CN104330864B - A kind of slab laser beam-expanding collimation system of electronic closed loop adjustment - Google Patents

A kind of slab laser beam-expanding collimation system of electronic closed loop adjustment Download PDF

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Publication number
CN104330864B
CN104330864B CN201410656319.XA CN201410656319A CN104330864B CN 104330864 B CN104330864 B CN 104330864B CN 201410656319 A CN201410656319 A CN 201410656319A CN 104330864 B CN104330864 B CN 104330864B
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lens
post lens
post
stepper motor
globe
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CN104330864A (en
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范国滨
张卫
田飞
叶东
叶一东
廖原
颜宏
陈黎
罗佳
李建民
卢飞
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Institute of Applied Electronics of CAEP
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/021Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30Collimators

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention provides a kind of technical scheme of the slab laser beam-expanding collimation system of electronic closed loop adjustment, the program includes slab laser, the first post lens, the second post lens, the first globe lens, the second globe lens, computer, stepper motor and far field detection system;First post lens and the second mutually orthogonal placement of post lens;First post lens and the second post lens are connected with stepper motor respectively;Computer is connected with stepper motor and far field detection system respectively;The laser beam of slab laser transmitting injects far field detection system after sequentially passing through the first post lens, the second post lens, the first globe lens and the second globe lens;Computer receives the feedback signal of far field detection system and controls stepper motor operation to control the position of the first post lens and the second post lens according to feedback signal.The program can ensure that slab laser all has preferable collimating effect under different working conditions, and degree of regulation is high, and collimating effect is good, and safe operation is simple.

Description

A kind of slab laser beam-expanding collimation system of electronic closed loop adjustment
Technical field
The invention belongs to the shaping of laser beam, coupling, converter technique field, and in particular to a kind of electronic closed loop adjustment Laser alignment optical system, size scaling and the angle of divergence for solid batten laser output beam are adjusted automatically in real time Section.
Background technology
In solid batten laser, the asymmetric geometry and " it " font light path of gain media can effective compensation warm The thermo-optic effect such as lens and thermally induced birefringence, it is easier to preferable beam quality is obtained under high power laser light output condition.But Be due to that the size of lath gain media width is much larger than thickness direction size, in the case of high power is continuously run gain be situated between The thermograde of matter inner width direction and thickness direction differs greatly, so as to cause its output beam to be sent out in both directions Scattered angular difference is not larger, and with the difference of loading power and run time significant change can occur for the angle of divergence, reduce light beam matter Amount, it is therefore desirable to which real-time beam-expanding collimation is carried out to its output beam.
Existing slab laser beam-expanding collimation system mainly has two kinds of forms:1)Globe lens beam-expanding collimation system:By two pieces Globe lens is formed, and slab laser is carried out to justify symmetrical beam-expanding collimation.Program system architecture is simple, but can not take into account plate simultaneously The angle of divergence of bar laser width and thickness both direction collimates.2)Post the beams extended by lens colimated light system:By two pieces of post lens and two pieces Globe lens is formed, and the specific angle of divergence of width and thickness direction to slab laser pre-compensates for, but the diverging of slab laser With the difference of loading power and run time significant change can occur for angle, and program collimation has larger residual error and strong It can not in real time be adjusted under light state, adjust operating personnel manually and cannot be guaranteed that this is the deficiency present in prior art safely Place.
The content of the invention
The purpose of the present invention, aiming at the deficiency present in prior art, and provide a kind of swashing for electronic closed loop adjustment The technical scheme of light collimator and extender optical system, the far-field spot that the program is gathered using computer to CCD carry out data processing, The angle of divergence of the light beam in width of sheet and thickness direction is calculated, converses the space length of two pieces of post lens movements, further The rotation frame number of stepper motor is converted into, is output on stepper motor and the locus of two pieces of post lens is adjusted in real time respectively It is whole, ensure that all there is preferable collimating effect to the slab laser under the conditions of different operating.
This programme is achieved by the following technical measures:
A kind of slab laser beam-expanding collimation system of electronic closed loop adjustment, include slab laser, the first post lens, the Two post lens, the first globe lens, the second globe lens, computer, stepper motor and far field detection system;First post lens and second The mutually orthogonal placement of post lens;First post lens and the second post lens are connected with stepper motor respectively;Computer respectively with stepping Motor connects with far field detection system;The laser beam of slab laser transmitting sequentially passes through the first post lens, the second post lens, the Far field detection system is injected after one globe lens and the second globe lens;Computer receives the feedback signal and basis of far field detection system Feedback signal control stepper motor is run so as to control the position of the first post lens and the second post lens.
As the preferred of this programme:Far field detection system includes spectroscope, condenser lens and CCD;Laser after collimation Shu Yici injects CDD photosurface by spectroscope and condenser lens;The photosurface of the CDD is positioned over the focus of condenser lens Place.
As the preferred of this programme:Spectroscope is strong light high reflective mirror, and reflectivity is more than 99.9%, and material selection high-quality is melted Quartz material, absorption coefficient are less than 10ppm, and λ/6 are respectively less than in 90% clear aperture scope internal reflection and transmission plane type PV values 633nm。
As the preferred of this programme:Far field detection system include spectroscope, long-focus achromatism focus lens group and CCD;The long-focus achromatism focus lens group includes falcate globe lens, plano-concave lens and includes two panels spherical lens Double agglutination lens group;Laser beam after collimation sequentially passes through spectroscope, falcate globe lens, plano-concave lens and includes two panels CDD photosurfaces are injected after the double agglutination lens group of spherical lens;The CDD photosurfaces are arranged at the focus of double agglutination lens group Place.
As the preferred of this programme:The far-field spot that computer gathers to CCD carries out data processing, calculates light beam in plate The angle of divergence of bar laser width and thickness direction, the space length of two pieces of post lens movements is conversed, is further converted to walk The rotation frame number of stepper motor, it is output on stepper motor and the locus of the first post lens and the second post lens is carried out in fact respectively When adjust.
The beneficial effect of this programme can be learnt according to the narration to such scheme, due to orthogonal by two pieces in this scenario The post lens of placement and two pieces of globe lens form angle of divergence collimation lens sets, can be respectively to slab laser width and thickness direction The angle of divergence is collimated;Far field detection system can collimation effect carry out real-time detection, the far-field spot that computer gathers to CCD Data processing is carried out, calculates the angle of divergence of the light beam in width of sheet and thickness direction, converses the sky of two pieces of post lens movements Between distance, be further converted to the rotation frame number of stepper motor, be output on stepper motor respectively to the space of two pieces of post lens Position is adjusted in real time, ensures all there is preferable collimating effect to the slab laser under the conditions of different operating.
The present invention can ensure that slab laser all has preferable collimating effect, degree of regulation under different working conditions Height, collimating effect is good, and safe operation is simple.
As can be seen here, the present invention compared with prior art, has substantive distinguishing features and progress, its beneficial effect implemented It is obvious.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the dimensional structure diagram of the first post lens and the second post lens in Fig. 1.
Fig. 3 is the structural representation of the far field focus lens group of present example 2.
In figure, 1 is the first post lens, and 2 be the second post lens, and 3 be the first globe lens, and 4 be the second globe lens, and 5 be light splitting Mirror, 6 be condenser lens, and 7 be CDD, and 8 be computer, and 9 be stepper motor, and 11 be falcate globe lens, and 12 be that falcate ball is saturating Mirror, 13 be plano-concave lens, 14 double agglutination lens groups.
Embodiment
All features disclosed in this specification, or disclosed all methods or during the step of, except mutually exclusive Feature and step beyond, can combine in any way.
This specification(Including any accessory claim, summary and accompanying drawing)Disclosed in any feature, except non-specifically chatting State, can alternative features equivalent by other or with similar purpose replaced.I.e., unless specifically stated otherwise, each feature It is an example in a series of equivalent or similar characteristics.
Embodiment 1
Such as Fig. 1, the present invention includes slab laser, the first post lens, the second post lens, the first globe lens, the second ball Lens, computer, stepper motor and far field detection system;First post lens and the second mutually orthogonal placement of post lens;First post Lens and the second post lens are connected with stepper motor respectively;Computer is connected with stepper motor and far field detection system respectively;Plate The laser beam of bar laser transmitting is penetrated after sequentially passing through the first post lens, the second post lens, the first globe lens and the second globe lens Enter far field detection system;Computer receives the feedback signal of far field detection system and controls stepper motor operation according to feedback signal So as to control the position of the first post lens and the second post lens.
Far field detection system includes spectroscope, condenser lens and CCD;Laser beam after collimation successively by spectroscope and Condenser lens injects CDD photosurface;The photosurface of the CDD is positioned over the focal point of condenser lens.
The far-field spot that computer gathers to CCD carries out data processing, calculates light beam in slab laser width and thickness The angle of divergence in direction is spent, converses the space length of two pieces of post lens movements, is further converted to the rotation frame number of stepper motor, It is output on stepper motor and the locus of the first post lens and the second post lens is adjusted in real time respectively.
First post lens are planoconvex lens, and clear aperture is 10 × 30mm, and focal length 30mm, material is fused quartz, and surface is plated Light resistant antireflection coating, transmitance are more than 99.8%.
Second post lens are plano-concave mirror, and clear aperture is 30 × 10mm, and focal length is -54mm, and material is fused quartz, and surface is plated Light resistant antireflection coating, transmitance are more than 99.8%.
First globe lens is biconvex globe lens, and clear aperture is Φ 50mm, focal length 319mm, and material is fused quartz, surface Light resistant antireflection coating is plated, transmitance is more than 99.8%.
Second globe lens is falcate globe lens, and clear aperture is Φ 50mm, and focal length is -2073mm, and material is fused quartz, Light resistant antireflection coating is plated on surface, and transmitance is more than 99.8%.
Spectroscope is level crossing, and reflectivity is more than 99.9%, and material selection high-quality fused silica material, absorption coefficient is less than 10ppm, the 633nm of λ/6 is respectively less than in 90% clear aperture scope internal reflection and transmission plane type PV values.
Condenser lens is biconvex lens, and clear aperture is Φ 50mm, and focal length 600mm, material is fused quartz, and surface plating is resistance to Strong light anti-reflection film, transmitance are more than 99.8%.
Embodiment 2
The present embodiment is identical with the basic structure of embodiment 1, except that condenser lens 6 is changed to long-focus achromatism Focus lens group, as shown in figure 3, by falcate globe lens, plano-concave lens and the cemented doublet for including two panels spherical lens Group is formed.
Falcate globe lens 11, clear aperture are Φ 50mm, focal length 290mm, material H-ZF7LA, and surface plating is resistance to strong Light anti-reflection film, transmitance are more than 99.8%.
Falcate globe lens 12, clear aperture are Φ 50mm, focal length 186mm, material H-ZF7LA, and surface plating is resistance to strong Light anti-reflection film, transmitance are more than 99.8%.
Plano-concave lens, clear aperture are Φ 50mm, and focal length is -116mm, and material H-ZF7LA, plating resistance to strong light in surface is anti-reflection Film, transmitance are more than 99.8%.
Double agglutination lens group includes two panels spherical lens, and clear aperture is Φ 15mm, and combined focal length is -14mm, lens material Material is respectively H-ZF7LA and H-K9L, and surface plating light resistant antireflection coating, transmitance is more than 99.8%.
The present invention forms angle of divergence collimation lens set by two pieces of orthogonally located post lens and two pieces of globe lens, can distinguish The angle of divergence of slab laser width and thickness direction is collimated;Far field detection system can collimation effect visited in real time Survey, and calculate the angle of divergence of the light beam in width of sheet and thickness direction, believe as stepper motor closed loop feedback saturating to two pieces of posts The locus of mirror is adjusted in real time, slab laser is all had preferable collimating effect under different working conditions.
The invention is not limited in foregoing embodiment.The present invention, which expands to, any in this manual to be disclosed New feature or any new combination, and disclose any new method or process the step of or any new combination.

Claims (2)

1. a kind of slab laser beam-expanding collimation system of electronic closed loop adjustment, it is characterized in that:Include slab laser, the first post Lens, the second post lens, the first globe lens, the second globe lens, computer, stepper motor and far field detection system;Described first Post lens and the second mutually orthogonal placement of post lens;The first post lens and the second post lens are connected with stepper motor respectively; The computer is connected with stepper motor and far field detection system respectively;The laser beam of the slab laser transmitting sequentially passes through Far field detection system is injected after first post lens, the second post lens, the first globe lens and the second globe lens;The computer receives The feedback signal of far field detection system simultaneously controls stepper motor operation to control the first post lens and second according to feedback signal The position of post lens;The far field detection system includes spectroscope, long-focus achromatism focus lens group and CCD;The length Focal length achromatism focus lens group includes falcate globe lens, plano-concave lens and includes the double glued saturating of two panels spherical lens Microscope group;Through the second globe lens project collimation after laser beam sequentially pass through spectroscope, falcate globe lens, plano-concave lens and CDD photosurfaces are injected after including the double agglutination lens group of two panels spherical lens;The CDD photosurfaces are arranged at cemented doublet The focal point of group;The far-field spot that the computer gathers to CCD carries out data processing, and it is wide in slab laser to calculate light beam The angle of divergence of degree and thickness direction, the space length of two pieces of post lens movements is conversed, be further converted to turning for stepper motor Dynamic frame number, is output on stepper motor and the locus of the first post lens and the second post lens is adjusted in real time respectively.
2. a kind of slab laser beam-expanding collimation system of electronic closed loop adjustment according to claim 1, it is characterized in that:It is described Spectroscope be strong light high reflective mirror, material selection high-quality fused silica material, absorption coefficient is less than 10ppm, in 90% light admission port Footpath scope internal reflection and transmission plane type PV values are respectively less than the 633nm of λ/6.
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