JP4940108B2 - Scanning optical device - Google Patents

Description

  The present invention relates to a scanning optical apparatus, and more particularly to a scanning optical apparatus for forming an image by scanning a photosensitive member with a light beam, such as a recording engine unit in a laser printer.

  A scanning optical device in an electrophotographic image forming apparatus drives a semiconductor laser in accordance with input image data, and forms an electrostatic latent image in accordance with the image data on a photoreceptor.

  A semiconductor laser used as a light source of a scanning optical device converts emitted laser light into substantially parallel light by a collimating lens, and then deflects it with a deflecting member such as a rotary polygon mirror (polygon mirror) with a predetermined beam diameter. After that, it is focused by the f-θ lens. At the same time, the f-θ lens corrects distortion so as to guarantee the temporal linearity of scanning, so that the laser light that has passed through the f-θ lens is moved onto the photoconductor in the main scanning direction (axis of the photoconductor). Direction) at a constant speed. Since the deviation of the condensing position on the photosensitive member causes deterioration in image quality, the scanning optical device is devised so that the condensing position of the laser beam on the photosensitive member is not greatly displaced. For example, while improving the component accuracy and installation accuracy of optical components and mechanical components, efforts have been made to optimize the linear expansion coefficient of these components.

  On the other hand, there has been proposed a technique for changing the condensing position of laser light on a photosensitive member by mechanically configuring a collimating lens to be movable (see, for example, Patent Document 1). Further, as a means for correcting focus, a technique has been proposed in which an electro-optic crystal is arranged on the laser beam emission side of a collimator lens to change the focusing property of the laser beam (see, for example, Patent Document 2).

Also disclosed is a technique for detecting a defocus of a light beam with an optical sensor, detecting a change in an environmental element that causes the defocus, and correcting the defocus based on the detected defocus and the change in the environmental element. (Refer to patent document 3 etc.).
JP-A-2-293877 JP-A-4-264420 Japanese Patent Laid-Open No. 2-93559

  However, in the method proposed in Patent Document 1, a mechanism for mechanically moving the collimating lens is complicated. Further, since it is mechanically movable, the response speed is slow, and it is difficult to change the light beam condensing position at high speed. Therefore, it is difficult to say that it is appropriate for application to high-speed equipment such as a laser printer.

  Further, the method proposed in Patent Document 2 does not require a mechanically movable part in the optical system, and the response speed is high because the electro-optic crystal is used for electrical control. However, in addition to the collimating lens, new parts such as an electro-optic crystal are required. As a result, the number of parts increases and the scanning optical device increases in size.

  Further, the condensing position of the laser light largely depends on the installation accuracy of the optical component. Further, due to the expansion and contraction of the component due to thermal expansion, a deviation between the actual position of the optical component and the calculated position also occurs. For these reasons, it has been difficult to increase the accuracy of the laser beam condensing position in the entire scanning region in the main scanning direction.

  The present invention has been made in view of the above-described conventional example, and an object thereof is to provide a compact scanning optical device capable of changing the light beam condensing position at high speed with a small number of parts.

In order to achieve the above object, a scanning optical apparatus of the present invention comprises the following arrangement. That is, a scanning optical device including a collimating lens that collimates a light beam from a light source,
The collimating lens is formed of an electro-optic crystal, and the focal length of the collimating lens can be changed by applying an electric signal to the electro-optic crystal via electrodes arranged on the inside and side surfaces of the collimating lens. .

Alternatively, an optical lens formed of an electro-optic crystal whose refractive index changes according to an applied voltage, and electrodes are arranged on two opposing side surfaces and inside,
Detection means for detecting a spot size of the scanning light transmitted through the optical lens at a predetermined detection position;
A distribution of a voltage applied to the electrode in accordance with a scanning position in one scan by the scanning light and a reference voltage to be applied to the electrode in a state where the scanning light is focused at the detection point are determined in advance. Storage means for storing;
An applied voltage to the electrode is changed to determine an applied voltage at which a spot size of scanning light transmitted through the optical lens at the detection position is minimized, and a difference between the applied voltage and the reference voltage is determined as a scanning position. And a lens control unit that applies a corrected applied voltage added as an offset to the distribution of the applied voltage according to the above to the electrode to control the light condensing property of the optical lens.

  According to the present invention, by applying a voltage to each electrode arranged outside and inside a collimating lens or cylinder lens formed of an electro-optic crystal, the condensing property of a light beam transmitted through the lens can be changed to each electrode. Can be changed at high speed. Thereby, the condensing position of the light beam to be deflected and scanned can be displaced at high speed, and high accuracy of the condensing position of the light beam can be realized in the entire scanning region. As a result, it is possible to improve the writing quality on the surface to be scanned such as the photoconductor.

  Further, since the collimating lens or the cylinder lens itself is formed of an electro-optic crystal, it is not necessary to add a new part as in the prior art. For this reason, the number of parts can be reduced, and the apparatus can be made compact and low in cost.

  Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the drawings. However, the constituent elements described in this embodiment are merely examples, and are not intended to limit the scope of the present invention only to them.

<Outline configuration>
FIG. 1 is a schematic configuration diagram of a scanning optical device 100 as an embodiment of the present invention. The scanning optical device 100 is built in, for example, an electrophotographic printer or copier, and is used to optically depict an image corresponding to image data by scanning a light beam on an object such as a photoreceptor. Used. In addition to this, other application examples are conceivable, for example, a mechanism for changing the light beam in the sub-scanning direction is used as a display device.

FIG. 2 is a perspective view showing an example of a collimating lens formed of an electro-optic crystal such as a KTN crystal. KTN is, for example, potassium tantalate niobate represented by KTaNbO ₃ and is generally represented as KTa _1-x Nb _x O ₃ ). FIG. 3 is a perspective view of a collimating lens of another shape which is also formed of an electro-optic crystal.

  Schematically, the scanning optical device 100 includes a semiconductor laser 1 as a laser light source, a collimating lens 5, an optical aperture 10, a cylinder lens 12, a deflector 13 such as a polygon mirror, and scanning lenses 15a and 15b in this order. The photoconductor 18 is scanned on the surface. Further, a folding mirror 24 is provided at a position deviated from the photosensitive member 18 and scanned by a laser beam, and a BD sensor 25 and a beam focusing sensor 26 for detecting the reflected light are provided. The BD sensor 25 only needs to detect the irradiation itself with the laser light. In contrast, the beam focusing sensor 26 is configured to be able to measure the spot diameter of the irradiated laser light. By measuring the spot diameter while changing the focal length of the collimating lens 5, that is, the focusing property of the light beam, the focusing property of the light beam is detected.

  Next, the configuration of the apparatus will be described following the optical path of a laser beam (more generally, a light beam). The light beam 2 from the semiconductor laser 1 is collimated by the collimator lens 5, shaped by the optical aperture 10, and incident on the cylinder lens 12. The deflector 13 is a rotating polygon mirror disposed in the vicinity of the beam waist of the light beam that is narrowed and emitted from the cylinder lens 12. The polygon mirror is rotationally driven to deflect and scan the light beam in the main scanning direction. In addition to the polygon mirror, for example, a vibrating mirror that vibrates in a range of a certain angle around the axis can be used as the deflector 13, and an optical system for performing line scanning with a light beam can also be used as the deflector 13. .

  The scanning lenses 15a and 15b have different focal lengths in the main scanning direction and the sub-scanning direction, and are used to form an image of the light beam deflected by the deflector 13 on the surface of the photosensitive member 18. The scanning lenses 15a and 15b are arranged so that the reflecting surface of the deflector 13 and the surface of the photosensitive member 18 are almost conjugate in terms of geometrical optics in the sub-scanning direction. Line misalignment can be prevented. When the oscillating mirror is used as the deflector 13, there is only one reflecting surface. Therefore, if the initial adjustment is accurately performed, the optical system for preventing the positional deviation of the scanning line due to the surface tilt is provided. It is unnecessary. Further, when the photosensitive member 18 is scanned with the light beam modulated by the image signal, an f-θ lens may be used as an optical system for making the scanning speed on the photosensitive member 18 constant.

  The light beam focused by the scanning lenses 15a and 15b or a part thereof is reflected by the folding mirror 24 on the scanning line, and irradiates a BD sensor (beam detect sensor) 25 which is an example of a light detection means. At the timing when the BD sensor 25 detects the light beam, a horizontal synchronization signal (BD signal) serving as a writing reference in the main scanning direction is generated. An image signal for one line is output from the image processing unit based on the horizontal synchronization signal. Further, the light beam reflected by the folding mirror 24 is also collected on the beam convergence sensor 26, and the convergence of the light beam is detected. As described above, the focusability is measured by a specific detection point (detection position), for example, the spot size of the light beam on the beam focusability sensor 26. The detection signal of the beam convergence sensor 26 is input to the correction unit 52 to determine the beam waist position.

  It is desirable to irradiate the photoconductor 18 so that the light beam is most converged on the surface of the photoconductor 18 under all use environment conditions. That is, the condition for forming an electrostatic latent image on the photoconductor 18 with high accuracy is that the beam waist, which is the most focused position of the light beam, is irradiated so as to substantially coincide with the surface of the photoconductor 18. Become. This leads to ensuring the print quality of electrophotography without degrading the image quality in the application of the scanning optical device to a printer or a copying machine.

  The input unit 61 outputs a beam waist position for each one-line scanning image height at the time of initial assembly, which will be described later, to the correction unit 52. The input unit 61 is, for example, a barcode reader that reads a barcode and inputs data, or an operation unit that is operated by a user to input various data. The operator inputs the beam waist position for each one-line scanning image height at the time of initial assembly or its index value from the input unit 61. It is desirable that the value once entered is saved and used as needed. Alternatively, the beam waist position for each one-line scanning image height at the time of initial assembly or its index value may be stored in a storage medium such as an EEPROM. For example, a value measured at the time of manufacture is used as the beam waist position for each one-line scanning image height at the time of initial assembly or its index value.

  The correction unit 52 generates a BD mask signal 301 in synchronization with the BD signal 201 input from the BD sensor 25 and outputs the BD mask signal 301 to the laser drive control unit 54. Further, the correction unit 52 outputs beam waist position data 203 corresponding to the light beam scanning position (one-line scanning image height) on the photosensitive member 18 to the control power source 32. The beam waist position data 203 is data serving as an index value indicating the beam waist position, and corresponds to displacement information described later. The displacement information is a row of in-focus positions of the light beam in the optical system of the scanning optical device. The displacement information measured in advance is stored in the memory 31.

  The laser drive control unit 54 determines the current value of the drive (light emission) signal 204 of the semiconductor laser 1 based on the image signal 202 input from the image signal generation unit 53 in the image section where a latent image is formed on the photoconductor 18. Control drive time.

  The control power supply 32 applies an electrical signal corresponding to the beam waist position to the electrodes 6 to 8 in order to apply a voltage corresponding to the input beam waist position data 203 (displacement information) to the collimating lens 5. The beam waist position data indicating the beam waist position may be simply referred to as a beam waist position. Further, since it is data for correcting the beam waist position to be the surface of the photoconductor 18, it may be called correction data or a correction value. Since the applied electrical signal varies depending on the scanning position of the light beam, the BD signal 201 is sent from the correction unit 52 to the pixel for controlling the scanning position and the applied signal. A clock is input from the image signal generator 53. It is desirable that the control power supply 32 interpolates the beam waist position by linear interpolation or the like for positions other than the sample scanning position where the beam waist position is measured under its own control or according to the control of the correction unit 21.

  The light beam emitted from the semiconductor laser 1 in this manner is converted into substantially parallel light by the collimating lens 5 and the optical aperture 10 and then enters the rotary polygon mirror 13 with a predetermined beam diameter. The image height is the position on the photoconductor in the main scanning direction. The image height is 0 at the center of the photoconductor, and the position toward the end along the main scanning direction from 0 is plus and minus. It is a representation. In this embodiment, this is also called a scanning position.

<Collimating lens>
FIG. 2 is a perspective view of the collimating lens 5 which is a feature of the invention according to this embodiment. The collimating lens 5 is formed of an electro-optic crystal, and is configured so that its focal length can be changed according to the voltage applied to the electrodes provided inside and on the side. The collimating lens 5 has a quadrangular columnar main body 5a and a spherical surface portion 5b disposed on the distal end side (optical diaphragm 10 side) of the main body 5a. The collimating lens 5 is made of, for example, an electro-optic crystal such as a KTN crystal. KTN crystals can be handled in the same manner as ordinary optical glass, have good workability, and can easily ensure surface accuracy in cutting and polishing. The light transmittance of the KTN crystal shows an internal transmittance of 95% or more per meter from the laser wavelength of infrared to the entire visible light range, and birefringence is also small. Furthermore, the water absorption rate of the KTN crystal is less than that of ordinary glass, and is extremely small compared to a resin or the like. In addition, it is known that the internal refractive index of a KTN crystal changes when an electric field is applied to the inside. When electrodes are installed at both ends of the KTN crystal (voltage = V on one side and voltage = 0 on the other side) to generate an electric field inside, the refractive index is also affected by the distribution of the electric field inside It is known that the light travels while changing its direction.

  The present embodiment uses this phenomenon to change the light condensing property when transmitting a light beam. The electrodes of the collimating lens 5, which is a feature of the present embodiment, are disposed integrally with the lens inside and outside (side surface in this example) of the collimating lens 5 formed of a KTN crystal. Specifically, as shown in FIGS. 1 and 2, plate-like external electrodes 6 and 8 are arranged on two opposite sides of a quadrangular columnar body 5a of the collimator lens 5, and the plate is placed inside the body 5a. The internal electrode 7 is arranged in parallel with the external electrodes 6 and 8. A voltage is applied to the internal electrode 7 and the external electrodes 6 and 8 to generate an electric field, thereby changing the refractive index of the light beam transmitted through the inside. It is desirable that a common electrical signal is applied to the external electrodes 6 and 8. This is because the internal electric field distribution of the KTN crystal becomes plane symmetric with the internal electrode 7 as a plane of symmetry.

  Note that the direction in which the light beam condensing property is changed is the direction between the external electrodes 6 and 8 and the internal electrode 7. In the arrangement of the plate electrodes shown in FIGS. Only the beam condensing property can be changed. Here, among the light beams emitted by linearly polarized light, the direction of the electric vector of linearly polarized light should coincide with the direction of the electric field generated in the crystal, and the change in the light beam condensing property due to these changes. Happens. As a result, the light beam condensing property is changed by simply changing the light beam condensing property with the collimator lens 5 formed of the KTN crystal, and the light beam is condensed at a desired position. Is possible.

  The shape of the collimating lens is not particularly limited, and for example, as shown in FIG. 3, a collimating lens 50 in which spherical portions 50b are disposed on both sides in the axial direction of a cylindrical main body 50a may be employed. In this case, the internal electrode 16 disposed at the center of the collimating lens 50 is a rod-shaped electrode, and the external electrodes 17a and 17b disposed on the outer peripheral surface of the main body 50a are plate-shaped electrodes. A pair of external electrodes 17a and 17b are arranged facing each other in the radial direction of the main body 50a. A voltage is applied to the internal electrode 16 and the external electrodes 17a and 17b to generate an electric field, and the refractive index of the light beam transmitted through the inside is changed.

  In order to change the light beam condensing property in the sub-scanning direction, in FIG. 1, the plate electrodes 6, 7, and 8 are arranged not horizontally with respect to the paper surface but with a 90 ° phase shift. And the direction of the electric vector of the light beam should be horizontal. However, in this case, a condensing action on the sub-scanning side is generated in the deflector 13 which is a polygon mirror, and the deflector 13 and the photosensitive member 18 are in a conjugate relationship and act to maintain surface tilt correction. For this reason, changing the light condensing property of the light beam in the sub-scanning direction performs both the function of maintaining surface tilt correction and the effect of changing the light condensing property of the light beam on the photoconductor 18 in the sub-scanning direction. It becomes. Therefore, in actuality, it is necessary to consider both of these actions, and the order of priority may be determined according to purpose and importance.

  Further, in the actual operation of the scanning optical apparatus, the determination of the focus shift (beam waist position shift) is made according to the measurement result of the spot size (or spot size) of the light beam on the photoconductor 18. At this time, if the spot size is relatively large and there is a sufficient writing depth, an electric signal may not be applied to the electrode of the KTN crystal. As described above, usually, the focus correction action by applying the electric signal is hardly performed, and the electric signal may be applied after the temperature reaches the set threshold value when the temperature change is large. In this way, unnecessary electric energy consumption can be avoided.

  Next, the beam convergence sensor 26 will be described. An example of the beam focusing sensor 26 is a configuration in which slit-shaped diaphragms are arranged in front of a photodiode that is an optical sensor. When the light beam passes through the stop, the amplitude of the output signal of the photodiode changes depending on the size of the spot, and the amplitude increases as the spot size decreases. With such a beam focusing sensor 26, it is easy to confirm the beam waist position.

  On the other hand, the spot size of the light beam on the photosensitive member 18 is relatively small, and in order to achieve a high quality image, there are cases where the size of the spot size within one scanning line is concerned. In this case, the electrical signal to the electrode of the collimator lens 5 formed of the KTN crystal is changed at high speed based on the synchronization detection signal for scanning, and as a result, the focus position of the light beam on the photoconductor 18 is changed in small increments. It is possible. In the present embodiment, a case will be described in which control is performed to change the focus position of the light beam on the photoconductor 18 within the scanning line in small increments as in the latter case. There is no difference between the former control and the latter control with respect to the present invention. As the synchronization detection signal, for example, a horizontal synchronization signal generated based on the BD signal, a pixel clock that is a synchronization signal of image data, or the like is used.

  The change of the light condensing property of the collimating lens 5 formed of the KTN crystal can be performed in a short time because the response speed of the KTN crystal is high. Therefore, first, with respect to the image height that changes due to the influence of the optical system such as the scanning lenses 15a and 15b, the field curvature for each image height as the sample point is acquired in advance using a jig at the time of assembling or the like. Stored in the memory 31 of the unit 52. The curvature of field is indicated by displacement information indicating a shift of the focus position at each position of the photoconductor with respect to the reference when the focus position at a certain reference position is used as a reference. For example, when the apparatus is manufactured, a beam in which the spot size is minimized by moving the sensor at the sampling position in a direction perpendicular to the surface of the photoconductor with the voltage applied to the collimating lens 5 being zero. It is obtained by detecting the waist position. In this case, the beam waist position itself can be detected. The displacement information created by this method is stored in the memory 31.

  Alternatively, the beam waist position is determined by measuring the spot size of the light beam with a beam focusing sensor provided at a position corresponding to the surface of the photosensitive member while changing the focal length by changing the applied voltage to the collimating lens 5. You can also In this method, the applied voltage value when the spot size measured at a certain scanning position (image height) is minimized is a voltage value (ie, correction value) for moving the beam waist position to the photosensitive member surface at the scanning position. ) Accordingly, the correction value for each sample point at which the displacement information is measured may be the displacement information itself. However, in the present embodiment, the correction value indicating the voltage applied to the mate lens is temporarily converted into the distance from the surface of the photoconductor 18 to the beam waist position and stored in the memory 31. This is because the relationship between the voltage applied to the collimating lens 5 and the focal length of the collimating lens 5 is not always linear. If this relationship is linear or can be regarded as linear, storing the correction value as the displacement information itself helps to simplify the process. In the present embodiment, the correction value at the position of the beam convergence sensor 26 is particularly referred to as a reference value.

  The light condensing property may be expressed by other terms in the present embodiment, such as a beam waist position, a focus, and a focal length. However, as far as this embodiment is concerned, these terms refer to essentially the same thing.

  Then, in synchronization with the BD signal 201 output from the BD sensor 25 and a pixel clock (not shown), the collimating lens 5 is adapted to correct the focus shift according to the displacement information according to the scanning position on the photosensitive member. Control the voltage applied to the electrode. In this way, fine focusing can be performed over the entire scanning area. When the displacement information indicates the beam waist position, a voltage to be applied to the electrode of the collimating lens 5 to be moved to the surface of the photoconductor 18 is obtained based on the beam waist position, and this is applied to the electrode of the collimating lens 5. The The voltage is changed in accordance with the scanning position in one scanning line, the field curvature is corrected, and the beam waist position is corrected on a straight line on the photoconductor 18.

<Focus adjustment operation>
Next, the focus adjustment operation will be described in detail with reference to FIGS. FIG. 4 is a flowchart for explaining the focus adjustment operation. This flowchart is executed by, for example, a processor incorporated in the correction unit 52.

  In FIG. 4, first, as the focus position, a position where the output signal amplitude of the beam focusing sensor 26 is maximum (that is, a beam waist position where the spot size is minimum) is searched. Therefore, the focus state is examined prior to scanning of the photosensitive member 18 by the scanning optical device. That is, before exposing the photoreceptor 18, the BD sensor 25 and the beam focusing sensor 26 are scanned with the laser beam, and the applied voltage to the electrodes 6, 7, and 8 of the collimator lens 5 is stepwise for each scanning. To change the focal position. In this way, the current beam waist position is measured at a specific image height at the present time (in this example, the position of the beam focusing sensor 26). Specifically, the voltage applied to the electrodes 5, 6 and 7 when the output signal amplitude of the beam focusing sensor 26 shows the maximum value is converted into a value indicating the beam waist position. This is determined from the output of the beam focusing sensor 26 (step S1). For this purpose, a correspondence table between the applied voltage to the electrode of the collimating lens 5 and the change in focal length is prepared in advance and stored in the memory 31 or the like when the apparatus is created. And the magnitude | size of the change of the focal distance corresponding to the measured voltage is preserve | saved as measurement information which shows the beam waist position in a measurement time. In order to realize Step S1, the beam convergence sensor 26 is provided at a position on the surface of the photoconductor when the photoconductor 18 is extended in the main scanning direction. When the reflection mirror 24 is used, the reflection mirror 24 is provided at a position where the surface of the extended photoreceptor is equal to a distance on the optical path.

  Next, the displacement information, that is, the beam waist position data (a plurality of image heights) within one line scanning, which is collected during the assembly adjustment of the scanning optical device, is taken out from the memory 31 included in the correction unit 52. A difference between the beam waist position corresponding to the specific image height (that is, the beam focusing sensor position) confirmed in step S1 and the beam waist position measured in step S1 included in the extracted beam waist position data is calculated. The difference is set as an offset value (offset amount). The calculated offset value is temporarily stored (step S2).

  The memory 31 stores beam waist position data (displacement information) of (a plurality of image heights) within one line scan, which is collected as displacement information when the scanning optical apparatus is assembled and adjusted. These data are calculated by measuring the beam diameter for each image height and depth of the scanning beam and interpolating the data from the results. These occur only due to the optical system (component system). This data is collected by an assembly adjustment tool as described above.

  A value obtained by adding the offset value stored in the memory 31 to the beam waist position data at each scanning position (a plurality of image heights) in the above-described one-line scanning becomes new displacement information after correction. That is, the new displacement information after correction is the latest value of the beam waist position in one line in the electrophotographic apparatus. This is called correction data (step S3). The corrected data, that is, the corrected displacement information is overwritten and stored in the corrected displacement information in this example. The displacement information before correction and the offset value may be stored separately.

  In step S4, displacement information is obtained as a voltage to be applied to the collimating lens at each scanning position. The beam waist position can be made coincident with the photosensitive surface over the entire scanning area on the photosensitive member. When the displacement information is an index value indicating the deviation of the beam waist position, it is necessary to convert the index value into a voltage applied to the collimating lens. Here, a correspondence relationship between the voltage applied to the electrodes 6, 7 and 8 of the collimating lens 5 and the focus change amount in the vicinity of the photosensitive member surface position is measured in advance, and a table showing the relationship is created. Based on the table, an applied voltage corresponding to the above-described correction data for each image height (displacement information after correction) is applied to the collimator lens 5 to perform an actual image forming operation (the applied voltage changes for each image height). (Step S4). Thus, at the time of image formation, the corrected applied voltage is applied to the electrode of the collimating lens.

  All of these processes are performed in the electrophotographic apparatus. However, when image data is exposed and written on the photoconductor 18, an almost optimum spot is found on the entire surface of the photoconductor 18 based on the signal of the BD sensor 25. Can be done.

  7 and 8 are schematic diagrams of correction in the present embodiment. FIG. 7 is a schematic diagram showing a locus 701 of the beam waist position of the light beam that scans the photosensitive member surface 702. The displacement information is information representing the locus 701. In FIG. 7, the upper side of the drawing is the outside of the photoconductor 18, and the lower side is the inside of the photoconductor 18. Since the light beam does not pass through the photoreceptor 18, the locus 701 entering the interior of the photoreceptor 18 is not the position where the light beam is actually focused, but the position where the light beam 18 should be focused without the photoreceptor 18. Shows the line. As in the example shown in FIG. 7, the scanning position where the beam waist position is just on the surface of the photoconductor 18 is very limited, and the beam waist position is shifted to the front and back of the surface of the photoconductor in most of the scanning area. Therefore, when manufacturing the scanning optical apparatus according to this embodiment such as a copying machine, the deviation of the beam waist position is measured at the position of the surface of the photoconductor 18 and the displacement information is determined. The measurement is performed at the sample positions 711 to 716 and the beam focusing sensor position 710 on the surface of the photoconductor 18. To correct the focus shift, the voltage applied to the collimating lens 5 is changed, and a voltage that minimizes the spot diameter of the light beam is used as a correction value. The correction values including the correction values 1 to 6 are stored as displacement information in association with each sample point, and stored in the memory 31 as a reference value in association with the beam convergence sensor position 710. At the time of scanning with the light beam, the correction value stored in the memory 31 is read in synchronization with the main scanning position, and a voltage corresponding to the correction value is applied to the electrode of the collimating lens 716. However, when linear interpolation of correction values is performed, correction values at two sample points sandwiching a certain scanning position are necessary, and therefore, two correction values sandwiching them are read and corrected in synchronization with main scanning. As a result, the beam waist position substantially becomes the surface of the photoconductor 18 through one main scanning.

  FIG. 8 is a diagram showing how the correction values obtained as shown in FIG. 7 are further corrected. The correction value obtained at the time of manufacturing the device as shown in FIG. 7 may not be appropriate over time. Therefore, it is necessary to correct the correction value itself, such as a predetermined time interval. A dotted line locus 801 in FIG. 8 indicates a locus of the beam waist position which is shifted due to a change with time, for example. That is. The correction data of the displacement information obtained by the procedure of FIG. 4 should represent the locus 801. In this case, the voltage applied to the collimating lens 5 is changed at the beam focusing sensor position 710, and a voltage that minimizes the spot diameter of the light beam on the surface of the photoconductor 18 is applied to the collimating lens. As a result of the correction, since the beam waist position locus 701 has shifted to the beam waist position locus 801 with time, the beam waist position that has been corrected to the position shifted from the surface of the photoreceptor 18 is changed to the surface of the photoreceptor 18. It is corrected.

  As described above, in this embodiment, by applying a voltage to the external electrodes 6 and 8 and the internal electrode 7 of the collimator lens 5 formed of a KTN crystal, a collection of light beams transmitted through the collimator lens 5 is performed. The light property can be changed between the electrodes at high speed. Thereby, the condensing position of the light beam to be deflected and scanned can be displaced at high speed, and high accuracy of the condensing position of the light beam can be realized in the entire scanning region. As a result, it is possible to improve the writing quality of the photosensitive member 18 on the surface to be scanned.

  Further, since the collimating lens 5 itself is formed of a KTN crystal, it is not necessary to add new parts as in the conventional case. For this reason, the number of parts can be reduced, and the apparatus can be made compact and low in cost.

  Since only one beam focusing sensor 26 is required, the number of parts and the processing procedure can be simplified in this respect.

[Modification]
The voltage applied to the electrode of the collimator lens 5 is changed and the beam waist position is moved by the beam convergence sensor located at the position corresponding to the surface of the photosensitive member, and the applied voltage when focused at the sensor position is changed as displacement information. Can also be measured. In this case, the displacement information represents the voltage itself applied to the collimating lens in order to move the beam waist position to the photosensitive member surface at the sample position. Therefore, at the time of image formation, the beam waist position can be corrected by reading the displacement information and applying a voltage corresponding to the scanning position of the main scanning to the collimating lens.

[Second Embodiment]
Next, with reference to FIG. 6, a scanning optical apparatus according to an embodiment of the second aspect of the present invention will be described. Note that the description of the same parts as those in the first embodiment is omitted. A scanning optical apparatus according to an embodiment of the second aspect of the present invention replaces the cylinder lens 12 of FIG. 1 with the cylinder lens 27 of FIG. 6 and, like the embodiment of the first aspect, a collimating lens. Instead of 5, the cylinder lens 27 is formed of a KTN crystal.

  The cylinder lens 27 has a quadrangular columnar main body 27a and a convex curved surface portion 27b disposed on the distal end side (optical diaphragm 10 side) of the main body 27a. Further, plate-like external electrodes 28a and 28c are arranged on two mutually opposing surfaces of the quadrangular columnar main body 27a of the cylindrical lens 27, and the plate-like internal electrode 28b is parallel to the external electrodes 28a and 28c inside the main body 27a. To place. Then, a voltage is applied to the internal electrode 28b and the external electrodes 28a and 28c to generate an electric field, and the refractive index of the light beam transmitted through the inside is changed. About another structure and an effect, it is the same as that of embodiment of the said 1st aspect.

It is a figure for demonstrating the scanning optical apparatus which is embodiment of the 1st aspect of this invention. It is a perspective view for demonstrating the collimating lens formed with the KTN crystal | crystallization. It is a perspective view for demonstrating the collimating lens of the other shape formed with the KTN crystal | crystallization. FIG. 9 is a flowchart for explaining a focus adjustment operation. It is a perspective view for demonstrating the scanning optical apparatus which is embodiment of the 2nd aspect of this invention. It is explanatory drawing for demonstrating the conventional scanning optical apparatus. It is a schematic diagram which shows a mode that a beam waist position is correct | amended with the scanning optical apparatus which concerns on embodiment. It is a schematic diagram which shows a mode that the correction value of a beam waist position is further corrected with the scanning optical apparatus which concerns on embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Semiconductor laser 2 Light beam 5 Collimating lens 6 External electrode 7 Internal electrode 8 External electrode 10 Optical aperture 12 Cylinder lens 13 Deflector 15a Scan lens 15b Scan lens 16 Internal electrode 17 External electrode 18 Photoconductor 24 Bending mirror 25 BD sensor 26 Beam Convergence sensor 27 Cylinder lens 28a External electrode 28b Internal electrode 28c External electrode

Claims (8)

A scanning optical device including a collimating lens that collimates a light beam from a light source,
The collimating lens is formed of an electro-optic crystal, and the focal length of the collimating lens can be changed by applying an electric signal to the electro-optic crystal via electrodes arranged on the inside and side surfaces of the collimating lens. A scanning optical device. A scanning optical device including a cylinder lens that makes a light beam incident on a deflector,
The cylinder lens is formed of an electro-optic crystal, and the focal length of the cylinder lens can be changed by applying an electric signal to the electro-optic crystal via electrodes disposed on the inside and side surfaces of the cylinder lens. A scanning optical device.   3. The scanning optical apparatus according to claim 1, wherein the electro-optic crystal is a KTN (potassium tantalate niobate) crystal.   4. The scanning optical device according to claim 1, wherein the electrode disposed on the side surface is a plate-like electrode, and the electrode disposed inside is a plate-like electrode or a rod-like electrode. 5. Detection means for detecting the convergence of the light beam on the scanned surface;
The scanning optical apparatus according to claim 1, further comprising a control unit that controls a voltage of an electric signal applied to the electrode based on a detection signal from the detection unit.   The scanning optical apparatus according to claim 5, wherein the control unit changes an electric signal applied to the electrode based on a synchronization detection signal for scanning.   The scanning optical apparatus according to claim 1, wherein the electrodes are arranged so that the light beam condensing property changes at least in a main scanning direction or a sub-scanning direction. Data indicating the distribution of the focus position according to the scan position in one scan by the scan light and the focus position of the scan light at the detection point in a state where no voltage is applied to the electrode is stored. A storage means,
The detection means detects a spot size of scanning light transmitted through the collimating lens or cylinder lens at a predetermined detection position,
The control means determines the applied voltage at which the spot size of the scanning light transmitted through the collimating lens or the cylinder lens at the detection position is minimized by changing the applied voltage to the electrode, and based on the applied voltage, A current focusing position of scanning light at the detection point in a state where no voltage is applied to the electrode is determined, and the difference between the focusing position and the focusing position stored in the storage means is determined as the storage means. Correction means for correcting the distribution of the focus position by adding to each focus position included in the distribution of the focus position stored in
Wherein a voltage based on the distribution of corrected said focus position is applied to the electrode by the correction means, according to claim, characterized in that it comprises a manual step of moving the focus position of the light beam on the photoreceptor surface 5 The scanning optical device according to 1.

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