CN106556933B - It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method - Google Patents
It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method Download PDFInfo
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- CN106556933B CN106556933B CN201710000689.1A CN201710000689A CN106556933B CN 106556933 B CN106556933 B CN 106556933B CN 201710000689 A CN201710000689 A CN 201710000689A CN 106556933 B CN106556933 B CN 106556933B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
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Abstract
The invention discloses it is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping, the laser beam sheet apparatus for shaping includes light beam sheet shaping lens group and straight line slide unit, wherein：The light beam sheet shaping lens group along optical path direction successively by shaping concave cylindrical lens, shaping pillar lens, expand concave cylindrical lens and focal lens form；The straight line slide unit uses ball screw arrangement, is made of pedestal, lead screw and sliding block, wherein：Lead screw is fixed on the base, and sliding block is arranged on lead screw, and lens mounting hole is provided on the sliding block, shaping concave cylindrical lens are equipped on lens mounting hole, shaping pillar lens, expand concave cylindrical lens and focal lens.It is the configuration of the present invention is simple, easily operated, effectively reduce the operation difficulty of laser beam sheet shaping, improve the quality and stability of sheet beam after beam shaping, the requirement to sheet beam output angle under different use environments is met, the every field of Planar laser induced fluorescence application is suitable for.
Description
Technical field
The invention belongs to laser-diagnose technology field, be related to it is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and
Method.
Background technology
PLIF technologies（Planar laser induced fluorescence）It is a kind of high-precision optical diagnostic method, with many excellent
Point：
1, non-contact measurement, not interference flowing field structure；
2, the temporal resolution with nanosecond and micron-sized spatial resolution；
3, measured zone is big, can carry out two-dimensional space measurement；
4, have visuality, measurement result more intuitive；
5, quantitative measurment can be carried out by means such as calibration.
Currently, PLIF technologies are widely used in the diagnosis in combustion field and flow field, to constituents ratio, space in combustion flame
Distribution and the measurement of temperature and cold flow field possess huge application prospect.
When PLIF technologies are widely used in burning, flow field and Engine Block Test, the profession that operating personnel have is plain
Matter will directly affect measurement result.Wherein, it is suitble to the sheet reforming process of laser beam and adjustment the mistake of different operating mode outputs
Journey is particularly important, thus design a kind of device can simple and effective manipulation laser beam shaping and exporting be necessary.
Invention content
The object of the present invention is to provide it is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method, examined in PLIF
For exporting laser beam shaping for sheet beam in disconnected, lens are replaceable in lens group in the device, according to different waves
Long laser and required light sheets size replace required lens, which can accurately adjust the output light sheets depth of parallelism and thickness simultaneously
And light sheets output angle may be selected, it is suitable for the laser diagnostics experiment of various different diagnostic purposes and operating mode.
The purpose of the present invention is what is be achieved through the following technical solutions：
It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping, including light beam sheet shaping lens group and straight line slide
Platform, wherein：
The light beam sheet shaping lens group along optical path direction successively by shaping concave cylindrical lens, shaping pillar lens, expand
Concave cylindrical lens and focal lens composition, laser are shaped as light sheets, shaping via shaping concave cylindrical lens and shaping pillar lens
Light sheets afterwards compress its thickness by expanding concave cylindrical lens and focal lens；
The straight line slide unit uses ball screw arrangement, is made of pedestal, lead screw and sliding block, wherein：Lead screw and sliding block are equal
It it is four, lead screw is fixed on the base, and sliding block is arranged on lead screw, and lens mounting hole, lens installation are provided on the sliding block
Shaping concave cylindrical lens are installed on hole, shaping pillar lens, expand concave cylindrical lens and focal lens.
The method that the shaping of laser beam sheet and output of multidimensional adjustment are realized using above-mentioned apparatus, is included the following steps：
Step 1: target laser is shaped as light sheets via shaping concave cylindrical lens and shaping pillar lens；
Step 2: making piece by rotary screw rod to finely tune shaping concave cylindrical lens and the corresponding sliding block of shaping pillar lens
Shape light is substantially parallel；
Step 3: the light sheets after shaping compress its thickness by expanding concave cylindrical lens and focal lens, pass through rotation
Lead screw expands concave cylindrical lens and the corresponding sliding block of focal lens and makes its thickness reduction in 0.2mm or less to finely tune.
The invention has the advantages that：
1, the present invention is suitable for the every field of Planar laser induced fluorescence application.
2, the configuration of the present invention is simple, easily operated, greatly reduces operation difficulty, improves work efficiency.
3, the accurate fine adjustment function of straight line slide unit of the present invention eliminates shaping concave cylindrical lens and shaping pillar lens products sheet
Not parallel problem after body thickness and manually the sheet light shaping of adjusting error band, target laser can be shaped as being substantially parallel
Light sheets.
4, present invention utilization expands concave cylindrical lens and focal lens combination further has compressed the thickness of light sheets, improves
The spatial resolution of diagnostic result.
5, the present invention can inclination angle pedestal well solved laser shaping in current experiment light path may only be formed it is horizontal or
The problem of vertical light sheets, by adjusting inclination angle so that the output angle of light sheets meets the needs of diagnosed operating mode.
6, can be that thickness in 0.2mm sheet beams below and matches output by target laser beam shaping using the present invention
Angle is acted on measuring target.
7, the present invention effectively reduces the operation difficulty of laser beam sheet shaping, improves sheet beam after beam shaping
Quality and stability, meet the requirement to sheet beam output angle under different use environments.
Description of the drawings
Fig. 1 is the structural schematic diagram of light beam sheet shaping lens group；
Fig. 2 is the structural schematic diagram of straight line slide unit；
Fig. 3 be can inclination angle pedestal structural schematic diagram.
Specific implementation mode
Technical scheme of the present invention is further described below in conjunction with the accompanying drawings, however, it is not limited to this, every to this
Inventive technique scheme is modified or replaced equivalently, and without departing from the spirit of the technical scheme of the invention and range, should all be covered
In protection scope of the present invention.
Specific implementation mode one：Present embodiment provide can multidimensional adjustment laser beam sheet apparatus for shaping by light beam
Sheet shaping lens group and straight line slide unit composition.
As shown in Figure 1, the light beam sheet shaping lens group is convex by shaping concave cylindrical lens 1A, shaping successively along optical path direction
Cylindrical lens 1B, concave cylindrical lens 1C and focal lens 1D compositions are expanded.
As shown in Fig. 2, the straight line slide unit uses ball screw arrangement, it is made of pedestal 2A, lead screw 2B and sliding block 2C,
In：Lead screw 2B and sliding block 2C is four, and lead screw 2B is fixed on pedestal 2A, and sliding block 2C is arranged on lead screw 2B, the sliding block
On be provided with lens mounting hole 2E, be equipped on lens mounting hole 2E shaping concave cylindrical lens 1A, shaping pillar lens 1B, expand it is recessed
Cylindrical lens 1C and focal lens 1D.
In present embodiment, shaping concave cylindrical lens 1A, shaping pillar lens 1B, expansion in the light beam sheet shaping lens group
The optical axis of beam concave cylindrical lens 1C and focal lens 1D keep coaxially existing.
In present embodiment, target laser can be shaped as sheet by the shaping concave cylindrical lens 1A and shaping pillar lens 1B
Light, light sheets size are, wherein：f+For shaping pillar lens 1B focal lengths, f-For shaping concave cylindrical lens 1A focal lengths.
In present embodiment, described to expand expanding for concave cylindrical lens 1C and focal lens 1D recessed with shaping with compression direction
Cylindrical lens 1A and shaping pillar lens 1B vertically exist.
In present embodiment, the concave cylindrical lens 1C and focal lens 1D that expands can be by the sheet optical thickness pressure after shaping
Contracting is in 0.2mm or less.
In present embodiment, the shaping concave cylindrical lens 1A, shaping pillar lens 1B, expands concave cylindrical lens 1C and focus column
The anti-reflection film for shaped laser wavelength is coated on lens 1D, laser transmittance is 99% or more.
In present embodiment, four lead screw 2B possess independent leading screw knob 2D in the straight line slide unit.
In present embodiment, the straight line slide unit can accurately adjust optical distance between lens, eliminate each lens thickness itself
Laser shaping is feasible light sheets by the error brought, and makes being carried out in same optical axis for lens group stabilization
Linear motion.
In present embodiment, the degree of regulation of the straight line slide unit is 1mm.
The method that the shaping of laser beam sheet and output of multidimensional adjustment are realized using above-mentioned apparatus, by following steps reality
It is existing：
Step 1: laser is shaped as light sheets via shaping concave cylindrical lens 1A and shaping pillar lens 1B；
Step 2: saturating to finely tune shaping concave cylindrical lens 1A and shaping pillar by rotating threaded shaft knob 2D rotary screw rods 2B
The corresponding sliding block 2C of mirror 1B make light sheets be substantially parallel；
Step 3: the light sheets after shaping compress its thickness by expanding concave cylindrical lens 1C and focal lens 1D, pass through
Rotating threaded shaft knob 2D rotary screw rods 2B expands the corresponding sliding block 2C of concave cylindrical lens 1C and focal lens 1D and makes it to finely tune
Thickness reduction is in 0.2mm or less.
Specific implementation mode two：Present embodiment unlike specific implementation mode, it is described can multidimensional adjustment laser
Light beam sheet apparatus for shaping by light beam sheet shaping lens group, straight line slide unit and can inclination angle pedestal form.
As shown in figure 3, it is described can inclination angle pedestal by mounting seat 3A, base support 3B, can inclination angle fixed station 3C and straight line
Slide unit mounting hole 3D compositions, wherein：The base support 3B is fixed on mounting seat 3A, can inclination angle fixed station 3C be mounted on bottom
It is described to be provided with straight line slide unit mounting hole 3D on the fixed station 3C of inclination angle on seat support 3B, it is installed on straight line slide unit mounting hole 3D
There is the pedestal 2A of straight line slide unit.
In present embodiment, it is described can in the pedestal of inclination angle can inclination angle fixed station 3C can realize 0-90oAny angle is adjustable.
In present embodiment, the light beam sheet shaping lens group, straight line slide unit and can be after the floor installation of inclination angle in multidimensional
During adjustment, all lens axis are coaxial and holding position is constant.
The method that the shaping of laser beam sheet and output of multidimensional adjustment are realized using above-mentioned apparatus, by following steps reality
It is existing：
Step 1: laser is shaped as light sheets via shaping concave cylindrical lens 1A and shaping pillar lens 1B；
Step 2: saturating to finely tune shaping concave cylindrical lens 1A and shaping pillar by rotating threaded shaft knob 2D rotary screw rods 2B
The corresponding sliding block 2C of mirror 1B make light sheets be substantially parallel；
Step 3: the light sheets after shaping compress its thickness by expanding concave cylindrical lens 1C and focal lens 1D, pass through
Rotating threaded shaft knob 2D rotary screw rods 2B expands the corresponding sliding block 2C of concave cylindrical lens 1C and focal lens 1D and makes it to finely tune
Thickness reduction is in 0.2mm or less；
Step 4: adjustment can inclination angle pedestal can inclination angle fixed station, realize light sheets 0-90oAny angle exports.
Claims (9)
1. it is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping, it is characterised in that the laser beam sheet apparatus for shaping
Including light beam sheet shaping lens group and straight line slide unit, wherein：
The light beam sheet shaping lens group along optical path direction successively by shaping concave cylindrical lens, shaping pillar lens, expand recessed column
Lens and focal lens composition, shaping concave cylindrical lens, shaping pillar lens, the optical axis for expanding concave cylindrical lens and focal lens
It keeps coaxially existing, laser is shaped as light sheets via shaping concave cylindrical lens and shaping pillar lens, and the light sheets after shaping are logical
It crosses and expands concave cylindrical lens and focal lens compress its thickness；
The straight line slide unit uses ball screw arrangement, is made of pedestal, lead screw and sliding block, wherein：Lead screw and sliding block are four
A, lead screw is fixed on the base, and sliding block is arranged on lead screw, is provided with lens mounting hole on the sliding block, on lens mounting hole
Shaping concave cylindrical lens are installed, shaping pillar lens, expand concave cylindrical lens and focal lens.
2. it is according to claim 1 can multidimensional adjustment laser beam sheet apparatus for shaping, it is characterised in that the sheet
Light size is, wherein：f+For the shaping pillar focal length of lens, f-For shaping concave cylindrical lens focal length.
3. it is according to claim 1 can multidimensional adjustment laser beam sheet apparatus for shaping, it is characterised in that it is described to expand
Concave cylindrical lens and expanding for focal lens exist with compression direction and shaping concave cylindrical lens and shaping pillar vertical lens.
4. it is according to claim 1 can multidimensional adjustment laser beam sheet apparatus for shaping, it is characterised in that it is described to expand
Concave cylindrical lens and focal lens are by the light sheets thickness reduction after shaping in 0.2mm or less.
5. it is according to claim 1 can multidimensional adjustment laser beam sheet apparatus for shaping, it is characterised in that the shaping
Concave cylindrical lens, expand the anti-reflection film being coated on concave cylindrical lens and focal lens for shaped laser wavelength at shaping pillar lens,
Laser transmittance is 99% or more.
6. it is according to claim 1 can multidimensional adjustment laser beam sheet apparatus for shaping, it is characterised in that the straight line
The degree of regulation of slide unit is 1mm.
7. it is according to claim 1 can multidimensional adjustment laser beam sheet apparatus for shaping, it is characterised in that the laser
Light beam sheet apparatus for shaping further include can inclination angle pedestal, it is described can inclination angle pedestal by mounting seat, base support, can inclination angle fix
Platform and straight line slide unit mounting hole composition, wherein：The base support is fixed in mounting seat, can inclination angle fixed station be mounted on bottom
It is described to be provided with straight line slide unit mounting hole on the fixed station of inclination angle on seat support, straight line cunning is installed on straight line slide unit mounting hole
The pedestal of platform.
8. a kind of laser beam sheet apparatus for shaping using described in claim 1-7 any claims realizes multidimensional adjustment
The method of the shaping of laser beam sheet and output, it is characterised in that the described method comprises the following steps：
Step 1: target laser is shaped as light sheets via shaping concave cylindrical lens and shaping pillar lens；
Step 2: making light sheets by rotary screw rod to finely tune shaping concave cylindrical lens and the corresponding sliding block of shaping pillar lens
It is substantially parallel；
Step 3: the light sheets after shaping compress its thickness by expanding concave cylindrical lens and focal lens, pass through rotary screw rod
It expands concave cylindrical lens and the corresponding sliding block of focal lens to finely tune and makes its thickness reduction in 0.2mm or less.
9. the method for the shaping of laser beam sheet and output according to claim 8 for realizing multidimensional adjustment, feature exist
It is further comprising the steps of in the method：
Step 4: adjustment can inclination angle pedestal can inclination angle fixed station, realize light sheets 0-90oAny angle exports.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710000689.1A CN106556933B (en) | 2017-01-03 | 2017-01-03 | It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method |
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| CN201710000689.1A CN106556933B (en) | 2017-01-03 | 2017-01-03 | It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method |
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| CN106556933B true CN106556933B (en) | 2018-09-07 |
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| CN109239930A (en) * | 2018-10-10 | 2019-01-18 | 哈尔滨工业大学 | A kind of saturation type laser sheet beam apparatus for shaping |
| CN109581673A (en) * | 2018-12-28 | 2019-04-05 | 中国电子科技集团公司第二十七研究所 | A kind of linear light spot laser far field focus emission antenna |
| CN114654108B (en) * | 2022-04-09 | 2023-06-23 | 法特迪精密科技（苏州）有限公司 | MEMS probe silicon chip cutting device |
| CN115283364A (en) * | 2022-05-12 | 2022-11-04 | 成都启高科技有限公司 | Laser cleaning equipment for chip packaging mold |
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