CN107953028A - A kind of monitoring device of bessel beam - Google Patents

A kind of monitoring device of bessel beam Download PDF

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Publication number
CN107953028A
CN107953028A CN201711463922.6A CN201711463922A CN107953028A CN 107953028 A CN107953028 A CN 107953028A CN 201711463922 A CN201711463922 A CN 201711463922A CN 107953028 A CN107953028 A CN 107953028A
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CN
China
Prior art keywords
reflecting mirror
imaging device
laser
guan jing
monitoring
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Granted
Application number
CN201711463922.6A
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Chinese (zh)
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CN107953028B (en
Inventor
陶雄兵
徐俊南
李光辉
林小波
王耀波
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DONGGUAN STRONG LASER Co Ltd
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DONGGUAN STRONG LASER Co Ltd
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms

Abstract

Monitoring device provided by the present invention is equipped with multiple imaging devices on the output light path of laser, front and rear laser is formed to bessel beam and carries out multiple spot detection, the quality of laser beam and its quality of stability, the laser light ring quality that bessel beam is formed and its focal beam spot are detected respectively, at the same time can also monitoring workpiece in real time processing effect, data are comprehensively objective, and deviation is small.The monitoring device of the bessel beam of the present invention includes:Laser, axicon, the first focusing Guan Jing and focus lamp are disposed with along the output light path of laser, the focus point alignment workpieces processing of focus lamp, the first half-reflecting mirror and the second half-reflecting mirror are equipped between laser and axicon, the 3rd half-reflecting mirror is equipped between first focusing Guan Jing and focus lamp, first half-reflecting mirror connects the first imaging device, and the second half-reflecting mirror connects the second imaging device, and the 3rd half-reflecting mirror connects the 3rd imaging device and the 4th imaging device.

Description

A kind of monitoring device of bessel beam
Technical field
The invention belongs to laser cutting technique field, and in particular to a kind of monitoring device of bessel beam.
Background technology
Bezier laser beam because of its focal beam spot and the longer depth of focus, be now widely used in processing thickness material, Deeply bigger drilling in footpath etc..The quality of bessel beam affects the cut quality of product, and the formation pair of bessel beam The quality of laser and its stability it is more demanding, thus in the processing and assembling process of optical mirror slip, it is often necessary to supporting The quality and its stability of special equipment monitoring laser transmitting laser.
But existing monitoring device is bulky, the deviation of monitoring data and actual value is larger, and this kind equipment leads to Often only the quality of laser is launched in monitoring, and be have ignored or even can not be realized the focusing light final to laser-formed bessel beam Spot is detected in real time, these direct relation final products processing qualities.
The content of the invention
For above-mentioned technical problem, it is an object of the invention to provide a kind of monitoring device of bessel beam, its is specific Technical solution is as follows:
A kind of monitoring device of bessel beam, including:Laser, sets gradually along the output light path of the laser There are axicon, first to focus on Guan Jing and focus lamp, the focus point alignment workpieces processing of the focus lamp, the laser and described The first half-reflecting mirror and the second half-reflecting mirror are equipped between axicon, is equipped between the first focusing Guan Jing and the focus lamp 3rd half-reflecting mirror;
First half-reflecting mirror is set in presetting angle, and first is equipped with the reflected light path of first half-reflecting mirror Imaging device;
Second half-reflecting mirror is set in presetting angle, is equipped with successively on the reflected light path of second half-reflecting mirror Second focuses on Guan Jing and the second imaging device, and described second focuses on Guan Jingke in second half-reflecting mirror and second imaging Moved back and forth between device;
3rd half-reflecting mirror is set in presetting angle, and the 4th is equipped with the reflected light path of the 3rd half-reflecting mirror Half-reflecting mirror;Tertiary focusing Guan Jing and the 3rd imaging device are equipped with the reflected light path of 4th half-reflecting mirror successively, it is described Tertiary focusing Guan Jingke is moved back and forth between the 4th half-reflecting mirror and the 3rd imaging device, the 4th half reflection The direct projection light path of mirror is directed at the 4th imaging device.
Preferably, the monitoring device further includes:Monitoring system, the monitoring system are electrically connected the first imaging dress Put, the second imaging device, the 3rd imaging device and the 4th imaging device, for collecting and surveying data.
It is furthermore preferred that the monitoring device further includes:Kinematic system and control system, described in the kinematic system is electrically connected Second focuses on Guan Jing and focus lamp;
The control system is electrically connected the monitoring system and kinematic system, can drive the fortune in real time according to monitoring data The position of first focusing Guan Jing and focus lamp described in dynamic system adjustment.
Preferably, the kinematic system is electrically connected the axicon, is missed for finely tuning the position of the axicon with calibrating Difference.
Preferably, the 5th half-reflecting mirror is equipped between the first focusing Guan Jing and the 3rd half-reflecting mirror, described The 4th is equipped with the reflected light path of 5th half-reflecting mirror successively and focuses on Guan Jing and LED light source.
Preferably, the laser, axicon, the first focusing Guan Jing and focus lamp are coaxially fixedly mounted.
Preferably, the angle between the axis of first half-reflecting mirror and the axis of the axicon is 45 degree.
Preferably, the angle between the axis of the 3rd half-reflecting mirror and the axis of the tertiary focusing Guan Jing is 45 Degree.
Preferably, the angle between the axis of the 4th half-reflecting mirror and the axis of the tertiary focusing Guan Jing is 45 Degree.
Compared with prior art, the monitoring device of bessel beam provided by the present invention has the following advantages:
1) monitoring device of the present invention is equipped with multiple imaging devices on the output light path of laser, and bessel beam is formed Front and rear laser carries out multiple spot detection, detects the quality and its stability, the laser of bessel beam formation of laser beam respectively The quality of ring of light quality and its focal beam spot, while position of the laser focus point in workpieces processing, data can also be monitored in real time Comprehensively objective, deviation is small;
2) monitoring device of the present invention is connected with monitoring system, kinematic system and control system, and control system is electrically connected monitoring System and kinematic system, can focus on Guan Jing according to the real-time powered motion system adjustment second of data that monitoring system is fed back, focus on The position of mirror and axicon, adjusts the position of optical mirror slip in real time, solves during bessel beam is formed and axicon, focusing are managed Mirror and focus lamp three concentricity require height, and the technical problems such as axicon installation and adjustment difficulty are big, realize automation Control production, reduces production and wastes, cost-effective.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing There is attached drawing needed in technology description to be briefly described, it should be apparent that, drawings in the following description are only this The embodiment of invention, for those of ordinary skill in the art, without creative efforts, can also basis The attached drawing of offer obtains other attached drawings.
Fig. 1 is the annexation figure of the monitoring device of the bessel beam of the preferred embodiment of the present invention;
Fig. 2 is the imaging results of the first imaging device;
Fig. 3 is the imaging results of the second imaging device;
Fig. 4 is the imaging results of the 3rd imaging device;
Fig. 5 is the imaging results of the 4th imaging device.
Reference numeral:Laser 1, monitoring system 2, kinematic system 3, control system 4, axicon 5, first focus on Guan Jing 61st, focus lamp 7, the first half-reflecting mirror 41, the second half-reflecting mirror 42, the 3rd half-reflecting mirror 43, the 4th half-reflecting mirror the 44, the 5th half Speculum 45, the first imaging device 21, the second imaging device 22, the 3rd imaging device 23, the 4th imaging device 24, second focus on Pipe mirror 62, tertiary focusing pipe mirror the 63, the 4th focus on pipe mirror 64.
Embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work Embodiment, belongs to the scope of protection of the invention.
As shown in Figure 1, the monitoring device of the bessel beam of the preferred embodiment of the present invention, including:Laser, monitoring system System, kinematic system and control system;Axicon, the first focusing Guan Jing and focusing are disposed with along the output light path of laser Mirror, the focus point alignment workpieces processing of focus lamp, is equipped with the first half-reflecting mirror and the second half reflection between laser and axicon Mirror, the 3rd half-reflecting mirror is equipped between the first focusing Guan Jing and focus lamp.
Wherein, the first half-reflecting mirror is set in presetting angle, between the axis of the first half-reflecting mirror and the axis of axicon Angle be preferably 45 degree.Fraction of laser light is reflected through the first half-reflecting mirror, the first imaging device being equipped with its reflected light path, Reflection laser is imaged in the first imaging device.
The dislocation reflected using laser in the upper and lower surface of parallel plate glass, so that the part for forming two rings of light is folded Add, optical path difference forms interference.As shown in Fig. 2, there is light and shade striped in the imaging in the first imaging device, by observing light and shade striped Angle, monitor the angle of divergence of laser, the angle of divergence can reflect the quality of laser.
Second half-reflecting mirror is set in presetting angle, the angle between the axis of the second half-reflecting mirror and the axis of axicon Preferably -45 degree.Fraction of laser light is reflected through the second half-reflecting mirror, is equipped with second successively on its reflected light path and is focused on Guan Jing and the Two imaging devices, the second focus point for focusing on Guan Jing are directed at the second imaging device, and second focuses on Guan Jingke in the second half-reflecting mirror And second move back and forth between imaging device.
Mobile second focuses on the position of Guan Jing, is imaged using laser focal beam spot in different defocus positions, passes through analysis Image quality, can determine whether out the quality of laser beam, and the imaging results of the second imaging device are as shown in Figure 3.
3rd half-reflecting mirror is set in presetting angle, the angle between the axis of the 3rd half-reflecting mirror and the axis of axicon Preferably 45 degree.The 4th half-reflecting mirror is equipped with the reflected light path of the 3rd half-reflecting mirror, light path is divided into by the 4th half-reflecting mirror Reflected light path and direct projection light path.The imaging dresses of tertiary focusing Guan Jing and the 3rd are equipped with the reflected light path of 4th half-reflecting mirror successively Put, tertiary focusing Guan Jingke is moved back and forth between the 4th half-reflecting mirror and the 3rd imaging device, the direct projection of the 4th half-reflecting mirror Light path is directed at the 4th imaging device.Fig. 4 and Fig. 5 is respectively the imaging results of the 3rd imaging device and the 4th imaging device.
The laser of laser transmitting focuses on Guan Jing by forming bessel beam, bessel beam after axicon through first Workpieces processing surface is focused to focus lamp.Light beam passes through the reflex of the 3rd half-reflecting mirror and the 4th half-reflecting mirror, and The focussing force of tertiary focusing Guan Jing, is imaged in the 3rd imaging device, thus the 3rd imaging device can see Bezier all the time Light beam is most clearly imaged workpieces processing surface.
When workpieces processing is when showing to be uneven, light beam focuses on workpieces processing surface cutting processing cannot be perfect Cutting effect.In order to make up this defect, the present embodiment kinematic system utilizes piezoelectric motor or other upper and lower inching gear connections Drive focus lamp to be moved up and down according to the space curved surface of product surface, ensure that light beam focus point falls the cutting in workpieces processing all the time On position, it at this moment can see all the time in the 3rd imaging device and most clearly be imaged., can be real according to the imaging in the 3rd imaging device When adjust the position of focus lamp, realize the auto-focusing of light beam.
4th imaging device is used for the ring of light quality for monitoring bessel beam formation in real time, and then reflects bessel beam Quality.When the 4th imaging device reflect the bessel beam to be formed it is second-rate when, can be by kinematic system to axicon Position be finely adjusted, or adjust axicon at the same time, focus on Guan Jing and focus lamp concentricity, and then realize optimal Bezier Focus on light beam quality.
Monitoring system is electrically connected the first imaging device, the second imaging device, the 3rd imaging device and the 4th imaging device, receives Collect and analyze the monitoring data transmitted by each imaging device in real time.
Kinematic system is electrically connected first and focuses on Guan Jing and focus lamp, and control system is electrically connected monitoring system and kinematic system, Control system focuses on the displacement of Guan Jing and focus lamp according to the real-time powered motion system adjustment second of monitoring result of monitoring system And/or angle.
There is mismachining tolerance cost to reduce in time, the kinematic system of the present embodiment is electrically connected axicon, when adding During work error, the position of kinematic system fine setting axicon is with calibration error.
Further, the 5th half-reflecting mirror is equipped between the first focusing Guan Jing and the 3rd half-reflecting mirror, in the 5th half reflection The 4th is equipped with the reflected light path of mirror successively and focuses on Guan Jing and LED light source.The monitoring device of the present embodiment acts not only as shellfish The monitoring device of Sai Er light beams, is also used as microscope use.
Further, laser, axicon, the first focusing Guan Jing and focus lamp are coaxially fixedly mounted.

Claims (9)

1. a kind of monitoring device of bessel beam, including:Laser, is disposed with along the output light path of the laser Axicon, first focus on Guan Jing and focus lamp, the focus point alignment workpieces processing of the focus lamp, it is characterised in that described to swash The first half-reflecting mirror and the second half-reflecting mirror are equipped between light device and the axicon, described first focuses on Guan Jing and the focusing The 3rd half-reflecting mirror is equipped between mirror;
First half-reflecting mirror is set in presetting angle, and the first imaging is equipped with the reflected light path of first half-reflecting mirror Device;
Second half-reflecting mirror is set in presetting angle, is equipped with second successively on the reflected light path of second half-reflecting mirror Guan Jing and the second imaging device are focused on, described second focuses on Guan Jingke in second half-reflecting mirror and second imaging device Between move back and forth;
3rd half-reflecting mirror is set in presetting angle, and it is anti-that the 4th half is equipped with the reflected light path of the 3rd half-reflecting mirror Penetrate mirror;It is equipped with tertiary focusing Guan Jing and the 3rd imaging device on the reflected light path of 4th half-reflecting mirror successively, the described 3rd Guan Jingke is focused on to move back and forth between the 4th half-reflecting mirror and the 3rd imaging device, the 4th half-reflecting mirror Direct projection light path is directed at the 4th imaging device.
2. monitoring device according to claim 1, it is characterised in that further include:Monitoring system, the monitoring system are electrically connected First imaging device, the second imaging device, the 3rd imaging device and the 4th imaging device are connect, for collecting and surveying data.
3. monitoring device according to claim 2, it is characterised in that further include:Kinematic system and control system, the fortune Dynamic system is electrically connected described first and focuses on Guan Jing and focus lamp;
The control system is electrically connected the monitoring system and kinematic system, can drive the kinetic system in real time according to monitoring data System adjusts the described second position for focusing on Guan Jing and focus lamp.
4. monitoring device according to claim 1, it is characterised in that the kinematic system is electrically connected the axicon, uses In the position of the fine setting axicon with calibration error.
5. monitoring device according to claim 1, it is characterised in that described first focuses on Guan Jing and the 3rd half reflection The 5th half-reflecting mirror is equipped between mirror, on the reflected light path of the 5th half-reflecting mirror successively be equipped with the 4th focus on Guan Jing and LED light source.
6. monitoring device according to claim 1, it is characterised in that the laser, axicon, first focus on Guan Jing and Focus lamp is coaxially fixedly mounted.
7. monitoring device according to claim 1, it is characterised in that the axis of first half-reflecting mirror and the axis rib Angle between the axis of mirror is 45 degree.
8. monitoring device according to claim 1, it is characterised in that the axis and the described 3rd of the 3rd half-reflecting mirror The angle focused between the axis of Guan Jing is 45 degree.
9. monitoring device according to claim 1, it is characterised in that the axis and the described 3rd of the 4th half-reflecting mirror The angle focused between the axis of Guan Jing is 45 degree.
CN201711463922.6A 2017-12-28 2017-12-28 A kind of monitoring device of bessel beam Active CN107953028B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109332877A (en) * 2018-11-07 2019-02-15 江汉大学 A kind of laser Remote Dynamic focusing system
CN112433365A (en) * 2020-11-17 2021-03-02 中国科学院西安光学精密机械研究所 Light beam pointing control system based on cone mirror and deviation correction method thereof
DE102021112271A1 (en) 2021-05-11 2022-11-17 Trumpf Laser- Und Systemtechnik Gmbh Device and method for determining the beam quality

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CN107088706A (en) * 2017-05-23 2017-08-25 武汉松盛光电科技有限公司 Multi-point sensing laser scanning manufacturing system
CN107329275A (en) * 2017-08-30 2017-11-07 苏州大学 A kind of method and system for producing high-quality quasi- bessel array light beam

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Publication number Priority date Publication date Assignee Title
CN101134266A (en) * 2007-10-10 2008-03-05 厦门大学 Multifunctional laser processing tool bit with measuring apparatus
CN101559629A (en) * 2009-05-12 2009-10-21 苏州德龙激光有限公司 Coaxial image system applied to LED laser cutting device
CN101769718A (en) * 2010-01-28 2010-07-07 哈尔滨工业大学 Device for detecting and adjusting coaxial coplanarity of laser focus and micropore
CN104655290A (en) * 2013-11-20 2015-05-27 南京理工大学 Fizeau dual-wavelength laser tuning phase-shifting interference testing device and testing method thereof
CN205650938U (en) * 2016-03-29 2016-10-19 深圳英诺激光科技有限公司 Laser beam machining device based on two coaxial CCD carry out vision positioning
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109332877A (en) * 2018-11-07 2019-02-15 江汉大学 A kind of laser Remote Dynamic focusing system
CN112433365A (en) * 2020-11-17 2021-03-02 中国科学院西安光学精密机械研究所 Light beam pointing control system based on cone mirror and deviation correction method thereof
CN112433365B (en) * 2020-11-17 2022-02-11 中国科学院西安光学精密机械研究所 Deviation correction method of light beam pointing control system based on conical mirror
DE102021112271A1 (en) 2021-05-11 2022-11-17 Trumpf Laser- Und Systemtechnik Gmbh Device and method for determining the beam quality

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