CN205335611U - Outer light path compensated regulated device reaches by its laser instrument that constitutes - Google Patents
Outer light path compensated regulated device reaches by its laser instrument that constitutes Download PDFInfo
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- CN205335611U CN205335611U CN201521081008.1U CN201521081008U CN205335611U CN 205335611 U CN205335611 U CN 205335611U CN 201521081008 U CN201521081008 U CN 201521081008U CN 205335611 U CN205335611 U CN 205335611U
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- turning mirror
- connecting rod
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Abstract
The utility model provides an outer light path compensated regulated device reaches by its laser instrument that constitutes, including little displacement driving ware of turn mirror, piezoceramics and rotatable base, through changing plus in the size of little displacement driving ware voltage to drive the rotation of turn mirror, realize the automatic compensation of light path. On the basis, the utility model provides a based on the laser instrument of outer light path compensated regulated device, including laser instrument, outer light path compensated regulated device, light path shaping module, focus spherical mirror and feedback control module. Feedback control module detects output laser to through light path compensated regulated system, through the deflection angle of adjusting the turn mirror, transfer the light beam of skew to quadrature position, can guarantee laser instrument laser output power's under each duty cycle the stability and the stability of mode, improve the overall stability of laser instrument, and then guarantee radio frequency plate strip laser instrument system of processing's high -efficient stable work, guarantee to be improved machining efficiency by the processingquality of processing device.
Description
Technical field
This utility model belongs to laser technology field, designs and develops a kind of based on high power RF CO slab2The turning mirror of laser instrument regulates the compensation system of shaping light path skew, to radio frequency CO slab2The orthopedic systems light path skew that laser chamber mirror thermal distoftion causes compensates。
Background technology
High-power strip CO2Laser beam quality is high, and structure is closely small and exquisite, it is not necessary to gas heat-exchanger, and optical loss is low, and heat stability is very high, and gas consumption is low, it does not have gas flows, and resonator cavity optics will not pollute, beam quality quality factor M2Up to 1.2, represent current CO2The developing direction of laser instrument。Laser instrument adopt non-surely-the design structure of waveguide hybrid chamber, this resonator cavity is made up of outgoing mirror, reflecting mirror and electric discharge planar waveguide。Laser instrument near field output facula is approximately the straight line that thickness is uneven in the direction being parallel to electrode plane；In far field, light beam is very big at the directional divergence being perpendicular to electrode plane, it is necessary to carries out outer light path beam shaping and could realize commercial Application。
High power RF CO slab2The chamber mirror thermal distoftion of laser instrument can cause that light beam is unstable in beam shaping system。The secondary lobe of initial output beam can not be effectively eliminated by beam shaping system spatial filter, RF board bar CO2There is secondary lobe in output beam after laser shaping, and output power stability is affected。Light spot shape is also no longer desirable subcircular basic mode Gauss distribution simultaneously, and beam quality does not improve。The instability of output and beam quality can not get improving the quality having had a strong impact on Laser Processing。Additionally, the transverse direction imbalance of spatial filter again means that the increase of the loss of output, if spatial filter laterally imbalance is serious, it will make the energy of center main peak also be eliminated。Owing to it is Gauss distribution, imbalance displacement is more big, and the power of loss will sharply increase。
Existing adjustment chamber mirror method is lacked of proper care for light path, places electric-heating-wire-heating at the back side of chamber mirror, and its deformation direction is identical with the deformation direction of chamber mirror reflecting surface, and identical deformation is made at the pull chamber mirror back side, reaches to compensate the purpose regulated。The shortcoming of this compensation control method: one: the response time of heating is longer, the advantage regulated in real time is inconspicuous；Its two: computer heating control difficulty is relatively big, can affect and compensate the effect regulated。Existing spatial filter method, by regulating spatial filter position, mates light beam focal line and spatial filter slit。The method real-time is relatively strong, but degree of regulation is not high, wants to obtain high accuracy and regulates need to use to redesign and select new micrometric displacement localizer, redesign adjustment system。Additionally, the optical axis of skew is not carried out any correction by the method, being adjusted merely by spatial filter stop position to adapt to the imbalance of light path, its beam-pointing will be deteriorated, and practicality is not strong。
Summary of the invention
Disadvantages described above or Improvement requirement for prior art, this utility model provides a kind of outer optical path compensation regulated based on turning mirror and regulates device, its object is to the light beam of skew is adjusted to normal place, make laser instrument output mode and power reach the level before offseting with light path, thus solve high power RF CO slab2The chamber mirror thermal distoftion of laser instrument causes the technical problem that light beam is unstable in beam shaping system。
For achieving the above object, according to an aspect of the present utility model, it is provided that a kind of outer optical path compensation regulated based on turning mirror regulates device。Realize turning mirror by micro-displacement driver to regulate around the rotation of the central axis of rotatable pedestal。To change changing light beam position of beam convergence focal line after the launching position focused on coquille, the reflection of line focus coquille when turning mirror rotates。When beam convergence focal line Regressive filter stop position again, the laser power of laser instrument output reaches maximum, and the secondary lobe simultaneously caused due to light path skew in hot spot is also filtered out by spatial filter。Realize laser instrument output mode and power reaches the purpose of the level before offseting with light path。
The technical solution of the utility model is:
A kind of outer optical path compensation regulates device, and it includes turning mirror, micro-displacement driver and rotatable pedestal, it is characterised in that:
Described turning mirror is at right angles triangular prism shaped, is fixed on described rotatable pedestal by self bottom surface, and triangular prism shaped inclined-plane is reflecting surface, for will be perpendicular to the incident laser direction of fixing bottom surface, turning to 90 degree, changing into and be parallel to direction, fixing bottom surface；By the rotation of described rotatable pedestal, the deflection angle of turning mirror described in scalable；
Described micro-displacement driver is Piezoelectric, and its one end is fixed, and the other end is flexibly connected by connecting rod circular shaft and second connecting rod by first connecting rod；The other end of second connecting rod is connected to another bottom surface of turning mirror, rotates fixing by fixing circular shaft in the middle part of second connecting rod；First connecting rod move horizontally the rotation that second connecting rod can be driven relative to fixing circular shaft；By changing the size being added on micro-displacement driver voltage, change the horizontal displacement of first connecting rod, drive second connecting rod two ends to rotate around circular shaft, thus driving the turning mirror that its other end fixes connection to rotate。
Further, described outer optical path compensation regulates in device, described rotatable pedestal includes metal derby, groups of springs, indent cup dolly and matched outer convexity handle, metal derby is used for fixing described turning mirror, outer convexity handle one end is fixing with metal derby to be connected, and the other end has a round tube hole, by base circular shaft, making evagination disc rotate tangent cooperation with the indent disc of indent cup dolly, outer convexity handle can rotate with base circular shaft for axle center relative to indent cup dolly。
Further, described outer optical path compensation regulates in device, and the spring that described groups of springs is laid by three root architecture size trianglees identical with mechanics parameter, rectangular forms。
Regulate device based on described outer optical path compensation, the utility model proposes a kind of laser instrument, regulate device, light path Shaping Module including laser instrument, outer optical path compensation, focus on coquille and feedback control module, it is characterised in that:
Outer optical path compensation regulates the turning mirror alignment laser instrument of device and goes out optical window, after being reflected by laser instrument, incides on focusing coquille；
Described focusing coquille and turning mirror are positioned at same light path, and its focal point is the spatial filter of light path Shaping Module；The non-steady direction of output beam is focused by laser line focus coquille, and after the wave guide direction of output beam is collimated, sends into light path Shaping Module；
Described light path Shaping Module includes spatial filter, cylindrical mirror, exports coquille, and three is on same optical axis；Before its central column face mirror is positioned at output coquille, after spatial filter；For eliminating the secondary lobe in output beam, improve the beam quality in the non-steady direction of output beam；
The sensor of feedback control module is arranged in Output of laser light path, and its outfan regulates device with outer optical path compensation and is connected, and is used for controlling turning mirror action；Feedback control module is by the shoot laser of sensor detection light path Shaping Module, change according to the Output optical power detected, calculate the voltage needing to be carried on micro-displacement driver, then the signal of telecommunication is passed to outer optical path compensation and regulates device, control micro-displacement driver and produce corresponding displacement, so that turning mirror deflection angle, reach the purpose being automatically adjusted。
In general, by the contemplated above technical scheme of this utility model compared with prior art, owing to only needing to regulate turning mirror deflection angle, do not change the position of the devices such as the Primary Component coquille of light beam shaping module, spatial filter, cylindrical mirror, it is possible to obtain following beneficial effect: the outer optical path compensation that 1, the utility model proposes regulates device can regulate RF board bar CO with higher precision2Because of orthopedic systems light path offset problem that chamber mirror thermal distoftion causes in laser works process；2, ensure laser instrument stablizing of output and stablizing of pattern distribution under each dutycycle, improve the stability in the large of laser instrument；3, migration fine motion is being realized simultaneously, it is to avoid beam-pointing sex chromosome mosaicism；4, ensure the crudy of processed device, improve working (machining) efficiency。
Accompanying drawing explanation
Fig. 1 is that outer optical path compensation regulates device schematic diagram；
Fig. 2 is based on outer optical path compensation and regulates the laser instrument principle schematic of device；
Fig. 3 is based on outer optical path compensation and regulates the laser instrument global design schematic block diagram of device；
Fig. 4 is that light path does not offset side view；
Fig. 5 is that light path does not offset top view；
Fig. 6 is the side view of light path offset；
Fig. 7 is the top view of light path offset；
Fig. 8 is light path side view after outer optical path compensation device regulates；
Fig. 9 is light path top view after outer optical path compensation device regulates；
Figure 10 is laser output power comparison diagram before and after regulating；
In figure: 1-laser instrument, the outer optical path compensation device of 2-, 3-light path Shaping Module, 4-focuses on coquille, 5-spatial filter, 6-cylindrical mirror, 7-exports coquille, 8-feedback control module, 9-micro-displacement driver, 10-first connecting rod, 11-second connecting rod, 12-turning mirror, the rotatable pedestal of 13-, 14-metal derby, 15-groups of springs, the outer convexity handle of 16-, 17-indent cup dolly, 18-base circular shaft, 19-connecting rod circular shaft, 20-fixes circular shaft。
Detailed description of the invention
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, this utility model is further elaborated。Should be appreciated that specific embodiment described herein is only in order to explain this utility model, be not used to limit this utility model。As long as just can be mutually combined additionally, technical characteristic involved in each embodiment of this utility model disclosed below does not constitute conflict each other。
As Fig. 1 shows, the outer optical path compensation of the present embodiment regulates device and is mainly made up of turning mirror 12, piezoelectric micro-displacement actuator 9 and rotatable pedestal 13。Rotatable pedestal 13 includes metal derby 14, groups of springs 15, indent cup dolly 17 and the outer convexity handle 16 matched with it, outer convexity handle 16 one end is fixing with metal derby 14 to be connected, convexity one end has a round tube hole, by base circular shaft 18 and the tangent placement of indent cup dolly 17, outer convexity handle 16 can rotate relative to indent cup dolly 17 with base circular shaft 18 for axle center。Spring is separately fixed at the right angle of square metal block, and piezoelectric ceramics produces displacement, drivening rod, thus driving turning mirror movable, by the effect of spring, making turning mirror produce angle change, thus changing light path, reaching to adjust the purpose of light path。
Fig. 2 is shown in by system principle schematic diagram based on the laser instrument of outer optical path compensation adjustment device, and overall system design schematic block diagram is shown in Fig. 3；
Fig. 4-9 gives light path skew and regulates schematic diagram with compensating。
At Fig. 4, in 5, RF board bar CO2The outer light path light beam shaping module of laser instrument offsets without light path。Light beam is transferred to coquille after turning mirror reflects, focus at spatial filter place after coquille converges, the slit width of spatial filter is equal to main lobe width after light beam focusing, main lobe can be entirely through, secondary lobe is filtered by spatial filter, after light beam shaping module, laser instrument can obtain the distribution of better pattern, and beam quality is improved。In fig. 6 and 7, after non-steady waveguide cavity reflecting mirror generation thermal distoftion light path by the normal place shown in deflection graph 4,5。Light beam its focal position after mirror coquille focuses on will no longer overlap with the position of spatial filter。The main lobe of light beam some stopped by spatial filter, being attended by a part of secondary lobe can not be filtered by spatial filter simultaneously, enters into rear class light beam shaping module。Being blocked because of main lobe and have secondary lobe to pass through, the final Output of laser power of laser instrument will decline, and beam quality will be attended by secondary lobe。At Fig. 8, in 9, outer optical path compensation regulates device by regulating the deflection angle of turning mirror, and the light beam of skew is adjusted to normal place, and light beam main lobe will again all through spatial filter, secondary lobe will be filtered again simultaneously, and laser instrument output mode and power reach the level before offseting with light path。
The effect of feedback control circuit is feedback regulation, and its work process is that the luminous power first passing through detection output beam is to judge whether laser optical path offsets；Minimizing according to luminous power judges the size of light path side-play amount, calculates the magnitude of voltage needing to be carried on piezoelectric ceramics, is applied the voltage on piezoelectric ceramics by control circuit, thus changing the angle of turning mirror, by optical path adjusting to normal place。Control process carries out in real time, full-automatic regulation, it is ensured that the light path moment all in normal place, thus ensureing the stability of laser output power。
Regulate the effect of device for the outer optical path compensation of checking this utility model, carry out replication experiment and the turning mirror control method measure of merit of turning mirror control method。
1, set laser power, regulate the test of bucking voltage。Under specific laser power dutycycle, turning mirror is carried out full scale adjustment, adjustment voltage spaces is 0.1V, total voltage that regulates is 1.12V, observe and record the output of laser instrument under each adjustable range, contrast with the calibration power parameter of laser instrument under duty ratio corresponding, it is judged that the regulating effect of light path compensation system。Outer optical path compensation adjustable range and dutycycle linear proportional example relation, therefore only need to measure turning mirror under the highest use power regulates whether can meet regulatory demand。
When piezoelectric ceramics control voltage reaches 0.9V, the output peak power of 2KW laser instrument is 1843W, and this power is with laser instrument standard laser power 1811W under 90% dutycycle closely；After voltage is more than 0.9V, the output of laser instrument starts to reduce, and this illustrates that adjustable range is beyond the scope needing adjustment so that outer light path offset criteria position again。Therefore this utility model device can meet laser instrument in dutycycle is the regulatory demand under 90%。
2, setting compensation voltage, regulates laser power dutycycle。Selected 5%, 15%, 25%, 35%, 45%, 55%, 65%, 75% totally 8 experimental points, do not become adjustment system and be added without the output of testing laser device when outer optical path compensation regulates device adding cavity mirror misalignment respectively。Figure 10 is the comparison of front and back output, can under low duty ratio, outer optical path compensation regulates device to the contribution of laser output power inconspicuous, after power is more than 50%, the effect that outer optical path compensation regulates device is more and more obvious, and maximum work rate variance is about 100W。Laser instrument carry out outer optical path compensation adjustment before hot spot be substantially free of secondary lobe when dutycycle is 15%, be that 35%-75% all has secondary lobe in dutycycle, and the size of secondary lobe become larger；All occur without secondary lobe under each dutycycle after overcompensation regulates, the compensation to facular model that system well meets。
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present utility model; not in order to limit this utility model; all any amendment, equivalent replacement and improvement etc. made within spirit of the present utility model and principle, should be included within protection domain of the present utility model。
Claims (4)
1. outer optical path compensation regulates a device, and it includes turning mirror (12), micro-displacement driver (9) and rotatable pedestal (13), it is characterised in that:
Described turning mirror (12) is at right angles triangular prism shaped, it is fixed on described rotatable pedestal (13) by self bottom surface, triangular prism shaped inclined-plane is reflecting surface, for will be perpendicular to the incident laser direction of fixing bottom surface, turn to 90 degree, change into and be parallel to direction, fixing bottom surface；By the rotation of described rotatable pedestal (13), the deflection angle of turning mirror described in scalable (12)；
Described micro-displacement driver (9) is Piezoelectric, and its one end is fixed, and the other end is flexibly connected by connecting rod circular shaft (19) and second connecting rod (11) by first connecting rod (10)；The other end of second connecting rod (11) is connected to another bottom surface of turning mirror (12), and second connecting rod (11) middle part rotates fixing by fixing circular shaft (20)；First connecting rod (10) move horizontally the rotation that second connecting rod (11) can be driven relative to fixing circular shaft (20)；By changing the size being added to the upper voltage of micro-displacement driver (9), change the horizontal displacement of first connecting rod (10), second connecting rod (11) two ends are driven to rotate around fixing circular shaft (20), thus driving the turning mirror (12) that its other end fixes connection to rotate。
2. outer optical path compensation according to claim 1 regulates device, it is characterized in that, described rotatable pedestal (13) includes metal derby (14), groups of springs (15), indent cup dolly (17) and matched outer convexity handle (16), metal derby (14) is used for fixing described turning mirror (12), outer convexity handle (16) one end is fixing with metal derby (14) to be connected, the other end has a round tube hole, by base circular shaft (18), outer convexity handle (16) is made to rotate tangent cooperation with the indent disc of indent cup dolly (17), outer convexity handle (16) can rotate with base circular shaft (18) for axle center relative to indent cup dolly (17)。
3. outer optical path compensation according to claim 2 regulates device, it is characterised in that the spring that described groups of springs (15) is laid by three root architecture size trianglees identical with mechanics parameter, rectangular forms。
4. the laser instrument regulating device based on outer optical path compensation described in claim 1 or 2 or 3, regulate device (2), light path Shaping Module (3) including laser instrument (1), outer optical path compensation, focus on coquille (4) and feedback control module (8), it is characterised in that:
Outer optical path compensation regulates turning mirror alignment laser instrument (1) of device (2) and goes out optical window, after being reflected by laser instrument (1), incides in focusing coquille (4)；
Described focusing coquille (4) and turning mirror are positioned at same light path, and its focal point is the spatial filter (5) of light path Shaping Module；The non-steady direction of output beam is focused by laser line focus coquille (4), and after the wave guide direction of output beam is collimated, sends into light path Shaping Module (3)；
Described light path Shaping Module (3) includes spatial filter (5), cylindrical mirror (6), and output coquille (7), three is on same optical axis；Before its central column face mirror (6) is positioned at output coquille (7), after spatial filter (5)；For eliminating the secondary lobe in output beam, improve the beam quality in the non-steady direction of output beam；
The sensor of feedback control module (8) is arranged in Output of laser light path, and its outfan regulates device (2) with outer optical path compensation and is connected, and is used for controlling turning mirror action；Feedback control module (8) detects the shoot laser of light path Shaping Module (3) by sensor, change according to the Output optical power detected, calculate the voltage needing to be carried on micro-displacement driver (9), then the signal of telecommunication is passed to outer optical path compensation and regulates device (2), control micro-displacement driver (9) and produce corresponding displacement, so that turning mirror deflection angle, reach the purpose being automatically adjusted。
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| Application Number | Priority Date | Filing Date | Title |
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| CN201521081008.1U CN205335611U (en) | 2015-12-21 | 2015-12-21 | Outer light path compensated regulated device reaches by its laser instrument that constitutes |
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| CN201521081008.1U CN205335611U (en) | 2015-12-21 | 2015-12-21 | Outer light path compensated regulated device reaches by its laser instrument that constitutes |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105428966A (en) * | 2015-12-21 | 2016-03-23 | 华中科技大学 | External optical path compensation adjusting device and laser device formed thereby |
| CN106814463A (en) * | 2016-12-29 | 2017-06-09 | 华中科技大学 | One kind is applied to high-power RF CO slab2The Automatic adjusument spatial filter of laser |
| CN113206433A (en) * | 2021-04-30 | 2021-08-03 | 佛山帕科斯激光技术有限公司 | High-stability ultraviolet pulse laser based on self-feedback adjustment and laser generation method |
-
2015
- 2015-12-21 CN CN201521081008.1U patent/CN205335611U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105428966A (en) * | 2015-12-21 | 2016-03-23 | 华中科技大学 | External optical path compensation adjusting device and laser device formed thereby |
| CN106814463A (en) * | 2016-12-29 | 2017-06-09 | 华中科技大学 | One kind is applied to high-power RF CO slab2The Automatic adjusument spatial filter of laser |
| CN113206433A (en) * | 2021-04-30 | 2021-08-03 | 佛山帕科斯激光技术有限公司 | High-stability ultraviolet pulse laser based on self-feedback adjustment and laser generation method |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160622 Termination date: 20191221 |
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| CF01 | Termination of patent right due to non-payment of annual fee |