CN112495941B - Remote laser cleaning system - Google Patents
Remote laser cleaning system Download PDFInfo
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- CN112495941B CN112495941B CN202011248761.0A CN202011248761A CN112495941B CN 112495941 B CN112495941 B CN 112495941B CN 202011248761 A CN202011248761 A CN 202011248761A CN 112495941 B CN112495941 B CN 112495941B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/021—Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
Abstract
The invention provides a remote laser cleaning system which comprises a laser, an energy transmission optical fiber, a laser collimation and beam expansion system, a laser alignment system, a laser coupling system and a laser cleaning head, wherein the laser is connected with the laser collimation and beam expansion system through the energy transmission optical fiber and used for providing laser energy for laser cleaning; the laser coupling system is connected with the laser cleaning head through an energy transmission optical fiber; the laser alignment system is used for adjusting the central axes of the laser collimation and beam expansion system and the laser coupling system to be on the same straight line. The laser alignment beam expanding system and the laser coupling system are separated, so that the cleaning of places, such as large ship surfaces, mountain area towers and the like, which are difficult to reach by laser cleaning equipment can be realized, and the laser alignment beam expanding system and the laser coupling system have the advantages of simplicity and convenience in operation, high efficiency and stability in cleaning, safety and reliability and the like.
Description
Technical Field
The invention belongs to the technical field of laser cleaning, and particularly relates to a remote laser cleaning system.
Background
The laser cleaning technology utilizes the interaction between laser and materials to generate the effects of ablation, evaporation, stripping, shock waves and the like, and realizes the removal of pollutants such as oil stains, paint, oxide layers, rusts and the like on the surface to be cleaned. Compared with the traditional cleaning method, the laser cleaning technology has incomparable advantages: non-mechanical contact, accurate positioning of the cleaning position, application to complex curved surface shapes, high cleaning efficiency, no environmental pollution and the like.
The laser cleaning equipment comprises a laser, a laser cleaning head and a transmission optical fiber. Weight of laser cleaning apparatus and laserThe power is dependent. The larger the laser power, the larger the volume and weight of the laser cleaning apparatus. The volume of the common low-power laser cleaning equipment in engineering application is 1mm3The weight is within 25kg, wherein the length of the transmission optical fiber is between 5 and 10m, the operation is inconvenient when the length of the optical fiber is too short, and the laser has large loss in transmission and is easy to bend and break when the length of the optical fiber is too long. Therefore, the distance between the surface of the object to be cleaned and the laser cleaning system cannot be overlong, and the conventional laser cleaning equipment is difficult to be applied to places where equipment such as large ships, mountain electric towers and the like are difficult to reach.
In order to solve the problem, people adopt a remote laser cleaning system, and Chinese patent application with publication number CN108941916A provides a remote laser rust removing device for power equipment, and the adopted mode is that the laser cleaning system emits laser below an iron tower, and the laser is reflected by a reflector on an unmanned aerial vehicle and acts on the surface of a position to be cleaned of the iron tower to remove a surface rust layer. The remote laser cleaning mode has obvious effect, but has the following defects: (1) the battery of the unmanned aerial vehicle can only be maintained for 15-30 minutes, and the long-time operation requirement cannot be met; (2) the unmanned aerial vehicle is susceptible to airflow and cannot accurately and stably position a cleaning position; (3) the unmanned aerial vehicle is complex and tedious to operate and control in the cleaning process; (4) the cleaning process needs operating personnel to have stronger ability of controlling to unmanned aerial vehicle, and unmanned aerial vehicle has very big crash to lose the antithetical couplet risk.
Disclosure of Invention
Aiming at the problems and the defects in the prior art, the invention provides a remote laser cleaning system, which is used for cleaning the surface of a large ship, a mountain area electric tower and other places where laser cleaning equipment is difficult to reach, and has the advantages of simplicity and convenience in operation, high efficiency and stability in cleaning, safety and reliability and the like.
The present invention achieves the above-described technical object by the following technical means.
A remote laser cleaning system is characterized by comprising a laser, an energy transmission optical fiber, a laser collimation and beam expansion system, a laser alignment system, a laser coupling system and a laser cleaning head, wherein the laser is connected with the laser collimation and beam expansion system through the energy transmission optical fiber and used for providing laser energy for laser cleaning; the laser coupling system is connected with the laser cleaning head through an energy transmission optical fiber;
the laser collimation and beam expansion system is used for collimating and expanding laser and expanding beam multiple
Taking an integer to satisfy that the laser energy density is less than 500mw/mm after beam expansion2Wherein I is the laser energy density after laser beam expansion, and I is less than or equal to 500mw/mm2P is the power of the laser, r is the laser spot radius before laser beam expansion, and pi is the circumference ratio;
the laser coupling system is used for compressing and focusing the received laser beam and coupling the laser beam into the energy transmission optical fiber;
the laser alignment system is used for adjusting the central axis of the laser collimation and beam expansion system and the central axis of the laser coupling system on the same straight line, and comprises:
the first elevation angle adjusting device and the second elevation angle adjusting device are respectively used for adjusting the elevation angles of the laser collimation and beam expansion system and the laser coupling system; and the number of the first and second groups,
the calibration light source and the target are respectively arranged at the laser collimation and beam expansion system and the laser coupling system and are used for calibrating the laser collimation and beam expansion system and the laser coupling system on the same straight line.
Furthermore, the receiving aperture of the laser coupling system is larger than the diameter of the light spot after the laser beam is expanded.
Further, a diaphragm surface is arranged on a first lens of the laser collimation and beam expansion system.
Furthermore, the laser collimation and beam expansion system sequentially comprises a first lens, a second lens, a third lens and a fourth lens from left to right, wherein the first lens and the second lens are collimation lenses for collimating laser emitted by the optical fiber, the third lens and the fourth lens are beam expansion lenses for expanding the beam, and the diameter of the expanded beam is larger than 30 mm; the laser coupling system sequentially comprises a fifth lens, a sixth lens, a seventh lens, an eighth lens and a circular truncated cone lens from left to right, the fifth lens and the sixth lens are light beam compression lenses for compressing and transmitting received light beams, the seventh lens and the eighth lens are focusing lenses for focusing laser, the focusing lenses focus laser beams, and the diameter D of a focused light spot is more than 0.4mm and less than 1.2 mm; the outer diameter of one end, close to the focusing lens, of the circular truncated cone lens is larger than the diameter D of a focused light spot, and the outer diameter of one end, far away from the focusing lens, of the circular truncated cone lens is smaller than the diameter of a fiber core of the energy transmission optical fiber.
Furthermore, the first lens is a positive lens, the curvature radius of the front surface is infinite, the curvature radius of the rear surface is-11 mm to-12 mm, and the thickness is 2.4mm to 2.6 mm;
the second lens is a positive lens, the radius of curvature of the front surface is 40 mm-41 mm, the radius of curvature of the rear surface is-74 mm-76 mm, and the thickness is 2.4 mm-2.6 mm;
the third lens is a negative lens, the curvature radius of the front surface is-7.5 mm to-8.5 mm, the curvature radius of the rear surface is 45mm to 47mm, and the thickness is 2.4mm to 2.6 mm;
the fourth lens is a positive lens, the radius of curvature of the front surface is 71 mm-73 mm, the radius of curvature of the rear surface is-50 mm-48 mm, and the thickness is 14 mm-16 mm;
the first lens is an aspheric lens, the second lens is a spherical lens, the third lens is a spherical lens, and the fourth lens is an aspheric lens;
the air space between the first lens and the second lens is 1.4-1.6 m, the air space between the second lens and the third lens is 8-12 mm, and the air space between the third lens and the fourth lens is 44-46 mm;
the fifth lens of the laser coupling system has the same parameters as the fourth lens of the laser collimation and beam expansion system, the sixth lens of the laser coupling system has the same parameters as the third lens, the seventh lens of the laser coupling system has the same parameters as the second lens of the laser collimation and beam expansion system, and the eighth lens of the laser coupling system has the same parameters as the first lens of the laser collimation and beam expansion system.
Furthermore, the internal optical system of the laser cleaning head comprises a ninth lens, a tenth lens, an eleventh lens, a reflector and a Powell prism which are sequentially arranged from left to right, wherein the ninth lens is a collimating lens and collimates laser emitted by the optical fiber; the tenth lens and the eleventh lens are beam compression lenses for compressing the laser; the reflector turns the laser beam by 90 degrees, and the Bawell prism converts the circular light spot into a linear light spot.
Furthermore, the ninth lens is a positive lens, the curvature radius of the front surface is infinite, the curvature radius of the rear surface is-3.2 mm to-2.8 m, and the thickness is 1.9mm to 2.1 mm;
the tenth lens is a positive lens, the curvature radius of the front surface is 10 mm-11 mm, the curvature radius of the rear surface is-49 mm-47 mm, and the thickness is 1.9 mm-2.1 mm;
the eleventh lens is a negative lens, the radius of curvature of the front surface is-3.1 mm to-2.9 mm, the radius of curvature of the rear surface is-3.1 mm to-2.9 mm, and the thickness is 1.9mm to 2.1 mm;
the reflector is a plane reflector, and the thickness of the reflector is 1 mm-3 mm;
the curvature radius of the front surface of the Bawell prism is-0.2 mm to-0.4 mm, the secondary curve constant is 3, the curvature radius of the rear surface is infinite, the secondary curve constant is 0, and the thickness is 2.9mm to 3.1 mm;
the air space between the ninth lens and the tenth lens is 2.9-3.1 mm, the air space between the tenth lens and the eleventh lens is 14-16 mm, the air space between the eleventh lens and the reflector is 8-50 mm, the air space between the reflector and the Bawell prism is 8-50 mm, and the distance T from the Bawell prism to a cleaning sample is 10-100 mm;
the ninth lens is an aspheric lens, and the tenth lens and the eleventh lens are spherical lenses.
Furthermore, the length L and the width H of a linear light spot emitted by an internal optical system of the laser cleaning head satisfy
Where P is the laser power, η1For the transmission efficiency, eta, of laser light in energy-transmitting optical fibers2The coupling efficiency of the laser, v laser emission frequency, and K is the cleaning threshold energy density of the cleaning contaminant.
Furthermore, the laser cleaning head comprises a laser wireless communication system, the laser wireless communication system is used for signal interconnection between the laser cleaning head and the laser, and light emitting and closing of the laser are remotely controlled at the position of the laser cleaning head.
Further, the laser is a pulse laser or a continuous laser; the typical core diameter of the energy transmission fiber is 600 μm and the numerical aperture is 0.3.
The invention has the following beneficial effects:
(1) the remote laser cleaning is realized, and the difficult problems of high-efficiency and stable cleaning of the surfaces of large ships, mountain electric towers and other places where laser cleaning equipment is difficult to reach are solved.
(2) The operation is simple. The laser cleaning head can be accurately cleaned by directly controlling an operator only by moving the laser receiving system to the position to be cleaned and fixing and adjusting the elevation angle and the rotation position of the laser emitting system and the laser alignment system.
(3) Is safe and reliable. The transmitted laser energy density is low, and people or objects cannot be injured or damaged within a safe range.
(4) The laser cleaning head has light weight, good durability and strong mobility. And the Bawell prism is adopted to convert the laser into linear laser, so that the quality of the laser cleaning head is reduced.
(5) The device has large focal depth performance, can conveniently and quickly find out proper cleaning working distance, and has obvious advantages of cleaning on the uneven surface.
(6) The device is convenient to be integrated with a wall-climbing robot for application, and high-precision automatic laser cleaning is realized.
Drawings
Fig. 1 is a schematic structural diagram of a remote laser cleaning system according to the present invention.
Fig. 2 is a schematic structural diagram of the laser beam expanding system.
Fig. 3 is a schematic structural diagram of the laser coupling system.
Fig. 4 is a schematic structural diagram of an internal optical system of the laser cleaning head.
Fig. 5 is a focused spot diagram of a laser coupling system.
FIG. 6 is a graph of the performance of a typical linear spot during laser cleaning, wherein the working distance is 45mm, the length of the linear spot is 19.6mm, and the width of the linear spot is 0.24 mm.
FIG. 7 is a second graph of the linear spot performance during typical laser cleaning, with a working distance of 80mm, a linear spot length of 35mm and a linear spot width of 0.24 mm.
In the figure: 1. a laser; 2. an energy transmission optical fiber; 3. a laser beam expanding system; 31. a first lens; 32. a second lens; 33. a third lens; 34. a fourth lens; 4. a first elevation angle adjusting device; 5. a laser coupling system; 51. a fifth lens; 52. a sixth lens; 53. a seventh lens; 54. an eighth lens; 55. a truncated cone lens; 6. a second elevation angle adjustment device; 7. an energy transmission optical fiber; 8. a laser cleaning head; 81. a ninth lens; 82. a tenth lens; 83. an eleventh lens; 84. a mirror; 85. a Powell prism; 9. and (5) sampling.
Detailed Description
The invention will be further described with reference to the following figures and specific examples, but the scope of the invention is not limited thereto.
Fig. 1 shows a remote laser cleaning device according to the present invention, which includes a laser 1, an energy transmission fiber 2, a laser collimation and beam expansion system 3, a first elevation angle adjusting device 4, a laser coupling system 5, a second elevation angle adjusting device 6, an energy transmission fiber 7, a laser cleaning head 8, a calibration light source, and a target. The laser is connected with the laser collimation and beam expansion system through an energy transmission optical fiber to provide laser energy for laser cleaning; the laser coupling system is connected with the laser cleaning head through an energy transmission optical fiber. The first elevation angle adjusting device 4, the second elevation angle adjusting device 6, the calibration light source and the target form a laser alignment system, and the laser alignment system is used for aligning the axes of the laser collimation and beam expansion system 3 and the laser coupling system 5 on the same straight line.
The laser 1 is a pulse laser or a continuous laser, and generates laser energy capable of removing pollutants, and the laser wavelength is selected from a wavelength band with a large pollutant absorption coefficient, such as 1064nm and 532 nm. In this embodiment, a 500W fiber pulse laser is used to generate 1064nm wavelength laser. The fiber core diameter of the energy transmission fiber device is 600 mu m, the numerical aperture is 0.3, and the high coupling efficiency of laser and the bending property of the optical fiber are ensured. . The laser beam enters a laser collimation and beam expansion system 3 after being transmitted by an energy transmission optical fiber 2.
As shown in fig. 2, the laser collimation and beam expansion system aims to collimate and expand laser and reduce laser energy density, wherein the beam expansion multiple is such that the laser energy density is less than 500mw/mm after beam expansion2I.e. meets the requirement of Class3B safety level, and avoids injury to people and damage to articles. The laser collimation and beam expansion system 3 comprises a first lens 31, a second lens 32, a third lens 33 and a fourth lens 34. The first lens 31 and the second lens 32 are collimating lenses, and collimate laser light emitted by the optical fiber into a light spot with a diameter of 8 mm. The third lens 33 and the fourth lens 34 are beam expanding lenses, and expand the light beam into a spot having a diameter of 40 mm.
The first elevation angle adjusting device 4 and the second elevation angle adjusting device 6 respectively adjust the elevation angles and the rotation angles of the pitch angles of the laser collimation and beam expansion system 3 and the laser coupling system 5, and are combined with a calibration light source and a target which are respectively arranged at the laser collimation and beam expansion system and the laser coupling system to calibrate the laser collimation and beam expansion system and the laser coupling system on the same straight line, so that the expanded laser central shaft and the central shaft of the laser coupling system 5 are on the same straight line.
As shown in fig. 3, the laser coupling system includes a fifth lens 51, a sixth lens 52, a seventh lens 53, and an eighth lens 54, which are arranged in this order from left to right. The fifth lens 51 and the sixth lens 52 are beam compression lenses, and compress the received light beams. The seventh lens 53 and the eighth lens 54 are focusing lenses, and the focusing lenses focus the laser beams, and the diameter of the focused laser spot is 1 mm. The circular truncated cone lens further compresses the laser into a light spot with the diameter of 0.4mm, the laser is coupled into the energy transmission optical fiber 7, and the energy transmission optical fiber 7 transmits the laser to an optical system inside the laser cleaning head 8. The outer diameter of one end of the truncated cone lens close to the focusing lens is 2mm, and the outer diameter of one end far away from the focusing lens is 0.5 mm.
As shown in fig. 4, the optical system inside the laser cleaning head 8 includes a ninth lens 81, a tenth lens 82, an eleventh lens 83, a mirror 84, and a powell prism 85. The ninth lens 81 is a collimating lens, and collimates the laser light emitted from the optical fiber. The tenth lens 82 and the eleventh lens 83 are beam compression lenses, and compress the light into a spot with a diameter of 0.24 mm. The reflector 84 turns the laser beam by 90 degrees, and the powell prism 85 converts the circular light spot into a linear light spot.
Specifically, the first lens 31 of the laser collimation and beam expansion system is an aspheric positive lens, the second lens 32 is a spherical positive lens, the third lens 33 is a spherical negative lens, and the fourth lens 34 is an aspheric positive lens; the material is fused quartz. A stop surface is provided at the first lens 31.
The front surface of the first lens 31 has an infinite radius of curvature, the rear surface has a radius of curvature of-11.2324 mm, and the front surface of the second lens 32 has a radius of curvature of 40.2225mm and a thickness of 2.5 mm. The radius of curvature of the rear surface of the second lens 32 is-75.0795 mm, the radius of curvature of the front surface of the third lens 33 is-8.0993 mm, and the thickness is 2.5 mm. The third lens 33 has a rear surface curvature radius of 46.3867mm and a thickness of 2.5 mm. The radius of curvature of the front surface of the fourth lens 34 is 72.6430mm, and the radius of curvature of the rear surface is-49.3993 mm. The thickness is 15 mm. The air space between the first lens 31 and the second lens 32 is 1.5mm, the air space between the second lens 32 and the third lens 33 is 10mm, and the air space between the third lens 33 and the fourth lens 34 is 45 mm.
The beam expansion multiple N of the laser is an integer and meets the requirement of
Where I is the laser energy density after laser beam expansion and I ≦ 500mw/mm2P is the power of the laser, r is the laser spot radius before laser beam expansion, and pi is the circumferential ratio. In this example. The laser collimation beam expanding system is a 5-time beam expanding system, firstly collimates laser into a light spot with the diameter of 8mm, then expands the light spot with the diameter of 8mm into a light spot with the diameter of 40mm, and the power density of the laser after beam expansion is
Meets the requirement of Class3B safety level.
In the laser coupling system, the fifth lens 51 has the same parameters as the fourth lens 34 of the laser beam expanding system, the sixth lens 52 is the same as the third lens 33, the seventh lens 53 is the same as the second lens 32, and the eighth lens 54 is the same as the first lens 31.
A focusing lens in the coupling system focuses the laser beam, and the diameter D of a focused light spot is more than 0.4mm and less than 1.2 mm. The outer diameter of one end, close to the focusing lens, of the circular truncated cone lens is larger than the focusing light spot of the laser, and the outer diameter of the other end, far away from the focusing lens, of the circular truncated cone lens is smaller than the diameter of a fiber core of the energy transmission optical fiber, so that the laser beam can be conveniently compressed and coupled into the energy transmission optical fiber.
In this embodiment, the focusing lens focuses the laser into a light spot with a diameter of 1mm, the outer diameter of one end of the truncated cone lens close to the focusing lens is 2mm, the outer diameter of the other end of the truncated cone lens far away from the focusing lens is 0.5mm, the length of the truncated cone lens is 10mm, and the laser beam is compressed and coupled into the energy transmission optical fiber.
The ninth lens 81 of the optical system inside the laser cleaning head is an aspheric positive lens, the tenth lens 82 is a spherical positive lens, and the eleventh lens 83 is a spherical negative lens. The ninth lens 81, the tenth lens 82, the eleventh lens 83, the mirror 84, and the powell prism 85 are all made of fused silica.
The curvature radius of the front surface of the ninth lens 81 is infinite, the curvature radius of the rear surface is-2.8716 mm, and the curvature radius of the front surface of the tenth lens 82 is 10.8063mm and the thickness is 2 mm. The tenth lens 82 has a rear surface curvature radius of-48.7200 mm and a thickness of 2 mm. The radius of curvature of the front surface of the eleventh lens 83 is-3.042 mm, the radius of curvature of the rear surface of the eleventh lens 83 is-3.042 mm, and the thickness is 2 mm. The reflector 84 is a flat reflector and has a thickness of 1.5 mm. The curvature radius of the front surface of the Powell prism 85 is-0.3 mm, and the conic constant is 3. The radius of curvature of the rear surface is infinite, the conic constant is 0 and the thickness is 3 mm. The air space between the ninth lens 81 and the tenth lens 82 is 3mm, the air space between the tenth lens 82 and the eleventh lens 83 is 15mm, the air space between the eleventh lens 83 and the reflector 84 is 20mm, and the air space between the reflector 84 and the powell prism 85 is 20 mm.
When the distance T from the Bawell prism 85 to the cleaning sample 9 is 45mm, the light spot length is 19.6mm, the width is 0.24mm, and when the distance T from the Bawell prism 85 to the cleaning sample 9 is 80mm, the light spot length is 35mm, and the width is 0.24 mm.
Further, the laser cleaning head comprises a wireless communication system with the laser. The wireless communication system ensures signal interconnection with the laser. And the light emitting and closing of the laser can be remotely controlled at the position of the laser cleaning head.
The actual lens parameters and thicknesses of the laser beam expanding system and the coupling system are shown in table 1 below:
table 1 (unit: mm):
| surface of | Radius of curvature | Thickness of | Glass material |
| Front surface of |
Infinite number of elements | 2.500 | SILICA |
| Rear surface of first lens 31 | -11.2324 | 1.500 | |
| Front surface of |
40.2225 | 2.500 | SILICA |
| Rear surface of second lens 32 | -75.0795 | 10.000 | |
| Front surface of third lens 33 | -8.0993 | 2.500 | SILICA |
| Rear surface of |
46.3867 | 45.000 | |
| Front surface of |
72.6430 | 15.000 | SILICA |
| Rear surface of fourth lens 34 | -49.3993 | 500000.000 | |
| Front surface of |
49.3993 | 15.000 | SILICA |
| Rear surface of fifth lens 51 | -72.6430 | 45.000 | |
| Front surface of sixth lens 52 | -46.3867 | 2.500 | SILICA |
| Rear surface of |
8.0993 | 10.000 | |
| Front surface of |
75.0795 | 2.500 | SILICA |
| Rear surface of seventh lens 53 | -40.2225 | 1.500 | |
| |
11.2324 | 2.500 | SILICA |
| Rear surface of |
Infinite number of elements | - |
Note: the quantity in the table being aspherical
Table 2 shows aspheric data of the rear surface of the first lens 31 and the rear surface of the fourth lens 34, where the aspheric formula is:
wherein z: the depth of the aspheric surface;
r: distance from the optical axis to the lens surface, mm;
k: eccentricity;
c: paraxial curvature;
a, B, C, D, E, F, G, H, I and J are aspheric coefficients of 4,6,8,10,12,14,16,18 and 20 orders respectively;
table 2: aspheric data of rear surface of first lens 31 and rear surface of fourth lens 34
The actual lens parameters and thicknesses of the internal optical system of the laser cleaning head are shown in table 3 below:
table 3 (unit: mm):
note: the quantity in the table being aspherical
Table 4 shows aspheric data of the rear surface of the ninth lens 81 and the front surface of the bowier prism 85.
Table 4:
fig. 5 is a focused spot diagram of a laser coupling system, wherein the radius of the focused spot is 500 μm.
FIG. 6 is a graph showing the linear spot performance in laser cleaning when the cleaning surface is 45mm away from the laser cleaning head, in which the length is 19.6mm and the width is 0.24 mm.
FIG. 7 is a graph showing the linear spot performance in laser cleaning when the cleaning surface is 80mm away from the laser cleaning head, the length being 35mm and the width being 0.24 mm.
The present invention is not limited to the above-described embodiments, and any obvious improvements, substitutions or modifications can be made by those skilled in the art without departing from the spirit of the present invention.
Claims (9)
1. A remote laser cleaning system is characterized by comprising a laser, an energy transmission optical fiber, a laser collimation and beam expansion system, a laser alignment system, a laser coupling system and a laser cleaning head, wherein the laser is connected with the laser collimation and beam expansion system through the energy transmission optical fiber and used for providing laser energy for laser cleaning; the laser coupling system is connected with the laser cleaning head through an energy transmission optical fiber;
the laser collimation and beam expansion system is used for collimating and expanding laser and expanding beam multiple
Taking an integer to satisfy that the laser energy density is less than 500mw/mm after beam expansion2Wherein I is laser after laser beam expansionLight energy density, and I ≦ 500mw/mm2P is the power of the laser, r is the laser spot radius before laser beam expansion, and pi is the circumference ratio; the laser collimation and beam expansion system sequentially comprises a first lens, a second lens, a third lens and a fourth lens from left to right, wherein the first lens and the second lens are collimation lenses and are used for collimating laser emitted by an optical fiber, the third lens and the fourth lens are beam expansion lenses and are used for expanding beams, and the diameter of the expanded beam is larger than 30 mm; the laser coupling system sequentially comprises a fifth lens, a sixth lens, a seventh lens, an eighth lens and a circular truncated cone lens from left to right, the fifth lens and the sixth lens are light beam compression lenses for compressing and transmitting received light beams, the seventh lens and the eighth lens are focusing lenses for focusing laser, the focusing lenses focus laser beams, and the diameter D of a focused light spot is more than 0.4mm and less than 1.2 mm; the outer diameter of one end, close to the focusing lens, of the circular truncated cone lens is larger than the diameter D of a focused light spot, and the outer diameter of one end, far away from the focusing lens, of the circular truncated cone lens is smaller than the diameter of a fiber core of the energy transmission optical fiber;
the laser coupling system is used for compressing and focusing the received laser beam and coupling the laser beam into the energy transmission optical fiber;
the laser alignment system is used for adjusting the central axis of the laser collimation and beam expansion system and the central axis of the laser coupling system on the same straight line, and comprises:
the first elevation angle adjusting device and the second elevation angle adjusting device are respectively used for adjusting the elevation angles of the laser collimation and beam expansion system and the laser coupling system; and (c) a second step of,
the calibration light source and the target are respectively arranged at the laser collimation and beam expansion system and the laser coupling system and are used for calibrating the laser collimation and beam expansion system and the laser coupling system on the same straight line.
2. The remote laser cleaning system according to claim 1, wherein a receiving aperture of the laser coupling system is larger than a diameter of a spot of the laser beam after being expanded.
3. The remote laser cleaning system according to claim 1, wherein the first lens of the laser collimating and beam expanding system is provided with a diaphragm surface.
4. The remote laser cleaning system of claim 1,
the first lens is a positive lens, the curvature radius of the front surface is infinite, the curvature radius of the rear surface is minus 11mm to minus 12mm, and the thickness is 2.4mm to 2.6 mm;
the second lens is a positive lens, the radius of curvature of the front surface is 40 mm-41 mm, the radius of curvature of the rear surface is-74 mm-76 mm, and the thickness is 2.4 mm-2.6 mm;
the third lens is a negative lens, the curvature radius of the front surface is-7.5 mm to-8.5 mm, the curvature radius of the rear surface is 45mm to 47mm, and the thickness is 2.4mm to 2.6 mm;
the fourth lens is a positive lens, the radius of curvature of the front surface is 71 mm-73 mm, the radius of curvature of the rear surface is-50 mm-48 mm, and the thickness is 14 mm-16 mm;
the first lens is an aspheric lens, the second lens is a spherical lens, the third lens is a spherical lens, and the fourth lens is an aspheric lens;
the air space between the first lens and the second lens is 1.4-1.6 m, the air space between the second lens and the third lens is 8-12 mm, and the air space between the third lens and the fourth lens is 44-46 mm;
the fifth lens of the laser coupling system has the same parameters as the fourth lens of the laser collimation and beam expansion system, the sixth lens of the laser coupling system has the same parameters as the third lens, the seventh lens of the laser coupling system has the same parameters as the second lens of the laser collimation and beam expansion system, and the eighth lens of the laser coupling system has the same parameters as the first lens of the laser collimation and beam expansion system.
5. The remote laser cleaning system according to claim 1, wherein the internal optical system of the laser cleaning head comprises a ninth lens, a tenth lens, an eleventh lens, a reflector and a powell prism which are arranged from left to right in sequence, wherein the ninth lens is a collimating lens for collimating the laser emitted by the optical fiber; the tenth lens and the eleventh lens are beam compression lenses for compressing the laser; the reflector turns the laser beam by 90 degrees, and the Bawell prism converts the circular light spot into a linear light spot.
6. The remote laser cleaning system of claim 5,
the ninth lens is a positive lens, the curvature radius of the front surface is infinite, the curvature radius of the rear surface is-3.2 mm to-2.8 m, and the thickness is 1.9mm to 2.1 mm;
the tenth lens is a positive lens, the radius of curvature of the front surface is 10 mm-11 mm, the radius of curvature of the rear surface is-49 mm-47 mm, and the thickness is 1.9 mm-2.1 mm;
the eleventh lens is a negative lens, the radius of curvature of the front surface is-3.1 mm to-2.9 mm, the radius of curvature of the rear surface is-3.1 mm to-2.9 mm, and the thickness is 1.9mm to 2.1 mm;
the reflector is a plane reflector, and the thickness of the reflector is 1 mm-3 mm;
the curvature radius of the front surface of the Bawell prism is-0.2 mm to-0.4 mm, the secondary curve constant is 3, the curvature radius of the rear surface is infinite, the secondary curve constant is 0, and the thickness is 2.9mm to 3.1 mm;
the air space between the ninth lens and the tenth lens is 2.9-3.1 mm, the air space between the tenth lens and the eleventh lens is 14-16 mm, the air space between the eleventh lens and the reflector is 8-50 mm, the air space between the reflector and the Bawell prism is 8-50 mm, and the distance T from the Bawell prism to a cleaning sample is 10-100 mm;
the ninth lens is an aspheric lens, and the tenth lens and the eleventh lens are spherical lenses.
7. The remote laser cleaning system of claim 5, wherein the length L and the width H of the linear light spot emitted from the internal optical system of the laser cleaning head satisfy
Where P is the laser power, eta1For the transmission efficiency, eta, of laser light in energy-transmitting optical fibers2The coupling efficiency of the laser, v laser emission frequency, and K is the cleaning threshold energy density of the cleaning contaminant.
8. The remote laser cleaning system according to claim 1, wherein the laser cleaning head comprises a wireless communication system with the laser for signal interconnection between the laser cleaning head and the laser, and the light emission and the closing of the laser are remotely controlled at the position of the laser cleaning head.
9. The remote laser cleaning system of claim 1, wherein the laser is a pulsed laser or a continuous laser; the typical core diameter of the energy transmission fiber is 600 μm and the numerical aperture is 0.3.
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