CN112068307A - Hybrid thermally-driven wavefront correction device - Google Patents
Hybrid thermally-driven wavefront correction device Download PDFInfo
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- CN112068307A CN112068307A CN202010996551.3A CN202010996551A CN112068307A CN 112068307 A CN112068307 A CN 112068307A CN 202010996551 A CN202010996551 A CN 202010996551A CN 112068307 A CN112068307 A CN 112068307A
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- mirror surface
- correction device
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
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Abstract
The invention discloses a hybrid thermally-driven wavefront correction device, which comprises: the heat-driven mirror comprises a tangential heating sheet, a heat-driven actuator and a moment direction retaining mechanism, wherein the tangential heating sheet is located below a mirror surface, the edge bottom of the mirror surface is provided with a plurality of heat-driven actuators and the moment direction retaining mechanism, the heat-driven actuators are used for applying edge moment to the mirror surface, the tangential heating sheet is used for applying tangential force to the mirror surface, and the moment direction retaining mechanism is used for supporting the mirror surface. The invention can realize the large-range non-dispersive wavefront astigmatism correction of the sample by no moving part, and compensate the non-uniform pupil illumination in the optical path and align the error of the optical path; in addition, the lens has the characteristics of high rigidity and good electromagnetic compatibility, can be used in more extreme environments, and then reduces the complexity of support and improves the specific rigidity of the lens body. In addition, a high-voltage operational amplifier circuit is not needed, and meanwhile, the heat conduction is based, so that the heat conduction can be kept for a long time, and the requirement on a wavefront detection system is reduced.
Description
Technical Field
The invention relates to the field of wavefront correction devices, in particular to a hybrid thermally-driven wavefront correction device.
Background
In consideration of the influence of the processing technology, environmental adaptability and assembly technology, the accuracy retention capability of the system itself is increasingly difficult to meet the requirements of future precision optical equipment on imaging quality, and an optical path compensation element is generally required to be used.
Conventional active or adaptive optics typically employ a bottom-push-pull configuration, in which the optical path is adjusted by varying the rise of the mirror. When the low-order surface form is corrected, the utilization rate of the inner ring actuator is low, the push-pull mode can generate hard penetration on the surface, and particularly, the high-frequency leakage phenomenon can occur for the low-order surface form correction. For the case of a more rigid mirror, the single actuator action introduces a uniform tilt to the overall mirror. In addition, as the aspect ratio increases, the high frequency component due to print-through increases gradually.
Therefore, how to provide a wavefront correction device to improve its application range is a technical problem that needs to be solved by those skilled in the art.
Disclosure of Invention
The invention aims to provide a hybrid thermally-driven wavefront correction device, which can effectively improve the application range of the hybrid thermally-driven wavefront correction device.
In order to solve the technical problems, the invention provides the following technical scheme:
a hybrid thermally driven wavefront correction device, comprising: the hot driving actuator is used for applying edge moment to the mirror surface, the tangential heating sheet is used for applying tangential force to the mirror surface, and the moment direction holding mechanism is used for supporting the mirror surface.
Preferably, the moment direction holding mechanism comprises a base and a supporting portion, the supporting portion is located at the bottom of the mirror surface, a concave arc-shaped surface is arranged at the upper portion of the base, and a plurality of flexible hinges are arranged between the bottom of the supporting portion and the arc-shaped surface.
Preferably, the thermally driven actuator includes two thermally driven rods located on both sides of the moment direction holding mechanism.
Preferably, a boss is arranged on the base, the arc-shaped surface is arranged on the upper portion of the boss, and an arc-shaped protrusion corresponding to the arc-shaped surface is arranged at the bottom of the supporting portion.
Preferably, the support part and the base are aluminum pieces.
Preferably, a clamping block clamped outside the tangential heating sheet is arranged above the side part of the supporting part.
Preferably, the tangential heating plates are arranged in the radial direction of the bottom of the mirror surface, and a plurality of tangential heating plates are uniformly arranged in the circumferential direction of the bottom of the mirror surface.
Compared with the prior art, the technical scheme has the following advantages:
the invention provides a hybrid thermally-driven wavefront correction device, comprising: the heat-driven mirror comprises a tangential heating sheet, a heat-driven actuator and a moment direction retaining mechanism, wherein the tangential heating sheet is located below a mirror surface, the edge bottom of the mirror surface is provided with a plurality of heat-driven actuators and the moment direction retaining mechanism, the heat-driven actuators are used for applying edge moment to the mirror surface, the tangential heating sheet is used for applying tangential force to the mirror surface, and the moment direction retaining mechanism is used for supporting the mirror surface. The invention can realize the large-range non-dispersive wavefront astigmatism correction of the sample by no moving part, and compensate the non-uniform pupil illumination in the optical path and align the error of the optical path; in addition, the lens has the characteristics of high rigidity and good electromagnetic compatibility, can be used in more extreme environments, and then reduces the complexity of support and improves the specific rigidity of the lens body. In addition, a high-voltage operational amplifier circuit is not needed, and meanwhile, the heat conduction is based, so that the heat conduction can be kept for a long time, and the requirement on a wavefront detection system is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic top view of a hybrid thermally driven wavefront correction apparatus according to one embodiment of the present invention;
FIG. 2 is a schematic bottom view of the hybrid thermally driven wavefront correction device of FIG. 1;
fig. 3 is a schematic diagram of a portion of the hybrid thermally driven wavefront correction apparatus of fig. 1.
The reference numbers are as follows:
the heating device comprises a tangential heating sheet 1, a mirror surface 2, a flexible hinge 3, a thermal drive actuator 4, a fixture block 5, a base 6 and a supporting part 7.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
In the following description, specific details are set forth in order to provide a thorough understanding of the present invention. The invention can be implemented in a number of ways different from those described herein and similar generalizations can be made by those skilled in the art without departing from the spirit of the invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.
Referring to fig. 1 to 3, fig. 1 is a schematic top view of a hybrid thermally-driven wavefront correction apparatus according to an embodiment of the present invention; FIG. 2 is a schematic bottom view of the hybrid thermally driven wavefront correction device of FIG. 1; fig. 3 is a schematic diagram of a portion of the hybrid thermally driven wavefront correction apparatus of fig. 1.
One embodiment of the present invention provides a hybrid thermally driven wavefront correction device, comprising: the heat-driven mirror comprises a tangential heating sheet, a heat-driven actuator and a moment direction retaining mechanism, wherein the tangential heating sheet is located below a mirror surface, the edge bottom of the mirror surface is provided with a plurality of heat-driven actuators and the moment direction retaining mechanism, the heat-driven actuators are used for applying edge moment to the mirror surface, the tangential heating sheet is used for applying tangential force to the mirror surface, and the moment direction retaining mechanism is used for supporting the mirror surface. Wherein the plurality of thermally driven actuators and the moment direction holding mechanism are uniformly arranged in the circumferential direction of the bottom of the edge of the mirror plate.
The embodiment of the invention adopts a mode of combining the edge moment drive and the bottom tangential drive, controls an aberration mode with more circumferential symmetry numbers through the edge drive, and aims at the condition with more radial symmetry numbers through the tangential thermal drive.
The method can select corresponding adjusting modes aiming at different space frequencies of aberration to be corrected, namely, a mode calibration method is adopted to select the tangential heating plates, specifically, one watt of power is respectively input to each tangential heating plate, further, the surface shape is detected, the sensitivity matrix is used for carrying out singular value decomposition, and an eigenmode matrix is established according to the singular value decomposition.
The invention can realize the large-range non-dispersive wavefront astigmatism correction of the sample by no moving part, and compensate the non-uniform pupil illumination in the optical path and align the error of the optical path; in addition, the lens has the characteristics of high rigidity and good electromagnetic compatibility, can be used in more extreme environments such as space and high-pressure environment, and the like, and then reduces the complexity of support and improves the specific rigidity of the lens body. In addition, a high-voltage operational amplifier circuit is not needed, and meanwhile, the heat conduction is based, so that the heat conduction can be kept for a long time, and the requirement on a wavefront detection system is reduced.
Aiming at the actual imaging process, the support can influence the spatial frequency range larger than the support spatial frequency through the dynamic response, the statics and the dynamic characteristics of a mechanical system are unified, the statics is the system gain and shows the static rigidity from the perspective of a transfer function, the dynamic characteristics are dynamic response and show the dynamic rigidity, and the system does not contain moving parts, so that the system has high resonant frequency, is insensitive to external disturbance and has wider application range.
By the moment direction holding mechanism without a moving part, accurate correction of low order aberration can be achieved. In the case where the edge is a portion where the influence of the driving deformable mirror on the mirror surface center position is rapidly attenuated, the present embodiment uses a tangential heating method as an aid. In addition, in the actual operation process, the input wavefront with correction has already removed the translation and tilt components, so the deformable mirror in this embodiment does not need to use a hard point to determine the rigid body posture.
Specifically, moment direction holding mechanism all includes base and supporting part, and the supporting part is located the mirror surface bottom, and the upper portion of base is equipped with recessed arcwall face, is equipped with a plurality of flexible hinges between supporting part bottom and the arcwall face, and wherein a plurality of flexible hinges are along the circumferencial direction evenly distributed of arcwall face.
Specifically, the thermally driven actuator includes two thermally driven rods located on both sides of the moment direction holding mechanism. The hot driving rod is preferably made of aluminum so as to improve the heat dissipation capability.
Wherein, be equipped with the boss on the base, the upper portion of boss is equipped with the arcwall face, and the supporting part bottom is equipped with the arc arch corresponding with the arcwall face. By utilizing the two opposite-deformation heat driving rods to apply the moment, and using the flexible pointing structure, the application point of the moment can be ensured to be positioned on the neutral surface of the mirror surface.
To improve the heat dissipation level, the support and the base are preferably aluminum pieces. The aluminum piece can quickly dissipate heat after the tangential heating sheet stops working, so that the problem that correction force is directly loaded on the mirror surface, the impact response obtained on the mirror surface contains higher spatial frequency components, and truncation in the operation process can generate high-frequency errors, namely the printing-through effect, is solved.
In order to facilitate the application of the edge moment, a clamping block clamped outside the tangential heating sheet is arranged above the side part of the supporting part.
In one embodiment of the invention, the tangential heating sheets are arranged in the radial direction of the bottom of the mirror surface, and a plurality of tangential heating sheets are uniformly arranged in the circumferential direction of the bottom of the mirror surface, wherein the substrate of the mirror surface can be a copper sheet or an aluminum sheet, and the tangential heating sheets can be adhered on the substrate.
It should be noted that, in this document, terms such as "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A hybrid thermally-driven wavefront correction device, comprising: the hot driving actuator is used for applying edge moment to the mirror surface, the tangential heating sheet is used for applying tangential force to the mirror surface, and the moment direction holding mechanism is used for supporting the mirror surface.
2. The hybrid thermally driven wavefront correction device of claim 1, wherein the torque direction maintaining mechanism comprises a base and a support, the support being located at a bottom of the mirror, an upper portion of the base having a concave arcuate surface, a plurality of flexible hinges being located between the bottom of the support and the arcuate surface.
3. The hybrid thermally driven wavefront correction device of claim 2, wherein the thermally driven actuator comprises two thermally driven rods located on either side of the moment direction holding mechanism.
4. The hybrid thermally driven wavefront correction device of claim 2, wherein the base has a boss, the boss has an upper portion with the curved surface, and the support has a bottom portion with a curved protrusion corresponding to the curved surface.
5. The hybrid thermally driven wavefront correction device of claim 2, wherein the support and the base are aluminum pieces.
6. The hybrid thermally driven wavefront correction device of claim 2, wherein a latch is provided above a side portion of the support portion for engaging an outer side of the tangential heating blade.
7. The hybrid thermally driven wavefront correction device of any one of claims 1 to 6, wherein the tangential heat patches are arranged in a radial direction of the mirror bottom and a plurality of the tangential heat patches are uniformly arranged in a circumferential direction of the mirror bottom.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010996551.3A CN112068307B (en) | 2020-09-21 | 2020-09-21 | Hybrid thermally-driven wavefront correction device |
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| CN202010996551.3A CN112068307B (en) | 2020-09-21 | 2020-09-21 | Hybrid thermally-driven wavefront correction device |
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| CN112068307B CN112068307B (en) | 2021-12-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023278019A1 (en) * | 2021-06-28 | 2023-01-05 | Coherent, Inc. | Thermally actuated adaptive optics |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7172299B2 (en) * | 2004-09-08 | 2007-02-06 | Xinetics, Inc. | Integrated wavefront correction module with reduced translation |
| US20110019295A1 (en) * | 2007-11-02 | 2011-01-27 | Ujf-Filiale | Deformable mirror with distributed stiffness, tool and method for producing such a mirror |
| EP2324387A1 (en) * | 2008-08-14 | 2011-05-25 | Alpao | Deformable mirror with force actuators and distributed stiffness |
| CN103744177A (en) * | 2014-01-09 | 2014-04-23 | 中国科学院光电技术研究所 | Combined wavefront corrector |
| CN103969823A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Wavefront active compensating device of optical system |
| CN104407435A (en) * | 2014-12-08 | 2015-03-11 | 中国科学院光电技术研究所 | High-correcting value low-order deformable mirror |
| JP2016031470A (en) * | 2014-07-29 | 2016-03-07 | ブラザー工業株式会社 | Manufacturing method of polygon mirror, polygon mirror, and image forming apparatus |
| CN105572861A (en) * | 2015-12-22 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Deformable rapid control integrated reflector device |
| CN206161956U (en) * | 2016-10-11 | 2017-05-10 | 宁波大学 | Combined type piezoelectricity distorting lens |
| CN107608071A (en) * | 2017-09-30 | 2018-01-19 | 中国科学院长春光学精密机械与物理研究所 | A kind of space camera reflecting mirror surface shape control system based on Temperature Distribution |
| CN109387917A (en) * | 2017-08-02 | 2019-02-26 | 业纳光学系统有限公司 | Equipment for can alternatively influence the wavefront of beam |
| CN111458834A (en) * | 2020-03-18 | 2020-07-28 | 北京空间机电研究所 | Large-caliber deformable mirror device suitable for space environment |
-
2020
- 2020-09-21 CN CN202010996551.3A patent/CN112068307B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7172299B2 (en) * | 2004-09-08 | 2007-02-06 | Xinetics, Inc. | Integrated wavefront correction module with reduced translation |
| US20110019295A1 (en) * | 2007-11-02 | 2011-01-27 | Ujf-Filiale | Deformable mirror with distributed stiffness, tool and method for producing such a mirror |
| EP2324387A1 (en) * | 2008-08-14 | 2011-05-25 | Alpao | Deformable mirror with force actuators and distributed stiffness |
| CN103744177A (en) * | 2014-01-09 | 2014-04-23 | 中国科学院光电技术研究所 | Combined wavefront corrector |
| CN103969823A (en) * | 2014-05-05 | 2014-08-06 | 中国科学院长春光学精密机械与物理研究所 | Wavefront active compensating device of optical system |
| JP2016031470A (en) * | 2014-07-29 | 2016-03-07 | ブラザー工業株式会社 | Manufacturing method of polygon mirror, polygon mirror, and image forming apparatus |
| CN104407435A (en) * | 2014-12-08 | 2015-03-11 | 中国科学院光电技术研究所 | High-correcting value low-order deformable mirror |
| CN105572861A (en) * | 2015-12-22 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Deformable rapid control integrated reflector device |
| CN206161956U (en) * | 2016-10-11 | 2017-05-10 | 宁波大学 | Combined type piezoelectricity distorting lens |
| CN109387917A (en) * | 2017-08-02 | 2019-02-26 | 业纳光学系统有限公司 | Equipment for can alternatively influence the wavefront of beam |
| CN107608071A (en) * | 2017-09-30 | 2018-01-19 | 中国科学院长春光学精密机械与物理研究所 | A kind of space camera reflecting mirror surface shape control system based on Temperature Distribution |
| CN111458834A (en) * | 2020-03-18 | 2020-07-28 | 北京空间机电研究所 | Large-caliber deformable mirror device suitable for space environment |
Non-Patent Citations (1)
| Title |
|---|
| 刘莹: ""压电变形镜控制方法及应用研究"", 《中国博士学位论文全文数据库信息科技辑》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023278019A1 (en) * | 2021-06-28 | 2023-01-05 | Coherent, Inc. | Thermally actuated adaptive optics |
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| CN112068307B (en) | 2021-12-07 |
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