CN107953028A - A kind of monitoring device of bessel beam - Google Patents
A kind of monitoring device of bessel beam Download PDFInfo
- Publication number
- CN107953028A CN107953028A CN201711463922.6A CN201711463922A CN107953028A CN 107953028 A CN107953028 A CN 107953028A CN 201711463922 A CN201711463922 A CN 201711463922A CN 107953028 A CN107953028 A CN 107953028A
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- China
- Prior art keywords
- reflecting mirror
- imaging device
- laser
- guan jing
- monitoring
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
Abstract
Monitoring device provided by the present invention is equipped with multiple imaging devices on the output light path of laser, front and rear laser is formed to bessel beam and carries out multiple spot detection, the quality of laser beam and its quality of stability, the laser light ring quality that bessel beam is formed and its focal beam spot are detected respectively, at the same time can also monitoring workpiece in real time processing effect, data are comprehensively objective, and deviation is small.The monitoring device of the bessel beam of the present invention includes:Laser, axicon, the first focusing Guan Jing and focus lamp are disposed with along the output light path of laser, the focus point alignment workpieces processing of focus lamp, the first half-reflecting mirror and the second half-reflecting mirror are equipped between laser and axicon, the 3rd half-reflecting mirror is equipped between first focusing Guan Jing and focus lamp, first half-reflecting mirror connects the first imaging device, and the second half-reflecting mirror connects the second imaging device, and the 3rd half-reflecting mirror connects the 3rd imaging device and the 4th imaging device.
Description
Technical field
The invention belongs to laser cutting technique field, and in particular to a kind of monitoring device of bessel beam.
Background technology
Bezier laser beam because of its focal beam spot and the longer depth of focus, be now widely used in processing thickness material,
Deeply bigger drilling in footpath etc..The quality of bessel beam affects the cut quality of product, and the formation pair of bessel beam
The quality of laser and its stability it is more demanding, thus in the processing and assembling process of optical mirror slip, it is often necessary to supporting
The quality and its stability of special equipment monitoring laser transmitting laser.
But existing monitoring device is bulky, the deviation of monitoring data and actual value is larger, and this kind equipment leads to
Often only the quality of laser is launched in monitoring, and be have ignored or even can not be realized the focusing light final to laser-formed bessel beam
Spot is detected in real time, these direct relation final products processing qualities.
The content of the invention
For above-mentioned technical problem, it is an object of the invention to provide a kind of monitoring device of bessel beam, its is specific
Technical solution is as follows:
A kind of monitoring device of bessel beam, including:Laser, sets gradually along the output light path of the laser
There are axicon, first to focus on Guan Jing and focus lamp, the focus point alignment workpieces processing of the focus lamp, the laser and described
The first half-reflecting mirror and the second half-reflecting mirror are equipped between axicon, is equipped between the first focusing Guan Jing and the focus lamp
3rd half-reflecting mirror;
First half-reflecting mirror is set in presetting angle, and first is equipped with the reflected light path of first half-reflecting mirror
Imaging device;
Second half-reflecting mirror is set in presetting angle, is equipped with successively on the reflected light path of second half-reflecting mirror
Second focuses on Guan Jing and the second imaging device, and described second focuses on Guan Jingke in second half-reflecting mirror and second imaging
Moved back and forth between device;
3rd half-reflecting mirror is set in presetting angle, and the 4th is equipped with the reflected light path of the 3rd half-reflecting mirror
Half-reflecting mirror;Tertiary focusing Guan Jing and the 3rd imaging device are equipped with the reflected light path of 4th half-reflecting mirror successively, it is described
Tertiary focusing Guan Jingke is moved back and forth between the 4th half-reflecting mirror and the 3rd imaging device, the 4th half reflection
The direct projection light path of mirror is directed at the 4th imaging device.
Preferably, the monitoring device further includes:Monitoring system, the monitoring system are electrically connected the first imaging dress
Put, the second imaging device, the 3rd imaging device and the 4th imaging device, for collecting and surveying data.
It is furthermore preferred that the monitoring device further includes:Kinematic system and control system, described in the kinematic system is electrically connected
Second focuses on Guan Jing and focus lamp;
The control system is electrically connected the monitoring system and kinematic system, can drive the fortune in real time according to monitoring data
The position of first focusing Guan Jing and focus lamp described in dynamic system adjustment.
Preferably, the kinematic system is electrically connected the axicon, is missed for finely tuning the position of the axicon with calibrating
Difference.
Preferably, the 5th half-reflecting mirror is equipped between the first focusing Guan Jing and the 3rd half-reflecting mirror, described
The 4th is equipped with the reflected light path of 5th half-reflecting mirror successively and focuses on Guan Jing and LED light source.
Preferably, the laser, axicon, the first focusing Guan Jing and focus lamp are coaxially fixedly mounted.
Preferably, the angle between the axis of first half-reflecting mirror and the axis of the axicon is 45 degree.
Preferably, the angle between the axis of the 3rd half-reflecting mirror and the axis of the tertiary focusing Guan Jing is 45
Degree.
Preferably, the angle between the axis of the 4th half-reflecting mirror and the axis of the tertiary focusing Guan Jing is 45
Degree.
Compared with prior art, the monitoring device of bessel beam provided by the present invention has the following advantages:
1) monitoring device of the present invention is equipped with multiple imaging devices on the output light path of laser, and bessel beam is formed
Front and rear laser carries out multiple spot detection, detects the quality and its stability, the laser of bessel beam formation of laser beam respectively
The quality of ring of light quality and its focal beam spot, while position of the laser focus point in workpieces processing, data can also be monitored in real time
Comprehensively objective, deviation is small;
2) monitoring device of the present invention is connected with monitoring system, kinematic system and control system, and control system is electrically connected monitoring
System and kinematic system, can focus on Guan Jing according to the real-time powered motion system adjustment second of data that monitoring system is fed back, focus on
The position of mirror and axicon, adjusts the position of optical mirror slip in real time, solves during bessel beam is formed and axicon, focusing are managed
Mirror and focus lamp three concentricity require height, and the technical problems such as axicon installation and adjustment difficulty are big, realize automation
Control production, reduces production and wastes, cost-effective.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is attached drawing needed in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
The embodiment of invention, for those of ordinary skill in the art, without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is the annexation figure of the monitoring device of the bessel beam of the preferred embodiment of the present invention;
Fig. 2 is the imaging results of the first imaging device;
Fig. 3 is the imaging results of the second imaging device;
Fig. 4 is the imaging results of the 3rd imaging device;
Fig. 5 is the imaging results of the 4th imaging device.
Reference numeral:Laser 1, monitoring system 2, kinematic system 3, control system 4, axicon 5, first focus on Guan Jing
61st, focus lamp 7, the first half-reflecting mirror 41, the second half-reflecting mirror 42, the 3rd half-reflecting mirror 43, the 4th half-reflecting mirror the 44, the 5th half
Speculum 45, the first imaging device 21, the second imaging device 22, the 3rd imaging device 23, the 4th imaging device 24, second focus on
Pipe mirror 62, tertiary focusing pipe mirror the 63, the 4th focus on pipe mirror 64.
Embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment, belongs to the scope of protection of the invention.
As shown in Figure 1, the monitoring device of the bessel beam of the preferred embodiment of the present invention, including:Laser, monitoring system
System, kinematic system and control system;Axicon, the first focusing Guan Jing and focusing are disposed with along the output light path of laser
Mirror, the focus point alignment workpieces processing of focus lamp, is equipped with the first half-reflecting mirror and the second half reflection between laser and axicon
Mirror, the 3rd half-reflecting mirror is equipped between the first focusing Guan Jing and focus lamp.
Wherein, the first half-reflecting mirror is set in presetting angle, between the axis of the first half-reflecting mirror and the axis of axicon
Angle be preferably 45 degree.Fraction of laser light is reflected through the first half-reflecting mirror, the first imaging device being equipped with its reflected light path,
Reflection laser is imaged in the first imaging device.
The dislocation reflected using laser in the upper and lower surface of parallel plate glass, so that the part for forming two rings of light is folded
Add, optical path difference forms interference.As shown in Fig. 2, there is light and shade striped in the imaging in the first imaging device, by observing light and shade striped
Angle, monitor the angle of divergence of laser, the angle of divergence can reflect the quality of laser.
Second half-reflecting mirror is set in presetting angle, the angle between the axis of the second half-reflecting mirror and the axis of axicon
Preferably -45 degree.Fraction of laser light is reflected through the second half-reflecting mirror, is equipped with second successively on its reflected light path and is focused on Guan Jing and the
Two imaging devices, the second focus point for focusing on Guan Jing are directed at the second imaging device, and second focuses on Guan Jingke in the second half-reflecting mirror
And second move back and forth between imaging device.
Mobile second focuses on the position of Guan Jing, is imaged using laser focal beam spot in different defocus positions, passes through analysis
Image quality, can determine whether out the quality of laser beam, and the imaging results of the second imaging device are as shown in Figure 3.
3rd half-reflecting mirror is set in presetting angle, the angle between the axis of the 3rd half-reflecting mirror and the axis of axicon
Preferably 45 degree.The 4th half-reflecting mirror is equipped with the reflected light path of the 3rd half-reflecting mirror, light path is divided into by the 4th half-reflecting mirror
Reflected light path and direct projection light path.The imaging dresses of tertiary focusing Guan Jing and the 3rd are equipped with the reflected light path of 4th half-reflecting mirror successively
Put, tertiary focusing Guan Jingke is moved back and forth between the 4th half-reflecting mirror and the 3rd imaging device, the direct projection of the 4th half-reflecting mirror
Light path is directed at the 4th imaging device.Fig. 4 and Fig. 5 is respectively the imaging results of the 3rd imaging device and the 4th imaging device.
The laser of laser transmitting focuses on Guan Jing by forming bessel beam, bessel beam after axicon through first
Workpieces processing surface is focused to focus lamp.Light beam passes through the reflex of the 3rd half-reflecting mirror and the 4th half-reflecting mirror, and
The focussing force of tertiary focusing Guan Jing, is imaged in the 3rd imaging device, thus the 3rd imaging device can see Bezier all the time
Light beam is most clearly imaged workpieces processing surface.
When workpieces processing is when showing to be uneven, light beam focuses on workpieces processing surface cutting processing cannot be perfect
Cutting effect.In order to make up this defect, the present embodiment kinematic system utilizes piezoelectric motor or other upper and lower inching gear connections
Drive focus lamp to be moved up and down according to the space curved surface of product surface, ensure that light beam focus point falls the cutting in workpieces processing all the time
On position, it at this moment can see all the time in the 3rd imaging device and most clearly be imaged., can be real according to the imaging in the 3rd imaging device
When adjust the position of focus lamp, realize the auto-focusing of light beam.
4th imaging device is used for the ring of light quality for monitoring bessel beam formation in real time, and then reflects bessel beam
Quality.When the 4th imaging device reflect the bessel beam to be formed it is second-rate when, can be by kinematic system to axicon
Position be finely adjusted, or adjust axicon at the same time, focus on Guan Jing and focus lamp concentricity, and then realize optimal Bezier
Focus on light beam quality.
Monitoring system is electrically connected the first imaging device, the second imaging device, the 3rd imaging device and the 4th imaging device, receives
Collect and analyze the monitoring data transmitted by each imaging device in real time.
Kinematic system is electrically connected first and focuses on Guan Jing and focus lamp, and control system is electrically connected monitoring system and kinematic system,
Control system focuses on the displacement of Guan Jing and focus lamp according to the real-time powered motion system adjustment second of monitoring result of monitoring system
And/or angle.
There is mismachining tolerance cost to reduce in time, the kinematic system of the present embodiment is electrically connected axicon, when adding
During work error, the position of kinematic system fine setting axicon is with calibration error.
Further, the 5th half-reflecting mirror is equipped between the first focusing Guan Jing and the 3rd half-reflecting mirror, in the 5th half reflection
The 4th is equipped with the reflected light path of mirror successively and focuses on Guan Jing and LED light source.The monitoring device of the present embodiment acts not only as shellfish
The monitoring device of Sai Er light beams, is also used as microscope use.
Further, laser, axicon, the first focusing Guan Jing and focus lamp are coaxially fixedly mounted.
Claims (9)
1. a kind of monitoring device of bessel beam, including:Laser, is disposed with along the output light path of the laser
Axicon, first focus on Guan Jing and focus lamp, the focus point alignment workpieces processing of the focus lamp, it is characterised in that described to swash
The first half-reflecting mirror and the second half-reflecting mirror are equipped between light device and the axicon, described first focuses on Guan Jing and the focusing
The 3rd half-reflecting mirror is equipped between mirror;
First half-reflecting mirror is set in presetting angle, and the first imaging is equipped with the reflected light path of first half-reflecting mirror
Device;
Second half-reflecting mirror is set in presetting angle, is equipped with second successively on the reflected light path of second half-reflecting mirror
Guan Jing and the second imaging device are focused on, described second focuses on Guan Jingke in second half-reflecting mirror and second imaging device
Between move back and forth;
3rd half-reflecting mirror is set in presetting angle, and it is anti-that the 4th half is equipped with the reflected light path of the 3rd half-reflecting mirror
Penetrate mirror;It is equipped with tertiary focusing Guan Jing and the 3rd imaging device on the reflected light path of 4th half-reflecting mirror successively, the described 3rd
Guan Jingke is focused on to move back and forth between the 4th half-reflecting mirror and the 3rd imaging device, the 4th half-reflecting mirror
Direct projection light path is directed at the 4th imaging device.
2. monitoring device according to claim 1, it is characterised in that further include:Monitoring system, the monitoring system are electrically connected
First imaging device, the second imaging device, the 3rd imaging device and the 4th imaging device are connect, for collecting and surveying data.
3. monitoring device according to claim 2, it is characterised in that further include:Kinematic system and control system, the fortune
Dynamic system is electrically connected described first and focuses on Guan Jing and focus lamp;
The control system is electrically connected the monitoring system and kinematic system, can drive the kinetic system in real time according to monitoring data
System adjusts the described second position for focusing on Guan Jing and focus lamp.
4. monitoring device according to claim 1, it is characterised in that the kinematic system is electrically connected the axicon, uses
In the position of the fine setting axicon with calibration error.
5. monitoring device according to claim 1, it is characterised in that described first focuses on Guan Jing and the 3rd half reflection
The 5th half-reflecting mirror is equipped between mirror, on the reflected light path of the 5th half-reflecting mirror successively be equipped with the 4th focus on Guan Jing and
LED light source.
6. monitoring device according to claim 1, it is characterised in that the laser, axicon, first focus on Guan Jing and
Focus lamp is coaxially fixedly mounted.
7. monitoring device according to claim 1, it is characterised in that the axis of first half-reflecting mirror and the axis rib
Angle between the axis of mirror is 45 degree.
8. monitoring device according to claim 1, it is characterised in that the axis and the described 3rd of the 3rd half-reflecting mirror
The angle focused between the axis of Guan Jing is 45 degree.
9. monitoring device according to claim 1, it is characterised in that the axis and the described 3rd of the 4th half-reflecting mirror
The angle focused between the axis of Guan Jing is 45 degree.
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CN112433365A (en) * | 2020-11-17 | 2021-03-02 | 中国科学院西安光学精密机械研究所 | Light beam pointing control system based on cone mirror and deviation correction method thereof |
DE102021112271A1 (en) | 2021-05-11 | 2022-11-17 | Trumpf Laser- Und Systemtechnik Gmbh | Device and method for determining the beam quality |
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DE102021112271A1 (en) | 2021-05-11 | 2022-11-17 | Trumpf Laser- Und Systemtechnik Gmbh | Device and method for determining the beam quality |
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