CN104682170B - The array laser gain media face type regulating and controlling mechanism of air pressure driving - Google Patents
The array laser gain media face type regulating and controlling mechanism of air pressure driving Download PDFInfo
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- CN104682170B CN104682170B CN201510080654.4A CN201510080654A CN104682170B CN 104682170 B CN104682170 B CN 104682170B CN 201510080654 A CN201510080654 A CN 201510080654A CN 104682170 B CN104682170 B CN 104682170B
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Abstract
A kind of array laser gain media face type regulating and controlling mechanism of air pressure driving, including：By the air tap arrays that independent valves are constituted multiple mutually, gas flow optimized module, supercharging air pump, vavuum pump, semiconductor laser pumping face battle array, the first gas inlet tube, the second gas inlet tube and the Duo Gen gas outlet tubes being made up of multiple semiconductor pumping module two-dimensional arrangements.The present invention can produce the adjustable thrust of size and pulling force by air tap array to gain medium facet different zones, so as to the effect with regulation and control face type, to rigid contact is not present in the type regulation process of gain media face, it is flexible effect to gain medium facet, destruction is not produced, laser for activating mirror configuration, realizes the regulation and control to gain media face type.
Description
Technical field
The present invention relates to laser, particularly a kind of array laser gain media face type regulating and controlling mechanism of air pressure driving.
Background technology
The laser of mirror configuration is activated due to compact conformation, high flux, the advantage such as high extracting efficiency, is a class
The high power laser light amplifier of great application potential.Because exaggerated laser beam passes through sheet gain medium behind
Surface is reflected, therefore the face type of gain media produces serious influence to the wavefront and beam quality of whole system.Effectively solve
The face type quality of gain media turns into one of bottleneck problem of such configuration laser urgent need to resolve under the conditions of heavy caliber.
The mode for implementing type regulation and control in face to optical element at present relies primarily on each force/strong point during mechanical grip
Adjustment (Zhou Lei, Luo Xin etc. of pretightning force.Affecting laws [J] the photoelectric technologies of installation way and pretightning force to lens aberration characteristic
Using 2013,34 (3)：498-503), this mode has the following disadvantages：
1) there must be the Mechanical Contact with optical element surface.
2) it is local easily to produce larger stress.
Particularly, for the sheet gain media in activation mirror configuration laser, because front and rear surfaces are intended to thang-kng,
Therefore, existing method is difficult to directly be supported thang-kng part (top surface) and then opposite type regulates and controls, can only be by being situated between
Edge (side) clamping of matter is so as to indirect adjustments and controls, and the mechanism of adjustment lacks the method for " drawing " based on " top " and " pressure ".Cause
This, existing face type adjustment and control device are limited for the sheet gain media effect for activating mirror configuration, it tends to be difficult to
Meet the requirement (Wang Yazhou of high-quality face type.Large caliber reflecting mirror component installs theory analysis and the optimization of clamping technique.[M]
Tsing-Hua University, 2013:1-8).
It is a kind of existing ripe technological means to replace the effect of direct Mechanical Contact using gas pressure effect, but at present
It there is no the report of the profile control technology of air pressure driving.
The content of the invention
It is an object of the invention to overcome above-mentioned the deficiencies in the prior art, a kind of array laser of air pressure driving is provided and increased
Beneficial medium side type regulating and controlling mechanism, the laser amplifier for activating mirror configuration passes through the gas of embedded semiconductor pump pumping system
Mouth array applies malleation or negative pressure up to the effect reached the top with " drawing " to gain medium different zones, is a kind of flexible
Effect, and then realize the adjustment and control of opposite type.
The technology of the present invention solution is as follows：
A kind of array laser gain media face type regulating and controlling mechanism of air pressure driving, feature is that its composition includes：By many
The air tap array of individual valve composition independent mutually, gas flow optimized module, supercharging air pump, vavuum pump, by multiple semiconductor pumped
Semiconductor laser pumping face battle array, the first gas inlet tube, the second gas inlet tube and Duo Gen gas outlet tubes that module two-dimensional arrangements are constituted.
Described supercharging air pump and vavuum pump pass through the first gas inlet tube and the second gas inlet tube and described air-flow respectively
The first input end of control module, the second input are connected, and each output end of the gas flow optimized module is respectively through described output
Tracheae is connected with the air intake of described valve, and described air tap array is distributed in the difference of described conductor Laser pump face battle array
Position, and the gap of the semiconductor pumping module through correspondence position, the gas outlet of described valve is just to gain media.
Described gas flow optimized module is made up of multiple input-output units, and each input-output unit includes the first pressure regulation
Valve, the second pressure regulator valve and threeway；Described first pressure regulator valve one end connects the first gas inlet tube, second pressure regulator valve one end connection the
Two gas inlet tubes, the first described pressure regulator valve and the other end of the second pressure regulator valve connect described output by described threeway
Tracheae.
Described gain media is neodymium doped phosphate glass, and supercharging air pump is oil-free air pump, constant offer P+=
0.05MPa, the first pressure regulator valve is gas pressure reducer, and vavuum pump is that there is provided P for oil free screw pump-=-0.09MPa, the second pressure regulator valve
For vacuum regulating valve.
Described air tap array is multichannel valve, is made up of the high temperature resistant material of resistance to high light, such as 316 stainless steels or fused quartz,
0.3~5mm of valve internal diameter.Valve outlet is rectified to sheet gain medium, apart from 0.3~5mm of gain medium facet.Valve
Opposite side of the air inlet end in semiconductor pumping module.Described gas flow optimized module input by two gas pipelines respectively at
Described booster pump and described vavuum pump connection, output end is the array of one group of tracheae composition, each gas outlet tube with only
One corresponding valve entrance connection.In gas flow optimized inside modules, each gas outlet tube connects two tune by a threeway
The delivery outlet of pressure valve, the input port of two pressure regulator valves is respectively with connecting the input tracheae of supercharging air pump and connecting the defeated of vavuum pump
Enter and hold tracheae to connect.
During mechanism work of the present invention, supercharging air pump provides constant positive pressure, and vavuum pump provides constant negative pressure, adjusts air-flow
The folding of corresponding two pressure regulator valves of the gas outlet tube of each in control module and size, can control air pressure in gas outlet tube
Size, and then the air pressure size in each valve exit is controlled, the air pressure at this passes through between valve and gain medium facet
Gas is applied to the corresponding region of gain medium facet, and the adjustable thrust of size (air pressure is timing) is produced in relevant range and is drawn
Power (when air pressure is bears), air pressure of the present invention is relative barometric pressure.
The technique effect of the present invention：
1) gap of air tap array insertion semiconductor pumping module is combined with pump face battle array, is not take up extra sky
Between and volume.
2) transmission of the air tap array on pump light does not produce influence.
3) the adjustable thrust of size and pulling force can be produced to gain medium facet different zones by air tap array, so as to have
There is regulation and control face type.
4) it is flexible effect to gain medium facet, no to rigid contact is not present in the type regulation process of gain media face
Produce destruction.
Brief description of the drawings
Fig. 1 is the structural representation for the array laser gain media face type regulating and controlling mechanism that air pressure of the present invention drives.
Fig. 2 is the principle schematic of the gas flow optimized module of the embodiment of the present invention.
Embodiment
The method of the invention is described further below in conjunction with drawings and Examples.The embodiment is to explain the present invention
Mode provide, and the limitation of non-invention.
Referring initially to Fig. 1, Fig. 1 is that the structure for the array laser gain media face type regulating and controlling mechanism that air pressure of the present invention drives is shown
It is intended to, as seen from the figure, the array laser gain media face type regulating and controlling mechanism of air pressure driving of the present invention, including：By gas
Mouth 1 constitute array, gas flow optimized module 2, supercharging air pump 3, vavuum pump 4, the first gas inlet tube 21, the second gas inlet tube 22,
Gas outlet tube 23.The array distribution that described multiple separate valves 1 are constituted is different in semiconductor laser pumping face battle array 6
Position, through the gap of correspondence position semiconductor pumping module 61, the outlet of valve 1 is just to gain medium 7, gas flow optimized
Two gas inlet tubes 21,22 of module 2 are connected with supercharging air pump 3 and vavuum pump 4 respectively, and the output end of gas flow optimized module 2 is
Some gas outlet tubes 23, are connected with the corresponding entrance of valve 1 respectively.
Referring again to Fig. 2, Fig. 2 is the principle schematic of gas flow optimized module 2, as seen from the figure, described gas flow optimized module
It is made up of multiple input-output units, each input-output unit includes the first pressure regulator valve 24, the second pressure regulator valve 25 and threeway 26.
Described one end of the first pressure regulator valve 24 connects the first gas inlet tube 21, the one end of the second pressure regulator valve 25 and connects the second gas inlet tube 22,
The first described pressure regulator valve 24 connects described gas outlet tube with the other end of the second pressure regulator valve 25 by described threeway 26
23。
Each valve 1 is independent mutually in described air tap array, and operation principle is as follows：
The gas that described supercharging air pump 3 is used is the clean protective gas of room temperature, and such as helium or nitrogen are adjusted first
The input port side of pressure valve 24 produces P+Positive air pressure, by adjust the first pressure regulator valve 24, in the delivery outlet one of the first pressure regulator valve 24
Side can produce [0, P+] in the range of positive air pressure；Described vavuum pump 4 produces P in the input port side of the second pressure regulator valve 25-Angrily
Pressure, by adjusting the second pressure regulator valve 25, [P is produced in the delivery outlet of the second pressure regulator valve 25-, 0] in the range of negative pressure.Pass through control
Make and adjust the first pressure regulator valve 24 and the second pressure regulator valve 25 that same gas outlet tube 23 is connected folding and output pressure it is big
It is small, after threeway 26, [P can be produced by corresponding gas outlet tube 23 in gas flow optimized module-,P+] in the range of pressure, enter
And the pressure P ∈ [P in the corresponding exit of valve 1-,P+].- 0.1MPa ＜ P-The ＜ P of ＜ 0,0+≤0.2MPa.Act on gain Jie
The active force of the surface corresponding region of matter 7 is that F, F and P are proportional relation.
As P ＞ 0, the active force that valve 1 produces " pushing away " to the surface corresponding region of gain media 7 is：
F=C+P (1)
As P ＜ 0, the active force that valve 1 produces " drawing " to the surface corresponding region of gain media 7 is：
F=C_P (2)
Work as P=0, valve 1 is to gain media 7 without active force.
C+,C-Respectively P be malleation and negative pressure when equivalent area, unit for square metre, be approximately constant, air tap array
In each valve 1 malleation equivalent area C+It is identical, the negative pressure equivalent area C of each valve 1-It is identical, obtained by following operation
：
1) the second pressure regulator valve 25 of connection vavuum pump 4 is closed, the first pressure regulator valve 24 of connection supercharging air pump 3, regulation is opened
The size of first pressure regulator valve 24 obtains one group of tested back pressure { P of valve 1+0,P+1...P+i, it is desirable to i >=2.
2) gain media 7 is replaced to be placed on the position just to being tested valve 1 dynamometer so that valve 1 and dynamometer stress
The distance in face measures one group of stress { F with identical with the distance on the surface of gain media 7+0,F+1...F+i, dynamometer is
There are equipment and instrument, such as electronic analytical balance.
3) according to formula (1), using least square method, { F is brought into+0,F+1...F+iAnd { P+0,P+1...P+i, fitting is obtained
The equivalent area C of malleation+。
4) close connection supercharging air pump 3 the first pressure regulator valve 24, open connection vavuum pump 4 pressure regulator valve 25, take 1)~
3) identical step, obtains the equivalent area C of negative pressure-。
If desired some valve 1 produces pulling force/thrust F to the surface corresponding region of gain media 7, can according to formula (2)/(1)
The positive negative pressure P of needs is learnt, by adjusting the pressure regulator valve 24 of the second pressure regulator valve 25/ first to pressure P.
If learning the back pressure P of valve 1 by the pressure regulator valve 24 of the second pressure regulator valve 25/ first, it can be obtained according to formula (2)/(1)
Drawing/thrust the F produced to valve 1 to the surface corresponding region of gain media 7.
Embodiment：Gain media 7 in the present embodiment is neodymium doped phosphate glass, and volume is 100*200*20mm, is used
Semiconductor pumped face 6 sizes of battle array be 100*200mm, semiconductor pumped face battle array 6 arranges totally 12 semiconductor pumping modules by 3 rows 4
61 compositions, horizontal direction (length direction) the spacing 5mm between any two of module 61, with Edge Distance 5mm, vertical direction (width side
To) spacing 4mm, with edge spacing 4mm, valve 1 is distributed in the center of adjacent four semiconductor pumping modules 61, worn from gap
Cross, amount to 6 valves 1 in pump face battle array 6 in the distribution of 2*3 arrays, valve 1 is 316 stainless steels, exit inside diameter D=
3mm, the surface spacing 0.7mm with gain media 7.Supercharging air pump 3 is oil-free air pump, constant offer P+=0.05MPa is (with respect to gas
Pressure), the first pressure regulator valve 24 being attached thereto is gas pressure reducer.Vavuum pump 4 is that there is provided P for oil free screw pump-=-0.09MPa
(relative barometric pressure), the second pressure regulator valve 25 being attached thereto is vacuum regulating valve, and threeway 26 is polishing three in 316 stainless steels
It is logical.
By electronic force measuring instrument stress surface just to valve 1 to be measured, 0.7mm is exported apart from valve 1.
Closing pressure-regulating valve 24, adjusts pressure regulator valve 25, produced in the outlet of valve 1 one group of pressure -0.09Mpa, -
0.07MPa, -0.05MPa, -0.03MPa, -0.01MPa }, dynamometer obtain corresponding one group of stress -0.181N, -
0.139N, -0.098N, -0.063N, -0.016N } (stress is negative indication pulling force), obtained according to formula (2) and principle of least square method
Arrive：
F=C-P=2 × 10-6m2P (P ＜ 0) (3)
Closing pressure-regulating valve 25, adjusts pressure regulator valve 24, produced in the outlet of valve 1 one group of pressure 0.01MPa, 0.02MPa,
0.03MPa, 0.04MPa, 0.05MPa }, dynamometer obtain corresponding one group of stress 0.05N, 0.12N, 0.17N, 0.26N,
0.33N } (stress represents thrust to be positive).Obtained according to formula (1) and principle of least square method：
F=C+P=6 × 10-6m2P (P ＞ 0) (4)
According to vavuum pump 4 and the output-index of supercharging air pump 3, P ∈ [- 0.09MPa, 0.05MPa], valve can be situated between to gain
The surface of matter 7 produces the active force in the range of [- 0.2N, 0.5N].Use case is as follows：
For some valve 1, pulling force -0.07N if desired is produced to the surface of gain media 7, P=- is obtained according to formula (3)
0.035MPa, closes the pressure regulator valve 24 of the valve 1, adjusts the pressure regulator valve 25 to -0.035MP of the valve 1；If desired to increasing
The beneficial surface of medium 7 produces thrust 0.24N, and P=0.04MPa is obtained according to formula (4), closes the pressure regulator valve 25 of the valve 1, and regulation should
The pressure regulator valve 24 of valve 1 is to 0.04MPa.
Claims (3)
1. a kind of array laser gain media face type regulating and controlling mechanism of air pressure driving, is characterised by that its composition includes：By multiple
Mutually the air tap array of independent valve (1) composition, gas flow optimized module (2), supercharging air pump (3), vavuum pump (4), by multiple
It is semiconductor laser pumping face battle array (6) that semiconductor pumping module (61) two-dimensional arrangements are constituted, the first gas inlet tube (21), second defeated
Enter tracheae (22) and many gas outlet tubes (23)；
Described supercharging air pump (3) and vavuum pump (4) respectively by the first gas inlet tube (21) and the second gas inlet tube (22) with
The first input end of described gas flow optimized module (2), the second input are connected, each output end of the gas flow optimized module (2)
It is connected respectively through described gas outlet tube (23) with the air intake of described valve (1), described air tap array is distributed in described
Conductor Laser pump face battle array (6) diverse location, and the gap of the semiconductor pumping module (61) through correspondence position is described
Valve (1) gas outlet just to gain media (7).
2. the array laser gain media face type regulating and controlling mechanism of air pressure driving according to claim 1, it is characterised in that
Described gas flow optimized module (2) is made up of multiple input-output units, and each input-output unit includes the first pressure regulator valve
(24), the second pressure regulator valve (25) and threeway (26)；
It is defeated that described the first pressure regulator valve (24) one end connects the first gas inlet tube (21), the connection second of the second pressure regulator valve (25) one end
Enter tracheae (22), described the first pressure regulator valve (24) and the other end of the second pressure regulator valve (25) are connected by described threeway (26)
Lead to described gas outlet tube (23).
3. the array laser gain media face type regulating and controlling mechanism of air pressure driving according to claim 1 or 2, its feature exists
In described gain media is neodymium doped phosphate glass, and supercharging air pump is oil-free air pump, constant offer malleation P+=0.05MPa,
First pressure regulator valve is gas pressure reducer, and vavuum pump is that there is provided negative pressure P for oil free screw pump-=-0.09MPa, the second pressure regulator valve is true
Air-conditioning pressure valve.
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| CN103345059A (en) * | 2013-06-28 | 2013-10-09 | 中国科学院西安光学精密机械研究所 | Method and system for zoom of reflection type deformable mirror |
| CN103513309A (en) * | 2013-10-29 | 2014-01-15 | 哈尔滨工业大学 | Long-wave infrared and inflated film reflecting mirror and formation method of main mirror surface |
| CN103575232A (en) * | 2013-11-13 | 2014-02-12 | 长春理工大学 | Photoinduced deformation thin film reflector surface shape control and measurement device |
-
2015
- 2015-02-15 CN CN201510080654.4A patent/CN104682170B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007256423A (en) * | 2006-03-22 | 2007-10-04 | Seiko Epson Corp | Method for manufacturing reflector, and light source apparatus and projector |
| CN102841443A (en) * | 2011-06-24 | 2012-12-26 | 北京大学 | Digital adjustable micromirror chip on basis of microfluidics and preparation method thereof |
| CN103293662A (en) * | 2013-06-07 | 2013-09-11 | 清华大学 | Reflecting mirror surface shape control device |
| CN103345059A (en) * | 2013-06-28 | 2013-10-09 | 中国科学院西安光学精密机械研究所 | Method and system for zoom of reflection type deformable mirror |
| CN103513309A (en) * | 2013-10-29 | 2014-01-15 | 哈尔滨工业大学 | Long-wave infrared and inflated film reflecting mirror and formation method of main mirror surface |
| CN103575232A (en) * | 2013-11-13 | 2014-02-12 | 长春理工大学 | Photoinduced deformation thin film reflector surface shape control and measurement device |
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