CN107290861A - Laser beam homogenization device and method - Google Patents
Laser beam homogenization device and method Download PDFInfo
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- CN107290861A CN107290861A CN201710645090.3A CN201710645090A CN107290861A CN 107290861 A CN107290861 A CN 107290861A CN 201710645090 A CN201710645090 A CN 201710645090A CN 107290861 A CN107290861 A CN 107290861A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0972—Prisms
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Abstract
The present invention proposes a kind of laser beam homogenization device and method, and for homogenizing the laser that power distribution is Gaussian Profile, the laser beam homogenization device includes：Diverging optical element group, for incident laser to be converted into diverging light；Beam splitter optic group, for being superimposed to form flat top beam to the diverging light beam splitting, and by the laser after beam splitting.By the laser beam homogenization device and method of the present invention, cost that the laser shaping that power distribution is Gaussian Profile is flat-top light is low, to wavelength without selectivity, rectangular light spot size is flexibly adjustable, also, is respectively provided with larger field depth and preferably homogenizes effect.
Description
Technical field
The present invention relates to laser shaping field, more particularly to a kind of laser homogenizing device and method, by Laser beam energy distribution
Gaussian Profile be converted into being uniformly distributed for flat roof type.
Background technology
The optical power distribution of laser cross-section is generally Gaussian Profile, i.e. center power greatly, more smaller to edge power.But
It is in some application fields such as laser welding, Laser Surface Treatment and laser medicine, it is desirable to which the power distribution of laser is flat-top
Being uniformly distributed for formula, you must use some optical shaping methods to realize the purpose.Flat-top light shaping side main at present
Case has：Aperture diaphragm intercepts method, diffraction optical element method, microlens array shaping method, non-spherical lens method etc..Above shaping side
Shortcoming is substantially, specific as follows in case implementation process：Aperture diaphragm method can realize simplest flat-top light output.But this method is obtained
To homogenize effect not good, and optical energy loss is serious；Diffraction optical element method can only be designed targetedly according to demand, and one
Denier, which changes the parameters such as optical maser wavelength, must just redesign, and the laser damage threshold of the program is relatively low, can be only applied to small work(
Rate laser, and the design and manufacturing cost of diffraction optical element are higher, and assembly precision requires more harsh；Microlens array
Shaping method cost is higher, region that is realizing is too small, easy product interference fringe shortcoming；Aspherical mirror in non-spherical lens method
Cost of manufacture is equally higher.Therefore, the laser shaping scheme for needing a kind of with low cost and shaping effect good at present.
The content of the invention
In order to solve the above problems, the present invention proposes a kind of laser beam homogenization device and method, with provide it is a kind of into
The good laser shaping scheme of this cheap and shaping effect.
In order to achieve the above object, laser beam homogenization device of the invention, for homogenizing power distribution for Gaussian Profile
Laser, including：Diverging optical element group, for incident laser to be converted into diverging light；Beam splitter optic group, for pair
Diverging light beam splitting, and the laser after beam splitting is superimposed to form flat top beam.
Further, diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted into first party
Upward diverging light；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；Light splitting optical member
Part group includes：First direction prism, for its incident light on first direction beam splitting；Second direction prism, for entering to it
Light is penetrated on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror, second direction cylindrical mirror,
One direction prism, second direction prism are arranged in order along the light direction of propagation, and incident laser is injected by first direction cylindrical mirror,
Second direction cylindrical mirror and first direction prism are passed sequentially through, is projected by second direction prism and forms flat top beam.
Further, diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted into first party
Upward diverging light；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；Light splitting optical member
Part group includes：First direction prism, for its incident light on first direction beam splitting；Second direction prism, for entering to it
Light is penetrated on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror, first direction prism, second
Direction cylindrical mirror, second direction prism are arranged in order along the light direction of propagation, and incident laser is injected by first direction cylindrical mirror,
First direction prism and second direction cylindrical mirror are passed sequentially through, is projected by second direction prism and forms flat top beam.
Further, diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted into first party
Upward diverging light；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；Light splitting optical member
Part group includes：First direction prism, for its incident light on first direction beam splitting；Second direction prism, for entering to it
Light is penetrated on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror, second direction cylindrical mirror,
Two direction prisms, first direction prism are arranged in order along the light direction of propagation, and incident laser is injected by first direction cylindrical mirror,
Second direction cylindrical mirror and second direction prism are passed sequentially through, is projected by first direction prism and forms flat top beam.
Further, diverging optical element group includes：First direction cylindrical mirror, for its incident light to be converted into first party
Upward diverging light；Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；Light splitting optical member
Part group includes：Two-way prism, for its incident light on first direction, second direction beam splitting；First direction and second direction
It is orthogonal；First direction cylindrical mirror, second direction cylindrical mirror, two-way prism are arranged in order along the light direction of propagation, incident laser
Injected by first direction cylindrical mirror, by second direction cylindrical mirror, projected by two-way prism and form flat top beam.
Further, diverging optical element group includes：Circular concavees lens, the diverging for its incident light to be converted to circle
Light；Beam splitter optic group includes：Two-way prism, for its incident light on first direction, second direction beam splitting；First party
To orthogonal with second direction；Circular concavees lens, two-way prism are arranged in order along the light direction of propagation, and incident laser is recessed by circle
Lens are injected, and project to form flat top beam by two-way prism.
To achieve these goals, the invention also provides a kind of laser beam homogenizes method, for homogenizing power distribution
For the laser of Gaussian Profile, including：Incident laser is converted into diverging light；To diverging light beam splitting, and by the laser after beam splitting
Superposition forms flat top beam.
Further, incident laser is dissipated in a first direction, obtains first direction diverging light；First direction is dissipated
Light dissipates in second direction, is converted into diverging light, first direction is orthogonal with second direction.
Further, to diverging light beam splitting, including：To diverging light on first direction beam splitting, the work(of the laser after beam splitting
Rate distribution is symmetrical on first direction；To on the laser after first direction beam splitting on second direction beam splitting, swashing after beam splitting
The power distribution of light is symmetrical on first and second direction, and first direction is orthogonal with second direction.
Further, the sum of the power of each point of the laser after beam splitting in the plane set is same value.
The beneficial effects of the present invention are by the laser beam homogenization device and method of the present invention, be by power distribution
The laser shaping of Gaussian Profile is low for the cost of flat-top light, and to wavelength without selectivity, rectangular light spot size is flexibly adjustable, and
And, it is respectively provided with larger field depth and preferably homogenizes effect.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only
Some embodiments of the present invention, for those of ordinary skill in the art, without having to pay creative labor, also
Other accompanying drawings can be obtained according to these accompanying drawings.
Figure 1A is the structure and light path schematic diagram of the laser beam homogenization device of the embodiment of the present invention.
Figure 1B is the power distribution schematic diagram of the incident light of the embodiment of the present invention.
Fig. 1 C are the power distribution schematic diagram of the emergent light of the embodiment of the present invention.
Fig. 2 is the structural representation of the laser beam homogenization device of second embodiment of the invention.
Fig. 3 A are the structural representation of the laser beam homogenization device of third embodiment of the invention.
Fig. 3 B are the power profile of the incident light of third embodiment of the invention.
Fig. 3 C are the power profile of the emergent light of third embodiment of the invention.
Fig. 3 D are the power profile of the emergent light that the second cylinder curvature radius is 12mm in third embodiment of the invention.
Fig. 4 is the structural representation of the laser beam homogenization device of fourth embodiment of the invention.
Fig. 5 is the structural representation of the laser beam homogenization device of fifth embodiment of the invention.
Fig. 6 is the structural representation of the laser beam homogenization device of sixth embodiment of the invention.
Fig. 7 homogenizes the step flow chart of method for the laser beam of the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Based on this
Embodiment in invention, the every other reality that relevant technical staff in the field is obtained under the premise of creative work is not made
Example is applied, the scope of the protection of the present invention is belonged to.
Figure 1A is the structure and light path schematic diagram of the laser beam homogenization device of the embodiment of the present invention.As shown in Figure 1A, swash
Light process for light beam homogenization device, for homogenizing the laser that power distribution is Gaussian Profile, including：Diverging optical element group 100, for inciting somebody to action
Incident laser is converted to diverging light；Beam splitter optic group 200, for diverging light beam splitting, and by the laser stacking after beam splitting
Plus form flat top beam.
Figure 1B is the power distribution schematic diagram of the incident light of the embodiment of the present invention, and Fig. 1 C are the emergent light of the embodiment of the present invention
Power distribution schematic diagram.With reference to shown in Figure 1A, Figure 1B and Fig. 1 C, incident light is the laser that power distribution is Gaussian Profile, its
It is in divergent state, the Energy distribution of the output light (diverging light) of the diverging optical element 100 after diverging optical element group 100
It is centrosymmetric, to be convenient to follow-up input operation.Beam splitter optic group 200, its input light is diverging optical element 100
Output light (diverging light), 200 points by beam splitter optic group of the diverging light is multiple laser, the Energy distribution phase of the multiple laser
Mutually symmetrical, the multiple laser after beam splitting continues to propagate forward, and common irradiation is on a setting face, and the multiple laser energy is mutually folded
Plus (be overlapped mutually and represented with the quadrangle of the different twill fillings of two beams in Figure 1A), eventually form flat top beam.It is described herein
It is that what Figure 1A only illustrated is illustrated in the power distribution state of the input light and output light in one direction, those skilled in the art should
It is respectively Gaussian Profile with being uniformly distributed when understanding input light with exporting photophase distribution spatially.
Fig. 2 is the structural representation of the laser beam homogenization device of second embodiment of the invention.As shown in Fig. 2 laser light
In beam homogenizer, diverging optical element group includes：First direction cylindrical mirror 110, for its incident light to be converted into first party
Upward diverging light；Second direction cylindrical mirror 120, for its incident light to be converted to the diverging light in second direction；Beam splitting light
Learning element group includes：First direction prism 210, for its incident light on first direction beam splitting；Second direction prism 220,
For to its incident light on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror 110, second
Direction cylindrical mirror 120, first direction prism 210, second direction prism 220 are arranged in order along the light direction of propagation, and incident swashs
Light is entered by the mirror of first direction cylinder 110, second direction cylindrical mirror 120 and first direction prism 210 is passed sequentially through, by second
Direction prism 220 projects and forms flat top beam.
Incident light is the laser that power distribution is Gaussian Profile, its first direction cylinder passed through in diverging optical element group
After mirror 110, the incident light is converted to the diverging light on first direction, and then the divergent light input on the first direction is to second party
To cylindrical mirror 120, it continues to be converted to the diverging light in second direction, so far, the output light of second direction cylindrical mirror 120 on
First direction is symmetrical with second direction.Again because first direction is perpendicular to second direction, that is to say, that the energy of the diverging light point
Cloth is centrosymmetric.Then, the diverging light continues through first direction prism 210, is divided into two beams symmetrical on first direction
Laser, the two beams laser again by second direction prism 220, its per it is a branch of all by second direction prism 220 points be that two beams are closed
In the symmetrical laser of second direction.Exported finally by second direction prism on first direction and second direction respectively symmetrically
Four beam laser.Due to the output light power distribution on first direction and second direction respectively symmetrically, so propagating one section
After distance, common irradiation is on the face of a setpoint distance, and its power is overlapped mutually to form flat top beam.
Fig. 3 A are the structural representation of the laser beam homogenization device of third embodiment of the invention.As shown in Figure 3A, laser
In process for light beam homogenization device, diverging optical element group includes：First direction cylindrical mirror 110, for its incident light to be converted into first
Diverging light on direction；Second direction cylindrical mirror 120, for its incident light to be converted to the diverging light in second direction；Beam splitting
Optical element group includes：First direction prism 210, for its incident light on first direction beam splitting；Second direction prism
220, for its incident light on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror 110,
First direction prism 210, second direction cylindrical mirror 120, second direction prism 220 are arranged in order along the light direction of propagation, incident
Laser entered by the mirror of first direction cylinder 110, pass sequentially through first direction prism 210 and second direction cylindrical mirror 120, by
Second direction prism 220 projects and forms flat top beam.
Incident light is the laser that power distribution is Gaussian Profile, its first direction cylinder passed through in diverging optical element group
After mirror 110, the incident light is converted to the diverging light output on first direction, according to the direction of propagation of light, on the first direction
Divergent light input is to first direction prism 210, and the diverging light on first direction divide into two beams on first direction.Two beam
Laser continues to propagate forward, by second direction cylindrical mirror 120, and the two beams laser is converted into while in a first direction with second
Diverging light on direction.Finally, by second direction prism 220 export on first direction and second direction respectively symmetrically four
Shu Jiguang.Due to the output light power distribution on first direction and second direction respectively symmetrically, so propagate one section away from
From rear, common irradiation is on the face of a setpoint distance, and its power is overlapped mutually to form flat top beam.
It is assumed that LASER Light Source position be origin, incident light spot energy distribution as shown in Figure 3 B, apart from origin 70mm~
The rectangle flat-top hot spot that size is 50X20mm is obtained at 90mm, the angle of divergence is 18 °~22 ° (full-shape), and the correlation of the present embodiment is thoroughly
Mirror parameter combination can make following selection：
First direction cylindrical mirror：Plano-concave cylindrical mirror, plane uses K9 glass, thick 1.5mm~2.5mm, concave surface towards light source
Place's radius of curvature is 15mm~25mm, with initial point distance 8mm~12mm；
First direction prism：Plane is towards light source, using K9 glass, thick 2mm~4mm, and the angle between two inclined-planes is
20 °~35 °, with initial point distance 10mm~16mm；
Second direction cylindrical mirror：Concave-concave cylindrical mirror, using K9 glass, thick 1.8mm~2.2mm, the radius of curvature of concave surface is
10mm~10.8mm, is 16.9mm~17.9mm with initial point distance；
Second direction prism：Plane is towards light source, using K9 glass, thick 5mm~8mm, and the angle between two inclined-planes is
105 °~115 °, with initial point distance 20mm~23mm.
According to one group of specific lens parameter of said lens parameter group conjunction, spot energy distribution as shown in Figure 3 C, can be seen
Go out target spot energy distribution uniform, according to the second direction cylindrical mirror that radius of curvature is 12mm, other lenses parameter constant,
Its spot energy distribution is as shown in Figure 3 D, it can be seen that target spot energy distribution is high in the low surrounding in center, not flat top beam.
Fig. 4 is the structural representation of the laser beam homogenization device of fourth embodiment of the invention.As shown in figure 4, laser light
In beam homogenizer, diverging optical element group includes：First direction cylindrical mirror 110, for its incident light to be converted into first party
Upward diverging light；Second direction cylindrical mirror 120, for its incident light to be converted to the diverging light in second direction；Beam splitting light
Learning element group includes：First direction prism 210, for its incident light on first direction beam splitting；Second direction prism 220,
For to its incident light on second direction beam splitting；First direction is orthogonal with second direction；First direction cylindrical mirror 110, second
Direction cylindrical mirror 120, second direction prism 220, first direction prism 210 are arranged in order along the light direction of propagation, and incident swashs
Light is entered by the mirror of first direction cylinder 110, second direction cylindrical mirror 120 and second direction prism 220 is passed sequentially through, by first
Direction prism 210 projects and forms flat top beam.
Incident light is the laser that power distribution is Gaussian Profile, its first direction cylinder passed through in diverging optical element group
After mirror 110, the incident light is converted to the diverging light on first direction, and then the divergent light input on the first direction is to second party
To cylindrical mirror 120, it continues to be converted to the diverging light in second direction, so far, the output light of second direction cylindrical mirror 120 on
First direction is symmetrical with second direction.Again because first direction is perpendicular to second direction, that is to say, that the energy of the diverging light point
Cloth is centrosymmetric.Then, the diverging light continues through second direction prism 220, is divided into two beams symmetrical on second direction
Laser, the two beams laser again by first direction prism 210, its per it is a branch of all by first direction prism 210 points be that two beams are closed
In the symmetrical laser of second direction, export right respectively on first direction and second direction finally by first direction prism 210
The four beam laser claimed.Due to the output light power distribution on first direction and second direction respectively symmetrically, so propagating
After one segment distance, common irradiation is on the face of a setpoint distance, and its power is overlapped mutually to form flat top beam.
The structural representation of the laser beam homogenization device of Fig. 5 fifth embodiment of the invention.As shown in figure 5, laser beam
In homogenizer, diverging optical element group includes：First direction cylindrical mirror 110, for its incident light to be converted into first direction
On diverging light；Second direction cylindrical mirror 120, for its incident light to be converted to the diverging light in second direction；Light splitting optical
Element group includes：Two-way prism 230, for its incident light on first direction, second direction beam splitting；First direction and second
Direction is orthogonal；First direction cylindrical mirror 110, second direction cylindrical mirror 120, two-way prism 230 are arranged successively along the light direction of propagation
Row, incident laser is entered by the mirror of first direction cylinder 110, by second direction cylindrical mirror 120, projected by two-way prism 230
Form flat top beam.In the 5th embodiment, and unlike first embodiment, the beam splitter optic is two-way prism 230,
Incident light can be split by the two-way prism 230, and the laser after beam splitting is symmetrical with second direction on first direction.Due to
The power distribution of the output light on first direction and second direction respectively symmetrically, it is common to shine so after a segment distance is propagated
Penetrate on the face in a setpoint distance, its power is overlapped mutually to form flat top beam.
The structural representation of the laser beam homogenization device of Fig. 6 sixth embodiment of the invention.As shown in fig. 6, laser beam
In homogenizer, diverging optical element group includes：Circular concavees lens 130, the diverging light for its incident light to be converted to circle；
Beam splitter optic group includes：Two-way prism 230, for its incident light on first direction, second direction beam splitting；First party
To orthogonal with second direction；Concavees lens 130, two-way prism 230 are arranged in order along the light direction of propagation.In the sixth embodiment,
From unlike the 5th embodiment, the diverging optical element group is circular concavees lens 130, the circular concavees lens, the lens can be with
Incident light is converted to the centrosymmetric diverging light of circle.Because the power distribution of the output light is on first direction and second party
To respectively symmetrically, so after a segment distance is propagated, common irradiation is on the face of a setpoint distance, and its power is overlapped mutually to be formed
Flat top beam.
The laser beam homogenization device of the present invention can be adjusted according to target light spot shape and dissipated in specific implementation process
Optical element group and beam splitter optic group.If target is the flat top beam of regular hexagon, diverging optical element group includes：First
Direction cylindrical mirror, for its incident light to be converted to the diverging light on first direction；Second direction cylindrical mirror, for it is incident
Light is converted to the diverging light in second direction；Third direction cylindrical mirror, for its incident light to be converted to the hair on third direction
Astigmatism；Beam splitter optic group includes：First direction prism, for its incident light on first direction beam splitting；Second direction
Prism, for its incident light on second direction beam splitting；Third direction prism, for dividing on third direction its incident light
Beam；The angle of first direction, second direction, third direction arbitrarily between the two is 120 °；First direction cylindrical mirror, second direction
Cylindrical mirror, third direction cylindrical mirror first direction prism, second direction prism, third direction prism along the light direction of propagation successively
Arrange, or other are various, the prism arrangement on certain direction can be met in the arrangement mode after equidirectional cylindrical mirror
It is required that.Those skilled in the art can be according to embodiments of the present invention, by adjusting diverging optical element group and beam splitter optic
The optical element combination of group, obtains target hot spot of different shapes, will not enumerate herein.
With reference to shown in above example, the advantage of laser beam homogenization device of the invention is as follows：
1. the cost degradation of flat-top light shaping can be realized.Because either cylindrical mirror, circular concavees lens or prism, all
Being at present can be cheap and be easy to get by producing obtained universal optical element in batches.
2. the laser beam homogenization device of the present invention is to wavelength without selectivity.Cylindrical mirror and prism can pass through optics
Glass system is obtained, in the wave-length coverage that optical glass can be passed through, and the device is applicable.
3. laser damage threshold is high, optical energy loss is low.Due to the internal opticses member of the laser beam homogenization device of the present invention
Part can use optical glass to make, so laser damage threshold is high, optical energy loss is low.Optical glass has very high energy
Damage threshold and optical transmittance, by plating optical film on its surface, it is possible to realize very high laser transmittance.
4. rectangular light spot size is big and adjustable.Because the light beam of generation is diverging light, as long as by reasonably changing prism
Angle and lens radius of curvature, we can be obtained by the uniform rectangular light beam of the given size on predetermined distance.
Preferably effect is homogenized 5. being respectively provided with larger field depth.And diffraction optical element method, microlens array shaping
Method, non-spherical lens method can only typically have preferable laser homogenizing effect in the face of being designed like, once imaging surface is movable,
Effect is then homogenized to decline rapidly.
After the laser beam homogenization device of the embodiment of the present invention is described, next, swashing to the embodiment of the present invention
Light beam homogenization method is introduced.The implementation of this method may refer to the implementation of said apparatus, repeats part and repeats no more.
Fig. 7 homogenizes the step flow chart of method for the laser beam of the embodiment of the present invention.As shown in fig. 7, laser-beam uniform-light
Change method, for homogenizing the laser that power distribution is Gaussian Profile, including：S100, diverging light is converted to by incident laser；
S200, is superimposed to form flat top beam to diverging light beam splitting, and by the laser after beam splitting.
During specific implementation step S100, incident laser is converted into diverging light, including：
S110, incident laser is dissipated in a first direction, obtains first direction diverging light；
S120, first direction diverging light is dissipated in second direction, diverging light, first direction and second party is converted into
To orthogonal.
During specific implementation step S200, to diverging light beam splitting, including：
S210, to diverging light on first direction beam splitting, the power distribution of the laser after beam splitting is symmetrical on first direction；
S220, to, on second direction beam splitting, the power of the laser after beam splitting divides on the laser after first direction beam splitting
Cloth is symmetrical on first and second direction, and first direction is orthogonal with second direction.
The sum of the power of each point of the laser in the plane set after beam splitting is same value.
The beneficial effects of the present invention are by the laser beam homogenization device and method of the present invention, be by power distribution
The laser shaping of Gaussian Profile is low for the cost of flat-top light, and to wavelength without selectivity, rectangular light spot size is flexibly adjustable, and
It is respectively provided with larger field depth and preferably homogenizes effect.
Above-described embodiment, has been carried out further to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail, should be understood that the embodiment that the foregoing is only the present invention, be not intended to limit the present invention
Protection domain, within the spirit and principles of the invention, any modification, equivalent substitution and improvements done etc. all should be included
Within protection scope of the present invention.
Claims (10)
1. a kind of laser beam homogenization device, for homogenizing the laser that power distribution is Gaussian Profile, it is characterised in that including：
Diverging optical element group, for incident laser to be converted into diverging light；
Beam splitter optic group, for being superimposed to form flat top beam to the diverging light beam splitting, and by the laser after beam splitting.
2. laser beam homogenization device according to claim 1, it is characterised in that
The diverging optical element group includes：
First direction cylindrical mirror, for its incident light to be converted to the diverging light on first direction；
Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；
The beam splitter optic group includes：
First direction prism, for its incident light on the first direction beam splitting；
Second direction prism, for its incident light on the second direction beam splitting；
The first direction is orthogonal with second direction；
The first direction cylindrical mirror, second direction cylindrical mirror, first direction prism, second direction prism are along the light direction of propagation
Be arranged in order, the incident laser is injected by the first direction cylindrical mirror, pass sequentially through the second direction cylindrical mirror with
And first direction prism, projected by the second direction prism and form flat top beam.
3. laser beam homogenization device according to claim 1, it is characterised in that
The diverging optical element group includes：
First direction cylindrical mirror, for its incident light to be converted to the diverging light on first direction；
Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；
The beam splitter optic group includes：
First direction prism, for its incident light on the first direction beam splitting；
Second direction prism, for its incident light on the second direction beam splitting；
The first direction is orthogonal with second direction；
The first direction cylindrical mirror, first direction prism, second direction cylindrical mirror, second direction prism are along the light direction of propagation
Be arranged in order, the incident laser is injected by the first direction cylindrical mirror, pass sequentially through the first direction prism and
Second direction cylindrical mirror, is projected by the second direction prism and forms flat top beam.
4. laser beam homogenization device according to claim 1, it is characterised in that
The diverging optical element group includes：
First direction cylindrical mirror, for its incident light to be converted to the diverging light on first direction；
Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；
The beam splitter optic group includes：
First direction prism, for its incident light on the first direction beam splitting；
Second direction prism, for its incident light on the second direction beam splitting；
The first direction is orthogonal with second direction；
The first direction cylindrical mirror, second direction cylindrical mirror, second direction prism, first direction prism are along the light direction of propagation
Be arranged in order, the incident laser is injected by the first direction cylindrical mirror, pass sequentially through the second direction cylindrical mirror with
And second direction prism, projected by the first direction prism and form flat top beam.
5. laser beam homogenization device according to claim 1, it is characterised in that
The diverging optical element group includes：
First direction cylindrical mirror, for its incident light to be converted to the diverging light on first direction；
Second direction cylindrical mirror, for its incident light to be converted to the diverging light in second direction；
The beam splitter optic group includes：
Two-way prism, for its incident light on the first direction, second direction beam splitting；
The first direction is orthogonal with second direction；
The first direction cylindrical mirror, second direction cylindrical mirror, two-way prism are arranged in order along the light direction of propagation, the incidence
Laser injected by the first direction cylindrical mirror, by the second direction cylindrical mirror, projected and formed by the two-way prism
Flat top beam.
6. laser beam homogenization device according to claim 1, it is characterised in that
The diverging optical element group includes：
Circular concavees lens, the diverging light for its incident light to be converted to circle；
The beam splitter optic group includes：
Two-way prism, for its incident light on first direction, second direction beam splitting；
The first direction is orthogonal with second direction；
The circular concavees lens, two-way prism are arranged in order along the light direction of propagation, and the incident laser is recessed by the circle
Lens are injected, and project to form flat top beam by the two-way prism.
7. a kind of laser beam homogenizes method, for homogenizing the laser that power distribution is Gaussian Profile, it is characterised in that including：
The incident laser is converted into diverging light；
It is superimposed to form flat top beam to the diverging light beam splitting, and by the laser after beam splitting.
8. laser beam according to claim 7 homogenizes method, it is characterised in that described to change the incident laser
For diverging light, including：
The incident laser is dissipated in a first direction, first direction diverging light is obtained；
The first direction diverging light is dissipated in second direction, the diverging light is converted into, the first direction and the
Two directions are orthogonal.
9. laser beam according to claim 7 homogenizes method, it is characterised in that described to the diverging light beam splitting, bag
Include：
To the diverging light on first direction beam splitting, the power distribution of the laser after beam splitting is symmetrical on first direction；
To the laser after the beam splitting on first direction on second direction beam splitting, the power distribution of the laser after beam splitting on
The first direction is symmetrical with second direction, and the first direction is orthogonal with second direction.
10. laser beam according to claim 7 homogenizes method, it is characterised in that the laser after the beam splitting is in setting
Plane on each point power sum be same value.
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| WO2019024359A1 (en) * | 2017-08-01 | 2019-02-07 | 沈阳雷卓激光医疗器械有限公司 | Laser beam homogenizing device and method |
| CN110993741A (en) * | 2019-12-20 | 2020-04-10 | 武汉帝尔激光科技股份有限公司 | Multi-pulse homogenization laser solar cell processing method and equipment |
| CN111258076A (en) * | 2018-11-30 | 2020-06-09 | 福州高意光学有限公司 | Optical system capable of realizing laser beam homogenization function |
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