CN107953028B - A kind of monitoring device of bessel beam - Google Patents
A kind of monitoring device of bessel beam Download PDFInfo
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- CN107953028B CN107953028B CN201711463922.6A CN201711463922A CN107953028B CN 107953028 B CN107953028 B CN 107953028B CN 201711463922 A CN201711463922 A CN 201711463922A CN 107953028 B CN107953028 B CN 107953028B
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- reflecting mirror
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- guan jing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
Monitoring device provided by the present invention is equipped with multiple imaging devices on the output light path of laser, the laser for forming front and back to bessel beam carries out multiple spot detection, the quality of laser beam and its quality of stability, the laser light ring quality that bessel beam is formed and its focal beam spot are detected respectively, simultaneously can also real-time monitoring workpiece processing effect, data are comprehensively objective, and deviation is small.The monitoring device of bessel beam of the invention includes: laser, axicon, the first focusing Guan Jing and focus lamp are disposed with along the output light path of laser, the focus point of focus lamp is directed at workpieces processing, the first half-reflecting mirror and the second half-reflecting mirror are equipped between laser and axicon, first focuses between Guan Jing and focus lamp equipped with third half-reflecting mirror, first half-reflecting mirror connects the first imaging device, second half-reflecting mirror connects the second imaging device, and third half-reflecting mirror connects third imaging device and the 4th imaging device.
Description
Technical field
The invention belongs to laser cutting technique fields, and in particular to a kind of monitoring device of bessel beam.
Background technique
Bezier laser beam because of its focal beam spot and the longer depth of focus, be now widely used in processing thickness material,
The deeply bigger drilling etc. of diameter.The quality of bessel beam affects the cut quality of product, and the formation pair of bessel beam
The quality of laser and its stability it is more demanding, thus in the processing and assembling process of optical mirror slip, it is often necessary to mating
Special equipment monitors the quality and its stability of laser transmitting laser.
However existing monitoring device is bulky, the deviation of monitoring data and actual value is larger, and this kind of equipment is logical
Often only monitoring emits the quality of laser, and has ignored or even cannot achieve the focusing light final to laser-formed bessel beam
Spot is measured in real time, these direct relation final products processing qualities.
Summary of the invention
For above-mentioned technical problem, the purpose of the present invention is to provide a kind of monitoring devices of bessel beam, specific
Technical solution is as follows:
A kind of monitoring device of bessel beam, comprising: laser is set gradually along the output light path of the laser
There are axicon, first to focus Guan Jing and focus lamp, the focus point of the focus lamp is directed at workpieces processing, the laser and described
It is equipped with the first half-reflecting mirror and the second half-reflecting mirror between axicon, is equipped between the first focusing Guan Jing and the focus lamp
Third half-reflecting mirror；
First half-reflecting mirror is arranged in presetting angle, and first is equipped on the reflected light path of first half-reflecting mirror
Imaging device；
Second half-reflecting mirror is arranged in presetting angle, is successively arranged on the reflected light path of second half-reflecting mirror
Second focuses Guan Jing and the second imaging device, and described second focuses Guan Jingke in second half-reflecting mirror and second imaging
It is moved back and forth between device；
The third half-reflecting mirror is arranged in presetting angle, and the 4th is equipped on the reflected light path of the third half-reflecting mirror
Half-reflecting mirror；It is successively arranged tertiary focusing Guan Jing and third imaging device on the reflected light path of 4th half-reflecting mirror, it is described
Tertiary focusing Guan Jingke is moved back and forth between the 4th half-reflecting mirror and the third imaging device, the 4th half reflection
The direct projection optical path of mirror is directed at the 4th imaging device.
Preferably, the monitoring device further include: monitoring system, monitoring system electrical connection the first imaging dress
It sets, the second imaging device, third imaging device and the 4th imaging device, for collecting and surveying data.
It is furthermore preferred that the monitoring device further include: kinematic system and control system, described in kinematic system electrical connection
Second focuses Guan Jing and focus lamp；
The control system is electrically connected the monitoring system and kinematic system, and the fortune can be driven in real time according to monitoring data
Dynamic system adjusts the described first position for focusing Guan Jing and focus lamp.
Preferably, the kinematic system is electrically connected the axicon, is missed for finely tuning the position of the axicon with calibrating
Difference.
Preferably, it described first focuses equipped with the 5th half-reflecting mirror between Guan Jing and the third half-reflecting mirror, described
The 4th focusing Guan Jing and LED light source are successively arranged on the reflected light path of 5th half-reflecting mirror.
Preferably, the laser, axicon, the first focusing Guan Jing and focus lamp are coaxially fixedly mounted.
Preferably, the angle between the axis of first half-reflecting mirror and the axis of the axicon is 45 degree.
Preferably, the angle between the axis of the third half-reflecting mirror and the axis of the tertiary focusing Guan Jing is 45
Degree.
Preferably, the angle between the axis of the 4th half-reflecting mirror and the axis of the tertiary focusing Guan Jing is 45
Degree.
Compared with prior art, the monitoring device of bessel beam provided by the present invention has the advantage that
1) monitoring device of the present invention is equipped with multiple imaging devices on the output light path of laser, is formed to bessel beam
The laser of front and back carries out multiple spot detection, the laser that the quality and its stability, bessel beam for detecting laser beam respectively are formed
The quality of ring of light quality and its focal beam spot, at the same can also position of the real-time monitoring laser focus point in workpieces processing, data
Comprehensively objective, deviation is small；
2) monitoring device of the present invention is connected with monitoring system, kinematic system and control system, control system electrical connection monitoring
System and kinematic system can drive in real time kinematic system to adjust second according to the data that monitoring system is fed back and focus Guan Jing, focus
The position of mirror and axicon, in real time adjust optical mirror slip position, solve bessel beam formed in axicon, focus manage
Mirror and the technical problems such as focus lamp three's concentricity requirement height and axicon installation and adjustment difficulty are big, realize automation
Control production reduces production waste, save the cost.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is the annexation figure of the monitoring device of the bessel beam of the preferred embodiment of the present invention；
Fig. 2 is the imaging results of the first imaging device；
Fig. 3 is the imaging results of the second imaging device；
Fig. 4 is the imaging results of third imaging device；
Fig. 5 is the imaging results of the 4th imaging device.
Appended drawing reference: laser 1, monitoring system 2, kinematic system 3, control system 4, axicon 5, first focus Guan Jing
61, focus lamp 7, the first half-reflecting mirror 41, the second half-reflecting mirror 42, third half-reflecting mirror 43, the 4th half-reflecting mirror the 44, the 5th half
Reflecting mirror 45, the first imaging device 21, the second imaging device 22, third imaging device 23, the 4th imaging device 24, second focus
Pipe mirror 62, tertiary focusing pipe mirror the 63, the 4th focus pipe mirror 64.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
As shown in Figure 1, the monitoring device of the bessel beam of the preferred embodiment of the present invention, comprising: laser, monitoring system
System, kinematic system and control system；Axicon, the first focusing Guan Jing and focusing are disposed with along the output light path of laser
The focus point of mirror, focus lamp is directed at workpieces processing, and the first half-reflecting mirror and the second half reflection are equipped between laser and axicon
Mirror, first focuses between Guan Jing and focus lamp equipped with third half-reflecting mirror.
Wherein, the first half-reflecting mirror is arranged in presetting angle, between the axis of the first half-reflecting mirror and the axis of axicon
Angle be preferably 45 degree.Fraction of laser light is reflected through the first half-reflecting mirror, the first imaging device being equipped on its reflected light path,
Reflection laser is imaged in the first imaging device.
The dislocation reflected using laser in the upper and lower surface of parallel plate glass, so that the part for forming two rings of light is folded
Add, optical path difference forms interference.As shown in Fig. 2, there is light and shade striped in the imaging in the first imaging device, by observing light and shade striped
Angle, monitor the angle of divergence of laser, the angle of divergence can reflect the quality of laser.
Second half-reflecting mirror is arranged in presetting angle, the angle between the axis of the second half-reflecting mirror and the axis of axicon
Preferably -45 degree.Fraction of laser light is reflected through the second half-reflecting mirror, and the second focusing Guan Jing and are successively arranged on its reflected light path
Two imaging devices, the second focus point for focusing Guan Jing are directed at the second imaging device, and second focuses Guan Jingke in the second half-reflecting mirror
And second move back and forth between imaging device.
Mobile second focuses the position of Guan Jing, is imaged using laser focal beam spot in different defocus positions, passes through analysis
Image quality can determine whether out that the quality of laser beam, the imaging results of the second imaging device are as shown in Figure 3.
Third half-reflecting mirror is arranged in presetting angle, the angle between the axis of third half-reflecting mirror and the axis of axicon
Preferably 45 degree.The 4th half-reflecting mirror is equipped on the reflected light path of third half-reflecting mirror, optical path is divided by the 4th half-reflecting mirror
Reflected light path and direct projection optical path.Tertiary focusing Guan Jing and third imaging dress are successively arranged on the reflected light path of 4th half-reflecting mirror
It sets, tertiary focusing Guan Jingke is moved back and forth between the 4th half-reflecting mirror and third imaging device, the direct projection of the 4th half-reflecting mirror
Optical path is directed at the 4th imaging device.Fig. 4 and Fig. 5 is respectively the imaging results of third imaging device and the 4th imaging device.
The laser of laser transmitting focuses Guan Jing through first by forming bessel beam, bessel beam after axicon
Workpieces processing surface is focused to focus lamp.Light beam passes through the reflex of third half-reflecting mirror and the 4th half-reflecting mirror, and
The focussing force of tertiary focusing Guan Jing is imaged in third imaging device, thus third imaging device can see Bezier always
Clearest imaging of the light beam on workpieces processing surface.
When workpieces processing is when showing to be uneven, light beam focuses on workpieces processing surface cutting processing cannot be perfect
Cutting effect.In order to make up this defect, the present embodiment kinematic system is connected using piezoelectric motor or other upper and lower inching gears
It drives focus lamp to be moved up and down according to the space curved surface of product surface, guarantees that light beam focus point falls in the cutting of workpieces processing always
On position, clearest imaging at this moment can be seen always in third imaging device.It, can be real according to the imaging in third imaging device
When adjust focus lamp position, realize the auto-focusing of light beam.
4th imaging device is used to monitor in real time the ring of light quality of bessel beam formation, and then reflects bessel beam
Quality.When the 4th imaging device reflect the bessel beam to be formed it is second-rate when, can be by kinematic system to axicon
Position be finely adjusted, or adjust axicon simultaneously, focus Guan Jing and focus lamp concentricity, and then realize optimal Bezier
Focus on light beam quality.
Monitoring system is electrically connected the first imaging device, the second imaging device, third imaging device and the 4th imaging device, receives
Collect and analyzes the monitoring data transmitted by each imaging device in real time.
Kinematic system electrical connection first focuses Guan Jing and focus lamp, and control system is electrically connected monitoring system and kinematic system,
Control system drives kinematic system to adjust the second displacement for focusing Guan Jing and focus lamp in real time according to the monitoring result of monitoring system
And/or angle.
There is mismachining tolerance cost to reduce in time, the kinematic system of the present embodiment is electrically connected axicon, when adding
When work error, kinematic system finely tunes the position of axicon with calibration error.
Further, it first focuses equipped with the 5th half-reflecting mirror between Guan Jing and third half-reflecting mirror, in the 5th half reflection
The 4th focusing Guan Jing and LED light source are successively arranged on the reflected light path of mirror.The monitoring device of the present embodiment acts not only as shellfish
The monitoring device of Sai Er light beam is also used as microscope use.
Further, laser, axicon, the first focusing Guan Jing and focus lamp are coaxially fixedly mounted.
Claims (7)
1. a kind of monitoring device of bessel beam, comprising: laser is disposed with along the output light path of the laser
Axicon, first focus Guan Jing and focus lamp, and the focus point of the focus lamp is directed at workpieces processing, which is characterized in that described to swash
The first half-reflecting mirror and the second half-reflecting mirror are equipped between light device and the axicon, described first focuses Guan Jing and the focusing
Third half-reflecting mirror is equipped between mirror；
First half-reflecting mirror is arranged in presetting angle, and the first imaging is equipped on the reflected light path of first half-reflecting mirror
Device；
Second half-reflecting mirror is arranged in presetting angle, is successively arranged second on the reflected light path of second half-reflecting mirror
Guan Jing and the second imaging device are focused, described second focuses Guan Jingke in second half-reflecting mirror and second imaging device
Between move back and forth；
The third half-reflecting mirror is arranged in presetting angle, and it is anti-that the 4th half is equipped on the reflected light path of the third half-reflecting mirror
Penetrate mirror；Tertiary focusing Guan Jing and third imaging device, the third are successively arranged on the reflected light path of 4th half-reflecting mirror
Guan Jingke is focused to move back and forth between the 4th half-reflecting mirror and the third imaging device, the 4th half-reflecting mirror
Direct projection optical path is directed at the 4th imaging device；
Further include: monitoring system, the monitoring system are electrically connected first imaging device, the second imaging device, third imaging
Device and the 4th imaging device, for collecting and surveying data；
Further include: kinematic system and control system, the kinematic system electrical connection described first focus Guan Jing and focus lamp；
The control system is electrically connected the monitoring system and kinematic system, and the kinetic system can be driven in real time according to monitoring data
System adjusts the described second position for focusing Guan Jing and focus lamp.
2. monitoring device according to claim 1, which is characterized in that the kinematic system is electrically connected the axicon, uses
In the position of the fine tuning axicon with calibration error.
3. monitoring device according to claim 1, which is characterized in that described first focuses Guan Jing and the third half reflection
Between mirror be equipped with the 5th half-reflecting mirror, be successively arranged on the reflected light path of the 5th half-reflecting mirror the 4th focusing Guan Jing and
LED light source.
4. monitoring device according to claim 1, which is characterized in that the laser, axicon, first focus Guan Jing and
Focus lamp is coaxially fixedly mounted.
5. monitoring device according to claim 1, which is characterized in that the axis of first half-reflecting mirror and the axis rib
Angle between the axis of mirror is 45 degree.
6. monitoring device according to claim 1, which is characterized in that the axis of the third half-reflecting mirror and the third
The angle focused between the axis of Guan Jing is 45 degree.
7. monitoring device according to claim 1, which is characterized in that the axis of the 4th half-reflecting mirror and the third
The angle focused between the axis of Guan Jing is 45 degree.
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| CN201711463922.6A CN107953028B (en) | 2017-12-28 | 2017-12-28 | A kind of monitoring device of bessel beam |
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| CN201711463922.6A CN107953028B (en) | 2017-12-28 | 2017-12-28 | A kind of monitoring device of bessel beam |
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| CN107953028B true CN107953028B (en) | 2019-11-26 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109332877A (en) * | 2018-11-07 | 2019-02-15 | 江汉大学 | A kind of laser Remote Dynamic focusing system |
| CN112433365B (en) * | 2020-11-17 | 2022-02-11 | 中国科学院西安光学精密机械研究所 | Deviation correction method of light beam pointing control system based on conical mirror |
| DE102021112271A1 (en) | 2021-05-11 | 2022-11-17 | Trumpf Laser- Und Systemtechnik Gmbh | Device and method for determining the beam quality |
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Address after: 523770 Second Floor, 3 Kusai Science Park, No. 8 Fumin South Road, Foxin Community, Dalang Town, Dongguan City, Guangdong Province Applicant after: Dongguan Shengxiong Laser Advanced Equipment Co., Ltd. Address before: 523000 First Floor, Building A, 53 Fofu Road, Foziwa Village, Dalang Town, Dongguan City, Guangdong Province Applicant before: Dongguan Strong Laser Co., Ltd. |
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