CN103293662A - Reflecting mirror surface shape control device - Google Patents
Reflecting mirror surface shape control device Download PDFInfo
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- CN103293662A CN103293662A CN2013102265801A CN201310226580A CN103293662A CN 103293662 A CN103293662 A CN 103293662A CN 2013102265801 A CN2013102265801 A CN 2013102265801A CN 201310226580 A CN201310226580 A CN 201310226580A CN 103293662 A CN103293662 A CN 103293662A
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Abstract
The invention discloses a reflecting mirror surface shape control device which comprises a mirror, a base, a heating/refrigerating unit and a temperature probe. The mirror is deformed when acting force is exerted on the mirror, and the surface shape of the deformed mirror has a shaping effect on the wavefront of light beam shone on a mirror surface. The base is connected with the mirror and used for receiving energy of the heating/refrigerating unit to generate deformation and acting the deformation on the mirror. The heating/refrigerating unit is installed at the bottom of the base and provides temperature conditions for the deformation of the base. The temperature probe is arranged in the base and used for detecting temperature change value generated in a process of delivering heat from the heating/refrigerating unit to the base so as to conduct control and adjustment. The reflecting mirror surface shape control device is simple in structure and high in adjusting precision and real-time efficiency, reduces energy consumption, meanwhile is low in structural cost and can achieve manufacturing of a small-size multi-adjusting-point efficient small deformable mirror.
Description
Technical field
The present invention relates to the precision optical instrument field, be specifically related to a kind of reflective minute surface face type control device.
Background technology
Distorting lens, claim deformation reflection mirror again, mainly apply among the various ADAPTIVE OPTICS SYSTEMS, proofread and correct wavefront error as the wavefront correction device, in ADAPTIVE OPTICS SYSTEMS, play an important role, be one of vitals in the ADAPTIVE OPTICS SYSTEMS, the research and development of distorting lens is related to calibration capability and the correction accuracy of whole ADAPTIVE OPTICS SYSTEMS.
The deformation reflection mirror formula is come phase distortion before the compensated wave by changing own surperficial face shape, can be divided into two types of continuous surface shape and discrete surface. continuous surface deformable mirror, its advantage is to obtain continuous face shape, the correction accuracy height, and its shortcoming is that the deflection of face shape is smaller.The deformation reflection mirror of continuous surface can be divided into whole the actuating and two kinds of discrete actuatings again.The whole actuating mainly contains two piezoelectric deforming mirrors and Bao Mo distorting lens, be characterized in when control voltage acts on a certain actuating unit, the entire emission minute surface all will produce distortion, and this class distorting lens is mainly used in cooperating with the curvature Wavefront sensor low step mode part of proofreading and correct wavefront distortion.Characteristics of discrete actuating distorting lens are when control voltage acts on an actuator, have only this actuator adjacent area to produce local deformation.When wherein direction of actuation was parallel to minute surface, actuator acted on the catoptron edge, can only be used for proofreading and correct particular aberration such as out of focus and astigmatism, and therefore the application in ADAPTIVE OPTICS SYSTEMS has been subjected to limitation.Direction of actuation can be proofreaied and correct each rank aberration perpendicular to the continuous surface deformable mirror of minute surface, and can reach very high correction accuracy, therefore becomes a kind of wave-front corrector most widely used in the ADAPTIVE OPTICS SYSTEMS.
The research of domestic deformable mirror system aspects in high degree of regulation early, namely set up the first cover laser corrugated corrective system in 1986 and (seen the academic report document for details, Jiang Wenhan, adaptive optical technique, " Chinese Academy of Engineering is academician's conference academic report compilation for the second time ", July nineteen ninety-five), it regulates bore is that 70mm*70mm. is from using, up to the present, using the most successful in this respect is exactly the laser nuclear fusion system of U.S. Lao Lunsilifei More National Laboratory.They adopt the deformable mirror system of the 400mm*400mm that is succeeded in developing by Beamlet company.This system adopts the mode of electromagnetic brake braking, and actuator adopts the hexagonal arrangement mode, has realized the performance of heavy caliber (400mm*400mm) and higher degree of regulation.The mode that its displacement transmission system adopts is, the direct contact resilient reed of actuator, and elastic spring and active optics minute surface are sticked together.The positive movement displacement of actuator is reacted directly on the optical mirror plane like this, and its negative sense displacement then realizes because of the restoring force of elastic spring.Existing structure and the complexity of leaning on the distorting lens of spring restoring force, because of the needs Precision Machining, manufacturing cost is higher.
Summary of the invention
The present invention one of is intended to solve the problems of the technologies described above at least to a certain extent or provides a kind of useful commerce to select at least.For this reason, the objective of the invention is to propose a kind of simple in structure, reflective minute surface face type control device that degree of regulation is high.
For achieving the above object, the reflective minute surface face type control device according to the embodiment of the invention comprises: at least one eyeglass, and described eyeglass produces deformation accepting acting force, and the face shape after the deformation has shaping operation to the wavefront front of irradiation light beam thereon; Base, described base links to each other with described eyeglass, be used for to accept the energy variation of heating/refrigeration unit and produce deformation, and with deformation effect on described eyeglass; At least one described heating/refrigeration unit, described heating/refrigeration unit links to each other with described base, is used to the deformation of described base that temperature conditions is provided; At least one hygrosensor, described hygrosensor links to each other with described base, is used for surveying passing to the temperature change value that takes place at base through heating/refrigeration unit, in order to carry out regulating and controlling.
In one embodiment of the invention, for directly to link to each other, perhaps connect continuous by the mirror intercolumniation between described eyeglass and the described base.
In one embodiment of the invention, described heating/refrigeration unit evenly distribute or non-uniform Distribution be installed in inside or the surface of described base.
In one embodiment of the invention, be installed in to the even distribution of described hygrosensor or non-uniform Distribution inside or the surface of described base.
In one embodiment of the invention, the thickness of described eyeglass is equal to or greater than or less than the thickness of described base.
In one embodiment of the invention, have fluting in the described base, but described fluting is used for changing the deformation adjustment region of described base.
In one embodiment of the invention, described eyeglass comprises that a plurality of sub-eyeglasses are formed by stacking, and/or described base comprises that a plurality of sub-bases are formed by stacking.
In one embodiment of the invention, the linear expansion coefficient of described eyeglass and described base is different.
In one embodiment of the invention, the material of described eyeglass is quartz or glass.
The present invention is simple in structure, the degree of regulation height, and the Real time Efficiency height reduces energy consumption, and infrastructure cost is very low and can realize that the efficient small-sized distorting lens of the many point of adjustment of small size makes simultaneously.
Additional aspect of the present invention and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Description of drawings
Above-mentioned and/or additional aspect of the present invention and advantage are from obviously and easily understanding becoming the description of embodiment in conjunction with following accompanying drawing, wherein:
Fig. 1 is the structural representation according to the reflective minute surface face shape control device of first embodiment of the invention;
Fig. 2 is the structural representation according to the reflective minute surface face shape control device of second embodiment of the invention;
Fig. 3 is the structural representation according to the reflective minute surface face shape control device of third embodiment of the invention;
Fig. 4 is the structural representation according to the reflective minute surface face shape control device of fourth embodiment of the invention;
Fig. 5 is the structural representation according to the reflective minute surface face shape control device of fifth embodiment of the invention;
Fig. 6 is the structural representation according to the reflective minute surface face shape control device of sixth embodiment of the invention;
Fig. 7 is the structural representation according to the reflective minute surface face shape control device of seventh embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein identical or similar label is represented identical or similar elements or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment that is described with reference to the drawings, be intended to for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center "; " vertically "; " laterally "; " length "; " width "; " thickness ", " on ", D score, " preceding ", " back ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", close the orientation of indications such as " counterclockwise " or position is based on orientation shown in the drawings or position relation, only be that the present invention for convenience of description and simplification are described, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.
In addition, term " first ", " second " only are used for describing purpose, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the invention, the implication of " a plurality of " is two or more, unless clear and definite concrete restriction is arranged in addition.
In the present invention, unless clear and definite regulation and restriction are arranged in addition, broad understanding should be done in terms such as term " installation ", " linking to each other ", " connection ", " fixing ", for example, can be fixedly connected, also can be to removably connect, or connect integratedly; Can be mechanical connection, also can be to be electrically connected; Can be directly to link to each other, also can link to each other indirectly by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can understand above-mentioned term concrete implication in the present invention as the case may be.
In the present invention, unless clear and definite regulation and restriction are arranged in addition, first feature second feature it " on " or D score can comprise that first and second features directly contact, can comprise that also first and second features are not directly contacts but by the contact of the additional features between them.And, first feature second feature " on ", " top " and " above " comprise first feature directly over second feature and oblique upper, or only represent that the first characteristic level height is higher than second feature.First feature second feature " under ", " below " and " below " comprise first feature under second feature and tiltedly, or only represent that the first characteristic level height is less than second feature.
Reflective minute surface face type control device according to the embodiment of the invention comprises: at least one eyeglass 1, eyeglass 1 produce deformation accepting acting force, and the face shape after the deformation has shaping operation to the wavefront front of irradiation light beam thereon; Base 2, base 2 links to each other with eyeglass 1, be used for to accept the energy variation of heating/refrigeration unit 3 and produce deformation, and with deformation effect on eyeglass 1; At least one heating/refrigeration unit 3, heating/refrigeration unit 3 links to each other with base 2, is used to the deformation of base 2 that temperature conditions is provided; At least one hygrosensor 4, hygrosensor 4 links to each other with base 2, is used for surveying through heating/refrigeration unit 3 passing to the temperature change value that takes place at base 2, in order to carry out regulating and controlling.
For making those skilled in the art understand the present invention better, do further explanation in conjunction with Figure of description.
Referring to Fig. 1 and Fig. 2, in one embodiment of the invention, for directly to link to each other, perhaps connect continuous by the mirror intercolumniation between eyeglass 1 and the base 2.Particularly, can eyeglass 1 and base 2 is directly bonding.Bondingly indirectly by mirror post 5 can be: earlier highly consistent mirror post 5 is installed in base 2 upper surfaces, again eyeglass 1 is installed in mirror post 5 upper surfaces; Or earlier mirror post 5 and eyeglass 1 are pasted, stick on base 2 upper surfaces then together.Thereby by mirror post 5 power of deformation being passed to eyeglass 1 when deformation take place for base 2 drives it and produces desirable face shape.
Referring to Fig. 1 and Fig. 3, in one embodiment of the invention, be installed in to the 3 even distributions of heating/refrigeration unit or non-uniform Distribution inside or the surface of base 2; Be installed in to hygrosensor 4 even distributions or non-uniform Distribution inside or the surface of base 2.General earlier with base 2 perforates, perforate is used for laying heating/refrigeration unit 3 and hygrosensor 4.What and position the quantity of perforate and distribution can select according to actual needs.
Referring to Fig. 3, Fig. 4 and Fig. 5, in one embodiment of the invention, the thickness of eyeglass 1 is equal to or greater than or less than the thickness of base 2.The relativeness of concrete thickness can be selected according to actual needs.
Referring to Fig. 6, in one embodiment of the invention, have fluting in the base 2, but fluting is used for changing the deformation adjustment region of base 2.The groove place can't directly contact with eyeglass, and transmits in the place that only can transmit contact aspect the deformation transmission, so the groove position can take according to the distribution of the wavefront front that will revise with size, is out of shape in order to control more accurately.
Referring to Fig. 7, in one embodiment of the invention, eyeglass 1 comprises that a plurality of sub-eyeglasses are formed by stacking, and/or base 2 comprises that a plurality of sub-bases are formed by stacking.The structure of multilayer stack can realize some complex combination effects.
In one embodiment of the invention, eyeglass 1 is different with the linear expansion coefficient of base 2.Just because of the linear expansion coefficient difference could produce deformation, carry out the control of minute surface face type.This is actuation force of the present invention place.
In one embodiment of the invention, the material of eyeglass 1 is quartz or glass.2 of bases are metal or nonmetal.
As from the foregoing, the eyeglass 1 in the reflective minute surface face shape control device is reflected illumination light beam thereon, adjusts the wavefront front of institute's folded light beam simultaneously by the height size distribution on adjustment eyeglass 1 plane.The linear expansion coefficient of base 2 and eyeglass 1 is different in the reflective minute surface face shape control device.The power source that acts on the eyeglass 1 in the reflective minute surface face shape control device comes from heating/refrigeration unit 3.Heating/refrigeration unit 3, itself and base 2 are installed together.Be distributed on heating/refrigeration unit 3 arrays when calculate good wavefront surface shape check point through light beam, each heating/refrigeration unit 3 produces the distribution of corresponding temperature field makes base 2 that deformation take place, and deformation effect is made its generation deformation and obtains desirable face shape at eyeglass 1; Change by the 3 array temperature field distribution of large tracts of land control heating/refrigeration unit can drive the face shape that eyeglass 1 deformation obtains wanting.It is installed in hygrosensor 4 and is used for real-time detection base 2 temperature variations everywhere on the base 2.
The present invention is simple in structure, the degree of regulation height, and the Real time Efficiency height reduces energy consumption, and infrastructure cost is very low and can realize that the efficient small-sized distorting lens of the many point of adjustment of small size makes simultaneously.
In the description of this instructions, concrete feature, structure, material or characteristics that the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means in conjunction with this embodiment or example description are contained at least one embodiment of the present invention or the example.In this manual, the schematic statement to above-mentioned term not necessarily refers to identical embodiment or example.And concrete feature, structure, material or the characteristics of description can be with the suitable manner combination in any one or more embodiment or example.
Although illustrated and described embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, those of ordinary skill in the art can change above-described embodiment under the situation that does not break away from principle of the present invention and aim within the scope of the invention, modification, replacement and modification.
Claims (9)
1. a reflective minute surface face type control device is characterized in that, comprising:
At least one eyeglass, described eyeglass produces deformation accepting acting force, and the face shape after the deformation has shaping operation to the wavefront front of irradiation light beam thereon;
Base, described base links to each other with described eyeglass, be used for to accept the energy variation of heating/refrigeration unit and produce deformation, and with deformation effect on described eyeglass;
At least one described heating/refrigeration unit, described heating/refrigeration unit links to each other with described base, is used to the deformation of described base that temperature conditions is provided;
At least one hygrosensor, described hygrosensor links to each other with described base, is used for surveying passing to the temperature change value that takes place at base through heating/refrigeration unit, in order to carry out regulating and controlling.
2. reflective minute surface face type control device as claimed in claim 1 is characterized in that, for directly to link to each other, perhaps connects continuous by the mirror intercolumniation between described eyeglass and the described base.
3. reflective minute surface face type control device as claimed in claim 1 is characterized in that, described heating/refrigeration unit evenly distribute or non-uniform Distribution be installed in inside or the surface of described base.
4. reflective minute surface face type control device as claimed in claim 1 is characterized in that, is installed in to the even distribution of described hygrosensor or non-uniform Distribution inside or the surface of described base.
5. reflective minute surface face type control device as claimed in claim 1 is characterized in that, the thickness of described eyeglass is equal to or greater than or less than the thickness of described base.
6. reflective minute surface face type control device as claimed in claim 1 is characterized in that having fluting in the described base, but described fluting is used for changing the deformation adjustment region of described base.
7. reflective minute surface face type control device as claimed in claim 1 is characterized in that, described eyeglass comprises that a plurality of sub-eyeglasses are formed by stacking, and/or described base comprises that a plurality of sub-bases are formed by stacking.
8. as the described reflective minute surface face type control device of claim 1-7, it is characterized in that the linear expansion coefficient of described eyeglass and described base is different.
9. reflective minute surface face type control device as claimed in claim 8 is characterized in that the material of described eyeglass is quartz or glass.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310226580.1A CN103293662B (en) | 2013-06-07 | 2013-06-07 | Reflective mirror surface shape control device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310226580.1A CN103293662B (en) | 2013-06-07 | 2013-06-07 | Reflective mirror surface shape control device |
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| CN103293662A true CN103293662A (en) | 2013-09-11 |
| CN103293662B CN103293662B (en) | 2017-04-05 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103969823A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Wavefront active compensating device of optical system |
| CN104682170A (en) * | 2015-02-15 | 2015-06-03 | 中国科学院上海光学精密机械研究所 | Pneumatically-driven array laser gain medium surface type regulation mechanism |
| CN106125298A (en) * | 2016-08-31 | 2016-11-16 | 中国科学院长春光学精密机械与物理研究所 | Contactless space optical remote sensor reflecting mirror surface shape control system |
| CN108594427A (en) * | 2018-06-19 | 2018-09-28 | 西南科技大学 | Thermal drivers distorting lens |
| CN109324411A (en) * | 2018-11-27 | 2019-02-12 | 中国电子科技集团公司第十研究所 | A kind of laser distorted wavefront bearing calibration and device |
| CN109852930A (en) * | 2019-03-29 | 2019-06-07 | 中国科学院上海技术物理研究所 | A method of compensation medium caliber deielectric-coating plane mirror plated film deformation |
| CN110543010A (en) * | 2019-08-23 | 2019-12-06 | 中国科学院高能物理研究所 | Ultra-precise active optical modulation method and system based on multi-interval thermal deformation modulation |
| CN114967036A (en) * | 2022-05-30 | 2022-08-30 | 深圳综合粒子设施研究院 | Reflector surface shape control structure and beam line device |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103969823A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Wavefront active compensating device of optical system |
| CN104682170A (en) * | 2015-02-15 | 2015-06-03 | 中国科学院上海光学精密机械研究所 | Pneumatically-driven array laser gain medium surface type regulation mechanism |
| CN104682170B (en) * | 2015-02-15 | 2017-07-14 | 中国科学院上海光学精密机械研究所 | The array laser gain media face type regulating and controlling mechanism of air pressure driving |
| CN106125298A (en) * | 2016-08-31 | 2016-11-16 | 中国科学院长春光学精密机械与物理研究所 | Contactless space optical remote sensor reflecting mirror surface shape control system |
| CN108594427A (en) * | 2018-06-19 | 2018-09-28 | 西南科技大学 | Thermal drivers distorting lens |
| CN108594427B (en) * | 2018-06-19 | 2023-12-19 | 西南科技大学 | thermally driven deformable mirror |
| CN109324411A (en) * | 2018-11-27 | 2019-02-12 | 中国电子科技集团公司第十研究所 | A kind of laser distorted wavefront bearing calibration and device |
| CN109852930A (en) * | 2019-03-29 | 2019-06-07 | 中国科学院上海技术物理研究所 | A method of compensation medium caliber deielectric-coating plane mirror plated film deformation |
| CN110543010A (en) * | 2019-08-23 | 2019-12-06 | 中国科学院高能物理研究所 | Ultra-precise active optical modulation method and system based on multi-interval thermal deformation modulation |
| CN110543010B (en) * | 2019-08-23 | 2021-01-19 | 中国科学院高能物理研究所 | Ultra-precise active optical modulation method and system |
| CN114967036A (en) * | 2022-05-30 | 2022-08-30 | 深圳综合粒子设施研究院 | Reflector surface shape control structure and beam line device |
| CN114967036B (en) * | 2022-05-30 | 2024-02-02 | 深圳综合粒子设施研究院 | Mirror surface shape control structure and beam line device |
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