusing is carried out, the image correction mechanism collects the surface image of the processed part and carries out focusing according to the definition standard value provided by the control module; the product can stably maintain the laser focus on the surface of a processing object.
The laser light source in this patent is used as processing and instruction simultaneously, and partly laser is used for processing the work piece, and partly laser is used for acquireing work piece surface image, does not avoid like this to waste the power of processing laser partly, and the power of processing laser can not all be used for processing the work piece promptly to cause the power waste of laser instrument.
Disclosure of Invention
The utility model aims at the problem that prior art exists, provide an automatic focusing device based on interior coaxial vision, through interior coaxial vision automatic focusing and software algorithm compensation, make the focus of laser beam machining product be in the within range of processing focus, improve the uniformity of product behind the laser beam machining to make equipment be in good processing state always, reduce the defective rate of equipment processing product, improve equipment's utilization rate.
In order to achieve the above object, the utility model adopts the following technical scheme:
an automatic focusing device based on inner coaxial vision comprises a controller, a camera and a focusing platform connected with the controller, an indicating light source, a laser light source, a beam combining mirror, a galvanometer, a field lens and a workpiece table; the galvanometer and the field lens are arranged on the focusing platform; the beam combining mirror is arranged on the emergent paths of the indicating light source and the laser light source and is used for combining the light pulses generated by the laser light source and the indicating light source; the laser light source is used for generating processing laser, and the indicating light source is used for generating indicating laser; the optical path of the focusing device is as follows: the laser processing device comprises a laser light source, an indicating light source, a beam combining mirror, a camera, a controller and a focusing platform, wherein light pulses generated by the laser light source and the indicating light source are combined by the beam combining mirror, sequentially subjected to galvanometer adjustment and field lens focusing and act on the surface of a workpiece on a workpiece table, the indicating laser enters the camera after being reflected by the surface of the workpiece and sequentially subjected to the field lens, the galvanometer and the beam combining mirror, the camera is used for acquiring image information of the surface of the workpiece on the workpiece table, the controller is used for processing the image information and controlling the height of the focusing platform according to a processing result, so that the focal length position of the processing laser is adjusted, and the.
Specifically, the beam combining mirror includes a first beam combining mirror and a second beam combining mirror, and the first beam combining mirror is located between the laser light source and the indicating light source and is used for combining the processing laser light generated by the laser light source and the indicating laser light generated by the indicating light source; the second beam combining mirror is positioned between the camera and the vibrating mirror and is used for reflecting the combined light pulse and transmitting the indicating laser.
Further, the first beam combiner transmits machining laser and reflects indication laser; and the second beam combiner reflects the processing laser, the indicating laser and the transmission indicating laser.
Specifically, the included angle between the first beam combiner and the indicating laser emitted by the indicating light source is 45 degrees, and the included angle between the first beam combiner and the processing laser emitted by the laser light source is 45 degrees.
Specifically, the first beam combiner is parallel to or perpendicular to the second beam combiner.
Specifically, the camera is a CCD digital camera.
Compared with the prior art, the beneficial effects of the utility model are that: (1) the utility model discloses a beam combining mirror will process laser and instruct laser beam to combine and form the coaxial light and process the work piece, and acquire the image on work piece surface through the camera, through the contrast value of analysis image, calculate the focus scope of processing laser, thereby realize laser beam machining's dynamic focusing, make the focus of processing laser be located the work piece surface all the time, improve the uniformity of laser beam machining back product, thereby make equipment be in good processing state always, reduce the defective rate of equipment processing product, improve the utilization rate of equipment; (2) the utility model discloses a set up two beam combining mirrors to separately set up laser source and instruction light source, can utilize laser source to process the work piece furthest, the instruction light source only is used for the camera to acquire workpiece surface's image, and laser source only is used for processing the work piece, has guaranteed laser source and has utilized laser source to the utmost when coaxial with the instruction light source, has improved the utilization ratio of laser instrument power.
Drawings
Fig. 1 is a schematic view of an optical path structure of an automatic focusing device based on inner coaxial vision according to the present invention;
fig. 2 is a schematic diagram of a pixel coordinate system of a workpiece image according to an embodiment of the present invention;
in the figure: 1. a controller; 2. a camera; 3. a focusing platform; 4. an indication light source; 5. a laser light source; 6. a galvanometer; 7. a field lens; 8. a workpiece stage; 9. a first beam combiner; 10. and a second beam combiner.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are only some embodiments, not all embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1, the present embodiment provides an autofocus device based on inner coaxial vision, which includes a controller 1, a camera 2 and a focusing platform 3 connected to the controller 1, an indication light source 4, a laser light source 5, a beam combiner, a galvanometer 6, a field lens 7, and a workpiece stage 8; the galvanometer 6 and the field lens 7 are arranged on the focusing platform 3; the beam combining mirror is arranged on the emergent paths of the indicating light source 4 and the laser light source 5 and is used for combining the light pulses generated by the laser light source 5 and the indicating light source 4; the laser light source 5 is used for generating processing laser, and the indicating light source 4 is used for generating indicating laser; the optical path of the focusing device is as follows: after light pulses generated by the laser light source 5 and the indicating light source 4 are combined by the beam combining mirror, the light pulses are sequentially adjusted by the galvanometer 6 and focused by the field lens 7 to act on the surface of a workpiece on the workpiece table 8, and the indicating laser enters the camera 2 after being reflected by the surface of the workpiece and sequentially passing through the field lens 7, the galvanometer 6 and the beam combining mirror, wherein the camera 2 is used for acquiring image information of the surface of the workpiece on the workpiece table 8, the controller 1 is used for processing the image information, calculating a contrast value of the image and controlling the height of the focusing platform 3 according to the contrast value, so that the focal position of the processing laser is adjusted, and the focal distance of the processing laser is always positioned on the surface to be processed of the workpiece.
Specifically, as shown in fig. 2, in the present embodiment, the method for calculating the contrast value of the image includes: sequentially calculating the brightness difference values of two adjacent pixels, then summing all the difference values, and taking the reciprocal to obtain a contrast value; the closer the image is to the in-focus position, the larger the local contrast is, the larger the difference value of the numerical values of two adjacent pixels is, and the larger the denominator is, the smaller the formula calculation result is; setting a numerical range, and if the contrast value is smaller than or equal to the numerical range, determining that the focus is located; if the contrast is larger than the numerical range, the focus is not considered; the contrast value is calculated as follows:
x, Y represents the horizontal axis and the vertical axis of the pixel coordinate system of the workpiece surface image acquired by the camera 2, m represents the maximum coordinate value in the horizontal axis direction, and n represents the maximum coordinate value in the vertical axis direction; i represents a coordinate value in the horizontal axis direction, and j represents a coordinate value in the vertical axis direction; xiYjThe luminance value at a coordinate position where the horizontal axis is i and the vertical axis is j in the pixel coordinate system is shown.
Specifically, the beam combining mirror includes a first beam combining mirror 9 and a second beam combining mirror 10, where the first beam combining mirror 9 is located between the laser light source 5 and the indication light source 4, and is configured to combine the processing laser light generated by the laser light source 5 and the indication laser light generated by the indication light source 4; the second beam combiner 10 is located between the camera 2 and the galvanometer 6, and is configured to reflect the combined light pulse and transmit the indication laser.
Further, the first beam combiner 9 transmits the processing laser and reflects the indicating laser; the second beam combiner 10 reflects the processing laser, the indicating laser and the transmission indicating laser.
Specifically, the included angle between the first beam combiner 9 and the indicating laser emitted by the indicating light source 4 is 45 °, and the included angle between the first beam combiner 9 and the processing laser emitted by the laser light source 5 is 45 °.
Specifically, the first beam combiner 9 is parallel to the second beam combiner 10.
Specifically, the camera 2 is a CCD digital camera.
When the automatic focusing device of the embodiment is used, firstly, a laser processing light path is coaxial with an imaging light path of the camera 2 through the first beam combiner 9 and the second beam combiner 10, and coaxial light is transmitted to a workpiece table 8 on which a workpiece is placed through the galvanometer 6 and the field lens 7; then, the camera 2 is used for acquiring an image of the surface of the workpiece, and the controller 1 is used for analyzing the contrast value of the image; when the controller 1 executes automatic focusing, the focusing platform 3 is controlled to move, the controller 1 analyzes the workpiece surface image obtained by the camera 2 in real time and analyzes a corresponding contrast value, and when the contrast value obtained by real-time acquisition and analysis is smaller than a preset numerical range, the automatic focusing is finished; and finally, storing the contrast value of the current image and the corresponding processed product data on a local memory.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. An automatic focusing device based on inner coaxial vision is characterized by comprising a controller, a camera and a focusing platform connected with the controller, an indicating light source, a laser light source, a beam combining lens, a galvanometer, a field lens and a workpiece table; the galvanometer and the field lens are arranged on the focusing platform; the beam combining mirror is arranged on the emergent paths of the indicating light source and the laser light source and is used for combining the light pulses generated by the laser light source and the indicating light source; the laser light source is used for generating processing laser, and the indicating light source is used for generating indicating laser; the optical path of the focusing device is as follows: the laser focusing device comprises a laser light source, an indicating light source, a beam combining mirror, a camera, a field lens, a beam combining mirror, a vibrating mirror, a field lens, a beam combining mirror and a controller, wherein light pulses generated by the laser light source and the indicating light source are combined by the beam combining mirror, sequentially subjected to vibrating mirror adjustment and field lens focusing and act on the surface of a workpiece on a workpiece table, indicating laser enters the camera after being reflected by the surface of the workpiece and sequentially subjected to the field lens, the vibrating mirror and the beam combining mirror, the camera is used for acquiring image information of the surface of the workpiece on the workpiece table, and.
2. The inner coaxial vision-based automatic focusing device as claimed in claim 1, wherein the beam combining mirror comprises a first beam combining mirror and a second beam combining mirror, the first beam combining mirror is located between the laser light source and the indicating light source, and is configured to combine the processing laser generated by the laser light source and the indicating laser generated by the indicating light source; the second beam combining mirror is positioned between the camera and the vibrating mirror and is used for reflecting the combined light pulse and transmitting the indicating laser.
3. The inner coaxial vision-based automatic focusing device as claimed in claim 2, wherein the first beam combiner transmits machining laser and reflects indication laser; and the second beam combiner reflects the processing laser, the indicating laser and the transmission indicating laser.
4. The autofocus device according to claim 2, wherein the angle between the first beam combiner and the indicating laser emitted from the indicating light source is 45 °, and the angle between the first beam combiner and the processing laser emitted from the laser light source is 45 °.
5. The in-line vision based automatic focusing device according to claim 2, wherein the first beam combiner is parallel or perpendicular to the second beam combiner.
6. The in-line vision based auto-focusing device as claimed in claim 1, wherein the camera is a CCD digital camera.
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| CN112404706A (en) * | 2021-01-22 | 2021-02-26 | 武汉大学 | Laser processing detection device and method, laser processing equipment and focusing control method |
| CN112719606A (en) * | 2020-12-10 | 2021-04-30 | 苏州铁人光学技术有限公司 | Layered processing technology of laser equipment |
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| CN113305418A (en) * | 2021-05-20 | 2021-08-27 | 苏州科韵激光科技有限公司 | Coaxial focus searching device for laser processing and laser processing method |
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| CN112008231B (en) * | 2020-10-26 | 2021-02-26 | 快克智能装备股份有限公司 | Automatic laser calibration mechanism and calibration method thereof |
| CN112719606A (en) * | 2020-12-10 | 2021-04-30 | 苏州铁人光学技术有限公司 | Layered processing technology of laser equipment |
| CN112743238A (en) * | 2020-12-10 | 2021-05-04 | 苏州铁人光学技术有限公司 | Technological method of texture embossing imprinter |
| CN112828454A (en) * | 2020-12-31 | 2021-05-25 | 苏州菲镭泰克激光技术有限公司 | Two-dimensional galvanometer online plane precision compensation system and compensation method thereof |
| CN112828454B (en) * | 2020-12-31 | 2023-04-14 | 苏州菲镭泰克激光技术有限公司 | Two-dimensional galvanometer online plane precision compensation system and compensation method thereof |
| CN112404706A (en) * | 2021-01-22 | 2021-02-26 | 武汉大学 | Laser processing detection device and method, laser processing equipment and focusing control method |
| CN113305418A (en) * | 2021-05-20 | 2021-08-27 | 苏州科韵激光科技有限公司 | Coaxial focus searching device for laser processing and laser processing method |
| CN113618242A (en) * | 2021-08-23 | 2021-11-09 | 东风柳州汽车有限公司 | Automatic laser focusing area welding device for standard test board or sample |
| CN114227026A (en) * | 2021-12-10 | 2022-03-25 | 西安交通大学 | Ultrafast laser hole-controllable group hole precision machining device and method |
| CN114951972A (en) * | 2022-05-27 | 2022-08-30 | 深圳泰德激光技术股份有限公司 | Optical path system and laser cutting machine |
| CN114985964A (en) * | 2022-05-27 | 2022-09-02 | 深圳泰德激光技术股份有限公司 | Laser cutting equipment |
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