CN104407435A - Large-correction-quantity low-order deformable reflector - Google Patents
Large-correction-quantity low-order deformable reflector Download PDFInfo
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- CN104407435A CN104407435A CN201410745368.0A CN201410745368A CN104407435A CN 104407435 A CN104407435 A CN 104407435A CN 201410745368 A CN201410745368 A CN 201410745368A CN 104407435 A CN104407435 A CN 104407435A
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- 239000000919 ceramic Substances 0.000 claims abstract description 8
- 238000005452 bending Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims abstract description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 4
- 238000005498 polishing Methods 0.000 claims abstract description 4
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000012937 correction Methods 0.000 abstract description 9
- 238000010521 absorption reaction Methods 0.000 abstract description 2
- 239000002210 silicon-based material Substances 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 abstract 5
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- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000002310 reflectometry Methods 0.000 abstract 1
- 230000004075 alteration Effects 0.000 description 18
- 230000003044 adaptive effect Effects 0.000 description 5
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000001447 compensatory effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- KRHYYFGTRYWZRS-DYCDLGHISA-N deuterium fluoride Chemical compound [2H]F KRHYYFGTRYWZRS-DYCDLGHISA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 125000001475 halogen functional group Chemical group 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
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Abstract
The invention discloses a large-correction-quantity low-order deformable reflector, which consists of a mirror surface, a coupling structure, a driver and a base, wherein the coupling structure comprises the following components in parts by weight: one end of each driver is fixed on a massive integral base, and the other end of each driver is connected with the mirror surface through a coupling structure. The mirror surface is made of a monocrystalline silicon material with ultra-high finish polishing, so that the high reflectivity and the low absorption coefficient of the coating film are ensured; the driver consists of a plurality of layers of piezoelectric ceramic plates or electrostrictive ceramic plates; the mount and mirror are made of the same material to match their coefficients of thermal expansion. The coupling structure acts as a flexible connection to adjust the local tilt of the mirror. When working voltage is applied, the coupling structure reduces the bending rigidity of the driver, improves the deflection capability of the mirror surface, increases the stroke of the deformable mirror, increases the interconnection value between adjacent drivers, and enhances the low-order correction capability of the deformable mirror, thereby meeting the correction requirement of a high-power laser emission system.
Description
Technical field
The invention belongs to the wavefront correction technical field of ADAPTIVE OPTICS SYSTEMS, relate to a kind of large correcting value low order deformation reflection mirror, for the ADAPTIVE OPTICS SYSTEMS of Emission Lasers, the error that in atmospheric heat halo effect and trend disturbance, laser cavity, error and optical system error etc. cause can be corrected.
Background technology
Deformation reflection mirror is one of core devices of ADAPTIVE OPTICS SYSTEMS.It realizes wavefront control and optical aberration correction by changing surperficial face shape.Deformation reflection mirror is in Laser Processing, Laser emission and transport at a distance, have important application in focusing system etc., is the gordian technique of laser beam quality and focus characteristics adaptive control.
No matter aerochemistry laser instrument or solid state laser, larger thermal deformation problem is all there is in high-power output situation, the people such as U.S. David are once at document " High-Energy Hydrogen Fluoride/Deuterium Fluoride Laser BeamCorrection:History and Iaaues " 2006, the aberration that chemical laser has various room and time composition is proposed, wherein the aberration composition of low spatial frequency accounts for fundamental component, domestic ice of being permitted is at article " PRELIMINARY RESULTS that Hartmann wave front sensor is measured COIL laser beam quality " 1996, Yang Ping measures aerochemistry laser instrument and solid state laser aberration respectively in the magazines such as OPTICS EXPRESS, measurement result shows, due to reasons such as thermal deformations, a large amount of significantly low order aberration is there is in Laser Output Beam, these aberrations show as out of focus in Zernike aberration, the low order compositions such as astigmatism.These low orders significantly aberration need to be eliminated by the method for adaptive optics compensatory control, and it is little as far as possible to require to correct rear residual error.
Traditional discrete formula continuous surface deformable catoptron described in patent ZL2007100833867, is made up of minute surface, driver and base.Minute surface is directly connected with driver, as shown in Figure 1.Driver produces axial stretching under impressed voltage effect, thus promotes minute surface generation local deformation.The main performance index of discrete continuous surface deformable catoptron is stroke and commissure value.Under the prerequisite ensureing mirror commissure value, the stroke of mirror is subject to the restriction of minute surface permissible stress, by the Matching and modification to minute surface thickness and driver rigidity, equilateral triangle arranging distance is the range of the distorting lens of the Ф 14 driver composition of 20.5 is 6um, commissure value is 9.5%, cannot meet the correction demand of significantly low order aberration.
Novel deformable mirror, as two piezoelectric deforming reflection mirror can produce large correcting value aberration, and there is good low order aberration calibration result, Zhou Hong studies in great detail this deformation reflection mirror in PhD dissertation " research of double-piezoelectric plate deformed reflecting mirror Developing Application ", find to utilize this malformation catoptron can produce deflection more than 10um, but, as shown in Figure 2, due to the special construction of mirror, the expansion coefficient of its specular material adopted and driving layer material can not mate, and makes this mirror very responsive to temperature variation.In high-power laser system, the temperature rise that laser beam heats causes can cause very large distortion, is not suitable for the laser beam control field for high power density.
The present invention proposes a kind of novel large correcting value low order deformation reflection mirror, this mirror can obtain the similar performance of two piezoelectric deforming reflection mirror, large correcting value aberration can either be produced, and there is good low order aberration calibration result, possesses the insensitive characteristic of temperature variation simultaneously, overcome the deficiency of traditional mirror, successfully solve the low order aberration Correction Problems in high power laser.
Summary of the invention
The object of the invention is to devise a kind of novel large correcting value low order deformation reflection mirror, large correcting value aberration can either be produced, there is again good low order aberration calibration result, possess the insensitive characteristic of temperature variation simultaneously, be successfully applied in high power laser emission coefficient.
The technical solution adopted in the present invention is: a kind of large correcting value low order deformation reflection mirror, is made up of minute surface, coupled structure, driver and base; Be connected by coupled structure between driver and minute surface, coupled structure regulates the local dip of minute surface as flexibly connecting; One end of driver is fixed on rigid base, and the other end is connected with minute surface by coupled structure; Described coupled structure is as flexibly connecting the local dip and commissure value that regulate minute surface: when an operated voltage is applied, coupled structure reduces the bending stiffness of driver, improve the deflection ability of minute surface, increase the stroke of deformation reflection mirror, simultaneously, coupled structure increases the commissure value between neighboring actuators, enhances the low order calibration capability of deformation reflection mirror.
Further, minute surface uses the monocrystalline silicon of superelevation smooth finish polishing.
Further, driver is made up of multilayer piezoelectric ceramic sheet or electrostriction ceramics sheet.
Further, minute surface and base use identical material to mate its thermal expansivity.
The advantage that this technology compared with prior art has:
1) novel large correcting value low order deformation reflection mirror disclosed in this invention, compared with ZL2007100833867, the bending stiffness relative specular (1) of driver (3) is less, the stroke of deformation reflection mirror increases substantially, and solves the significantly aberration correction problem of high power laser.
2) novel large correcting value low order deformation reflection mirror disclosed in this invention, owing to have employed coupled structure (2), the commissure value of distorting lens increases, and solves the low order Correction Problems of high power laser.
3) novel large correcting value low order deformation reflection mirror disclosed in this invention, compared with two piezoelectric deforming reflection mirror, possesses the insensitive characteristic of temperature variation.
Accompanying drawing explanation
Fig. 1 is traditional discrete formula deformation reflection mirror structural representation;
Fig. 2 is two piezoelectric deforming reflection mirror structural representations;
Fig. 3 is large correcting value low order deformation reflection mirror structure principle chart;
Fig. 4 is large correcting value low order deformation reflection mirror connection diagram;
Fig. 5 is 85 unit low order large correcting value deformation reflection mirror arrangement schematic diagram.
In figure, 1 is minute surface, and 2 is coupled structure, and 3 is driver, and 4 is base, and 5 for driving layer.
Embodiment
The present invention is further illustrated below in conjunction with accompanying drawing and specific embodiment.
As shown in Figure 3, described large correcting value low order deformation reflection mirror is made up of minute surface 1, coupled structure 2, driver 3 and base 4 four parts.One end of driver 3 is fixed on rigid base 4, and the other end is connected with minute surface 1 by coupled structure 2.
Described coupled structure 2 is as flexibly connecting the local dip and commissure value that regulate minute surface 1: when an operated voltage is applied, coupled structure 2 reduces the bending stiffness of driver 3, improve the deflection ability of minute surface 1, increase the stroke of deformation reflection mirror, simultaneously, coupled structure 2 increases the commissure value between neighboring actuators 3, enhances the low order calibration capability of deformation reflection mirror.In some cases, coupled structure 2 should make an one-piece construction with minute surface 1.
Described minute surface 1 is continuous mirror surface 1, adopts the single crystal silicon material of superelevation smooth finish polishing, ensure that the high reflectance and low absorption coefficient that are coated with rete.Minute surface 1 and base 4 adopt identical material to mate its thermal expansivity.
Described driver 3 is made up of multilayer piezoelectric ceramic sheet or electrostriction ceramics sheet.Electrode between the control voltage supplying layer of driver 3.Connected by coupled structure 2 between the top of each driver 3 and minute surface 1.
Below in conjunction with Fig. 4, embodiment is described.
The large correcting value deformation reflection mirror of low order, comprises minute surface 1, coupled structure 2, driver 3 and base 4.One end of driver 3 is fixed on base 4, and the other end is connected with minute surface 1 by coupled structure 2.When applying voltage, driver 3 is subjected to displacement, and drives minute surface 1 that controlled local deformation occurs by coupled structure 2.Coupled structure 2 reduces the bending stiffness of driver 3, improves the deflection ability of minute surface 1, increases the stroke of deformation reflection mirror, and meanwhile, coupled structure 2 increases the commissure value between neighboring actuators 3, enhances the low order calibration capability of deformation reflection mirror.
Develop the large correcting value deformation reflection mirror of 85 unit low order of also successful Application as shown in Figure 5 in this way.Driver is Φ 14 driver, and die opening is 20.5mm, and the stroke of distorting lens is 12um, and the stroke of comparing traditional discrete formula distorting lens is doubled; Its commissure value also significantly improves simultaneously, meets the correction demand of large correcting value low order aberration.
Non-elaborated part of the present invention belongs to the known technology of those skilled in the art.
Claims (4)
1. a large correcting value low order deformation reflection mirror, is characterized in that: be made up of minute surface (1), coupled structure (2), driver (3) and base (4); Be connected by coupled structure (2) between driver (3) and minute surface (1), coupled structure (2) is as flexibly connecting the local dip regulating minute surface (1); One end of driver (3) is fixed on rigid base (4), and the other end is connected with minute surface (1) by coupled structure (2); Described coupled structure (2) is as flexibly connecting the local dip and commissure value that regulate minute surface (1): when an operated voltage is applied, coupled structure (2) reduces the bending stiffness of driver (3), improve the deflection ability of minute surface (1), increase the stroke of deformation reflection mirror, simultaneously, coupled structure (2) increases the commissure value between neighboring actuators (3), enhances the low order calibration capability of deformation reflection mirror.
2. one according to claim 1 large correcting value low order deformation reflection mirror, is characterized in that: minute surface (1) uses the monocrystalline silicon of superelevation smooth finish polishing.
3. one according to claim 1 large correcting value low order deformation reflection mirror, is characterized in that: driver (3) is made up of multilayer piezoelectric ceramic sheet or electrostriction ceramics sheet.
4. one according to claim 1 large correcting value low order deformation reflection mirror, is characterized in that: minute surface (1) and base (4) use identical material to mate its thermal expansivity.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410745368.0A CN104407435A (en) | 2014-12-08 | 2014-12-08 | Large-correction-quantity low-order deformable reflector |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410745368.0A CN104407435A (en) | 2014-12-08 | 2014-12-08 | Large-correction-quantity low-order deformable reflector |
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| CN104407435A true CN104407435A (en) | 2015-03-11 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105572861A (en) * | 2015-12-22 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Deformable rapid control integrated reflector device |
| GB2533906A (en) * | 2014-10-08 | 2016-07-13 | Applied Mat Tech | Reflecting devices |
| CN107340593A (en) * | 2017-08-14 | 2017-11-10 | 太仓宏微电子科技有限公司 | A kind of tunable distorting lens of Piezoelectric Driving |
| CN111352233A (en) * | 2020-04-30 | 2020-06-30 | 中国科学院光电技术研究所 | High-thermal-disturbance-resistance aspheric surface deformation reflector and development method thereof |
| CN112068307A (en) * | 2020-09-21 | 2020-12-11 | 中国科学院长春光学精密机械与物理研究所 | Hybrid thermally-driven wavefront correction device |
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|---|---|---|---|---|
| US20030107796A1 (en) * | 2001-12-12 | 2003-06-12 | Diehl Munitonssysteme Gmbh & Co. Kg | Deformable mirror |
| CN101063748A (en) * | 2007-04-24 | 2007-10-31 | 中国地质大学（武汉） | Deformable reflecting mirror driven by laser |
| JP2010107658A (en) * | 2008-10-29 | 2010-05-13 | Mitsubishi Electric Corp | Variable shape mirror device |
| CN103268013A (en) * | 2013-06-06 | 2013-08-28 | 清华大学 | Deformable mirror |
-
2014
- 2014-12-08 CN CN201410745368.0A patent/CN104407435A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030107796A1 (en) * | 2001-12-12 | 2003-06-12 | Diehl Munitonssysteme Gmbh & Co. Kg | Deformable mirror |
| CN101063748A (en) * | 2007-04-24 | 2007-10-31 | 中国地质大学（武汉） | Deformable reflecting mirror driven by laser |
| JP2010107658A (en) * | 2008-10-29 | 2010-05-13 | Mitsubishi Electric Corp | Variable shape mirror device |
| CN103268013A (en) * | 2013-06-06 | 2013-08-28 | 清华大学 | Deformable mirror |
Non-Patent Citations (1)
| Title |
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| 周虹: "双压电片变形反射镜研制与应用研究", 《中国博士学位论文全文数据库基础科学辑》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2533906A (en) * | 2014-10-08 | 2016-07-13 | Applied Mat Tech | Reflecting devices |
| CN105572861A (en) * | 2015-12-22 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Deformable rapid control integrated reflector device |
| CN107340593A (en) * | 2017-08-14 | 2017-11-10 | 太仓宏微电子科技有限公司 | A kind of tunable distorting lens of Piezoelectric Driving |
| CN111352233A (en) * | 2020-04-30 | 2020-06-30 | 中国科学院光电技术研究所 | High-thermal-disturbance-resistance aspheric surface deformation reflector and development method thereof |
| CN112068307A (en) * | 2020-09-21 | 2020-12-11 | 中国科学院长春光学精密机械与物理研究所 | Hybrid thermally-driven wavefront correction device |
| CN112068307B (en) * | 2020-09-21 | 2021-12-07 | 中国科学院长春光学精密机械与物理研究所 | Hybrid thermally-driven wavefront correction device |
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Application publication date: 20150311 |