CN103969823A - Wavefront active compensating device of optical system - Google Patents
Wavefront active compensating device of optical system Download PDFInfo
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- CN103969823A CN103969823A CN201410187121.1A CN201410187121A CN103969823A CN 103969823 A CN103969823 A CN 103969823A CN 201410187121 A CN201410187121 A CN 201410187121A CN 103969823 A CN103969823 A CN 103969823A
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- temperature control
- optical system
- glass mirror
- wavefront
- multiple temperature
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Abstract
The invention discloses a wavefront active compensating device of an optical system, and belongs to the technical field of aberration compensation of optical systems. The problem that a wavefront active compensating device in the prior art is complex in structure and high in cost is solved. The wavefront active compensating device of the optical system comprises a glass optical lens, an electric control system and a plurality of temperature adjusting devices, the temperature adjusting devices are fixed to the surface of the glass optical lens, and the input power of the temperature adjusting devices is controlled by the electric control system. According to the compensating device, active compensation of lens wavefront is changed by adjusting the temperature distribution of the glass optical lens, the device is simple, the caliber is not limited, and the device is suitable for the precision optical system, and is mainly used for compensating the Zernike aberration of the optical system.
Description
Technical field
The present invention relates to a kind of optical system wavefront Active Compensation device, belong to the aberration compensation technical field of optical system.
Background technology
Along with the development of optical technology, the resolution of optical system generally improves, image quality is also constantly improved, but owing to there being the impact of the factors such as mismachining tolerance, gravity deformation, temperature variation, optical system after actual integrated may not reach designing requirement, and this just makes the wavefront compensation device of optical system become very necessary.
In prior art, optical system wavefront Active Compensation device mainly contains active optics compensation system based on distorting lens and as the adaptive optics compensation system of LCD self-adapting, but, the needs of these two kinds of devices additionally add mechanical hook-up or optical system, cause apparatus structure complexity, expensive.
Summary of the invention
The object of the invention is to solve wavefront Active Compensation apparatus structure complexity, expensive technical matters in prior art, a kind of optical system wavefront Active Compensation device is provided.
Optical system wavefront Active Compensation device of the present invention, comprises glass mirror, also comprises electric-control system and multiple temperature control equipment; Described multiple temperature control equipment is fixed on the surface of glass mirror; The multiple thermostatic power inputs of described electric control system controls.
Further, described temperature control equipment is semiconductor cooler or electric heater.
Further, described temperature control equipment is pasted fixing.
Further, described multiple temperature control equipments line centered by the optical axis of glass mirror, by circle distribution.
Further, in the time that glass mirror is reflective eyeglass, described multiple temperature control equipments are fixed in any one or more in the edge, rear surface, outer circumference surface of the front surface of glass mirror.
Further, in any one or more in the edge of the front surface of described multiple temperature control equipment cover glass eyeglasses, rear surface, outer circumference surface.
Further, in the time that glass mirror is transmission-type eyeglass, described multiple temperature control equipments are fixed in any one or more in the edge, outer circumference surface of edge, the rear surface of the front surface of glass mirror.
Further, described multiple temperature control equipments are fixing successively, and any one or more in the edge of the edge of the front surface of cover glass eyeglass, rear surface, outer circumference surface.
Beneficial effect of the present invention:
Thereby optical system Active Compensation device of the present invention is by regulating the Temperature Distribution of glass mirror to change the Active Compensation of eyeglass wavefront, device is simple, cost is low, bore is not limited, and be applicable to image quality to require in very high, the less demanding precision optical system of response speed, as projection lens of lithography machine, be mainly used in supplementing the Zernike aberration of optical system.
Brief description of the drawings
Fig. 1 is the schematic diagram that optical system wavefront Active Compensation unit temp regulating device of the present invention is pasted on glass mirror front surface edge;
Fig. 2 is the schematic diagram that optical system wavefront Active Compensation unit temp regulating device of the present invention is pasted on edge, glass mirror rear surface;
Fig. 3 is the schematic diagram that optical system wavefront Active Compensation unit temp regulating device of the present invention is pasted on glass mirror outer circumference surface;
Fig. 4 is the schematic diagram that optical system wavefront Active Compensation unit temp regulating device of the present invention is pasted on glass mirror rear surface;
In figure, 1, glass mirror, 2, temperature control equipment.
Embodiment
For making those skilled in the art further understand the present invention, further illustrate the present invention below in conjunction with accompanying drawing.
As Figure 1-4, optical system wavefront Active Compensation device, comprises glass mirror 1, electric-control system and multiple temperature control equipment 2.Wherein, glass mirror 1 can be level crossing, spherical mirror or aspheric mirror, comprises transmission-type eyeglass and reflective eyeglass; Multiple temperature control equipments 2 are fixed on the surface of glass mirror 1, for making apparatus structure simple, general employing is pasted fixing, temperature control equipment 2 can be semiconductor cooler, also can be electric heater, electric heater can be film electroform heater or granule electric heater, and multiple temperature control equipments 2 can regulate according to the variation of power input the Temperature Distribution of glass mirror 1; Electric-control system is connected with multiple temperature control equipments 2, and controls the power input of multiple temperature control equipments 2; When input different heating/refrigeration work consumption, the temperature variation of glass mirror 1 is also different, control respectively the power input of each temperature control equipment 2, make the Temperature Distribution of glass mirror 1 interior each several part also inconsistent, according to the temperature variant feature of glass refraction, the wavefront of glass mirror 1 also will change with the Temperature Distribution of glass mirror 1 inside, can, by controlling the power input of temperature control equipment 2, change Temperature Distribution and the wavefront of glass mirror 1.
Concrete principle is as follows:
When electric control system controls temperature control equipment 2 produces after different heating or refrigeration work consumption, the temperature of glass mirror 1 can change, according to the temperature variant feature of the refractive index of glass material, when light is by after the glass mirror 1 of temperature non-uniform Distribution, light path also can correspondingly change, and change in optical path length amount OPD can be expressed as formula (1):
In formula (1), L is the travel path of light in glass mirror 1, and Δ T is the temperature variation in glass mirror 1,
for the temperature refraction rate coefficient of the material of glass mirror 1.The wavefront variation amount Δ of glass mirror 1
can be described as formula (2) with Zernike polynomial expression:
In formula (2), z
nbe n item zernike polynomial expression, k
nfor polynomial coefficient, δ
for residual error.
When use, first demarcate the wavefront response w of glass mirror 1 under territory, single temperature-controlled area, unit power input
i, wherein w
ican be designated as formula (3):
w
i＝(z
1,z
2,…，z
N) (3)
According to linear superposition theorem, the wavefront variation amount of power input lower-glass eyeglass 1 can be described as formula (4) arbitrarily:
In formula (3) and (4), N represents the polynomial item number of zernike, and m is the quantity in territory, temperature-controlled area, and P is matrix of coefficients, and W is the wavefront producing, the wavefront of the needs compensation that it equals to bear, and δ W is residual error.
Multiple temperature control equipments 2 of present embodiment are not affecting under the prerequisite of glass mirror 1 normal work, can be pasted and fixed on the optional position on glass mirror 1 surface, the shape of multiple temperature control equipments 2, number, thickness all do not limit, can select according to needs, multiple temperature control equipments 2 can interconnect, and also can not connect.
In general, in the time that glass mirror 1 is reflective eyeglass, need to adopt the eyeglass of rear surface reflection, i.e. the front surface printing opacity of catoptron, rear surface reflected light; Multiple temperature control equipments 2 are pasted and fixed on glass mirror 1, can be pasted and fixed in any one or more in the edge, rear surface, outer circumference surface of the front surface of glass mirror 1.When the edge of the front surface of glass mirror 1 is pasted while being fixed with multiple temperature control equipment 2, preferred multiple temperature control equipment 2 profiles are identical, and centered by the optical axis of glass mirror 1 line, by circumference uniform distribution, and the edge of cover glass eyeglass 1 front surface, as shown in Figure 1.In the time that the stickup of the rear surface of glass mirror 1 is fixed with multiple temperature control equipment 2, preferred multiple temperature control equipments 2 line centered by the optical axis of glass mirror 1, by circle distribution, and the rear surface of cover glass eyeglass 1, as shown in Figure 4.When the outer circumference surface of glass mirror 1 is pasted while being fixed with multiple temperature control equipment 2, preferred multiple temperature control equipment 2 profiles identical and centered by the optical axis of glass mirror 1 line, by circumference uniform distribution, and the outer circumference surface of cover glass eyeglass 1, as shown in Figure 3.
In the time that glass mirror 1 is transmission-type eyeglass, multiple temperature control equipments 2 are pasted and fixed on the territory, non-transparent zone of glass mirror 1, can be pasted and fixed in any one or more in the edge, outer circumference surface of edge, the rear surface of the front surface of glass mirror 1.When the edge of the front surface of glass mirror 1 is pasted while being fixed with multiple temperature control equipment 2, preferred multiple temperature control equipment 2 profiles are identical, and centered by the optical axis of glass mirror 1 line, by circumference uniform distribution, and the edge of cover glass eyeglass 1 front surface, as shown in Figure 1.When the edge of the rear surface of glass mirror 1 is pasted while being fixed with multiple temperature control equipment 2, preferred multiple temperature control equipment 2 profiles are identical, and centered by the optical axis of glass mirror 1 line, by circumference uniform distribution, and the edge of cover glass eyeglass 1 rear surface, as shown in Figure 2.Paste while being fixed with multiple temperature control equipment 2 when the outer circumference surface of glass mirror 1, preferred multiple temperature control equipment 2 profiles are identical, and centered by the optical axis of glass mirror 1 line, by circumference uniform distribution, and the outer circumference surface of cover glass eyeglass 1, as shown in Figure 3.
The front surface of the mentioned glass mirror 1 of the present invention and rear surface are determined according to light path trend, be that the surface that light first passes through is the front surface of glass mirror 1, the surface of passing through after light is the rear surface of glass mirror 1, and Fig. 1-4 of the present invention represent front surface with upper surface, and lower surface represents rear surface.
Obviously, the explanation of above embodiment is just for helping to understand method of the present invention and core concept thereof.It should be pointed out that the those of ordinary skill for described technical field, under the premise without departing from the principles of the invention, can also carry out some improvement and modification to the present invention, these improvement and modification also fall in the protection domain of the claims in the present invention.
Claims (8)
1. optical system wavefront Active Compensation device, comprises glass mirror (1), it is characterized in that, also comprises electric-control system and multiple temperature control equipment (2);
Described multiple temperature control equipment (2) is fixed on the surface of glass mirror (1);
The power input of the multiple temperature control equipments of described electric control system controls (2).
2. optical system wavefront Active Compensation device according to claim 1, is characterized in that, described temperature control equipment (2) is semiconductor cooler or electric heater.
3. optical system wavefront Active Compensation device according to claim 1, is characterized in that, described temperature control equipment (2) is pasted fixing.
4. optical system wavefront Active Compensation device according to claim 1, is characterized in that, described multiple temperature control equipments (2) line centered by the optical axis of glass mirror (1), by circle distribution.
5. according to the optical system wavefront Active Compensation device described in claim 1-4 any one, it is characterized in that, in the time that glass mirror (1) is reflective eyeglass, described multiple temperature control equipments (2) are fixed in any one or more in the edge, rear surface, outer circumference surface of the front surface of glass mirror (1).
6. optical system wavefront Active Compensation device according to claim 5, it is characterized in that any one or more in the edge of the front surface of described multiple temperature control equipments (2) cover glass eyeglasses (1), rear surface, outer circumference surface.
7. according to the optical system wavefront Active Compensation device described in claim 1-4 any one, it is characterized in that, in the time that glass mirror (1) is transmission-type eyeglass, described multiple temperature control equipments (2) are fixed in any one or more in the edge, outer circumference surface of edge, the rear surface of the front surface of glass mirror (1).
8. optical system wavefront Active Compensation device according to claim 7, is characterized in that, any one or more in the edge of the front surface of described multiple temperature control equipment cover glass eyeglasses (1), the edge of rear surface, outer circumference surface.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410187121.1A CN103969823B (en) | 2014-05-05 | 2014-05-05 | Wavefront active compensating device of optical system |
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| CN201410187121.1A CN103969823B (en) | 2014-05-05 | 2014-05-05 | Wavefront active compensating device of optical system |
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| CN103969823B CN103969823B (en) | 2017-01-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112068307A (en) * | 2020-09-21 | 2020-12-11 | 中国科学院长春光学精密机械与物理研究所 | Hybrid thermally-driven wavefront correction device |
Citations (6)
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|---|---|---|---|---|
| US20030169520A1 (en) * | 2002-03-11 | 2003-09-11 | Michael Goldstein | Mirror assembly with thermal contour control |
| JP2004301969A (en) * | 2003-03-31 | 2004-10-28 | National Institute Of Advanced Industrial & Technology | Variable mirror apparatus |
| CN102957085A (en) * | 2012-11-19 | 2013-03-06 | 中国电子科技集团公司第十一研究所 | Optical device for laser beam wave-front correction and wave-front correction method |
| CN103293662A (en) * | 2013-06-07 | 2013-09-11 | 清华大学 | Reflecting mirror surface shape control device |
| CN103323945A (en) * | 2013-06-17 | 2013-09-25 | 清华大学 | Transmission reflection type wave front control device |
| CN103364944A (en) * | 2013-07-17 | 2013-10-23 | 清华大学 | Boundary temperature control array type wavefront control device and manufacturing method thereof |
-
2014
- 2014-05-05 CN CN201410187121.1A patent/CN103969823B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030169520A1 (en) * | 2002-03-11 | 2003-09-11 | Michael Goldstein | Mirror assembly with thermal contour control |
| JP2004301969A (en) * | 2003-03-31 | 2004-10-28 | National Institute Of Advanced Industrial & Technology | Variable mirror apparatus |
| CN102957085A (en) * | 2012-11-19 | 2013-03-06 | 中国电子科技集团公司第十一研究所 | Optical device for laser beam wave-front correction and wave-front correction method |
| CN103293662A (en) * | 2013-06-07 | 2013-09-11 | 清华大学 | Reflecting mirror surface shape control device |
| CN103323945A (en) * | 2013-06-17 | 2013-09-25 | 清华大学 | Transmission reflection type wave front control device |
| CN103364944A (en) * | 2013-07-17 | 2013-10-23 | 清华大学 | Boundary temperature control array type wavefront control device and manufacturing method thereof |
Non-Patent Citations (1)
| Title |
|---|
| B CANUEL ETC.: "Wavefront aberration compensation with a thermally deformable mirror", 《IOPSCIENCE》, 2 April 2012 (2012-04-02) * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112068307A (en) * | 2020-09-21 | 2020-12-11 | 中国科学院长春光学精密机械与物理研究所 | Hybrid thermally-driven wavefront correction device |
| CN112068307B (en) * | 2020-09-21 | 2021-12-07 | 中国科学院长春光学精密机械与物理研究所 | Hybrid thermally-driven wavefront correction device |
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