CN104330864A - Slab laser beam expanding alignment system capable of adjusting in electric closed loop mode - Google Patents
Slab laser beam expanding alignment system capable of adjusting in electric closed loop mode Download PDFInfo
- Publication number
- CN104330864A CN104330864A CN201410656319.XA CN201410656319A CN104330864A CN 104330864 A CN104330864 A CN 104330864A CN 201410656319 A CN201410656319 A CN 201410656319A CN 104330864 A CN104330864 A CN 104330864A
- Authority
- CN
- China
- Prior art keywords
- lens
- laser beam
- slab laser
- post
- detection system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/021—Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Lasers (AREA)
Abstract
The invention provides a slab laser beam expanding alignment system capable of adjusting in an electric closed loop mode. The slab laser beam expanding alignment system capable of adjusting in the electric closed loop mode comprises a slab laser device, a first cylindrical lens, a second cylindrical lens a first spherical lens, a second spherical lends, a computer, a stepping motor and a distant field detection system, wherein the first cylindrical lens and the second cylindrical lens are arranged in orthogonal mode, the first cylindrical lens and the cylindrical lens are respectively connected with the stepping motor, the computer is connected with the stepping motor and the distant field detection system, a laser beam transmitted by the slab laser device sequentially passes through the first cylindrical lens, the second cylindrical lens, the first spherical lens and the second spherical lends, and then is shot into the distant field detection system, and the computer receives a feedback signal of the distant field detection system, controls running of the stepping motor according to the feedback signal, and thereby controls positions of the first cylindrical lens and the second cylindrical lends. The slab laser beam expanding alignment system capable of adjusting in the electric closed loop mode can guarantee that slab laser has good alignment effects under different work states, and is high in adjustment accuracy, good in alignment effect, and safe and simple to operate.
Description
Technical field
The invention belongs to the shaping of laser beam, coupling, converter technique field, be specifically related to the laser alignment optical system of a kind of electronic closed loop adjustment, automatically regulate in real time for the size scaling of solid batten laser output beam and the angle of divergence.
Background technology
In solid batten laser, the asymmetric geometry of gain media and " it " font light path can the thermo-optic effects such as effective compensation thermal lens and thermally induced birefringence, are easier to obtain good beam quality under high power laser light output condition.But because the size of lath gain media Width is much larger than thickness direction size, under the continuous working order of high power, the thermograde of gain media inner width direction and thickness direction differs greatly, thus angle of divergence difference is larger in both directions to cause its output beam, and significant change can be there is along with loading power and the difference of working time in the angle of divergence, reduce beam quality, therefore need to carry out real-time beam-expanding collimation to its output beam.
Existing slab laser beam-expanding collimation system mainly contains two kinds of forms: 1) globe lens beam-expanding collimation system: be made up of two pieces of globe lenss, justifies symmetrical beam-expanding collimation to slab laser.Program system architecture is simple, but can not take into account the angle of divergence collimation of slab laser width and thickness both direction simultaneously.2) post the beams extended by lens colimated light system: be made up of two pieces of post lens and two pieces of globe lenss, precompensation is carried out to the width of slab laser and the specific angle of divergence of thickness direction, but significant change can be there is along with loading power and the difference of working time in the angle of divergence of slab laser, there is larger residual error and can not regulate in real time under high light state in program collimation, manual adjustments operating personnel can not ensure safely, and this is the weak point existing for prior art.
Summary of the invention
Object of the present invention, be exactly for the deficiency existing for prior art, and a kind of technical scheme of laser alignment optical system of electronic closed loop adjustment is provided, the program adopts computing machine to carry out data processing to the far-field spot that CCD gathers, calculate the angle of divergence of light beam at width of sheet and thickness direction, converse the space length of two pieces of post lens movement, be further converted to the rotation frame number of stepper motor, output on stepper motor and respectively the locus of two pieces of post lens is adjusted in real time, ensure, to the slab laser under different operating condition, all there is good collimating effect.
This programme is achieved by the following technical measures:
A slab laser beam-expanding collimation system for electronic closed loop adjustment, includes slab laser, the first post lens, the second post lens, the first globe lens, the second globe lens, computing machine, stepper motor and far field detection system; First post lens and the mutually orthogonal placement of the second post lens; First post lens are connected with stepper motor respectively with the second post lens; Computing machine is connected with stepper motor and far field detection system respectively; The laser beam that slab laser is launched injects far field detection system through after the first post lens, the second post lens, the first globe lens and the second globe lens successively; Computing machine receives the feedback signal of far field detection system and runs according to feedback signal control step motor thus control the position of the first post lens and the second post lens.
Preferred as this programme: far field detection system includes spectroscope, condenser lens and CCD; Laser beam after collimation injects the light-sensitive surface of CDD successively through spectroscope and condenser lens; The light-sensitive surface of described CDD is positioned over the focus place of condenser lens.
Preferred as this programme: spectroscope is high light high reflective mirror, and reflectivity is greater than 99.9%, and material selection high-quality melts quartz material, and absorption coefficient is less than 10ppm, and the clear aperture scope internal reflection 90% and transmission plane type PV value are all less than λ/6@633nm.
Preferred as this programme: far field detection system includes spectroscope, long-focus achromatism focus lens group and CCD; Described long-focus achromatism focus lens group includes falcate globe lens, plano-concave lens and includes the cemented doublet group of two panels spherical lens; Laser beam after collimation injects CDD light-sensitive surface after passing spectroscope, falcate globe lens, plano-concave lens successively and including the cemented doublet group of two panels spherical lens; Described CDD light-sensitive surface is arranged at the focus place of cemented doublet group.
Preferred as this programme: computing machine carries out data processing to the far-field spot that CCD gathers, calculate the angle of divergence of light beam at slab laser width and thickness direction, converse the space length of two pieces of post lens movement, be further converted to the rotation frame number of stepper motor, output on stepper motor and respectively the locus of the first post lens and the second post lens is adjusted in real time.
The beneficial effect of this programme can be learnt according to describing of such scheme, due to post lens and two pieces of globe lenss formation angle of divergence collimation lens set in this scenario by two pieces of orthogonal placements, can collimate the angle of divergence of slab laser width and thickness direction respectively; Far field detection system collimation effect can carry out real-time detection, computing machine carries out data processing to the far-field spot that CCD gathers, calculate the angle of divergence of light beam at width of sheet and thickness direction, converse the space length of two pieces of post lens movement, be further converted to the rotation frame number of stepper motor, output on stepper motor and respectively the locus of two pieces of post lens is adjusted in real time, ensure, to the slab laser under different operating condition, all there is good collimating effect.
The present invention can ensure that slab laser all has good collimating effect under different duties, and degree of regulation is high, and collimating effect is good, and handling safety is simple.
As can be seen here, the present invention compared with prior art, has substantive distinguishing features and progress, and its beneficial effect implemented also is apparent.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the perspective view of the first post lens and the second post lens in Fig. 1.
Fig. 3 is the structural representation of the far field focus lens combination of example 2 of the present invention.
In figure, 1 is the first post lens, and 2 is the second post lens, and 3 is the first globe lens, and 4 is the second globe lens, 5 is spectroscope, and 6 is condenser lens, and 7 is CDD, and 8 is computing machine, and 9 is stepper motor, 11 is falcate globe lens, and 12 is falcate globe lens, and 13 is plano-concave lens, 14 cemented doublet groups.
Embodiment
All features disclosed in this instructions, or the step in disclosed all methods or process, except mutually exclusive characteristic sum step, all can combine by any way.
Arbitrary feature disclosed in this instructions (comprising any accessory claim, summary and accompanying drawing), unless specifically stated otherwise, all can be replaced by other equivalences or the alternative features with similar object.That is, unless specifically stated otherwise, each feature is an example in a series of equivalence or similar characteristics.
Embodiment 1
As Fig. 1, slab laser, the first post lens, the second post lens, the first globe lens, the second globe lens, computing machine, stepper motor and far field detection system are the present invention includes; First post lens and the mutually orthogonal placement of the second post lens; First post lens are connected with stepper motor respectively with the second post lens; Computing machine is connected with stepper motor and far field detection system respectively; The laser beam that slab laser is launched injects far field detection system through after the first post lens, the second post lens, the first globe lens and the second globe lens successively; Computing machine receives the feedback signal of far field detection system and runs according to feedback signal control step motor thus control the position of the first post lens and the second post lens.
Far field detection system includes spectroscope, condenser lens and CCD; Laser beam after collimation injects the light-sensitive surface of CDD successively through spectroscope and condenser lens; The light-sensitive surface of described CDD is positioned over the focus place of condenser lens.
Computing machine carries out data processing to the far-field spot that CCD gathers, calculate the angle of divergence of light beam at slab laser width and thickness direction, converse the space length of two pieces of post lens movement, be further converted to the rotation frame number of stepper motor, output on stepper motor and respectively the locus of the first post lens and the second post lens is adjusted in real time.
First post lens are planoconvex lens, and clear aperture is 10 × 30mm, and focal length is 30mm, and material is fused quartz, and the plated surface anti-reflection film of resistance to high light, transmitance is greater than 99.8%.
Second post lens are plano-concave mirror, and clear aperture is 30 × 10mm, and focal length is-54mm, and material is fused quartz, and the plated surface anti-reflection film of resistance to high light, transmitance is greater than 99.8%.
First globe lens is biconvex globe lens, and clear aperture is Φ 50mm, and focal length is 319mm, and material is fused quartz, and the plated surface anti-reflection film of resistance to high light, transmitance is greater than 99.8%.
Second globe lens is falcate globe lens, and clear aperture is Φ 50mm, and focal length is-2073mm, and material is fused quartz, and the plated surface anti-reflection film of resistance to high light, transmitance is greater than 99.8%.
Spectroscope is level crossing, and reflectivity is greater than 99.9%, and material selection high-quality melts quartz material, and absorption coefficient is less than 10ppm, and the clear aperture scope internal reflection 90% and transmission plane type PV value are all less than λ/6@633nm.
Condenser lens is biconvex lens, and clear aperture is Φ 50mm, and focal length is 600mm, and material is fused quartz, and the plated surface anti-reflection film of resistance to high light, transmitance is greater than 99.8%.
Embodiment 2
The present embodiment is identical with the basic structure of embodiment 1, and difference is, condenser lens 6 changes long-focus achromatism focus lens group into, as shown in Figure 3, is made up of falcate globe lens, plano-concave lens and the cemented doublet group that includes two panels spherical lens.
Falcate globe lens 11, clear aperture is Φ 50mm, and focal length is 290mm, and material is H-ZF7LA, and the plated surface anti-reflection film of resistance to high light, transmitance is greater than 99.8%.
Falcate globe lens 12, clear aperture is Φ 50mm, and focal length is 186mm, and material is H-ZF7LA, and the plated surface anti-reflection film of resistance to high light, transmitance is greater than 99.8%.
Plano-concave lens, clear aperture is Φ 50mm, and focal length is-116mm, and material is H-ZF7LA, and the plated surface anti-reflection film of resistance to high light, transmitance is greater than 99.8%.
Cemented doublet group comprises two panels spherical lens, and clear aperture is Φ 15mm, and combined focal length is-14mm, and lens material is respectively H-ZF7LA and H-K9L, and the plated surface anti-reflection film of resistance to high light, transmitance is greater than 99.8%.
The present invention passes through post lens and two pieces of globe lenss formation angle of divergence collimation lens set of two pieces of orthogonal placements, can collimate the angle of divergence of slab laser width and thickness direction respectively; Far field detection system collimation effect can carry out real-time detection, and calculate the angle of divergence of light beam at width of sheet and thickness direction, as stepper motor close-loop feedback letter, the locus of two pieces of post lens is adjusted in real time, make slab laser all have good collimating effect under different duties.
The present invention is not limited to aforesaid embodiment.The present invention expands to any new feature of disclosing in this manual or any combination newly, and the step of the arbitrary new method disclosed or process or any combination newly.
Claims (5)
1. a slab laser beam-expanding collimation system for electronic closed loop adjustment, is characterized in that: include slab laser, the first post lens, the second post lens, the first globe lens, the second globe lens, computing machine, stepper motor and far field detection system; Described first post lens and the mutually orthogonal placement of the second post lens; Described first post lens are connected with stepper motor respectively with the second post lens; Described computing machine is connected with stepper motor and far field detection system respectively; The laser beam that described slab laser is launched injects far field detection system through after the first post lens, the second post lens, the first globe lens and the second globe lens successively; Described computing machine receives the feedback signal of far field detection system and runs according to feedback signal control step motor thus control the position of the first post lens and the second post lens.
2. the slab laser beam-expanding collimation system of a kind of electronic closed loop adjustment according to claim 1, is characterized in that: described far field detection system includes spectroscope, condenser lens and CCD; Laser beam after collimation injects the light-sensitive surface of CDD successively through spectroscope and condenser lens; The light-sensitive surface of described CDD is positioned over the focus place of condenser lens.
3. the slab laser beam-expanding collimation system of a kind of electronic closed loop adjustment according to claim 1, it is characterized in that: described spectroscope is high light high reflective mirror, reflectivity is greater than 99.9%, material selection high-quality melts quartz material, absorption coefficient is less than 10ppm, and the clear aperture scope internal reflection 90% and transmission plane type PV value are all less than λ/6@633nm.
4. the slab laser beam-expanding collimation system of a kind of electronic closed loop adjustment according to claim 1, is characterized in that: described far field detection system includes spectroscope, long-focus achromatism focus lens group and CCD; Described long-focus achromatism focus lens group includes falcate globe lens, plano-concave lens and includes the cemented doublet group of two panels spherical lens; Laser beam after collimation injects CDD light-sensitive surface after passing spectroscope, falcate globe lens, plano-concave lens successively and including the cemented doublet group of two panels spherical lens; Described CDD light-sensitive surface is arranged at the focus place of cemented doublet group.
5. the slab laser beam-expanding collimation system of a kind of electronic closed loop adjustment according to claim 1 or 2 or 4, it is characterized in that: described computing machine carries out data processing to the far-field spot that CCD gathers, calculate the angle of divergence of light beam at slab laser width and thickness direction, converse the space length of two pieces of post lens movement, be further converted to the rotation frame number of stepper motor, output on stepper motor and respectively the locus of the first post lens and the second post lens is adjusted in real time.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410656319.XA CN104330864B (en) | 2014-11-18 | 2014-11-18 | A kind of slab laser beam-expanding collimation system of electronic closed loop adjustment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410656319.XA CN104330864B (en) | 2014-11-18 | 2014-11-18 | A kind of slab laser beam-expanding collimation system of electronic closed loop adjustment |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104330864A true CN104330864A (en) | 2015-02-04 |
CN104330864B CN104330864B (en) | 2017-12-15 |
Family
ID=52405621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410656319.XA Active CN104330864B (en) | 2014-11-18 | 2014-11-18 | A kind of slab laser beam-expanding collimation system of electronic closed loop adjustment |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104330864B (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104678556A (en) * | 2015-02-06 | 2015-06-03 | 中国科学院理化技术研究所 | Real-time shaping and low-order aberration compensating system for strip-shaped astigmatic beam of lens group |
CN106556933A (en) * | 2017-01-03 | 2017-04-05 | 哈尔滨工业大学 | It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method |
CN108519680A (en) * | 2018-05-22 | 2018-09-11 | 苏州市天凯光电配件厂 | The adjustable two waveband laser focusing system of focus |
CN108549159A (en) * | 2018-06-04 | 2018-09-18 | 凯迈(洛阳)测控有限公司 | It is a kind of to shine the optical system for surveying device for airborne laser |
CN111856764A (en) * | 2020-07-24 | 2020-10-30 | 江苏中烟工业有限责任公司 | Method and device for checking lens spacing in Galileo beam expander |
CN112495941A (en) * | 2020-11-10 | 2021-03-16 | 江苏大学 | Remote laser cleaning system |
CN114217447A (en) * | 2021-11-22 | 2022-03-22 | 中国工程物理研究院应用电子学研究所 | Laser beam shaping and converting device |
CN115453766A (en) * | 2022-11-11 | 2022-12-09 | 南京英田光学工程股份有限公司 | High-aspect-ratio beam expanding lens and laser communication terminal comprising same |
WO2023185151A1 (en) * | 2022-03-31 | 2023-10-05 | 武汉锐科光纤激光技术股份有限公司 | Light beam collimation device, method and apparatus, storage medium, and electronic apparatus |
CN117075356A (en) * | 2023-10-17 | 2023-11-17 | 深圳市镭硕光电科技有限公司 | Laser lighting device |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5402438A (en) * | 1992-10-16 | 1995-03-28 | Fuji Electric Co., Ltd. | Solid state laser device |
US5818645A (en) * | 1996-07-16 | 1998-10-06 | Management Graphics, Inc. | Multimode optical source and image scanning apparatus using the same |
CN101325072A (en) * | 2008-07-24 | 2008-12-17 | 中国科学技术大学 | Method for reading and writing data of double beam three-dimensional optical disk |
CN101329204A (en) * | 2008-07-18 | 2008-12-24 | 清华大学 | Method and apparatus for measuring thin film non-uniform stress on line |
CN201285472Y (en) * | 2008-11-07 | 2009-08-05 | 王旭 | Dynamic holographic tri-dimensional projection apparatus |
CN102230962A (en) * | 2011-04-08 | 2011-11-02 | 哈尔滨工业大学 | Laser radar coaxial transmitting and receiving system and coaxial adjustment method thereof |
CN102323593A (en) * | 2011-08-24 | 2012-01-18 | 北京国科环宇空间技术有限公司 | Two-dimensional dynamic target capturing system |
-
2014
- 2014-11-18 CN CN201410656319.XA patent/CN104330864B/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5402438A (en) * | 1992-10-16 | 1995-03-28 | Fuji Electric Co., Ltd. | Solid state laser device |
US5818645A (en) * | 1996-07-16 | 1998-10-06 | Management Graphics, Inc. | Multimode optical source and image scanning apparatus using the same |
CN101329204A (en) * | 2008-07-18 | 2008-12-24 | 清华大学 | Method and apparatus for measuring thin film non-uniform stress on line |
CN101325072A (en) * | 2008-07-24 | 2008-12-17 | 中国科学技术大学 | Method for reading and writing data of double beam three-dimensional optical disk |
CN201285472Y (en) * | 2008-11-07 | 2009-08-05 | 王旭 | Dynamic holographic tri-dimensional projection apparatus |
CN102230962A (en) * | 2011-04-08 | 2011-11-02 | 哈尔滨工业大学 | Laser radar coaxial transmitting and receiving system and coaxial adjustment method thereof |
CN102323593A (en) * | 2011-08-24 | 2012-01-18 | 北京国科环宇空间技术有限公司 | Two-dimensional dynamic target capturing system |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104678556A (en) * | 2015-02-06 | 2015-06-03 | 中国科学院理化技术研究所 | Real-time shaping and low-order aberration compensating system for strip-shaped astigmatic beam of lens group |
CN106556933A (en) * | 2017-01-03 | 2017-04-05 | 哈尔滨工业大学 | It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method |
CN106556933B (en) * | 2017-01-03 | 2018-09-07 | 哈尔滨工业大学 | It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method |
CN108519680A (en) * | 2018-05-22 | 2018-09-11 | 苏州市天凯光电配件厂 | The adjustable two waveband laser focusing system of focus |
CN108549159B (en) * | 2018-06-04 | 2023-06-23 | 凯迈(洛阳)测控有限公司 | Optical system for airborne laser irradiation detector |
CN108549159A (en) * | 2018-06-04 | 2018-09-18 | 凯迈(洛阳)测控有限公司 | It is a kind of to shine the optical system for surveying device for airborne laser |
CN111856764A (en) * | 2020-07-24 | 2020-10-30 | 江苏中烟工业有限责任公司 | Method and device for checking lens spacing in Galileo beam expander |
CN111856764B (en) * | 2020-07-24 | 2022-01-14 | 江苏中烟工业有限责任公司 | Method and device for checking lens spacing in Galileo beam expander |
CN112495941A (en) * | 2020-11-10 | 2021-03-16 | 江苏大学 | Remote laser cleaning system |
CN114217447A (en) * | 2021-11-22 | 2022-03-22 | 中国工程物理研究院应用电子学研究所 | Laser beam shaping and converting device |
WO2023185151A1 (en) * | 2022-03-31 | 2023-10-05 | 武汉锐科光纤激光技术股份有限公司 | Light beam collimation device, method and apparatus, storage medium, and electronic apparatus |
CN115453766A (en) * | 2022-11-11 | 2022-12-09 | 南京英田光学工程股份有限公司 | High-aspect-ratio beam expanding lens and laser communication terminal comprising same |
CN117075356A (en) * | 2023-10-17 | 2023-11-17 | 深圳市镭硕光电科技有限公司 | Laser lighting device |
CN117075356B (en) * | 2023-10-17 | 2024-02-06 | 深圳市镭硕光电科技有限公司 | Laser lighting device |
Also Published As
Publication number | Publication date |
---|---|
CN104330864B (en) | 2017-12-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104330864A (en) | Slab laser beam expanding alignment system capable of adjusting in electric closed loop mode | |
US10254484B2 (en) | Methods of controllably altering the beam parameter product of radiation beams coupled into optical fibers | |
CN104949013A (en) | Divergent type solar simulator optical system realizing large spot diameter and high uniformity | |
CN102621694A (en) | Shaping and collimating device for stripped astigmatic bundles | |
CN108506893A (en) | A kind of Method of Adjustment of collimation formula solar simulator optical system | |
CN205484801U (en) | Laser range finder's optical axis timing system | |
CN109212767A (en) | A kind of laser conjunction beam system | |
CN106249427B (en) | A kind of optic axis adjusting method based on laser imaging | |
CN113751892B (en) | Thick material cutting system based on laser facula energy shaping | |
CN107643596B (en) | Binary zone plate type diffraction axicon lens system and long focal depth imaging method thereof | |
CN110658631A (en) | Light beam shaping device based on anisotropic two-photon absorption effect | |
CN204679716U (en) | Polarization characteristic is utilized to generate the apparatus for shaping of parallel flat top beam | |
CN203275776U (en) | Device for realizing laser beam long distance precise focusing | |
CN103592978B (en) | A kind of optical sensor precise temperature control method based on thermo-optical picture element optimum | |
CN112612142A (en) | Optical system for generating quasi-flat-top circular light spots | |
CN205096720U (en) | Laser process equipment's automatic focusing device | |
CN201975681U (en) | Light-beam micro-displacement online automatic installation and adjustment system for ring laser | |
CN105328330B (en) | CO2 laser and outer optical path transmission method and system of CO2 laser | |
CN203765163U (en) | Laser flying light path correction device | |
CN204612671U (en) | A kind of detection light path of optical thin film element thermal deformation | |
CN103309147B (en) | Visible Light Camera focal plane rapid alignment method and device | |
Liu et al. | A broadband low-chromatic-aberration single grating Offner stretcher by 3D analysis | |
CN207181837U (en) | Laser beam homogenization device | |
CN206305608U (en) | A kind of adjusting means of laser power and light path | |
CN206981987U (en) | Laser pre-treated device for optical element |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |