CN1253300A - Line beam shaping device - Google Patents

Line beam shaping device Download PDF

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Publication number
CN1253300A
CN1253300A CN99124019A CN99124019A CN1253300A CN 1253300 A CN1253300 A CN 1253300A CN 99124019 A CN99124019 A CN 99124019A CN 99124019 A CN99124019 A CN 99124019A CN 1253300 A CN1253300 A CN 1253300A
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shaping
light beam
glass stack
edge glass
line
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CN1103059C (en
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陆雨田
刘立人
江建中
胡企铨
石鹏
李小莉
张贵芬
郭明秀
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

A line beam shaping device comprises a micro-cylindrical lens, a micro-sheet prism stack, a cylindrical lens, a spherical lens and an optical fiber which are sequentially arranged in the advancing direction of a line beam G emitted by a shaped line light source. The most key shaping element is a micro-sheet prism stack which is a regular triangle, an isosceles trapezoid or the like which is formed by closely arranging N micro-prisms and can enable the reflection of a line beam on the bottom surface of the line beam to be total internal reflection. The shaping device is suitable for any line beam needing shaping, and has the characteristics that the advancing direction of the shaped beam is not changed, the structure is simple, and the processing is easy.

Description

Shaper of linear light beam
The present invention relates to a kind of shaper of linear light beam of making by transmissive element.Be mainly used in the shaping of semiconductor laser linear array output light field, also can be used for other prolate shape light beams and become circular beam shaping occasion, as the shaping of the laminar laser instrument output light of the shaping of slab laser output light and high-power semiconductor laser pumping etc.
Semiconductor laser has asymmetrically distributed output light field.Can form array (the long 10mm of linear array usually) by many semiconductor lasers in order to increase substantially power output, yet meanwhile the asymmetric distribution of output light field more is reinforced manyfold.Semiconductor laser presents 60 °~90 ° height on the direction that perpendicular to the active region is pn knot disperses, but only 1 μ m is wide in the luminous zone, and beam quality reaches diffraction limit; And have only dispersing about 10 ° on the direction of active region being parallel to, there is certain length the luminous zone, especially when forming array, is equivalent to by the interrupted long line source of 10mm that forms of arranging in many sections luminous zones the beam quality extreme difference.Optical invariant on the both direction (Largrangian) differs thousands of times.So extremely asymmetric light beam can't the scioptics prism optical system of combination be gathered into the small light spot of certain depth of focus, to obtain sufficiently high brightness, can use Optical Fiber Transmission.People have found out various ways and have solved this problem, thereby finally realize the purpose that intensive semiconductor laser is sought for.Can try every possible means from the inner structure of array device, give great delivery element of numerical aperture of each semiconductor laser installing; Also can try every possible means, design the output light field that special optical system is come shaping and assembled array device from the outside.
Fig. 1 is that a kind of dislocation face catoptron reorganization output beam that leans on is to obtain the roughly optical field distribution of symmetry, be converged to little luminous point with lens combination then, shaping light collecting device by optical fiber coupling output, for German Fu Lang and the people such as the Dr.K.Du of laser technology institute of Feiing propose, its core technology is the special reflectors of a kind of being referred to as " ladder lens ".Among Fig. 1 the array pipe of semiconductor laser for the Line beam that sent by shaping line source 1 behind the so-called fast directional divergence of microtrabeculae lens 2 compressions angle by ladder lens 3 reorganization light field structures, to obtain the roughly divergent beams of symmetry, again through the combination of cylindrical lens 4 and spherical lens 5, converged on the input end face of optical fiber 6, through optical fiber 6 coupling outputs.This structure can obtain good shaping effect, and shortcoming is that (1) exists optical path difference between the light field each several part of ladder lens reorganization, needs compensation; (2) stepped appearance mirror finish difficulty is very big; (3) realization of the high refractive index layer of ladder minute surface is very difficult.
The purpose of this invention is to provide a kind of shaper of linear light beam, overcome the scarce limit of above-mentioned prior art, make its Line beam after apparatus for shaping shaping of the present invention, become the angle of divergence each to symmetrically round hot spot, the working direction of the light beam after the shaping does not change, and apparatus for shaping is simple in structure, the shaping element handling ease.
Shaper of linear light beam of the present invention is included in by on the Line beam G working direction of shaping line source 1 emission, and the microtrabeculae lens 2 of Zhi Fanging, microplate edge glass stack 3, cylindrical lens 4, spherical lens 5 are to optical fiber 6 successively.
In the shaper of linear light beam of the invention described above, be microplate edge glass stack 3 as the shaping element of the key of Line beam G, it is closely to arrange institute by N sheet microprism 301 to constitute.The sheet of microprism is counted N=κ θ s/ θ f, wherein κ is the compression multiple that places by the 2 pairs of Line beams of microtrabeculae lens between shaping line source 1 and the microplate edge glass stack 3, θ sFor light beam is dispersed the angle of divergence of direction, θ slowly fDisperse the angle of divergence of direction soon for light beam.
Said microplate edge glass stack 3 is to make Line beam at its bottom surface c nOn the equilateral triangle that is reflected into total internal reflection, or isosceles triangle, or isosceles trapezoid, or the quadrilateral that equates of two base angles.
Accompanying drawing 3 helps to explain the shaping principle of the present invention as the microplate edge glass stack 3 of shaping element.If microprism 301 is a symmetry, or day isosceles triangle, after the light that is parallel to microprism 301 basal edges so entered microprism 301 from an inclined-plane a, when microprism bottom surface c reflexed to the b outgoing of another inclined-plane, emergent ray also was parallel to microprism 301 basal edges.If incident is the one group of light that is positioned at same plane, and this plane is with respect to microprism 301 bottom surface deflection angle θ, and outgoing also is the one group of light that is positioned at same plane so, and this plane is with respect to microprism 301 bottom surface c deflection angle-θ.So, as long as microprism 301 around 45 ° of its basal edge rotations, just can become stretching, extension vertically to the parallel beam of along continuous straight runs stretching, extension.When light microprism 301 bottom surface c be reflected into total internal reflection the time, all the antireflective effect on two inclined-planes will be only depended in losses.Therefore, when requiring microplate edge glass stack 3 to be seated in the light path, its bottom surface c nParallel with the working direction of the Line beam G that is launched by shaping line source 1, and two inclined-plane a of light beam incident and outgoing n, b nCan comprise all by the cross section of shaping Line beam, that is to say the light beam incident inclined-plane a of microplate edge glass stack 3 nWith light beam outgoing inclined-plane b nMust be greater than by the cross section of shaping Line beam.As shown in Figure 4.
As mentioned above, microplate edge glass stack 3 is made up of many microprisms as shown in Figure 3, separately to 45 ° of placements of its basal edge rotation.So the line source of horizontal alignment is broken down into many little line sources, be transformed into many vertical orientated little line sources again, along continuous straight runs rearranges, and becomes the distribution of pectination.Situation as shown in Figure 4.Therefore, require the bottom surface c of the N sheet microprism 301 that microplate edge glass stack 3 comprised and the bottom surface c of microplate edge glass stack 3 nBetween 45 ° of angles are arranged.
If by shaping line source 1 long D, wide d then is respectively L in level with Largrangian on the vertical both direction Level=D θ sAnd L Vertically=d * θ fTypical high power semiconductor lasers array is D=10mm in the horizontal direction, angle of divergence θ sBe about 10 °, promptly what is called is dispersed direction slowly; D=1 μ m in vertical direction, angle of divergence θ fBe 60 °~90 °, promptly what is called is dispersed direction soon.L LevelAnd L VerticallyDiffer more than 1,000 times.Can " disperse direction soon " to it with the microtrabeculae lens 2 of a strip and compress, for example become the Line beam that the hundreds of micron is wide and the several years at zero point disperse.Such conversion can make output beam all enter apparatus for shaping, but can not change L VerticallyFor L Level, situation for example can be compressed to 1mm to 10mm too, but the angle of divergence will be above 100 °.If microtrabeculae lens 2 are with fast directional divergence angle θ fCompression κ doubly then has L Verticallyd* θ f/ κ.If the overall width of microplate edge glass stack 3 just with the length coupling of incident ray light source, be decomposed so and the length that changes into these vertical orientated little line sources is D/N all just, and the angle of divergence in vertical direction is exactly in the horizontal direction angle of divergence θ originally sIn the horizontal direction, the overall width that these little line sources are arranged is exactly the length D of original line source, and the angle of divergence is exactly the angle of divergence θ of (after the compression of microtrabeculae lens) originally in vertical direction f/ κ.If, the L of relation ' is arranged then to add the new Largrangian of " ' " expression Vertically=D/N * θ sAnd L ' Level=D * θ f/ κ.Draw θ thus f/ κ=θ s/ N.Suitably the sheet of selection microplate edge glass stack 3 is counted the compression multiple κ of N and microtrabeculae lens 2, makes the Largrangian on the both direction approaching, just can such light beam be focused into very little round hot spot with the combination of lens and prism, and the angle of divergence is respectively to symmetrically.Realize optical fiber coupling output, this amount also should be complementary with the core diameter and the numerical aperture of optical fiber.
Advantage of the present invention is to use apparatus for shaping of the present invention, when Line beam sees through shaping element---change original Largrangian behind the microplate edge glass stack 3, make Line beam become the angle of divergence each to symmetrically round hot spot, and not only can be applied to the Line beam shaping of semiconductor laser linear array, become an important apparatus for shaping in development optical fiber coupling output high-power semiconductor laser source, and can be applied to the shaping occasion that other prolate shape light beams become circular light beam.That is to say, can be applied to any Line beam that needs shaping.
Light beam after apparatus for shaping process microplate edge glass stack of the present invention 3 shapings still advances along former direction, and the characteristics that do not change working direction are arranged.That is to say that apparatus for shaping of the present invention does not cause the turnover of direction of beam propagation.
Shaping element of the present invention---microplate edge glass stack 3 can be made of common optical glass.Only need general optics processing, adhesion technique and coating technique.This is much simpler as the ladder lens of shaping element than prior art, and need not add the compensating element, of optical path difference in the light path.
Description of drawings:
Fig. 1 is the synoptic diagram of the shaper of linear light beam of ladder lens for the prior art shaping element.
Fig. 2 is the synoptic diagram of shaper of linear light beam of the present invention.
Fig. 3 is that the shaping as the microprism 301 in the microplate edge glass stack 3 of shaping element of the present invention constitutes synoptic diagram.
Fig. 4 is the structural representation of the microplate edge glass stack 3 as shaping element of the present invention.
Further specify apparatus for shaping of the present invention below in conjunction with drawings and Examples.
Embodiment 1:
Apparatus for shaping as shown in Figure 2.The structure of microplate edge glass stack 3 as shown in Figure 4.Be the semiconductor laser linear array wherein by shaping line source 1.Microplate prism 301 is an isosceles right triangle.By the long D=10mm of the linear array of shaping line source 1, angle of divergence θ s10 ° of ≌.
If line source length D ' from the luminous zone not too at a distance is about 12~14mm, when the sheet of microprism 301 is thick when being δ, the overall width of microplate edge glass stack 3 is
Figure A9912401900061
So requirement
Figure A9912401900062
To increase difficulty of processing greatly because the thickness δ of microprism 301 is too thin, also increase the light beam loss simultaneously.So, get δ>0.7mm usually.Draw requirement thus, the sheet of microplate edge glass stack 3 is counted N<15.
What on the other hand, approached that the microplate edge glass stack 3 of microtrabeculae lens 2 back obtains by the distance between the luminous zone of shaping line source 1 and the microtrabeculae lens 2 is κ d by shaping line source width.If this numerical value is too little, illustrate that microplate edge glass stack 3 is little apart from the distance of microtrabeculae lens 2, this will increase greatly installs the difficulty of adjusting, so, suitable usually κ>100 of getting.According to above-mentioned relational expression N=κ θ s/ θ f, θ f=60 °~90 °, θ s=10 °, require 10<N<15, so in the present embodiment, N ≌ 12 is optimum numerical value.The result who implements has obtained in the angle of divergence each round hot spot to symmetrically.
Embodiment 2:
By shaping line source 1 is solid batten laser, and the Line beam G of its output is rectangle, and the Largrangian on the both direction may differ tens times.By the long D ≌ 8mm of shaping line source 1, wide d ≌ 3mm, θ s5 ° of ≌, θ f0.6 ° of ≌ does not then need to compress θ fJust can, so, in the device shown in Figure 2, place by the microtrabeculae lens 2 between shaping line source 1 and the microplate edge glass stack 3 and can remove, that is to say compression multiple κ=1, Line beam G can directly enter microplate edge glass stack 3.By concerning N=κ θ s/ θ fObtain N ≌ 8.Consider that microprism 301 has error when decomposing reorganization unavoidably, according to experiment experience, θ fTo be strengthened, so the N value of real income is slightly less than the value of calculating above.Among this embodiment, get N=6 or 5 optimums.
Embodiment 3:
By shaping line source 1 is laminar laser instrument.Long D of line source and wide d are all with embodiment 2, so the structure of the microplate edge glass stack 3 of apparatus for shaping and shaping element is also identical with embodiment 2.
By the above embodiments, proved absolutely advantage of the present invention.As,
Embodiment 2: the output beam of solid batten laser is rectangle, Largrangian on the both direction may differ tens times, though can be with the method side of being compressed into spots such as cylindrical lenses, but be accompanied by on the both direction tens times the angle of divergence poor, this has influenced the depth of focus of the transmission and the convergence of light beam widely.Adopt the present invention just the rectangle output beam of slab laser be shaped to the angle of divergence each to symmetrically round hot spot, follow the output of solid stick laser instrument similar.
And for example, embodiment 3: laminar laser instrument extremely helps distributing effectively as laminar gain media and arranges laser generation direction, pumping direction and quick heat radiating direction, therefore become a kind of new structure of the solid state laser of high-power semiconductor laser pumping, what the laser instrument of unfortunate this structure was exported is " slice shape " light beam.Adopt the present invention just in time to address this problem now, final acquisition is the output of circle light beam well.

Claims (5)

1. shaper of linear light beam, be included in by on Line beam (G) working direction of shaping line source (1) emission, microtrabeculae lens (2) of Zhi Fanging successively, cylindrical lens (4), spherical lens (5) is characterized in that being equipped with between microtrabeculae lens (2) and cylindrical lens (4) as crucial shaping element and closely arranges the microplate edge glass stack (3) that is constituted by N sheet microprism (301) to optical fiber (6).
2. shaper of linear light beam according to claim 1 is characterized in that the sheet of the microprism (301) of said formation microplate edge glass stack (3) is counted N=κ θ s/ θ f, wherein κ is for to place by the compression multiple of the microtrabeculae lens (2) between shaping line source (1) and the microplate edge glass stack (3) to Line beam, θ sFor light beam is dispersed the angle of divergence of direction, θ slowly fThe angle of divergence of dispersing soon for light beam.
3. shaper of linear light beam according to claim 1 is characterized in that said microplate edge glass stack (3) is to make Line beam at its bottom surface (c n) on the equilateral triangle that is reflected into total internal reflection, or isosceles triangle, or isosceles trapezoid, or etc. the quadrilateral at base angle.
4. according to claim 1 or 3 described shaper of linear light beam, when it is characterized in that said microplate edge glass stack (3) is seated in the light path, its bottom surface (c n) parallel and light beam incident inclined-plane (a with the working direction of the Line beam of being launched by shaping line source (1) (G) n) and light beam outgoing inclined-plane (b n) greater than by the cross section of shaping Line beam.
5. shaper of linear light beam according to claim 1 and 2 is characterized in that the bottom surface (c) of the N sheet microprism (301) that said microplate edge glass stack (3) is comprised and the bottom surface (c of microplate edge glass stack (3) n) between 45 ° of angles are arranged.
CN 99124019 1999-11-16 1999-11-16 Line beam shaping device Expired - Fee Related CN1103059C (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1778023B (en) * 2003-04-23 2010-05-26 韩国科学技术院 Device for generating plane beam/conical shape beam and security device using generated plane beam/cone beam
CN103064190A (en) * 2012-12-28 2013-04-24 西北核技术研究所 Flaky light beam smoothing and reshaping device
CN103117509A (en) * 2013-03-08 2013-05-22 厦门大学 696nm red light total-solid laser of Blu-ray pump praseodymium-doped yttrium lithium fluoride
CN104285095A (en) * 2012-03-18 2015-01-14 罗布照明有限公司 A multisource beam shaping system
CN104836115A (en) * 2015-05-26 2015-08-12 中国工程物理研究院应用电子学研究所 Semiconductor laser light beam segmentation rearrangement device based on total reflection
CN106556933A (en) * 2017-01-03 2017-04-05 哈尔滨工业大学 It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method
CN106785883A (en) * 2016-12-20 2017-05-31 大族激光科技产业集团股份有限公司 High-power semiconductor laser
US10551038B2 (en) 2012-03-18 2020-02-04 Robe Lighting S.R.O. Modular multisource beam shaping system

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Publication number Priority date Publication date Assignee Title
CN100470346C (en) * 2007-03-07 2009-03-18 中国科学院上海光学精密机械研究所 Light beam shaping and coupling system of linear laser diode array

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1778023B (en) * 2003-04-23 2010-05-26 韩国科学技术院 Device for generating plane beam/conical shape beam and security device using generated plane beam/cone beam
CN104285095A (en) * 2012-03-18 2015-01-14 罗布照明有限公司 A multisource beam shaping system
CN104285095B (en) * 2012-03-18 2018-07-24 罗布照明公司 A kind of multi-source beam shaping system
US10514154B2 (en) 2012-03-18 2019-12-24 Robe Lighting S.R.O. Multisource beam shaping system
US10551038B2 (en) 2012-03-18 2020-02-04 Robe Lighting S.R.O. Modular multisource beam shaping system
CN103064190A (en) * 2012-12-28 2013-04-24 西北核技术研究所 Flaky light beam smoothing and reshaping device
CN103117509A (en) * 2013-03-08 2013-05-22 厦门大学 696nm red light total-solid laser of Blu-ray pump praseodymium-doped yttrium lithium fluoride
CN104836115A (en) * 2015-05-26 2015-08-12 中国工程物理研究院应用电子学研究所 Semiconductor laser light beam segmentation rearrangement device based on total reflection
CN106785883A (en) * 2016-12-20 2017-05-31 大族激光科技产业集团股份有限公司 High-power semiconductor laser
CN106556933A (en) * 2017-01-03 2017-04-05 哈尔滨工业大学 It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method
CN106556933B (en) * 2017-01-03 2018-09-07 哈尔滨工业大学 It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method

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