CN205650938U - Laser beam machining device based on two coaxial CCD carry out vision positioning - Google Patents

Laser beam machining device based on two coaxial CCD carry out vision positioning Download PDF

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Publication number
CN205650938U
CN205650938U CN201620247085.8U CN201620247085U CN205650938U CN 205650938 U CN205650938 U CN 205650938U CN 201620247085 U CN201620247085 U CN 201620247085U CN 205650938 U CN205650938 U CN 205650938U
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CN
China
Prior art keywords
ccd module
ccd
galvanometer
mirror
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201620247085.8U
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Chinese (zh)
Inventor
雷志辉
林思引
陆文革
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANGZHOU YINGWEI LASER TECHNOLOGY CO., LTD.
Innovo laser Polytron Technologies Inc
Original Assignee
Changzhou Yingwei Laser Technology Co Ltd
SHENZHEN INNO LASER TECHNOLOGY Co Ltd
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Filing date
Publication date
Application filed by Changzhou Yingwei Laser Technology Co Ltd, SHENZHEN INNO LASER TECHNOLOGY Co Ltd filed Critical Changzhou Yingwei Laser Technology Co Ltd
Priority to CN201620247085.8U priority Critical patent/CN205650938U/en
Application granted granted Critical
Publication of CN205650938U publication Critical patent/CN205650938U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a laser beam machining device based on two coaxial CCD carry out vision positioning, its including be used for placing the processing platform of waiting to process the work piece, source of illumination, highly pass through speculum, a CCD module, control computer, laser instrument, shake the mirror and set up in the income light side of the mirror that shakes just with mirror the 2nd coaxial CCD module that shakes. Control computer is respectively with laser instrument, a CCD module, the 2nd CCD module, mirror electric connection shakes. The laser of laser instrument transmission shines to waiting to process the work piece through the 2nd CCD module, the mirror that shakes, the high speculum that passes through. Wait that the light of processing the work piece reflection is divided into first light path and second light path through the high speculum that passes through, the high speculum that passes through of first light path warp incides a CCD module, and the second light path incides the 2nd CCD module through high speculum, the mirror that shakes thoroughly. The combination of a CCD module and the 2nd CCD module had both enlarged the vision positioning breadth, had promoted positioning accuracy, had solved the severe precision problem that the mirror drift of shaking led to the fact simultaneously.

Description

The laser processing device of vision localization is carried out based on two coaxial CCD
Technical field
This utility model relates to technical field of laser processing, particularly relates to one and carries out vision calmly based on two coaxial CCD The laser processing device of position.
Background technology
Laser Processing has become as the important processing method of modern manufacturing, particularly in Precision Machining, micro Process field, and bag Include cutting, marking, spray printing, hole, carve, scanning etc..Laser Processing has been widely used in microelectronics, liquid crystal, separation film, survey The fields such as amount, medical treatment, automobile, nano material, space flight.
Along with science and technology development, modern precision manufacture to Laser Processing the accuracy of form and position, flexible adaptation, intellectuality More and more higher with efficiency requirements.The laser-processing system of low requirement does not has vision localization function, the laser-processing system of high request Generally with visual system, including paraxonic CCD system and coaxial CCD system etc..
The sight path of paraxonic CCD system and laser optical path are structurally branches, add that man-hour requirement is rigid is divided into bat Take the photograph, position, move three actions of galvanometer, therefore can cause the vibration of small workpiece, displacement and machining deviation, process speed simultaneously Degree is slow, affect machining accuracy.
The coaxial CCD system that vision breadth is little exists image the problems such as distortion and aberration, therefore limits its application model Enclose and positioning precision.The coaxial CCD system that vision breadth is big is usually present the location that the drift of galvanometer self cannot be overcome to cause Deviation, need to affect service efficiency and convenience to being frequently corrected visual system and galvanometer system during use.
In view of this, it is necessary in fact to provide a kind of positioning precision and deviations that galvanometer drift can be overcome to cause of promoting Laser processing device is to solve the defect of prior art.
Utility model content
Technical problem to be solved in the utility model be to provide a kind of based on two coaxial CCD carry out vision localization swash Optical machining device, it carries out being accurately positioned to promote picture quality and positioning precision by the coaxial CCD module that vision breadth is big, Meanwhile, detect whether galvanometer occurs that skew and appearance are carried out after offseting in time in real time by the coaxial CCD module that vision breadth is little Correct the defect caused to overcome galvanometer to drift about.
In order to solve the problems referred to above, this utility model provide a kind of based on two coaxial CCD carry out vision localization swash Optical machining device, including the processing platform for placing workpiece to be processed, is arranged at the lighting source above processing platform, height thoroughly Reflecting mirror, a CCD module, control computer, laser instrument, galvanometer and be arranged at the incident side of galvanometer and coaxial with galvanometer 2nd CCD module.Control computer to be electrically connected with laser instrument, a CCD module, the 2nd CCD module, galvanometer respectively.Laser The laser that device is launched exposes to workpiece to be processed through the 2nd CCD module, galvanometer, high transflector mirror.The light of workpiece to be processed reflection Line is divided into the first light path and the second light path through high transflector mirror, and the first light path incides a CCD module through high transflector mirror, the Two light paths incide the 2nd CCD module through high transflector mirror, galvanometer.
Preferably, it is provided with between laser instrument and the 2nd CCD module and coaxially expands for the laser that laser instrument is sent Beam expanding lens.
Preferably, the light emission side of galvanometer is provided with the field lens for being focused laser.
Compared with prior art, this utility model by the coaxial CCD module that vision breadth is big carry out location improve fixed Position precision, meanwhile, by the coaxial CCD module that vision breadth is little detect in real time galvanometer whether occur skew and occur skew after and Time be corrected overcoming galvanometer and drift about the defect caused, thus improve process velocity and widened range of application.
Accompanying drawing explanation
Fig. 1 is a kind of embodiment of laser processing device that this utility model carries out vision localization based on two coaxial CCD Frame structure schematic diagram.
Fig. 2 is the laser processing of the laser processing device enforcement carrying out vision localization based on two coaxial CCD of Fig. 1 A kind of schematic flow sheet of embodiment.
Detailed description of the invention
For making the purpose of this utility model, technical scheme and advantage clearer, new to this practicality below in conjunction with accompanying drawing Type embodiment is described in further detail.
The one that Fig. 1 illustrates the laser processing device that this utility model carries out vision localization based on two coaxial CCD is real Execute example.In the present embodiment, should include for placing to be added based on the laser processing device that two coaxial CCD carry out vision localization The processing platform 1 of work workpiece, the lighting source 2 above processing platform 1, high transflector mirror the 3, the oneth CCD module 4 are set, control Computer 5, laser instrument 7, galvanometer 6 and be arranged at the incident side of galvanometer 6 and the twoth CCD module 10 coaxial with galvanometer 6.Its In, the 2nd CCD module 10 includes high transflector mirror 9.Control computer 5 respectively with laser instrument the 7, the oneth CCD module the 4, the 2nd CCD Module 10, galvanometer 6 are electrically connected with.Workpiece to be processed is provided with original position point.Workpiece to be processed or processing platform 1 are fixedly installed Identification point.
Lighting source 2 sends illuminating bundle and irradiates workpiece to be processed, and the light of illuminating bundle is on the surface of workpiece to be processed Occurring reflection to be incident to a CCD module 4 through high transflector mirror 3, a CCD module 4 gathers the first image of workpiece to be processed First image information is also sent to controlling computer 5 by information, and optical axis and a CCD module 4 of illuminating bundle gather the first figure Light shaft coaxle as information.After control computer 5 receives this first image information, obtain the galvanometer origin position letter of galvanometer 6 Initial Working position information corresponding with original position point in breath and the first image information.Control computer 5 former according to galvanometer Dot position information, initial Working position information and preset coordinate system generate control command and control galvanometer 6 by control command The galvanometer initial point causing galvanometer 6 overlaps with original position point.What the oneth CCD module 4 of the present embodiment gathered is workpiece to be processed Surface reflection and through whole light of high transflector mirror 3 transmission, therefore, the vision breadth of a CCD module 4 is big, therefore, the The first image information ratio that one CCD module 4 obtains is more visible, therefore carries out the positioning precision positioned based on the first image information High.
The laser that laser instrument 7 sends forms machining beams expose to workpiece to be processed with logical through high transflector mirror 9, galvanometer 6 Cross machining beams and realize the process operation to workpiece to be processed.2nd CCD module 10 gathers work to be processed by high transflector mirror 3 Second image information is also sent to controlling computer 5, the optical axis of machining beams and the 2nd CCD module by the second image information of part 10 light shaft coaxles gathering the second image information.Control the computer 5 identification point position according to the identification point in the second image information Confidence breath and preset standard dot position information judge whether galvanometer 6 drift occurs.If skew occurs in galvanometer 6, control 5, computer Generate control command according to identification point positional information, preset standard dot position information and preset coordinate system and adjusted by control command Whole galvanometer 6.The 2nd CCD module 10 of the present embodiment is arranged at the incident side of galvanometer 6 and coaxial with galvanometer 6.2nd CCD module 10 Coaxial with galvanometer 6 and be same light beam by the 2nd CCD module 10 and galvanometer 6, therefore, the 2nd CCD module 10 can essence Really and timely detect whether galvanometer drift occurs.
In other examples, it is provided with between laser instrument 7 and the 2nd CCD module 10 for swashing that laser instrument 7 is sent The beam expanding lens 8 that light coaxially expands.The present embodiment uses beam expanding lens 8 coaxially to expand laser, improves beam propagation The angle of divergence so that beam path alignment.
In other examples, the light emission side of galvanometer 6 is provided with the field lens 11 for being focused laser.This enforcement Example is focused operation by field lens 11 to laser, causes at workpiece to be processed less at the hot spot formed, and meets more essence The higher precision machined demand of density.
Fig. 2 illustrate this utility model based on two coaxial CCD carry out vision localization laser processing device implement swash A kind of embodiment of light processing method.In the present embodiment, the Laser Processing side of vision localization should be carried out based on two coaxial CCD Method comprises the steps:
Step S1, workpiece to be processed is placed on processing platform, and workpiece to be processed is provided with original position point, workpiece to be processed or Processing platform is fixedly installed identification point.
Step S2, lighting source sends illuminating bundle and irradiates workpiece to be processed.
Step S3, a CCD module gathers the first image information of workpiece to be processed and by first by high transflector mirror Image information sends to controlling computer.
Step S4, with start bit in the galvanometer origin position information of control computer acquisition galvanometer and the first image information Put a corresponding initial Working position information.
Step S5, controls computer according to galvanometer origin position information, initial Working position information and preset coordinate system Generate control command and cause the galvanometer initial point of galvanometer to overlap with original position point by control command control galvanometer.
Step S6, the laser that laser instrument sends transmits to galvanometer after beam expanding lens coaxially expands.
Step S7, field lens forms machining beams after being focused the laser that galvanometer exports processing and irradiates through high transflector mirror To workpiece to be processed to be realized the process operation to workpiece to be processed by machining beams.
Step S8, the 2nd CCD module gathers the second image information of workpiece to be processed and by second by high transflector mirror Image information sends to controlling computer, and the optical axis that the optical axis of machining beams and the 2nd CCD module gather the second image information is same Axle.
Step S9, controls computer according to the identification point positional information of the identification point in the second image information and preset standard Dot position information judges whether galvanometer drift occurs.If skew occurs in galvanometer, perform step S10, if skew does not occurs in galvanometer, hold Row step S7.
Step S10, controls computer according to identification point positional information, preset standard dot position information and preset coordinate system Generate control command and adjust galvanometer by control command, performing step S1.
Above the detailed description of the invention of utility model is described in detail, but it has been only used as example, this utility model It is not limiting as and specific embodiments described above.For a person skilled in the art, any this utility model is entered The equivalent modifications of row or substitute the most all among category of the present utility model, therefore, without departing from spirit of the present utility model and The impartial conversion made under spirit and amendment, improvement etc., all should contain in the range of this utility model.

Claims (3)

1. the laser processing device carrying out vision localization based on two coaxial CCD, it is characterised in that include treating for placement Process the processing platform of workpiece, be arranged at the lighting source above processing platform, high transflector mirror, a CCD module, control meter Calculation machine, laser instrument, galvanometer and be arranged at the incident side of described galvanometer and the twoth CCD module coaxial with described galvanometer;Described Control computer to be electrically connected with described laser instrument, a described CCD module, described 2nd CCD module, described galvanometer respectively; The laser that described laser instrument is launched exposes to described to be processed through described 2nd CCD module, described galvanometer, described high transflector mirror Workpiece;The light of described workpiece to be processed reflection is divided into the first light path and the second light path through described high transflector mirror, and described first Light path incides a described CCD module through described high transflector mirror, described second light path through described high transflector mirror, described in shake Mirror incides described 2nd CCD module.
The laser processing device carrying out vision localization based on two coaxial CCD the most according to claim 1, its feature exists In, it is provided with between described laser instrument and described 2nd CCD module and coaxially expands for the laser that described laser instrument is sent Beam expanding lens.
The laser processing device carrying out vision localization based on two coaxial CCD the most according to claim 1, its feature exists In, the light emission side of described galvanometer is provided with the field lens for being focused laser.
CN201620247085.8U 2016-03-29 2016-03-29 Laser beam machining device based on two coaxial CCD carry out vision positioning Withdrawn - After Issue CN205650938U (en)

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Application Number Priority Date Filing Date Title
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105598579A (en) * 2016-03-29 2016-05-25 深圳英诺激光科技有限公司 Laser processing device and method for carrying out vision positioning based on two coaxial CCDs
CN106454048A (en) * 2016-07-29 2017-02-22 大族激光科技产业集团股份有限公司 Pseudo coaxial CCD shooting system and laser processing device employing the system
CN107953028A (en) * 2017-12-28 2018-04-24 东莞市盛雄激光设备有限公司 A kind of monitoring device of bessel beam
CN109877319A (en) * 2018-12-29 2019-06-14 西安铂力特增材技术股份有限公司 A kind of more galvanometer laser precision splicing calibration methods
CN109926736A (en) * 2019-04-10 2019-06-25 英诺激光科技股份有限公司 A kind of device and method using high frequency nanosecond optical-fiber laser cutting battery pole piece

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105598579A (en) * 2016-03-29 2016-05-25 深圳英诺激光科技有限公司 Laser processing device and method for carrying out vision positioning based on two coaxial CCDs
CN106454048A (en) * 2016-07-29 2017-02-22 大族激光科技产业集团股份有限公司 Pseudo coaxial CCD shooting system and laser processing device employing the system
CN106454048B (en) * 2016-07-29 2019-12-24 大族激光科技产业集团股份有限公司 Pseudo-coaxial CCD shooting system and laser processing device adopting same
CN107953028A (en) * 2017-12-28 2018-04-24 东莞市盛雄激光设备有限公司 A kind of monitoring device of bessel beam
CN107953028B (en) * 2017-12-28 2019-11-26 东莞市盛雄激光先进装备股份有限公司 A kind of monitoring device of bessel beam
CN109877319A (en) * 2018-12-29 2019-06-14 西安铂力特增材技术股份有限公司 A kind of more galvanometer laser precision splicing calibration methods
CN109877319B (en) * 2018-12-29 2021-11-23 西安铂力特增材技术股份有限公司 Multi-galvanometer laser precision splicing calibration method
CN109926736A (en) * 2019-04-10 2019-06-25 英诺激光科技股份有限公司 A kind of device and method using high frequency nanosecond optical-fiber laser cutting battery pole piece

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GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 518000 Shenzhen, Nanshan District science and Technology Park, North District, Long Hill Road, No. two, No. 8, Qing Guang photoelectric building, the Office (305)

Patentee after: Innovo laser Polytron Technologies Inc

Patentee after: CHANGZHOU YINGWEI LASER TECHNOLOGY CO., LTD.

Address before: 518000 Shenzhen, Nanshan District science and Technology Park, North District, Long Hill Road, No. two, No. 8, Qing Guang photoelectric building, the Office (305)

Patentee before: Shenzhen Inno Laser Technology Co., Ltd.

Patentee before: CHANGZHOU YINGWEI LASER TECHNOLOGY CO., LTD.

AV01 Patent right actively abandoned
AV01 Patent right actively abandoned

Granted publication date: 20161019

Effective date of abandoning: 20170801