CN108227113A - For the adjustment of mirror optics element angle and the device and method of aberration compensation - Google Patents
For the adjustment of mirror optics element angle and the device and method of aberration compensation Download PDFInfo
- Publication number
- CN108227113A CN108227113A CN201611133623.1A CN201611133623A CN108227113A CN 108227113 A CN108227113 A CN 108227113A CN 201611133623 A CN201611133623 A CN 201611133623A CN 108227113 A CN108227113 A CN 108227113A
- Authority
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- China
- Prior art keywords
- flexible support
- frame
- optics element
- mirror optics
- resistor disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/192—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for minimising internal mirror stresses not in use
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
Abstract
The present invention provides it is a kind of for mirror optics element angle adjustment and aberration compensation device, including：Flexible support frame, flexible support structure, frame adjustment frame, resistor disc, Control card and fixing screws；The flexible support frame is connect by the flexible support structure with mirror optics element；The frame adjustment frame is fixedly connected with the flexible support frame by screw；The back side of the resistor disc and mirror optics element is coplanar；The Control card connects the resistor disc by cable, for controlling the temperature of the resistor disc.One aspect of the present invention can realize the low stress support of mirror optics element, on the other hand can finally realize the optical detection of sub-nanometer precision with aberration caused by compensatory reflex mirror self gravitation effect.
Description
Technical field
The present invention relates to optical element field of measuring technique more particularly to a kind of mirror optics element angle that is used for adjust
And a kind of device and the mirror optics element gravity deformation compensation method of aberration compensation.
Background technology
Currently, integrated circuit processing technology rapidly develops, and photoetching resolution is constantly progressive from 22nm to 14nm or even 7nm,
As the core component of IC etching, the surface figure accuracy of optical element has reached nanoscale in photoetching projection objective lens.Optics
The precision of detection determines the machining accuracy of optical element, in order to reach such high-precision optical component surface shape requirement, it is necessary to
The detection station of optical element and actual use station are subjected to unification, therefore, to the partial optical surface of photoetching projection objective lens
Vertical upward (i.e. measuring beam straight up, to be detected optical surface downward) of the workpiece in upper, interferometer under must be used
Detection mode, it is vertical it is upward measure fizeau interferometer development process in, level is usually used in fizeau interferometer host
Direction is arranged.
Invention content
Present invention seek to address that technical problem in the prior art, in the vertical upward development for measuring fizeau interferometer
In the process, horizontal direction arrangement is usually used in fizeau interferometer host, and horizontal measurement light beam is reflected into perpendicular by a piece of speculum
Nogata to, and then need it is a kind of 45 ° placement high precision plane speculums transfer to light beam.The present invention is for the plane
A kind of support frame of mirror design can not only provide minimum stress support, and can also be right for mirror optics element
The asymmetric aberration (being introduced primarily into astigmatism and coma) that gravity of mirror optics element itself introduces compensates, to realize
High-precision surface testing.
On the one hand, the present invention provides a kind of device for being used for the adjustment of mirror optics element angle and aberration compensation, packets
It includes：Flexible support frame, flexible support structure, frame adjustment frame, resistor disc, Control card and fixing screws；The flexible branch
Support frame is connect by the flexible support structure with mirror optics element；The frame adjustment frame and the flexible support mirror
Frame is fixedly connected by fixing screws；The back side of the resistor disc and mirror optics element is coplanar；The Control card setting
It is connect by cable with resistor disc, for controlling the temperature of the resistor disc." compensation " in the present invention is referred to speculum
The asymmetric aberration (being introduced primarily into astigmatism and coma) that optical element gravity itself introduces compensates, to realize high-precision
Surface testing.
In some embodiments, the resistor disc is fan-shaped resistor disc or semicircle resistor disc, due to mirror optics member
Part gravity deformation is near semicircle, so the shape of resistor disc can be semicircle or fan-shaped, wherein, fan-shaped temperature
Degree field is more evenly distributed.Preferably, the quantity of the fan-shaped resistor disc is 2 or 2 or more, cloth above and below the resistor disc
It puts：Preferably, when the resistor disc is fan-shaped resistor disc, the side line of the sector resistor disc is vertical with gravity direction；When
When the resistor disc is semicircle resistor disc, the diametric(al) of the semicircle resistor disc is vertical with gravity direction.That is, when multiple
It is integrally symmetrical above and below when resistor disc is stitched together.
In some embodiments, the resistor disc is bonded in the back side of mirror optics element by heat-conducting glue, to ensure
Heat transfer efficiency.
In some embodiments, frame adjustment frame can provide 45 ° of support angle and have the function of precise angle adjustment, institute
It states frame adjustment frame and includes interface board, backboard and 2 fixed angle support plates, the frame support frame is installed to by screw
It is adjusted after fine-pitch screw adjusts the angle by ball bearing and angle on interface board, between the backboard and interface board and passes through angle again
Lock-screw is locked.Preferably, frame adjustment frame can provide 45 ° of support angle and have the function of precise angle adjustment, packet
Include 3 component parts：Interface board, backboard and 2 fixed angle support plates, wherein, two fixed angle support plates provide initial
45 ° of supports, flexible support frame is installed to by screw on interface board, between backboard and interface board by a ball bearing,
Two angle adjustment fine-pitch screws realize precise angle adjustment function, and adjustment is finished locks screw lock by two angles.One
As fulcrum, angle adjusts fine-pitch screw and the adjustment for realizing inclination pitching is rotated around fulcrum a ball bearing.Pass through frame adjustment frame
The angle of device for adjusting and compensating for mirror optics element angle of the adjustment present invention.
In some embodiments, two-way size of current can be controlled by Control card control circuit respectively, and then controls electricity
The temperature of piece is hindered, mirror optics element can cause different thermal deformations in the temperature of different location, can be mended by thermal deformation
Repay the asymmetric difference (mainly including astigmatism and coma) caused by gravity.So as to pass through the heat of mirror optics element
Face deformation caused by deformation-compensated gravity.
In some embodiments, the flexible support structure is flexible air-bag, (flexibility is propped up for surrounding viscose glue or flexible support
It supports frame and uses flexible support structure).It is further preferred that the flexible support structure is flexible air-bag, mirror optics member
Part is connected to by flexible air-bag on flexible support frame, and flexible air-bag provides uniform low stress branch to mirror optics element
Support, the aeration quantity of flexible air-bag is controlled by the way that mirror optics element is placed under fizeau interferometer by way of detection faces shape,
So that the face shape of mirror optics element is optimal.
In some embodiments, mirror optics element is adhesive in the flexible support mirror by the flexible support structure
On frame.
In some embodiments, narrow slit structure, and the narrow slit structure and fixation are provided on the flexible support frame
The position of screw corresponds to.It is it is further preferred that uniform using 3 into 120 ° between the flexible support frame and frame adjustment frame
The fixing screws of distribution are fixed, and each fixing screws bearing on flexible support frame is disposed with narrow slit structure, to reduce
The stress deformation of flexible support frame is transmitted on mirror optics element.
In some embodiments, the narrow slit structure is arc.Narrow slit structure can be set to other shapes, only need to meet：
Fixing screws are isolated with mirror optics element by narrow slit structure, to realize stress-removal.Preferably, implement at some
In example, there are three the narrow slit structures, and is evenly arranged on the flexible support frame.
Specifically, in some embodiments, reflective optical devices, flexible support structure and flexible support frame are integrated first
Together, become a component, the component is connect by 3 flange-interfaces on flexible support frame with frame adjustment frame later
Together, frame adjustment frame can realize the support of 45 ° of fixed angles and the accurate adjustment of angle as single component.Flexibility is adjusted
There is threaded hole corresponding with the flange-interface of flexible support frame on interface board on whole frame, realize flexible support frame and frame
The connection of adjustment frame.The screw hole of heretofore described flange-interface, that is, fixing screws.
On the other hand, the present invention also provides a kind of mirror optics element gravity deformation compensation method, by mirror light
Element is learned on the device for adjusting and compensating provided by the present invention for mirror optics element angle, the mirror light
It learns element to be connected on the flexible support frame by the flexible support structure, the frame branch adjustment frame provides 45 °
Support angle causes to be in 45 ° between the mirror optics element and the flexible support frame.Preferably, about 2 are utilized
The fan-shaped resistor disc of distribution controls driving current, and then control the temperature change of the two, so as to fulfill reflection by Control card
The non-uniform thermal aberration of mirror optical element, gravity deformation is compensated by thermal aberration.
Compared with prior art, advantageous effect is technical scheme of the present invention：One side can realize mirror optics member
The low stress support of part, on the other hand can finally realize that Asia is received with aberration caused by compensatory reflex mirror self gravitation effect
The optical detection of meter Jing Du.
Description of the drawings
Fig. 1 is the device for adjusting and compensating for mirror optics element angle according to one embodiment of the present of invention
Structure diagram；
Fig. 2 is the device for adjusting and compensating for mirror optics element angle according to one embodiment of the present of invention
Structure diagram；
Fig. 3 is the device for adjusting and compensating for mirror optics element angle according to one embodiment of the present of invention
Structure diagram；
Fig. 4 (1) is the structure diagram according to the frame adjustment frame of one embodiment of the present of invention；
Fig. 4 (2) is the structure diagram according to the frame adjustment frame of one embodiment of the present of invention.
Reference numeral：100th, for the adjustment of mirror optics element angle and the device of aberration compensation, 1, flexible support mirror
Frame, 2, flexible support structure, 3, frame adjustment frame, 31, interface board, 32, backboard, 33, fixed angle support plate, 301, ball axis
It holds, 302, angle adjustment fine-pitch screw, 303, angle lock-screw, 304, flange-interface, 4, resistor disc, 5, Control card,
501st, cable, 6, fixing screws, 7, mirror optics element, 8, narrow slit structure
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with attached drawing and specific implementation
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only explaining this hair
It is bright, without being construed as limiting the invention.
As shown in Figs. 1-3, a kind of device 100 for adjusting and compensating for mirror optics element angle.It is described to be used for instead
The device 100 for penetrating the adjustment of mirror optical element angle and compensation includes：Including：Flexible support frame 1, flexible support structure 2, frame
Adjustment frame 3, resistor disc 4, Control card 5 and fixing screws 6；The flexible support frame 1 passes through the flexible support structure 2
It is connect with mirror optics element 7；The frame adjustment frame 3 is fixed with the flexible support frame 1 by the fixing screws 6
Connection；The back side of the resistor disc 4 and mirror optics element 7 is coplanar；The setting of Control card 5 passes through cable 501 and electricity
Resistance piece 4 connects, for controlling the temperature of the resistor disc 4." compensation " in the present invention is referred to mirror optics element sheet
The asymmetric aberration (being introduced primarily into astigmatism and coma) that body gravity introduces compensates, to realize that high-precision face shape is examined
It surveys.Since resistor disc is at the optical element back side, so resistor disc is not shown in Fig. 1.
As shown in Fig. 1, Fig. 4 (1) and Fig. 4 (2), another embodiment of the present invention is used for mirror optics element angle tune
The structure diagram of whole and compensation device 100.The frame adjustment of one embodiment of the invention as shown in Fig. 4 (1) and Fig. 4 (2)
The structure diagram of frame 3.Frame adjustment frame can provide 45 ° of support angle and have the function of precise angle adjustment, the frame
Adjustment frame 3 includes interface board 31, backboard 32 and 2 fixed angle support plates 33, and the frame support frame 3 passes through screw (figure
In be not shown) be installed on interface board, pass through ball bearing 301 and angle between the backboard 32 and interface board 31 and adjust closely-pitched spiral shell
Nail 302 is locked after adjusting the angle by angle lock-screw 303 again.Preferably, frame adjustment frame 3 can provide 45 ° of strut angle
It spends and there is precise angle adjustment, including 3 component parts：Interface board 31, backboard 32 and 2 fixed angle support plates
33, wherein, two fixed angle support plates 33 provide 45 ° of initial supports, and flexible support frame 3 is installed to interface by screw
Fine-pitch screw 302 is adjusted by 301, two angles of a ball bearing realize angle on plate 31, between backboard 32 and interface board 31
Precision adjustment function, adjustment is finished is locked by two angle lock-screws 303.One ball bearing 301 is as fulcrum, angle tune
Whole fine-pitch screw 302 is rotated around fulcrum realizes the adjustment for tilting pitching.It is used to reflect by the frame adjustment 3 framves adjustment present invention
Mirror optical element angle adjusts and the angle of the device 100 of compensation.
As Figure 2-3, in the particular embodiment, the resistor disc 4 is fan-shaped resistor disc or semicircle resistor disc, by
In mirror optics element gravity deformation to be near semicircle, so the shape of resistor disc 4 can be semicircle or fan
Shape, wherein, sector belongs to rotationally symmetric body, and temperature field is more evenly distributed.Preferably, the quantity of the fan-shaped resistor disc is 2
A or 2 or more, the resistor disc is arranged up and down：Preferably, when the resistor disc 4 is fan-shaped resistor disc, the fan-shaped electricity
The side line for hindering piece is vertical with gravity direction；When the resistor disc 4 is semicircle resistor disc, the semicircle resistor disc it is straight
Diameter direction is vertical with gravity direction.It is that is, integrally symmetrical above and below when multiple resistor discs are stitched together.Specifically, it is described
Resistor disc is bonded in the back side of mirror optics element by heat-conducting glue, to ensure heat transfer efficiency.Electricity is controlled by Control card 5
Road can control two-way size of current respectively, and then control the temperature of resistor disc, and mirror optics element is in the temperature of different location
Different thermal deformations can be caused, by thermal deformation can compensate the asymmetric difference caused by gravity (it is main include as
Scattered and coma).So as to pass through face deformation caused by the thermal distortion compensation gravity of mirror optics element.
As shown in Figs. 1-3, the flexible support structure 2 is flexible air-bag, surrounding viscose glue or flexible support (flexible support
Frame uses flexible support structure).It is further preferred that the flexible support structure 2 is flexible air-bag, mirror optics element
7 are connected to by flexible air-bag on flexible support frame 1, and flexible air-bag provides uniform low stress branch to mirror optics element
Support, the aeration quantity of flexible air-bag is controlled by the way that mirror optics element 7 is placed under fizeau interferometer by way of detection faces shape,
So that the face shape of mirror optics element 7 is optimal.Specifically, mirror optics element 7 passes through the flexible support
Structure 2 is adhesive on the flexible support frame 1.
As shown in Figs. 1-2, be provided with narrow slit structure 8 on the flexible support frame 1, and the narrow slit structure 8 with it is described
The position of fixing screws 6 corresponds to.It is further preferred that between the flexible support frame 1 and frame adjustment frame 3 using 3 into
120 ° of equally distributed fixing screws 6 are fixed, and 6 bearing of each fixing screws on flexible support frame 1 is disposed with slit
Structure is transmitted to the stress deformation for reducing flexible support frame 1 on mirror optics element 7.Specifically, the narrow slit structure
8 be arc.The narrow slit structure 8 can be set to other shapes, only need to meet：By narrow slit structure 8 by fixing screws with reflecting
Mirror optical element 7 is isolated, to realize stress-removal.Preferably, it there are three the narrow slit structures 8, and is evenly arranged in described
On flexible support frame 1.
As shown in Fig. 2, Fig. 4 (1) and Fig. 4 (2), reflective optical devices 7, flexible support structure 2 and flexible support frame 1 are first
It first integrates, becomes a component, the component passes through 3 flange-interfaces 304 and frame on flexible support frame 1 later
Adjustment frame 3 links together, and frame adjustment frame 3 can realize the support of 45 ° of fixed angles and the essence of angle as single component
Close adjustment.Have on interface board 31 on flexible adjustment frame 3 and 304 corresponding threaded hole of the flange-interface of flexible support frame 1 (figure
In be not shown), realize the connection of flexible support frame 1 and frame adjustment frame 3.
In addition, the present invention also provides a kind of mirror optics element gravity deformation compensation method, by mirror optics member
Part is mounted on provided by the present invention in the adjustment of mirror optics element angle and the device compensated, the mirror optics is first
Part is connected to by the flexible support structure on the flexible support frame, and the frame branch adjustment frame provides 45 ° of support
Angle causes to be in 45 ° between the mirror optics element and the flexible support frame.Preferably, about 2 distributions are utilized
Fan-shaped resistor disc, by Control card control driving current, and then control both temperature change, so as to fulfill mirror light
The non-uniform thermal aberration of element is learned, gravity deformation is compensated by thermal aberration.
It can be seen from the above technical proposal that compared with prior art, technical solution of the present invention has the advantages that：
(1) mirror optics element is contacted using flexible support structure (preferably flexible air-bag) with frame in the present invention,
The uniformity and flexibility of contact are improved, reduces influence of the uneven rigid support to mirror optics element surface figure accuracy；
(2) it each tightens and stress-removal narrow slit structure is disposed at screw on flexible support frame in the present invention, to reduce
The transmission of stress deformation, narrow slit structure can be processed by spark machined mode；
(3) angle-adjusting mechanism in the present invention can adjust the angle of mirror optics element by adjusting screw, and
And with retaining mechanism, angle is avoided to vary over；
(4) it is further preferred that realizing the difference of optical element different piece in the present invention using 2 fan-shaped resistor discs
Temperature, and then the asymmetric aberration introduced by the deformation of asymmetrical thermal aberration compensatory reflex mirror its own gravity.
In the description of the present invention, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer ", " up time
The orientation or position relationship of the instructions such as needle ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " be based on orientation shown in the drawings or
Position relationship is for only for ease of the description present invention and simplifies description rather than instruction or imply that signified device or element must
There must be specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are only used for description purpose, and it is not intended that instruction or hint relative importance
Or the implicit quantity for indicating indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include at least one this feature.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or integral；Can be that machinery connects
It connects or is electrically connected；It can be directly connected, can also be indirectly connected by intermediary, can be in two elements
The connection in portion or the interaction relationship of two elements, unless otherwise restricted clearly.For those of ordinary skill in the art
For, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
In the present invention unless specifically defined or limited otherwise, fisrt feature can be with "above" or "below" second feature
It is that the first and second features are in direct contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature right over second feature or oblique upper or be merely representative of
Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be
One feature is immediately below second feature or obliquely downward or is merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " example ", " is specifically shown " some embodiments "
The description of example " or " some examples " etc. means specific features, structure, material or the spy for combining the embodiment or example description
Point is contained at least one embodiment of the present invention or example.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It is combined in an appropriate manner in one or more embodiments or example.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the different embodiments or examples described in this specification and the feature of different embodiments or examples
It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, those of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
The specific embodiment of present invention described above, is not intended to limit the scope of the present invention..Any basis
Various other corresponding changes and deformation made by the technical concept of the present invention, should be included in the guarantor of the claims in the present invention
In the range of shield.
Claims (10)
1. a kind of device for being used for the adjustment of mirror optics element angle and aberration compensation, which is characterized in that including：
Flexible support frame, flexible support structure, frame adjustment frame, resistor disc, Control card and fixing screws；
The flexible support frame is connect by the flexible support structure with mirror optics element；
The frame adjustment frame is fixedly connected with the flexible support frame by the fixing screws；
The back side of the resistor disc and mirror optics element is coplanar；
The Control card connects the resistor disc by cable, for controlling the temperature of the resistor disc.
2. the device according to claim 1 for adjusting and compensating for mirror optics element angle, which is characterized in that institute
It is fan-shaped resistor disc or semicircle resistor disc to state resistor disc.
3. the device according to claim 2 for adjusting and compensating for mirror optics element angle, which is characterized in that institute
The quantity for stating resistor disc is 2 or 2 or more, and the resistor disc is arranged up and down, when the resistor disc is fan-shaped resistor disc, institute
The side line for stating fan-shaped resistor disc is vertical with gravity direction；When the resistor disc is semicircle resistor disc, the semicircle electricity
The diametric(al) for hindering piece is vertical with gravity direction.
4. the device according to claim 1 for adjusting and compensating for mirror optics element angle, which is characterized in that institute
It states frame adjustment frame and includes interface board, backboard and 2 fixed angle support plates, the flexible support frame is installed to by screw
It is adjusted after fine-pitch screw adjusts the angle by ball bearing and angle on interface board, between the backboard and interface board and passes through angle again
Lock-screw is locked.
5. the device according to claim 1 for adjusting and compensating for mirror optics element angle, which is characterized in that institute
Flexible support structure is stated as one kind in flexible air-bag, viscose glue or flexible support.
6. the device according to claim 1 for adjusting and compensating for mirror optics element angle, which is characterized in that anti-
Mirror optical element is penetrated to be adhesive on the flexible support frame by the flexible support structure.
7. the device according to claim 1 for adjusting and compensating for mirror optics element angle, which is characterized in that institute
It states and narrow slit structure is provided on flexible support frame, and the narrow slit structure is corresponding with the position of the fixing screws.
8. the device according to claim 6 for adjusting and compensating for mirror optics element angle, which is characterized in that institute
Narrow slit structure is stated as arcuate slots.
9. the device according to claim 7 for adjusting and compensating for mirror optics element angle, which is characterized in that institute
It states there are three narrow slit structures, and is evenly arranged on the flexible support frame.
10. a kind of mirror optics element gravity deformation compensation method, which is characterized in that be mounted on mirror optics element such as
The device for adjusting and compensating for mirror optics element angle of any one of claim 1-9, the mirror optics member
Part is connected to by the flexible support structure on the flexible support frame, and the frame branch adjustment frame provides 45 ° of support
Angle causes to be in 45 ° between the mirror optics element and the flexible support frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611133623.1A CN108227113A (en) | 2016-12-10 | 2016-12-10 | For the adjustment of mirror optics element angle and the device and method of aberration compensation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611133623.1A CN108227113A (en) | 2016-12-10 | 2016-12-10 | For the adjustment of mirror optics element angle and the device and method of aberration compensation |
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| CN108227113A true CN108227113A (en) | 2018-06-29 |
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| CN201611133623.1A Pending CN108227113A (en) | 2016-12-10 | 2016-12-10 | For the adjustment of mirror optics element angle and the device and method of aberration compensation |
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| CN112731619A (en) * | 2020-12-30 | 2021-04-30 | 中国工程物理研究院激光聚变研究中心 | Surface shape compensation system |
| CN113009749A (en) * | 2019-12-20 | 2021-06-22 | 宁波舜宇光电信息有限公司 | Optical assembly, periscopic camera module and electronic equipment |
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Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02298908A (en) * | 1989-03-24 | 1990-12-11 | Nicolet Instr Corp | Alignment of mirror and damping apparatus |
| CN1183528A (en) * | 1996-11-26 | 1998-06-03 | 株式会社小糸制作所 | Lamp for automobile |
| US6521877B1 (en) * | 1999-11-24 | 2003-02-18 | Carl-Zeiss-Stiftung | Optical arrangement having improved temperature distribution within an optical element |
| CN101131908A (en) * | 2007-09-21 | 2008-02-27 | 北京工业大学 | Transmission electron microscope slide glass for nano material in-situ structure property test |
| CN101518875A (en) * | 2008-11-24 | 2009-09-02 | 中国航天科技集团公司长征机械厂 | Precision positioning and clamping device of lathe |
| CN101726289A (en) * | 2009-12-23 | 2010-06-09 | 王鹏飞 | Leveling instrument for rapidly and automatically leveling |
| CN102705657A (en) * | 2012-06-15 | 2012-10-03 | 中国科学院长春光学精密机械与物理研究所 | Flexible support frame for small high-stability multifunctional optical reflector |
| CN102896581A (en) * | 2012-11-01 | 2013-01-30 | 江苏迪邦三星轴承有限公司 | Double-support device of bearing grinding process |
| CN103576283A (en) * | 2013-12-04 | 2014-02-12 | 中国工程物理研究院总体工程研究所 | Rapid reflective mirror system based on flexible supports |
| JP5574941B2 (en) * | 2010-12-20 | 2014-08-20 | 株式会社東芝 | Mirror holder |
| CN104081284A (en) * | 2012-01-25 | 2014-10-01 | 卡尔蔡司Smt有限责任公司 | Optical arrangement for EUV lithography |
| CN104487899A (en) * | 2012-07-24 | 2015-04-01 | 卡尔蔡司Smt有限责任公司 | Mirror arrangement for an euv projection exposure apparatus, method for operating the same, and euv projection exposure apparatus |
| CN204630569U (en) * | 2015-01-19 | 2015-09-09 | 梁珂 | A kind of building spirit-leveling instrument |
| CN105304513A (en) * | 2014-07-24 | 2016-02-03 | 先进科技新加坡有限公司 | Wire bonding apparatus comprising an oscillator mechanism |
-
2016
- 2016-12-10 CN CN201611133623.1A patent/CN108227113A/en active Pending
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02298908A (en) * | 1989-03-24 | 1990-12-11 | Nicolet Instr Corp | Alignment of mirror and damping apparatus |
| CN1183528A (en) * | 1996-11-26 | 1998-06-03 | 株式会社小糸制作所 | Lamp for automobile |
| US6521877B1 (en) * | 1999-11-24 | 2003-02-18 | Carl-Zeiss-Stiftung | Optical arrangement having improved temperature distribution within an optical element |
| CN101131908A (en) * | 2007-09-21 | 2008-02-27 | 北京工业大学 | Transmission electron microscope slide glass for nano material in-situ structure property test |
| CN101518875A (en) * | 2008-11-24 | 2009-09-02 | 中国航天科技集团公司长征机械厂 | Precision positioning and clamping device of lathe |
| CN101726289A (en) * | 2009-12-23 | 2010-06-09 | 王鹏飞 | Leveling instrument for rapidly and automatically leveling |
| JP5574941B2 (en) * | 2010-12-20 | 2014-08-20 | 株式会社東芝 | Mirror holder |
| CN104081284A (en) * | 2012-01-25 | 2014-10-01 | 卡尔蔡司Smt有限责任公司 | Optical arrangement for EUV lithography |
| CN102705657A (en) * | 2012-06-15 | 2012-10-03 | 中国科学院长春光学精密机械与物理研究所 | Flexible support frame for small high-stability multifunctional optical reflector |
| CN104487899A (en) * | 2012-07-24 | 2015-04-01 | 卡尔蔡司Smt有限责任公司 | Mirror arrangement for an euv projection exposure apparatus, method for operating the same, and euv projection exposure apparatus |
| CN102896581A (en) * | 2012-11-01 | 2013-01-30 | 江苏迪邦三星轴承有限公司 | Double-support device of bearing grinding process |
| CN103576283A (en) * | 2013-12-04 | 2014-02-12 | 中国工程物理研究院总体工程研究所 | Rapid reflective mirror system based on flexible supports |
| CN105304513A (en) * | 2014-07-24 | 2016-02-03 | 先进科技新加坡有限公司 | Wire bonding apparatus comprising an oscillator mechanism |
| CN204630569U (en) * | 2015-01-19 | 2015-09-09 | 梁珂 | A kind of building spirit-leveling instrument |
Non-Patent Citations (4)
| Title |
|---|
| 张秋勤 等: "《快乐的发明家——青少年科技发明作品与研究案例》", 31 August 2013, 苏州大学出版社 * |
| 徐荣伟 等: "大型干涉仪镜子的支撑设计与温度变形分析", 《光学学报》 * |
| 徐金镛 等: "《光学设计》", 30 November 1989 * |
| 武东城 等: "高精度光学平板在三点支撑下自重变形的研究", 《光学学报》 * |
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|---|---|---|---|---|
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