CN207181837U - Laser beam homogenization device - Google Patents
Laser beam homogenization device Download PDFInfo
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- CN207181837U CN207181837U CN201720946713.6U CN201720946713U CN207181837U CN 207181837 U CN207181837 U CN 207181837U CN 201720946713 U CN201720946713 U CN 201720946713U CN 207181837 U CN207181837 U CN 207181837U
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Abstract
The utility model proposes a kind of laser beam homogenization device, and for homogenizing the laser that power distribution is Gaussian Profile, the laser beam homogenization device includes：Diverging optical element group, for the laser of incidence to be converted into diverging light；Beam splitter optic group, for being superimposed to form flat top beam to the diverging light beam splitting, and by the laser after beam splitting.By laser beam homogenization device of the present utility model, cost that the laser shaping that power distribution is Gaussian Profile is flat-top light is low, and to wavelength without selectivity, rectangular light spot size is flexibly adjustable, also, is respectively provided with larger field depth and preferably homogenizes effect.
Description
Technical field
Laser shaping field, more particularly to a kind of laser homogenizing device are the utility model is related to, by Laser beam energy distribution
Gaussian Profile is converted into being uniformly distributed for flat roof type.
Background technology
The optical power distribution of laser cross-section is generally Gaussian Profile, i.e. center power is big, more smaller to edge power.But
It is in some application fields such as laser welding, Laser Surface Treatment and laser medicine, it is desirable to which the power distribution of laser is flat-top
Formula is uniformly distributed, and you must use some optical shaping methods to realize the purpose.Flat-top light shaping side main at present
Case has：Aperture diaphragm intercepts method, diffraction optical element method, microlens array shaping method, non-spherical lens method etc..Above shaping side
Shortcoming is obvious in case implementation process, specific as follows：Aperture diaphragm method can realize simplest flat-top light output.But this method obtains
To homogenize ineffective, and optical energy loss is serious；Diffraction optical element method can only be designed targetedly according to demand, and one
Denier, which changes the parameters such as optical maser wavelength, must just redesign, and the laser damage threshold of the program is relatively low, can be only applied to small work(
Rate laser, and the design of diffraction optical element and manufacturing cost are higher, and assembly precision requires more harsh；Microlens array
The shortcomings that shaping method cost is higher, the region of realization is too small, easy product interference fringe；Aspherical mirror in non-spherical lens method
Cost of manufacture is equally higher.Therefore, the laser shaping scheme that a kind of cost is cheap and shaping effect is good is needed at present.
Utility model content
In order to solve the above problems, the utility model proposes a kind of laser beam homogenization device, to provide a kind of cost
The good laser shaping scheme of cheap and shaping effect.
In order to achieve the above object, laser beam homogenization device of the present utility model, it is Gauss for homogenizing power distribution
The laser of distribution, including：Diverging optical element group, for the laser of incidence to be converted into diverging light；Beam splitter optic group, use
It is superimposed to form flat top beam in diverging light beam splitting, and by the laser after beam splitting.
Further, diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted into first
Diverging light on direction；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；Light splitting optical
Element group includes：First direction prism, for its incident light on first direction beam splitting；Second direction prism, for it
Incident light is on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror, second direction cylindrical mirror,
First direction prism, second direction prism are arranged in order along the light direction of propagation, and incident laser is by first direction cylinder mirror
Enter, pass sequentially through second direction cylindrical mirror and first direction prism, projected by second direction prism and form flat top beam.
Further, diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted into first party
Upward diverging light；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；Light splitting optical member
Part group includes：First direction prism, for its incident light on first direction beam splitting；Second direction prism, for entering to it
Light is penetrated on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror, first direction prism, second
Direction cylindrical mirror, second direction prism are arranged in order along the light direction of propagation, and incident laser is injected by first direction cylindrical mirror,
First direction prism and second direction cylindrical mirror are passed sequentially through, is projected by second direction prism and forms flat top beam.
Further, diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted into first party
Upward diverging light；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；Light splitting optical member
Part group includes：First direction prism, for its incident light on first direction beam splitting；Second direction prism, for entering to it
Light is penetrated on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror, second direction cylindrical mirror,
Two direction prisms, first direction prism are arranged in order along the light direction of propagation, and incident laser is injected by first direction cylindrical mirror,
Second direction cylindrical mirror and second direction prism are passed sequentially through, is projected by first direction prism and forms flat top beam.
Further, diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted into first party
Upward diverging light；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；Light splitting optical member
Part group includes：Two-way prism, for its incident light on first direction, second direction beam splitting；First direction and second direction
It is orthogonal；First direction cylindrical mirror, second direction cylindrical mirror, two-way prism are arranged in order along the light direction of propagation, incident laser
Injected by first direction cylindrical mirror, by second direction cylindrical mirror, projected by two-way prism and form flat top beam.
Further, diverging optical element group includes：Circular concavees lens, for its incident light to be converted to the diverging of circle
Light；Beam splitter optic group includes：Two-way prism, for its incident light on first direction, second direction beam splitting；First party
To orthogonal with second direction；Circular concavees lens, two-way prism are arranged in order along the light direction of propagation, and incident laser is by circle
Concavees lens are injected, and project to form flat top beam by two-way prism.
The beneficial effects of the utility model are, by laser beam homogenization device of the present utility model, by power distribution
Laser shaping for Gaussian Profile is that the cost of flat-top light is low, and to the no selectivity of wavelength, rectangular light spot size is flexibly adjustable, and
And it is respectively provided with larger field depth and preferably homogenizes effect.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, drawings in the following description are only
Only it is some embodiments of the utility model, for those of ordinary skill in the art, is not paying creative labor
Under the premise of, other accompanying drawings can also be obtained according to these accompanying drawings.
Figure 1A is the structure and light path schematic diagram of the laser beam homogenization device of the utility model embodiment.
Figure 1B is the power distribution schematic diagram of the incident light of the utility model embodiment.
Fig. 1 C are the power distribution schematic diagram of the emergent light of the utility model embodiment.
Fig. 2 is the structural representation of the laser beam homogenization device of the utility model second embodiment.
Fig. 3 A are the structural representation of the laser beam homogenization device of the utility model 3rd embodiment.
Fig. 3 B are the power profile of the incident light of the utility model 3rd embodiment.
Fig. 3 C are the power profile of the emergent light of the utility model 3rd embodiment.
Fig. 3 D are the power point of the emergent light that the second cylinder curvature radius is 12mm in the utility model 3rd embodiment
Butut.
Fig. 4 is the structural representation of the laser beam homogenization device of the utility model fourth embodiment.
Fig. 5 is the structural representation of the laser beam homogenization device of the embodiment of the utility model the 5th.
Fig. 6 is the structural representation of the laser beam homogenization device of the utility model sixth embodiment.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describe, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole realities
Apply example.Based on the embodiment in the utility model, relevant technical staff in the field institute under the premise of creative work is not made
The every other embodiment obtained, belong to the scope of protection of the present utility model.
Figure 1A is the structure and light path schematic diagram of the laser beam homogenization device of the utility model embodiment.Such as Figure 1A institutes
Show, laser beam homogenization device, for homogenizing the laser that power distribution is Gaussian Profile, including：Diverging optical element group 100,
For the laser of incidence to be converted into diverging light；Beam splitter optic group 200, for diverging light beam splitting, and by after beam splitting
Laser is superimposed to form flat top beam.
Figure 1B is the power distribution schematic diagram of the incident light of the utility model embodiment, and Fig. 1 C are the utility model embodiment
Emergent light power distribution schematic diagram.With reference to shown in Figure 1A, Figure 1B and Fig. 1 C, incident light is that power distribution is Gaussian Profile
Laser, it is in divergent state after diverging optical element group 100, the output light (diverging light) of the diverging optical element 100
Energy distribution is centrosymmetric, to be convenient to follow-up input operation.Beam splitter optic group 200, its input light are diverging optical
The output light (diverging light) of element 100, the diverging light are divided for multiple laser by beam splitter optic group 200, the multiple laser
Energy distribution is symmetrical, and multiple laser after beam splitting continues to propagate forward, and common irradiation is on a setting face, the multiple laser
Energy is overlapped mutually (quadrangle filled in Figure 1A with two beam difference twills, which is overlapped mutually, to be represented), eventually forms flat top beam.
Described herein to be, what Figure 1A only illustrated is illustrated in the power distribution state of the input light and output light in one direction, this area
It is respectively Gaussian Profile with being uniformly distributed that technical staff, which is understood that input light with exporting photophase distribution spatially,.
Fig. 2 is the structural representation of the laser beam homogenization device of the utility model second embodiment.As shown in Fig. 2 swash
In light process for light beam homogenization device, diverging optical element group includes：First direction cylindrical mirror 110, for its incident light to be converted into
Diverging light on one direction；Second direction cylindrical mirror 120, for its incident light to be converted to the diverging light in second direction；Point
Beam optics element group includes：First direction prism 210, for its incident light on first direction beam splitting；Second direction prism
220, for its incident light on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror 110,
Second direction cylindrical mirror 120, first direction prism 210, second direction prism 220 are arranged in order along the light direction of propagation, incident
Laser entered by the mirror of first direction cylinder 110, pass sequentially through second direction cylindrical mirror 120 and first direction prism 210, by
Second direction prism 220 projects and forms flat top beam.
In Fig. 2, direction of beam propagation is arrow direction.Incident light is the laser that power distribution is Gaussian Profile, its
After the first direction cylindrical mirror 110 in diverging optical element group, the incident light is converted to the diverging light on first direction, so
For the divergent light input on the first direction to second direction cylindrical mirror 120, it continues to be converted to the diverging light in second direction afterwards,
So far, the output light of second direction cylindrical mirror 120 is symmetrical with second direction on first direction.Again because first direction perpendicular to
Second direction, that is to say, that the Energy distribution of the diverging light is centrosymmetric.Then, the diverging light continues through first direction
Prism 210, it is divided into two beams on the symmetrical laser of first direction, for the two beams laser again by second direction prism 220, its is every
It is a branch of that to be all divided to by second direction prism 220 be two beams on the symmetrical laser of second direction.It is defeated finally by second direction prism
Go out the four beam laser respectively symmetrically on first direction and second direction.Because the power distribution of the output light is on first direction
With second direction respectively symmetrically, so after a segment distance is propagated, for common irradiation on the face of a setpoint distance, its power is mutual
Superposition forms flat top beam.
Fig. 3 A are the structural representation of the laser beam homogenization device of the utility model 3rd embodiment.As shown in Figure 3A,
In laser beam homogenization device, diverging optical element group includes：First direction cylindrical mirror 110, for its incident light to be converted to
Diverging light on first direction；Second direction cylindrical mirror 120, for its incident light to be converted to the diverging light in second direction；
Beam splitter optic group includes：First direction prism 210, for its incident light on first direction beam splitting；Second direction rib
Mirror 220, for its incident light on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror
110th, first direction prism 210, second direction cylindrical mirror 120, second direction prism 220 are arranged in order along the light direction of propagation,
Incident laser is entered by the mirror of first direction cylinder 110, passes sequentially through first direction prism 210 and second direction cylindrical mirror
120, projected by second direction prism 220 and form flat top beam.
In Fig. 3 A, direction of beam propagation is arrow direction.Incident light is the laser that power distribution is Gaussian Profile, its
After the first direction cylindrical mirror 110 in diverging optical element group, the diverging light that the incident light is converted on first direction is defeated
Go out, according to the direction of propagation of light, divergent light input on the first direction to first direction prism 210, the hair on first direction
Astigmatism divide into two beams on first direction.The two beams laser continues to propagate forward, should by second direction cylindrical mirror 120
Two beam laser be converted into and meanwhile in a first direction with the diverging light in second direction.Finally, it is defeated by second direction prism 220
Go out the four beam laser respectively symmetrically on first direction and second direction.Because the power distribution of the output light is on first direction
With second direction respectively symmetrically, so after a segment distance is propagated, for common irradiation on the face of a setpoint distance, its power is mutual
Superposition forms flat top beam.
It is assumed that LASER Light Source position is origin, incident light spot energy distribution as shown in Figure 3 B, apart from origin 70mm~
The rectangle flat-top hot spot that size is 50X20mm is obtained at 90mm, the angle of divergence is 18 °~22 ° (full-shape), and the correlation of the present embodiment is thoroughly
Mirror parameter combination can select as follows：
First direction cylindrical mirror：Plano-concave cylindrical mirror, plane is towards light source, using K9 glass, thick 1.5mm~2.5mm, and concave surface
Place's radius of curvature is 15mm~25mm, with initial point distance 8mm~12mm；
First direction prism：Plane is towards light source, and using K9 glass, thick 2mm~4mm, the angle between two inclined-planes is
20 °~35 °, with initial point distance 10mm~16mm；
Second direction cylindrical mirror：Concave-concave cylindrical mirror, using K9 glass, thick 1.8mm~2.2mm, the radius of curvature of concave surface is
10mm~10.8mm, it is 16.9mm~17.9mm with initial point distance；
Second direction prism：Plane is towards light source, and using K9 glass, thick 5mm~8mm, the angle between two inclined-planes is
105 °~115 °, with initial point distance 20mm~23mm.
According to one group of specific lens parameter of said lens parameter group conjunction, spot energy distribution as shown in Figure 3 C, can be seen
Go out that target spot energy distribution is uniform, according to the second direction cylindrical mirror that radius of curvature is 12mm, other lenses parameter constant,
Its spot energy distribution is as shown in Figure 3 D, it can be seen that target spot energy distribution is high in the low surrounding in center, not flat top beam.
Fig. 4 is the structural representation of the laser beam homogenization device of the utility model fourth embodiment.As shown in figure 4, swash
In light process for light beam homogenization device, diverging optical element group includes：First direction cylindrical mirror 110, for its incident light to be converted into
Diverging light on one direction；Second direction cylindrical mirror 120, for its incident light to be converted to the diverging light in second direction；Point
Beam optics element group includes：First direction prism 210, for its incident light on first direction beam splitting；Second direction prism
220, for its incident light on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror 110,
Second direction cylindrical mirror 120, second direction prism 220, first direction prism 210 are arranged in order along the light direction of propagation, incident
Laser entered by the mirror of first direction cylinder 110, pass sequentially through second direction cylindrical mirror 120 and second direction prism 220, by
First direction prism 210 projects and forms flat top beam.
In Fig. 4, direction of beam propagation is arrow direction.Incident light is the laser that power distribution is Gaussian Profile, its
After the first direction cylindrical mirror 110 in diverging optical element group, the incident light is converted to the diverging light on first direction, so
For the divergent light input on the first direction to second direction cylindrical mirror 120, it continues to be converted to the diverging light in second direction afterwards,
So far, the output light of second direction cylindrical mirror 120 is symmetrical with second direction on first direction.Again because first direction perpendicular to
Second direction, that is to say, that the Energy distribution of the diverging light is centrosymmetric.Then, the diverging light continues through second direction
Prism 220, it is divided into two beams on the symmetrical laser of second direction, for the two beams laser again by first direction prism 210, its is every
A branch of to be all divided to by first direction prism 210 be two beams on the symmetrical laser of second direction, finally by first direction prism 210
Export the four beam laser on first direction and second direction respectively symmetrically.Because the power distribution of the output light is on first party
To respectively symmetrically, so after a segment distance is propagated, common irradiation is on the face of a setpoint distance, its power phase with second direction
Mutually superposition forms flat top beam.
The structural representation of the laser beam homogenization device of the embodiment of Fig. 5 the utility model the 5th.As shown in figure 5, laser
In process for light beam homogenization device, diverging optical element group includes：First direction cylindrical mirror 110, for its incident light to be converted into first
Diverging light on direction；Second direction cylindrical mirror 120, for its incident light to be converted to the diverging light in second direction；Beam splitting
Optical element group includes：Two-way prism 230, for its incident light on first direction, second direction beam splitting；First direction
It is orthogonal with second direction；First direction cylindrical mirror 110, second direction cylindrical mirror 120, two-way prism 230 are along the light direction of propagation
It is arranged in order, incident laser is entered by the mirror of first direction cylinder 110, by second direction cylindrical mirror 120, by two-way prism
230 injections form flat top beam.In Fig. 5, direction of beam propagation is arrow direction.It is real with first in the 5th embodiment
To apply unlike example, the beam splitter optic is two-way prism 230, and incident light can be split by the two-way prism 230, point
Laser after beam is symmetrical with second direction on first direction.Because the power distribution of the output light is on first direction and second
Respectively symmetrically, so after a segment distance is propagated, for common irradiation on the face of a setpoint distance, its power is overlapped mutually shape in direction
Into flat top beam.
The structural representation of the laser beam homogenization device of Fig. 6 the utility model sixth embodiments.As shown in fig. 6, laser
In process for light beam homogenization device, diverging optical element group includes：Circular concavees lens 130, for its incident light to be converted to the hair of circle
Astigmatism；Beam splitter optic group includes：Two-way prism 230, for its incident light on first direction, second direction beam splitting；
First direction is orthogonal with second direction；Concavees lens 130, two-way prism 230 are arranged in order along the light direction of propagation.In Fig. 6, light beam
The direction of propagation is arrow direction.In the sixth embodiment, unlike the 5th embodiment, the diverging optical element group is
Circular concavees lens 130, the circular concavees lens, the lens can be converted to the centrosymmetric diverging light of circle with incident light.Due to
The power distribution of the output light on first direction and second direction respectively symmetrically, it is common to shine so after a segment distance is propagated
Penetrate on the face of a setpoint distance, its power is overlapped mutually to form flat top beam.
Laser beam homogenization device of the present utility model can adjust in specific implementation process according to target light spot shape
Diverging optical element group and beam splitter optic group.If target is the flat top beam of regular hexagon, diverging optical element group includes：
First direction cylindrical mirror, for its incident light to be converted to the diverging light on first direction；Second direction cylindrical mirror, for by its
Incident light is converted to the diverging light in second direction；Third direction cylindrical mirror, for its incident light to be converted into third direction
Diverging light；Beam splitter optic group includes：First direction prism, for its incident light on first direction beam splitting；Second
Direction prism, for its incident light on second direction beam splitting；Third direction prism, for its incident light on third party
To beam splitting；The angle of first direction, second direction, third direction arbitrarily between the two is 120 °；First direction cylindrical mirror, second
Direction cylindrical mirror, third direction cylindrical mirror first direction prism, second direction prism, third direction prism are along the light direction of propagation
It is arranged in order, or other are various, the prism arrangement on certain direction, can in the arrangement mode after equidirectional cylindrical mirror
Meet to require.Those skilled in the art can be according to the utility model embodiment, by adjusting diverging optical element group and beam splitting
The optical element combination of optical element group, target hot spot of different shapes is obtained, will not enumerate herein.
It is as follows the advantages of laser beam homogenization device of the present utility model with reference to shown in above example：
1. the cost degradation of flat-top light shaping can be realized.Because either cylindrical mirror, circular concavees lens or prism, all
Being at present can be cheap and be easy to get by producing obtained universal optical element in batches.
2. laser beam homogenization device of the present utility model is to wavelength without selectivity.Cylindrical mirror and prism can pass through
Optical glass is made, and in the wave-length coverage that optical glass can pass through, the device is applicable.
3. laser damage threshold is high, optical energy loss is low.Due to the interior lights of laser beam homogenization device of the present utility model
Learning element can be made using optical glass, so laser damage threshold is high, optical energy loss is low.Optical glass has very high
Energy bidirectional flow and optical transmittance, by plating optical film on its surface, it is possible to realize very high laser transmittance.
4. rectangular light spot size is big and adjustable.Because caused light beam is diverging light, as long as by reasonably changing prism
Angle and lens radius of curvature, we can be obtained by the uniform rectangular light beam of the given size on predetermined distance.
Preferably effect is homogenized 5. being respectively provided with larger field depth.And diffraction optical element method, microlens array shaping
Method, non-spherical lens method can only typically have preferable laser homogenizing effect in the face of being designed like, once imaging surface moves forward and backward,
Effect is then homogenized to decline rapidly.
The beneficial effects of the utility model are, by laser beam homogenization device of the present utility model, by power distribution
Laser shaping for Gaussian Profile is that the cost of flat-top light is low, and to the no selectivity of wavelength, rectangular light spot size is flexibly adjustable, and
And it is respectively provided with larger field depth and preferably homogenizes effect.
Above-described embodiment, the purpose of this utility model, technical scheme and beneficial effect are entered
One step describes in detail, should be understood that and the foregoing is only specific embodiment of the present utility model, is not used to limit
Determine the scope of protection of the utility model, it is all within the spirit and principles of the utility model, any modification for being made, equally replace
Change, improve, should be included within the scope of protection of the utility model.
Claims (6)
- A kind of 1. laser beam homogenization device, for homogenizing the laser that power distribution is Gaussian Profile, it is characterised in that including：Diverging optical element group, for the laser of incidence to be converted into diverging light；Beam splitter optic group, for being superimposed to form flat top beam to the diverging light beam splitting, and by the laser after beam splitting.
- 2. laser beam homogenization device according to claim 1, it is characterised in thatThe diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted to the diverging light on first direction；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；The beam splitter optic group includes：First direction prism, for its incident light on the first direction beam splitting；Second direction prism, for its incident light on the second direction beam splitting；The first direction is orthogonal with second direction；The first direction cylindrical mirror, second direction cylindrical mirror, first direction prism, second direction prism are along the light direction of propagation Be arranged in order, the incident laser is injected by the first direction cylindrical mirror, pass sequentially through the second direction cylindrical mirror with And first direction prism, projected by the second direction prism and form flat top beam.
- 3. laser beam homogenization device according to claim 1, it is characterised in thatThe diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted to the diverging light on first direction；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；The beam splitter optic group includes：First direction prism, for its incident light on the first direction beam splitting；Second direction prism, for its incident light on the second direction beam splitting；The first direction is orthogonal with second direction；The first direction cylindrical mirror, first direction prism, second direction cylindrical mirror, second direction prism are along the light direction of propagation Be arranged in order, the incident laser is injected by the first direction cylindrical mirror, pass sequentially through the first direction prism and Second direction cylindrical mirror, projected by the second direction prism and form flat top beam.
- 4. laser beam homogenization device according to claim 1, it is characterised in thatThe diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted to the diverging light on first direction；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；The beam splitter optic group includes：First direction prism, for its incident light on the first direction beam splitting；Second direction prism, for its incident light on the second direction beam splitting；The first direction is orthogonal with second direction；The first direction cylindrical mirror, second direction cylindrical mirror, second direction prism, first direction prism are along the light direction of propagation Be arranged in order, the incident laser is injected by the first direction cylindrical mirror, pass sequentially through the second direction cylindrical mirror with And second direction prism, projected by the first direction prism and form flat top beam.
- 5. laser beam homogenization device according to claim 1, it is characterised in thatThe diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted to the diverging light on first direction；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；The beam splitter optic group includes：Two-way prism, for its incident light on the first direction, second direction beam splitting；The first direction is orthogonal with second direction；The first direction cylindrical mirror, second direction cylindrical mirror, two-way prism are arranged in order along the light direction of propagation, the incidence Laser injected by the first direction cylindrical mirror, by the second direction cylindrical mirror, projected and formed by the two-way prism Flat top beam.
- 6. laser beam homogenization device according to claim 1, it is characterised in thatThe diverging optical element group includes：Circular concavees lens, for its incident light to be converted to the diverging light of circle；The beam splitter optic group includes：Two-way prism, for its incident light on first direction, second direction beam splitting；The first direction is orthogonal with second direction；The circular concavees lens, two-way prism are arranged in order along the light direction of propagation, and the incident laser is recessed by the circle Lens are injected, and project to form flat top beam by the two-way prism.
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| CN201720946713.6U CN207181837U (en) | 2017-08-01 | 2017-08-01 | Laser beam homogenization device |
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| CN201720946713.6U CN207181837U (en) | 2017-08-01 | 2017-08-01 | Laser beam homogenization device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107290861A (en) * | 2017-08-01 | 2017-10-24 | 沈阳雷卓激光医疗器械有限公司 | Laser beam homogenization device and method |
| CN110125536A (en) * | 2019-05-06 | 2019-08-16 | 武汉华工激光工程有限责任公司 | A kind of laser processing device and method of thin-film material removal |
-
2017
- 2017-08-01 CN CN201720946713.6U patent/CN207181837U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107290861A (en) * | 2017-08-01 | 2017-10-24 | 沈阳雷卓激光医疗器械有限公司 | Laser beam homogenization device and method |
| WO2019024359A1 (en) * | 2017-08-01 | 2019-02-07 | 沈阳雷卓激光医疗器械有限公司 | Laser beam homogenizing device and method |
| CN110125536A (en) * | 2019-05-06 | 2019-08-16 | 武汉华工激光工程有限责任公司 | A kind of laser processing device and method of thin-film material removal |
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